CN221094374U - Multi-electrode synchronous lifting mechanism of single crystal furnace - Google Patents
Multi-electrode synchronous lifting mechanism of single crystal furnace Download PDFInfo
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- CN221094374U CN221094374U CN202323029281.7U CN202323029281U CN221094374U CN 221094374 U CN221094374 U CN 221094374U CN 202323029281 U CN202323029281 U CN 202323029281U CN 221094374 U CN221094374 U CN 221094374U
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- 230000007246 mechanism Effects 0.000 title claims abstract description 55
- 239000013078 crystal Substances 0.000 title claims abstract description 17
- 230000001360 synchronised effect Effects 0.000 title claims abstract description 14
- 239000003638 chemical reducing agent Substances 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The utility model relates to a multi-electrode synchronous lifting mechanism of a single crystal furnace, which structurally comprises an electrode guiding mechanism, a lifting driving mechanism and a lifting guiding mechanism which are arranged on the bottom surface of a furnace chassis, wherein the lifting driving mechanism is connected with the electrode guiding mechanism and the lifting guiding mechanism, the electrode guiding mechanism is more than two, each electrode guiding mechanism comprises an electrode, all the electrodes are connected with a heater above the furnace chassis, the lifting guiding mechanism comprises a sliding plate, linear bearings and guiding shafts, all the electrodes are connected with the same sliding plate at the position close to the bottom end, more than two linear bearings are arranged on the sliding plate, each linear bearing is connected with a guiding shaft in a lifting mode, the top ends of the guiding shafts are fixed on the bottom surface of the furnace chassis, and the bottom ends of all the guiding shafts are fixed on a bottom fixing plate. The lifting of the electrode is driven by the sliding plate, and the sliding plate slides along the plurality of guide shafts through the linear bearings, so that the stability can be ensured, and the shaking can be avoided.
Description
Technical Field
The utility model relates to a multi-electrode synchronous lifting mechanism of a single crystal furnace, and belongs to the technical field of single crystal furnaces.
Background
In a single crystal furnace, it is necessary to control the elevation of a heater connected to a plurality of electrodes in a furnace chamber for heating, the plurality of electrodes being used as the heater.
In the prior art, a structure for controlling the lifting of the heater in the single crystal furnace is swayed when the heater is lifted, and the stability is insufficient, so that adverse effects can be generated on the thermal field inside the single crystal furnace, and the production stability is influenced.
Disclosure of utility model
The utility model provides a multi-electrode synchronous lifting mechanism of a single crystal furnace, which aims to overcome the defects in the prior art and improve the lifting stability of a motor.
The technical solution of the utility model is as follows: the utility model provides a synchronous elevating system of single crystal growing furnace multiple electrode, its structure includes electrode guiding mechanism, lift actuating mechanism and lift guiding mechanism of installing on the stove chassis bottom surface, lift actuating mechanism connects electrode guiding mechanism and lift guiding mechanism, electrode guiding mechanism is more than two altogether, every electrode guiding mechanism includes an electrode, all electrodes are connected with the heater of stove chassis top, lift guiding mechanism includes the sliding plate, linear bearing and guiding axle, all electrodes are close to bottom department and connect same sliding plate, be equipped with more than two linear bearing on the sliding plate, every linear bearing lifts and connects a guiding axle, the guiding axle top is fixed on the stove chassis bottom surface, all guiding axle bottom fixing is on the bottom fixed plate. The lifting of the electrode is driven by the sliding plate, and the sliding plate slides along the plurality of guide shafts through the linear bearings, so that the stability can be ensured, and the shaking can be avoided.
Preferably, the lifting driving mechanism comprises a servo motor speed reducer and a speed reducer which are arranged on the bottom surface of the furnace chassis, wherein the output end of the servo motor speed reducer is connected with a steering gear, the steering gear is connected with the speed reducer through a connecting shaft and a coupling, the output end of the servo motor speed reducer and the output end of the speed reducer are respectively connected with two sides of a bottom fixing plate through a screw rod, and the two screw rods are respectively connected with two sides of a sliding plate through a nut. The servo motor speed reducer, the steering gear, the connecting shaft, the coupling and the speed reducer are synchronously connected, and two sets of screw rod nuts are matched, so that the two sides of the sliding plate can be directly driven to lift, the two sides of the sliding plate can be synchronously lifted, the stress uniformity is improved, and shaking is further avoided.
Preferably, the electrode guiding mechanism further comprises a guiding sleeve wrapped on the outer side of the electrode and a corrugated pipe wrapped on the outer side of the guiding sleeve, and the top end of the corrugated pipe is fixed on the bottom surface of the furnace chassis. The bellows can realize internal vacuum sealing when the electrode is lifted.
Preferably, the top end of the guide sleeve is provided with heat insulation ceramic. The heat-insulating ceramic can prevent the guide sleeve from bearing high temperature.
The utility model has the advantages that: the structure design is reasonable, the heater in the furnace chamber is driven to synchronously lift through the plurality of electrodes, the plurality of electrodes can be driven to stably lift under the heavy-load environment only by one motor, the shaking is avoided, and the adverse effect of the shaking of the electrodes on the thermal field in the equipment can be effectively avoided.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure of a multi-electrode synchronous lifting mechanism of a single crystal furnace.
Fig. 2 is a schematic diagram of a front view structure of a multi-electrode synchronous lifting mechanism of the single crystal furnace.
Fig. 3 is a bottom view of fig. 2.
Fig. 4 is a side view of fig. 3.
Fig. 5 is a view in the A-A direction of fig. 2.
Fig. 6 is a B-B view of fig. 2.
Fig. 7 is a C-C cross-sectional view of fig. 2.
In the figure, 1 is a hearth plate, 2 is an electrode, 3 is a sliding plate, 4 is a linear bearing, 5 is a guide shaft, 6 is a bottom fixing plate, 7 is a servo motor speed reducer, 8 is a speed reducer, 9 is a steering gear, 10 is a connecting shaft and a coupling, 11 is a screw rod, 12 is a guide sleeve, 13 is a corrugated pipe, and 14 is heat-insulating ceramic.
Detailed Description
The present utility model will be described in further detail with reference to examples and embodiments.
As shown in figures 1-7, the multi-electrode synchronous lifting mechanism of the single crystal furnace structurally comprises four electrode guiding mechanisms, a lifting driving mechanism and lifting guiding mechanisms, wherein the electrode guiding mechanisms, the lifting driving mechanism and the lifting guiding mechanisms are arranged on the bottom surface of a furnace chassis 1, and the lifting driving mechanism is connected with the electrode guiding mechanisms and the lifting guiding mechanisms.
Each electrode guiding mechanism comprises an electrode 2, four electrodes 2 are connected with a heater (not shown) above the furnace chassis 1, each lifting guiding mechanism comprises a sliding plate 3, a spool bearing 4 and a guiding shaft 5, the four electrodes 2 are connected with the same sliding plate 3 near the bottom end, four linear bearings 4 are mounted on the sliding plate 3, each linear bearing 4 is connected with one guiding shaft 5 in a lifting mode, the top ends of the guiding shafts 5 are fixed on the bottom surface of the furnace chassis 1, and the bottom ends of the four guiding shafts 5 are fixed on a bottom fixing plate 6. The lifting of the electrode 2 is driven by the sliding plate 3, and the sliding plate 3 slides along the four guide shafts 5 through the linear bearings 4 in a lifting manner, so that the stability can be ensured, and shaking is avoided.
The lifting driving mechanism comprises a servo motor speed reducer 7 and a speed reducer 8 which are arranged on the bottom surface of the furnace chassis 1, wherein the output end of the servo motor speed reducer 7 is connected with a steering gear 9, the steering gear 9 is connected with the speed reducer 8 through a connecting shaft and a coupling 10, the output end of the servo motor speed reducer 7 and the output end of the speed reducer 8 are respectively connected with two sides of a bottom fixing plate 6 through a screw rod 11, and the two screw rods 11 are respectively connected with two sides of a sliding plate 3 through a nut. The driving of lifting of the four electrodes 2 can be realized through one servo motor speed reducer 7, and specifically, the servo motor speed reducer 7, the steering gear 9, the connecting shaft, the coupling 10 and the speed reducer 8 are synchronously connected, and two sets of screw rod nuts are matched, so that the two sides of the sliding plate 3 can be directly driven to lift, the synchronous lifting of the two sides is realized, the stress uniformity is effectively improved, and shaking is avoided.
The electrode guiding mechanism also comprises a guiding sleeve 12 wrapped on the outer side of the electrode 2 and a corrugated pipe 13 wrapped on the outer side of the guiding sleeve 12, the top end of the corrugated pipe 13 is fixed on the bottom surface of the furnace chassis 1, and the top end of the guiding sleeve 12 is provided with heat-insulating ceramic 5. The corrugated tube 13 can realize internal vacuum sealing when the electrode 2 is lifted and lowered, and the heat insulation ceramic 5 can prevent the guide sleeve 12 from bearing high temperature.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.
Claims (4)
1. The utility model provides a synchronous elevating system of single crystal furnace multiple electrode, a serial communication port, including installing electrode guiding mechanism on furnace chassis (1) bottom surface, lift actuating mechanism and lift guiding mechanism, electrode guiding mechanism and lift guiding mechanism are connected to lift actuating mechanism, electrode guiding mechanism is total more than two, every electrode guiding mechanism includes an electrode (2), all electrode (2) are connected with the heater of furnace chassis (1) top, lift guiding mechanism includes sliding plate (3), wire bearing (4) and guiding axle (5), all electrode (2) are close to bottom department and connect same sliding plate (3), be equipped with more than two linear bearing (4) on sliding plate (3), every linear bearing (4) lift is connected a guiding axle (5), guiding axle (5) top is fixed on furnace chassis (1) bottom surface, all guiding axle (5) bottom are fixed on bottom fixed plate (6).
2. The multi-electrode synchronous lifting mechanism of the single crystal furnace according to claim 1, wherein the lifting driving mechanism comprises a servo motor speed reducer (7) and a speed reducer (8) which are arranged on the bottom surface of a furnace chassis (1), the output end of the servo motor speed reducer (7) is connected with a steering gear (9), the steering gear (9) is connected with the speed reducer (8) through a connecting shaft and a coupling (10), the output end of the servo motor speed reducer (7) and the output end of the speed reducer (8) are respectively connected with two sides of a bottom fixing plate (6) through a screw rod (11), and the two screw rods (11) are respectively connected with two sides of a sliding plate (3) through a nut.
3. The multi-electrode synchronous lifting mechanism of the single crystal furnace according to claim 1, wherein the electrode guiding mechanism further comprises a guiding sleeve (12) wrapped on the outer side of the electrode (2) and a corrugated pipe (13) wrapped on the outer side of the guiding sleeve (12), and the top end of the corrugated pipe (13) is fixed on the bottom surface of the furnace chassis (1).
4. A multi-electrode synchronous lifting mechanism of a single crystal furnace according to claim 3, wherein the top end of the guide sleeve (12) is provided with heat insulation ceramic (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323029281.7U CN221094374U (en) | 2023-11-09 | 2023-11-09 | Multi-electrode synchronous lifting mechanism of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323029281.7U CN221094374U (en) | 2023-11-09 | 2023-11-09 | Multi-electrode synchronous lifting mechanism of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221094374U true CN221094374U (en) | 2024-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323029281.7U Active CN221094374U (en) | 2023-11-09 | 2023-11-09 | Multi-electrode synchronous lifting mechanism of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221094374U (en) |
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2023
- 2023-11-09 CN CN202323029281.7U patent/CN221094374U/en active Active
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