CN221062220U - Waste gas filtering structure - Google Patents
Waste gas filtering structure Download PDFInfo
- Publication number
- CN221062220U CN221062220U CN202322017994.5U CN202322017994U CN221062220U CN 221062220 U CN221062220 U CN 221062220U CN 202322017994 U CN202322017994 U CN 202322017994U CN 221062220 U CN221062220 U CN 221062220U
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- China
- Prior art keywords
- air outlet
- transmission shaft
- active carbon
- filtering structure
- carbon filter
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- 238000001914 filtration Methods 0.000 title claims abstract description 32
- 239000002912 waste gas Substances 0.000 title abstract description 29
- 230000005540 biological transmission Effects 0.000 claims abstract description 52
- 238000003756 stirring Methods 0.000 claims abstract description 39
- 239000007864 aqueous solution Substances 0.000 claims abstract description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000007789 sealing Methods 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 11
- 239000007789 gas Substances 0.000 abstract description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 239000002699 waste material Substances 0.000 abstract description 8
- 239000000126 substance Substances 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 description 13
- 239000000243 solution Substances 0.000 description 10
- 238000005245 sintering Methods 0.000 description 9
- 239000002341 toxic gas Substances 0.000 description 7
- 231100000331 toxic Toxicity 0.000 description 6
- 230000002588 toxic effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 241000883990 Flabellum Species 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses an exhaust gas filtering structure, comprising: the inside box that has aqueous solution of storage is provided with an intake pipe, an air outlet corresponding with air inlet, air outlet for the inside one side of box at the case lid, is provided with a plurality of active carbon filter screen in the inside of air outlet and along the length direction of air outlet, is provided with a second bearing frame with concentric mode fixedly connected with between the inner wall of air outlet, is provided with a sealed bearing in the central point of active carbon filter screen, is connected with a transmission shaft jointly between second bearing frame and the sealed bearing, is located the below of active carbon filter screen and is provided with a rabbling mechanism on the circumference outer wall of transmission shaft, is provided with a driving motor that is used for driving transmission shaft pivoted at the top of case lid. The waste gas filtering structure can stir and mix the aqueous solution, and the flowing water flow can disperse heat and water-soluble waste and can also adsorb and filter insoluble substances, so that the integral filtering efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to an exhaust gas filtering structure.
Background
In the assembly and welding production of semiconductors, a sintering furnace is used for processing. The sintering furnace is special equipment for obtaining the required physical and mechanical properties and microstructure of the powder compact through sintering, and can be used for drying slurry on a silicon wafer, removing organic components in the slurry and completing aluminum back surface field and grid line sintering. In the sintering process of the sintering furnace, a large amount of harmful gases are generated, if the harmful gases cannot be effectively treated, the harmful gases are discharged into the atmosphere, and serious pollution is caused to the air, and although the sintering furnace with an exhaust gas treatment mechanism is also available in the market at present, for example, the exhaust gas of the sintering furnace is led into a box body storing an aqueous solution through a gas pipe, and water-soluble wastes, dust and the like in the exhaust gas are absorbed by the aqueous solution, so that the exhaust gas is filtered.
In the process of introducing the waste gas, the water solution near the gas pipe can preferentially absorb heat and water-soluble waste, but because the disturbance effect of bubbles on the water solution is limited, the heat and water-soluble waste is easy to accumulate near the gas pipe, insoluble substances in the waste gas can be discharged along with the bubbles, and the overall filtering efficiency is poor.
Disclosure of Invention
The utility model aims to provide an exhaust gas filtering structure which can be used for stirring and mixing aqueous solution, dispersing heat and water-soluble waste by flowing water flow, and absorbing and filtering insoluble substances, so that the overall filtering efficiency is improved.
In order to achieve the above purpose, the utility model adopts the following technical scheme: an exhaust gas filtering structure comprising: the water tank comprises a tank body with an aqueous solution stored therein, wherein the top of the tank body is provided with a tank cover with an air inlet and an air outlet, and an air inlet pipe and an air outlet cylinder are arranged on one side of the tank cover opposite to the interior of the tank body and corresponding to the air inlet and the air outlet;
The lower end of the air inlet pipe is positioned below the liquid level of the aqueous solution, the lower end of the air outlet cylinder is positioned above the liquid level of the aqueous solution, and a plurality of active carbon filter screens are arranged inside the air outlet cylinder and along the length direction of the air outlet cylinder;
A second bearing is fixedly connected between the inner walls of the air outlets in a concentric mode, a sealing bearing is arranged at the central position of the active carbon filter screen, a transmission shaft is connected between the second bearing and the sealing bearing, a stirring mechanism is arranged on the peripheral outer wall of the transmission shaft and positioned below the active carbon filter screen, and a driving motor for driving the transmission shaft to rotate is arranged at the top of the box cover.
The further improved scheme in the technical scheme is as follows:
1. In the above-mentioned scheme, rabbling mechanism further includes lantern ring, stirring leaf, the fixed cover of lantern ring is established on the outer wall of transmission shaft, and follows the circumference outer wall interval of lantern ring is provided with a plurality of stirring leaf, passes through connecting rod fixed connection between this stirring leaf and the lantern ring.
2. In the above scheme, the stirring mechanism is provided with two stirring mechanisms, and the stirring mechanisms are arranged at intervals along the length direction of the transmission shaft.
3. In the above scheme, be located the top of active carbon filter screen and follow the circumference outer wall of transmission shaft is provided with a plurality of flabellum.
4. In the scheme, a sealing rubber gasket is arranged between the box body and the box cover.
5. In the scheme, a first bearing seat is arranged in the box body and below the air outlet, and the lower end of the transmission shaft is inserted into the inner ring of the first bearing seat.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
The utility model relates to an exhaust gas filtering structure, which is characterized in that an air inlet pipe and an air outlet are arranged on one side of a box cover opposite to the inside of a box body and corresponding to an air inlet and an air outlet, a plurality of active carbon filter screens are arranged in the air outlet and along the length direction of the air outlet, a second bearing seat is fixedly connected between the inner walls of the air outlet in a concentric manner, a transmission shaft is connected to the second bearing seat, a stirring mechanism is arranged on the circumferential outer wall of the transmission shaft and below the active carbon filter screens, exhaust gas is led into the liquid level of aqueous solution through the air inlet pipe, water-soluble substances in high-temperature exhaust gas are absorbed by the aqueous solution, a driving motor drives the transmission shaft to rotate, so that the stirring mechanism stirs and mixes the aqueous solution, the flowing water flow can disperse heat and water-soluble wastes, the whole filtering efficiency is improved, the filtered gas is led out through the air outlet and is adsorbed and filtered again through the active carbon filter screens, and the whole filtering effect is improved.
Drawings
FIG. 1 is a schematic diagram of an exhaust gas filtering structure according to the present utility model;
FIG. 2 is a schematic view of the internal structure of the exhaust gas filtering structure of the present utility model;
fig. 3 is a schematic partial structure of the exhaust gas filtering structure of the present utility model.
In the above figures: 1. a case; 2. sealing a rubber pad; 3. an air outlet; 4. a case cover; 5. a transmission shaft; 6. a driving motor; 7. stirring the leaves; 8. a first bearing seat; 9. a second bearing seat; 10. a fan blade; 11. an active carbon filter screen; 12. a connecting block; 13. sealing the bearing; 14. an air inlet; 15. an air inlet pipe; 16. an air outlet tube; 17. a motor bracket; 18. a collar; 19. and (5) connecting a rod.
Detailed Description
The present patent will be further understood by the specific examples given below, which are not intended to be limiting.
Example 1: an exhaust gas filtering structure comprising: a box body 1 with an aqueous solution stored therein, the aqueous solution is used for absorbing water-soluble substances in the exhaust gas, a box cover 4 with an air inlet 14 and an air outlet 3 is arranged at the top of the box body 1, an air inlet pipe 15 and an air outlet cylinder 16 are arranged at one side of the box cover 4 opposite to the interior of the box body 1 and corresponding to the air inlet 14 and the air outlet 3, the exhaust gas is led in from the air inlet pipe at the air inlet, and the filtered exhaust gas is discharged from the air outlet;
The lower end of the air inlet pipe 15 is positioned below the liquid level of the aqueous solution, the lower end of the air outlet cylinder 16 is positioned above the liquid level of the aqueous solution, and a plurality of activated carbon filter screens 11 are arranged inside the air outlet cylinder 16 and along the length direction of the air outlet cylinder 16;
The waste gas is contacted with the aqueous solution, the high temperature and the water-soluble toxic impurities in the waste gas are respectively cooled and dissolved, the insoluble toxic gas impurities can be continuously discharged above the aqueous solution along with the gas, when the gas pressure in the box body is greater than the external gas pressure, the waste gas flows in a plurality of active carbon filter screens in sequence, the insoluble toxic gas impurities in the waste gas can be adsorbed by the active carbon, and the insoluble toxic gas impurities in the waste gas are further treated;
A second bearing 9 is fixedly connected between the inner walls of the air outlet 3 in a concentric manner, a sealing bearing 13 is arranged at the central position of the active carbon filter screen 11, a transmission shaft 5 is commonly connected between the second bearing 9 and the sealing bearing 13, a stirring mechanism is arranged on the circumferential outer wall of the transmission shaft 5 and positioned below the active carbon filter screen 11, and a driving motor 6 for driving the transmission shaft 5 to rotate is arranged at the top of the box cover 4;
The driving motor is started, the driving motor drives the stirring blades to rotate through the transmission shaft, the stirring blades rotate to drive the aqueous solution to flow, the flowing aqueous solution drives high temperature and water-soluble toxic impurities to flow and disperse to different positions, the efficiency of continuously treating the high temperature and water-soluble toxic impurities in the waste gas is improved, and part of insoluble toxic gas impurities can be adhered to the water solution.
The stirring mechanism further comprises a sleeve ring 18 and stirring blades 7, wherein the sleeve ring 18 is fixedly sleeved on the outer wall of the transmission shaft 5, a plurality of stirring blades 7 are arranged along the circumferential outer wall of the sleeve ring 18 at intervals, and the stirring blades 7 are fixedly connected with the sleeve ring 18 through connecting rods 19.
The stirring mechanisms are arranged in two, and are arranged at intervals along the length direction of the transmission shaft 5.
A plurality of fan blades 10 are arranged above the active carbon filter screen 11 and along the circumferential outer wall of the transmission shaft 5.
A first bearing seat 8 is arranged inside the box body 1 and below the air outlet 3, and the lower end of the transmission shaft 5 is inserted into the inner ring of the first bearing seat 8.
A plurality of connecting blocks 12 are arranged between the inner wall of the air outlet 3 and the outer wall of the second bearing seat 9.
A motor bracket 17 is arranged between the shell of the driving motor 6 and the top of the box cover 4, and is used for fixing the driving motor above the box cover, so that the stability of the driving motor during working is improved.
The driving motor 6 is connected with the transmission shaft 5 through a shaft coupler.
Example 2: an exhaust gas filtering structure comprising: the box body 1 is internally stored with an aqueous solution, the aqueous solution is used for absorbing water-soluble substances in waste gas, the top of the box body 1 is provided with a box cover 4 with an air inlet 14 and an air outlet 3, and one side of the box cover 4 opposite to the interior of the box body 1 is provided with an air inlet pipe 15 and an air outlet cylinder 16 corresponding to the air inlet 14 and the air outlet 3;
The lower end of the air inlet pipe 15 is positioned below the liquid level of the aqueous solution, the lower end of the air outlet cylinder 16 is positioned above the liquid level of the aqueous solution, and a plurality of activated carbon filter screens 11 are arranged inside the air outlet cylinder 16 and along the length direction of the air outlet cylinder 16;
A second bearing 9 is fixedly connected between the inner walls of the air outlet 3 in a concentric manner, a sealing bearing 13 is arranged at the central position of the active carbon filter screen 11, a transmission shaft 5 is commonly connected between the second bearing 9 and the sealing bearing 13, a stirring mechanism is arranged on the circumferential outer wall of the transmission shaft 5 and positioned below the active carbon filter screen 11, and a driving motor 6 for driving the transmission shaft 5 to rotate is arranged at the top of the box cover 4;
Leading-in aqueous solution's of waste gas liquid level between through the intake pipe for the water-soluble material in the high temperature waste gas is absorbed by aqueous solution, and driving motor drives the transmission shaft rotation, makes rabbling mechanism stir the solution, can stir the mixture to aqueous solution, and the rivers that flow can be with heat, water-soluble waste dispersion, has promoted holistic filtration efficiency, can also export the gas after filtering through the venthole, and adsorb the filtration once more through the active carbon filter screen, has improved holistic filter effect.
The stirring mechanism further comprises a sleeve ring 18 and stirring blades 7, wherein the sleeve ring 18 is fixedly sleeved on the outer wall of the transmission shaft 5, a plurality of stirring blades 7 are arranged along the circumferential outer wall of the sleeve ring 18 at intervals, and the stirring blades 7 are fixedly connected with the sleeve ring 18 through connecting rods 19.
The stirring mechanisms are arranged in two, and are arranged at intervals along the length direction of the transmission shaft 5.
A plurality of fan blades 10 are arranged above the active carbon filter screen 11 and along the peripheral outer wall of the transmission shaft 5, and the transmission shaft drives the fan blades to synchronously rotate along with the rotation of the transmission shaft, so that the flow of gas is conveniently driven.
The sealing rubber gasket 2 is arranged between the box body 1 and the box cover 4, the sealing property of connection between the box body and the box cover is improved by the sealing rubber gasket, waste gas is prevented from seeping out from a gap between the box body and the box cover, and the stability of waste gas treatment is improved.
The inside of the box body 1 and the lower part of the air outlet 3 are provided with a first bearing seat 8, the lower end of the transmission shaft 5 is inserted into the inner ring of the first bearing seat 8, the first bearing seat plays a limiting role on the bottom end of the transmission shaft, the transmission shaft is prevented from shifting in position during rotation, and the stability of the transmission shaft during rotation is improved.
A plurality of connecting blocks 12 are arranged between the inner wall of the air outlet 3 and the outer wall of the second bearing seat 9, and the connecting blocks are used for connecting and fixing the second bearing seat and the box cover, so that the stability of the transmission shaft in rotation is improved.
The connection blocks 12 are symmetrically distributed about the drive shaft 5.
The working principle is as follows:
When the device works, waste gas is led in from an air inlet pipe at an air inlet, the waste gas is contacted with water solution, high temperature and water-soluble toxic impurities in the waste gas are cooled and dissolved respectively, a driving motor is started, the driving motor drives a plurality of stirring blades to rotate through a transmission shaft, the stirring blades drive the water solution to flow, the flowing water solution drives the high temperature and water-soluble toxic impurities to flow and disperse to different positions, the efficiency of continuously treating the high temperature and water-soluble toxic impurities in the waste gas is improved, part of insoluble toxic gas impurities can be adhered to the water solution, the rest of insoluble toxic gas impurities can be continuously discharged above the water solution along with the gas, when the air pressure in a box body is greater than the external air pressure, the waste gas flows in a plurality of active carbon filter screens in sequence, the insoluble toxic gas impurities in the waste gas can be adsorbed by active carbon, the safety of the waste gas is further improved, and the filtered waste gas is discharged from an air outlet for completing the work of treating the waste gas generated during the sintering of a semiconductor device;
The connecting block is fixed with being connected between second bearing and the case lid, the stability when having promoted the rotatory stability in position that the transmission shaft is located, the motor support is used for fixing driving motor in the top of case lid, the stability of driving motor during operation has been promoted, along with the rotation of transmission shaft, the transmission shaft drives the flabellum synchronous rotation, and then conveniently drive gaseous flow, the bottom of first bearing frame transmission shaft plays spacing effect, prevent the transmission shaft position skew when rotatory, the stability when having promoted the transmission shaft rotation, sealing rubber pad has promoted the leakproofness of being connected between box and the case lid, prevent that waste gas from oozing from the space between box and the case lid, the stability to exhaust treatment has been promoted.
Adopt above-mentioned waste gas filtration, it is through between the liquid level of intake pipe with the leading-in aqueous solution of waste gas for water-soluble substance in the high temperature waste gas is absorbed by aqueous solution, and driving motor drives the transmission shaft and rotate, make rabbling mechanism stir the solution, can stir the mixture to aqueous solution, the rivers of flowing can be with heat, water-soluble waste dispersion, holistic filtration efficiency has been promoted, can also export the gas after filtering through the venthole, and adsorb the filtration once more through the active carbon filter screen, holistic filter effect has been improved.
The above embodiments are provided to illustrate the technical concept and features of the present utility model and are intended to enable those skilled in the art to understand the content of the present utility model and implement the same, and are not intended to limit the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.
Claims (6)
1. An exhaust gas filtering structure comprising: the inside box (1) that stores aqueous solution, its characterized in that: the top of the box body (1) is provided with a box cover (4) with an air inlet (14) and an air outlet (3), and an air inlet pipe (15) and an air outlet cylinder (16) are arranged on one side of the box cover (4) opposite to the inside of the box body (1) and corresponding to the air inlet (14) and the air outlet (3);
The lower end of the air inlet pipe (15) is positioned below the liquid level of the aqueous solution, the lower end of the air outlet cylinder (16) is positioned above the liquid level of the aqueous solution, and a plurality of active carbon filter screens (11) are arranged inside the air outlet cylinder (16) and along the length direction of the air outlet cylinder (16);
A second bearing (9) is fixedly connected between the inner walls of the air outlets (3) in a concentric mode, a sealing bearing (13) is arranged at the central position of the active carbon filter screen (11), a transmission shaft (5) is commonly connected between the second bearing (9) and the sealing bearing (13), a stirring mechanism is arranged below the active carbon filter screen (11) and on the circumferential outer wall of the transmission shaft (5), and a driving motor (6) for driving the transmission shaft (5) to rotate is arranged at the top of the box cover (4).
2. An exhaust gas filtering structure according to claim 1, wherein: the stirring mechanism further comprises a sleeve ring (18) and stirring blades (7), the sleeve ring (18) is fixedly sleeved on the outer wall of the transmission shaft (5), a plurality of stirring blades (7) are arranged along the circumferential outer wall of the sleeve ring (18) at intervals, and the stirring blades (7) are fixedly connected with the sleeve ring (18) through connecting rods (19).
3. An exhaust gas filtering structure according to claim 2, wherein: the stirring mechanisms are arranged in two, and are arranged at intervals along the length direction of the transmission shaft (5).
4. An exhaust gas filtering structure according to claim 1, wherein: a plurality of fan blades (10) are arranged above the active carbon filter screen (11) and along the circumferential outer wall of the transmission shaft (5).
5. An exhaust gas filtering structure according to claim 1, wherein: a sealing rubber pad (2) is arranged between the box body (1) and the box cover (4).
6. An exhaust gas filtering structure according to claim 1, wherein: a first bearing seat (8) is arranged inside the box body (1) and below the air outlet (3), and the lower end of the transmission shaft (5) is inserted into the inner ring of the first bearing seat (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322017994.5U CN221062220U (en) | 2023-07-31 | 2023-07-31 | Waste gas filtering structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322017994.5U CN221062220U (en) | 2023-07-31 | 2023-07-31 | Waste gas filtering structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221062220U true CN221062220U (en) | 2024-06-04 |
Family
ID=91274110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322017994.5U Active CN221062220U (en) | 2023-07-31 | 2023-07-31 | Waste gas filtering structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221062220U (en) |
-
2023
- 2023-07-31 CN CN202322017994.5U patent/CN221062220U/en active Active
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