CN221055365U - Hydrogen and nitrogen separation system for full-process mixed gas in granular silicon production - Google Patents
Hydrogen and nitrogen separation system for full-process mixed gas in granular silicon production Download PDFInfo
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- CN221055365U CN221055365U CN202322630345.2U CN202322630345U CN221055365U CN 221055365 U CN221055365 U CN 221055365U CN 202322630345 U CN202322630345 U CN 202322630345U CN 221055365 U CN221055365 U CN 221055365U
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- hydrogen
- nitrogen
- expander
- heat exchanger
- gas
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 126
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 69
- 239000007789 gas Substances 0.000 title claims abstract description 50
- 239000001257 hydrogen Substances 0.000 title claims abstract description 48
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 48
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 21
- 239000010703 silicon Substances 0.000 title claims abstract description 21
- 238000000926 separation method Methods 0.000 title claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000007788 liquid Substances 0.000 claims abstract description 46
- 238000003860 storage Methods 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 229920005591 polysilicon Polymers 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000012071 phase Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims 4
- 238000001816 cooling Methods 0.000 abstract description 3
- 150000002431 hydrogen Chemical class 0.000 description 5
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
- F25J3/063—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream
- F25J3/066—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream separation of nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
- F25J3/063—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream
- F25J3/0655—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation characterised by the separated product stream separation of hydrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/04—Recovery of liquid products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2230/00—Processes or apparatus involving steps for increasing the pressure of gaseous process streams
- F25J2230/30—Compression of the feed stream
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/04—Internal refrigeration with work-producing gas expansion loop
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
- F25J2290/62—Details of storing a fluid in a tank
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The utility model discloses a full-process mixed gas hydrogen and nitrogen separation system for producing granular silicon, which comprises a buffer tank, a compressor, an expander, a liquefaction heat exchanger and a gas-liquid separator, wherein the buffer tank is connected with the compressor; the outlet of the buffer tank is connected with the compressor; the outlet of the compressor is connected with the pressurizing end of the expander; the inlet of the liquefying heat exchanger is connected with the outlet of the pressurizing end of the expander; and the gas-liquid separator is connected with the outlet of the liquefaction heat exchanger. The system can fully separate two mediums, namely 100% recovered high-purity hydrogen and 100% recovered nitrogen, the high-pressure gas is compressed by a compressor and then is pressurized and cooled by an expander, the high-pressure gas enters a liquefaction heat exchanger for deep cooling, the hydrogen continues to exist in a gas form, the nitrogen is cooled into a liquid state, the liquid state enters a hydrogen-liquid nitrogen separator, the hydrogen is discharged from the top of the liquid nitrogen separator and enters a hydrogen buffer tank, and the liquid nitrogen is discharged from the bottom of the liquid nitrogen separator and enters a liquid nitrogen buffer tank.
Description
Technical Field
The utility model belongs to the field of granular silicon production, and particularly relates to a full-process mixed gas hydrogen and nitrogen separation system for granular silicon production.
Background
When new equipment or a new device is put into use in the whole process of producing polysilicon (Siemens method and fluidized bed method), nitrogen is used for replacing air in a system, after micro-oxygen to be detected is qualified, hydrogen is used for replacing nitrogen, a large amount of nitrogen and hydrogen can be used in the process, and the used nitrogen and hydrogen are all discharged to the atmosphere, so that waste is caused, the cost is increased, and little nitrogen exists in the system and cannot be discharged, so that the product quality is affected.
Disclosure of utility model
The utility model aims to: the utility model aims to solve the technical problem of providing a hydrogen and nitrogen separation system for solving the problem of separating and recycling the mixed gas of nitrogen and hydrogen in the field of polysilicon aiming at the defects of the prior art.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
A full-process mixed gas hydrogen and nitrogen separation system for producing granular silicon comprises a buffer tank, a compressor, an expander, a liquefaction heat exchanger and a gas-liquid separator; the outlet of the buffer tank is connected with the compressor; the outlet of the compressor is connected with the pressurizing end of the expander; the inlet of the liquefying heat exchanger is connected with the outlet of the pressurizing end of the expander; and the gas-liquid separator is connected with the outlet of the liquefaction heat exchanger.
Further, the expander comprises a pressurizing end and an expansion end; the outlet of the pressurizing end of the expander is connected to the liquefaction heat exchanger through a pipeline, is led out of the liquefaction heat exchanger through two branch pipes after heat exchange, and is then connected to the expansion end of the expander and the gas-liquid separator respectively.
Further, an expansion end outlet of the expander is connected to the liquefaction heat exchanger, and is connected to the buffer tank again through a return pipe after heat exchange.
Further, a three-way valve is arranged at the end part of a pipeline connected with the outlet of the pressurizing end of the expander in the liquefaction heat exchanger, and the three-way valve at the end part is connected with two branch pipes respectively connected to the expanding end of the expander and the gas-liquid separator.
Specifically, the liquefaction heat exchanger uses the low-temperature hydrogen-nitrogen mixed gas entering from the expansion end of the expander as a cold source to exchange heat the high-pressure normal-temperature hydrogen-nitrogen mixed gas entering the liquefaction heat exchanger from the expansion end of the expander.
Further, a part of high-pressure normal-temperature hydrogen-nitrogen mixed gas entering the liquefaction heat exchanger from the expansion end of the expander is extracted after heat exchange, enters the expansion end of the expander through a branch pipe, and is further cooled through expansion throttling, so that low-temperature hydrogen-nitrogen mixed gas is obtained.
Further, a filter is arranged between the buffer tank and the compressor.
Further, the front end of the buffer tank is connected with the polysilicon production system, and the hydrogen-nitrogen mixed gas generated in the polysilicon production system is stored in the buffer tank.
Further, the top of the gas-liquid separator is connected to a hydrogen storage tank through a gas phase eduction tube; the bottom of the gas-liquid separator is connected to a liquid nitrogen storage tank through a liquid phase eduction tube; corresponding control valves are respectively arranged on the gas phase eduction tube and the liquid phase eduction tube.
Further, the rear ends of the hydrogen storage tank and the liquid nitrogen storage tank are sent to a user end through an outer discharge pipe; the outer exhaust pipes are respectively provided with corresponding exhaust valves.
The beneficial effects are that:
The system can fully separate two mediums, namely 100% recovered high-purity hydrogen and 100% recovered nitrogen, the high-pressure gas is compressed by a compressor and then is pressurized and cooled by an expander, the high-pressure gas enters a liquefaction heat exchanger for deep cooling, the hydrogen continues to exist in a gas form, the nitrogen is cooled into a liquid state, the liquid state enters a hydrogen-liquid nitrogen separator, the hydrogen is discharged from the top of the liquid nitrogen separator and enters a hydrogen buffer tank, and the liquid nitrogen is discharged from the bottom of the liquid nitrogen separator and enters a liquid nitrogen buffer tank. The invention can reduce waste and cost, according to 10 ten thousand ton capacity accounting, the nitrogen consumption is 600-1000 standard square/hour, calculated in 8000 hours all year, the discharge 4800000 ~ 8000000 standard square/year (intermittent use of nitrogen), the hydrogen discharge is 180 standard square/hour per ton of silicon-300 standard square/hour per ton of silicon, calculated in 8000 hours and 10 ten thousand tons all year, and the discharge is 1.44 x 10 12~2.4*1012 standard square/year.
Drawings
The foregoing and/or other advantages of the utility model will become more apparent from the following detailed description of the utility model when taken in conjunction with the accompanying drawings and detailed description.
FIG. 1 is a schematic diagram of the structure of the separation system for hydrogen and nitrogen in the whole process of producing granular silicon.
Wherein each reference numeral represents:
1-1 buffer tank; 1-2 filters; 1-3 compressors; 1-4 expansion machines; 1-5 liquefaction heat exchanger; 1-6 gas-liquid separators; 1-7 hydrogen storage tanks; 1-8 liquid nitrogen storage tanks; 1-9 user terminals.
Detailed Description
The utility model will be better understood from the following examples.
The structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the disclosure of the present utility model, and are not intended to limit the scope of the utility model, which is defined by the claims, but rather by the terms of modification, variation of proportions, or adjustment of sizes, without affecting the efficacy or achievement of the present utility model, should be understood as falling within the scope of the present utility model. Also, the terms such as "upper", "lower", "front", "rear", "middle", and the like are used herein for descriptive purposes only and are not intended to limit the scope of the utility model for which the utility model may be practiced or for which the relative relationships may be altered or modified without materially altering the technical context.
As shown in FIG. 1, the full process mixed gas hydrogen and nitrogen separation system for producing granular silicon comprises a buffer tank 1-1, a compressor 1-3, an expander 1-4, a liquefaction heat exchanger 1-5 and a gas-liquid separator 1-6; the outlet of the buffer tank 1-1 is connected with the compressor 1-3; the outlet of the compressor 1-3 is connected with the pressurizing end of the expander 1-4; the inlet of the liquefying heat exchanger 1-5 is connected with the outlet of the pressurizing end of the expander 1-4; the gas-liquid separator 1-6 is connected with the outlet of the liquefying heat exchanger 1-5.
Wherein the expander 1-4 comprises a pressurizing end and an expanding end; the outlet of the pressurizing end of the expander 1-4 is connected to the liquefaction heat exchanger 1-5 through a pipeline, is led out of the liquefaction heat exchanger 1-5 through a two-way pipe after heat exchange, and is then connected to the expansion end of the expander 1-4 and the gas-liquid separator 1-6 respectively.
The outlet of the expansion end of the expansion machine 1-4 is connected to the liquefaction heat exchanger 1-5, and is reconnected to the buffer tank 1-1 through a return pipe after heat exchange.
The end part of a pipeline connected with the outlet of the pressurizing end of the expander 1-4 in the liquefying heat exchanger 1-5 is provided with a three-way valve, and the three-way valve at the end part is connected with two branch pipes respectively connected to the expanding end of the expander 1-4 and the gas-liquid separator 1-6.
The liquefied heat exchanger 1-5 exchanges heat with the high-pressure normal-temperature hydrogen-nitrogen mixed gas entering the liquefied heat exchanger 1-5 from the expansion end of the expander 1-4 by taking the low-temperature hydrogen-nitrogen mixed gas entering the expansion end of the expander 1-4 as a cold source.
And (3) extracting part of the high-pressure normal-temperature hydrogen-nitrogen mixed gas entering the liquefaction heat exchanger 1-5 from the expansion end of the expander 1-4 after heat exchange, entering the expansion end of the expander 1-4 through a branch pipe, and further cooling through expansion throttling to obtain the low-temperature hydrogen-nitrogen mixed gas.
A filter 1-2 is arranged between the buffer tank 1-1 and the compressor 1-3. And removing impurities in the hydrogen and nitrogen mixed gas through a filter 1-2.
The front end of the buffer tank 1-1 is connected with a polysilicon production system, and hydrogen-nitrogen mixed gas generated in the polysilicon production system is stored in the buffer tank 1-1.
The top of the gas-liquid separator 1-6 is connected to the hydrogen storage tank 1-7 through a gas phase eduction tube; the bottom of the gas-liquid separator 1-6 is connected to a liquid nitrogen storage tank 1-8 through a liquid phase eduction tube; corresponding control valves are respectively arranged on the gas phase eduction tube and the liquid phase eduction tube.
The rear ends of the hydrogen storage tanks 1-7 and the liquid nitrogen storage tanks 1-8 are sent to the user side 1-9 through an outer exhaust pipe; the outer discharge pipes are respectively provided with a corresponding discharge valve.
When in use, the device in the whole process (Siemens method: cold hydrogenation device, slurry high boiling device, rectifying device and tail gas recovery device); FBR method: the method comprises the steps that a silane gas preparation device, a granular silicon device, a cold hydrogenation device and a slurry high-boiling device) or a hydrogen, nitrogen or hydrogen and nitrogen mixed gas after equipment replacement enters a buffer tank 1-1, solid impurities are filtered through a filter 1-2, then the mixed gas enters a compressor 1-3 and is isothermally compressed into high-pressure normal temperature (2.0 MPa-4.0 MPa and 30-50 ℃) to enter a pressurizing end of an expander 1-4 and continuously pressurized to 5.0 MPa-6.0 MPa, after entering a liquefaction heat exchanger 1-5 for heat exchange, a part of the mixed gas is pumped to enter an expansion end of the expander 1-4 for expansion throttling at the temperature of minus 100-130 ℃, low-temperature hydrogen and nitrogen mixed gas at the temperature of minus 170-190 ℃ is returned to the liquefaction heat exchanger 1-5 for heat exchange with outlet gas at the pressurizing end, after heat exchange, the temperature is about 30-45 ℃ to return to the buffer tank 1-1 before the compressor, after the high-pressure mixed gas is gradually cooled, the nitrogen reaches the temperature of minus 190-200 ℃ and is condensed into liquid nitrogen and hydrogen, the condensing temperature is not lower than 248-255 ℃ after the temperature is reached, and the condensed gas enters a liquid nitrogen-1-4 expansion end for the pure hydrogen, and enters a pressure regulating valve 1-6 for the hydrogen and is continuously cooled by the liquid nitrogen and enters a liquid nitrogen storage tank after the pure hydrogen 1-6.
The utility model provides a thought and a method for a full process mixed gas hydrogen and nitrogen separation system for producing granular silicon, and the method and the way for realizing the technical scheme are numerous, the above description is only a preferred embodiment of the utility model, and it should be pointed out that a plurality of improvements and modifications can be made to those skilled in the art without departing from the principle of the utility model, and the improvements and the modifications are also regarded as the protection scope of the utility model. The components not explicitly described in this embodiment can be implemented by using the prior art.
Claims (10)
1. The full-process mixed gas hydrogen and nitrogen separation system for producing the granular silicon is characterized by comprising a buffer tank (1-1), a compressor (1-3), an expander (1-4), a liquefaction heat exchanger (1-5) and a gas-liquid separator (1-6); the outlet of the buffer tank (1-1) is connected with the compressor (1-3); the outlet of the compressor (1-3) is connected with the pressurizing end of the expander (1-4); the inlet of the liquefying heat exchanger (1-5) is connected with the outlet of the pressurizing end of the expander (1-4); the gas-liquid separator (1-6) is connected with the outlet of the liquefying heat exchanger (1-5).
2. The full process mixed gas hydrogen and nitrogen separation system for producing granular silicon according to claim 1, wherein the expander (1-4) comprises a pressurizing end and an expanding end; the outlet of the pressurizing end of the expander (1-4) is connected to the liquefaction heat exchanger (1-5) through a pipeline, is led out of the liquefaction heat exchanger (1-5) through a two-way pipe after heat exchange, and is then connected to the expansion end of the expander (1-4) and the gas-liquid separator (1-6) respectively.
3. The full process mixed gas hydrogen and nitrogen separation system for producing granular silicon according to claim 2, wherein an expansion end outlet of the expander (1-4) is connected to the liquefaction heat exchanger (1-5), and is reconnected to the buffer tank (1-1) through a return pipe after heat exchange.
4. The full process mixed gas hydrogen and nitrogen separation system for producing granular silicon according to claim 2, wherein a three-way valve is arranged at the end part of a pipeline connected with the outlet of the pressurizing end of the expander (1-4) in the liquefying heat exchanger (1-5), and the pipeline is connected with two branch pipes respectively connected with the expanding end of the expander (1-4) and the gas-liquid separator (1-6) through the three-way valve at the end part.
5. A full process mixed gas hydrogen and nitrogen separation system for producing granular silicon according to claim 3, wherein the liquefaction heat exchanger (1-5) exchanges heat with the high-pressure normal-temperature mixed gas entering the liquefaction heat exchanger (1-5) from the expansion end of the expander (1-4) by using the low-temperature mixed gas entering from the expansion end of the expander (1-4) as a cold source.
6. The system for separating hydrogen from nitrogen in the whole process of producing granular silicon according to claim 5, wherein the high-pressure normal-temperature hydrogen-nitrogen mixture entering the liquefying heat exchanger (1-5) from the expansion end of the expander (1-4) is partially extracted after heat exchange and enters the expansion end of the expander (1-4) through a branch pipe to be further cooled through expansion throttling, so as to obtain the low-temperature hydrogen-nitrogen mixture.
7. The system for separating hydrogen from nitrogen in the whole process mixture for producing granular silicon according to claim 1, wherein a filter (1-2) is further provided between the buffer tank (1-1) and the compressor (1-3).
8. The full process mixed gas hydrogen and nitrogen separation system for producing granular silicon according to claim 1, wherein the front end of the buffer tank (1-1) is connected with a polysilicon production system, and the mixed gas of hydrogen and nitrogen generated in the polysilicon production system is stored in the buffer tank (1-1).
9. The system for separating hydrogen and nitrogen from the mixed gas for the whole process of the production of the granular silicon according to claim 1, wherein the top of the gas-liquid separator (1-6) is connected to a hydrogen storage tank (1-7) through a gas phase eduction tube; the bottom of the gas-liquid separator (1-6) is connected to a liquid nitrogen storage tank (1-8) through a liquid phase eduction tube; corresponding control valves are respectively arranged on the gas phase eduction tube and the liquid phase eduction tube.
10. The system for separating hydrogen from nitrogen in the whole process mixture for producing granular silicon according to claim 9, wherein the rear ends of the hydrogen storage tank (1-7) and the liquid nitrogen storage tank (1-8) are sent to the user side (1-9) through an outlet pipe; the outer exhaust pipes are respectively provided with corresponding exhaust valves.
Priority Applications (1)
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CN202322630345.2U CN221055365U (en) | 2023-09-27 | 2023-09-27 | Hydrogen and nitrogen separation system for full-process mixed gas in granular silicon production |
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CN202322630345.2U CN221055365U (en) | 2023-09-27 | 2023-09-27 | Hydrogen and nitrogen separation system for full-process mixed gas in granular silicon production |
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