CN221046815U - Silicon wafer ultrasonic cleaning basket swinging device - Google Patents
Silicon wafer ultrasonic cleaning basket swinging device Download PDFInfo
- Publication number
- CN221046815U CN221046815U CN202322709249.7U CN202322709249U CN221046815U CN 221046815 U CN221046815 U CN 221046815U CN 202322709249 U CN202322709249 U CN 202322709249U CN 221046815 U CN221046815 U CN 221046815U
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- Prior art keywords
- silicon wafer
- lifting
- frame
- ultrasonic cleaning
- sealing
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 79
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 78
- 239000010703 silicon Substances 0.000 title claims abstract description 78
- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 40
- 230000000694 effects Effects 0.000 claims abstract description 14
- 235000012431 wafers Nutrition 0.000 claims description 56
- 238000007789 sealing Methods 0.000 claims description 41
- 230000000087 stabilizing effect Effects 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 16
- 238000004140 cleaning Methods 0.000 abstract description 25
- 239000007788 liquid Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 7
- 230000009471 action Effects 0.000 abstract description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 4
- 235000017491 Bambusa tulda Nutrition 0.000 description 4
- 241001330002 Bambuseae Species 0.000 description 4
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 4
- 239000011425 bamboo Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a silicon wafer ultrasonic cleaning basket swinging device, which comprises a lifting portal frame and a plurality of ultrasonic cleaning boxes arranged at the lower side of the bottom of the lifting portal frame, wherein lifting frames are horizontally arranged in each ultrasonic cleaning box, a novel vibrating device is additionally arranged at the top of the rear end of each lifting frame of the silicon wafer ultrasonic cleaning basket swinging device, when a large number of silicon wafer baskets filled in the silicon wafer are placed on a silicon wafer basket placing grid in the lifting frames, the lifting frames can drive the silicon wafer baskets to swing up and down in cleaning liquid, so that the cleaning liquid can clean the silicon wafer, mechanical vibration can be continuously generated by the vibrating device in the cleaning process, and the vibration can be transmitted to the silicon wafer baskets and the silicon wafer, so that intractable stains attached to the outer wall of the silicon wafer can be vibrated off by the vibrating action in the cleaning process of the silicon wafer, and the cleaning effect on the silicon wafer can be increased.
Description
Technical Field
The utility model belongs to the technical field related to ultrasonic cleaning, and particularly relates to a silicon wafer ultrasonic cleaning basket swinging device.
Background
The ultrasonic silicon wafer cleaning basket swinging device is equipment for processing a silicon wafer basket so as to ensure that all silicon wafers can be uniformly contacted with cleaning liquid in the cleaning process. The device is generally composed of a mechanism for placing a net rack and is used for fixing a silicon wafer flower basket. In the cleaning process, the silicon wafer basket is placed in the cleaning liquid, and the basket swings up and down under the control of the swinging device, so that the cleaning liquid is enabled to fully cover the surface of the silicon wafer, dirt and impurities are effectively removed, and the cleaning degree and uniformity of the silicon wafer in the cleaning process can be improved by using the silicon wafer ultrasonic cleaning basket swinging device, and meanwhile pollution and residue are reduced.
But silicon chip ultrasonic cleaning basket sways device when using, can place the silicon chip basket of flowers that is equipped with a plurality of silicon chips in inside on the rack of placing of device, and silicon chip ultrasonic cleaning basket sways device then can drive the silicon chip basket of flowers and reciprocate in the washing liquid through placing the rack, through ultrasonic cleaning effect and the rivers effect that the up-and-down swing produced to reach the abluent purpose to the silicon chip, but in case the comparatively intractable spot of adhesion on the silicon chip outer wall, the simple rivers effect and the ultrasonic wave effect that produce through the swing appear the intractable spot easily and wash incomplete condition, the intractable spot appears only by washing off part and can not wash the condition completely, so can influence the silicon chip quality.
Disclosure of utility model
The utility model aims to provide a silicon wafer ultrasonic cleaning basket swinging device, which solves the problems that once a relatively stubborn stain is attached to the outer wall of a silicon wafer, the stubborn stain is easy to be cleaned incompletely under the simple water flow effect and the ultrasonic effect generated by swinging, and the stubborn stain is easy to be cleaned off only locally but not completely.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the ultrasonic cleaning basket swinging device for the silicon wafer comprises a lifting portal frame and a plurality of ultrasonic cleaning boxes arranged on the lower side of the bottom of the lifting portal frame, wherein lifting frames are horizontally arranged in each ultrasonic cleaning box, a frame for placing the silicon wafer basket is arranged in each lifting frame, a plurality of groups of lifting arms are vertically arranged downwards on the outer wall of the front end of the lifting portal frame, the bottom of each group of lifting arms is fixedly connected with the corresponding lifting frame, two lifting arms are respectively arranged in each group of lifting arms, the lifting portal frame can drive the lifting frames to swing up and down through the lifting arms, and an oscillating device is arranged on the outer wall of the top of the rear end of the lifting frame;
The vibration device comprises a vibration transmission plate, a sealing flange and a sealing protection box, the vibration transmission plate is welded on the top outer wall of the rear end of the lifting frame, the sealing protection box is arranged at the top of the vibration transmission plate, the sealing flange is welded outside the bottom end of the sealing protection box, the sealing flange is fixed on the top outer wall of the vibration transmission plate through a plurality of screws, and meanwhile waterproof sealing treatment is carried out between the sealing flange and the vibration transmission plate by adopting a sealing gasket.
Preferably, the vibration device further comprises a sealing wire cylinder and a vibration motor, the vibration motor is further arranged in the sealing protection box and is directly fixed on the vibration transmission plate through a plurality of screws, the sealing wire cylinder is arranged in the center of the top of the sealing protection box, the vibration motor is electrically connected with an external power supply through an electric wire, and the sealing wire cylinder can produce a waterproof sealing effect outside the electric wire after the electric wire passes through the sealing wire cylinder.
Preferably, the vibration motor mainly adopts a centrifugal force generated by driving the eccentric shaft to rotate by the motor to emit mechanical vibration, and the generated mechanical vibration can be transmitted to the lifting frame and the silicon wafer basket placing net frame through the vibration transmission plate.
Preferably, the bottoms of the ultrasonic cleaning boxes are provided with ultrasonic boxes, the front ends and the rear ends of the bottoms of the ultrasonic boxes are provided with placing racks, and the tops of the ultrasonic cleaning boxes are kept on the same horizontal plane after the ultrasonic boxes are placed on the ground.
Preferably, the left side and the right side of the outer wall at the center of the rear end of the lifting portal frame are respectively provided with a stabilizing sleeve, the interiors of the two stabilizing sleeves are respectively vertically inserted with a stabilizing column, and the stabilizing sleeves can vertically move outside the stabilizing columns.
Preferably, jacking blocks are welded on the outer walls of the rear ends of the left side and the right side of the lifting portal frame, lifting cylinders are arranged at the bottoms of the two jacking blocks, and the two lifting cylinders drive the lifting portal frame to move up and down through the jacking blocks.
Compared with the prior art, the utility model provides the silicon wafer ultrasonic cleaning basket swinging device, which has the following beneficial effects:
According to the utility model, the novel vibration device is additionally arranged at the top of the rear end of each lifting frame of the silicon wafer ultrasonic cleaning basket swinging device, after a large number of silicon wafer baskets are placed on the silicon wafer basket placing grid frame in the lifting frame, the lifting frame can drive the silicon wafer baskets to swing up and down in the cleaning liquid, so that the silicon wafer can be cleaned by the cleaning liquid, mechanical vibration can be continuously generated by the vibration device in the cleaning process, and the vibration can be transmitted to the silicon wafer baskets and the silicon wafer, so that intractable stains attached to the outer wall of the silicon wafer can be given off by the vibration effect in the cleaning process of the silicon wafer, the cleaning effect on the silicon wafer can be increased, and the situation that few stains remain on the silicon wafer due to the simple ultrasonic cleaning can be avoided.
Drawings
FIG. 1 is a schematic diagram of a swing device for ultrasonic cleaning of a basket for silicon wafers.
Fig. 2 is a schematic perspective view of an oscillating device according to the present utility model.
Fig. 3 is a schematic perspective view of an oscillating device according to the present utility model.
In the figure: 1. an ultrasonic chassis; 2. an ultrasonic cleaning box; 3. a lifting frame; 4. placing a net rack on the silicon wafer flower basket; 5. a lifting arm; 6. a jacking block; 7. lifting a portal frame; 8. a stabilizing sleeve; 9. an oscillating device; 10. a stabilizing column; 11. a lifting cylinder; 12. an oscillation transfer plate; 13. a sealing flange; 14. sealing the protective box; 15. sealing the wire barrel; 16. and (5) oscillating the motor.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides a silicon wafer ultrasonic cleaning basket swinging device as shown in figures 1-3, which comprises a lifting portal frame 7 and a plurality of ultrasonic cleaning boxes 2 arranged on the lower side of the bottom of the lifting portal frame 7, wherein lifting frames 3 are horizontally arranged in each ultrasonic cleaning box 2, a silicon wafer basket placing net frame 4 is arranged in each frame of the lifting frames 3, a plurality of groups of lifting arms 5 are vertically arranged downwards on the outer wall of the front end of the lifting portal frame 7, the bottom of each group of lifting arms 5 is fixedly connected with the corresponding lifting frame 3, two lifting arms 5 are respectively arranged, the lifting portal frame 7 can drive the lifting frames 3 to swing up and down through the lifting arms 5, an oscillation device 9 is arranged on the outer wall of the top of the rear end of the lifting frame 3, ultrasonic boxes 1 are arranged at the bottom of each ultrasonic cleaning box 2, a plurality of placing racks are arranged at the front and rear ends of the bottom of each ultrasonic box 1, the tops of the ultrasonic cleaning boxes 2 are kept on the same horizontal plane after the ultrasonic cleaning boxes 1 are placed on the ground, stabilizing sleeves 8 are respectively arranged on the left side and the right side of the outer wall at the center of the rear end of the lifting portal frame 7, stabilizing columns 10 are vertically inserted into the interiors of the two stabilizing sleeves 8, the stabilizing sleeves 8 can move up and down outside the stabilizing columns 10, lifting blocks 6 are welded on the outer walls of the rear ends of the left side and the right side of the lifting portal frame 7, lifting cylinders 11 are respectively arranged at the bottoms of the two lifting blocks 6, the lifting cylinders 11 drive the lifting portal frame 7 to move up and down through the lifting blocks 6, after a proper amount of cleaning liquid is injected into the ultrasonic cleaning boxes 2, silicon wafer flower baskets filled with a plurality of silicon wafers are clamped by mechanical clamping jaws, the silicon wafer flower baskets are moved to the upper sides of the ultrasonic cleaning boxes 2 by the mechanical clamping jaws, then the mechanical clamping jaw can place the silicon wafer basket on the silicon wafer basket placing net rack 4 inside the lifting frame 3, at the moment, the silicon wafer basket is completely immersed in the cleaning liquid, the lifting cylinder 11 can drive the lifting portal frame 7 to move up and down through the jacking block 6, so that the lifting frame 3 and the silicon wafer baskets can be driven to move up and down through the lifting arm 5, the silicon wafer basket can swing up and down in the cleaning liquid, and the silicon wafers in the silicon wafer basket can be cleaned through the ultrasonic cleaning effect.
As shown in fig. 1, fig. 2 and fig. 3, the oscillating device 9 includes oscillating transfer plate 12, sealing flange 13 and sealed protection box 14, oscillating transfer plate 12 welds on the outer wall of lift frame 3 rear end top, the top of oscillating transfer plate 12 is provided with sealed protection box 14, sealing flange 13 has been welded to sealed protection box 14 bottom outside, and sealing flange 13 passes through a plurality of screw fixation on the outer wall of the top of oscillating transfer plate 12, still adopt sealed pad to carry out waterproof sealing between sealing flange 13 and the oscillating transfer plate 12 simultaneously, oscillating device 9 still includes sealed section of thick bamboo 15 and oscillating motor 16, the inside of sealed protection box 14 still is provided with oscillating motor 16, and oscillating motor 16 passes through a plurality of screws and directly fixes on oscillating transfer plate 12, sealed protection box 14 top center department is provided with sealed section of thick bamboo 15, oscillating motor 16 passes through electric wire and external power source electric connection, and sealed section of thick bamboo 15 can produce waterproof sealing effect in the outside of electric wire after the electric wire passes sealed section of thick bamboo 15.
As shown in fig. 1, fig. 2 and fig. 3, the oscillating motor 16 mainly adopts a centrifugal force generated by driving an eccentric shaft to rotate to send out mechanical vibration, and the generated mechanical vibration is transmitted to the lifting frame 3 and the silicon wafer basket placing net frame 4 through the oscillating transmission plate 12, when the lifting frame 3 and the silicon wafer basket placing net frame 4 drive the silicon wafer basket to swing up and down in a cleaning solution, the ultrasonic wave action can clean the silicon wafer immersed in the cleaning solution, meanwhile, the oscillating motor 16 synchronously works, the oscillating motor 16 drives the eccentric shaft to rotate to generate vibration, the vibration is continuously transmitted to the silicon wafer basket placing net frame 4 and the silicon wafer basket through the oscillating transmission plate 12, and when the ultrasonic wave action cleans the silicon wafer on the cleaning solution, the oscillating action can shake off stubborn stains attached to the outer wall of the silicon wafer, so that the cleaning effect on the silicon wafer can be increased.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (6)
1. Silicon chip ultrasonic cleaning basket sways device, including lift portal frame (7) and set up a plurality of ultrasonic cleaning case (2) in lift portal frame (7) bottom downside, and the inside of every ultrasonic cleaning case (2) all horizontally arranged has lift frame (3), the frame inside of lift frame (3) all is provided with silicon chip basket and places rack (4), all be provided with multiunit lifting arm (5) downwards perpendicularly on the front end outer wall of lift portal frame (7), and the bottom of every group lifting arm (5) all is provided with two respectively with its lift frame (3) fixed connection that corresponds, lift portal frame (7) accessible lifting arm (5) drive lift frame (3) swing from top to bottom, its characterized in that: an oscillating device (9) is arranged on the outer wall of the top of the rear end of the lifting frame (3);
The vibration device (9) comprises a vibration transmission plate (12), a sealing flange (13) and a sealing protection box (14), the vibration transmission plate (12) is welded on the top outer wall of the rear end of the lifting frame (3), the sealing protection box (14) is arranged at the top of the vibration transmission plate (12), the sealing flange (13) is welded outside the bottom end of the sealing protection box (14), the sealing flange (13) is fixed on the top outer wall of the vibration transmission plate (12) through a plurality of screws, and meanwhile waterproof sealing treatment is carried out between the sealing flange (13) and the vibration transmission plate (12) by adopting a sealing gasket.
2. The silicon wafer ultrasonic cleaning basket swinging device according to claim 1, wherein: the vibration device (9) further comprises a sealing wire cylinder (15) and a vibration motor (16), the vibration motor (16) is further arranged in the sealing protection box (14), the vibration motor (16) is directly fixed on the vibration transmission plate (12) through a plurality of screws, the sealing wire cylinder (15) is arranged at the center of the top of the sealing protection box (14), the vibration motor (16) is electrically connected with an external power supply through an electric wire, and the sealing wire cylinder (15) can produce a waterproof sealing effect outside the electric wire after the electric wire passes through the sealing wire cylinder (15).
3. The silicon wafer ultrasonic cleaning basket swinging device according to claim 2, wherein: the vibration motor (16) mainly adopts a centrifugal force generated by driving the eccentric shaft to rotate to send out mechanical vibration, and the generated mechanical vibration can be transmitted to the lifting frame (3) and the silicon wafer basket placing net frame (4) through the vibration transmission plate (12).
4. The silicon wafer ultrasonic cleaning basket swinging device according to claim 1, wherein: the bottom of a plurality of ultrasonic wave washs case (2) all is provided with ultrasonic wave case (1), and both ends all are provided with the rack around a plurality of ultrasonic wave case (1) bottom, and a plurality of ultrasonic wave cases (1) all keep on same horizontal plane through placing with the top of placing a plurality of ultrasonic wave washs case (2) after subaerial.
5. The silicon wafer ultrasonic cleaning basket swinging device according to claim 1, wherein: the left side and the right side of the outer wall at the center of the rear end of the lifting portal frame (7) are respectively provided with a stabilizing sleeve (8), the interiors of the two stabilizing sleeves (8) are respectively vertically inserted with a stabilizing column (10), and the stabilizing sleeves (8) can move up and down outside the stabilizing columns (10).
6. The ultrasonic cleaning basket swing device for silicon wafers according to claim 5, wherein: lifting blocks (6) are welded on the outer walls of the rear ends of the left side and the right side of the lifting portal frame (7), lifting cylinders (11) are arranged at the bottoms of the two lifting blocks (6), and the two lifting cylinders (11) drive the lifting portal frame (7) to move up and down through the lifting blocks (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322709249.7U CN221046815U (en) | 2023-10-10 | 2023-10-10 | Silicon wafer ultrasonic cleaning basket swinging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322709249.7U CN221046815U (en) | 2023-10-10 | 2023-10-10 | Silicon wafer ultrasonic cleaning basket swinging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221046815U true CN221046815U (en) | 2024-05-31 |
Family
ID=91224402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322709249.7U Active CN221046815U (en) | 2023-10-10 | 2023-10-10 | Silicon wafer ultrasonic cleaning basket swinging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221046815U (en) |
-
2023
- 2023-10-10 CN CN202322709249.7U patent/CN221046815U/en active Active
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