CN215613635U - Single crystal silicon rod cleaning device - Google Patents
Single crystal silicon rod cleaning device Download PDFInfo
- Publication number
- CN215613635U CN215613635U CN202122254721.3U CN202122254721U CN215613635U CN 215613635 U CN215613635 U CN 215613635U CN 202122254721 U CN202122254721 U CN 202122254721U CN 215613635 U CN215613635 U CN 215613635U
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- China
- Prior art keywords
- cleaning tank
- cleaning
- single crystal
- silicon rod
- crystal silicon
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004140 cleaning Methods 0.000 title claims abstract description 120
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 52
- 239000000463 material Substances 0.000 claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 10
- 238000007664 blowing Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000000861 blow drying Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 239000002253 acid Substances 0.000 description 9
- 239000012459 cleaning agent Substances 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model discloses a single crystal silicon rod cleaning device which comprises a material placing frame suitable for bearing a single crystal silicon rod, a cleaning tank group and a transfer mechanism at least suitable for transferring the material placing frame to a first cleaning tank, a second cleaning tank and a third cleaning tank in sequence, wherein the cleaning tank group comprises the first cleaning tank, the second cleaning tank and the third cleaning tank which are arranged in sequence from front to back, and vibrating devices suitable for vibrating the material placing frame are respectively arranged in the first cleaning tank, the second cleaning tank and the third cleaning tank. The utility model can automatically carry out multiple vibration cleaning on a plurality of single crystal silicon rods, and has good cleaning effect and high efficiency.
Description
Technical Field
The utility model relates to a cleaning device for a silicon single crystal rod.
Background
After the silicon single crystal rod is manufactured into a finished product, namely, a seed crystal, the silicon single crystal rod needs to be washed by acid, generally, the silicon single crystal rod needs to be washed for three times, firstly, chips and oil stains on the surface of the silicon single crystal rod are washed away by using a cleaning agent, secondly, oxides on the surface of the silicon single crystal rod are washed away by using an acid solution, and thirdly, the residual acid solution on the surface of the silicon single crystal rod is washed away by using clear water.
Disclosure of Invention
The utility model aims to overcome the defects of the prior art and provides a single crystal silicon rod cleaning device which can automatically carry out multiple vibration cleaning on a plurality of single crystal silicon rods, and has good cleaning effect and high efficiency.
In order to solve the technical problems, the technical scheme of the utility model is as follows: a single crystal silicon rod cleaning device, comprising:
the discharging frame is suitable for bearing the monocrystalline silicon rod;
the cleaning tank group comprises a first cleaning tank, a second cleaning tank and a third cleaning tank which are sequentially arranged from front to back, and vibrating devices suitable for vibrating the material placing frame are respectively arranged in the first cleaning tank, the second cleaning tank and the third cleaning tank;
and the transfer mechanism is at least suitable for transferring the emptying frame to the first cleaning tank, the second cleaning tank and the third cleaning tank in sequence.
Further provided is a concrete structure of blowing frame, the blowing frame includes:
a frame;
the striker plate is arranged at the bottom end of the frame and is provided with a plurality of water through holes;
and the single crystal silicon rod is inserted into the limiting holes.
There is further provided a concrete structure of a vibration device, the vibration device including:
the screen plate is suitable for supporting the material placing frame, the screen plate is installed in the corresponding cleaning tank and can vibrate up and down, and the cleaning tank I, the cleaning tank II and the cleaning tank III are collectively called as cleaning tanks;
the eccentric part acts on the lower end face of the screen plate;
the machine body is fixed in a corresponding cleaning groove, and the output shaft is connected with the eccentric part to drive the eccentric part to eccentrically rotate so as to enable the screen plate to vibrate up and down.
Further, the screen plate is arranged in the corresponding cleaning groove through at least two springs, the upper end parts of the springs are connected with the screen plate, the lower end parts of the springs are connected with the groove bottom of the corresponding cleaning groove,
further, the eccentric member is an eccentric wheel.
Further, in order to prevent the movement range of the discharging frame on the plane where the screen plate is located from being too large and prevent the discharging frame from impacting the wall of the cleaning tank, a limiting part suitable for limiting the position of the discharging frame is arranged on the screen plate.
Further, in order to accelerate drying of the silicon single crystal rod, the silicon single crystal rod cleaning device further comprises a drying tank positioned on the rear side of the third cleaning tank; wherein the content of the first and second substances,
a placing plate suitable for placing the material placing frame and a nitrogen blowing assembly suitable for blowing nitrogen to the material placing frame to blow dry moisture on the monocrystalline silicon rod are arranged in the blowing drying groove, and a plurality of draining holes are formed in the placing plate;
the transfer mechanism is also suitable for transferring the discharging frame from the third cleaning tank to the blow-drying tank.
There is further provided a concrete structure of a transfer mechanism, the transfer mechanism including:
the gripper is suitable for gripping the handle or the lifting ring on the material frame;
and the mechanical arm is connected with the gripper to drive the gripper to move.
Further provided is a concrete structure of a robot arm, the robot arm including:
the lifting driving piece is connected with the hand grip and is suitable for driving the hand grip to lift;
and the moving driving piece is connected with the lifting driving piece and is suitable for driving the lifting driving piece and the gripper to move in the front-back direction.
After the technical scheme is adopted, the cleaning agent is added into the water in the first cleaning groove, the acid liquor is added into the water in the second cleaning groove, the clear water is only injected into the third cleaning groove, the monocrystalline silicon rod to be cleaned is placed in the material placing frame, the material placing frame is transferred to the vibrating device in the first cleaning groove through the transfer mechanism, the material placing frame vibrates under the action of the vibrating device, so that the scraps and oil stains on the surface of the monocrystalline silicon rod are well cleaned, the material placing frame is transferred to the vibrating device in the second cleaning groove through the transfer mechanism, the material placing frame vibrates for a period of time, so that the oxides on the surface of the monocrystalline silicon rod are cleaned, the material placing frame is transferred to the vibrating device in the third cleaning groove through the transfer mechanism, the material placing frame vibrates for a period of time, so that the residual acid liquor on the surface of the monocrystalline silicon rod is cleaned, the utility model can automatically carry out multiple vibration cleaning on the monocrystalline silicon rod, and has good cleaning effect, the efficiency is high, the three cleaning tanks can work simultaneously, and the working efficiency is further improved; according to the utility model, a plurality of single crystal silicon rods can be placed in the material placing frame, the cleaning efficiency is high, and the single crystal silicon rods are separated, so that the single crystal silicon rods can be effectively prevented from colliding with each other in the vibration cleaning process, and further the single crystal silicon rods are effectively prevented from being damaged; the silicon single crystal silicon rod drying device is also provided with a drying groove, and the moisture on the surface of the silicon single crystal silicon rod can be dried through nitrogen, so that the device is convenient and trouble-saving.
Drawings
FIG. 1 is a schematic structural view of a single crystal silicon rod cleaning device according to the present invention;
fig. 2 is an enlarged view of a portion a of fig. 1.
Detailed Description
In order that the present invention may be more readily and clearly understood, a more particular description of the utility model briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
As shown in fig. 1 and 2, a single crystal silicon rod cleaning apparatus includes:
a discharge frame 1 suitable for bearing a single crystal silicon rod;
the cleaning tank group comprises a first cleaning tank 2, a second cleaning tank 3 and a third cleaning tank 4 which are sequentially arranged from front to back, and vibrating devices suitable for vibrating the material placing frame 1 are respectively arranged in the first cleaning tank 2, the second cleaning tank 3 and the third cleaning tank 4;
at least a transfer mechanism suitable for transferring the material placing frame 1 to the first cleaning groove 2, the second cleaning groove 3 and the third cleaning groove 4 in sequence.
In the embodiment, a cleaning agent is added into the water in the first cleaning tank 2 and is suitable for cleaning off chips and oil stains on the surface of the single crystal silicon rod; acid liquor is added into the water in the second cleaning tank 3 and is suitable for washing away oxides on the surface of the silicon single crystal rod; and clear water is injected into the third cleaning tank 4 and is suitable for washing away acid liquor remained on the surface of the single crystal silicon rod.
Specifically, a cleaning agent is added into water in a first cleaning tank 2, acid liquor is added into water in a second cleaning tank 3, clear water is only injected into a third cleaning tank 4, a to-be-cleaned single crystal silicon rod is placed in a material placing frame 1, the material placing frame 1 is transferred to a vibrating device in the first cleaning tank 2 through a transfer mechanism, the material placing frame 1 vibrates under the action of the vibrating device, so that scraps and oil stains on the surface of the single crystal silicon rod are well cleaned, the material placing frame 1 is transferred to the vibrating device of the second cleaning tank 3 through the transfer mechanism, the material placing frame 1 vibrates for a period of time, so that oxides on the surface of the single crystal silicon rod are cleaned, the material placing frame 1 is transferred to the vibrating device of the third cleaning tank 4 through the transfer mechanism, the material placing frame 1 vibrates for a period of time, so that residual acid liquor on the surface of the single crystal silicon rod is cleaned, the device can automatically perform multiple vibration cleaning on the single crystal silicon rod, the cleaning effect is good, and is efficient, and three washing tank can simultaneous working, has further improved work efficiency.
As shown in fig. 1 and 2, the material placing frame 1 includes:
a frame 11;
the striker plate 12 is arranged at the bottom end of the frame 11, and a plurality of water through holes 121 are formed in the striker plate 12;
at least one layer of limiting plate 13 is arranged in the frame 11, a plurality of limiting holes 131 are arranged on the limiting plate 13, and the single crystal silicon rod is inserted into the limiting holes 131.
In this embodiment, when the limiting plates 13 are provided with at least two layers, the corresponding limiting holes 131 of each layer of the limiting plates 13 are aligned, and the lower end of the single crystal silicon rod sequentially passes through the limiting holes 131 of each limiting plate 13 from top to bottom.
Specifically, a plurality of single crystal silicon rods can be placed in the material placing frame 1, the cleaning efficiency is high, and the single crystal silicon rods are separated, so that the single crystal silicon rods can be effectively prevented from colliding with each other in the vibration cleaning process, and further the single crystal silicon rods are effectively prevented from being damaged.
As shown in fig. 1, the vibration device includes:
the screen plate 51 is suitable for supporting the material placing frame 1, the screen plate 51 is installed in a corresponding cleaning tank and can vibrate up and down, and the cleaning tank I2, the cleaning tank II 3 and the cleaning tank III 4 are collectively called as cleaning tanks;
an eccentric member 52 acting on the lower end surface of the mesh plate 51;
a waterproof motor 53 whose body is fixed in the corresponding cleaning tank, the output shaft is connected with the eccentric part 52 to drive the eccentric part 52 to eccentrically rotate so as to make the screen plate 51 vibrate up and down.
As shown in fig. 1 and 2, the mesh plate 51 is installed in the corresponding cleaning tank by at least two springs 54, the upper end of the spring 54 is connected to the mesh plate 51, the lower end is connected to the bottom of the corresponding cleaning tank,
as shown in fig. 1, the eccentric member 52 is an eccentric wheel.
As shown in fig. 1, in order to prevent the discharging frame 1 from moving too far on the plane where the mesh plate 51 is located and prevent the discharging frame 1 from hitting the cleaning tank wall, a position limiting member 55 adapted to limit the position of the discharging frame 1 is disposed on the mesh plate 51.
As shown in fig. 1, in order to accelerate drying of the single crystal silicon rod, the single crystal silicon rod cleaning device further comprises a blow-drying tank 6 located at the rear side of the third cleaning tank 4; wherein the content of the first and second substances,
a placing plate 7 suitable for placing the material placing frame 1 and a nitrogen blowing assembly 8 suitable for blowing nitrogen to the material placing frame 1 to blow water on the monocrystalline silicon rod to be dried are arranged in the blow-drying groove 6, and a plurality of draining holes 71 are formed in the placing plate 7;
the transfer mechanism is also adapted to transfer the discharge frame 1 from the rinse tank three 4 to the blow-dry tank 6.
Specifically, the silicon single crystal rod drying device is further provided with a drying groove 6, and moisture on the surface of the silicon single crystal rod can be dried through nitrogen, so that the device is convenient and trouble-saving.
As shown in fig. 1, the transfer mechanism includes:
a gripper 91 adapted to grip a handle or a lifting ring on the material frame 1;
and the mechanical arm is connected with the hand grip 91 to drive the hand grip 91 to move.
As shown in fig. 1, the robot arm includes:
a lifting driving member 92 connected to the hand grip 91 and adapted to drive the hand grip 91 to be lifted and lowered;
and a moving driving member 93 coupled to the lift driving member 92 and adapted to drive the lift driving member 92 and the hand grip 91 to move in the front-rear direction.
In this embodiment, the lifting driving member 92 may be a pneumatic cylinder, and the moving driving member 93 may be a linear module, but is not limited thereto.
The above embodiments are described in further detail to solve the technical problems, technical solutions and advantages of the present invention, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A cleaning device for a silicon single crystal rod is characterized in that,
it includes:
a discharge frame (1) suitable for bearing a monocrystalline silicon rod;
the cleaning tank group comprises a first cleaning tank (2), a second cleaning tank (3) and a third cleaning tank (4) which are sequentially arranged from front to back, and vibrating devices suitable for vibrating the material placing frame (1) are respectively arranged in the first cleaning tank (2), the second cleaning tank (3) and the third cleaning tank (4);
the transfer mechanism is at least suitable for transferring the material placing frame (1) to the first cleaning groove (2), the second cleaning groove (3) and the third cleaning groove (4) in sequence.
2. The single crystal silicon rod cleaning device according to claim 1, wherein,
the discharge frame (1) comprises:
a frame (11);
the striker plate (12) is arranged at the bottom end of the frame (11), and a plurality of water through holes (121) are formed in the striker plate (12);
at least one layer of limiting plate (13) is arranged in the frame (11), a plurality of limiting holes (131) are formed in the limiting plate (13), and the single crystal silicon rod is inserted into the limiting holes (131).
3. The single crystal silicon rod cleaning device according to claim 1, wherein,
the vibration device includes:
the screen plate (51) is suitable for supporting the material placing frame (1), the screen plate (51) is installed in a corresponding cleaning tank and can vibrate up and down, and the cleaning tank I (2), the cleaning tank II (3) and the cleaning tank III (4) are collectively called as the cleaning tank;
an eccentric member (52) acting on the lower end face of the mesh plate (51);
the machine body is fixed in a corresponding cleaning groove, and the output shaft is connected with the eccentric part (52) to drive the eccentric part (52) to eccentrically rotate so as to enable the screen plate (51) to vibrate up and down.
4. The single crystal silicon rod cleaning device according to claim 3, wherein,
the screen plate (51) is arranged in the corresponding cleaning tank through at least two springs (54), the upper end part of each spring (54) is connected with the screen plate (51), and the lower end part of each spring is connected with the bottom of the corresponding cleaning tank.
5. The single crystal silicon rod cleaning device according to claim 3, wherein,
the eccentric part (52) is an eccentric wheel.
6. The single crystal silicon rod cleaning device according to claim 3, wherein,
the screen plate (51) is provided with a limiting piece (55) suitable for limiting the position of the material placing frame (1).
7. The single crystal silicon rod cleaning device according to claim 1, wherein,
the drying device also comprises a drying tank (6) positioned at the rear side of the third cleaning tank (4); wherein the content of the first and second substances,
a placing plate (7) suitable for placing the material placing frame (1) and a nitrogen blowing assembly (8) suitable for blowing nitrogen to the material placing frame (1) to blow dry moisture on the monocrystalline silicon rod are arranged in the blow-drying groove (6), and a plurality of draining holes (71) are formed in the placing plate (7);
the transfer mechanism is also suitable for transferring the discharging frame (1) from the third cleaning tank (4) to the blow-drying tank (6).
8. The single crystal silicon rod cleaning device according to claim 1, wherein,
the transfer mechanism includes:
the gripper (91) is suitable for gripping a handle or a lifting ring on the material taking and placing frame (1);
and the mechanical arm is connected with the gripper (91) to drive the gripper (91) to move.
9. The single crystal silicon rod cleaning device according to claim 8, wherein,
the robot arm includes:
a lifting driving piece (92) which is connected with the hand grip (91) and is suitable for driving the hand grip (91) to lift;
and a movable driving member (93) connected to the lifting driving member (92) and adapted to drive the lifting driving member (92) and the gripper (91) to move in the front-rear direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122254721.3U CN215613635U (en) | 2021-09-16 | 2021-09-16 | Single crystal silicon rod cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122254721.3U CN215613635U (en) | 2021-09-16 | 2021-09-16 | Single crystal silicon rod cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215613635U true CN215613635U (en) | 2022-01-25 |
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ID=79917082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122254721.3U Expired - Fee Related CN215613635U (en) | 2021-09-16 | 2021-09-16 | Single crystal silicon rod cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215613635U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117303372A (en) * | 2023-10-11 | 2023-12-29 | 曲靖阳光新能源股份有限公司 | Pickling equipment of polycrystalline silicon material |
-
2021
- 2021-09-16 CN CN202122254721.3U patent/CN215613635U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117303372A (en) * | 2023-10-11 | 2023-12-29 | 曲靖阳光新能源股份有限公司 | Pickling equipment of polycrystalline silicon material |
| CN117303372B (en) * | 2023-10-11 | 2024-04-09 | 曲靖阳光新能源股份有限公司 | Pickling equipment of polycrystalline silicon material |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220125 |