CN221041096U - Clamp for processing semiconductor sheet - Google Patents
Clamp for processing semiconductor sheet Download PDFInfo
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- CN221041096U CN221041096U CN202322986109.4U CN202322986109U CN221041096U CN 221041096 U CN221041096 U CN 221041096U CN 202322986109 U CN202322986109 U CN 202322986109U CN 221041096 U CN221041096 U CN 221041096U
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- supporting piece
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 55
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Abstract
The utility model relates to a clamp for processing semiconductor sheets, which comprises a bracket, a first supporting piece for clamping one side of a workpiece, a pushing device for pushing the first supporting piece to move, a second supporting piece for clamping the other side of the workpiece, a bidirectional screw for adjusting the position of the second supporting piece and a detection device for detecting whether the clamping of the workpiece is completed; the pushing device is arranged on the bracket; the first supporting piece is arranged at the pushing end of the pushing device; the bidirectional screw is rotationally connected in the first supporting piece; the second support slides on the first support; the second supporting piece is connected to the bidirectional screw rod in a threaded manner; the second supporting pieces are oppositely arranged; the second supporting piece and the first supporting piece are both provided with detection devices. The clamp for processing the semiconductor chip is used for clamping the waist of the semiconductor sheet mostly, but the bearing capacity of the waist of the semiconductor sheet is poor, the clamp is easy to damage the semiconductor sheet when the clamping force of the clamp is slightly large, the semiconductor sheet is wasted, and the production cost of the semiconductor chip is increased.
Description
Technical Field
The utility model relates to the field of semiconductors, in particular to a clamp for processing semiconductor sheets.
Background
In the prior art, semiconductor chips are usually etched and wired on a semiconductor sheet, and then the manufactured semiconductor device capable of realizing a certain function is clamped and fixed by a clamp so that an operator can accurately manufacture the semiconductor chips in order to make the operator more stable in processing the semiconductor sheet.
At present, most of clamps for processing semiconductor chips clamp the waist of a semiconductor sheet, but the bearing capacity of the waist of the semiconductor sheet is poor, and the clamps are easy to damage the semiconductor sheet when the clamping force is slightly large, so that the semiconductor sheet is wasted, the production cost of the semiconductor chips is increased, the processing efficiency of the semiconductor chips is also influenced, and the success rate of processing the semiconductor chips by the semiconductor sheet is influenced.
Disclosure of utility model
The clamp for processing the semiconductor sheet solves the problems that in the prior art, most of the clamp for processing the semiconductor chip clamps the waist of the semiconductor sheet, but the bearing capacity of the waist of the semiconductor sheet is poor, the clamp clamping force is slightly large, the semiconductor sheet is easy to damage, the semiconductor sheet is wasted, the production cost of the semiconductor chip is increased, the processing efficiency of the semiconductor chip is affected, and the success rate of processing the semiconductor chip by the semiconductor sheet is affected.
The technical scheme adopted by the embodiment of the application is as follows.
A clamp for processing semiconductor sheets comprises a bracket, a first supporting piece for clamping one side of a workpiece, a pushing device for pushing the first supporting piece to move, a second supporting piece for clamping the other side of the workpiece, a bidirectional screw for adjusting the position of the second supporting piece and a detection device for detecting whether the clamping of the workpiece is completed or not; the pushing device is arranged on the bracket; the first supporting piece is arranged at the pushing end of the pushing device; the bidirectional screw is rotatably connected in the first supporting piece; the second support slides on the first support; the second supporting piece is connected to the bidirectional screw rod in a threaded manner; the second supporting pieces are oppositely arranged; the second supporting piece and the first supporting piece are both provided with the detection device.
The further technical scheme is as follows: a first limit groove is formed in the first supporting piece; the opening of the first limiting groove is provided with a first chamfer.
The further technical scheme is as follows: a second limiting groove is formed in the second supporting piece; and a second chamfer is formed at the opening of the second limit groove.
The further technical scheme is as follows: a first sliding groove is formed in the first supporting piece; a first sliding block is connected in a sliding way in the first sliding groove; the two sides of the first sliding groove are provided with second sliding grooves; the first sliding block is provided with a second sliding block; the second sliding block is connected in the second sliding groove in a sliding way; the second support is disposed on the second slider.
The further technical scheme is as follows: the detection device comprises a first ejector rod, a first pushing block arranged on the first ejector rod, a second pushing block attached to the first pushing block, a second ejector rod arranged on the second pushing block and a prompt lamp for prompting whether the clamping of the side wall of the workpiece is completed or not; the second supporting piece is provided with an accommodating groove; the first pushing block and the second pushing block both slide in the accommodating groove; one end of the first ejector rod is positioned at the second limit groove; a third chamfer is formed on the first pushing block; a fourth chamfer is formed on the second pushing block; the third chamfer is attached to the fourth chamfer; a third sliding groove is formed in the accommodating groove; the prompting lamp is arranged at the top of the third sliding groove; the second ejector rod is coaxial with the prompting lamp; when the second ejector rod abuts against the indicator lamp, the indicator lamp is turned on.
One or more technical solutions provided in the embodiments of the present application at least have the following technical effects or advantages:
1. Because the bracket is rectangular and the upper surface and the lower surface are openings, the two sides of the bracket are respectively provided with a pushing device, the pushing end of the pushing device faces the center of the bracket, the pushing end of the pushing device is provided with a first supporting piece, the first supporting piece is rectangular and square, the first supporting piece faces the center and is provided with a first limit groove, the two ends of the first limit groove are communicated, the opening of the first limit groove is provided with a first chamfer, the first supporting piece is provided with a first sliding groove, the first sliding groove is oppositely provided with two groups, the first sliding groove is rotationally connected with a bidirectional screw rod, the first sliding groove is internally and slidably connected with a first sliding block, the upper side and the lower side of the first sliding block are respectively provided with a second sliding block, the upper end and the lower end of the first sliding groove are respectively provided with a second sliding groove, the second sliding block is in a door shape, and the second sliding block slides in the second sliding groove, the second sliding block is fixedly connected on the second supporting piece, the second supporting piece and the first sliding block synchronously move, the second supporting piece is provided with two groups relative to the workpiece, the first supporting piece is provided with two groups relative to the workpiece, the second limiting groove of the second supporting piece and the first limiting groove of the first supporting piece are both provided with detection devices, when the device is used, the distance between the two groups of first supporting pieces is enlarged through the pushing device, then the workpiece is clamped into one group of first limiting grooves, the pushing device is started until both sides of the workpiece are clamped into the first limiting grooves, at the moment, the detection device positioned on the first supporting piece is lightened, the current workpiece is attached to the side wall of the first limiting groove, then the bidirectional screw rod is rotated, so that the second supporting piece moves towards the workpiece until the workpiece is abutted against the detection device until the detection device is lightened, the second supporting piece is stopped, at this moment, the workpiece is fixed in position, the side walls of the workpiece are propped against the first limit groove and the second limit groove, so that the workpiece can be conveniently and rapidly clamped, whether the workpiece is clamped or not can be observed at any time, and the workpiece is prevented from being damaged due to overlarge clamping force.
2. Because the holding groove is formed in the second supporting piece, the first pushing block and the second pushing block are arranged in the holding groove, the first pushing block is provided with the first push rod, the other end of the first push rod is located at the second limiting groove, the first pushing block is provided with the first chamfer, the second pushing block is provided with the second chamfer, the first chamfer is in contact with the second chamfer, the second pushing block is provided with the second push rod, the top of the holding groove is provided with the third sliding groove, the second push rod slides in the third sliding groove, the prompting lamp is arranged at the top of the third sliding groove, when the first push rod is located in the second limiting groove, the second push rod does not contact the prompting lamp, when the first push rod is propped against a workpiece and pushes the first pushing block to move towards the second pushing block, the second push rod moves towards the prompting lamp until the side wall of the first push rod and the side wall of the second limiting groove are in the same plane, the side wall of the workpiece is propped against the prompting lamp, and the side wall of the workpiece is contacted with the second limiting groove at the moment, and the displacement of the prompting lamp is controlled to be regulated by the on or off of the prompting lamp.
Drawings
Fig. 1 is a schematic structural view of a jig for processing a semiconductor wafer according to the present utility model.
Fig. 2 is a cross-sectional view of a jig for processing semiconductor wafers in accordance with the present utility model.
Fig. 3 is a cross-sectional view of a jig for semiconductor wafer processing according to the present utility model.
Fig. 4 is a partial enlarged view of a in fig. 2.
Fig. 5 is a partial enlarged view of B in fig. 3.
In the figure: 1. a bracket; 2. a first support; 21. a first limit groove; 22. a first chamfer; 23. a first sliding groove; 24. a second sliding groove; 3. a pushing device; 4. a second support; 41. the second limit groove; 42. a second chamfer; 43. a first slider; 44. a second slider; 45. a receiving groove; 451. a third sliding groove; 5. a bidirectional screw; 6. a detection device; 61. a first ejector rod; 62. a first push block; 621. a third chamfer; 63. a second pushing block; 631. a fourth chamfer; 64. a second ejector rod; 65. a warning light.
Detailed Description
The clamp for processing the semiconductor sheet solves the problems that in the prior art, most of the clamp for processing the semiconductor chip clamps the waist of the semiconductor sheet, but the bearing capacity of the waist of the semiconductor sheet is poor, the clamp clamping force is slightly large, the semiconductor sheet is easy to damage, the semiconductor sheet is wasted, the production cost of the semiconductor chip is increased, the processing efficiency of the semiconductor chip is affected, and the success rate of processing the semiconductor chip by the semiconductor sheet is affected.
In order to solve the problems, the technical scheme in the embodiment of the application has the following general ideas
In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments.
A clamp for processing semiconductor wafers comprises a bracket 1, a first supporting piece 2 for clamping one side of a workpiece, a pushing device 3 for pushing the first supporting piece 2 to move, a second supporting piece 4 for clamping the other side of the workpiece, a bidirectional screw 5 for adjusting the position of the second supporting piece 4 and a detection device 6 for detecting whether the clamping of the workpiece is completed or not; the pushing device 3 is arranged on the bracket 1; the first supporting piece 2 is arranged at the pushing end of the pushing device 3; the bidirectional screw 5 is rotatably connected in the first support 2; the second support 4 slides on the first support 2; the second supporting piece 4 is connected to the bidirectional screw 5 in a threaded manner; the second supporting pieces 4 are oppositely arranged; the second support 4 and the first support 2 are both provided with detection means 6.
The first supporting piece 2 is provided with a first limit groove 21; the opening of the first limiting groove 21 is provided with a first chamfer 22.
The second supporting piece 4 is provided with a second limit groove 41; the opening of the second limiting groove 41 is provided with a second chamfer 42.
The first support piece 2 is provided with a first sliding groove 23; a first sliding block 43 is slidably connected to the first sliding groove 23; second sliding grooves 24 are formed on two sides of the first sliding groove 23; the first slider 43 is provided with a second slider 44; the second slider 44 is slidably coupled within the second slide slot 24; the second support 4 is provided on the second slider 44.
The bracket 1 is cuboid, the upper and lower sides are openings, the two sides of the bracket 1 are respectively provided with a pushing device 3, the pushing end of the pushing device 3 faces the center of the bracket 1, the pushing end of the pushing device 3 is provided with a first supporting piece 2, the first supporting piece 2 is in a strip square shape, the first supporting piece 2 faces the center and is provided with a first limiting groove 21, the two ends of the first limiting groove 21 are communicated, the opening of the first limiting groove 21 is provided with a first chamfer 22, the first supporting piece 2 is provided with a first sliding groove 23, the first sliding groove 23 is provided with two groups oppositely, the first sliding groove 23 is rotatably connected with a bidirectional screw 5, the first sliding groove 23 is internally connected with a first sliding block 43, the upper and lower sides of the first sliding block 43 are respectively provided with a second sliding block 44, the upper and lower ends of the first sliding groove 23 are respectively provided with a second sliding groove 24, the second sliding block 44 is in a door shape, the second sliding block 44 slides in the second sliding groove 24, the second sliding block 44 is fixedly connected on the second supporting piece 4, the second supporting piece 4 and the first sliding block 43 synchronously move, the second supporting piece 4 is provided with two groups relative to the workpiece, the first supporting piece 2 is provided with two groups relative to the workpiece, the second limiting groove 41 of the second supporting piece 4 and the first limiting groove 21 of the first supporting piece 2 are both provided with the detection device 6, when in use, the distance between the two groups of first supporting pieces 2 is firstly increased by the pushing device 3, then the workpiece is clamped into one group of the first limiting grooves 21, then the pushing device 3 is started until both sides of the workpiece are clamped into the first limiting grooves 21, at the moment, the detection device 6 positioned on the first supporting piece 2 is lightened, which indicates that the current workpiece is attached to the side wall of the first limiting groove 21, then the bidirectional screw 5 is rotated, so that the second supporting piece 4 moves towards the workpiece, until the workpiece abuts against the detecting device 6 until the detecting device 6 is lightened, the second supporting piece 4 stops moving, at this time, the position of the workpiece is fixed, and the side walls of the workpiece abut against the first limiting groove 21 and the second limiting groove 41.
Because the bracket 1 is rectangular and the upper and lower sides are openings, the two sides of the bracket 1 are respectively provided with a pushing device 3, the pushing end of the pushing device 3 faces the center of the bracket 1, the pushing end of the pushing device 3 is provided with a first supporting piece 2, the first supporting piece 2 is in a strip shape, the position of the first supporting piece 2 facing the center is provided with a first limit groove 21, the two ends of the first limit groove 21 are communicated, the opening of the first limit groove 21 is provided with a first chamfer 22, the first supporting piece 2 is provided with a first slide groove 23, the first slide grooves 23 are oppositely provided with two groups, the first slide groove 23 is rotationally connected with a bidirectional screw 5, the first slide groove 23 is in sliding connection with a first slide block 43, the upper and lower sides of the first slide block 43 are respectively provided with a second slide block 44, the upper and lower ends of the first slide groove 23 are respectively provided with a second slide groove 24, the second sliding block 44 is shaped like a gate, the second sliding block 44 slides in the second sliding groove 24, the second sliding block 44 is fixedly connected to the second supporting member 4, the second supporting member 4 and the first sliding block 43 synchronously move, the second supporting member 4 is arranged in two groups relative to the workpiece, the first supporting member 2 is arranged in two groups relative to the workpiece, the second limiting groove 41 of the second supporting member 4 and the first limiting groove 21 of the first supporting member 2 are both provided with the detection device 6, when in use, the distance between the two groups of first supporting members 2 is firstly increased by the pushing device 3, then the workpiece is clamped in one group of first limiting grooves 21, then the pushing device 3 is started until both sides of the workpiece are clamped in the first limiting grooves 21, at this time, the detection device 6 positioned on the first supporting member 2 is lightened, which indicates that the current workpiece is attached to the side wall of the first limiting groove 21, then the bidirectional screw 5 is rotated, the second supporting piece 4 is enabled to move towards the workpiece until the workpiece abuts against the detecting device 6 until the detecting device 6 is lightened, the second supporting piece 4 is stopped moving, the workpiece is fixed in position and the side wall abuts against the first limiting groove 21 and the second limiting groove 41, so that the workpiece can be conveniently and rapidly clamped, whether the workpiece is clamped or not can be observed at any time, and the workpiece is prevented from being damaged due to overlarge clamping force.
The detection device 6 comprises a first ejector rod 61, a first pushing block 62 arranged on the first ejector rod 61, a second pushing block 63 attached to the first pushing block 62, a second ejector rod 64 arranged on the second pushing block 63 and a prompt lamp 65 for prompting whether the clamping of the side wall of the workpiece is completed or not; the second supporting piece 4 is provided with a containing groove 45; the first pushing block 62 and the second pushing block 63 slide in the accommodating groove 45; one end of the first ejector rod 61 is positioned at the second limit groove 41; the first pushing block 62 is provided with a third chamfer 621; the second pushing block 63 is provided with a fourth chamfer 631; the third chamfer 621 is attached to the fourth chamfer 631; the accommodating groove 45 is provided with a third sliding groove 451; the indicator light 65 is provided on the top of the third sliding groove 451; the second ejector rod 64 is coaxial with the indicator light 65; when the second push rod 64 abuts against the indicator lamp 65, the indicator lamp 65 is turned on.
The second supporting piece 4 is provided with a containing groove 45, a first pushing block 62 and a second pushing block 63 are arranged in the containing groove 45, a first ejector rod 61 is arranged on the first pushing block 62, the other end of the first ejector rod 61 is located at the second limiting groove 41, the first pushing block 62 is provided with a first chamfer 22, the second pushing block 63 is provided with a second chamfer 42, the first chamfer 22 is in contact with the second chamfer 42, the second pushing block 63 is provided with a second ejector rod 64, the top of the containing groove 45 is provided with a third sliding groove 451, the second ejector rod 64 slides in the third sliding groove 451, a prompting lamp 65 is arranged at the top of the third sliding groove 451, when the first ejector rod 61 is located in the second limiting groove 41, the second ejector rod 64 is not in contact with the prompting lamp 65, when the first ejector rod 61 is abutted against a workpiece and pushes the first pushing block 62 to move towards the second pushing block 63, the second ejector rod moves towards the prompting lamp 65 until the side wall of the first ejector rod 61 is in the same plane with the side wall of the second limiting groove 41, the second ejector rod 64 is abutted against the side wall of the workpiece 65, and the second ejector rod 64 is abutted against the limiting groove 41.
Because the second supporting piece 4 is provided with the accommodating groove 45, the accommodating groove 45 is internally provided with the first pushing block 62 and the second pushing block 63, the first pushing block 62 is provided with the first push rod 61, the other end of the first push rod 61 is positioned at the second limiting groove 41, the first pushing block 62 is provided with the first chamfer 22, the second pushing block 63 is provided with the second chamfer 42, the first chamfer 22 is contacted with the second chamfer 42, the second pushing block 63 is provided with the second push rod 64, the top of the accommodating groove 45 is provided with the third sliding groove 451, the second push rod 64 slides in the third sliding groove 451, the indicator lamp 65 is arranged at the top of the third sliding groove 451, when the first push rod 61 is positioned in the second limiting groove 41, the second push rod 64 is not contacted with the indicator lamp 65, and when the first push rod 61 is propped against a workpiece and pushes the first pushing block 62 to move towards the second pushing block 63, the second push rod moves towards the indicator lamp 65 until the side wall of the first push rod 61 is in the same plane with the side wall of the second limiting groove 41, the second push rod 64 is in contact with the indicator lamp 65, and the second push rod 64 is in the moment or the displacement of the second push rod 65 is controlled to be in the state when the second push rod 64 is in the same plane, and the second push rod is in contact with the second push rod 65 is in the second limiting groove 41, or the workpiece is in the state, and the second push rod is in the state, when the second push rod is in the state, the second push rod is in the opposite direction to the second position.
While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the utility model.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (5)
1. The clamp for processing the semiconductor wafers is characterized by comprising a bracket (1), a first supporting piece (2) for clamping one side of a workpiece, a pushing device (3) for pushing the first supporting piece (2) to move, a second supporting piece (4) for clamping the other side of the workpiece, a bidirectional screw (5) for adjusting the position of the second supporting piece (4) and a detection device (6) for detecting whether the clamping of the workpiece is completed or not; the pushing device (3) is arranged on the bracket (1); the first supporting piece (2) is arranged at the pushing end of the pushing device (3); the bidirectional screw (5) is rotatably connected in the first supporting piece (2); the second support (4) slides on the first support (2); the second supporting piece (4) is connected to the bidirectional screw rod (5) in a threaded manner; the second supporting pieces (4) are oppositely arranged; the second support piece (4) and the first support piece (2) are both provided with the detection device (6).
2. The jig for processing semiconductor wafers according to claim 1, wherein the first support member (2) is provided with a first limit groove (21); a first chamfer (22) is formed at the opening of the first limit groove (21).
3. The jig for processing semiconductor wafers according to claim 1, wherein the second support member (4) is provided with a second limit groove (41); and a second chamfer (42) is formed at the opening of the second limit groove (41).
4. The jig for semiconductor wafer processing according to claim 2, wherein the first support member (2) is provided with a first slide groove (23); a first sliding block (43) is connected in a sliding way in the first sliding groove (23); two sides of the first sliding groove (23) are provided with second sliding grooves (24); the first sliding block (43) is provided with a second sliding block (44); the second sliding block (44) is connected in the second sliding groove (24) in a sliding way; the second support (4) is arranged on the second slider (44).
5. A jig for semiconductor wafer processing according to claim 3, wherein the detecting means (6) comprises a first ejector rod (61), a first pushing block (62) provided on the first ejector rod (61), a second pushing block (63) attached to the first pushing block (62), a second ejector rod (64) provided on the second pushing block (63), and a warning lamp (65) for warning whether or not clamping of the side wall of the workpiece is completed; the second supporting piece (4) is provided with an accommodating groove (45); the first pushing block (62) and the second pushing block (63) slide in the accommodating groove (45); one end of the first ejector rod (61) is positioned at the second limit groove (41); a third chamfer angle (621) is formed on the first pushing block (62); a fourth chamfer (631) is formed on the second pushing block (63); the third chamfer (621) is attached to the fourth chamfer (631); a third sliding groove (451) is formed in the accommodating groove (45); the indicator light (65) is arranged at the top of the third sliding groove (451); the second ejector rod (64) is coaxial with the indicator lamp (65); when the second ejector rod (64) abuts against the indicator lamp (65), the indicator lamp (65) is turned on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322986109.4U CN221041096U (en) | 2023-11-06 | 2023-11-06 | Clamp for processing semiconductor sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322986109.4U CN221041096U (en) | 2023-11-06 | 2023-11-06 | Clamp for processing semiconductor sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221041096U true CN221041096U (en) | 2024-05-28 |
Family
ID=91169751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322986109.4U Active CN221041096U (en) | 2023-11-06 | 2023-11-06 | Clamp for processing semiconductor sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221041096U (en) |
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2023
- 2023-11-06 CN CN202322986109.4U patent/CN221041096U/en active Active
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