CN221039859U - Test circuit and device - Google Patents
Test circuit and device Download PDFInfo
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- CN221039859U CN221039859U CN202322872527.0U CN202322872527U CN221039859U CN 221039859 U CN221039859 U CN 221039859U CN 202322872527 U CN202322872527 U CN 202322872527U CN 221039859 U CN221039859 U CN 221039859U
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- 239000004065 semiconductor Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 101100190527 Arabidopsis thaliana PIN5 gene Proteins 0.000 description 2
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- 108010059419 NIMA-Interacting Peptidylprolyl Isomerase Proteins 0.000 description 1
- 101100190532 Oryza sativa subsp. japonica PIN9 gene Proteins 0.000 description 1
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- 108010037490 Peptidyl-Prolyl Cis-Trans Isomerase NIMA-Interacting 4 Proteins 0.000 description 1
- 102100026114 Peptidyl-prolyl cis-trans isomerase NIMA-interacting 1 Human genes 0.000 description 1
- 102100031653 Peptidyl-prolyl cis-trans isomerase NIMA-interacting 4 Human genes 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
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- 238000010998 test method Methods 0.000 description 1
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Abstract
The application relates to the technical field of testing, and provides a testing circuit and a testing device. The circuit comprises: the device comprises a multi-pin plug and an analog input signal testing module; the analog input signal testing module comprises a first power supply and a potentiometer; the first fixed end of the potentiometer is connected with the first power supply, the second fixed end of the potentiometer is grounded, and the contact end of the potentiometer is connected with the first pin of the multi-pin plug; and a second pin of the multi-pin plug is connected with a second fixed end of the potentiometer. The test circuit and the device provided by the application do not need to use a universal meter to measure voltage, so that the temperature input signal of the temperature control equipment is conveniently tested, and the test efficiency and the accuracy are improved.
Description
Technical Field
The application relates to the technical field of testing, in particular to a testing circuit and a testing device.
Background
The semiconductor special temperature control equipment is applied to the process of manufacturing an integrated circuit, and takes away heat generated in the process of manufacturing the integrated circuit by providing circulating liquid with constant temperature, so that the temperature of a process cavity in the process of manufacturing the integrated circuit is accurately controlled, and the semiconductor special temperature control equipment needs to interact with main process equipment in real time in the process of application, receives instructions transmitted by the main process equipment, and feeds back the running state and the numerical value required by the main process equipment.
In order to ensure smooth communication between the main process equipment and the temperature control equipment, a simulation test of communication of the temperature control equipment is required in the production debugging process to judge whether the communication of the temperature control equipment is normal or not and whether the communication requirement of the main process equipment can be met or not.
In the prior art, in the communication simulation test process of the temperature control equipment special for the semiconductor, different voltage signals are input to the temperature control equipment, specific numerical values of the different voltage signals are measured by utilizing a universal meter, whether the display temperature value of the current temperature control equipment is consistent with the appointed temperature value corresponding to the input voltage or not is judged according to the corresponding relation between the voltage value and the temperature value in the measuring range, if the display temperature value is consistent with the appointed temperature value under the different voltages, the communication of a temperature input signal channel of the temperature control equipment is determined to be normal, but the method utilizes the universal meter to measure the specific numerical values of the different voltage signals, the test process is extremely inconvenient, and the test efficiency and the test accuracy are low.
Disclosure of utility model
The embodiment of the application provides a test circuit and a device, which are used for solving the technical problems that the test process is extremely inconvenient and the test efficiency and accuracy are lower in the current communication simulation test process of the special temperature control equipment for semiconductors by utilizing a universal meter to measure specific numerical values of different voltage signals.
In a first aspect, an embodiment of the present application provides a test circuit, including: the device comprises a multi-pin plug and an analog input signal testing module;
the analog input signal testing module comprises a first power supply and a potentiometer;
The first fixed end of the potentiometer is connected with the first power supply, the second fixed end of the potentiometer is grounded, and the contact end of the potentiometer is connected with the first pin of the multi-pin plug;
And a second pin of the multi-pin plug is connected with a second fixed end of the potentiometer.
In one embodiment, further comprising: the switching value input signal testing module;
The switching value input signal testing module comprises a second power supply and a control button;
One end of the control button is connected with the second power supply, and the other end of the control button is connected with a third pin of the multi-pin plug.
In one embodiment, further comprising: the analog output signal testing module;
the analog output signal testing module comprises a display gauge head and a dial switch;
The first end of the display gauge head is grounded, and the dial switch comprises a first circuit channel;
One end of the first circuit channel is connected with the second end of the display gauge outfit, and the other end of the first circuit channel is connected with the fourth pin of the multi-pin plug to form a temperature output signal test circuit.
In one embodiment, the dial switch further comprises a second circuit path;
One end of the second circuit channel is connected with the second end of the display gauge outfit, and the other end of the second circuit channel is connected with the fifth pin of the multi-pin plug to form a pressure output signal test circuit.
In one embodiment, the dial switch further comprises a third circuit path;
One end of the third circuit channel is connected with the second end of the display gauge outfit, and the other end of the third circuit channel is connected with a sixth pin of the multi-pin plug to form a flow output signal test circuit.
In one embodiment, the dial switch further comprises a fourth circuit path;
One end of the fourth circuit channel is connected with the second end of the display gauge outfit, and the other end of the fourth circuit channel is connected with a seventh pin of the multi-pin plug to form an impedance output signal test circuit.
In one embodiment, further comprising: the switching value output signal testing module;
The switching value output signal testing module comprises a plurality of switching value output signal testing circuits, and any switching value output signal testing circuit comprises a resistor and a light emitting diode;
One end of the resistor is connected with any remaining pin of the multi-pin plug, the other end of the resistor is connected with the positive electrode of the light emitting diode, and the negative electrode of the light emitting diode is grounded.
In a second aspect, an embodiment of the present application provides a testing device, including the testing circuit of the first aspect.
The application provides a test circuit and a device, which comprise a multi-pin plug and an analog input signal test module, wherein the analog input signal test module comprises a first power supply and a potentiometer, a first fixed end of the potentiometer is connected with the first power supply, a second fixed end of the potentiometer is grounded, a contact end of the potentiometer is connected with a first pin of the multi-pin plug, and a second pin of the multi-pin plug is connected with a second fixed end of the potentiometer. When analog input signal test is needed to be carried out on the temperature control equipment, the multi-pin plug can be connected to the temperature control equipment to be tested, the voltage value of the first power supply, which is input to the temperature control equipment through the multi-pin plug, is continuously changed through the contact end of the movable potentiometer, whether the display temperature value of the current temperature control equipment is consistent with the appointed temperature value corresponding to the input voltage or not is judged according to the corresponding relation between the input voltage value and the temperature value, if the display temperature value is consistent with the appointed temperature value under different voltages, the communication of the temperature input signal channel of the temperature control equipment is normal, and due to the adoption of the potentiometer, the voltage value of the current input temperature control equipment can be calculated according to the distance between the contact end of the potentiometer and the two fixed ends and the rated voltage compaction of the first power supply, the voltage measurement is not needed, the convenient test of the temperature input signal of the temperature control equipment is realized, and the test efficiency and the accuracy are improved.
Drawings
In order to more clearly illustrate the application or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a test circuit diagram provided in an embodiment of the present application.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It should be noted that in the description of embodiments of the present application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. The orientation or positional relationship indicated by the terms "upper", "lower", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description and to simplify the description, and are not indicative or implying that the apparatus or elements in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present application. Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
The terms "first," "second," and the like in this specification are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type, and are not limited to the number of objects, such as the first object may be one or more. In addition, "and/or" indicates at least one of the connected objects, and the character "/", generally indicates that the associated object is an "or" relationship.
Fig. 1 is a test circuit diagram provided in an embodiment of the present application. Referring to fig. 1, an embodiment of the present application provides a test circuit, which may include: a multi-pin plug DB15 and an analog input signal test module;
the analog input signal testing module comprises a first power supply and a potentiometer WR1;
The first fixed end of the potentiometer WR1 is connected with a first power supply, the second fixed end of the potentiometer WR1 is grounded, and the contact end of the potentiometer WR1 is connected with a first PIN PIN1 of the multi-PIN plug DB 15;
the second PIN2 of the multi-PIN plug DB15 is connected to the second fixed end of the potentiometer WR 1.
The rated voltage of the first power supply may be 10V, and the corresponding relationship between the voltage value and the temperature value may be defined according to the actual situation of the voltage value and the temperature value, which is not limited herein, and in this embodiment, the temperature value may be defined as 10 times of the voltage value, that is, 1V corresponds to 10 ℃ and 10V corresponds to 100 ℃.
The test circuit provided by the embodiment comprises a multi-pin plug and an analog input signal test module, wherein the analog input signal test module comprises a first power supply and a potentiometer, a first fixed end of the potentiometer is connected with the first power supply, a second fixed end of the potentiometer is grounded, a contact end of the potentiometer is connected with a first pin of the multi-pin plug, and a second pin of the multi-pin plug is connected with a second fixed end of the potentiometer. When analog input signal test is needed to be carried out on the temperature control equipment, the multi-pin plug can be connected to the temperature control equipment to be tested, the voltage value of the first power supply, which is input to the temperature control equipment through the multi-pin plug, is continuously changed through the contact end of the movable potentiometer, whether the display temperature value of the current temperature control equipment is consistent with the appointed temperature value corresponding to the input voltage or not is judged according to the corresponding relation between the input voltage value and the temperature value, if the display temperature value is consistent with the appointed temperature value under different voltages, the communication of the temperature input signal channel of the temperature control equipment is normal, and due to the adoption of the potentiometer, the voltage value of the current input temperature control equipment can be calculated according to the distance between the contact end of the potentiometer and the two fixed ends and the rated voltage compaction of the first power supply, the voltage measurement is not needed, the convenient test of the temperature input signal of the temperature control equipment is realized, and the test efficiency and the accuracy are improved.
Further, if the communication of the temperature input signal channel of the temperature control device is normal, it can be determined that the corresponding wiring circuit inside the temperature control device is normal.
Referring to fig. 1, in one embodiment, the test circuit further comprises: the switching value input signal testing module;
the switching value input signal testing module comprises a second power supply and a control button SB1;
One end of the control button SB1 is connected to the second power supply, and the other end of the control button SB1 is connected to the third PIN3 of the multi-PIN plug DB 15.
The rated voltage of the second power supply can be 24V to ensure that the starting voltage of the temperature control equipment is reached.
In this embodiment, when the temperature control device needs to be tested for the switching value input signal, the multi-pin plug DB15 may be connected to the temperature control device to be tested, and the control button SB1 is clicked, and the voltage of the second power source is input to the temperature control device through the multi-pin plug DB15 to start the temperature control device, so as to test whether the temperature control device is started; releasing the control button SB1 disconnects the voltage input to the second power source to test whether the temperature control device is shut down. If the start-up and shutdown tests of the temperature control equipment are normal, the communication of the start-up and shutdown input signal channels of the temperature control equipment is determined to be normal.
Through the circuit of the embodiment, the convenient test of the start-stop input signal of the temperature control equipment can be realized, and the test efficiency and the accuracy are improved.
Referring to fig. 1, in one embodiment, the test circuit further comprises: the analog output signal testing module;
The analog output signal testing module comprises a display gauge head and a dial switch SW1;
the first end of the display gauge outfit is grounded, and the dial switch SW1 comprises a first circuit channel;
One end of the first circuit channel is connected with the second end of the display gauge outfit, and the other end of the first circuit channel is connected with the fourth PIN PIN4 of the multi-PIN plug DB15 to form a temperature output signal test circuit.
Further, the dial switch SW1 further includes a second circuit channel, a third circuit channel and a fourth circuit channel;
One end of the second circuit channel is connected with the second end of the display gauge outfit, and the other end of the second circuit channel is connected with the fifth PIN PIN5 of the multi-PIN plug DB15 to form a pressure output signal test circuit;
One end of the third circuit channel is connected with the second end of the display gauge outfit, and the other end of the third circuit channel is connected with a sixth PIN PIN6 of the multi-PIN plug DB15 to form a flow output signal test circuit.
One end of the fourth circuit channel is connected with the second end of the display gauge outfit, and the other end of the fourth circuit channel is connected with the seventh PIN PIN7 of the multi-PIN plug DB15 to form an impedance output signal test circuit.
In the prior art, in the communication simulation test process of the special temperature control equipment for the semiconductor, the special temperature control equipment for the semiconductor is started to be in an operation state, analog quantity signals such as temperature, pressure, flow and impedance of circulating liquid are output at the moment, voltage values (the measuring range is generally 0-10V) of various analog quantity output signal channels are measured by a universal meter, whether the current actual temperature value is consistent with a agreed temperature value corresponding to the voltage value of the temperature output signal channels or not is judged according to the corresponding relationship agreed between the voltage values and the temperature values in the measuring range, and if so, the communication of the temperature output signal channels of the temperature control equipment is normal;
similarly, judging whether the current actual pressure value is consistent with the appointed pressure value corresponding to the voltage value of the pressure output signal channel according to the appointed corresponding relation between the voltage value and the pressure value in the measuring range, and if so, determining that the communication of the pressure output signal channel of the temperature control equipment is normal;
Similarly, judging whether the current actual flow value is consistent with the agreed flow value corresponding to the voltage value of the flow output signal channel according to the agreed corresponding relation between the voltage value and the flow value in the measuring range, and if so, determining that the communication of the flow output signal channel of the temperature control equipment is normal;
and similarly, judging whether the current actual impedance value is consistent with the agreed impedance value corresponding to the voltage value of the impedance output signal channel according to the agreed corresponding relation between the voltage value and the impedance value in the measuring range, and if so, determining that the communication of the impedance output signal channel of the temperature control equipment is normal.
The test method needs to use a universal meter to measure specific values of different voltage signals, is extremely inconvenient in the test process, and has low test efficiency and accuracy.
In this embodiment, when an analog output signal test is required for a temperature control device, the multi-pin plug DB15 may be connected to the temperature control device to be tested, the temperature control device is started to be in an operating state, different circuit channels are selected by setting the dial switch SW1, so as to connect the output signal test circuits of different analog quantities, the voltage value of the corresponding analog output signal is displayed by the display header, and then, according to the corresponding relationship agreed between the voltage value and the analog value, whether the actual value of the current analog is consistent with the default value of the analog corresponding to the voltage value is determined, if so, it is determined that the communication of the analog output signal channel of the temperature control device is normal.
Through the circuit of the embodiment, the convenient test of the analog output signal of the temperature control equipment can be realized, the test efficiency and the accuracy are improved, and further, if the communication of the analog output signal channel is normal, the corresponding wiring circuit inside the temperature control equipment can be determined to be normal.
Referring to fig. 1, in one embodiment, the test circuit further comprises: the switching value output signal testing module;
The switching value output signal testing module comprises a plurality of switching value output signal testing circuits, and any switching value output signal testing circuit comprises a resistor and a light emitting diode;
one end of the resistor is connected with any remaining pin of the multi-pin plug, the other end of the resistor is connected with the anode of the light emitting diode, and the cathode of the light emitting diode is grounded.
Specifically, the switching value output signal testing module comprises a first resistor R1 and a first light emitting diode L1;
One end of the first resistor R1 is connected with an eighth PIN PIN8 of the multi-PIN plug DB15, the other end of the first resistor R1 is connected with the positive electrode of the first light emitting diode L1, and the negative electrode of the first light emitting diode L1 is grounded to form a start-stop output signal test circuit; the temperature control device may be set to a circuit on state when being started or when being stopped, which is not limited herein, in this embodiment, the temperature control device is set to a circuit on state when being started, if the first light emitting diode L1 is turned on when the temperature control device is started, and the first light emitting diode L1 is turned off when the temperature control device is stopped, it is determined that the communication of the start-stop output signal channel is normal;
The switching value output signal testing module further comprises a second resistor R2 and a second light emitting diode L2;
One end of the second resistor R2 is connected with a ninth PIN PIN9 of the multi-PIN plug DB15, the other end of the second resistor R2 is connected with the positive electrode of the second light emitting diode L2, and the negative electrode of the second light emitting diode L2 is grounded to form a remote and local output signal test circuit; the temperature control device may be set to a circuit on state when outputting a remote signal or a local signal, which is not limited herein, in this embodiment, the temperature control device is set to a circuit on state when outputting a remote signal, if the temperature control device outputs a remote signal, the second light emitting diode L2 is turned on, and if the temperature control device outputs a local signal, the second light emitting diode L2 is turned off, and it is determined that the communication between the remote and the local output signal channel is normal;
the switching value output signal testing module further comprises a third resistor R3 and a third light emitting diode L3;
One end of the third resistor R3 is connected with a tenth PIN PIN10 of the multi-PIN plug DB15, the other end of the third resistor R3 is connected with the positive electrode of the third light-emitting diode L3, and the negative electrode of the third light-emitting diode L3 is grounded to form a prompting alarm output signal testing circuit; the temperature control device may be set to a circuit on state when performing a prompt alarm or when stopping the prompt alarm, which is not limited herein, in this embodiment, the temperature control device is set to a circuit on state when performing a prompt alarm, if the temperature control device performs a prompt alarm, the third light emitting diode L3 is turned on, and if the temperature control device stops the prompt alarm, the third light emitting diode L3 is turned off, and it is determined that the communication of the prompt alarm output signal channel is normal;
the switching value output signal testing module further comprises a fourth resistor R4 and a fourth light-emitting diode L4;
One end of a fourth resistor R4 is connected with an eleventh PIN PIN11 of the multi-PIN plug DB15, the other end of the fourth resistor R4 is connected with the positive electrode of a fourth light-emitting diode L4, and the negative electrode of the fourth light-emitting diode L4 is grounded to form a fault alarm output signal test circuit; the temperature control device may be set to a circuit on state when performing fault alarm or when stopping fault alarm, which is not limited herein, in this embodiment, the temperature control device is set to a circuit on state when performing fault alarm, if the temperature control device performs fault alarm, the fourth light emitting diode L4 is turned on, and when the temperature control device stops fault alarm, the fourth light emitting diode L4 is turned off, and it is determined that the communication of the fault alarm output signal channel is normal;
the switching value output signal testing module further comprises a fifth resistor R5 and a fifth light-emitting diode L5;
One end of a fifth resistor R5 is connected with a twelfth PIN PIN12 of the multi-PIN plug DB15, the other end of the fifth resistor R5 is connected with the positive electrode of a fifth light-emitting diode L5, and the negative electrode of the fifth light-emitting diode L5 is grounded to form a liquid level state output signal test circuit; the circuit on state may be set when the level of the circulating liquid output by the temperature control device is higher than or equal to the preset level, or the circuit on state may be set when the level of the circulating liquid output by the temperature control device is lower than the preset level, which is not limited herein, in this embodiment, the circuit on state is set when the level of the circulating liquid output by the temperature control device is higher than or equal to the preset level, if the level of the circulating liquid output by the temperature control device is higher than or equal to the preset level, the fifth light emitting diode L5 is turned on, and if the level of the circulating liquid output by the temperature control device is lower than the preset level, the fifth light emitting diode L5 is turned off, and it is determined that the communication of the liquid level state output signal channel is normal.
It should be noted that, the warning alarm is a front alarm relative to the fault alarm, and its alarm level is lower than the fault alarm, which is equivalent to that the corresponding alarm event is slight relative to the fault alarm.
According to the embodiment, by setting different switching value output signal test circuits so as to correspond to whether the communication of the switching value output signal channels corresponding to the on-off test of the light emitting diode in the test circuit is normal or not, the temperature control equipment switching value output signal can be conveniently tested by the circuit, and the test efficiency and the accuracy are improved.
The embodiment of the application provides a testing device which can comprise the testing circuit in the previous embodiment.
The beneficial effects of the testing device are as those of the testing circuit of the foregoing embodiment, which has been described in detail in the foregoing embodiment, and will not be described here again.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (8)
1. A test circuit, comprising: the device comprises a multi-pin plug and an analog input signal testing module;
the analog input signal testing module comprises a first power supply and a potentiometer;
The first fixed end of the potentiometer is connected with the first power supply, the second fixed end of the potentiometer is grounded, and the contact end of the potentiometer is connected with the first pin of the multi-pin plug;
And a second pin of the multi-pin plug is connected with a second fixed end of the potentiometer.
2. The test circuit of claim 1, further comprising: the switching value input signal testing module;
The switching value input signal testing module comprises a second power supply and a control button;
One end of the control button is connected with the second power supply, and the other end of the control button is connected with a third pin of the multi-pin plug.
3. The test circuit of claim 1, further comprising: the analog output signal testing module;
the analog output signal testing module comprises a display gauge head and a dial switch;
The first end of the display gauge head is grounded, and the dial switch comprises a first circuit channel;
One end of the first circuit channel is connected with the second end of the display gauge outfit, and the other end of the first circuit channel is connected with the fourth pin of the multi-pin plug to form a temperature output signal test circuit.
4. The test circuit of claim 3, wherein,
The dial switch also comprises a second circuit channel;
One end of the second circuit channel is connected with the second end of the display gauge outfit, and the other end of the second circuit channel is connected with the fifth pin of the multi-pin plug to form a pressure output signal test circuit.
5. The test circuit of claim 3, wherein,
The dial switch further comprises a third circuit channel;
One end of the third circuit channel is connected with the second end of the display gauge outfit, and the other end of the third circuit channel is connected with a sixth pin of the multi-pin plug to form a flow output signal test circuit.
6. The test circuit of claim 3, wherein,
The dial switch further comprises a fourth circuit channel;
One end of the fourth circuit channel is connected with the second end of the display gauge outfit, and the other end of the fourth circuit channel is connected with a seventh pin of the multi-pin plug to form an impedance output signal test circuit.
7. The test circuit of claim 1, further comprising: the switching value output signal testing module;
The switching value output signal testing module comprises a plurality of switching value output signal testing circuits, and any switching value output signal testing circuit comprises a resistor and a light emitting diode;
One end of the resistor is connected with any remaining pin of the multi-pin plug, the other end of the resistor is connected with the positive electrode of the light emitting diode, and the negative electrode of the light emitting diode is grounded.
8. A test apparatus comprising the test circuit of any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322872527.0U CN221039859U (en) | 2023-10-25 | 2023-10-25 | Test circuit and device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322872527.0U CN221039859U (en) | 2023-10-25 | 2023-10-25 | Test circuit and device |
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| CN221039859U true CN221039859U (en) | 2024-05-28 |
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| CN202322872527.0U Active CN221039859U (en) | 2023-10-25 | 2023-10-25 | Test circuit and device |
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| CN (1) | CN221039859U (en) |
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