CN221035208U

CN221035208U - Ammonia filling equipment and system

Info

Publication number: CN221035208U
Application number: CN202322905214.0U
Authority: CN
Inventors: 纪雪峰; 陈亮; 范威威
Original assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Current assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Priority date: 2023-10-27
Filing date: 2023-10-27
Publication date: 2024-05-28
Anticipated expiration: 2033-10-27

Abstract

The utility model relates to ammonia gas filling equipment and a system. The nitrogen purging device has the advantages that the nitrogen purging module and the helium purging module are arranged to respectively purge nitrogen and helium, so that the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia is improved, and meanwhile, the purity of the gas is improved; setting an analysis module, a first recovery module and a second recovery module, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas; the tail gas treatment module is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the first pressure relief module is arranged, explosion accidents caused by sudden pressure increase in the heating process are prevented, and the safety of the system is improved.

Description

Ammonia filling equipment and system

Technical Field

The utility model relates to the technical field of semiconductor production, in particular to ammonia gas filling equipment and system.

Background

In semiconductor processing, some specialty gases, such as ammonia, are commonly used. According to different production processes, different storage media are used for storing ammonia. Common storage media include tank trucks, T-bottles, steel cylinders, and the like.

Before using the storage medium, special gas filling is required for the storage medium. In the existing filling system, the following flow is generally included: 1) Heating the tank car and the T bottle to convert the residual liquid ammonia into gaseous ammonia; 2) And directly filling ammonia gas into the tank car, the T-shaped bottle and the steel bottle by adopting direct filling or low vacuum filling.

However, the existing filling systems have the following problems: 1) In the heating process, the problem of over-high pressure is easy to occur, so that explosion is easy to be caused; 2) The special gas source directly fills the tank wagon, the T bottle and the steel bottle, the filled ammonia gas cannot be analyzed, and the problem of unstable ammonia gas quality is easy to occur; 3) When direct filling or low vacuum filling is adopted, the cleanliness of the pipeline is poor due to the residual air of the filling pipeline and the compressor, so that the quality of filled ammonia gas is affected; 4) Since ammonia is not analyzed, the consistency of ammonia quality in the filling process cannot be ensured; 5) When filling is finished, ammonia gas can be remained in the filling pipe, and environmental pollution is easily caused by direct discharge.

At present, no effective solution is proposed for solving the problems of explosion caused by high heating pressure, unstable ammonia quality, low pipeline cleanliness, environmental pollution caused by direct ammonia discharge and the like in the related technologies.

Disclosure of utility model

The utility model aims at overcoming the defects in the prior art, and provides ammonia filling equipment and system, so as to solve the problems of explosion caused by high heating pressure, unstable ammonia quality, low pipeline cleanliness, environmental pollution caused by direct ammonia discharge and the like in the related technologies.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:

in a first aspect, there is provided an ammonia gas filling apparatus comprising:

The filling module is respectively communicated with an ammonia gas source and storage equipment and is used for acquiring and transmitting ammonia gas to the storage equipment;

The filtering module is communicated with the filling module and is used for filtering ammonia gas;

The nitrogen purging module is respectively communicated with a nitrogen source and the filling module and is used for purging the filling module by using nitrogen;

The helium purging module is respectively communicated with a helium source and the filling module and is used for purging the filling module by helium;

The analysis module is communicated with the filling module and is used for analyzing ammonia gas;

The first recovery module is respectively communicated with the filling module and the primary condensation system and is used for recovering ammonia gas;

The tail gas treatment module is respectively communicated with the filling module and the tail gas treatment system and is used for treating tail gas;

the first pressure relief module is communicated with the filling module and used for relieving pressure.

In some of these embodiments, further comprising:

The second pressure relief module is communicated with the filling module and used for relieving pressure.

In some of these embodiments, further comprising:

And the first pressure monitoring module is communicated with the filling module and is used for monitoring the pressure of the filling module.

In some of these embodiments, further comprising:

The first negative pressure module is communicated with the tail gas treatment module and the tail gas treatment system respectively and is used for providing a negative pressure environment for the tail gas treatment module so that the gas of the filling module is transmitted to the tail gas treatment module.

In some of these embodiments, further comprising:

And the second negative pressure module is communicated with the first negative pressure module and is used for providing a negative pressure environment.

In some of these embodiments, further comprising:

And the second pressure monitoring module is communicated with the first negative pressure module and is used for monitoring the pressure of the first negative pressure module.

In some of these embodiments, further comprising:

And the second recovery module is respectively communicated with the storage equipment and the three-stage condensation system and is used for recovering ammonia.

In a second aspect, there is provided an ammonia gas filling system comprising:

The ammonia gas filling device according to the first aspect, which is respectively communicated with an ammonia gas source and a storage device, and is used for acquiring and transmitting ammonia gas to the storage device and acquiring gaseous ammonia gas transmitted by the storage device;

The heating device is arranged at the side part of the storage device and is used for heating the storage device so as to convert liquid ammonia of the storage device into gaseous ammonia;

And the weight detection device is arranged at the bottom of the storage device and is used for detecting the weight of the storage device.

Compared with the prior art, the utility model has the following technical effects:

According to the ammonia gas filling equipment and system, the nitrogen purging module and the helium purging module are arranged to respectively purge nitrogen and helium, so that the ammonia gas which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia gas is improved, and meanwhile, the purity of the gas is improved; setting an analysis module, a first recovery module and a second recovery module, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas; the tail gas treatment module is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the first pressure relief module is arranged, explosion accidents caused by sudden pressure increase in the heating process are prevented, and the safety of the system is improved.

Drawings

Fig. 1 to 5 are frame views of a specialty gas filling device according to an embodiment of the present utility model;

FIG. 6 is a frame diagram of a specialty gas filling system according to an embodiment of the present utility model;

fig. 7 is a schematic view of a specialty gas filling system according to an embodiment of the present utility model.

Wherein the reference numerals are as follows: 1010. a filling module; 1011. filling a pipeline; 1012. a first control valve; 1013. a first one-way valve; 1014. a second control valve; 1015. a third control valve; 1016. a first pressure monitor; 1017. a first regulating valve; 1018. a second regulating valve; 1019. a third regulating valve;

1020. a filtration module; 1021. a filter;

1030. A nitrogen purging module; 1031. a nitrogen purging pipeline; 1032. a fourth control valve; 1033. a second one-way valve; 1034. a fifth control valve; 1035. a second pressure monitor;

1040. A helium purging module; 1041. a helium purge line; 1042. a sixth control valve; 1043. a third one-way valve;

1050. An analysis module; 1051. analyzing the pipeline; 1052. a seventh control valve; 1053. a fourth one-way valve;

1060. A first recovery module; 1061. a first recovery line; 1062. an eighth control valve; 1063. a fifth check valve; 1064. an eighteenth control valve; 1065. a second recovery line; 1066. a nineteenth control valve; 1067. a seventh pressure monitor;

1070. A tail gas treatment module; 1071. a tail gas treatment pipeline; 1072. a ninth control valve; 1073. a sixth one-way valve;

1080. The first pressure relief module; 1081. a first pressure relief line; 1082. a tenth control valve; 1083. rupture disk; 1084. a pressure release valve; 1085. a seventh one-way valve; 1086. a third pressure monitor;

1090. The second pressure relief module; 1091. the second pressure relief pipeline; 1092. an eleventh control valve; 1093. an eighth check valve;

1100. A first pressure monitoring module; 1101. a first pressure monitoring line; 1102. a twelfth control valve; 1103. a fourth pressure monitor;

1110. A first negative pressure module; 1111. a first vacuum line; 1112. a first vacuum pump; 1113. a thirteenth control valve; 1114. a fifth pressure monitor; 1115. a fourteenth control valve;

1120. A second negative pressure module; 1121. a second vacuum line; 1122. a second vacuum pump; 1123. a fifteenth control valve; 1124. a sixteenth control valve;

1130. A second pressure monitoring module; 1131. a second pressure monitoring line; 1132. a seventeenth control valve; 1133. a sixth pressure monitor;

1140. A second recovery module; 1141. a third recovery line; 1142. a twentieth control valve; 1143. a ninth check valve;

1000. Ammonia gas filling equipment; 2000. a weight detection device; 3000. and a storage device.

Detailed Description

The present application will be described and illustrated with reference to the accompanying drawings and examples in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application. All other embodiments, which can be made by a person of ordinary skill in the art based on the embodiments provided by the present application without making any inventive effort, are intended to fall within the scope of the present application.

It is apparent that the drawings in the following description are only some examples or embodiments of the present application, and it is possible for those of ordinary skill in the art to apply the present application to other similar situations according to these drawings without inventive effort. Moreover, it should be appreciated that while such a development effort might be complex and lengthy, it would nevertheless be a routine undertaking of design, fabrication, or manufacture for those of ordinary skill having the benefit of this disclosure, and thus should not be construed as having the benefit of this disclosure.

Reference in the specification to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is to be expressly and implicitly understood by those of ordinary skill in the art that the described embodiments of the application can be combined with other embodiments without conflict.

Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "a," "an," "the," and similar referents in the context of the application are not to be construed as limiting the quantity, but rather as singular or plural. The terms "comprising," "including," "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed or may include additional steps or elements not expressly listed or inherent to such process, method, article, or apparatus. The terms "connected," "coupled," and the like in connection with the present application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "plurality"/"a plurality" as used herein means two or more. "and/or" describes an association relationship of an association object, meaning that there may be three relationships, e.g., "a and/or B" may mean: a exists alone, A and B exist together, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship. The terms "first," "second," "third," and the like, as used herein, are merely distinguishing between similar objects and not representing a particular ordering of objects.

Example 1

This example relates to an ammonia gas filling device of the present utility model.

As shown in fig. 1, an ammonia gas charging device 1000 includes a charging module 1010, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070, and a first pressure relief module 1080. Wherein, the filling module 1010 is respectively communicated with an ammonia gas source and a storage device and is used for acquiring and transmitting ammonia gas to the storage device; the filtering module 1020 is communicated with the filling module 1010 and is used for filtering the ammonia gas; the nitrogen purging module 1030 is respectively communicated with a nitrogen source and the filling module 1010 and is used for purging the filling module 1010 by using nitrogen; helium purging module 1040 is respectively communicated with a helium source and filling module 1010, and is used for purging filling module 1010 by helium; the analysis module 1050 communicates with the filling module 1010 for analyzing ammonia gas; the first recovery module 1060 is respectively communicated with the filling module 1010 and the primary condensing system and is used for recovering ammonia gas; the tail gas treatment module 1070 is respectively communicated with the filling module 1010 and the tail gas treatment system and is used for treating tail gas; the first pressure relief module 1080 communicates with the filling module 1010 for pressure relief.

In this embodiment, the storage device is a steel cylinder, such as a 47L steel cylinder.

As shown in fig. 2, the filling module 1010 includes a filling line 1011, a first control valve 1012, a first check valve 1013, a second control valve 1014, at least one third control valve 1015, and a first pressure monitor 1016. The filling pipeline 1011 is respectively communicated with an ammonia gas source, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070, a first pressure relief module 1080 and storage equipment, and is used for acquiring and transmitting ammonia gas to the storage equipment; the first control valve 1012 is arranged on the filling pipe 1011 and is positioned at the upstream of the filtering module 1020, and is used for controlling the opening and closing of the filling pipe 1011; the first one-way valve 1013 is disposed in the filler pipe 1011 and downstream of the filtration module 1020; the second control valve 1014 is arranged in the filling pipe 1011 downstream of the first one-way valve 1013; a third control valve 1015 is provided in the filling line 1011 downstream of the second control valve 1014; a first pressure monitor 1016 is in communication with the filling line 1011 for monitoring the pressure of the filling line 1011.

The filler pipe 1011 comprises a filler main pipe and at least a first filler branch pipe. The filling main pipeline is respectively communicated with an ammonia gas source, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070 and a first pressure relief module 1080, and is provided with a first control valve 1012, a first check valve 1013, a second control valve 1014 and a first pressure monitor 1016; the first charging branch pipe is respectively communicated with the charging main pipe and the storage device, and is provided with a third control valve 1015.

In some of these embodiments, the first filling branch lines are several. The first filling branch pipelines are connected in parallel.

The number of third control valves 1015 matches the number of first charging branch pipes. Generally, the number of the third control valves 1015 is equal to the number of the first filling branch pipes, that is, the third control valves 1015 are in one-to-one correspondence with the first filling branch pipes.

In some of these embodiments, the first control valve 1012, the second control valve 1013, and the third control valve 1015 include, but are not limited to, pneumatic diaphragm valves, and manual diaphragm valves.

In some of these embodiments, the first pressure monitor 1016 includes, but is not limited to, a pressure gauge, a pressure sensor.

As shown in fig. 2, the filter module 1020 includes a filter 1021. Wherein, filter 1021 sets up in filling module 1010 for filter the ammonia of ammonia source transmission.

Specifically, the filter 1021 is disposed in the fill line 1011 between the first control valve 1012 and the first one-way valve 1013.

As shown in fig. 2, the nitrogen purge module 1030 includes a nitrogen purge line 1031, a fourth control valve 1032, a second check valve 1033, a fifth control valve 1034, and a second pressure monitor 1035. The nitrogen purging pipeline 1031 is respectively communicated with a nitrogen source, the filling module 1010 and the helium purging module 1040 and is used for purging the filling module 1010 by using nitrogen; the fourth control valve 1032 is disposed on the nitrogen purge line 1031 and is used for controlling the opening and closing of the nitrogen purge line 1031; a second check valve 1033 is disposed in the nitrogen purge line 1031 downstream of the fourth control valve 1032; a fifth control valve 1034 is disposed in the nitrogen purge line 1031 downstream of the second check valve 1033; a second pressure monitor 1035 is in communication with the nitrogen purge line 1031 for monitoring the pressure of the nitrogen purge line 1031.

Specifically, nitrogen purge line 1031 communicates with fill line 1011. More specifically, nitrogen purge line 1031 communicates with the charging main line.

In some of these embodiments, the nitrogen purge line 1031 communicates with the helium purge module 1040, and the nitrogen purge line 1031 communicates with the helium purge module 1040 at a location between the second check valve 1033 and the fifth control valve 1034.

In some of these embodiments, fourth control valve 1032, fifth control valve 1034 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the second pressure monitor 1035 includes, but is not limited to, a pressure gauge, a pressure sensor.

As shown in fig. 2, the helium purge module 1040 includes a helium purge line 1041, a sixth control valve 1042, and a third check valve 1043. Wherein, helium purging line 1041 is respectively communicated with helium source and filling module 1010, and is used for purging filling module 1010 by helium; the sixth control valve 1042 is disposed in the helium purging line 1041, and is used for controlling the opening and closing of the helium purging line 1041; a third check valve 1043 is provided in the helium purge line 1041.

Specifically, helium purge line 1041 communicates with fill line 1011. More specifically, helium purge line 1041 communicates with the charging main line.

In some of these embodiments, helium purge line 1041 is in communication with nitrogen purge line 1031, and the location of communication of helium purge line 1041 with nitrogen purge line 1031 is between second check valve 1033 and fifth control valve 1034.

In some of these embodiments, the sixth control valve 1042 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 2, the analysis module 1050 includes an analysis line 1051, a seventh control valve 1052, and a fourth check valve 1053. Wherein, the analysis pipeline 1051 is communicated with the filling module 1010 and is used for analyzing ammonia gas; a seventh control valve 1052 is provided in the analysis line 1051 for controlling the opening and closing of the analysis line 1051; a fourth check valve 1053 is disposed in the analysis line 1051 downstream of the seventh control valve 1052.

Specifically, the analysis line 1051 communicates with the filling line 1011. More specifically, the analysis line 1051 communicates with the fill main line.

The analysis pipeline 1051 is communicated with the analysis equipment and is used for conveying the ammonia gas to be detected and analyzed to the analysis equipment so as to enable the analysis equipment to analyze the parameters such as the concentration, the components and the like of the ammonia gas.

In some of these embodiments, the seventh control valve 1052 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 2, the first recovery module 1060 includes a first recovery line 1061, an eighth control valve 1062, and a fifth check valve 1063. Wherein, the first recovery pipeline 1061 is respectively communicated with the filling module 1010 and the first-stage condensation system and is used for recovering ammonia gas; an eighth control valve 1062 is disposed in the first recovery pipeline 1061 for controlling the opening and closing of the first recovery pipeline 1061; a fifth check valve 1063 is disposed in the first recovery line 1061 downstream of the eighth control valve 1062.

Specifically, the first recovery line 1061 communicates with the filling line 1011. More specifically, the first recovery line 1061 communicates with the fill main line.

In the event that the concentration and/or composition of ammonia does not meet the predetermined criteria (e.g., predetermined concentration criteria, predetermined impurity levels), ammonia is recovered through first recovery line 1061 for reuse.

In some of these embodiments, eighth control valve 1062 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 2, the exhaust treatment module 1070 includes an exhaust treatment conduit 1071, a ninth control valve 1072, and a sixth check valve 1073. Wherein, the tail gas treatment pipeline 1071 is respectively communicated with the filling module 1010 and the tail gas treatment system and is used for treating tail gas; the ninth control valve 1072 is disposed in the exhaust gas treatment line 1071, and is used for controlling the opening and closing of the exhaust gas treatment line 1071; a sixth check valve 1073 is provided in the exhaust gas treatment line 1071 downstream of the ninth control valve 1072.

Specifically, the exhaust gas treatment line 1071 communicates with the filling line 1011. More specifically, the exhaust gas treatment line 1071 communicates with a charging main line.

After the nitrogen purging module 1030 performs nitrogen purging on the filling pipe 1011, the tail gas treatment pipe 1071 is used to discharge the gas of the filling pipe 1011 to the tail gas treatment system; after helium purging the filling line 1011 by the helium purging module 1040, the gas of the filling line 1011 is discharged to the exhaust gas treatment system by the exhaust gas treatment line 1071.

In some of these embodiments, the ninth control valve 1072 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 2, first pressure relief module 1080 includes a first pressure relief line 1081, a tenth control valve 1082, a rupture disc 1083, a pressure relief valve 1084, a seventh one-way valve 1085, and a third pressure monitor 1086. Wherein, the first pressure relief pipeline 1081 is communicated with the filling module 1010 and is used for pressure relief; the tenth control valve 1082 is disposed on the first pressure-releasing line 1081, and is used for controlling the opening and closing of the first pressure-releasing line 1081; rupture disc 1083 is disposed within first pressure relief line 1081 and downstream of tenth control valve 1082; a pressure relief valve 1084 is disposed in the first pressure relief line 1081 downstream of the rupture disc 1083; a seventh one-way valve 1085 is disposed within first pressure relief line 1081 and downstream of pressure relief valve 1084; a third pressure monitor 1086 is in communication with the first pressure relief line 1081 for monitoring the pressure of the first pressure relief line 1081.

Specifically, the first pressure relief line 1081 communicates with the fill line 1011. More specifically, the first pressure relief line 1081 communicates with the fill main line.

In some of these embodiments, tenth control valve 1082 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the third pressure monitor 1086 includes, but is not limited to, a pressure gauge, a pressure sensor.

Further, as shown in fig. 1, the ammonia gas charging device 1000 further includes a second pressure relief module 1090. Wherein, the second pressure relief module 1090 is in communication with the filling module 1010 for pressure relief.

As shown in fig. 2, the second pressure relief module 1090 includes a second pressure relief line 1091, an eleventh control valve 1092, and an eighth check valve 1093. Wherein, the second pressure relief pipeline 1091 is communicated with the filling module 1010 and is used for pressure relief; the eleventh control valve 1092 is disposed in the second pressure relief pipeline 1091, and is used for controlling the opening and closing of the second pressure relief pipeline 1091; an eighth check valve 1093 is disposed in the second pressure relief line 1091 downstream of the eleventh control valve 1092.

Specifically, the second pressure relief line 1091 communicates with the filler line 1011. More specifically, the second pressure relief line 1091 communicates with the charging main line.

In some of these embodiments, the second pressure relief line 1091 communicates with the first pressure relief line 1081.

In some of these embodiments, the location of communication of the second pressure relief line 1091 with the first pressure relief line 1081 is downstream of the seventh one-way valve 1085.

In some of these embodiments, the eleventh control valve 1092 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

Further, as shown in fig. 1, the ammonia gas charging device 1000 further includes a first pressure monitoring module 1100. Wherein, the first pressure monitoring module 1100 is communicated with the filling module 1010 and is used for monitoring the pressure of the filling module 1010.

As shown in fig. 2, the first pressure monitoring module 1100 includes a first pressure monitoring line 1101, a twelfth control valve 1102, and at least one fourth pressure monitor 1103. Wherein the first pressure monitoring line 1101 is in communication with the filling module 1010; the twelfth control valve 1102 is disposed on the first pressure monitoring line 1101 and is used for controlling the opening and closing of the first pressure monitoring line 1101; the fourth pressure monitor 1103 is in communication with the first pressure monitoring line 1101 for monitoring the pressure of the first pressure monitoring line 1101.

Specifically, the first pressure monitoring line 1101 communicates with the filling line 1011. More specifically, the first pressure monitoring line 1101 communicates with the charging main line.

In some of these embodiments, the twelfth control valve 1102 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the fourth pressure monitor 1103 is several. A number of fourth pressure monitors 1103 are arranged in parallel.

In some of these embodiments, the fourth pressure monitor 1103 includes, but is not limited to, a pressure gauge, a pressure sensor.

In some of these embodiments, where the fourth pressure monitor 1103 is a number, the types of the fourth pressure monitors 1103 are different.

Further, as shown in fig. 1, the ammonia gas charging device 1000 further includes a first negative pressure module 1110. The first negative pressure module 1110 is respectively communicated with the exhaust gas treatment module 1070 and the exhaust gas treatment system, and is used for providing a negative pressure environment for the exhaust gas treatment module 1070 so that the gas of the filling module 1010 is transmitted to the exhaust gas treatment module 1070.

As shown in fig. 3, the first negative pressure module 1110 includes a first vacuum line 1111, a first vacuum pump 1112, a thirteenth control valve 1113, and a fifth pressure monitor 1114. Wherein, the first vacuum pipeline 1111 is respectively communicated with the exhaust gas treatment module 1070 and the exhaust gas treatment system, and is used for providing a negative pressure environment for the exhaust gas treatment module 1070 so as to transmit the gas of the filling module 1010 to the exhaust gas treatment module 1070; the first vacuum pump 1112 communicates with the first vacuum line 1111 for providing a negative pressure environment; the thirteenth control valve 1113 is disposed in the first vacuum pipe 1111 and upstream of the first vacuum pump 1112, for controlling opening and closing of the first vacuum pipe 1111; the fifth pressure monitor 1114 is in communication with the first vacuum line 1111 for monitoring the pressure of the first vacuum line 1111.

Specifically, the first vacuum line 1111 communicates with an exhaust gas treatment line 1071.

In some of these embodiments, the first vacuum pump 1112 is a dry pump.

In some of these embodiments, thirteenth control valve 1113 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the fifth pressure monitor 1114 includes, but is not limited to, a pressure gauge, a pressure sensor.

Further, as shown in fig. 1, the ammonia gas charging device 1000 further includes a second negative pressure module 1120. Wherein, the second negative pressure module 1120 is in communication with the first negative pressure module 1110 for providing a negative pressure environment.

As shown in fig. 3, the first negative pressure module 1110 further includes a fourteenth control valve 1115. The fourteenth control valve 1115 is disposed between the communication positions of the second negative pressure module 1120 and the first negative pressure module 1110, and is used for controlling the opening and closing between the second negative pressure module 1120 and the first negative pressure module 1110.

Specifically, the fourteenth control valve 1115 is disposed between the communication positions of the first vacuum line 1111 and the second negative pressure module 1120, and is located upstream of the first vacuum pump 1112, downstream of the thirteenth control valve 1113.

In some of these embodiments, fourteenth control valve 1115 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 3, the second negative pressure module 1120 includes a second vacuum line 1121, a second vacuum pump 1122, a fifteenth control valve 1123, and a sixteenth control valve 1124. Wherein, two ends of the second vacuum pipeline 1121 are respectively communicated with the first negative pressure module 1110; the second vacuum pump 1122 is in communication with the second vacuum line 1121 for providing a negative pressure environment; the fifteenth control valve 1123 is provided in the second vacuum line 1121 upstream of the second vacuum pump 1122; the sixteenth control valve 1124 is disposed in the second vacuum line 1121 downstream of the second vacuum pump 1122.

Specifically, both ends of the second vacuum line 1121 communicate with the first vacuum line 1111, respectively.

A first end of the second vacuum line 1121 is located between the thirteenth control valve 1113 and the fourteenth control valve 1115, and a second end of the second vacuum line 1121 is located between the fourteenth control valve 1115 and the first vacuum pump 1112.

In some of these embodiments, the second vacuum pump 1122 is a molecular pump.

In some of these embodiments, the fifteenth control valve 1123, the sixteenth control valve 1124 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

For the first negative pressure module 1110 and the second negative pressure module 1120, the operation manner is as follows:

1) The fourteenth control valve 1115 is opened, the fifteenth control valve 1123 and the sixteenth control valve 1124 are closed, and the first vacuum pump 1112 operates;

2) The fourteenth control valve 1115 is closed, the fifteenth control valve 1123 and the sixteenth control valve 1124 are opened, and the first vacuum pump 1112 and the second vacuum pump 1122 are operated.

Further, as shown in fig. 1, the ammonia gas charging device 1000 also includes a second pressure monitoring module 1130. The second pressure monitoring module 1130 is in communication with the first negative pressure module 1110, and is configured to monitor a pressure of the first negative pressure module 1110.

As shown in FIG. 3, the second pressure monitoring module 1130 includes a second pressure monitoring line 1131, a seventeenth control valve 1132, and at least one sixth pressure monitor 1133. Wherein the second pressure monitoring line 1131 communicates with the first negative pressure module 1110; the seventeenth control valve 1132 is disposed in the second pressure monitoring pipeline 1131, and is used for controlling the opening and closing of the second pressure monitoring pipeline 1131; the sixth pressure monitor 1133 is in communication with the second pressure monitoring line 1131 for monitoring the pressure of the second pressure monitoring line 1131.

Specifically, the second pressure monitoring line 1131 communicates with the first vacuum line 1111.

In some of these embodiments, the second pressure monitoring line 1131 communicates with the first vacuum line 1111, the second vacuum line 1121, respectively.

In some of these embodiments, seventeenth control valve 1132 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the sixth pressure monitor 1133 is a number. A number of sixth pressure monitors 1133 are arranged in parallel.

In some of these embodiments, the sixth pressure monitor 1133 includes, but is not limited to, a pressure gauge, a pressure sensor.

In some of these embodiments, where the sixth pressure monitor 1133 is a number, the types of the number of sixth pressure monitors 1133 are different.

In the present embodiment, the flow of the ammonia gas filling device 1000 is as follows:

(one) a first purge step: purging the filling module 1010 with a nitrogen purge module 1030;

(II) a first vacuum step: after (one) is finished, the first negative pressure module 1110 and the second negative pressure module 1120 are utilized to carry out negative pressure vacuumizing on the filling module 1010 so as to discharge the gas of the filling module 1010 to an exhaust gas treatment system through the exhaust gas treatment module 1070;

(III) a second purging step: after (two) is completed, purging the filling module 1010 with helium purging module 1040;

(IV) a second vacuum step: after (III) is finished, the first negative pressure module 1110 and the second negative pressure module 1120 are utilized to carry out negative pressure vacuumizing on the filling module 1010 so as to discharge the gas of the filling module 1010 to an exhaust gas treatment system through an exhaust gas treatment module 1070;

(V) a first analysis step: after (IV) is finished, residual ammonia gas (converted from liquid state to gas state) of the storage device is enabled to enter a filling module 1010, and the ammonia gas is analyzed by an analysis module 1050;

(six) a first recovery step: after (fifth), the ammonia gas of the filling module 1010 is recycled to the primary condensing system by the first recycling module 1060;

(seventh) a third purge step: after (six) is completed, purging the filling module 1010 with a nitrogen purging module 1030;

(eighth) a third vacuum step: after (seventh), the first negative pressure module 1110 and the second negative pressure module 1120 are utilized to perform negative pressure vacuumizing on the filling module 1010 so as to discharge the gas of the filling module 1010 to an exhaust gas treatment system through the exhaust gas treatment module 1070;

(ninth) a fourth purge step: after (eight) is completed, purging the filling module 1010 with helium purging module 1040;

(ten) a fourth vacuum step: after (nine) is finished, the first negative pressure module 1110 and the second negative pressure module 1120 are utilized to carry out negative pressure vacuumizing on the filling module 1010 so as to discharge the gas of the filling module 1010 to an exhaust gas treatment system through an exhaust gas treatment module 1070;

(eleven) filling step: after (ten) is finished, filling the storage device with ammonia gas by using a filling module 1010;

(twelve) a second analysis step: after (eleven) is completed, ammonia is analyzed using analysis module 1050;

Thirteenth second recovery step: after (twelve) is completed, ammonia gas of the filling module 1010 is recovered by the first recovery module 1060, or the filling module 1010 is vacuumized by the first negative pressure module 1110 and the second negative pressure module 1120 to discharge the gas of the filling module 1010 to an exhaust gas treatment system through the exhaust gas treatment module 1070.

The utility model has the advantages that the nitrogen purging module and the helium purging module are arranged to respectively purge nitrogen and helium, so that the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia is improved, and the purity of the gas is improved; setting an analysis module and a first recovery module, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; the tail gas treatment module is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the first pressure relief module is arranged, explosion accidents caused by sudden pressure increase in the heating process are prevented, and the safety of the system is improved.

Example 2

As shown in fig. 4, an ammonia gas filling device 1000 includes a filling module 1010, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070, a first pressure relief module 1080, a second pressure relief module 1090, a first pressure monitoring module 1100, a first negative pressure module 1110, a second negative pressure module 1120, and a second pressure monitoring module 1130. Wherein, the filling module 1010 is respectively communicated with an ammonia gas source and a storage device and is used for acquiring and transmitting ammonia gas to the storage device; the filtering module 1020 is communicated with the filling module 1010 and is used for filtering the ammonia gas; the nitrogen purging module 1030 is respectively communicated with a nitrogen source and the filling module 1010 and is used for purging the filling module 1010 by using nitrogen; helium purging module 1040 is respectively communicated with a helium source and filling module 1010, and is used for purging filling module 1010 by helium; the analysis module 1050 communicates with the filling module 1010 for analyzing ammonia gas; the first recovery module 1060 is respectively communicated with the filling module 1010 and the primary condensing system and is used for recovering ammonia gas; the tail gas treatment module 1070 is respectively communicated with the filling module 1010 and the tail gas treatment system and is used for treating tail gas; the first pressure relief module 1080 is communicated with the filling module 1010 and is used for pressure relief; the second pressure relief module 1090 is communicated with the filling module 1010 and is used for pressure relief; the first pressure monitoring module 1100 is in communication with the filling module 1010 for monitoring the pressure of the filling module 1010; the first negative pressure module 1110 is respectively communicated with the tail gas treatment module 1070 and the tail gas treatment system, and is used for providing a negative pressure environment for the tail gas treatment module 1070 so that the gas of the filling module 1010 is transmitted to the tail gas treatment module 1070; the second negative pressure module 1120 communicates with the first negative pressure module 1110 for providing a negative pressure environment; the second pressure monitoring module 1130 is in communication with the first negative pressure module 1110 for monitoring the pressure of the first negative pressure module 1110.

In this embodiment, the structure and connection relationship of the filtering module 1020, the nitrogen purging module 1030, the helium purging module 1040, the analyzing module 1050, the tail gas processing module 1070, the first pressure relief module 1080, the second pressure relief module 1090, the first pressure monitoring module 1100, the first negative pressure module 1110, the second negative pressure module 1120, and the second pressure monitoring module 1130 are substantially the same as those of embodiment 1, and will not be described again here.

In this embodiment, the storage device is a T-bottle.

As shown in fig. 5, the filling module 1010 includes a filling line 1011, a first regulator valve 1017, a first one-way valve 1013, a second regulator valve 1018, at least one third control valve 1015 and a first pressure monitor 1016. The filling pipeline 1011 is respectively communicated with an ammonia gas source, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070, a first pressure relief module 1080 and storage equipment, and is used for acquiring and transmitting ammonia gas to the storage equipment; the first regulating valve 1017 is arranged in the filling pipe 1011 and upstream of the filtration module 1020; the first one-way valve 1013 is disposed in the filler pipe 1011 and downstream of the filtration module 1020; a second regulating valve 1018 is provided in the filling pipe 1011 downstream of the first one-way valve 1013; the third control valve 1015 is disposed on the filling pipe 1011 and downstream of the second adjusting valve 1018, for controlling the opening and closing of the filling pipe 1011; a first pressure monitor 1016 is in communication with the filling line 1011 for monitoring the pressure of the filling line 1011.

The structure and connection relationship of the filling pipe 1011, the first check valve 1013, the third control valve 1015 and the first pressure monitor 1016 are substantially the same as those of embodiment 1, and will not be described here again.

In some of these embodiments, the first and second regulator valves 1017, 1018 include, but are not limited to, bellows valves.

As shown in fig. 5, the first recovery module 1060 includes a first recovery line 1061, an eighth control valve 1062, a fifth check valve 1063, an eighteenth control valve 1064, a second recovery line 1065, at least one nineteenth control valve 1066, and a seventh pressure monitor 1067. Wherein, the first recovery pipeline 1061 is respectively communicated with the filling module 1010 and the first-stage condensation system and is used for recovering ammonia gas; an eighth control valve 1062 is disposed in the first recovery pipeline 1061 for controlling the opening and closing of the first recovery pipeline 1061; the fifth check valve 1063 is disposed in the first recovery line 1061 and downstream of the eighth control valve 1062; an eighteenth control valve 1064 is disposed in the first recovery pipeline 1061 and downstream of the fifth check valve 1063 for controlling opening and closing of the first recovery pipeline 1061; a second recovery pipeline 1065 is respectively communicated with the storage equipment and the first recovery pipeline 1061, and is used for recovering ammonia gas; a nineteenth control valve 1066 is disposed in the second recovery line 1065 for controlling the opening and closing of the second recovery line 1065; a seventh pressure monitor 1067 communicates with the second recovery line 1065 for monitoring the pressure of the second recovery line 1065.

The structure and connection relationship of the first recovery pipe 1061, the eighth control valve 1062, and the fifth check valve 1063 are substantially the same as those of embodiment 1, and will not be described herein.

The communication position between the second recovery line 1065 and the first recovery line 1061 is located between the eighth control valve 1062 and the fifth check valve 1063.

The second recovery line 1065 includes a recovery main line and at least one recovery slave line. Wherein the recovery main line is in communication with a first recovery line 1061; the recovery secondary pipeline is respectively communicated with the recovery main pipeline and the storage equipment.

In some of these embodiments, the recovery-from-line is several. The recovery secondary pipelines are connected in parallel.

The number of nineteenth control valves 1066 matches the number of recovery slave lines. Generally, the number of nineteenth control valves 1066 is equal to the number of recovery-from-line, i.e., the nineteenth control valves 1066 are in one-to-one correspondence with the recovery-from-line.

In some embodiments, the eighteenth and nineteenth control valves 1064, 1066 include, but are not limited to, pneumatic diaphragm valves, manual diaphragm valves.

In some of these embodiments, seventh pressure monitor 1067 includes, but is not limited to, a pressure gauge, a pressure sensor.

(six) a first recovery step: after the end of (fifth), the ammonia gas of the filling module 1010 is recovered to the primary condensing system by the first recovery module 1060 (the second recovery pipe 1065);

The technical effects of this embodiment are substantially the same as those of embodiment 1, and will not be described in detail here.

Example 3

As shown in fig. 6, an ammonia gas filling apparatus 1000 includes a filling module 1010, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, an exhaust treatment module 1070, a first pressure relief module 1080, a second pressure relief module 1090, a first pressure monitoring module 1100, a first negative pressure module 1110, a second negative pressure module 1120, a second pressure monitoring module 1130, and a second recovery module 1140. Wherein, the filling module 1010 is respectively communicated with an ammonia gas source and a storage device and is used for acquiring and transmitting ammonia gas to the storage device; the filtering module 1020 is communicated with the filling module 1010 and is used for filtering the ammonia gas; the nitrogen purging module 1030 is respectively communicated with a nitrogen source and the filling module 1010 and is used for purging the filling module 1010 by using nitrogen; helium purging module 1040 is respectively communicated with a helium source and filling module 1010, and is used for purging filling module 1010 by helium; the analysis module 1050 communicates with the filling module 1010 for analyzing ammonia gas; the first recovery module 1060 is respectively communicated with the filling module 1010 and the primary condensing system and is used for recovering ammonia gas; the tail gas treatment module 1070 is respectively communicated with the filling module 1010 and the tail gas treatment system and is used for treating tail gas; the first pressure relief module 1080 is communicated with the filling module 1010 and is used for pressure relief; the second pressure relief module 1090 is communicated with the filling module 1010 and is used for pressure relief; the first pressure monitoring module 1100 is in communication with the filling module 1010 for monitoring the pressure of the filling module 1010; the first negative pressure module 1110 is respectively communicated with the tail gas treatment module 1070 and the tail gas treatment system, and is used for providing a negative pressure environment for the tail gas treatment module 1070 so that the gas of the filling module 1010 is transmitted to the tail gas treatment module 1070; the second negative pressure module 1120 communicates with the first negative pressure module 1110 for providing a negative pressure environment; the second pressure monitoring module 1130 is in communication with the first negative pressure module 1110 and is configured to monitor a pressure of the first negative pressure module 1110; the second recovery module 1140 is respectively communicated with the storage device and the three-stage condensation system, and is used for recovering ammonia gas.

In this embodiment, the structures and connection relationships of the filtering module 1020, the nitrogen purging module 1030, the helium purging module 1040, the analyzing module 1050, the first recovery module 1060, the tail gas treatment module 1070, the first pressure relief module 1080, the second pressure relief module 1090, the first pressure monitoring module 1100, the first negative pressure module 1110, the second negative pressure module 1120, and the second pressure monitoring module 1130 are substantially the same as those of embodiment 1, and will not be repeated here.

In this embodiment, the storage device is a tank car.

As shown in fig. 7, the filling module 1010 includes a filling line 1011, a first regulator valve 1017, a first one-way valve 1013, a second regulator valve 1018, a third control valve 1015, a third regulator valve 1019, and a first pressure monitor 1016. The filling pipeline 1011 is respectively communicated with an ammonia gas source, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070, a first pressure relief module 1080 and storage equipment, and is used for acquiring and transmitting ammonia gas to the storage equipment; the first regulating valve 1017 is arranged in the filling pipe 1011 and upstream of the filtration module 1020; the first one-way valve 1013 is disposed in the filler pipe 1011 and downstream of the filtration module 1020; a second regulating valve 1018 is provided in the filling pipe 1011 downstream of the first one-way valve 1013; the third control valve 1015 is disposed on the filling pipe 1011 and downstream of the second adjusting valve 1018, for controlling the opening and closing of the filling pipe 1011; a third regulating valve 1019 is provided in the filling line 1011 downstream of the second regulating valve 1018; a first pressure monitor 1016 is in communication with the filling line 1011 for monitoring the pressure of the filling line 1011.

The structure and connection relationship of the third control valve 1015 and the first pressure monitor 1016 are substantially the same as those of embodiment 1, and will not be described here again.

The filler pipe 1011 comprises a filler main pipe, a first filler branch pipe and a second filler branch pipe. The filling main pipeline is respectively communicated with an ammonia gas source, a filtering module 1020, a nitrogen purging module 1030, a helium purging module 1040, an analysis module 1050, a first recovery module 1060, a tail gas treatment module 1070 and a first pressure relief module 1080, and is provided with a first regulating valve 1017, a first check valve 1013, a second regulating valve 1018 and a first pressure monitor 1016; the first filling branch pipeline is respectively communicated with the filling main pipeline and the storage equipment, and is provided with a third control valve 1015; the second filling branch line is respectively communicated with the main filling line and the storage device, and is provided with a third regulating valve 1019.

In some of these embodiments, the first, second, and third regulator valves 1017, 1018, 1019 include, but are not limited to, bellows valves.

As shown in fig. 7, the second recovery module 1140 includes a third recovery line 1141, a twentieth control valve 1142, and a ninth check valve 1143. Wherein, the third recovery pipeline 1141 is respectively communicated with the storage device and the three-stage condensation system and is used for recovering ammonia gas; the twentieth control valve 1142 is disposed in the third recovery pipeline 1141 and is used for controlling the third recovery pipeline 1141 to open and close; a ninth check valve 1143 is disposed in the third recovery line 1141 downstream of the twentieth control valve 1142.

In some of these embodiments, the third recovery line 1141 communicates with the first fill branch line.

In some of these embodiments, the twentieth control valve 1142 includes, but is not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

(six) a first recovery step: after the end of (fifth), the ammonia gas of the filling module 1010 is recovered to the primary condensing system by using the first recovery module 1060 (the second recovery pipeline 1065), or the ammonia gas of the filling module 1010 is recovered to the tertiary condensing system by using the second recovery module 1140;

Thirteenth second recovery step: after (twelve) is completed, ammonia gas of the filling module 1010 is recovered by the first recovery module 1060 or the second recovery module 1140, or the filling module 1010 is vacuumized by the first negative pressure module 1110 and the second negative pressure module 1120 to discharge the gas of the filling module 1010 to an exhaust treatment system through the exhaust treatment module 1070.

The embodiment has the advantages that the analysis module, the first recovery module and the second recovery module are arranged, and under the condition that the ammonia gas is qualified, the ammonia gas is subjected to primary condensation recovery; and under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas.

Example 4

This example is a modification of examples 1 to 3.

In this embodiment, the ammonia gas filling apparatus is a combination of at least two of embodiments 1 to 3.

The specific implementation mode is as follows:

1) In combination of embodiment 1 and embodiment 2, embodiment 1 shares a first negative pressure module 1110, a second negative pressure module 1120, and a second pressure monitoring module 1130 with embodiment 2;

2) In combination of embodiment 1 and embodiment 3, embodiment 1 shares a first negative pressure module 1110, a second negative pressure module 1120, and a second pressure monitoring module 1130 with embodiment 3;

3) In combination of embodiment 2 and embodiment 3, embodiment 2 shares a first negative pressure module 1110, a second negative pressure module 1120, and a second pressure monitoring module 1130 with embodiment 3;

4) In combination of embodiment 1, embodiment 2 and embodiment 3, embodiment 1, embodiment 2 and embodiment 3 share a first negative pressure module 1110, a second negative pressure module 1120 and a second pressure monitoring module 1130.

Example 5

This embodiment relates to an ammonia filling system of the present utility model.

As shown in fig. 8, an ammonia gas filling system includes an ammonia gas filling device 1000, a heating device (not shown), and a weight detecting device 2000 as described in any one of embodiments 1 to 4. The ammonia filling device 100 is respectively communicated with an ammonia source and the storage device 3000, and is used for acquiring and transmitting ammonia to the storage device 3000 and acquiring gaseous ammonia transmitted by the storage device 3000; the heating device is disposed at a side of the storage device 3000, and is used for heating the storage device 3000 to convert the liquid ammonia gas of the storage device 3000 into gaseous ammonia gas; the weight detecting device 2000 is provided at the bottom of the storage device 3000 for detecting the weight of the storage device 3000.

Wherein the storage device 3000 includes, but is not limited to, a tank car, a T-bottle, a 47L steel bottle.

In the case that the heating device heats the storage device 3000 so that the residual liquid ammonia gas in the storage device 3000 is converted into gaseous ammonia gas, the pressure condition of the storage device 3000 can be monitored by using the first pressure release module 1080, so as to ensure safety.

In some of these embodiments, the weight detection device 2000 is a scale.

Example 6

This example is one embodiment of the present utility model.

As shown in fig. 8, an ammonia filling system includes a first filling module (corresponding to the filling module 1010, the filtration module 1020, the nitrogen purging module 1030, the helium purging module 1040, the analysis module 1050, the first recovery module 1060, the exhaust gas treatment module 1070, the first pressure relief module 1080, the second pressure relief module 1090, the first pressure monitoring module 1100) according to embodiment 3, a second filling module (corresponding to the filling module 1010, the filtration module 1020, the nitrogen purging module 1030, the helium purging module 1040, the analysis module 1050, the first recovery module 1060, the exhaust gas treatment module 1070, the first pressure relief module 1080, the second pressure relief module 1090, the first pressure monitoring module 1100), a third filling module (corresponding to the filling module 1010, the filtration module 1020, the nitrogen purging module 1030, the helium purging module 1040, the analysis module 1050, the first recovery module 1060, the exhaust gas treatment module 1070, the first pressure relief module 1080, the second pressure relief module 1090, the first pressure monitoring module 1100) and a vacuum module (corresponding to the first negative pressure module 1120, the second negative pressure monitoring module 1130, and the second negative pressure monitoring module 1130 of embodiments 1 to 3). The first filling module is connected with the tank wagon and is used for filling ammonia gas into the tank wagon; the second filling module is connected with at least one T bottle and is used for filling ammonia gas into the T bottle; the third filling module is connected with the 47L steel cylinder and is used for filling ammonia gas into the 47L steel cylinder; the vacuum module is respectively connected with the first filling module, the second filling module and the third filling module and is used for respectively providing negative pressure vacuum for the first filling module, the second filling module and the third filling module.

Further, the ammonia filling system further comprises a heating device and a scale. The heating equipment is used for heating the tank car and the T bottle so as to convert the residual liquid ammonia into gaseous ammonia; the platform scale is used for detecting the weight of the tank wagon, the T bottle and the 47L steel bottle.

The first charging module includes a bellows valve XCV, a FILTER, a check valve CV1, a pressure sensor PT1, a bellows valve XCV02, a bellows valve XCV03, a pneumatic diaphragm valve PV09, a manual diaphragm valve MV2, a pressure gauge PG2, a pressure sensor PT2, a pneumatic diaphragm valve PV01, a check valve CV2, a pneumatic diaphragm valve PV08, a check valve CV3, a manual diaphragm valve MV01, a burst disk PRD1, a pressure gauge PG1, an angle valve SV-1041, a check valve CV4, a pneumatic diaphragm valve PV02, a check valve CV5, a pneumatic diaphragm valve PV03, a pressure sensor PT4, a check valve CV6B, a pneumatic diaphragm valve PV07, a check valve CV6A, a pneumatic diaphragm valve PV06, a pneumatic diaphragm valve PV04, a check valve CV7, a pneumatic diaphragm valve PV05, and a check valve CV8.

The second charging module includes bellows valve XCV, FILTER, one-way valve CV9, pressure sensor PT5, bellows valve XCV05, pneumatic diaphragm valve PV18, pneumatic diaphragm valve PV102, pneumatic diaphragm valve PV22, pneumatic diaphragm valve PV24, pneumatic diaphragm valve PV26, manual diaphragm valve MV3, pressure gauge PG4, pressure sensor PT6, pneumatic diaphragm valve PV11, one-way valve CV10, pneumatic diaphragm valve PV19, pneumatic diaphragm valve PV21, pneumatic diaphragm valve PV23, pneumatic diaphragm valve PV25, pneumatic diaphragm valve PV27, pressure sensor PT8, manual diaphragm valve MV2, burst disk PRD2, pressure gauge PG3, angle valve SV-421, one-way valve CV11, pneumatic diaphragm valve PV12, one-way valve CV12, pneumatic diaphragm valve PV13, pressure sensor PT7, one-way valve CV13B, pneumatic diaphragm valve CV 17, one-way valve CV13A, pneumatic diaphragm valve PV16, pneumatic diaphragm valve PV14, one-way valve CV14, pneumatic diaphragm valve CV15, one-way valve CV15.

The third charging module includes a pneumatic diaphragm valve PV28, a FILTER, a check valve CV16, a pressure sensor PT8, a pneumatic diaphragm valve PV29, a pneumatic diaphragm valve PV37, a pneumatic diaphragm valve PV38, a pneumatic diaphragm valve PV39, a pneumatic diaphragm valve PV104, a pneumatic diaphragm valve PV41, a pneumatic diaphragm valve PV42, a pneumatic diaphragm valve PV43, a pneumatic diaphragm valve PV44, a pneumatic diaphragm valve PV45, a pneumatic diaphragm valve PV46, a manual diaphragm valve MV4, a pressure gauge PG6, a pressure sensor PT9, a pneumatic diaphragm valve PV103, a check valve CV17, a manual diaphragm valve MV3, a rupture disk PRD3, a pressure gauge PG5, an angle valve SV-451, a check valve CV18, a pneumatic diaphragm valve PV31, a check valve CV19, a pneumatic diaphragm valve PV32, a pressure sensor PT10, a check valve CV102B, a check valve CV 36, a pneumatic diaphragm valve PV35, a pneumatic diaphragm valve PV33, a check valve CV21, a pneumatic diaphragm valve PV34, a check valve CV22.

The vacuum module comprises pneumatic diaphragm valve PV47, pressure sensor PT10, manual diaphragm valve MV4, pressure sensor PT11, pressure gauge PG7, pneumatic diaphragm valve PV49, DRY pump DRY, pneumatic diaphragm valve PV48, molecular pump TURBO, pneumatic diaphragm valve PV105.

The utility model has the following technical effects:

1) And (3) adding a filter: the charged gas may be filtered to remove minute particles and then a clean gas is outputted;

2) Nitrogen and helium were used as purge gases: the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipeline, so that the utilization efficiency of the ammonia is improved, and the purity of the gas is improved;

3) And (3) analysis and detection: when the detection is qualified, ammonia gas enters a tank wagon, a T bottle and a steel bottle; when the ammonia gas is detected to be unqualified, the ammonia gas enters a first-stage condensation recovery; when the detection of the gas entering the tank wagon is unqualified, the ammonia gas enters the three-stage treatment, and meanwhile, the gas which enters the tank wagon and is unqualified in detection enters a final wastewater tank;

4) Rupture disk: the stable pressure of the filling system can be ensured, and the ammonia gas can achieve the effect of recycling through evaporation and condensation;

5) The corresponding tail gas treatment is added when the gas is not fully utilized or condensed, and the tail gas treatment is performed in a vacuumizing mode, so that the pollution to the environment is reduced.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims

1. An ammonia gas filling apparatus, comprising:

2. An ammonia gas filling device as defined in claim 1, wherein the filling module comprises:

The filling pipeline is respectively communicated with an ammonia gas source, the filtering module, the nitrogen purging module, the helium purging module, the analysis module, the first recovery module, the tail gas treatment module, the first pressure relief module and the storage equipment and is used for acquiring and transmitting ammonia gas to the storage equipment;

The first control valve is arranged on the filling pipeline and is positioned at the upstream of the filtering module and used for controlling the opening and closing of the filling pipeline;

The first one-way valve is arranged on the filling pipeline and is positioned at the downstream of the filtering module;

The second control valve is arranged on the filling pipeline and is positioned at the downstream of the first one-way valve;

at least one third control valve arranged on the filling pipeline and positioned at the downstream of the second control valve;

a first pressure monitor in communication with the filling line for monitoring the pressure of the filling line; or (b)

The filling module includes:

A first regulating valve disposed in the charging line upstream of the filtration module;

The second regulating valve is arranged on the filling pipeline and is positioned at the downstream of the first one-way valve;

The third control valve is arranged on the filling pipeline and is positioned at the downstream of the second regulating valve and used for controlling the opening and closing of the filling pipeline;

The filling module includes:

The third regulating valve is arranged on the filling pipeline and is positioned at the downstream of the second regulating valve;

a first pressure monitor in communication with the filling line for monitoring the pressure of the filling line; and/or

The first recovery module includes:

The first recovery pipeline is respectively communicated with the filling module and the primary condensation system and is used for recovering ammonia gas;

the eighth control valve is arranged on the first recovery pipeline and used for controlling the opening and closing of the first recovery pipeline;

A fifth one-way valve disposed in the first recovery line downstream of the eighth control valve; or (b)

The first recovery module includes:

A fifth one-way valve disposed in the first recovery line downstream of the eighth control valve;

An eighteenth control valve, which is arranged on the first recovery pipeline and is positioned at the downstream of the fifth one-way valve, and is used for controlling the opening and closing of the first recovery pipeline;

The second recovery pipeline is respectively communicated with the storage equipment and the first recovery pipeline and is used for recovering ammonia;

At least one nineteenth control valve, the nineteenth control valve is arranged on the second recovery pipeline and is used for controlling the opening and closing of the second recovery pipeline;

And a seventh pressure monitor in communication with the second recovery line for monitoring the pressure of the second recovery line.

3. An ammonia gas filling device as defined in claim 1 wherein the filtration module comprises:

The filter is arranged on the filling module and is used for filtering the ammonia gas transmitted by the ammonia gas source; and/or

The nitrogen purge module includes:

The nitrogen purging pipeline is respectively communicated with a nitrogen source, the filling module and the helium purging module and is used for purging the filling module by using nitrogen;

the fourth control valve is arranged on the nitrogen purging pipeline and used for controlling the opening and closing of the nitrogen purging pipeline;

The second one-way valve is arranged on the nitrogen purging pipeline and is positioned at the downstream of the fourth control valve;

The fifth control valve is arranged on the nitrogen purging pipeline and is positioned at the downstream of the second one-way valve;

The second pressure monitor is communicated with the nitrogen purging pipeline and is used for monitoring the pressure of the nitrogen purging pipeline; and/or

The helium purge module includes:

The helium purging pipeline is respectively communicated with a helium source and the filling module and is used for purging the filling module by helium;

The sixth control valve is arranged on the helium purging pipeline and is used for controlling the opening and closing of the helium purging pipeline;

The third one-way valve is arranged on the helium purging pipeline; and/or

The analysis module comprises:

The analysis pipeline is communicated with the filling module and is used for analyzing ammonia gas;

A seventh control valve, which is arranged on the analysis pipeline and is used for controlling the opening and closing of the analysis pipeline;

A fourth one-way valve disposed in the analysis line downstream of the seventh control valve; and/or

The exhaust treatment module includes:

The tail gas treatment pipeline is communicated with the filling module and the tail gas treatment system respectively and is used for treating tail gas;

A ninth control valve, which is arranged on the tail gas treatment pipeline and is used for controlling the opening and closing of the tail gas treatment pipeline;

A sixth one-way valve disposed in the exhaust treatment line downstream of the ninth control valve; and/or

The first pressure relief module includes:

the first pressure relief pipeline is communicated with the filling module and used for relieving pressure;

the tenth control valve is arranged on the first pressure relief pipeline and used for controlling the opening and closing of the first pressure relief pipeline;

The rupture disk is arranged on the first pressure relief pipeline and is positioned at the downstream of the tenth control valve;

The pressure relief valve is arranged on the first pressure relief pipeline and is positioned at the downstream of the rupture disk;

The seventh one-way valve is arranged on the first pressure relief pipeline and is positioned at the downstream of the pressure relief valve;

And the third pressure monitor is communicated with the first pressure relief pipeline and is used for monitoring the pressure of the first pressure relief pipeline.

4. The ammonia gas filling device as defined in claim 1, further comprising:

The second pressure relief module is communicated with the filling module and is used for relieving pressure; and/or

The first pressure monitoring module is communicated with the filling module and is used for monitoring the pressure of the filling module; and/or

The first negative pressure module is respectively communicated with the tail gas treatment module and the tail gas treatment system and is used for providing a negative pressure environment for the tail gas treatment module so as to enable the gas of the filling module to be transmitted to the tail gas treatment module; and/or

5. The ammonia gas filling device of claim 4, wherein the second pressure relief module comprises:

the second pressure relief pipeline is communicated with the filling module and used for relieving pressure;

The eleventh control valve is arranged on the second pressure relief pipeline and is used for controlling the opening and closing of the second pressure relief pipeline;

The eighth one-way valve is arranged on the second pressure relief pipeline and is positioned at the downstream of the eleventh control valve; and/or

The first pressure monitoring module includes:

A first pressure monitoring line in communication with the filling module;

A twelfth control valve, which is arranged on the first pressure monitoring pipeline and is used for controlling the opening and closing of the first pressure monitoring pipeline;

At least one fourth pressure monitor in communication with the first pressure monitoring line for monitoring the pressure of the first pressure monitoring line; and/or

The first negative pressure module includes:

The first vacuum pipeline is respectively communicated with the tail gas treatment module and the tail gas treatment system and is used for providing a negative pressure environment for the tail gas treatment module so as to enable the gas of the filling module to be transmitted to the tail gas treatment module;

A first vacuum pump in communication with the first vacuum line for providing a negative pressure environment;

A thirteenth control valve provided to the first vacuum line and upstream of the first vacuum pump for controlling opening and closing of the first vacuum line;

a fifth pressure monitor in communication with the first vacuum line for monitoring a pressure of the first vacuum line; and/or

The second recovery module includes:

The third recovery pipeline is respectively communicated with the storage equipment and the three-stage condensation system and is used for recovering ammonia;

The twentieth control valve is arranged on the third recovery pipeline and used for controlling the opening and closing of the third recovery pipeline;

And a ninth one-way valve arranged on the third recovery pipeline and positioned downstream of the twentieth control valve.

6. An ammonia gas filling device as defined in any one of claims 4 to 5 further comprising:

7. The ammonia gas filling device of claim 6, wherein the first negative pressure module further comprises:

A fourteenth control valve, which is arranged between the communication positions of the second negative pressure module and the first negative pressure module and is used for controlling the opening and closing between the second negative pressure module and the first negative pressure module; and/or

The second negative pressure module includes:

The two ends of the second vacuum pipeline are respectively communicated with the first negative pressure module;

The second vacuum pump is communicated with the second vacuum pipeline and is used for providing a negative pressure environment;

a fifteenth control valve disposed in the second vacuum line upstream of the second vacuum pump;

A sixteenth control valve is disposed in the second vacuum line downstream of the second vacuum pump.

8. An ammonia gas filling device as defined in claim 6, further comprising:

9. The ammonia gas filling device of claim 8, wherein the second pressure monitoring module comprises:

The second pressure monitoring pipeline is communicated with the first negative pressure module;

A seventeenth control valve, which is arranged on the second pressure monitoring pipeline and is used for controlling the opening and closing of the second pressure monitoring pipeline;

And the sixth pressure monitor is communicated with the second pressure monitoring pipeline and is used for monitoring the pressure of the second pressure monitoring pipeline.

10. An ammonia gas filling system, comprising:

The ammonia gas filling device of any one of claims 1 to 9, which is in communication with an ammonia source, a storage device, respectively, for capturing and delivering ammonia gas to the storage device, and capturing gaseous ammonia gas delivered by the storage device;