CN117167646A

CN117167646A - Special gas filling device, system and method

Info

Publication number: CN117167646A
Application number: CN202311215947.XA
Authority: CN
Inventors: 纪雪峰; 陈亮; 范威威
Original assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Current assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Priority date: 2023-09-20
Filing date: 2023-09-20
Publication date: 2023-12-05

Abstract

The invention relates to a special gas filling device, a special gas filling system and a special gas filling method. The device has the advantages that the first purging unit and the second purging unit are arranged to respectively purge nitrogen and helium, so that the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia is improved, and the purity of the gas is improved; setting an analysis unit, a recovery unit and a tail gas treatment unit, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas; the tail gas treatment unit is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the pressure relief unit is arranged to prevent sudden pressure increase in the heating process from causing explosion accidents and improve the safety of the system.

Description

Special gas filling device, system and method

Technical Field

The invention relates to the technical field of semiconductor production, in particular to a special gas filling device, a special gas filling system and a special gas filling method.

Background

In semiconductor processing, some specialty gases, such as ammonia, are commonly used. According to different production processes, different storage media are used for storing ammonia. Common storage media include tank trucks, T-bottles, steel cylinders, and the like.

Before using the storage medium, special gas filling is required for the storage medium. In the existing filling system, the following flow is generally included: 1) Heating the tank car and the T bottle to convert the residual liquid ammonia into gaseous ammonia; 2) And directly filling ammonia gas into the tank car, the T-shaped bottle and the steel bottle by adopting direct filling or low vacuum filling.

However, the existing filling systems have the following problems: 1) In the heating process, the problem of over-high pressure is easy to occur, so that explosion is easy to be caused; 2) The special gas source directly fills the tank wagon, the T bottle and the steel bottle, the filled ammonia gas cannot be analyzed, and the problem of unstable ammonia gas quality is easy to occur; 3) When direct filling or low vacuum filling is adopted, the cleanliness of the pipeline is poor due to the residual air of the filling pipeline and the compressor, so that the quality of filled ammonia gas is affected; 4) Since ammonia is not analyzed, the consistency of ammonia quality in the filling process cannot be ensured; 5) When filling is finished, ammonia gas can be remained in the filling pipe, and environmental pollution is easily caused by direct discharge.

At present, no effective solution is proposed for solving the problems of explosion caused by high heating pressure, unstable ammonia quality, low pipeline cleanliness, environmental pollution caused by direct ammonia discharge and the like in the related technologies.

Disclosure of Invention

The invention aims to overcome the defects in the prior art, and provides a special gas filling device, a special gas filling system and a special gas filling method, so as to solve the problems of explosion caused by high heating pressure, unstable ammonia quality, low pipeline cleanliness, environmental pollution caused by direct discharge of ammonia and the like in the related art.

In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:

in a first aspect, there is provided a specialty gas filling apparatus comprising:

the filling unit is respectively communicated with the special gas source and the storage device and is used for acquiring and transmitting the special gas to the storage device;

the first purging unit is communicated with the filling unit and is used for purging the filling unit by using a first purging gas;

the second purging unit is communicated with the filling unit and is used for purging the filling unit by using a second purging gas;

the recovery unit is communicated with the filling unit and is used for recovering the special gas;

The analysis unit is communicated with the filling unit and is used for analyzing the special gas;

the tail gas treatment unit is communicated with the filling unit and is used for treating tail gas;

the pressure relief unit is communicated with the filling unit and used for relieving pressure.

In some of these embodiments, further comprising:

and the vacuum unit is respectively communicated with the filling unit and the tail gas treatment unit and is used for providing vacuum for the filling unit so as to enable the gas of the filling unit to be transmitted to the tail gas treatment unit.

In a second aspect, there is provided a specialty gas filling system comprising:

the special gas filling device according to the first aspect, wherein the special gas filling device is respectively communicated with a special gas source and a storage device and is used for acquiring and transmitting the special gas to the storage device and acquiring the gaseous special gas transmitted by the storage device;

the heating device is arranged at the side part of the storage device and is used for heating the storage device so as to convert the liquid special gas of the storage device into gaseous special gas;

the weight detection device is arranged at the bottom of the storage device and used for detecting the weight of the storage device.

In a third aspect, there is provided a specialty gas filling method applied to the specialty gas filling apparatus of the first aspect.

In a fourth aspect, there is provided a specialty gas filling method applied to the specialty gas filling system of the second aspect.

Compared with the prior art, the invention has the following technical effects:

according to the special gas filling device, system and method, the first purging unit and the second purging unit are arranged to purge nitrogen and helium respectively, so that the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia is improved, and the purity of the gas is improved; setting an analysis unit, a recovery unit and a tail gas treatment unit, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas; the tail gas treatment unit is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the pressure relief unit is arranged to prevent sudden pressure increase in the heating process from causing explosion accidents and improve the safety of the system.

Drawings

FIGS. 1 to 5 are frame views of a special gas filling device according to an embodiment of the present invention;

FIG. 6 is a frame diagram of a specialty gas filling system according to an embodiment of the present invention;

FIG. 7 is a schematic illustration of a specialty gas filling system according to an embodiment of the present invention;

fig. 8a to 8d are partial schematic views of a special gas filling system according to an embodiment of the invention.

Wherein the reference numerals are as follows: 100. a filling unit; 1101. a first filling element; 1102. a first regulator valve element; 1103. a first filter element; 1104. a first one-way valve element; 1105. a second regulator valve element; 1106. a third regulator valve element; 1107. a first switching valve element; 1108. a first pressure detecting element; 1109. a second switching valve element; 1110. a second pressure detecting element; 1201. a second filling element; 1202. a fourth regulator valve element; 1203. a second filter element; 1204. a tenth one-way valve element; 1205. a fifth regulator valve element; 1206. a twelfth switching valve element; 1207. a fifth pressure detecting element; 1208. a thirteenth switching valve element; 1209. a sixth pressure detecting element; 1301. a third filling element; 1302. a twenty-fourth switching valve element; 1303. a third filter element; 1304. an eighteenth one-way valve element; 1305. a twenty-fifth switching valve element; 1306. a twenty-first switching valve element; 1307. a tenth pressure detecting element; 1308. a twenty-seventh switching valve element; 1309. an eleventh pressure detecting element;

200. A first purge unit; 2101. a first purge element; 2102. a third switching valve element; 2103. a second one-way valve element; 2104. a fourth switching valve element; 2105. a third pressure detecting element; 2201. a third purge element; 2202. a fourteenth switching valve element; 2203. an eleventh one-way valve element; 2204. a fifteenth switching valve element; 2205. a seventh pressure detecting element; 2301. a fifth purge element; 2302. a twenty-eighth switching valve element; 2303. a nineteenth one-way valve element; 2304. a twenty-ninth switching valve element; 2305. a twelfth pressure detecting element;

300. a second purge unit; 3101. a second purge element; 3102. a fifth switching valve element; 3103. a third one-way valve element; 3201. a fourth purge element; 3202. a sixteenth switching valve member; 3203. a twelfth one-way valve element; 3301. a sixth purge element; 3302. a thirty-first switching valve element; 3303. a twentieth one-way valve element;

400. a recovery unit; 4101. a first recovery element; 4102. a sixth switching valve element; 4103. a fourth one-way valve element; 4104. a second recovery element; 4105. a seventh switching valve element; 4106. a fifth one-way valve element; 4201. a third recovery element; 4202. a seventeenth switching valve element; 4203. a thirteenth one-way valve element; 4204. an eighteenth switching valve element; 4205. a fourth recovery element; 4206. a nineteenth switching valve element; 4207. an eighth pressure detecting element; 4301. a fifth recovery element; 4302. a thirty-first switching valve element; 4303. twenty-first one-way valve element

500. An analysis unit; 5101. a first analysis element; 5102. an eighth switching valve element; 5103. a sixth one-way valve element; 5201. a second analysis element; 5202. a twentieth switching valve element; 5203. a fourteenth one-way valve element; 5301. a third analysis element; 5302. a thirty-second switching valve element; 5303. a twenty-second one-way valve element;

600. a tail gas treatment unit; 6101. a first tail gas treatment element; 6102. a ninth switching valve element; 6103. a seventh one-way valve element; 6201. a second tail gas treatment element; 6202. a twenty-first switching valve element; 6203. a fifteenth check valve element; 6301. a third tail gas treatment element; 6302. a thirty-third switching valve element; 6303. a twenty-third one-way valve element;

700. a pressure relief unit; 7101. a first pressure relief element; 7102. a tenth switching valve element; 7103. a first blasting element; 7104. a first relief valve element; 7105. an eighth one-way valve element; 7106. a fourth pressure detecting element; 7107. a second pressure relief element; 7108. an eleventh switching valve element; 7109. a ninth check valve element; 7201. a third pressure relief element; 7202. a twenty-second switching valve element; 7203. a second blasting element; 7204. a second relief valve element; 7205. a sixteenth one-way valve element; 7206. a ninth pressure detecting element; 7207. a fourth pressure relief element; 7208. a twenty-third switching valve element; 7209. a seventeenth one-way valve element; 7301. a fifth pressure relief element; 7302. a thirty-fourth switching valve element; 7303. a third blasting element; 7304. a third relief valve element; 7305. a twenty-fourth one-way valve element; 7306. a thirteenth pressure detecting element; 7307. a sixth pressure relief element; 7308. a thirty-fifth switching valve element; 7309. a twenty-fifth one-way valve element;

800. A vacuum unit; 8001. a first vacuum element; 8002. a thirty-first switching valve element; 8003. a fourteenth pressure detecting element; 8004. a second vacuum element; 8005. a seventeenth switching valve element; 8006. a thirty-eighth switching valve element; 8007. a thirty-ninth switching valve element; 8008. a forty-second switching valve element; 8009. a fifteenth pressure detecting element;

A. a special gas filling device; B. a heating device; C. a weight detecting device; D. a storage device.

Detailed Description

The present application will be described and illustrated with reference to the accompanying drawings and examples in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application. All other embodiments, which can be made by a person of ordinary skill in the art based on the embodiments provided by the present application without making any inventive effort, are intended to fall within the scope of the present application.

It is apparent that the drawings in the following description are only some examples or embodiments of the present application, and it is possible for those of ordinary skill in the art to apply the present application to other similar situations according to these drawings without inventive effort. Moreover, it should be appreciated that while such a development effort might be complex and lengthy, it would nevertheless be a routine undertaking of design, fabrication, or manufacture for those of ordinary skill having the benefit of this disclosure, and thus should not be construed as having the benefit of this disclosure.

Reference in the specification to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is to be expressly and implicitly understood by those of ordinary skill in the art that the described embodiments of the application can be combined with other embodiments without conflict.

Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "a," "an," "the," and similar referents in the context of the application are not to be construed as limiting the quantity, but rather as singular or plural. The terms "comprising," "including," "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed or may include additional steps or elements not expressly listed or inherent to such process, method, article, or apparatus. The terms "connected," "coupled," and the like in connection with the present application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "plurality"/"a plurality" as used herein means two or more. "and/or" describes an association relationship of an association object, meaning that there may be three relationships, e.g., "a and/or B" may mean: a exists alone, A and B exist together, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship. The terms "first," "second," "third," and the like, as used herein, are merely distinguishing between similar objects and not representing a particular ordering of objects.

Example 1

The present embodiment relates to a special gas filling device of the present invention.

As shown in fig. 1, a special gas filling device includes a filling unit 100, a first purge unit 200, a second purge unit 300, a recovery unit 400, an analysis unit 500, an exhaust gas treatment unit 600, and a pressure relief unit 700. The filling unit 100 is respectively communicated with a special gas source and a storage device and is used for acquiring and transmitting the special gas to the storage device; the first purge unit 200 communicates with the filling unit 100 for purging the filling unit 100 with a first purge gas; the second purge unit 300 is in communication with the filling unit 100 for purging the filling unit 100 with a second purge gas; the recovery unit 400 is communicated with the filling unit 100 and is used for recovering the special gas; the analysis unit 500 is communicated with the filling unit 100 and is used for analyzing the special gas; the exhaust gas treatment unit 600 is in communication with the filling unit 100 for treating exhaust gas; the pressure relief unit 700 communicates with the filling unit 100 for pressure relief.

In the invention, the special gas is ammonia, the first purge gas is nitrogen, and the second purge gas is helium.

In this embodiment, the storage device is a tank car.

As shown in fig. 2, the filling unit 100 includes a first filling element 1101, a first regulating valve element 1102, a first filter element 1103, a first check valve element 1104, a second regulating valve element 1105, a third regulating valve element 1106, a first switching valve element 1107, a first pressure detecting element 1108, a second switching valve element 1109, and a second pressure detecting element 1110. The first filling element 1101 is respectively communicated with a special gas source, a storage device, a first purging unit 200, a second purging unit 300, a recovery unit 400, an analysis unit 500, a tail gas treatment unit 600 and a pressure relief unit 700, and is used for acquiring and transmitting the special gas to the storage device; the first regulating valve element 1102 is provided to the first filling element 1101; the first filtering element 1103 is disposed on the first filling element 1101 and downstream of the first regulating valve element 1102, and is used for filtering the specialty gas transmitted by the specialty gas source; a first one-way valve element 1104 is disposed downstream of the first filter element 1103 and is disposed at the first filler element 1101; the second regulating valve element 1105 is disposed on the first filling element 1101 downstream of the first one-way valve element 1104; the third regulator valve element 1106 is disposed in the first fill element 1101 downstream of the second regulator valve element 1105 and upstream of the storage device; a first switching valve element 1107 is disposed on the first fill element 1101 downstream of the second regulator valve element 1105 and downstream of the reservoir; the first pressure detecting element 1108 is disposed in the first filling element 1101 and is located between the first one-way valve element 1104 and the second regulating valve element 1105; the second switching valve element 1109 is provided to the first filling element 1101 and downstream of the second regulating valve element 1105; the second pressure detecting element 1110 is provided to the first filling element 1101 downstream of the second switching valve element 1109.

The first filling element 1101 includes a first filling line, a first port, a second port, and a third port. Wherein the first filling pipe is respectively communicated with the first purging unit 200, the second purging unit 300, the recovery unit 400, the analysis unit 500, the tail gas treatment unit 600 and the pressure relief unit 700; the first interface is respectively connected with a first filling pipeline and a special gas source; the second interface is respectively connected with the first filling pipeline and the inlet of the storage device; the third interface is respectively connected with the first filling pipeline and the outlet of the storage device.

The first regulating valve element 1102 is arranged on the first filling pipeline and is positioned at the downstream of the first port, the upstream of the second port and the upstream of the third port; the first filter element 1103 is disposed on the first fill line upstream of the second port and upstream of the third port; the first one-way valve element 1104 is disposed in the first fill line upstream of the second port and upstream of the third port; the second regulating valve element 1105 is arranged on the first filling pipeline and is positioned at the upstream of the second interface and the upstream of the third interface; a third regulator valve element 1106 is disposed in the first fill line upstream of the second port; a first switching valve element 1107 is disposed in the first fill line upstream of the third port; the first pressure detection element 1108 is in communication with the first filling line for detecting the pressure of the first filling line; the second switching valve element 1109 is provided to the first charging line; the second pressure detecting element 1110 is in communication with the first filling line for detecting the pressure of the first filling line.

In some of these embodiments, the first, second, and third regulator valve elements 1102, 1105, 1106 are bellows valves.

In some of these embodiments, the first filter element 1103 is a filter.

In some of these embodiments, the first one-way valve element 1104 is a one-way valve.

In some of these embodiments, the first and second switching valve elements 1107, 1109 are diaphragm valves, including but not limited to pneumatic diaphragm valves, manual diaphragm valves.

In some of these embodiments, the first and second pressure detection elements 1108, 1110 are pressure detection instruments, including, but not limited to, pressure gauges, pressure sensors.

As shown in fig. 2, the first purge unit 200 includes a first purge element 2101, a third switching valve element 2102, a second check valve element 2103, a fourth switching valve element 2104, and a third pressure detecting element 2105. Wherein the first purging element 2101 is in communication with the filling unit 100 for purging the filling unit 100 with a first purge gas; the third switching valve element 2102 is provided to the first purge element 2101; the second check valve element 2103 is disposed downstream of the third switching valve element 2102 from the first purge element 2101; the fourth switching valve element 2104 is disposed on the first purge element 2101 downstream of the second check valve element 2103; the third pressure detecting element 2105 is disposed on the first purge element 2101 and is located between the second check valve element 2103 and the fourth switching valve element 2104.

Specifically, the first purge element 2101 communicates with the first fill element 1101.

The first purge element 2101 comprises a first purge line and a fourth interface. Wherein the first purge line is in communication with the first filler line; the fourth interface is connected with the first purging pipeline and the first purging gas source respectively.

A third switching valve element 2102 is disposed in the first purge line downstream of the fourth port; the second check valve element 2103 is disposed on the first purge line; the fourth switching valve element 2104 is disposed on the first purge line upstream of the communication position of the first purge line with the first filling line; the third pressure sensing element 2105 is in communication with the first purge line for sensing the pressure of the first purge line.

In some of these embodiments, the third switching valve element 2102, the fourth switching valve element 2104 are diaphragm valves, including but not limited to pneumatic diaphragm valves, manual diaphragm valves.

In some of these embodiments, the second one-way valve element 2103 is a one-way valve.

In some of these embodiments, the third pressure sensing element 2105 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

As shown in fig. 2, the second purge unit 300 includes a second purge element 3101, a fifth switching valve element 3102, and a third check valve element 3103. Wherein the second purge element 3101 is in communication with the filling unit 100 for purging the filling unit 100 with a second purge gas; the fifth switching valve element 3102 is provided to the second purge element 3101; the third one-way valve element 3103 is disposed downstream of the second purge element 3101 and downstream of the fifth switching valve element 3102.

Specifically, the second purging element 3101 is in communication with the first filling element 1101.

In some of these embodiments, the second sweeping element 3101 communicates with the first sweeping element 2101.

The second purge element 3101 comprises a second purge line and a fifth interface. Wherein the second purge line is in communication with the first filler line; the fifth interface is respectively connected with the second purging pipeline and the second purging gas source.

Further, the second purge line is in communication with the first purge line. Wherein the communication location of the second purge line with the first purge line is between the second unidirectional valve element 2103 and the fourth switching valve element 2104.

A fifth switching valve element 3102 is disposed in the second purge line downstream of the fifth port; a third one-way valve element 3103 is disposed in the second purge line.

In some of these embodiments, the fifth switching valve element 3102 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the third one-way valve element 3103 is a one-way valve.

As shown in fig. 2, the recovery unit 400 includes a first recovery element 4101, a sixth switching valve element 4102, and a fourth check valve element 4103. Wherein the first recovery element 4101 is in communication with the filling unit 100 for recovering the specialty gas; the sixth switching valve element 4102 is provided to the first recovery element 4101; the fourth check valve element 4103 is disposed on the first recovery element 4101 downstream of the sixth switching valve element 4102.

Specifically, the first recovery element 4101 communicates with the first filling element 1101.

The first recovery element 4101 comprises a first recovery line and a sixth interface. Wherein the first recovery pipeline is communicated with the first filling pipeline; the sixth interface is respectively connected with the first recovery pipeline and the three-stage condensation system.

In some of these embodiments, the first recovery line communicates with the first charging line at a location upstream of the third interface.

The sixth switching valve element 4102 is disposed in the first recovery pipeline and upstream of the sixth port; the fourth check valve element 4103 is disposed in the first recovery line upstream of the sixth interface.

In some of these embodiments, the sixth switching valve element 4102 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the fourth one-way valve element 4103 is a one-way valve.

Further, the recovery unit 400 further includes a second recovery element 4104, a seventh switching valve element 4105, and a fifth one-way valve element 4106. Wherein the second recovery element 4104 is in communication with the filling unit 100 for recovering the specialty gas; the seventh switching valve element 4105 is provided to the second recovery element 4104; the fifth check valve element 4106 is disposed on the second recovery element 4104 downstream of the seventh switching valve element 4105.

Specifically, the second recovery element 4104 communicates with the first filling element 1101.

The second recovery element 4104 comprises a second recovery line and a seventh interface. Wherein the second recovery pipeline is communicated with the first filling pipeline; the seventh interface is respectively connected with the second recovery pipeline and the first-stage condensation system.

In some of these embodiments, the second recovery line communicates with the first fill line at a location upstream of the third junction.

The seventh switching valve element 4105 is disposed in the second recovery pipeline and upstream of the seventh port; the fifth one-way valve element 4106 is disposed in the second recovery conduit and upstream of the seventh interface.

In some of these embodiments, the seventh switching valve element 4105 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the fifth one-way valve element 4106 is a one-way valve.

As shown in fig. 2, the analysis unit 500 includes a first analysis element 5101, an eighth switching valve element 5102, and a sixth check valve element 5103. Wherein the first analyzing element 5101 is in communication with the filling unit 100 for analyzing the specialty gas; the eighth switching valve element 5102 is provided to the first analyzing element 5101; a sixth one-way valve element 5103 is provided downstream of the first analysis element 5101 and the eighth switching valve element 5102.

Specifically, the first analysis element 5101 communicates with the first filling element 1101.

The first analysis element 5101 includes a first analysis line and an eighth interface. Wherein the first analysis pipeline is communicated with the first filling pipeline; the eighth interface is respectively connected with the first analysis pipeline and the analysis system.

In some of these embodiments, the location of communication of the first analysis line with the first fill line is downstream of the location of communication of the first purge line with the first fill line.

The eighth switching valve element 5102 is provided in the first analysis line and upstream of the eighth port; sixth check valve element 5103 is disposed in the first analytical line upstream of the eighth port.

In some of these embodiments, the eighth switching valve element 5102 is a diaphragm valve including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, sixth check valve element 5103 is a check valve.

As shown in fig. 2, the exhaust gas treatment unit 600 includes a first exhaust gas treatment element 6101, a ninth on-off valve element 6102, and a seventh one-way valve element 6103. Wherein, the first tail gas treatment element 6101 is in communication with the filling unit 100 for treating tail gas; the ninth switching valve element 6102 is provided in the first exhaust gas treatment element 6101; the seventh one-way valve element 6103 is provided downstream of the first exhaust gas treatment element 6101 and downstream of the ninth on-off valve element 6102.

Specifically, the first exhaust gas treatment element 6101 communicates with the first charging element 1101.

The first exhaust treatment element 6101 includes a first exhaust treatment line and a ninth interface. The first tail gas treatment pipeline is communicated with the first filling pipeline; the ninth interface is connected with the first tail gas treatment pipeline and the tail gas treatment system respectively.

In some of these embodiments, the location of communication of the first exhaust treatment line with the first charging line is downstream of the location of communication of the first analysis line with the first charging line.

The ninth switching valve element 6102 is provided in the first exhaust treatment line upstream of the ninth junction; a seventh one-way valve element 6103 is provided in the first exhaust treatment line upstream of the ninth junction.

In some of these embodiments, the ninth switching valve element 6102 is a diaphragm valve, including but not limited to pneumatic diaphragm valves, manual diaphragm valves.

In some of these embodiments, the seventh one-way valve element 6103 is a one-way valve.

As shown in fig. 2, the pressure relief unit 700 includes a first pressure relief element 7101, a tenth switching valve element 7102, a first burst element 7103, a first pressure relief valve element 7104, an eighth one-way valve element 7105, a fourth pressure detection element 7106, a second pressure relief element 7107, an eleventh switching valve element 7108, and a ninth one-way valve element 7109. Wherein, the first pressure relief unit 700 is communicated with the filling unit 100 and is used for pressure relief; the tenth switching valve element 7102 is provided to the first pressure release element 7101; the first bursting element 7103 is disposed downstream of the first pressure relief element 7101 and downstream of the tenth switching valve element 7102; the first relief valve element 7104 is disposed in the first relief element 7101 downstream of the first relief valve element 7104; the eighth one-way valve element 7105 is disposed in the first pressure relief element 7101 and downstream of the first pressure relief valve element 7104; the fourth pressure detecting element 7106 is disposed between the first pressure releasing element 7101 and the first bursting element 7103 and the first pressure releasing valve element 7104; the second pressure release element 7107 is respectively communicated with the first pressure release element 7101 and the filling unit 100 and is used for pressure release; the eleventh switching valve element 7108 is provided to the second pressure relief element 7107; a ninth one-way valve element 7109 is provided to the second pressure relief element 7107 downstream of the eleventh switching valve element 7108.

Specifically, the first pressure relief element 7101 communicates with the first filling element 1101; the second pressure relief element 7107 communicates with the first filler element 1101.

The first pressure relief element 7101 includes a first pressure relief line and a tenth port. Wherein, the first pressure relief pipeline is respectively communicated with the first filling pipeline and the second pressure relief element 7107; the tenth interface is connected with the first pressure relief pipeline and the gas washing system respectively.

In some of these embodiments, the location of communication of the first pressure relief line with the first charging line is downstream of the location of communication of the second recovery line with the first charging line, and upstream of the location of communication of the first purge line with the first charging line.

The tenth switching valve element 7102 is disposed in the first pressure relief line upstream of the tenth port; the first blasting element 7103 is disposed in the first pressure relief pipeline and upstream of the tenth port; the first pressure relief valve element 7104 is disposed in the first pressure relief line upstream of the tenth port; the eighth one-way valve element 7105 is disposed in the first pressure relief pipeline and upstream of the tenth port; the fourth pressure detecting element 7106 is in communication with the first pressure relief pipeline for detecting a pressure of the first pressure relief pipeline.

In some of these embodiments, tenth switching valve element 7102 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the first bursting element 7103 is a burst disk.

In some of these embodiments, the first relief valve element 7104 is an angle valve.

In some of these embodiments, the eighth one-way valve element 7105 is a one-way valve.

In some of these embodiments, the fourth pressure detection element 7106 is a pressure detection instrument including, but not limited to, a pressure gauge, a pressure sensor.

The second pressure relief element 7107 includes a second pressure relief line. The second pressure release pipeline is respectively communicated with the first pressure release pipeline and the first filling pipeline, and the communication position of the second pressure release pipeline and the first pressure release pipeline is located at the downstream of the eighth one-way valve element 7105.

In some of these embodiments, the location of communication of the second pressure relief line with the first charging line is downstream of the location of communication of the second recovery line with the first charging line, and upstream of the location of communication of the first purge line with the first charging line.

The eleventh switching valve element 7108 is disposed in the second pressure relief line; the ninth check valve element 7109 is disposed in the second pressure relief line.

In some of these embodiments, the eleventh switching valve element 7108 is a diaphragm valve including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve.

In some of these embodiments, the ninth one-way valve element 7109 is a one-way valve.

The special gas filling method of the embodiment comprises the following steps: (one) a first purge step: (II) a first vacuum step; (III) a first recovery step; (IV) a second purging step; (V) a second vacuum step; a sixth filling step; and (seventh) a second recovery step.

In the (one) first purging step, the filling unit 100 is alternately purged using the first purging unit 200 and the second purging unit 300.

In the (second) first vacuum step, after the (first) is finished, the filling unit 100 is vacuumized by the vacuum unit 800 to discharge the gas of the filling unit 100 to the exhaust gas treatment unit 600.

In the (third) first recovery step, after the (second) is finished, the residual gas (converted from a liquid state to a gas state) of the storage device is recovered to the three-stage condensation system or the one-stage condensation system through the recovery unit 400.

In the (fourth) second purging step, after the (third) is finished, the storage device is alternately purged using the first purging unit 200 and the second purging unit 300.

In the (fifth) second vacuum step, after the (fourth) is completed, the storage device is vacuumized by the vacuum unit 800 to discharge the gas of the storage device to the exhaust gas treatment unit 600.

In the (sixth) filling step, after the end of (fifth), the storage device is filled with ammonia gas by the filling unit 100.

In the (seventh) second recovery step, after the end of (sixth), ammonia gas of the filling unit 100 is recovered by the recovery unit 400, or the filling unit 100 is evacuated by the vacuum unit 800 to discharge the gas of the filling unit 100 to the exhaust gas treatment unit 600.

The embodiment has the advantages that the first purging unit and the second purging unit are arranged to respectively purge nitrogen and helium, so that the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipelines, the utilization efficiency of the ammonia is improved, and meanwhile, the purity of the gas is improved; setting an analysis unit, a recovery unit and a tail gas treatment unit, and carrying out primary condensation recovery on the ammonia under the condition that the ammonia is qualified; under the condition that the ammonia gas is unqualified, carrying out tertiary condensation recovery on the ammonia gas; the tail gas treatment unit is arranged to treat the gas which is not fully utilized or condensed, so that the pollution to the environment is reduced; the pressure relief unit is arranged to prevent sudden pressure increase in the heating process from causing explosion accidents and improve the safety of the system.

Example 2

The difference between this embodiment and embodiment 1 is that: the filling unit 100 and the recovery unit 400 have different structures.

In this embodiment, the storage device is a T-bottle.

As shown in fig. 3, the filling unit 100 includes a second filling element 1201, a fourth adjustment valve element 1202, a second filter element 1203, a tenth one-way valve element 1204, a fifth adjustment valve element 1205, at least a twelfth switching valve element 1206, a fifth pressure detecting element 1207, a thirteenth switching valve element 1208, and a sixth pressure detecting element 1209. The second filling element 1201 is respectively communicated with the special gas source, the storage device, the first purging unit 200, the second purging unit 300, the recovery unit 400, the analysis unit 500, the tail gas treatment unit 600 and the pressure relief unit 700, and is used for acquiring and transmitting the special gas to the storage device; the fourth regulating valve element 1202 is arranged on the second filling element 1201; the second filtering element 1203 is disposed on the second filling element 1201 and is located downstream of the fourth adjusting valve element 1202, and is used for filtering the specialty gas transmitted by the specialty gas source; a tenth one-way valve element 1204 is provided on the second filler element 1201 downstream of the second filter element 1203; a fifth adjustment valve element 1205 is disposed in the second filling element 1201 downstream of the tenth one-way valve element 1204; a twelfth switching valve element 1206 is disposed on the second filling element 1201 downstream of the fifth regulating valve element 1205 and upstream of the storage device; a fifth pressure sensing element 1207 is disposed within the second filler element 1201 and between the tenth unidirectional valve element 1204 and the fifth regulator valve element 1205; a thirteenth switching valve element 1208 is disposed on the second filling element 1201 downstream of the fifth regulating valve element 1205; a sixth pressure detecting element 1209 is provided to the second filling element 1201 downstream of the thirteenth switching valve element 1208.

The second filling member 1201 comprises a second filling line, an eleventh port and at least a twelfth port. Wherein the second filling pipeline is respectively communicated with the first purging unit 200, the second purging unit 300, the recovery unit 400, the analysis unit 500, the tail gas treatment unit 600 and the pressure relief unit 700; the eleventh interface is respectively connected with the second filling pipeline and the special gas source; the twelfth interface is respectively connected with the second filling pipeline and the inlet of the storage device.

The fourth regulator valve element 1202 is disposed in the second fill line downstream of the eleventh port and upstream of the twelfth port; the second filter element 1203 is disposed in the second fill line upstream of the twelfth port; a tenth one-way valve element 1204 is disposed in the second fill line upstream of the twelfth junction; a fifth regulator valve element 1205 is disposed in the second fill line upstream of the twelfth port; a twelfth switching valve element 1206 is disposed in the second fill line upstream of the twelfth junction; the fifth pressure detecting element 1207 is in communication with the second filling line for detecting the pressure of the second filling line; the thirteenth switching valve element 1208 is disposed in the second fill line; the sixth pressure detecting element 1209 is in communication with the second filling line for detecting the pressure of the second filling line.

In some of these embodiments, the twelfth switching valve element 1206 is a number. A number of twelfth switching valve elements 1206 are arranged in parallel.

In some of these embodiments, fourth adjustment valve element 1202, fifth adjustment valve element 1205 are bellows valves; the second filter element 1203 is a filter; tenth unidirectional valve element 1204 is a unidirectional valve; the twelfth switching valve element 1206, thirteenth switching valve element 1208 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the fifth pressure detecting element 1207, the sixth pressure detecting element 1209 are pressure detecting instruments including, but not limited to, pressure gauges, pressure sensors.

As shown in fig. 3, the first purge unit 200 includes a third purge element 2201, a fourteenth switching valve element 2202, an eleventh one-way valve element 2203, a fifteenth switching valve element 2204, and a seventh pressure detecting element 2205. Wherein the third purging element 2201 is in communication with the charging unit 100 for purging the charging unit 100 with the first purge gas; the fourteenth switching valve element 2202 is provided to the third purge element 2201; an eleventh one-way valve element 2203 is disposed on the third purge element 2201 downstream of the fourteenth switching valve element 2202; the fifteenth switching valve element 2204 is provided to the third purge element 2201 downstream of the eleventh check valve element 2203; the seventh pressure detecting element 2205 is disposed between the third purge element 2201 and the eleventh check valve element 2203 and the fifteenth on-off valve element 2204.

Specifically, the third purge element 2201 communicates with the second filler element 1201.

The third purge element 2201 comprises a third purge line and a thirteenth interface. Wherein the third purging pipeline is communicated with the second filling pipeline; the thirteenth interface is respectively connected with the third purging pipeline and the first purging gas source.

A fourteenth switching valve element 2202 is disposed in the third purge line downstream of the thirteenth port; the eleventh check valve element 2203 is disposed in the third purge line; the fifteenth switching valve element 2204 is disposed in the third purge line upstream of the communication position of the third purge line and the second filling line; the seventh pressure sensing element 2205 is in communication with the third purge line for sensing the pressure of the third purge line.

In some embodiments, fourteenth switching valve element 2202, fifteenth switching valve element 2204 are diaphragm valves, including, but not limited to, pneumatic diaphragm valves, manual diaphragm valves; the eleventh one-way valve element 2203 is a one-way valve; the seventh pressure sensing element 2205 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

As shown in fig. 3, the second purge unit 300 includes a fourth purge element 3201, a sixteenth switching valve element 3202, and a twelfth one-way valve element 3203. Wherein the fourth purge element 3201 is in communication with the charging unit 100 for purging the charging unit 100 with a second purge gas; sixteenth switching valve element 3202 is disposed to fourth purge element 3201; a twelfth check valve element 3203 is disposed downstream of the fourth purge element 3201 and downstream of the sixteenth switching valve element 3202.

Specifically, the fourth purge element 3201 communicates with the second filler element 1201.

In some of these embodiments, the fourth purge element 3201 communicates with the third purge element 2201.

The fourth purge element 3201 comprises a fourth purge line and a fourteenth interface. Wherein the fourth purge line is in communication with the second filler line; the fourteenth interface is respectively connected with the fourth purging pipeline and the second purging gas source.

Further, the fourth purge line is in communication with the third purge line. Wherein a communication position of the fourth purge line and the third purge line is between the eleventh check valve element 2203 and the fifteenth on-off valve element 2204.

A sixteenth switching valve element 3202 is disposed in the fourth purge line downstream of the fourteenth port; a twelfth check valve element 3203 is disposed in the fourth purge line.

In some of these embodiments, sixteenth switching valve element 3202 is a diaphragm valve, including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve; the twelfth check valve element 3203 is a check valve.

As shown in fig. 3, the recovery unit 400 comprises a third recovery element 4201, a seventeenth switching valve element 4202, a thirteenth one-way valve element 4203, an eighteenth switching valve element 4204, at least a fourth recovery element 4205, at least a nineteenth switching valve element 4206, and an eighth pressure detection element 4207. Wherein third recovery element 4201 is in communication with filling unit 100 for recovering specialty gases; the seventeenth switching valve element 4202 is provided to the third recovery element 4201; a thirteenth one-way valve element 4203 is disposed on the third recovery element 4201 downstream of the seventeenth switching valve element 4202; an eighteenth switching valve element 4204 is disposed downstream of the thirteenth one-way valve element 4203 and in the third recovery element 4201; the fourth recovery element 4205 is in communication with the third recovery element 4201, the storage means, respectively; a nineteenth switching valve element 4206 is disposed downstream of the storage device and disposed on the fourth recovery element 4205; the eighth pressure detection element 4207 is arranged on the fourth recovery element 4205.

In particular, the third recovery element 4201 communicates with the second filling element 1201.

Third recovery element 4201 includes a third recovery conduit and a fifteenth interface. Wherein the third recovery pipeline is communicated with the second filling pipeline; the fifteenth interface is respectively connected with the third recovery pipeline and the first-stage condensation system.

Seventeenth switching valve element 4202 is disposed in the third recovery line upstream of the fifteenth port; thirteenth one-way valve element 4203 is disposed in third recovery conduit upstream of fifteenth junction; an eighteenth switching valve element 4204 is disposed in the third recovery line upstream of the fifteenth junction.

In some of these embodiments, seventeenth switch valve element 4202, eighteenth switch valve element 4204 are diaphragm valves, including but not limited to pneumatic diaphragm valves, manual diaphragm valves; thirteenth one-way valve element 4203 is a one-way valve.

Fourth recovery element 4205 includes a fourth recovery conduit and a sixteenth interface. Wherein the fourth recovery pipeline is communicated with the third recovery pipeline; the sixteenth interface is respectively connected with the fourth recovery pipeline and the storage device.

In some of these embodiments, the location of communication of the fourth recovery line with the third recovery line is between the seventeenth switching valve element 4202 and the thirteenth one-way valve element 4203.

A nineteenth switching valve element 4206 is disposed in the fourth recovery line downstream of the sixteenth port; eighth pressure sensing element 4207 is in communication with the fourth recovery circuit for sensing pressure in the fourth recovery circuit.

The number of nineteenth switching valve elements 4206 matches the number of twelfth switching valve elements 1206. Generally, the number of nineteenth switching valve elements 4206 is equal to the number of twelfth switching valve elements 1206.

In some of these embodiments, nineteenth switching valve element 4206 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve.

As shown in fig. 3, the analysis unit 500 includes a second analysis element 5201, a twentieth switching valve element 5202, and a fourteenth one-way valve element 5203. Wherein the second analyzing element 5201 is communicated with the filling unit 100 and is used for analyzing the special gas; the twentieth switching valve element 5202 is provided to the second analyzing element 5201; the fourteenth check valve element 5203 is disposed on the second analyzing element 5201 downstream of the twentieth switching valve element 5202.

Specifically, the second analysis element 5201 communicates with the second filling element 1201.

The second analysis element 5201 includes a second analysis line and a seventeenth port. Wherein the second analysis pipeline is communicated with the second filling pipeline; the seventeenth interface is respectively connected with the second analysis pipeline and the analysis system.

In some of these embodiments, the location of communication of the second analysis line with the second fill line is downstream of the location of communication of the third purge line with the second fill line.

The twentieth switching valve element 5202 is disposed in the second analysis line upstream of the seventeenth port; a fourteenth one-way valve element 5203 is disposed in the second analysis conduit upstream of the seventeenth port.

In some of these embodiments, the twentieth switching valve element 5202 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the fourteenth check valve element 5203 is a check valve.

As shown in fig. 3, the exhaust gas treatment unit 600 includes a second exhaust gas treatment element 6201, a twenty-first switching valve element 6202, and a fifteenth one-way valve element 6203. Wherein the second exhaust gas treatment element 6201 is in communication with the charging unit 100 for treating exhaust gas; the twenty-first switching valve element 6202 is provided to the second exhaust gas treatment element 6201; the fifteenth one-way valve element 6203 is disposed downstream of the second exhaust gas treatment element 6201 and the twenty-first switching valve element 6202.

Specifically, the second exhaust gas treatment element 6201 is in communication with the second filler element 1201.

The second exhaust treatment element 6201 includes a second exhaust treatment conduit and an eighteenth interface. Wherein the second tail gas treatment pipeline is communicated with the second filling pipeline; the eighteenth interface is respectively connected with the second tail gas treatment pipeline and the tail gas treatment system.

In some of these embodiments, the location of communication of the second exhaust treatment conduit with the second charging conduit is downstream of the location of communication of the second analysis conduit with the second charging conduit.

The twenty-first switching valve element 6202 is disposed in the second exhaust gas treatment conduit and upstream of the eighteenth port; the fifteenth one-way valve element 6203 is disposed in the second exhaust gas treatment conduit upstream of the eighteenth interface.

In some of these embodiments, the twenty-first switching valve element 6202 is a diaphragm valve, including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve; the fifteenth one-way valve element 6203 is a one-way valve.

As shown in fig. 3, the pressure relief unit 700 includes a third pressure relief element 7201, a twenty-second switching valve element 7202, a second blasting element 7203, a second pressure relief valve element 7204, a sixteenth one-way valve element 7205, a ninth pressure detection element 7206, a fourth pressure relief element 7207, a twenty-third switching valve element 7208, and a seventeenth one-way valve element 7209. Wherein the third pressure relief element 7201 is in communication with the filling unit 100 for pressure relief; the twenty-second switching valve element 7202 is provided to the third pressure relief element 7201; the second blasting element 7203 is provided in the third pressure relief element 7201 downstream of the twenty-second switching valve element 7202; the second relief valve element 7204 is provided to the third relief valve element 7201 downstream of the second relief valve element 7204; a sixteenth one-way valve element 7205 is disposed in the third pressure relief element 7201 downstream of the second pressure relief valve element 7204; the ninth pressure detecting element 7206 is disposed between the third pressure releasing element 7201 and the second bursting element 7203 and the second pressure releasing valve element 7204; the fourth pressure release element 7207 is respectively communicated with the third pressure release element 7201 and the filling unit 100 and is used for pressure release; the twenty-third switching valve element 7208 is provided to the fourth pressure relief element 7207; a seventeenth one-way valve element 7209 is provided in the fourth pressure relief element 7207 downstream of the twenty-third switching valve element 7208.

Specifically, the third pressure relief element 7201 communicates with the second filling element 1201; the fourth pressure relief element 7207 communicates with the second filling element 1201.

Third pressure relief element 7201 includes a third pressure relief line and a nineteenth port. Wherein the third pressure relief pipeline is respectively communicated with the second filling pipeline and the fourth pressure relief element 7207; the nineteenth interface is connected with the third pressure release pipeline and the gas washing system respectively.

In some of these embodiments, the location of communication of the third pressure relief line with the second charging line is downstream of the location of communication of the second recovery line with the second charging line, and upstream of the location of communication of the third purge line with the second charging line.

The twenty-second switching valve element 7202 is provided in the third pressure relief line upstream of the nineteenth port; the second blasting element 7203 is arranged on the third pressure relief pipeline and is positioned at the upstream of the nineteenth interface; a second relief valve element 7204 is disposed in the third relief line upstream of the nineteenth port; a sixteenth one-way valve element 7205 is disposed in the third pressure relief line upstream of the nineteenth port; the ninth pressure detecting element 7206 is in communication with the third pressure relief line for detecting a pressure of the third pressure relief line.

In some of these embodiments, the twenty-second switching valve element 7202 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the second blast element 7203 is a rupture disc; the second relief valve element 7204 is an angle valve; sixteenth one-way valve element 7205 is a one-way valve; the ninth pressure sensing element 7206 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

Fourth pressure relief element 7207 includes a fourth pressure relief line. The fourth pressure release pipeline is respectively communicated with the third pressure release pipeline and the second filling pipeline, and the communication position of the fourth pressure release pipeline and the third pressure release pipeline is located at the downstream of the sixteenth one-way valve element 7205.

In some of these embodiments, the location of communication of the fourth pressure relief line with the second fill line is downstream of the location of communication of the second recovery line with the second fill line, and upstream of the location of communication of the third purge line with the second fill line.

The twenty-third switching valve element 7208 is provided in the fourth pressure relief line; seventeenth one-way valve element 7209 is disposed in the fourth pressure relief line.

In some of these embodiments, the twenty-third switching valve element 7208 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; seventeenth one-way valve element 7209 is a one-way valve.

The technical effects of this embodiment are substantially the same as those of embodiment 1, and will not be described in detail here.

Example 3

In this embodiment, the storage device is a steel cylinder, such as a 47L steel cylinder.

As shown in fig. 4, the filling unit 100 includes a third filling element 1301, a twenty-fourth switching valve element 1302, a third filtering element 1303, an eighteenth one-way valve element 1304, a twenty-fifth switching valve element 1305, at least one twenty-sixth switching valve element 1306, a tenth pressure detecting element 1307, a twenty-seventh switching valve element 1308, and an eleventh pressure detecting element 1309. The third filling element 1301 is respectively communicated with a special gas source, a storage device, the first purging unit 200, the second purging unit 300, the recovery unit 400, the analysis unit 500, the tail gas treatment unit 600 and the pressure relief unit 700, and is used for acquiring and transmitting the special gas to the storage device; the twenty-fourth switching valve element 1302 is provided to the third filling element 1301; a third filtering element 1303 is disposed in the third filling element 1301 and downstream of the fourth switching valve element 1302, for filtering the specialty gas transmitted by the specialty gas source; an eighteenth one-way valve element 1304 is disposed in the third filler element 1301 downstream of the third filter element 1303; a twenty-fifth switching valve element 1305 is disposed in the third filler element 1301 downstream of the eighteenth one-way valve element 1304; a twenty-fifth switching valve element 1306 is provided downstream of the twenty-fifth switching valve element 1305 and upstream of the storage device, and is provided in the third filling element 1301; a tenth pressure detecting element 1307 is provided to the third filling element 1301 and is located between the eighteenth one-way valve element 1304 and the twenty-fifth switching valve element 1305; a twenty-seventh switching valve element 1308 is provided downstream of the twenty-fifth switching valve element 1305 and is provided to the third filling element 1301; an eleventh pressure sensing element 1309 is disposed at the third fill element 1301 downstream of the twenty-seventh switching valve element 1308.

The third filler element 1301 comprises a third filler tube, a twentieth port and at least a twenty-first port. Wherein the third filling pipeline is respectively communicated with the first purging unit 200, the second purging unit 300, the recovery unit 400, the analysis unit 500, the tail gas treatment unit 600 and the pressure relief unit 700; the twentieth interface is respectively connected with the third filling pipeline and the special gas source; the twenty-first interface is respectively connected with the third filling pipeline and the inlet of the storage device.

The twenty-fourth switching valve element 1302 is disposed in the third fill line downstream of the twentieth port and upstream of the twenty-first port; the third filter element 1303 is disposed in the third filling pipe and upstream of the twenty-first interface; an eighteenth one-way valve element 1304 is disposed in the third charging conduit and upstream of the twenty-first port; a twenty-fifth switching valve element 1305 is disposed in the third fill line upstream of the twenty-first port; the twenty-first switching valve element 1306 is disposed in the third fill line upstream of the twenty-first port; the tenth pressure detecting element 1307 is in communication with the third filling line for detecting the pressure of the third filling line; the twenty-seventh switching valve element 1308 is disposed in the third charging line; the eleventh pressure detecting element 1309 is in communication with the third filling line for detecting the pressure of the third filling line.

In some embodiments, the twenty-first switching valve element 1306 is a plurality. A plurality of twenty-first switching valve elements 1306 are arranged in parallel.

In some embodiments, the twenty-fourth switching valve element 1302, the twenty-fifth switching valve element 1305, the twenty-sixth switching valve element 1306, the twenty-seventh switching valve element 1308 are diaphragm valves, including, but not limited to, pneumatic diaphragm valves, manual diaphragm valves; the third filter element 1303 is a filter; the eighteenth one-way valve element 1304 is a one-way valve; the tenth pressure detecting element 1307, eleventh pressure detecting element 1309 are pressure detecting instruments including, but not limited to, pressure gauges, pressure sensors.

As shown in fig. 4, the first purge unit 200 includes a fifth purge element 2301, a twenty-eighth switching valve element 2302, a nineteenth one-way valve element 2303, a twenty-ninth switching valve element 2304, and a twelfth pressure detection element 2305. Wherein the fifth purge element 2301 is in communication with the charging unit 100 for purging the charging unit 100 with a first purge gas; the twenty-eighth switching valve element 2302 is provided to the fifth purge element 2301; a nineteenth one-way valve element 2303 is provided downstream of the fifth purge element 2301 and downstream of the twenty eighth switching valve element 2302; a twenty-ninth switching valve element 2304 is provided downstream of the nineteenth one-way valve element 2303 and is provided to the fifth purge element 2301; the twelfth pressure detecting element 2305 is provided between the fifth purge element 2301 and between the nineteenth one-way valve element 2303 and the twenty-ninth on-off valve element 2304.

Specifically, the fifth purge element 2301 is in communication with the third fill element 1301.

The fifth purge element 2301 includes a fifth purge line and a twenty-second interface. Wherein the fifth purging pipeline is communicated with the second filling pipeline; the twenty-second interface is respectively connected with the fifth purging pipeline and the first purging gas source.

The twenty-eighth switching valve element 2302 is disposed in the fifth purge line downstream of the twenty-second port; a nineteenth one-way valve element 2303 is provided in the fifth purge line; a twenty-ninth on-off valve element 2304 is provided in the fifth purge line upstream of the communication position of the fifth purge line with the second charging line; the twelfth pressure detecting element 2305 is in communication with the fifth purge line for detecting a pressure of the fifth purge line.

In some of these embodiments, the twenty-eighth switching valve element 2302, the twenty-ninth switching valve element 2304 are diaphragm valves, including but not limited to pneumatic diaphragm valves, manual diaphragm valves; nineteenth one-way valve element 2303 is a one-way valve; the twelfth pressure sensing element 2305 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

As shown in fig. 4, the second purge unit 300 includes a sixth purge element 3301, a thirty-first switching valve element 3302, and a twenty-first check valve element 3303. Wherein the sixth purge element 3301 is in communication with the charging unit 100 for purging the charging unit 100 with a second purge gas; a thirty-first switching valve element 3302 is disposed on the sixth purge element 3301; a twenty-first check valve element 3303 is disposed downstream of the thirty-first switching valve element 3302 and disposed on the sixth purge element 3301.

Specifically, the sixth purge element 3301 communicates with the third fill element 1301.

In some of these embodiments, the sixth purge element 3301 communicates with the fifth purge element 2301.

Sixth purge element 3301 includes a sixth purge line and a twenty-third interface. Wherein the sixth purging pipeline is communicated with the second filling pipeline; the twenty-third interface is respectively connected with the sixth purging pipeline and the second purging gas source.

Further, the sixth purge line is in communication with the fifth purge line. Wherein a communication position of the sixth purge line and the fifth purge line is between the nineteenth one-way valve element 2303 and the twenty-ninth on-off valve element 2304.

A thirty-first switching valve element 3302 is disposed in the sixth purge line downstream of the twenty-third interface; a twenty-first check valve element 3303 is disposed in the sixth purge line.

In some of these embodiments, thirty-first switching valve element 3302 is a diaphragm valve, including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve; the twentieth check valve element 3303 is a check valve.

As shown in fig. 4, the recovery unit 400 includes a fifth recovery element 4301, a thirty-first switching valve element 4302, and a twenty-first check valve element 4303. Wherein the fifth recovery element 4301 is in communication with the filling unit 100 for recovering the specialty gas; the thirty-first switching valve element 4302 is provided to the fifth recovery element 4301; the twenty-first check valve element 4303 is disposed downstream of the thirty-first switching valve element 4302 and disposed in the fifth recovery element 4301.

Specifically, the fifth recovery element 4301 communicates with the third filling element 1301.

The fifth recovery element 4301 comprises a fifth recovery line and a twenty-fourth interface. Wherein the fifth recovery pipeline is communicated with the third filling pipeline; the twenty-fourth interface is respectively connected with the fifth recovery pipeline and the first-stage condensation system.

Thirty-first switching valve element 4302 is disposed in the fifth recovery line upstream of the twenty-fourth port; a twenty-first check valve element 4303 is disposed in the fifth recovery line upstream of the twenty-fourth port.

In some of these embodiments, thirty-first switching valve element 4302 is a diaphragm valve, including, but not limited to, a pneumatic diaphragm valve, a manual diaphragm valve; the twenty-first check valve element 4303 is a check valve.

As shown in fig. 4, the analysis unit 500 includes a third analysis element 5301, a thirty-second switching valve element 5302, and a twenty-second one-way valve element 5303. Wherein the third analyzing element 5301 is in communication with the filling unit 100 and is configured to analyze a specialty gas; the thirty-second switching valve element 5302 is disposed in the third analyzing element 5301; the twenty-second one-way valve element 5303 is disposed downstream of the thirty-second switching valve element 5302 and disposed in the third analysis element 5301.

Specifically, the third analysis element 5301 communicates with the third filling element 1301.

The third analysis element 5301 includes a third analysis conduit and a twenty-fifth interface. Wherein the third analysis pipeline is communicated with the second filling pipeline; the twenty-fifth interface is respectively connected with the third analysis pipeline and the analysis system.

In some of these embodiments, the location of communication of the third analytical line with the second filling line is downstream of the location of communication of the fifth purge line with the second filling line.

The thirty-second switching valve element 5302 is disposed in the third analytical line upstream of the twenty-fifth port; a twenty-second one-way valve element 5303 is disposed in the third analysis conduit upstream of the twenty-fifth port.

In some of these embodiments, the thirty-second switching valve element 5302 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the twenty-second one-way valve element 5303 is a one-way valve.

As shown in fig. 4, the exhaust treatment unit 600 includes a third exhaust treatment element 6301, a thirty-third switching valve element 6302, and a twenty-third one-way valve element 6303. Wherein the third exhaust gas treatment element 6301 is in communication with the charging unit 100 for treating exhaust gas; the thirty-third switching valve element 6302 is provided to the third exhaust gas treatment element 6301; a twenty-third one-way valve element 6303 is disposed downstream of the thirty-third on-off valve element 6302 and disposed on the third exhaust gas treatment element 6301.

Specifically, the third exhaust gas treatment element 6301 communicates with the third charging element 1301.

The third exhaust treatment element 6301 comprises a third exhaust treatment line and a twenty-sixth interface. Wherein the third tail gas treatment pipeline is communicated with the second filling pipeline; the twenty-sixth interface is respectively connected with the third tail gas treatment pipeline and the tail gas treatment system.

In some of these embodiments, the location of communication of the third exhaust treatment line with the second charging line is downstream of the location of communication of the third analysis line with the second charging line.

A thirty-third switching valve element 6302 is provided in the third exhaust gas treatment conduit upstream of the twenty-sixth interface; a twenty-third one-way valve element 6303 is disposed in the third exhaust treatment conduit upstream of the twenty-sixth interface.

In some of these embodiments, the thirty-third switching valve element 6302 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the twenty-third one-way valve element 6303 is a one-way valve.

As shown in fig. 4, the pressure relief unit 700 includes a fifth pressure relief element 7301, a thirty-fourth switching valve element 7302, a third blasting element 7303, a third pressure relief valve element 7304, a twenty-fourth one-way valve element 7305, a thirteenth pressure detection element 7306, a sixth pressure relief element 7307, a thirty-fifth switching valve element 7308, and a twenty-fifth one-way valve element 7309. Wherein a fifth pressure relief element 7301 is in communication with the filling unit 100 for relieving pressure; the thirty-fourth switching valve element 7302 is provided to the fifth pressure release element 7301; a third bursting element 7303, disposed downstream of the fifth pressure relief element 7301 and the thirty-fourth switching valve element 7302; the third relief valve element 7304 is arranged at the fifth relief valve element 7301, downstream of the third relief valve element 7304; a twenty-fourth check valve element 7305 is disposed downstream of the fifth pressure relief element 7301 and downstream of the third pressure relief valve element 7304; the thirteenth pressure detecting element 7306 is disposed on the fifth pressure releasing element 7301 and located between the third blasting element 7303 and the third pressure releasing valve element 7304; the sixth pressure release element 7307 is respectively communicated with the fifth pressure release element 7301 and the filling unit 100 for releasing pressure; a thirty-fifth switching valve element 7308 is provided to the sixth pressure relief element 7307; a twenty-fifth one-way valve element 7309 is disposed downstream of the sixth pressure relief element 7307 and downstream of the thirty-fifth switching valve element 7308.

Specifically, fifth pressure relief element 7301 communicates with third filler element 1301; a sixth pressure relief element 7307 communicates with the third filler element 1301.

Fifth pressure relief element 7301 includes a fifth pressure relief line and a twenty-seventh interface. Wherein, the fifth pressure release pipeline is respectively communicated with the second filling pipeline and the sixth pressure release element 7307; the twenty-seventh interface is respectively connected with the fifth pressure relief pipeline and the gas washing system.

In some of these embodiments, the location of communication of the fifth pressure relief line with the second charging line is downstream of the location of communication of the second recovery line with the second charging line, and upstream of the location of communication of the fifth purge line with the second charging line.

The thirty-fourth switching valve element 7302 is disposed in the fifth pressure relief line upstream of the twenty-seventh port; the third blasting element 7303 is disposed in the fifth pressure relief line and upstream of the twenty-seventh interface; a third relief valve element 7304 is disposed in the fifth relief line upstream of the twenty-seventh interface; a twenty-fourth check valve element 7305 is disposed in the fifth pressure relief line upstream of the twenty-seventh port; the thirteenth pressure detecting element 7306 is in communication with the fifth pressure relief line for detecting a pressure of the fifth pressure relief line.

In some of these embodiments, the thirty-fourth switching valve element 7302 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the third blasting element 7303 is a rupture disc; the third relief valve element 7304 is an angle valve; the twenty-fourth one-way valve element 7305 is a one-way valve; thirteenth pressure sensing element 7306 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

Sixth pressure relief element 7307 includes a sixth pressure relief line. The sixth pressure release pipeline is respectively communicated with the fifth pressure release pipeline and the second filling pipeline, and the communication position of the sixth pressure release pipeline and the fifth pressure release pipeline is located at the downstream of the twenty-fourth one-way valve element 7305.

In some of these embodiments, the location of communication of the sixth pressure relief line with the second charging line is downstream of the location of communication of the second recovery line with the second charging line, and upstream of the location of communication of the fifth purge line with the second charging line.

A thirty-fifth switching valve element 7308 is disposed in the sixth pressure relief line; a twenty-fifth one-way valve element 7309 is disposed in the sixth pressure relief line.

In some of these embodiments, the thirty-fifth switching valve element 7308 is a diaphragm valve, including but not limited to a pneumatic diaphragm valve, a manual diaphragm valve; the twenty-fifth one-way valve element 7309 is a one-way valve.

Example 4

In this embodiment, the special gas filling device is a combination of at least two of embodiments 1 to 3, and includes:

1) Combination of example 1 and example 2; 2) Combination of example 1 and example 3; 3) Example 2 in combination with example 3; 4) Example 1, example 2, example 3.

Example 5

This embodiment is a modification of embodiment 1 to embodiment 4.

As shown in fig. 1, the specialty gas filling apparatus further includes a vacuum unit 800. The vacuum unit 800 is respectively communicated with the filling unit 100 and the exhaust gas treatment unit 600, and is used for providing vacuum for the filling unit 100 so as to enable the gas of the filling unit 100 to be transmitted to the exhaust gas treatment unit 600.

As shown in fig. 5, the vacuum unit 800 includes a first vacuum element 8001, a thirty-sixth switching valve element 8002, and a fourteenth pressure detecting element 8003. Wherein, the first vacuum element 8001 is respectively communicated with the filling unit 100 and the tail gas treatment unit 600, and is used for providing vacuum for the filling unit 100 so as to enable the gas of the filling unit 100 to be transmitted to the tail gas treatment unit 600; the thirty-sixth switching valve element 8002 is provided in a pipe line communicating with the filling unit 100 and the first vacuum element 8001, respectively, and is located upstream of the first vacuum element 8001; the fourteenth pressure detecting element 8003 is provided in a pipe line communicating with the filling unit 100 and the first vacuum element 8001, respectively, and is located between the thirty-sixth switching valve element 8002 and the first vacuum element 8001.

Specifically, the first vacuum element 8001 communicates with the first filling element 1101/the second filling element 1201/the third filling element 1301/the first exhaust gas treatment element 6101/the second exhaust gas treatment element 6201/the third exhaust gas treatment element 6301, respectively.

The first vacuum element 8001 includes a first vacuum line and a first vacuum member. The first vacuum pipeline is respectively communicated with the filling pipeline and the tail gas treatment pipeline; the first vacuum part is arranged on the first vacuum pipeline and is used for providing vacuum degree for the filling pipeline.

In some of these embodiments, the first vacuum member is a vacuum pump, including but not limited to a dry pump.

The thirty-sixth switching valve element 8002 is disposed on the first vacuum line and between the seventh unidirectional valve element 6103/fifteenth unidirectional valve element 6203/twenty-third unidirectional valve element 6303 and the first vacuum; the fourteenth pressure detecting element 8003 communicates with the first vacuum line for detecting a pressure of the first vacuum line.

In some of these embodiments, thirty-sixth switching valve element 8002 is a diaphragm valve, including but not limited to pneumatic diaphragm valves, manual diaphragm valves; the fourteenth pressure detecting element 8003 is a pressure detecting instrument including, but not limited to, a pressure gauge, a pressure sensor.

Further, the vacuum unit 800 further includes a second vacuum element 8004, a thirty-seventh switching valve element 8005, a thirty-eighth switching valve element 8006, a thirty-ninth switching valve element 8007, a fortieth switching valve element 8008, and a fifteenth pressure detecting element 8009. Wherein, the second vacuum element 8004 is respectively communicated with the filling unit 100 and the first vacuum element 8001, and is used for providing vacuum for the filling unit 100 so as to improve the vacuum degree of the filling unit 100; the thirty-seventh switching valve element 8005 is provided in a pipe line communicating with the filling unit 100 and the first vacuum element 8001, respectively, and is located downstream of the thirty-sixth switching valve element 8002 and upstream of the first vacuum element 8001; the thirty-eighth switching valve element 8006 is provided in a pipeline communicating with the filling unit 100 and the second vacuum element 8004, respectively, and is located downstream of the thirty-sixth switching valve element 8002 and upstream of the second vacuum element 8004; a thirty-ninth switching valve element 8007 is provided in a pipe line communicating with the second vacuum element 8004 and the first vacuum element 8001, respectively, and is located downstream of the second vacuum element 8004 and upstream of the first vacuum element 8001; the forty switching valve element 8008 is provided in the piping communicating with the filling unit 100 and the first vacuum element 8001, respectively, and is located between the thirty-sixth switching valve element 8002 and the thirty-seventh switching valve element 8005; the fifteenth pressure detecting element 8009 is provided in a pipe line communicating with the filling unit 100, the first vacuum element 8001, respectively, and downstream of the fortieth switching valve element 8008.

The second vacuum element 8004 includes a second vacuum line and a second vacuum member. Wherein, two ends of the second vacuum pipeline are respectively communicated with the first vacuum pipeline, and the communication position of the second vacuum pipeline and the first vacuum pipeline is positioned between the thirty-sixth switch valve element 8002 and the first vacuum piece; the second vacuum piece is arranged on the second vacuum pipeline and used for improving the vacuum degree of the filling pipeline.

In some of these embodiments, the second vacuum member is a vacuum pump, including but not limited to a molecular pump.

The seventeenth switching valve element 8005 is provided to the first vacuum line and is located between the second vacuum line and the communication position of the first vacuum line; the thirty-eighth switching valve element 8006 is disposed in the second vacuum line and upstream of the second vacuum member; a thirty-ninth switching valve element 8007 is provided to the second vacuum line and downstream of the second vacuum member; forty switching valve element 8008 is provided to the first vacuum line; the fifteenth pressure detecting element 8009 communicates with the first vacuum line for detecting a pressure of the first vacuum line.

In some embodiments, thirty-seventh switching valve element 8005, thirty-eighth switching valve element 8006, thirty-ninth switching valve element 8007, fortieth switching valve element 8008 are diaphragm valves, including but not limited to pneumatic diaphragm valves, manual diaphragm valves; the fifteenth pressure sensing element 8009 is a pressure sensing instrument including, but not limited to, a pressure gauge, a pressure sensor.

The advantage of this embodiment is that the vacuum unit is provided to improve the vacuum degree of the filling device, thereby improving the cleanliness of the storage device.

Example 6

This embodiment relates to a specialty gas filling system of the present invention.

As shown in fig. 6, a special gas filling system includes a special gas filling device a, a heating device B, and a weight detecting device C according to any one of embodiments 1 to 5. The special gas filling device A is respectively communicated with a special gas source and the storage device D and is used for acquiring and transmitting the special gas to the storage device D and acquiring the gaseous special gas transmitted by the storage device D; the heating device B is arranged at the side part of the storage device D and is used for heating the storage device D so as to convert the liquid special gas of the storage device D into gaseous special gas; the weight detecting device C is disposed at the bottom of the storage device D, and is used for detecting the weight of the storage device D.

The storage device D includes, but is not limited to, a tank car, a T-bottle and a 47L steel bottle.

The number of the heating devices B is several. The number of heating devices B matches the number of storage devices D. Generally, in the case where the storage device D is a tank car or a T-bottle, at least one heating device is provided at a side portion of the storage device D.

The weight detection devices C are a plurality of. The number of weight detecting means C matches the number of storage means D. Generally, the number of weight detecting devices C is equal to the number of storage devices D.

In some of these embodiments, the weight detection device C is a scale.

The special gas filling method of the embodiment comprises the following steps: (II) a first vacuum step; (III) a first recovery step; (IV) a second purging step; (V) a second vacuum step; a sixth filling step; and (seventh) a second recovery step.

Wherein (I), (II), (IV), (five) and (seven) are substantially the same as those of (I), (II), (IV), (V) and (seven) of example 1, and will not be described in detail herein.

In the third first recovery step, the heating device B is started to heat the storage device D, so that the residual liquid ammonia in the storage device D is converted into gaseous ammonia, and the gaseous ammonia is recovered to the third-stage condensation system or the first-stage condensation system through the recovery unit 400; the weight of the storage device D is detected by the weight detection device C to judge whether the liquid ammonia is completely converted into the gaseous ammonia.

In the sixth filling step, the weight of the storage device D is detected by the weight detecting device C to determine whether the storage device D is completely filled.

Example 7

This example is one embodiment of the present invention.

As shown in fig. 7, an ammonia gas filling system includes a first filling module (corresponding to the specialty gas filling device of embodiment 1), a second filling module (corresponding to the specialty gas filling device of embodiment 2), a third filling module (corresponding to the specialty gas filling device of embodiment 3), and a vacuum module (corresponding to the vacuum unit 800 of embodiment 5). The first filling module is connected with the tank wagon and is used for filling ammonia gas into the tank wagon; the second filling module is connected with at least one T bottle and is used for filling ammonia gas into the T bottle; the third filling module is connected with the 47L steel cylinder and is used for filling ammonia gas into the 47L steel cylinder; the vacuum module is respectively connected with the first filling module, the second filling module and the third filling module and is used for respectively providing negative pressure vacuum for the first filling module, the second filling module and the third filling module.

Further, the ammonia filling system further comprises a heating device and a scale. The heating device is used for heating the tank car and the T bottle so as to convert the residual liquid ammonia into gaseous ammonia; the platform scale is used for detecting the weight of the tank wagon, the T bottle and the 47L steel bottle.

As shown in fig. 8a, the first filling module includes a bellows valve XCV01, a FILTER, a check valve CV1, a pressure sensor PT1, a bellows valve XCV, a bellows valve XCV03, a pneumatic diaphragm valve PV09, a manual diaphragm valve MV2, a pressure gauge PG2, a pressure sensor PT2, a pneumatic diaphragm valve PV01, a check valve CV2, a pneumatic diaphragm valve PV08, a check valve CV3, a manual diaphragm valve MV01, a rupture disk PRD1, a pressure gauge PG1, an angle valve SV-401, a check valve CV4, a pneumatic diaphragm valve PV02, a check valve CV5, a pneumatic diaphragm valve PV03, a pressure sensor PT4, a check valve CV6B, a pneumatic diaphragm valve PV07, a check valve CV6A, a pneumatic diaphragm valve PV06, a pneumatic diaphragm valve PV04, a check valve CV7, a pneumatic diaphragm valve PV05, and a check valve CV8.

Among them, XCV, FILTER, CV1, PT1, XCV02, XCV03, PV09, MV2, PG2, PT2 correspond to the filling unit 100 of embodiment 1; PV03, PT4, CV6B, PV07 correspond to the first purge unit 200 of example 1; CV6A, PV corresponds to the second purge unit 300 of example 1; PV01, CV2, PV08, CV3 correspond to recovery unit 400 of example 1; PV04 and CV7 correspond to the analysis unit 500 of example 1; PV05 and CV8 correspond to the exhaust gas treatment unit 600 of example 1; MV01, PRD1, PG1, SV-401, CV4, PV02 and CV5 correspond to the pressure relief unit 700 of embodiment 1.

As shown in fig. 8B, the second filling module includes a bellows valve XCV04, a FILTER, a check valve CV9, a pressure sensor PT5, a bellows valve XCV05, a pneumatic diaphragm valve PV18, a pneumatic diaphragm valve PV20, a pneumatic diaphragm valve PV22, a pneumatic diaphragm valve PV24, a pneumatic diaphragm valve PV26, a manual diaphragm valve MV3, a pressure gauge PG4, a pressure sensor PT6, a pneumatic diaphragm valve PV11, a check valve CV10, a pneumatic diaphragm valve PV19, a pneumatic diaphragm valve PV21, a pneumatic diaphragm valve PV23, a pneumatic diaphragm valve PV25, a pneumatic diaphragm valve PV27, a pressure sensor PT8, a manual diaphragm valve MV2, a burst disk PRD2, a pressure gauge PG3, an angle valve SV-421, a check valve CV11, a pneumatic diaphragm valve PV12, a check valve CV12, a pneumatic diaphragm valve PV13, a pressure sensor PT7, a check valve CV13B, a pneumatic diaphragm valve PV17, a check valve CV13A, a pneumatic diaphragm valve PV14, a check valve CV15, a pneumatic diaphragm valve CV15.

Among them, XCV, FILTER, CV9, PT5, XCV05, PV18, PV20, PV22, PV24, PV26, MV3, PG4, PT6 correspond to the filling unit 100 of embodiment 2; PV13, PT7, CV13B, PV17 correspond to the first purge unit 200 of example 2; CV13A, PV corresponds to the second purge unit 300 of example 2; PV11, CV10, PV19, PV21, PV23, PV25, PV27, PT8 correspond to the recovery unit 400 of example 2; PV14 and CV14 correspond to the analysis unit 500 of example 2; PV15 and CV15 correspond to the exhaust gas treatment unit 600 of example 2; MV2, PRD2, PG3, SV-421, CV11, PV122, CV12 correspond to the pressure relief unit 700 of example 2.

As shown in fig. 8c, the third filling module includes a pneumatic diaphragm valve PV28, a FILTER, a check valve CV16, a pressure sensor PT8, a pneumatic diaphragm valve PV29, a pneumatic diaphragm valve PV37, a pneumatic diaphragm valve PV38, a pneumatic diaphragm valve PV39, a pneumatic diaphragm valve PV40, a pneumatic diaphragm valve PV41, a pneumatic diaphragm valve PV42, a pneumatic diaphragm valve PV43, a pneumatic diaphragm valve PV44, a pneumatic diaphragm valve PV45, a pneumatic diaphragm valve PV46, a manual diaphragm valve MV4, a pressure gauge PG6, a pressure sensor PT9, a pneumatic diaphragm valve PV30, a check valve CV17, a manual diaphragm valve MV3, a burst disk PRD3, a pressure gauge PG5, an angle valve SV-451, a check valve CV18, a pneumatic diaphragm valve PV31, a check valve CV19, a pneumatic diaphragm valve PV32, a pressure sensor PT10, a check valve CV20B, a pneumatic diaphragm valve PV36, a check valve CV20A, a pneumatic diaphragm valve PV35, a pneumatic diaphragm valve PV33, a check valve CV21, a pneumatic diaphragm valve PV34, a check valve CV22.

Wherein PV28, FILTER, CV16, PT8, PV29, PV37, PV38, PV39, PV40, PV41, PV42, PV43, PV44, PV45, PV46, MV4, PG6, PT9 correspond to the filling unit 100 of example 3; PV32, PT10, CV20B, PV36 correspond to the first purge unit 200 of example 3; CV20A, PV corresponds to the second purge unit 300 of embodiment 3; PV30 and CV17 correspond to recovery unit 400 of example 3; PV33 and CV21 correspond to the analysis unit 500 of example 3; PV34 and CV22 correspond to exhaust gas treatment unit 600 of example 3; MV3, PRD3, PG5, SV-451, CV18, PV31, CV19 correspond to the pressure relief unit 700 of example 3.

As shown in fig. 8d, the vacuum module includes a pneumatic diaphragm valve PV47, a pressure sensor PT10, a manual diaphragm valve MV4, a pressure sensor PT11, a pressure gauge PG7, a pneumatic diaphragm valve PV49, a DRY pump DRY, a pneumatic diaphragm valve PV48, a molecular pump TURBO, a pneumatic diaphragm valve PV50.

The invention has the following technical effects: 1) And (3) adding a filter: the charged gas may be filtered to remove minute particles and then a clean gas is outputted; 2) Nitrogen and helium were used as purge gases: the ammonia which is not utilized and evaporated and condensed can be continuously supplemented to the corresponding pipeline, so that the utilization efficiency of the ammonia is improved, and the purity of the gas is improved; 3) And (3) analysis and detection: when the detection is qualified, ammonia gas enters a tank wagon, a T bottle and a steel bottle; when the ammonia gas is detected to be unqualified, the ammonia gas enters a first-stage condensation recovery; when the detection of the gas entering the tank wagon is unqualified, the ammonia gas enters the three-stage treatment, and meanwhile, when the gas entering the tank wagon is unqualified, the gas enters a final wastewater tank; 4) Rupture disk: the stable pressure of the filling system can be ensured, and the ammonia gas can achieve the effect of recycling through evaporation and condensation; 5) The corresponding tail gas treatment is added when the gas is not fully utilized or condensed, and the tail gas treatment is performed in a vacuumizing mode, so that the pollution to the environment is reduced.

The foregoing description is only illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the scope of the invention, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present invention, and are intended to be included within the scope of the present invention.

Claims

1. A specialty gas filling apparatus, comprising:

2. The specialty gas filling device of claim 1, wherein said filling unit comprises:

the first filling element is respectively communicated with a special gas source, a storage device, the first purging unit, the second purging unit, the recovery unit, the analysis unit, the tail gas treatment unit and the pressure relief unit and is used for acquiring and transmitting the special gas to the storage device;

a first regulator valve element disposed on the first filler element;

the first filter element is arranged on the first filling element and is positioned at the downstream of the first regulating valve element and is used for filtering the special gas transmitted by the special gas source;

a first one-way valve element disposed on the first filler element downstream of the first filter element;

a second regulator valve element disposed downstream of the first check valve element and disposed on the first filling element;

a third regulator valve element disposed downstream of the second regulator valve element and upstream of the storage device;

A first switching valve element disposed on the first filling element downstream of the second regulating valve element and downstream of the storage device;

a first pressure detecting element disposed on the first filling element and located between the first check valve element and the second regulating valve element;

a second switching valve element provided to the first filling element downstream of the second regulating valve element;

a second pressure detecting element provided to the first filling element downstream of the second switching valve element; and/or

The first purge unit includes:

a first purge element in communication with the filling unit for purging the filling unit with a first purge gas;

a third switching valve element disposed at the first purge element;

a second one-way valve element disposed downstream of the third switching valve element and disposed at the first purge element;

a fourth switching valve element disposed downstream of the second check valve element and disposed at the first purge element;

A third pressure detection element disposed between the second check valve element and the fourth switching valve element; and/or

The second purge unit includes:

a second purge element in communication with the filling unit for purging the filling unit with a second purge gas;

a fifth switching valve element disposed at the second purge element;

a third one-way valve element disposed downstream of the fifth switching valve element and disposed at the second purge element; and/or

The recovery unit includes:

the first recovery element is communicated with the filling unit and is used for recovering the special gas;

a sixth switching valve element provided to the first recovery element;

a fourth check valve element disposed on the first recovery element downstream of the sixth switching valve element; and/or

The analysis unit includes:

a first analysis element in communication with the filling unit for analyzing a specialty gas;

An eighth switching valve element provided to the first analysis element;

a sixth one-way valve element disposed on the first analysis element downstream of the eighth switching valve element; and/or

The exhaust gas treatment unit includes:

the first tail gas treatment element is communicated with the filling unit and is used for treating tail gas;

a ninth switching valve element provided to the first exhaust gas treatment element;

a seventh one-way valve element disposed on the first exhaust gas treatment element downstream of the ninth switching valve element; and/or

The pressure relief unit includes:

the first pressure relief element is communicated with the filling unit and used for relieving pressure of the filling unit;

a tenth switching valve element disposed at the first pressure relief element;

a first burst element disposed in the first pressure relief element downstream of the tenth switching valve element;

a first pressure relief valve element disposed in the first pressure relief element downstream of the first pressure relief valve element;

An eighth one-way valve element disposed on the first pressure relief element downstream of the first pressure relief element;

the fourth pressure detection element is arranged on the first pressure relief element and is positioned between the first blasting element and the first pressure relief valve element;

the second pressure release element is respectively communicated with the first pressure release element and the filling unit and is used for releasing pressure of the filling unit;

an eleventh switching valve element provided to the second pressure relief element;

and a ninth one-way valve element disposed on the second pressure relief element downstream of the eleventh switching valve element.

3. The specialty gas filling apparatus according to claim 2, wherein said recovery unit further comprises:

the second recovery element is communicated with the filling unit and is used for recovering the special gas;

a seventh switching valve element provided to the second recovery element;

a fifth one-way valve element disposed downstream of the seventh switching valve element and disposed on the second recovery element.

4. The specialty gas filling device of claim 1, wherein said filling unit comprises:

the second filling element is respectively communicated with a special gas source, a storage device, the first purging unit, the second purging unit, the recovery unit, the analysis unit, the tail gas treatment unit and the pressure relief unit and is used for acquiring and transmitting the special gas to the storage device;

a fourth regulator valve element disposed on the second filler element;

the second filter element is arranged on the second filling element and is positioned at the downstream of the fourth regulating valve element and is used for filtering the special gas transmitted by the special gas source;

a tenth one-way valve element disposed on the second filler element downstream of the second filter element;

a fifth regulator valve element disposed downstream of the tenth unidirectional valve element and disposed on the second filler element;

at least one twelfth switching valve element disposed on the second filling element downstream of the fifth regulating valve element and upstream of the storage device;

A fifth pressure detecting element provided to the second filling element and located between the tenth check valve element and the fifth regulating valve element;

a thirteenth switching valve element provided to the second filling element downstream of the fifth regulating valve element;

a sixth pressure detecting element provided to the second filling element downstream of the thirteenth switching valve element; and/or

The first purge unit includes:

a third purge element in communication with the filling unit for purging the filling unit with a first purge gas;

a fourteenth switching valve element provided to the third purge element;

an eleventh one-way valve element disposed downstream of the fourteenth switching valve element and disposed at the third purge element;

a fifteenth switching valve element disposed downstream of the eleventh check valve element and disposed in the third purge element;

a seventh pressure detecting element provided to the third purge element and located between the eleventh check valve element and the fifteenth switching valve element; and/or

The second purge unit includes:

a fourth purge element in communication with the filling unit for purging the filling unit with a second purge gas;

a sixteenth switching valve element disposed to the fourth purge element;

a twelfth one-way valve element disposed downstream of the fourth purge element and the sixteenth switching valve element; and/or

The recovery unit includes:

the third recovery element is communicated with the filling unit and is used for recovering the special gas;

a seventeenth switching valve element provided to the third recovery element;

a thirteenth one-way valve element disposed on the third recovery element downstream of the seventeenth switching valve element;

an eighteenth switching valve element provided to the third recovery element downstream of the thirteenth one-way valve element;

at least one fourth recovery element, the fourth recovery element is communicated with the third recovery element and the storage device respectively;

At least one nineteenth switching valve element disposed downstream of the storage device and disposed on the fourth recovery element;

an eighth pressure detection element provided to the fourth recovery element; and/or

The analysis unit includes:

the second analysis element is communicated with the filling unit and is used for analyzing the special gas;

a twentieth switching valve element provided to the second analysis element;

a fourteenth one-way valve element disposed in the second analysis element downstream of the twentieth switching valve element; and/or

The exhaust gas treatment unit includes:

the second tail gas treatment element is communicated with the filling unit and is used for treating tail gas;

a twenty-first switching valve element provided to the second exhaust gas treatment element;

a fifteenth check valve element disposed in the second exhaust gas treatment element downstream of the twenty-first switching valve element; and/or

The pressure relief unit includes:

The third pressure release element is communicated with the filling unit and is used for releasing pressure to the filling unit;

a twenty-second switching valve element provided to the third pressure relief element;

a second bursting element arranged at the third pressure relief element downstream of the twenty-second switching valve element;

a second pressure relief valve element disposed in the third pressure relief element downstream of the second pressure relief valve element;

a sixteenth one-way valve element disposed downstream of the second pressure relief valve element and disposed at the third pressure relief element;

a ninth pressure detecting element disposed in the third pressure relief element and located between the second bursting element and the second pressure relief valve element;

the fourth pressure release element is respectively communicated with the third pressure release element and the filling unit and is used for releasing pressure of the filling unit;

a twenty-third switching valve element provided to the fourth pressure relief element;

A seventeenth one-way valve element disposed in the fourth pressure relief element downstream of the twenty-third switching valve element.

5. The specialty gas filling device of claim 1, wherein said filling unit comprises:

the third filling element is respectively communicated with a special gas source, a storage device, the first purging unit, the second purging unit, the recovery unit, the analysis unit, the tail gas treatment unit and the pressure relief unit and is used for acquiring and transmitting the special gas to the storage device;

a twenty-fourth switching valve element provided to the third filling element;

a third filter element, disposed on the third filling element and downstream of the twenty-fourth switching valve element, for filtering the specialty gas transmitted by the specialty gas source;

an eighteenth one-way valve element disposed downstream of the third filler element;

a twenty-fifth switching valve element provided to the third filling element downstream of the eighteenth one-way valve element;

At least a twenty-sixth switching valve element disposed downstream of the twenty-fifth switching valve element and upstream of the storage device;

a tenth pressure detecting element provided to the third filling element and located between the eighteenth check valve element and the twenty-fifth switching valve element;

a twenty-seventh switching valve element provided to the third filling element and downstream of the twenty-fifth switching valve element;

an eleventh pressure detecting element provided to the third filling element downstream of the second seventeenth switching valve element; and/or

The first purge unit includes:

a fifth purge element in communication with the filling unit for purging the filling unit with a first purge gas;

a twenty-eighth switching valve element disposed at the fifth purge element;

a nineteenth one-way valve element disposed downstream of the twenty-eighth switching valve element and disposed in the fifth purge element;

A twenty-ninth switching valve element disposed downstream of the nineteenth one-way valve element and disposed in the fifth purge element;

a twelfth pressure detection element disposed between the fifth purge element and the nineteenth check valve element and the twenty-ninth on-off valve element; and/or

The second purge unit includes:

a sixth purge element in communication with the filling unit for purging the filling unit with a second purge gas;

a thirty-second switching valve element disposed on the sixth purge element;

a twenty-first check valve element disposed downstream of the thirty-second switch valve element and disposed in the sixth purge element; and/or

The recovery unit includes:

a fifth recovery element, which is communicated with the filling unit and is used for recovering the special gas;

a thirty-first switching valve element provided to the fifth recovery element;

a twenty-first check valve element disposed downstream of the thirty-first switching valve element and disposed in the fifth recovery element; and/or

The analysis unit includes:

a third analysis element in communication with the filling unit for analyzing a specialty gas;

a thirty-second switching valve element provided to the third analysis element;

a twenty-second one-way valve element disposed in the third analysis element downstream of the thirty-second switching valve element; and/or

The exhaust gas treatment unit includes:

the third tail gas treatment element is communicated with the filling unit and is used for treating tail gas;

a thirty-third switching valve element provided to the third exhaust gas treatment element;

a twenty-third one-way valve element disposed in the third exhaust gas treatment element downstream of the thirty-third switching valve element; and/or

The pressure relief unit includes:

the fifth pressure release element is communicated with the filling unit and is used for releasing pressure to the filling unit;

a thirty-fourth switching valve element provided to the fifth pressure relief element;

A third bursting element arranged at the fifth pressure relief element and downstream of the thirty-four switching valve element;

a third pressure relief valve element disposed in the fifth pressure relief element downstream of the third pressure relief valve element;

a twenty-fourth check valve element disposed on the fifth pressure relief element downstream of the third pressure relief element;

a thirteenth pressure detecting element disposed on the fifth pressure relief element and located between the third burst element and the third pressure relief valve element;

the sixth pressure release element is respectively communicated with the fifth pressure release element and the filling unit and is used for releasing pressure of the filling unit;

a thirty-fifth switching valve element provided to the sixth pressure relief element;

a twenty-fifth one-way valve element disposed in the sixth pressure relief element downstream of the thirty-fifth switching valve element.

6. The specialty gas filling apparatus according to any one of claims 1 to 5, further comprising:

7. The specialty gas filling apparatus of claim 6, wherein said vacuum unit comprises:

a first vacuum element respectively communicated with the filling unit and the tail gas treatment unit and used for providing vacuum for the filling unit so as to enable the gas of the filling unit to be transmitted to the tail gas treatment unit;

a thirty-first switching valve element provided in a pipe line communicating with the filling unit and the first vacuum element, respectively, and upstream of the first vacuum element;

a fourteenth pressure detecting element provided in a pipe line communicating with the filling unit and the first vacuum element, respectively, and located between the thirty-six switching valve element and the first vacuum element.

8. The specialty gas filling apparatus of claim 7, wherein said vacuum unit further comprises:

The second vacuum element is respectively communicated with the filling unit and the first vacuum element and is used for providing vacuum for the filling unit so as to improve the vacuum degree of the filling unit;

a seventeenth switching valve element provided in a pipe line communicating with the filling unit and the first vacuum element, respectively, and located downstream of the thirty-sixth switching valve element and upstream of the first vacuum element;

a thirty-eighth switching valve element provided in a pipe line communicating with the filling unit and the second vacuum element, respectively, and located downstream of the thirty-sixth switching valve element and upstream of the second vacuum element;

a thirty-ninth switching valve element provided in a pipe line communicating with the second vacuum element and the first vacuum element, respectively, and located downstream of the second vacuum element and upstream of the first vacuum element;

a forty switching valve element provided in a pipe line communicating with the filling unit and the first vacuum element, respectively, and located between the thirty-sixth switching valve element and the thirty-seventh switching valve element;

A fifteenth pressure detecting element provided in a pipe line communicating with the filling unit, the first vacuum element, respectively, and downstream of the fortieth switching valve element.

9. A specialty gas filling system, comprising:

the special gas filling device according to any one of claims 1-8, wherein the special gas filling device is respectively communicated with a special gas source and a storage device and is used for acquiring and transmitting the special gas to the storage device and acquiring gaseous special gas transmitted by the storage device;

10. A special gas filling method applied to the special gas filling device according to any one of claims 1 to 8 or the special gas filling system according to claim 9.