CN221027723U - Apparatus for producing of electronic grade aqueous ammonia is directly produced to ammonia - Google Patents
Apparatus for producing of electronic grade aqueous ammonia is directly produced to ammonia Download PDFInfo
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- CN221027723U CN221027723U CN202322729856.XU CN202322729856U CN221027723U CN 221027723 U CN221027723 U CN 221027723U CN 202322729856 U CN202322729856 U CN 202322729856U CN 221027723 U CN221027723 U CN 221027723U
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 97
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 229910021529 ammonia Inorganic materials 0.000 title claims description 21
- 235000011114 ammonium hydroxide Nutrition 0.000 claims abstract description 47
- 238000005406 washing Methods 0.000 claims abstract description 43
- 238000010521 absorption reaction Methods 0.000 claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 239000008139 complexing agent Substances 0.000 claims abstract description 20
- 239000007800 oxidant agent Substances 0.000 claims abstract description 19
- 230000001590 oxidative effect Effects 0.000 claims abstract description 19
- 238000005507 spraying Methods 0.000 claims abstract description 18
- 238000001035 drying Methods 0.000 claims abstract description 14
- 239000002994 raw material Substances 0.000 claims abstract description 8
- 238000003860 storage Methods 0.000 claims abstract description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 19
- 239000012498 ultrapure water Substances 0.000 claims description 19
- 238000010992 reflux Methods 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 238000005201 scrubbing Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 239000002274 desiccant Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 14
- 239000012535 impurity Substances 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 229910021645 metal ion Inorganic materials 0.000 description 15
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 238000005086 pumping Methods 0.000 description 10
- 150000001450 anions Chemical class 0.000 description 8
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000004519 grease Substances 0.000 description 6
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 229960001484 edetic acid Drugs 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 239000012286 potassium permanganate Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 3
- 238000010668 complexation reaction Methods 0.000 description 3
- JHWIEAWILPSRMU-UHFFFAOYSA-N 2-methyl-3-pyrimidin-4-ylpropanoic acid Chemical compound OC(=O)C(C)CC1=CC=NC=N1 JHWIEAWILPSRMU-UHFFFAOYSA-N 0.000 description 2
- 239000005708 Sodium hypochlorite Substances 0.000 description 2
- SOIFLUNRINLCBN-UHFFFAOYSA-N ammonium thiocyanate Chemical compound [NH4+].[S-]C#N SOIFLUNRINLCBN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a production device for directly producing electronic grade ammonia water by ammonia gas, which comprises a raw material storage tank, a washing tower, a drying tower, an absorption tower, a buffer tank and an ultra-clean filter device which are connected in sequence through pipelines, wherein the washing tower comprises a first washing tower and a second washing tower, an oxidant solution spraying pipe is arranged at the top of the first washing tower, and a complexing agent solution spraying pipe is arranged at the top of the second washing tower; the method can effectively remove metal impurities and gas impurities in industrial ammonia gas, achieves the aim of purifying the ammonia gas to prepare the electronic grade ammonia water, and can solve the problems of long process flow, complex rectification process, high operation difficulty, high energy consumption and product purity.
Description
Technical Field
The utility model relates to the technical field of electronic chemicals, in particular to a production device for directly producing electronic grade ammonia by ammonia.
Background
In integrated circuit fabrication, some yield loss results from contamination, and electronic grade ammonia is one of the key chemicals in semiconductor wafer fabrication, often used as a cleaning agent to remove contaminants from the wafer surface. If the purity of the electronic grade ammonia water is not high, particles and impurity molecules or ions can be introduced into the electronic grade ammonia water, so that the electronic grade ammonia water is adsorbed on the surface of a wafer, and when the film is deposited, pollutants are deposited in the film layer or spread in the film layer, so that the characteristics of the film are changed.
At present, the main stream electronic grade ammonia water preparation method basically prepares ultra-pure ammonia by rectification technology, and then prepares electronic grade ammonia water by multistage water washing; patent document 1 (CN 113603113 a) discloses that the electronic grade ammonia is prepared by purifying industrial ammonia through two-stage rectification, and the obtained electronic grade ammonia is further washed, absorbed and filtered to prepare electronic grade ammonia water, which has the disadvantages of long process flow, complex rectification process, high operation difficulty and high energy consumption; patent document 2 (CN 106430240 a) discloses that electronic grade ammonia is produced by a multistage washing method, but no further treatment is performed on CO2 and sulfide which are slightly soluble in water; patent document 3 (CN 104743575A) discloses that high purity ammonia water is obtained by the steps of reduced pressure evaporation, oil-water separation, filtration, mixed absorption and cyclic filtration which are performed continuously, but the metal ion content can be controlled within 50ppt only, and the single anion impurity content is reduced to 40ppb or less.
In summary, the existing process flow for electronic grade ammonia water is long, the rectification process is complex, the operation difficulty is high, the energy consumption is high, the capability of removing metal ions and anions in the electronic grade ammonia water is weak, and the ultra-high purity electronic grade ammonia water required by an integrated circuit cannot be prepared. Therefore, there is a need to develop a high-purity electronic grade ammonia water production device and a production method thereof, which can stably operate and have low cost.
Disclosure of utility model
The utility model aims to overcome the defects, and provides a production device for directly producing electronic grade ammonia water by ammonia gas, which can effectively remove metal impurities and gas impurities in industrial ammonia gas, achieve the purpose of purifying the ammonia gas to prepare the electronic grade ammonia water, and solve the problems of long process flow, complex rectification process, high operation difficulty, high energy consumption and product purity.
The utility model aims to solve the technical problems, and adopts the technical scheme that: the utility model provides a production device of direct production electron level aqueous ammonia of ammonia, includes raw materials storage tank, scrubbing tower, drying tower, absorption tower, buffer tank and the ultra-clean filter equipment who loops through the pipeline connection, the scrubbing tower includes first scrubbing tower and second scrubbing tower, first scrubbing tower top is equipped with oxidant solution spray pipe, the second scrubbing tower top is equipped with complexing agent solution spray pipe.
Preferably, the drying agent in the drying tower is activated carbon.
Preferably, the bottom outlet of the absorption tower is connected with the inlet of the buffer tank through a pipeline, and the first outlet of the buffer tank is connected with the reflux port at the top of the absorption tower through a reflux pipeline.
Preferably, a reflux pump is arranged on the liquid return pipeline, the other outlet of the buffer tank is connected with the inlet of the ultra-clean filter device through a pipeline, and the bottom of the absorption tower is also connected with an ultra-pure water inlet pipe.
Preferably, the upper side of the buffer tank is provided with an overflow port, the overflow port is connected with an inlet of the ultra-clean filter device through a pipeline, and the buffer tank is positioned at a height Gao Yuchao of the ultra-clean filter device.
Preferably, the ultra-clean filter device is a three-stage filter device, the aperture of a three-stage filter membrane is respectively 50-100nm, 20-40nm and 2-20nm, and the filter membrane is made of polytetrafluoroethylene.
In addition, the utility model also discloses a production method of the production device for directly producing the electronic grade ammonia water by using the ammonia gas, which comprises the following steps:
S1, pumping raw material industrial grade ammonia gas in a raw material storage tank from the bottom of a first washing tower through pressurizing equipment, and spraying an oxidant solution from the top of an oxidant solution spraying pipe for removing carbon dioxide, grease and sulfide in the industrial ammonia gas;
S2, pumping the ammonia gas treated in the step S1 from the bottom of the second washing tower, spraying a complexing agent solution from the top of a complexing agent solution spraying pipe, and removing metal ions in the ammonia gas through complexation;
S3, introducing the ammonia gas treated in the step S2 into a drying tower for removing water in the ammonia gas;
S4, introducing ammonia gas treated in the step S3 into an absorption tower through pressurizing equipment, pre-pumping a certain amount of electronic grade ammonia water into a buffer tank, pumping the electronic grade ammonia water in the buffer tank to the top of the absorption tower through a liquid return pipeline through a reflux pump, spraying the ammonia water in a shower shape, pumping ultrapure water into the bottom of the absorption tower, and reacting the ammonia gas and the ultrapure water in the absorption tower;
and S5, filtering the solution prepared in the step S4 through an ultra-clean filter device to obtain the electronic grade ammonia water.
Further, the ultrapure water inlet pipe valve at the bottom of the absorption tower is interlocked with the concentration meter.
Further, the oxidant solution is one of ultrapure water, potassium permanganate solution, hydrogen peroxide solution, sodium dichromate solution, ferric trichloride solution, peracetic acid solution and sodium hypochlorite solution.
Further, the complexing agent solution is one of ultrapure water, ethylenediamine tetraacetic acid solution, ammonium thiocyanate solution, acetylacetone solution and triethanolamine solution.
Further, the ultrapure water used in the steps S3-S4 has the resistivity of 16-19M omega cm at 25 ℃ and the metal content of less than 2 ng/kg.
The utility model has the beneficial effects that:
1. According to the equipment for directly producing the electronic grade ammonia water by using the industrial ammonia gas, disclosed by the utility model, the metal impurities, grease and gas impurities in the industrial ammonia gas can be effectively removed by adopting a two-stage washing and drying method, and the purpose of preparing the electronic grade ammonia water by purifying the ammonia gas is achieved.
2. According to the method for directly producing the electronic grade ammonia water by using industrial ammonia gas, disclosed by the utility model, the two-stage washing and drying of the oxidant solution and the complexing agent solution are adopted, carbon dioxide, sulfide, grease and metal ion impurities in the industrial ammonia gas can be effectively removed through chemical reaction, the electronic grade ammonia water can be directly prepared by the reaction of the purified ammonia gas and ultrapure water, the purpose of removing metal ions and anions can be effectively achieved, the purpose of preparing the electronic grade ammonia water is achieved, and meanwhile, the use of a multi-stage washing intermediate tank and a continuous depressurization mechanical pump can be reduced.
Drawings
FIG. 1 is a schematic structural diagram of a production device for directly producing electronic grade ammonia by ammonia;
Detailed Description
The utility model is described in further detail below with reference to the drawings and the specific examples.
As shown in figure 1, the production device for directly producing electronic grade ammonia by ammonia comprises a raw material storage tank 1, a washing tower 2, a drying tower 3, an absorption tower 4, a buffer tank 5 and an ultra-clean filter device 6 which are sequentially connected through pipelines, wherein the washing tower 2 comprises a first washing tower 2.1 and a second washing tower 2.2, an oxidant solution spraying pipe 2.1.1 is arranged at the top of the first washing tower 2.1, and a complexing agent solution spraying pipe 2.2.1 is arranged at the top of the second washing tower 2.2.
Preferably, the drying agent in the drying tower 3 is activated carbon.
Preferably, the bottom outlet of the absorption tower 4 is connected with the inlet of the buffer tank 5 through a pipeline, and one outlet of the buffer tank 5 is connected with the top reflux port of the absorption tower 4 through a reflux pipeline 7.
Preferably, a reflux pump 8 is arranged on the reflux pipeline 7, the other outlet of the buffer tank 5 is connected with the inlet of the ultra-clean filter device 6 through a pipeline, and the bottom of the absorption tower 4 is also connected with an ultra-pure water inlet pipe 9.
More preferably, the absorption tower 4 and the buffer tank 5 are also connected with a heat exchange device, and cooling water at 10-25 ℃ is introduced into the heat exchange tube of the heat exchange device.
Preferably, an overflow port is arranged on the upper side of the buffer tank 5, and is connected with an inlet of the ultra-clean filter device 6 through a pipeline, and the buffer tank 5 is positioned at a height Gao Yuchao and the ultra-clean filter device 6 is positioned at a height. After the design, the ammonia water in the buffer tank 5 can overflow to the ultra-clean filter device 6 through the overflow port, and the disturbance of the pump can be reduced by providing power through the high-level difference.
Preferably, the ultra-clean filter device 6 is a three-stage filter device, the aperture of a three-stage filter membrane is respectively 50-100nm, 20-40nm and 2-20nm, and the filter membrane is made of polytetrafluoroethylene.
In addition, the utility model also discloses a production method of the production device for directly producing the electronic grade ammonia water by using the ammonia gas, which comprises the following steps:
S1, pumping raw material industrial grade ammonia gas in a raw material storage tank 1 from the bottom of a first washing tower 2.1 through pressurizing equipment, and spraying an oxidant solution from the top through an oxidant solution spraying pipe 2.1.1 for removing carbon dioxide, grease and sulfide in the industrial ammonia gas; in this step, the pressure of the pressurizing device is 1.0Mpa to 1.8Mpa. In the step S1, the industrial ammonia gas directly rises from a first washing tower, and in the process of purifying by spraying an oxidant solution from the top of the first washing tower 2.1, carbon dioxide, grease and sulfide contained in the industrial ammonia gas are subjected to chemical reaction with the oxidant solution, and the carbon dioxide, grease and sulfide contained in the industrial ammonia gas and impurities generated after the reaction are removed in advance along with the wrapping action of the oxidant solution; after the removal, each single impurity is respectively less than 30ppb;
S2, pumping ammonia gas treated in the step S1 from the bottom of the second washing tower 2.2, spraying a complexing agent solution from the top by a complexing agent solution spraying pipe 2.2.1, and removing metal ions in the ammonia gas through complexation; in the step S2, the industrial ammonia gas coming out of the first washing tower 2.1 directly rises from the bottom of the second washing tower 2.2, and in the process of purifying by spraying the complexing agent solution from the top of the second washing tower 2.2, metal ions in the industrial ammonia gas and the complexing agent solution undergo a complex reaction, and metal ions carried in the industrial ammonia gas are removed under the action of the complexing agent solution along with the action of the complexing agent solution sprayed from the top of the second washing tower 2.2; each metal ion after complexation is less than 1ppb;
S3, introducing the ammonia gas treated in the step S2 into a drying tower 3 for removing water in the ammonia gas; in the step S3, ammonia coming out of the two-stage washing tower passes through a drying tower filled with active carbon to further remove trace moisture and metal ions carried in industrial ammonia. In addition, the active carbon in the drying tower 3 is renewable, and the drying tower 3 is ready for use and can be switched and regenerated at any time; final moisture less than 30ppm;
s4, introducing ammonia gas treated in the step S3 into the absorption tower 4 through pressurizing equipment, pre-pumping a certain amount of electronic grade ammonia water into the buffer tank 5, pumping the electronic grade ammonia water in the buffer tank 5 to the top of the absorption tower 4 through a liquid return pipeline 7 through a reflux pump 8, spraying the ammonia water in a shower shape, pumping ultrapure water into the bottom of the absorption tower 4, and reacting the ammonia gas and the ultrapure water in the absorption tower 4;
And S5, filtering the solution prepared in the step S4 through an ultra-clean filter device 6 to obtain the electronic grade ammonia water.
Further, the ultrapure water inlet pipe valve at the bottom of the absorption tower 4 is interlocked with the concentration meter. After the design, the opening of the valve of the ultrapure water inlet pipe can be adjusted through the concentration meter, the concentration of ammonia water is adjusted, and the concentration range is 28-30%.
Further, the oxidant solution is one of ultrapure water, potassium permanganate solution, hydrogen peroxide solution, sodium dichromate solution, ferric trichloride solution, peracetic acid solution and sodium hypochlorite solution. Preferably, the content thereof is 0% to 20%.
Further, the complexing agent solution is one of ultrapure water, ethylenediamine tetraacetic acid solution, ammonium thiocyanate solution, acetylacetone solution and triethanolamine solution. Preferably, the content thereof is 0% -15%.
Further, the ultrapure water used in the steps S3-S4 has the resistivity of 16-19M omega cm at 25 ℃ and the metal content of less than 2 ng/kg.
The following is a further illustration of the specific 5 examples, which employ the method steps S1 to S5 described above;
Example 1: technological parameters: the oxidant solution in the first washing tower is ultrapure water, and the complexing agent solution in the second washing tower is 5% ethylenediamine tetraacetic acid solution. Final example 1 the electronic grade aqueous ammonia metal ion extracted from the finished electronic grade aqueous ammonia extraction line was less than 10 ppt and the single anion content was 200 ppb.
Example 2: technological parameters: the oxidant solution in the first washing tower is 3% potassium permanganate solution, and the complexing agent solution in the second washing tower is ultrapure water. Final example 2 the electronic grade aqueous ammonia metal ion extracted from the finished electronic grade aqueous ammonia extraction line was less than 50 ppt and the single anion content was 40 ppb.
Example 3: technological parameters: the oxidant solution in the first washing tower is 10% hydrogen peroxide solution, and the complexing agent solution in the second washing tower is 5% ethylene diamine tetraacetic acid solution. Final example 3 the electronic grade aqueous ammonia metal ion extracted from the finished electronic grade aqueous ammonia extraction line was less than 10 ppt and the single anion content was 100 ppb.
Example 4: technological parameters: the oxidant solution in the first washing tower is 3% potassium permanganate solution, and the complexing agent solution in the second washing tower is 5% triethanolamine solution. Final example 4 the electronic grade aqueous ammonia metal ion extracted from the finished electronic grade aqueous ammonia extraction line was less than 30 ppt and the single anion content was 40 ppb.
Example 5: technological parameters: the oxidant solution in the first washing tower is 3% potassium permanganate solution, and the complexing agent solution in the second washing tower is 5% ethylenediamine tetraacetic acid solution. Final example 5 the electronic grade aqueous ammonia metal ion extracted from the finished electronic grade aqueous ammonia extraction line was less than 10 ppt and the single anion content was 40 ppb.
The above embodiments are merely preferred embodiments of the present utility model, and should not be construed as limiting the present utility model, and the embodiments and features of the embodiments of the present utility model may be arbitrarily combined with each other without collision. The protection scope of the present utility model is defined by the claims, and the protection scope includes equivalent alternatives to the technical features of the claims. I.e., equivalent replacement modifications within the scope of this utility model are also within the scope of the utility model.
Claims (6)
1. The utility model provides a production device of direct production electron level aqueous ammonia of ammonia, includes raw materials storage tank (1), scrubbing tower (2), drying tower (3), absorption tower (4), buffer tank (5) and ultra-clean filter equipment (6) that loops through the pipeline connection, its characterized in that: the washing tower (2) comprises a first washing tower (2.1) and a second washing tower (2.2), wherein an oxidant solution spraying pipe (2.1.1) is arranged at the top of the first washing tower (2.1), and a complexing agent solution spraying pipe (2.2.1) is arranged at the top of the second washing tower (2.2).
2. The production device for directly producing electronic grade ammonia by using ammonia gas according to claim 1, wherein: the drying agent in the drying tower (3) is activated carbon.
3. The production device for directly producing electronic grade ammonia by using ammonia gas according to claim 1, wherein: the bottom outlet of the absorption tower (4) is connected with the inlet of the buffer tank (5) through a pipeline, and one outlet of the buffer tank (5) is connected with the top reflux port of the absorption tower (4) through a liquid return pipeline (7).
4. A production device for directly producing electronic grade ammonia water by ammonia gas according to claim 3, wherein: the liquid return pipeline (7) is provided with a reflux pump (8), the other outlet of the buffer tank (5) is connected with the inlet of the ultra-clean filter device (6) through a pipeline, and the bottom of the absorption tower (4) is also connected with an ultra-pure water inlet pipe (9).
5. A production device for directly producing electronic grade ammonia water by ammonia gas according to claim 3, wherein: the upper side of the buffer tank (5) is provided with an overflow port, the overflow port is connected with an inlet of the ultra-clean filter device (6) through a pipeline, and the buffer tank (5) is located at a height Gao Yuchao of the ultra-clean filter device (6).
6. The production device for directly producing electronic grade ammonia by using ammonia gas according to claim 1, wherein: the ultra-clean filter device (6) is a three-stage filter device, the aperture of a three-stage filter membrane is respectively 50-100nm, 20-40nm and 2-20nm, and the filter membrane is made of polytetrafluoroethylene.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202322729856.XU CN221027723U (en) | 2023-10-11 | 2023-10-11 | Apparatus for producing of electronic grade aqueous ammonia is directly produced to ammonia |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322729856.XU CN221027723U (en) | 2023-10-11 | 2023-10-11 | Apparatus for producing of electronic grade aqueous ammonia is directly produced to ammonia |
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