CN221027140U - Spindle transfer device - Google Patents

Abstract

The utility model discloses a main shaft transfer device which comprises a bottom connecting frame, wherein at least one circle of first connecting holes and/or one circle of second connecting holes are formed in the bottom connecting frame, a fork connecting frame for connecting a forklift is arranged right above the bottom connecting frame, and the fork connecting frame comprises at least two parallel supporting rods and fork limiting plates fixed on the two supporting rods. The main shaft transfer device is provided with the fork connecting frame, and when the main shaft is assembled and disassembled, the main shaft can be transferred through the forklift without using a hoisting device, so that the problem that the main shaft is easy to swing during hoisting is effectively avoided, and the stability and the safety during transfer are greatly improved.

Description

Spindle transfer device

Technical Field

The utility model relates to the field of semiconductor device processing equipment, in particular to a spindle transfer device.

Background

In the thinning apparatus, the loading and unloading of the main shaft and its fixing member is an important step.

Gantry cranes as disclosed in chinese patent application publication CN106672815A are used for the handling of spindles and their fixtures. However, in actual loading and unloading, the condition that the gantry crane is not arranged for lifting often exists, and the condition that the main shaft is easy to swing during lifting exists in the process of lifting by adopting the gantry crane, so that the loading and unloading stability and safety are affected.

Disclosure of utility model

The present utility model is directed to solving the above-mentioned problems of the prior art and providing a spindle transfer device.

The aim of the utility model is achieved by the following technical scheme:

The main shaft moves and carries device, including end linking frame, be formed with round first connecting hole and/or round second connecting hole at least on the end linking frame, be provided with the fork link that is used for connecting fork truck directly over the end linking frame, the fork link includes two piece at least parallel bracing pieces and fixes two fork limiting plate on the bracing piece.

Preferably, in the spindle transfer device, the bottom connecting frame includes 3-6 bars distributed in a polygonal shape, and each bar is provided with a group of first connecting holes at equal intervals and/or a group of second connecting holes at equal intervals.

Preferably, in the spindle transfer device, the first connecting holes are round holes, the second connecting holes are elongated holes, the first connecting holes and the second connecting holes are alternately distributed on the bar, and the first connecting holes are respectively arranged at two ends of the bar.

Preferably, in the spindle transfer device, the four bars are distributed in rectangular shape, they are fixed at the bottom of the bearing plate, and the rectangle surrounded by the four bars is concentric with the bearing plate.

Preferably, in the spindle transfer device, the bottom of the bearing plate is further provided with auxiliary bars located in four bar block enclosing areas, the auxiliary bars are parallel to the two bar blocks and perpendicular to the supporting rods, and the auxiliary bar blocks are provided with first connecting holes and/or a group of second connecting holes.

Preferably, in the spindle transfer device, a lifting lug connecting hole is formed in the center of the fork limiting plate.

Preferably, in the spindle transfer device, the fork connecting frame further comprises a supporting plate connected to the bottom of the supporting rod and located under the fork limiting plate, and the supporting plate is concentrically connected with the bearing plate at the top of the bottom connecting frame through a group of elastic pieces.

Preferably, in the spindle transfer device, a group of stand columns are arranged at the bottom of the supporting plate, and the length of each stand column is smaller than the length of the elastic piece when the elastic piece is not stressed and is larger than the maximum compression amount of the elastic piece.

Preferably, in the spindle transfer device, the elastic member is a heavy-load spring sleeved on the outer periphery of the support rod.

Preferably, in the spindle transfer device, the vertex angles of the two support rods, which are close to each other, are chamfer angles.

The technical scheme of the utility model has the advantages that:

The main shaft transfer device is provided with the fork connecting frame, when the main shaft is assembled and disassembled, the main shaft can be transferred through the forklift without using a hoisting device, so that the requirement on transfer equipment is greatly reduced, the problem that the main shaft is easy to swing during hoisting is effectively avoided, and the stability and the safety during transfer are greatly improved.

The utility model simultaneously sets two different connecting holes on the bottom connecting frame, can effectively meet the connecting requirement of the hanging belt, the hanging rope or the hanging hook, has more flexible application, and is convenient for adjusting the gravity centers of the main shaft and the fixing piece through the selection of the connecting position, thereby ensuring that the main shaft is kept in a vertical state in the moving process, and being more convenient for loading and unloading.

According to the utility model, the lifting lug connecting hole is reserved in the center of the fork limiting plate, so that the main shaft and the fixing piece thereof can be transferred through lifting under the condition of lifting conditions, and the application is more flexible.

The utility model enables the bottom connecting frame to be connected with the fork connecting frame through a group of elastic pieces, and can effectively overcome the vibration of the lifting rope or the hanging strip when in tightness, thereby improving the stability when in transferring.

Drawings

Fig. 1 is a top perspective view of a spindle transfer apparatus of the present utility model;

fig. 2 is a bottom perspective view of the spindle transfer apparatus of the present utility model;

Fig. 3 is an exploded view of the spindle transfer device of the present utility model;

Fig. 4 is a positional relationship diagram of the spindle transfer device according to the present utility model when transferring the spindle and the spindle holder.

Detailed Description

The objects, advantages and features of the present utility model are illustrated and explained by the following non-limiting description of preferred embodiments. These embodiments are only typical examples of the technical scheme of the utility model, and all technical schemes formed by adopting equivalent substitution or equivalent transformation fall within the scope of the utility model.

In the description of the embodiments, it should be noted that the positional or positional relationship indicated by the terms such as "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in the specific orientation, and thus are not to be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The spindle transferring device disclosed by the utility model is described below with reference to the accompanying drawings, as shown in fig. 1, the spindle transferring device comprises a bottom connecting frame 100, at least one circle of first connecting holes 110 and/or one circle of second connecting holes 120 are formed on the bottom connecting frame 100, a fork connecting frame 300 for connecting a forklift is arranged right above the bottom connecting frame 100, and the fork connecting frame 300 comprises at least two parallel supporting rods 310 and fork limiting plates 320 fixed on the two supporting rods 310.

The structure of the bottom connecting frame 100 may be designed according to needs, for example, the bottom connecting frame 100 may be a circular frame or an oval frame, etc. in this embodiment, as shown in fig. 2, the bottom connecting frame 100 includes 3-6 strips 130 distributed in a polygonal shape, preferably, the strips 130 are four and they are distributed in a rectangular shape, a group of first connecting holes 110 are disposed on each strip 130 at equal intervals and/or a group of second connecting holes 120 are disposed on each strip 130 at equal intervals, and the first connecting holes 110 and the second connecting holes 120 extend from the outer side surface of the strip 130 to the inner side surface of the strip 130. The first connecting hole 110 is used for connecting a hook or a hanging rope, and the second connecting hole 120 is used for connecting a hanging strip.

Specifically, as shown in fig. 2, the first connecting holes 110 are circular holes, the second connecting holes 120 are elongated holes, the first connecting holes 110 and the second connecting holes 120 are alternately distributed on the bar 130, and the first connecting holes 110 are respectively disposed at two ends of the bar 130.

As shown in fig. 2, since each bar 130 is provided with a plurality of first connection holes 110 and second connection holes 120, it is inconvenient to connect the ends of adjacent bars 130 by screwing, and for convenience of assembly, four bars 130 are fixed at the bottom of the carrier plate 140, and thus, the bars 130 can be fixed at the bottom of the carrier plate 140 by screwing, and of course, both can be connected by welding, and the carrier plate 140 is concentric with the rectangle enclosed by the four bars 130.

As shown in fig. 2, the bottom of the carrying plate 140 is further provided with an auxiliary bar 150 located in the surrounding area of the four bars 130, the auxiliary bar 150 is parallel to the two bars 130 and has the same distance from the two parallel bars 130, the auxiliary bar 150 is perpendicular to the supporting rod 310, and the auxiliary bar 150 is provided with a first connecting hole 110 and/or a set of second connecting holes 120.

As shown in fig. 1, the center of the fork limiting plate 320 is provided with a lifting lug connecting hole 321, and the lifting lug connecting hole 321 is an M20 screw hole, so that the lifting lug connecting hole can be assembled and disassembled in a lifting mode when the gantry crane is conveniently used and the center of gravity of the main shaft can be ensured in the middle.

As shown in fig. 3, the supporting rods 310 may be directly fixed to the top of the carrier plate 140 by bolts, more preferably, the supporting rods 310 are disposed at the top of a supporting plate 330 and symmetrically distributed on two sides of the center of the supporting plate 330, and the fork limiting plate 320 is located right above the supporting plate 330 and keeps a gap with the supporting plate 330, so that a fork can extend into the lower part of the supporting plate 330 from between the two supporting rods 310, when the fork is lifted, the supporting plate 330 can be lifted, and in order to facilitate the fork to move between the two supporting rods 310, the two similar top angles at two ends of the supporting rods 310 are chamfer angles 311.

As shown in fig. 3, the supporting plate 330 is concentrically connected to the carrier plate 140 at the top of the bottom connecting frame 100 by a set of elastic members. The elastic member may be various possible devices, such as a shock absorber, and more preferably, the elastic member is a heavy-duty spring 500, two ends of the heavy-duty spring 500 may be welded to the supporting plate 330 and the carrying plate 140, the heavy-duty spring 500 is four, and they can bear a load of 250 kg, and the maximum deformation amount of the spring is about 10 mm. The bottom of layer board 330 is provided with a set of stand 340, the length of stand is less than the length when the elastic component is not stressed and is greater than the biggest compression volume of elastic component, and the elastic component is for the suit in the heavy load spring 500 of stand 340 periphery, can guide spacing through stand 340 in order to prevent that the load from too big leading to the spring deformation serious like this.

In actual use, as shown in fig. 4, the fork of the forklift may be inserted under the fork limiting plate, the main shaft fixing part 700 is mounted to the bottom connecting frame 100 through the hanging rope and/or hanging belt and/or hanging hook (not shown in the figure) through the appropriate first connecting hole and/or second connecting hole, and meanwhile, the main shaft is made to be as close to the bottom connecting frame 100 as possible, and then, the forklift lifts the fork slightly upward, so as to detach the fixing screw of the main shaft fixing part, and ensure that the main shaft and the fixing part thereof cannot deflect to affect other stations after the screw is detached.

The utility model has various embodiments, and all technical schemes formed by equivalent transformation or equivalent transformation fall within the protection scope of the utility model.

Claims (10)

1. The main shaft moves and carries device, its characterized in that: including the end linking frame, be formed with round first connecting hole and/or round second connecting hole on the end linking frame at least, be provided with the fork link that is used for connecting fork truck directly over the end linking frame, the fork link includes two piece at least parallel bracing pieces and fixes two fork limiting plate on the bracing piece.

2. The spindle transfer device according to claim 1, wherein: the bottom connecting frame comprises 3-6 strips distributed in a polygonal shape, and each strip is provided with a group of first connecting holes at equal intervals and/or a group of second connecting holes at equal intervals.

3. The spindle transfer device according to claim 2, wherein: the first connecting holes are round holes, the second connecting holes are strip holes, the first connecting holes and the second connecting holes are alternately distributed on the strip blocks, and the first connecting holes are respectively arranged at two ends of the strip blocks.

4. A spindle transfer device in accordance with claim 3, wherein: the four bars are distributed in a rectangular shape and fixed at the bottom of the bearing plate, and the rectangle surrounded by the four bars is concentric with the bearing plate.

5. The spindle transfer device according to claim 4, wherein: the bottom of loading board still is provided with and is located four the piece encloses the supplementary piece that closes in the region, supplementary piece is on a parallel with two pieces and perpendicular to the bracing piece, be provided with first connecting hole and/or a set of second connecting hole on the supplementary piece.

6. The spindle transfer device according to claim 1, wherein: and a lifting lug connecting hole is formed in the center of the fork limiting plate.

7. The spindle transfer device according to claim 1, wherein: the fork connecting frame also comprises a supporting plate which is connected to the bottom of the supporting rod and is positioned under the fork limiting plate, and the supporting plate is concentrically connected with the bearing plate at the top of the bottom connecting frame through a group of elastic pieces.

8. The spindle transfer device according to claim 7, wherein: the bottom of layer board is provided with a set of stand, the length of stand is less than the length when elastic component is not atress just is greater than the maximum compression volume of elastic component.

9. The spindle transfer device according to claim 8, wherein: the elastic piece is a heavy-load spring sleeved on the periphery of the supporting rod.

10. The spindle transfer device according to any one of claims 1 to 9, wherein: the vertex angles of the two support rods, which are close to each other, are chamfer angles.