CN221008936U - Double-sided radiating packaging equipment - Google Patents

Double-sided radiating packaging equipment Download PDF

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Publication number
CN221008936U
CN221008936U CN202322667886.2U CN202322667886U CN221008936U CN 221008936 U CN221008936 U CN 221008936U CN 202322667886 U CN202322667886 U CN 202322667886U CN 221008936 U CN221008936 U CN 221008936U
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cooling
heat dissipation
plate
air
packaging
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CN202322667886.2U
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冼伟明
蔡宗祥
冯宜莲
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Liance Youte Semiconductor Dongguan Co ltd
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Liance Youte Semiconductor Dongguan Co ltd
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Abstract

The utility model discloses a double-sided heat dissipation packaging device, which comprises a device body, wherein a packaging module and a heat dissipation module are respectively arranged on the device body, the packaging module comprises a workbench, a sliding rail is arranged on the device body, the workbench is slidably arranged on the sliding rail, and the workbench can slide to the heat dissipation module through the sliding rail to dissipate heat; the heat dissipation module comprises a cooling assembly, an air inlet assembly is arranged at the upper part of the cooling assembly, and an air exhaust assembly is arranged at the lower part of the cooling assembly; the packaging equipment with double-sided heat dissipation adopts the multi-component heat dissipation structure, can realize the double-sided three-dimensional heat dissipation function after a high-temperature packaging process, can stabilize the cooling rate of the whole packaging structure, improves the cooling efficiency and reduces structural damage caused by difference of regional cooling rates.

Description

Double-sided radiating packaging equipment
Technical Field
The utility model relates to the technical field of semiconductor packaging equipment, in particular to packaging equipment with double-sided heat dissipation.
Background
The semiconductor packaging is an important technical link in the semiconductor industry, a semiconductor integrated circuit is not separated from the protection of a packaging tube shell, the packaging tube shell widely used at present is divided into plastics, metals, ceramics and the like, related packaging processes related to the packaging tube shell include plastic packaging, encapsulation and various welding, wherein the packaging tube shell is subjected to encapsulation plastic packaging process and the welding packaging process of a metal ceramic tube shell, and high-temperature heat curing treatment is not separated from the packaging tube shell, so that various high-temperature packaging equipment is needed, but the packaging tube shell is lack of more perfect technical support for the cooling step after the high-temperature treatment.
The existing packaging equipment is poor in cooling and heat dissipation technology aiming at high temperature treatment, and lacks an efficient follow-up heat dissipation treatment scheme at a high temperature of up to hundreds of DEG C in the packaging process, so that the heat dissipation speed is slow, the heat dissipation efficiency is low, high time cost is brought, meanwhile, the existing heat dissipation technology can also cause uneven heat dissipation speed of a packaging structure, various cracks and cracks are formed in a heat-set area, and the product yield is greatly reduced.
Therefore, how to provide a packaging device with an efficient heat dissipation function and capable of realizing double-sided three-dimensional heat dissipation is an important subject for those skilled in the art.
Disclosure of utility model
In order to solve the above problems, the present utility model provides a dual-side heat dissipation packaging device, which can realize dual-side three-dimensional heat dissipation after a high-temperature packaging process, stabilize the cooling rate of an overall packaging structure, improve cooling efficiency, and reduce structural damage caused by difference of regional cooling rates.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The packaging equipment with double-sided heat dissipation comprises an equipment body, wherein a packaging module and a heat dissipation module are respectively arranged on the equipment body;
The packaging module comprises a workbench, a sliding rail is arranged on the equipment body, the workbench is slidably arranged on the sliding rail, and the workbench can slide to the heat dissipation module through the sliding rail to dissipate heat;
The heat dissipation module comprises a cooling assembly, an air inlet assembly is arranged on the upper portion of the cooling assembly, and an air exhaust assembly is arranged on the lower portion of the cooling assembly.
The workbench comprises a carrying plate, a plurality of groups of first air through holes are formed in the upper end face of the carrying plate, sliding grooves are formed in the side portions of the carrying plate in a penetrating mode, a plurality of sliding rods are mounted at the front end and the rear end of the carrying plate and are slidably mounted on the sliding rails, and operating handles are mounted on the outer portions of the sliding rods and can be operated to control the workbench to slide.
The packaging area further comprises a high-temperature hot plate, and one end of the side part of the high-temperature hot plate is connected with the equipment body and the power supply.
Furthermore, the side surface of the high-temperature hot plate is the same as the opening of the chute, and the projection of the side surface of the high-temperature hot plate and the opening of the chute in the horizontal direction is consistent, and the workbench can be operated to be sleeved on the high-temperature hot plate in a sliding manner through the chute, so as to carry out a high-temperature thermosetting packaging process.
The air inlet assembly comprises a cooling water tank, a plurality of groups of second air through holes are formed in the cooling water tank in a penetrating mode in the vertical direction, an air inlet fan is arranged at the lower portion of the cooling water tank, and air is introduced through the second air through holes when the air inlet fan is started.
Further, a first water inlet is formed in one side of the bottom of the cooling water tank, a first water outlet is formed in one side of the top of the cooling water tank, the first water inlet and the first water outlet are connected with an external water chiller to circulate cooling water, the second air through hole is used for cooling and air intake through the cooling water tank, and the air intake fan is used for guiding cooling air to the cooling assembly.
The cooling assembly comprises a first cooling plate and a second cooling plate, the first cooling plate is arranged above the second cooling plate and is in projection coincidence with the second cooling plate in the vertical direction, a plurality of groups of third air through holes are respectively formed in the upper end faces of the first cooling plate and the second cooling plate, the positions of the plurality of groups of third air through holes on the first cooling plate and the second cooling plate in the vertical direction are the same, and radiating fins are fixedly arranged below the second cooling plate to radiate heat in an accelerating mode.
Further, the cooling assembly further comprises a water cooling pipe, a second water inlet and a second water outlet are respectively formed in two ends of the water cooling pipe, the second water inlet is formed in one end of the first cooling plate, the second water outlet is formed in one end of the radiating fin, and the water cooling pipe is installed in the first cooling plate, the second cooling plate and the inside of the radiating fin in a shape of a loop.
Further, the water cooling pipe is connected with the external water chiller to circulate cooling water, the water cooling pipe cooling water passes through the first cold plate, the second cold plate and the inside of the radiating fins in sequence, and when the first cold plate, the second cold plate and the radiating fins are subjected to water cooling and radiating, the heat of the first cold plate and the second cold plate can be transferred to the radiating fins in an accelerating manner, and the radiating efficiency is improved.
The cooling device is characterized in that a cavity is arranged in the device body and located below the cooling assembly, the exhaust assembly is arranged in the cavity and comprises a first exhaust fan, a diversion trench and a second exhaust fan, the first exhaust fan is arranged at the lower part of the radiating fin, and the first exhaust fan discharges heat of the radiating fin downwards through air flow.
Further, the diversion trench is installed in cavity bottom, the second exhaust fan is installed the cavity lateral part, the diversion trench will the exhaust air current of first exhaust fan is directed to the second exhaust fan.
Further, the side face of the first cold plate is the same as the size of the opening of the sliding chute, the side face of the first cold plate is the same as the projection of the opening face of the sliding chute in the horizontal direction, the interval distance between the first cold plate and the second cold plate is the same as the lower wall thickness of the sliding chute, the workbench can be sleeved on the first cold plate through sliding of the sliding chute, the plurality of groups of first air through holes are respectively overlapped with the plurality of groups of third air through holes in position during sleeving, and cooling air passes through the first air through holes and the third air through holes to drive gas flow and heat transfer on the upper surface and the lower surface of the heat dissipation module so as to realize a double-sided three-dimensional heat dissipation function.
The double-sided heat dissipation packaging device has the following beneficial effects:
The packaging equipment with double-sided heat dissipation adopts the multi-component heat dissipation structure, can realize the double-sided three-dimensional heat dissipation function after a high-temperature packaging process, can stabilize the cooling rate of the whole packaging structure, improves the cooling efficiency and reduces structural damage caused by difference of regional cooling rates.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a dual-sided heat dissipating packaging apparatus according to the present utility model;
FIG. 2 is a schematic diagram of a partial cross-sectional structure of a dual-sided heat dissipation package device according to the present utility model;
FIG. 3 is a schematic diagram of a workbench of a dual-sided heat dissipation packaging device according to the present utility model;
FIG. 4 is a schematic illustration of a dual sided heat dissipating package assembly according to the present utility model;
FIG. 5 shows a cooling assembly of a dual sided heat dissipating packaging device according to the present utility model;
FIG. 6 shows a double-sided heat dissipating enclosure exhaust assembly according to the present utility model;
Fig. 7 is an enlarged schematic view of a partial structure of a dual-sided heat dissipation package device according to the present utility model.
Detailed Description
In order to make the objects, features and advantages of the present utility model more obvious and understandable, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model, and it is apparent that the embodiments described below are only some embodiments of the present utility model, not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.
In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
As shown in fig. 1, the utility model provides a double-sided heat dissipation packaging device, which comprises a device body 1, wherein a packaging module 2 and a heat dissipation module 3 are respectively arranged on the device body 1;
The packaging module 2 comprises a workbench 22, as shown in fig. 2, a slide rail 11 is arranged on the equipment body 1, the workbench 22 is slidably arranged on the slide rail 11, and the workbench 22 can slide to the heat dissipation module 3 through the slide rail 11 to dissipate heat; the heat dissipation module 3 comprises a cooling component 32, an air inlet component 31 is arranged on the upper portion of the cooling component 32, and an air exhaust component 33 is arranged on the lower portion of the cooling component 32.
In this embodiment, as shown in fig. 3, the workbench 22 includes a carrier plate 221, a plurality of groups of first air through holes 222 are formed in an upper end surface of the carrier plate 221, sliding grooves 223 are formed in a side portion of the carrier plate 221 in a penetrating manner, a plurality of sliding rods 224 are mounted at front and rear ends of the carrier plate 221, the sliding rods 224 are slidably mounted on the sliding rails 11, an operation handle 225 is mounted outside the sliding rods 224, and the operation handle 225 can control the workbench 22 to slide on the sliding rails 11.
The packaging module 2 further includes a high-temperature heat plate 21, one end of the side of the high-temperature heat plate 21 is connected with the device body 1 and the power supply, the side of the high-temperature heat plate 21 is the same as the opening of the chute 223, the side of the high-temperature heat plate 21 is projected to be consistent with the opening of the chute 223 in the horizontal direction, and the sliding workbench 22 can enable the workbench 22 to be sleeved on the high-temperature heat plate 21 in a sliding manner through the chute 223.
In this embodiment, as shown in fig. 4, the air intake assembly 31 includes a cooling water tank 311, a first water inlet 312 is provided at one side of the bottom of the cooling water tank 311, a first water outlet 313 is provided at one side of the top of the cooling water tank 311, the first water inlet 312 and the first water outlet 313 are connected with an external water chiller to circulate cooling water, a plurality of groups of second air through holes 314 are provided in the cooling water tank 311 in a penetrating manner in the vertical direction, and an air intake fan 315 is installed at the lower part of the cooling water tank 311.
Specifically, the air inlet fan 315 is configured to intake air through the second air through hole 314, and the cooling water tank 311 is configured to cool the second air through hole 314 by circulating cooling water, thereby cooling the intake air through the second air through hole 314, and the air inlet fan is configured to guide the cooling air to the cooling assembly 32 below.
In this embodiment, as shown in fig. 5, the cooling assembly 32 includes a first cooling plate 321 and a second cooling plate 322, where the first cooling plate 321 is mounted above the second cooling plate 322 and is projected and overlapped with the second cooling plate 322 in the vertical direction, a plurality of groups of third air through holes 323 are respectively formed on the upper end surfaces of the first cooling plate 321 and the second cooling plate 322, and the plurality of groups of third air through holes 323 on the first cooling plate 321 and the second cooling plate 322 are positioned in the same position in the vertical direction, and a heat dissipation fin 327 is fixedly mounted below the second cooling plate 322.
The cooling assembly 32 further includes a water cooling pipe 324, two ends of the water cooling pipe 324 are respectively provided with a second water inlet 325 and a second water outlet 326, the second water inlet 325 is disposed at one end of the first cooling plate 321, the second water outlet 326 is disposed at one end of the heat dissipation fin 327, and the water cooling pipe 324 is installed inside the first cooling plate 321, the second cooling plate 322 and the heat dissipation fin 327 in a loop shape.
Specifically, the water cooling pipe 324 is connected with the external water chiller to circulate cooling water, and the cooling water of the water cooling pipe 324 passes through the first cooling plate 321, the second cooling plate 322 and the heat dissipation fins 327 in sequence, so that heat of the first cooling plate 321 and the second cooling plate 322 can be transferred to the heat dissipation fins 327 while cooling the first cooling plate 321, the second cooling plate 322 and the heat dissipation fins 327.
In this embodiment, the apparatus body 1 is provided with a cavity 12 inside, the cavity 12 is located below the cooling component 32, the exhaust component 33 is installed inside the cavity 12, as shown in fig. 6, the exhaust component 33 includes a first exhaust fan 331, a flow guiding groove 332 and a second exhaust fan 333, the first exhaust fan 331 is installed at the lower part of the heat dissipating fin 327, the flow guiding groove 332 is installed at the bottom of the cavity 12, the second exhaust fan 333 is installed at the side part of the cavity 12, and the flow guiding groove 332 guides the air flow exhausted by the first exhaust fan 331 to the second exhaust fan 333.
Specifically, the first exhaust fan 331 discharges the heat of the heat dissipating fins 327 downward by the air flow, and the flow guiding groove 332 then guides the air flow discharged from the first exhaust fan 331 to the second exhaust fan 333 to be discharged from the second exhaust fan 333.
In the present embodiment, the side dimension of the first cooling plate 321 is the same as the opening dimension of the sliding groove 223, and the projection of the side of the first cooling plate 321 and the opening dimension of the sliding groove 223 are consistent in the horizontal direction, the spacing distance between the first cooling plate 321 and the second cooling plate 322 is the same as the lower wall thickness of the sliding groove 223, the workbench 22 can be slidably sleeved on the first cooling plate 321 through the sliding groove 223, and when in sleeving, the groups of first air through holes 222 are respectively overlapped with the groups of third air through holes 323.
In this embodiment, when the packaging and heat dissipation are specifically performed, as shown in fig. 7, after the high-temperature packaging is completed, the workbench 22 and the workpiece (not shown in the drawing) located on the workbench 22 are slid to the heat dissipation module 3 by controlling the operation handle 225, at this time, the workbench 22 is slidably sleeved on the first cold plate 321 through the sliding groove 223, the plurality of groups of first air through holes 222 are respectively overlapped with the plurality of groups of third air through holes 323, the air inlet assembly 31 guides cooling air to the workbench 22 and the cooling assembly 32 through the air inlet fan 315, the cooling air drives the upper and lower air of the heat dissipation module 3 to flow and transfer heat through the first air through holes 222 and the third air through holes 323, so that a double-sided three-dimensional heat dissipation function is realized, and the cooling air is discharged through the first exhaust fan 331 and the second exhaust fan 333 after passing through the first air through holes 222 and the third air through holes 323.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The double-sided heat dissipation packaging equipment is characterized by comprising an equipment body (1), wherein a packaging module (2) and a heat dissipation module (3) are respectively arranged on the equipment body (1);
The packaging module (2) comprises a workbench (22), sliding rails (11) are arranged at two ends of the equipment body (1), the workbench (22) is slidably mounted on the sliding rails (11), and the workbench (22) can slide to the heat dissipation module (3) through the sliding rails (11) to dissipate heat;
The heat dissipation module (3) comprises a cooling assembly (32), an air inlet assembly (31) is arranged on the upper portion of the cooling assembly (32), and an air exhaust assembly (33) is arranged on the lower portion of the cooling assembly (32).
2. The double-sided radiating packaging equipment according to claim 1, wherein the workbench (22) comprises a carrying plate (221), a plurality of groups of first air through holes (222) are formed in the upper end face of the carrying plate (221), sliding grooves (223) are formed in the side portions of the carrying plate (221) in a penetrating mode, a plurality of sliding rods (224) are arranged at the front end and the rear end of the carrying plate (221), the sliding rods (224) are slidably arranged on the sliding rails (11), and an operation handle (225) is arranged outside the sliding rods (224).
3. The double-sided radiating packaging device according to claim 2, wherein the packaging module (2) further comprises a high-temperature hot plate (21), one end of the side portion of the high-temperature hot plate (21) is connected with the device body (1) and a power supply, the side face of the high-temperature hot plate (21) is the same as the opening of the sliding groove (223), the side face of the high-temperature hot plate (21) and the opening face of the sliding groove (223) are projected in the horizontal direction to be consistent, and the workbench (22) can be sleeved on the high-temperature hot plate (21) in a sliding manner through the sliding groove (223).
4. The packaging device with double-sided heat dissipation according to claim 1, wherein the air inlet assembly (31) comprises a cooling water tank (311), a first water inlet (312) is formed in one side of the bottom of the cooling water tank (311), a first water outlet (313) is formed in one side of the top of the cooling water tank (311), the first water inlet (312) and the first water outlet (313) are connected with an external water chiller, a plurality of groups of second air through holes (314) are formed in the cooling water tank (311) in a penetrating manner in the vertical direction, and an air inlet fan (315) is mounted at the lower part of the cooling water tank (311).
5. A double-sided heat dissipation packaging device as claimed in claim 2, wherein the cooling assembly (32) comprises a first cold plate (321) and a second cold plate (322), the first cold plate (321) is mounted above the second cold plate (322) and coincides with the projection of the second cold plate (322) in the vertical direction, a plurality of groups of third air through holes (323) are respectively formed in the upper end surfaces of the first cold plate (321) and the second cold plate (322), the groups of third air through holes (323) on the first cold plate (321) and the second cold plate (322) are the same in position in the vertical direction, and a heat dissipation fin (327) is fixedly mounted below the second cold plate (322).
6. The double-sided radiating packaging device according to claim 5, wherein the cooling assembly (32) further comprises a water cooling pipe (324), a second water inlet (325) and a second water outlet (326) are respectively arranged at two ends of the water cooling pipe (324), the second water inlet (325) is arranged at one end of the first cooling plate (321), the second water outlet (326) is arranged at one end of the radiating fin (327), and the water cooling pipe (324) is installed inside the first cooling plate (321), the second cooling plate (322) and the radiating fin (327) in a loop shape.
7. The double-sided radiating packaging device according to claim 5, wherein a cavity (12) is arranged in the device body (1), the cavity (12) is located below the cooling component (32), the exhaust component (33) is installed in the cavity (12), the exhaust component (33) comprises a first exhaust fan (331), a flow guide groove (332) and a second exhaust fan (333), the first exhaust fan (331) is installed at the lower part of the radiating fin (327), the flow guide groove (332) is installed at the bottom of the cavity (12), the second exhaust fan (333) is installed at the side part of the cavity (12), and the flow guide groove (332) guides the air flow exhausted by the first exhaust fan (331) to the second exhaust fan (333).
8. The double-sided heat dissipation packaging device as claimed in claim 5, wherein the side surface of the first cold plate (321) is the same as the opening of the chute (223), the side surface of the first cold plate (321) is projected to be consistent with the opening of the chute (223) in the horizontal direction, the spacing distance between the first cold plate (321) and the second cold plate (322) is the same as the lower wall thickness of the chute (223), the workbench (22) can be slidably sleeved on the first cold plate (321) through the chute (223), and the groups of first air through holes (222) are respectively overlapped with the groups of third air through holes (323) in position when sleeved.
CN202322667886.2U 2023-09-28 2023-09-28 Double-sided radiating packaging equipment Active CN221008936U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322667886.2U CN221008936U (en) 2023-09-28 2023-09-28 Double-sided radiating packaging equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322667886.2U CN221008936U (en) 2023-09-28 2023-09-28 Double-sided radiating packaging equipment

Publications (1)

Publication Number Publication Date
CN221008936U true CN221008936U (en) 2024-05-24

Family

ID=91118050

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322667886.2U Active CN221008936U (en) 2023-09-28 2023-09-28 Double-sided radiating packaging equipment

Country Status (1)

Country Link
CN (1) CN221008936U (en)

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