CN221006648U - Vacuum degree detection device capable of detecting multiple vacuum parts at one time - Google Patents

Abstract

The utility model discloses a vacuum degree detection device capable of detecting a plurality of vacuum parts at one time, which comprises a vacuum body, a plurality of upper detection units and a plurality of lower detection units, wherein the vacuum body is a dish-shaped body formed by an upper shell and a lower shell, a dish-shaped cavity with middle height larger than edge height is arranged in the dish-shaped body, a plurality of upper access holes and a plurality of lower access holes are respectively arranged along the circumferential direction near the edge of the upper shell and the edge of the lower shell, the openings of the upper access holes and the lower access holes in the dish-shaped cavity are positioned in the height area with equal pressure in the dish-shaped cavity in a vacuum state, each upper detection unit is correspondingly arranged in each upper access hole through the vacuum tube, and each lower detection unit is correspondingly arranged in each lower access hole through the vacuum tube. The vacuum body has the advantages that the upper group of detection units and the lower group of detection units can be arranged on the vacuum body, and compared with the spherical design of the traditional vacuum body, the number of the detection units can be doubled.

Description

Vacuum degree detection device capable of detecting multiple vacuum parts at one time

Technical Field

The utility model relates to a vacuum degree detection device capable of detecting a plurality of vacuum parts at one time, and belongs to the technical field of vacuum detection equipment.

Background

At present, in the vacuum mechanical industry, a vacuum detection device is often required to detect the vacuum degree of some vacuum parts, and in order to improve the detection efficiency, a plurality of detection units are often connected to the same vacuum chamber of the vacuum detection device in an external mode, so that all the detection units can detect one vacuum part at the same time.

Because the vacuum chamber is not in absolute vacuum during application, certain air pressure still exists, the air pressure shows different pressures at different heights in the chamber, and if the leading-out outlet holes of the detection units are not at the same height, the detection result cannot be identified as the same standard vacuum degree based on the detection result.

In order to detect a plurality of vacuum parts at a time and based on a unified vacuum degree standard, a spherical vacuum body is widely used in the industry, wherein the receiving and discharging holes of the detection unit are arranged on the equator of the spherical vacuum body, and the detection ports of the detection unit are all at the same height.

However, the leading-out pipes of the detection units of the spherical vacuum body are horizontally connected out in a radial shape at the equator, so that the whole device occupies a large space, and the number of the detection units is still limited.

The present application aims to solve the above-mentioned problems. In order to make the scheme for solving the problem more pertinence, we have carried on the related patent search, obtain the application number 202011241981.0, the name is a vacuum detection device and film gauge vacuum degree detection method of the multi-joint patent literature, it has disclosed a vacuum detection device and film gauge vacuum degree detection method of multi-joint, can connect a plurality of film gauges to be measured at the same time through multiple joints to detect, when detecting, if the measured value of the standard vacuum measuring instrument does not change and indicates that all film gauges are qualified, if there is change and indicates that at least one film gauge is unqualified, thus can confirm the unqualified film gauge through the way of semi-investigation; compared with the mode that only can detect one by one in the prior art, the detection efficiency is higher, the operation is more convenient, and the vacuum detection device of the multi-joint has simple structure and low cost.

Although this document proposes a technique capable of detecting a plurality of vacuum devices at a time, the receiving holes of the detecting unit are not at the same height, and therefore the problem addressed by the present application cannot be solved.

Disclosure of utility model

The utility model aims to solve the technical problems that: how to detect multiple vacuum pieces at a time based on the same pressure.

Aiming at the problems, the technical proposal provided by the utility model is as follows:

the utility model provides a vacuum degree detection device that can once detect a plurality of vacuum parts, includes the vacuum body, has a plurality of detecting element and a plurality of detecting element down of vacuum tube, the vacuum body is the dish body that comprises last casing and lower casing, has the middle dish cavity that highly is greater than the edge height in it, is close to the edge of last casing and the edge of lower casing, is equipped with a plurality of access holes and a plurality of access holes down along circumference respectively, and the opening of access hole is located the high region that the pressure equals in the dish cavity under the vacuum state in last access hole and lower access hole, and each detecting element is through its vacuum tube correspondence installation in each access hole down.

The upper shell and the lower shell are spherical crown-shaped shells.

The detection ports of the upper detection units are positioned at the same height, and the detection ports of the lower detection units are positioned at the same height.

The vacuum main pipe is characterized by further comprising a vacuum main pipe, a main pipe connecting hole is formed in the center of the lower shell, the upper end of the vacuum main pipe is in butt joint with the main pipe connecting hole, and the space in the vacuum main pipe is communicated with the disc-shaped cavity.

The vacuum main pipe is connected with an exhaust device.

The vacuum main pipe is connected with a vacuum gauge.

And an air inlet pipe arranged at the top of the upper shell.

Advantageous effects

The upper and lower groups of detection units can be arranged on the vacuum body, compared with the spherical design of the traditional vacuum body, the number of the detection units can be doubled, and the space occupation in the horizontal direction can be reduced.

Drawings

FIG. 1 is a schematic plan view of a main body of the vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time;

FIG. 2 is a schematic perspective view of the vacuum body;

FIG. 3 is a schematic cross-sectional view of the vacuum body;

fig. 4 is a schematic diagram of fig. 1.

In the figure: 1. a vacuum body; 11. an upper housing; 111. an upper outlet hole; 12. a lower housing; 121. a lower outlet hole; 13. a main pipe joint hole; 14. a dish-shaped chamber; 2. an upper detection unit; 3. a lower detection unit; 4. a vacuum tube; 5. a detection port; 6. a vacuum manifold; 7. an air inlet pipe; 8. a vacuum gauge.

Detailed Description

The utility model is further described below with reference to the accompanying drawings:

As shown in fig. 1 to 3, a vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time comprises a vacuum body 1, a plurality of upper detecting units 2 and a plurality of lower detecting units 3 each having a vacuum tube 4, wherein the vacuum body 1 is a dish-shaped body formed by an upper casing 11 and a lower casing 12, a dish-shaped chamber 14 having a middle height larger than an edge height is provided in the vacuum body, a plurality of upper access holes 111 and a plurality of lower access holes 121 are provided in the circumferential direction in the vicinity of the edge of the upper casing 11 and the edge of the lower casing 12, respectively, openings of the upper access holes 111 and the lower access holes 121 in the dish-shaped chamber 14 are located in a height region where the pressures in the dish-shaped chamber 14 are equal in a vacuum state, each upper detecting unit 2 is correspondingly mounted in each upper access hole 111 through the vacuum tube 4, and each lower detecting unit 3 is correspondingly mounted in each lower access hole 121 through the vacuum tube 4. In this way, the upper and lower sets of detecting units can be provided on the vacuum body 1, the number of detecting units can be doubled as compared with the conventional spherical design of the vacuum body 1, and the space occupation in the horizontal direction can be reduced (because the detecting units in the spherical design of the vacuum body 1 are horizontally projected radially along the equator). Since the openings of the upper and lower outlet holes 111 and 121 in the dish-shaped chamber 14 are located in the height region where the pressures in the dish-shaped chamber 14 are equal in the vacuum state, the pressures received by the vacuum tubes 4 of the upper and lower groups of the detecting units are equal at one end in the dish-shaped chamber 14. Of course, the equality is not absolutely equal, as the openings of the upper and lower outlet openings 111, 121 in the dish-shaped chamber 14 still have a certain height difference.

The upper case 11 and the lower case 12 are spherical crown-shaped cases having a stronger compressive resistance.

The detection ports 5 of the upper detection units 2 are at the same height, and the detection ports 5 of the lower detection units 3 are at the same height. For a standard-critical vacuum detection, the upper detection unit 2 and the lower detection unit 3 may perform two different standards because there is a large difference in height between the detection port 5 of the upper detection unit 2 and the detection port 5 of the lower detection unit 3.

As shown in fig. 3 and 4, the vacuum degree detecting device further comprises a vacuum main pipe 6, a main pipe joint hole 13 is arranged in the center of the lower shell 12, the upper end of the vacuum main pipe 6 is in butt joint with the main pipe joint hole 13, and the pipe inner space of the vacuum main pipe 6 is communicated with a disc-shaped cavity 14. The vacuum main pipe 6 is connected with an exhaust device; the vacuum manifold 6 is communicated with a vacuum gauge 8.

The vacuum degree detecting apparatus further includes an air inlet pipe 7 installed at the top of the upper housing 11.

The above embodiments are only for the purpose of more clearly describing the present utility model and should not be construed as limiting the scope of the present utility model, and any equivalent modifications should be construed as falling within the scope of the present utility model.

Claims (7)

1. The utility model provides a vacuum degree detection device that can once detect a plurality of vacuum parts which characterized in that: the vacuum body (1) is a dish-shaped body formed by an upper shell (11) and a lower shell (12), a dish-shaped cavity (14) with middle height larger than edge height is arranged in the vacuum body (1), a plurality of upper access holes (111) and a plurality of lower access holes (121) are respectively arranged along the circumferential direction at the edges of the upper shell (11) and the lower shell (12), openings of the upper access holes (111) and the lower access holes (121) in the dish-shaped cavity (14) are located in a height area with equal pressure in the dish-shaped cavity (14) under a vacuum state, each upper detection unit (2) is correspondingly installed in each upper access hole (111) through the vacuum tube (4), and each lower detection unit (3) is correspondingly installed in each lower access hole (121) through the vacuum tube (4).

2. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 1, wherein: the upper shell (11) and the lower shell (12) are spherical crown shells.

3. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 1, wherein: the detection ports (5) of the upper detection units (2) are positioned at the same height, and the detection ports (5) of the lower detection units (3) are positioned at the same height.

4. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 1, wherein: the vacuum manifold is characterized by further comprising a vacuum manifold (6), wherein a manifold joint hole (13) is formed in the center of the lower shell (12), the upper end of the vacuum manifold (6) is in butt joint with the manifold joint hole (13), and the space in the vacuum manifold (6) is communicated with the disc-shaped cavity (14).

5. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 4, wherein: the vacuum main pipe (6) is connected with an exhaust device.

6. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 4, wherein: the vacuum main pipe (6) is connected with a vacuum gauge (8).

7. The vacuum degree detecting apparatus capable of detecting a plurality of vacuum members at a time according to claim 1, wherein: also comprises an air inlet pipe (7) arranged at the top of the upper shell (11).