CN220984477U - Wafer box detection device and transfer robot - Google Patents

Abstract

The utility model is applicable to the field of wafer box detection, and discloses a wafer box detection device and a transfer robot, wherein the wafer box detection device comprises a fixed component, a detection element, a trigger piece and a first elastic piece, wherein the fixed component is arranged on a material bearing platform, the detection element is arranged on the fixed component, and the trigger piece is movably arranged on the fixed component and at least partially protrudes out of the material bearing platform; the first elastic piece is arranged between the trigger piece and the fixed component and is respectively propped against the trigger piece and the fixed component; the trigger piece is used for moving from the first position to the second position under the action of proper external force; the first elastic piece is used for pushing the trigger piece when the external force is eliminated so as to enable the trigger piece to move from the second position to the first position; the detecting element is used for detecting whether the trigger piece moves to the second position so as to judge whether the trigger piece is subjected to proper external force exerted by the material, thereby judging whether the wafer box is placed on the material bearing platform or not, and further reducing the misjudgment probability.

Description

Wafer box detection device and transfer robot

Technical Field

The utility model relates to the field of wafer box detection, in particular to a wafer box detection device and a transfer robot.

Background

In the field of electronic semiconductors, wafers are the basic material for integrated circuit fabrication, and all integrated circuit designs and fabrication are based on wafers, which are referred to as wafers because of their circular shape. Wafers are typically placed in cassettes to complete the handling and transport operations.

In the related art wafer cassette transfer robot, a detection device for detecting whether a wafer cassette is placed is generally provided at a wafer cassette storage location, but most of the detection devices are complicated in structure, and particulate matters such as dust are easily generated when in use to affect the operation environment of the wafer.

Disclosure of utility model

A first objective of the present utility model is to provide a wafer cassette inspection device, which aims to solve the technical problem of complex structure of the wafer cassette inspection device in the related art.

In order to achieve the above purpose, the utility model provides the following scheme:

The wafer box detection device is arranged on a material bearing platform of the transfer robot and comprises a fixed component, a detection element, a trigger piece and a first elastic piece, wherein the fixed component is arranged on the material bearing platform;

The first elastic piece is arranged between the trigger piece and the fixed component and is respectively propped against the trigger piece and the fixed component; the trigger piece is used for moving from the first position to the second position under the action of proper external force; the first elastic piece is used for pushing the trigger piece when the external force is eliminated so as to enable the trigger piece to move from the second position to the first position;

The detecting element is used for detecting whether the trigger piece moves to the second position so as to judge whether the trigger piece is subjected to proper external force exerted by the materials.

In some embodiments, the trigger piece comprises a first trigger part and a second trigger part, wherein the first trigger part is movably connected with the fixed component and partially protrudes out of the material bearing platform;

The second trigger part is connected with the first trigger part and moves along with the first trigger part;

The first trigger part is used for pushing the second trigger part under the action of external force so as to enable one end of the second trigger part, which is far away from the first trigger part, to move from the first position to the second position;

The first elastic piece is arranged between the first triggering part and the fixed component and respectively abuts against the first triggering part and the fixed component;

The first elastic piece is used for pushing the first trigger part when the external force disappears so as to drive one end of the second trigger part, which is far away from the first trigger part, to move from the second position to the first position;

The detection element is used for detecting whether one end of the second trigger part far away from the first trigger part reaches a second position or not so as to judge whether the first trigger part is subjected to proper external force exerted by the materials or not.

In some embodiments, the first elastic member is disposed around an outer peripheral side of the second triggering portion, and an inner peripheral side of the first elastic member contacts an outer wall surface of the second triggering portion.

In some embodiments, the wafer cassette inspection device further includes a second elastic member, the second elastic member is disposed around the outer periphery of the first elastic member, and a space is formed between the inner side of the second elastic member and the first elastic member;

two ends of the second elastic piece are respectively propped against the first trigger part and the fixing component.

In some embodiments, the fixing assembly includes a fixing housing and a mounting seat, the trigger member is movably disposed in the fixing housing, the first elastic member is disposed in the fixing housing, and an end of the first elastic member away from the first trigger portion abuts against the fixing housing or the mounting seat; the detection element is arranged on the mounting seat.

In some embodiments, the fixed housing is provided with a through hole, and when no external force is applied, at least part of the first trigger part is arranged in the through hole and partially protrudes out of one end of the through hole;

at least part of the second trigger part is arranged in the through hole.

In some embodiments, the first elastic member is enclosed on the second triggering portion, and a space is formed between the inner side of the first elastic member and the second triggering portion, and the outer peripheral side of the first elastic member contacts with the inner wall surface of the through hole;

And/or the number of the groups of groups,

The through hole comprises a first hole section and a second hole section, the first hole section and the second hole section are sequentially communicated along the same axis,

The first elastic piece is arranged in the first hole section, and one end, far away from the first triggering part, of the first elastic piece is propped against the step end face formed at the junction of the first hole section and the second hole section.

In some embodiments, the mounting base comprises a base body, the detection element is arranged on the base body, and two protrusions are arranged on the base body in a protruding mode;

the second position is located in the space formed between the two protrusions and opposite to the detection element.

In some embodiments, the line in which the first location and the second location are located is perpendicular to the line in which the center of the detection element is located.

A second object of the present utility model is to provide a transfer robot, which includes a robot main body and the wafer box detection device, wherein the robot main body is provided with a material carrying platform for carrying materials, and the fixing component is arranged on the material carrying platform and is used for detecting whether the material carrying platform is provided with a proper wafer box.

The wafer box detection device provided by the utility model has the following beneficial effects:

The wafer box detection device is provided with the fixing component, and the detection device is arranged on the material bearing platform of the carrying robot, so that the wafer box detection device is conveniently arranged in the wafer box storage position. The trigger piece is movably arranged on the fixing assembly, and part of the trigger piece protrudes out of the material bearing platform, so that the trigger piece is conveniently pressed down by the material when the material is placed on the material bearing platform.

The wafer box detection device provided by the embodiment of the application also has the advantages that the first elastic piece is arranged between the trigger piece and the fixed component and respectively props against the trigger piece and the fixed component, so that the connection structure among the first elastic piece, the fixed component and the trigger piece is simplified, and the whole structure is simplified; meanwhile, the arrangement of the first elastic piece is convenient for the trigger piece to move to the second position by proper external force, and the trigger piece is matched with the fixing component to enable the first elastic piece to be compressed and to have elasticity, so that when materials are taken away, the first elastic piece can push the trigger piece to return to the first position from the second position by utilizing resilience force, and further the trigger piece can be triggered again, and the wafer box detection device can be reused.

The wafer box detection device provided by the embodiment of the application can also judge whether the trigger piece receives proper external force applied by the material or not by arranging the detection element to detect whether the trigger piece reaches the second position or not. For example, the pressure applied by the wafer box, thereby effectively avoiding false triggering caused by the pressure applied by other objects (such as a temporarily placed box body and the like) to the triggering piece, and further reducing the probability of false judgment phenomenon generated by the detection element. As another example, the pressure applied by the cassette containing the wafers, so that the sensing element can determine that a wafer is placed on the cassette.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of an assembly structure of a wafer cassette detection device and a material carrying platform in a transfer robot according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a wafer cassette inspection apparatus according to a first set of embodiments of the present utility model;

FIG. 3 is a schematic diagram of the explosive structure of FIG. 1;

FIG. 4 is a top view of FIG. 1;

FIG. 5 is a schematic cross-sectional view taken along the direction A-A in FIG. 4;

FIG. 6 is a schematic view of a structure of a fixed housing in a wafer cassette inspection apparatus according to a first set of embodiments of the present utility model;

FIG. 7 is a schematic view of a wafer cassette inspection apparatus according to a second set of embodiments of the present utility model with a fixing component and an inspection element removed;

FIG. 8 is a schematic cross-sectional view taken along the direction B-B in FIG. 7;

FIG. 9 is a schematic view of a wafer cassette inspection apparatus according to a third embodiment of the present utility model with a fixing component and an inspection device removed;

Fig. 10 is a schematic sectional view of the structure of fig. 9 along the direction C-C.

Reference numerals illustrate:

100. A wafer cassette inspection device; 200. a transfer robot; a. a first position; b. a second position;

110. A fixing assembly; 111. a fixed housing; 1111. a through hole; 11111. a first bore section; 11112. a second bore section; 11113. a step end surface; 1112. a clamping groove; 112. a mounting base; 1121. a base; 1122. a protrusion; 113. a first connection plate; 114. a second connecting plate;

120. A detection element;

130. A trigger; 131. A first trigger part; 132. A second trigger part;

140. A first elastic member; 150. A second elastic member;

210. a material bearing platform.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship between the components, the movement condition, etc. in a specific posture, and if the specific posture is changed, the directional indicators are correspondingly changed.

It will also be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or be indirectly connected to the other element through intervening elements.

Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

In the related art wafer cassette transfer robot, most of the detection devices provided in the wafer cassette storage locations are complex in structure, and in addition, the detection devices easily misjudge other objects (such as temporarily placed cases) as the wafer cassettes in the process of detecting whether the wafer cassettes are placed in the wafer cassette storage locations, so that the detection accuracy is low. In addition, the conventional inspection device is easy to generate particulate matters such as dust and the like to influence the operation environment of the wafer when in use. Accordingly, embodiments of the present application provide a wafer cassette inspection apparatus capable of solving at least one of the above-described problems.

In a first set of embodiments of the present application, a wafer cassette inspection apparatus 100 is provided with reference to fig. 1 to 6.

As shown in fig. 1, 2 and 3, and referring to fig. 5, the wafer cassette inspection apparatus 100 according to the embodiment of the present application is disposed on a material carrying platform 210 of a handling robot 200, where the wafer cassette inspection apparatus 100 includes a fixing assembly 110, a detecting element 120, a triggering element 130 and a first elastic element 140, the fixing assembly 110 is disposed on the material carrying platform 210, the detecting element 120 is disposed on the fixing assembly 110, and the triggering element 130 is movably disposed on the fixing assembly 110 and at least partially protrudes from the material carrying platform 210. It can be appreciated that part or all of the triggering element 130 protrudes from the material carrying platform 210, and at least part of the triggering element 130 protrudes from the material carrying platform 210, so that the triggering element 130 can be pressed when a material (such as a wafer cassette or a wafer cassette containing a wafer) is placed on the material carrying platform 210. The first elastic member 140 is disposed between the triggering member 130 and the fixing assembly 110, and abuts against the triggering member 130 and the fixing assembly 110, respectively. The trigger 130 is configured to move from the first position a to the second position b under an appropriate external force, and it is understood that the wafer cassette or the wafer cassette containing the wafers can apply an appropriate external force to the trigger 130, so that the trigger 130 moves from the first position a to the second position b. The first elastic member 140 is used for pushing the trigger member 130 when the external force is removed, so that the trigger member 130 moves from the second position b to the first position a. The detecting element 120 is configured to detect whether the trigger 130 moves to the second position b, so as to determine whether the trigger 130 is subjected to an appropriate external force applied by the material, thereby determining whether the wafer cassette or the wafer cassette containing the wafers is placed on the material carrying platform 210.

It can be appreciated that the wafer cassette inspection device 100 according to the embodiment of the present application is provided with the fixing component 110 to mount the inspection device on the material carrying platform 210 of the handling robot 200, so as to facilitate the installation of the wafer cassette inspection device 100 in the wafer cassette storage location. The trigger piece 130 is movably disposed on the fixing component 110 and partially protrudes out of the material carrying platform 210, so that when the material is placed on the material carrying platform 210, the material can conveniently apply a pressing force to the trigger piece 130.

In the wafer cassette inspection apparatus 100 of the embodiment of the present application, the first elastic member 140 is further disposed between the trigger member 130 and the fixing assembly 110 and respectively abuts against the trigger member 130 and the fixing assembly 110, so that the connection structure among the first elastic member 140, the fixing assembly 110 and the trigger member 130 is simplified, and the overall structure is simplified; meanwhile, the arrangement of the first elastic member 140 is convenient for the trigger member 130 to be moved to the second position b by a proper external force, and the trigger member 130 cooperates with the fixing assembly 110 to enable the first elastic member 140 to be compressed to have elastic force, so that when the material is removed, the first elastic member 140 can push the trigger member 130 to return to the first position a from the second position b by using the elastic force, and further, the trigger member 130 can be triggered again, so that the wafer cassette detection apparatus 100 can be reused.

Since the first predetermined distance is between the first position a and the second position b, the wafer cassette inspection device 100 according to the embodiment of the present application further includes the detection element 120 for detecting whether the trigger 130 reaches the second position b, so as to determine whether the trigger 130 is subjected to an appropriate external force applied by the material. Such as the pressure applied by the wafer cassette, so as to effectively avoid false triggering caused by the pressure applied by other objects (such as a temporarily placed box body, etc.) to the triggering member 130, thereby reducing the probability of false judgment caused by the detecting element 120. As another example, the pressure applied by the cassette containing the wafers, so that the sensing element 120 can determine that a wafer is placed on the cassette.

As shown in fig. 1, fig. 2 and fig. 3, and in combination with fig. 5, as an embodiment, the trigger piece 130 includes a first trigger portion 131 and a second trigger portion 132, where the first trigger portion 131 is movably connected to the fixing component 110 and partially protrudes from the material carrying platform 210, so that a material placed on the material carrying platform 210 is convenient to press down, and the first trigger portion 131 can be moved by applying an acting force to the first trigger portion 131 by the material. The second trigger portion 132 is connected to the first trigger portion 131 and moves along with the first trigger portion 131. The first trigger portion 131 is configured to push the second trigger portion 132 under an appropriate external force, so that an end of the second trigger portion 132 away from the first trigger portion 131 moves from the first position a to the second position b. The first elastic member 140 is disposed between the first triggering portion 131 and the fixing assembly 110 and respectively abuts against the first triggering portion 131 and the fixing assembly 110, so that the first elastic member 140 is compressed under the combined action of the first triggering portion 131 and the fixing assembly 110. In general, the position of the end of the first elastic member 140 abutting against the fixing component 110 is unchanged, and the end of the first elastic member 140 abutting against the first triggering portion 131 moves in the direction approaching the fixing component 110 under the action of the first triggering portion 131, so that the first elastic member 140 is compressed. The first elastic member 140 is configured to push the first triggering portion 131 when the external force is lost, so as to drive one end of the second triggering portion 132 away from the first triggering portion 131 to move from the second position b to the first position a, thereby pushing the first triggering portion 131 to return to the original position, and enabling the first triggering portion 131 to be pressed down again. The first elastic member 140 is a spring, for example. The detecting element 120 is configured to detect whether an end of the second triggering portion 132 away from the first triggering portion 131 reaches the second position b, so as to determine whether the first triggering portion 131 is subjected to an appropriate external force applied by the material, and a distance between the first position a and the second position b may be set according to an actual scenario.

In one embodiment, the appropriate external force applied by the material is the pressure applied by the wafer box, and when the material applies the acting force for driving the first trigger portion 131 to move downwards, the first trigger portion 131 drives one end of the second trigger portion 132 away from the first trigger portion 131 to move downwards; if the end of the second triggering portion 132 away from the first triggering portion 131 cannot move down to the second position b or moves down beyond the second position b, the detecting element 120 may determine that the material is not a wafer cassette; if the end of the second triggering portion 132 away from the first triggering portion 131 can move down to the second position b, the detecting element 120 can determine that the first triggering portion 131 is subjected to the pressure exerted by the wafer cassette, and at this time, the detecting element 120 can determine that the first triggering portion 131 is pressed down by the wafer cassette, so that the detecting element 120 determines that the wafer cassette is placed on the material carrying platform 210, and further improves the detection accuracy of the wafer cassette.

In another embodiment, the material is a wafer box with a wafer inside, at this time, the proper external force applied by the material is the pressure applied by the wafer and the wafer box together, and when the material applies the acting force for driving the first trigger portion 131 to move downwards, the first trigger portion 131 drives one end of the second trigger portion 132 away from the first trigger portion 131 to move downwards; if the end of the second triggering portion 132 away from the first triggering portion 131 cannot move down to the second position b or moves down beyond the second position b, the detecting element 120 may determine that the material is not a wafer box with a wafer inside; if the end of the second triggering portion 132 away from the first triggering portion 131 can move down to the second position b, the detecting element 120 can determine that the first triggering portion 131 is subjected to an appropriate external force applied by the wafer and the wafer cassette together, and at this time, the detecting element 120 can determine that the first triggering portion 131 is pressed down by the wafer and the wafer cassette together, so that the detecting element 120 determines that the wafer cassette is placed on the material carrying platform 210 and the wafer cassette holds the wafer.

As shown in fig. 4 and 5, as an embodiment, the first elastic member 140 is disposed around the outer circumferential side of the second triggering portion 132, and the inner circumferential side of the first elastic member 140 contacts the outer wall surface of the second triggering portion 132, so that the assembly of the first elastic member 140 is simplified and the mounting stability of the first elastic member 140 is improved. In the embodiment of the application, the inner peripheral side of the first elastic member 140 is in contact with the outer wall surface of the second triggering portion 132, when the first elastic member 140 is compressed or rebounded and stretched, friction force is generated between the first elastic member 140 and the second triggering portion 132, and in the process that the first elastic member 140 stretches to push the first triggering portion 131 to move upwards, the friction resistance of the second triggering portion 132 to the first elastic member 140 can play a role in buffering, so that the phenomenon that the first triggering portion 131 is instantaneously pushed upwards by the first elastic member 140 to cause the triggering member 130 to separate from the first elastic member 140 is avoided.

As shown in fig. 1, 2 and 3, as an embodiment, the fixing assembly 110 includes a fixing housing 111 and a mounting seat 112, the fixing housing 111 is fixedly mounted on the material carrying platform 210, the mounting seat 112 is fixedly connected to a surface of the material carrying platform 210 opposite to the wafer box, the trigger member 130 is movably disposed on the fixing housing 111, the first elastic member 140 is disposed in the fixing housing 111, and an end of the first elastic member 140 away from the first trigger portion 131 abuts against the fixing housing 111 or the mounting seat 112, so that when the trigger member 130 is subjected to an external force, the trigger member 130 and the fixing housing 111 or the mounting seat 112 jointly act on the first elastic member 140, thereby compressing the first elastic member 140. The detecting element 120 is disposed on the mounting base 112, and the mounting base 112 can carry the detecting element 120, thereby improving the mounting stability of the detecting element 120.

Referring to fig. 5, in the embodiment in which the first elastic member 140 is disposed around the outer periphery of the second triggering portion 132, one end of the first elastic member 140 abuts against a surface of the first triggering portion 131 away from the material carrying platform 210, and the other end of the first elastic member 140 abuts against the inner side surface of the fixed housing 111 or the mounting seat 112. In this way, when the first triggering portion 131 receives an external force, the first elastic member 140 can be compressed, so that the first elastic member 140 has a resilience force, and when the external force is removed from the first elastic member 140, the first elastic member 140 can push the first triggering portion 131. Meanwhile, since the inner circumferential side of the first elastic member 140 is in contact with the outer wall surface of the second triggering portion 132, when the first elastic member 140 is compressed or when the first elastic member 140 is extended, the first elastic member 140 and the second triggering portion 132 may rub against each other. The embodiment of the application is provided with the fixed housing 111 and the first elastic member 140 is disposed in the fixed housing 111, so that the first elastic member 140 and the second triggering portion 132 can be prevented from diffusing to some extent to the outside due to the particulate matters such as dust generated in the friction process, thereby reducing the influence on the wafer operation environment when the wafer cassette detection device 100 is used.

As shown in fig. 3 and 5, as an embodiment, the fixing housing 111 is provided with a through hole 1111, and when no external force is applied, at least part of the first trigger portion 131 is disposed in the through hole 1111 and partially protrudes from one end of the through hole 1111, and at least part of the second trigger portion 132 is disposed in the through hole 1111. The through hole 1111 is configured to accommodate at least a part of the first trigger portion 131 and the second trigger portion 132, and it is understood that when the first trigger portion 131 is not subjected to an external force, a part or all of the first trigger portion 131 is disposed in the through hole 1111, and a part or all of the second trigger portion 132 is disposed in the through hole 1111. In one embodiment, when no external force is applied, a portion of the first trigger portion 131 is disposed in the through hole 1111, and a portion of the first trigger portion 131 away from the second trigger portion 132 can protrude from the through hole 1111, so that the back surface of the wafer cassette presses down the first trigger portion 131. Meanwhile, when no external force is applied, a portion of the second triggering portion 132 is disposed in the through hole 1111, and a position of the second triggering portion 132 at an end far from the first triggering portion 131 is a first position a, where the first position a is located outside the fixed housing 111. Thus, when an external force is applied, the first trigger portion 131 is completely accommodated in the through hole 1111, and the second trigger portion 132 is driven to move downward relative to the through hole 1111, so that an end of the second trigger portion 132 away from the first trigger portion 131 moves to the second position b.

In one embodiment, the first triggering portion 131 is a cylindrical cap, the second triggering portion 132 is a connecting rod connected to a bottom end surface of the cap, and in an axial direction of the through hole 1111, a front projection area of the first triggering portion 131 is larger than a front projection area of the second triggering portion 132, so that the first elastic member 140 is mounted on the second triggering portion 132, and a top end of the first elastic member 140 abuts against the bottom end surface of the first triggering portion 131.

As shown in fig. 5 and 6, as an embodiment, the through hole 1111 includes a first hole section 11111 and a second hole section 11112, the first hole section 11111 and the second hole section 11112 are sequentially communicated along the same axis, the first elastic member 140 is disposed in the first hole section 11111, and an end of the first elastic member 140, which is far away from the first triggering portion 131, abuts against a step end surface 11113 formed at the junction of the first hole section 11111 and the second hole section 11112. Thus, when the first triggering portion 131 is moved downward by an external force when the fixed housing 111 is placed perpendicular to the horizontal plane, the first triggering portion 131 and the step end surface 11113 act together on the first elastic member 140, so that the first elastic member 140 is compressed in a direction approaching the step end surface 11113. Meanwhile, the step end surface 11113 increases the contact area between the first elastic member 140 and the fixed housing 111, and the step end surface 11113 can also support the first elastic member 140, thereby improving the mounting stability of the first elastic member 140.

As shown in fig. 1, 3 and 5, as an embodiment, the mounting base 112 includes a base body 1121, the detecting element 120 is disposed on the base body 1121, the base body 1121 may carry the detecting element 120, the mounting base 112 further includes two protrusions 1122 protruding from the base body 1121, and the second position b is located in a space formed between the two protrusions 1122 and opposite to the detecting element 120, so as to be detected by the detecting element 120 when the trigger 130 moves to the second position b. In an embodiment, the detecting element 120 is a sensor capable of emitting a light beam, such as a photoelectric detecting sensor, when the first triggering portion 131 is not subjected to an external force, the detecting element 120 emits the light beam toward the second position b, and when the first triggering portion 131 is subjected to the external force and drives one end of the second triggering portion 132 away from the first triggering portion 131 to move to the second position b, the one end of the second triggering portion 132 away from the first triggering portion 131 shields the light beam, and at this time, the detecting element 120 detects that the intensity value of the light beam is instantaneously reduced, it can be determined that the one end of the second triggering portion 132 away from the first triggering portion 131 reaches the second position b, thereby determining that the material is placed on the material carrying platform 210, and simplifying the detection mode. Generally, in combination with the related communication technology, the detecting element 120 may establish communication with the controller of the handling robot 200, so as to send a detecting signal to the controller when the end of the second triggering portion 132 away from the first triggering portion 131 reaches the second position b, so as to facilitate the subsequent operation of the handling robot 200.

As shown in fig. 1 and 5, as an embodiment, a line where the first position a and the second position b are located is perpendicular to a line where the second position b and the center of the detecting element 120 are located. In this way, the trigger 130 can move along a straight line, and the second position b is on both the straight line moving path of the trigger 130 and the detecting path of the detecting element 120, so that the detecting accuracy can be improved. Illustratively, the material carrying platform 210 is placed horizontally, the base 1121 and the two protrusions 1122 extend in a horizontal direction, and the trigger 130 is disposed in a vertical direction and moves downward from the first position a to the second position b, which is located directly under the first position a when an appropriate external force is applied. The second position b is also located on the detection path of the detecting element 120, when the trigger 130 is forced, the end of the second trigger 132 away from the first trigger 131 moves to the second position b, and can be detected by the detecting element 120, so as to determine that the trigger 130 is subjected to an appropriate external force.

As shown in fig. 1, 2 and 3, in one embodiment, the fixing assembly 110 further includes a first connecting plate 113 and a second connecting plate 114, which are connected at an included angle, the first connecting plate 113 is fixedly connected to the material carrying platform 210 and parallel to the material carrying platform 210, and the seat 1121 is mounted on the second connecting plate 114; meanwhile, the material carrying platform 210 is provided with a mounting hole for accommodating the fixed shell 111, and the fixed shell 111 is mounted in the mounting hole, so that the fixed assembly 110 is mounted on the material carrying platform 210. In one embodiment, the outer peripheral wall of the fixed housing 111 is provided with a clamping groove 1112, and the clamping groove 1112 is used for being clamped with a clamping protrusion of the inner peripheral wall of the mounting hole, so as to improve the connection stability of the fixed housing 111 and the mounting hole. Illustratively, the clamping groove 1112 is an annular groove.

A second group of embodiments of the present application is shown in fig. 7 and 8, and in conjunction with fig. 2, the wafer cassette inspection device 100 provided in this embodiment is added to the first group of embodiments by:

As shown in fig. 7 and 8, and referring to fig. 2 and 5, as an embodiment, the wafer cassette inspection apparatus 100 further includes a second elastic member 150, the second elastic member 150 is disposed around the outer circumference of the first elastic member 140, a space is formed between the inner side of the second elastic member 150 and the first elastic member 140, and the first elastic member 140 and the second elastic member 150 do not interfere with each other. Both ends of the second elastic member 150 respectively abut against the first triggering portion 131 and the fixing assembly 110. In the embodiment of the application, the second elastic member 150 is added on the basis of the first elastic member 140, and the material needs to exert an acting force capable of overcoming the elastic force of the first elastic member 140 and the second elastic member 150, so that the first elastic member 140 and the second elastic member 150 are both compressed, and one end of the second triggering portion 132, which is far away from the first triggering portion 131, can be moved from the first position a to the second position b, so that the material with larger mass, such as a wafer box with a certain number of wafers, can be adapted. The user can select only the first elastic member 140 or add the second elastic member 150 based on the first elastic member 140 according to the actual elastic force requirement to be set and the material condition to be detected. The second elastic member 150 is a spring, for example.

A third set of embodiments of the present application is shown in fig. 9 and 10, and in conjunction with fig. 2, the wafer cassette inspection device 100 provided in this embodiment is different from the first set of embodiments in that the first elastic member 140 is disposed differently:

As an embodiment, the first elastic member 140 is disposed around the second triggering portion 132, and a space is formed between the inner side of the first elastic member 140 and the second triggering portion 132, and the outer peripheral side of the first elastic member 140 contacts the inner wall surface of the through hole 1111, so that the assembly of the first elastic member 140 is simplified, and the installation stability of the first elastic member 140 is improved. The embodiment of the application sets a space between the inner side of the first elastic member 140 and the second triggering portion 132, thereby avoiding the second triggering portion 132 from being damaged due to friction between the second triggering portion 132 and the first elastic member 140, and further improving the service life of the triggering member 130. Meanwhile, when the outer circumferential side of the first elastic member 140 is in contact with the inner wall surface of the through hole 1111 and the first elastic member 140 is compressed or rebounded and stretched, friction force is generated between the first elastic member 140 and the inner wall surface of the through hole 1111, and in the process that the first elastic member 140 stretches to push the first triggering portion 131 to move upwards, friction resistance of the inner wall of the through hole 1111 facing the first elastic member 140 can play a role in buffering, so that the phenomenon that the triggering portion 130 is separated from the first elastic member 140 due to the fact that the first triggering portion 131 is instantaneously pushed upwards by the first elastic member 140 is avoided. In addition, the through hole 1111 may restrict particulate matters such as dust generated by friction between the first elastic member 140 and the inner wall surface of the through hole 1111 within the fixed housing 111, thereby preventing the particulate matters such as dust generated when the wafer cassette inspection device 100 operates from diffusing to the outside to affect the operation environment of the wafer.

As shown in fig. 1, 2 and 3, and in combination with fig. 5, the embodiment of the present application further provides a handling robot 200, which includes a robot body and the wafer cassette inspection device 100 of any of the foregoing embodiments, where the robot body is provided with a material carrying platform 210 for carrying a material, and the fixing assembly 110 is provided on the material carrying platform 210, and is used for inspecting whether the material carrying platform 210 has placed a suitable wafer cassette.

It will be appreciated that the transfer robot 200 according to the embodiment of the present application is configured to mount the load-bearing material platform 210 by providing a robot body, and the wafer cassette inspection device 100 may be mounted on the load-bearing material platform 210 by the fixing assembly 110. In the wafer cassette inspection apparatus 100, the trigger member 130 is capable of compressing the first elastic member 140 and moving from the first position a to the second position b when an appropriate external force is applied by the material. Further, the detection element 120 is provided to detect whether the trigger 130 reaches the second position b, and it can be determined whether the trigger 130 is subjected to an appropriate external force applied by the material. Such as the pressure applied by the wafer cassette, so as to effectively avoid false triggering caused by the pressure applied by other objects (such as a temporarily placed box body, etc.) to the triggering member 130, thereby reducing the probability of false judgment caused by the detecting element 120. As another example, the pressure applied by the cassette containing the wafers, so that the sensing element 120 can determine that a wafer is placed on the cassette.

Referring to fig. 5, 8 and 10, in one embodiment, on the basis that the first position a and the second position b are unchanged, the first elastic members 140 with different specifications are properly selected according to the quality of the wafer cassette placed on the material carrying platform 210, or the second elastic members 150 are additionally arranged on the basis of the first elastic members 140, so as to meet different elastic requirements.

The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.

Claims (10)

1. The wafer box detection device is arranged on a material bearing platform of the transfer robot and is characterized by comprising a fixed assembly, a detection element, a trigger piece and a first elastic piece, wherein the fixed assembly is arranged on the material bearing platform, the detection element is arranged on the fixed assembly, and the trigger piece is movably arranged on the fixed assembly and at least partially protrudes out of the material bearing platform;

The first elastic piece is arranged between the trigger piece and the fixed component and respectively abuts against the trigger piece and the fixed component; the trigger piece is used for moving from a first position to a second position under the action of proper external force; the first elastic piece is used for pushing the trigger piece when the external force is lost, so that the trigger piece moves from the second position to the first position;

The detecting element is used for detecting whether the trigger piece moves to the second position or not so as to judge whether the trigger piece is subjected to proper external force exerted by the material or not.

2. The wafer cassette inspection apparatus of claim 1, wherein the trigger comprises a first trigger portion and a second trigger portion, the first trigger portion being movably coupled to the fixed assembly and partially protruding from the material loading platform;

The second trigger part is connected with the first trigger part and moves along with the first trigger part;

The first trigger part is used for pushing the second trigger part under the action of external force so as to enable one end of the second trigger part far away from the first trigger part to move from the first position to the second position;

The first elastic piece is arranged between the first triggering part and the fixed component and respectively abuts against the first triggering part and the fixed component;

The first elastic piece is used for pushing the first triggering part when the external force disappears so as to drive one end of the second triggering part far away from the first triggering part to move from the second position to the first position;

The detection element is used for detecting whether one end, far away from the first trigger part, of the second trigger part reaches the second position or not so as to judge whether the first trigger part is subjected to proper external force exerted by the materials or not.

3. The wafer cassette inspection apparatus according to claim 2, wherein the first elastic member is disposed around an outer peripheral side of the second triggering portion, and an inner peripheral side of the first elastic member is in contact with an outer wall surface of the second triggering portion.

4. The wafer cassette inspection device as claimed in claim 3, further comprising a second elastic member surrounding an outer peripheral side of said first elastic member, and an inner side of said second elastic member forming a space with said first elastic member;

And two ends of the second elastic piece are respectively propped against the first trigger part and the fixing assembly.

5. The wafer cassette inspection apparatus of claim 2, wherein the fixed assembly comprises a fixed housing and a mounting base, the trigger member is movably disposed in the fixed housing, the first elastic member is disposed in the fixed housing, and an end of the first elastic member away from the first trigger portion abuts against the fixed housing or the mounting base; the detection element is arranged on the mounting seat.

6. The wafer cassette inspection apparatus according to claim 5, wherein the fixed housing is provided with a through hole, and when no external force is applied, at least part of the first trigger part is disposed in the through hole and protrudes from one end of the through hole;

at least part of the second trigger part is arranged in the through hole.

7. The wafer cassette inspection apparatus according to claim 6, wherein the first elastic member is disposed around the second triggering portion, and a space is formed between an inner side of the first elastic member and the second triggering portion, and an outer peripheral side of the first elastic member is in contact with an inner wall surface of the through hole;

And/or the number of the groups of groups,

The through hole comprises a first hole section and a second hole section, the first hole section and the second hole section are sequentially communicated along the same axis,

The first elastic piece is arranged in the first hole section, and one end, away from the first triggering part, of the first elastic piece is propped against the step end face formed at the junction of the first hole section and the second hole section.

8. The wafer cassette inspection apparatus of claim 5, wherein the mounting base comprises a base body, the inspection element is disposed on the base body, and two protrusions are disposed on the base body in a protruding manner;

The second position is located in a space formed between the two protrusions and opposite to the detection element.

9. The wafer cassette inspection device of claim 8, wherein a line in which the first location and the second location are located is perpendicular to a line in which the center of the inspection element is located.

10. A transfer robot, comprising a robot body and a wafer cassette inspection device according to any one of claims 1-9, wherein the robot body is provided with a material carrying platform for carrying materials, and the fixing assembly is arranged on the material carrying platform for inspecting whether the material carrying platform is provided with a proper wafer cassette.