CN220956779U

CN220956779U - Sealing device

Info

Publication number: CN220956779U
Application number: CN202323003779.6U
Authority: CN
Inventors: 邓才智; 尉法兵; 张宁
Original assignee: Zhuzhou Sany Silicon Energy Technology Co ltd
Current assignee: Zhuzhou Sany Silicon Energy Technology Co ltd
Priority date: 2023-11-07
Filing date: 2023-11-07
Publication date: 2024-05-14
Anticipated expiration: 2033-11-07

Abstract

The utility model provides a sealing device which is used for sealing a through hole for a carrier plate to pass through on an end plate of a film plating box body. The sealing device comprises a sealing plate and a clamping assembly, wherein the sealing plate is arranged on one side of the end plate, and the clamping assembly is arranged on the other side of the end plate. The outer edge dimension of the sealing plate is larger than that of the through hole, so that the sealing plate can completely cover the through hole, and the through hole is sealed. The outer edge dimension of the sealing plate is smaller than that of the end plate, so that the volume of the sealing plate is reduced, and the processing difficulty is reduced. The connecting end of the clamping component passes through the through hole and then is connected with the sealing plate, the clamping component can drive the sealing plate to prop against the end plate, and one side of the sealing plate, which is close to the end plate, is in sealing contact with one side of the end plate, which is close to the sealing plate. According to the sealing device provided by the utility model, the effect that the sealing plate is tightly abutted against the end plate by the clamping assembly is realized by using the through hole, the volume of the sealing plate is reduced, and the processing difficulty is greatly reduced.

Description

Sealing device

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a sealing device.

Background

After PVD cavity machining polishing, vacuum leak detection is needed to detect the vacuum sealing effect of the cavity. Before vacuum leak detection, all the side open holes of the PVD coating equipment are required to be sealed.

The end plate of the box body of the film plating equipment is provided with a through hole for the carrier plate to pass through, and the periphery of the end surface of the end plate is provided with a threaded hole. In the related art, when sealing the via hole of the end plate, the sealing tool can cover the end plate generally, a through hole is formed in the position, corresponding to the threaded hole of the end plate, of the sealing tool, then a bolt is used for penetrating through the through hole and then is in threaded connection with the threaded hole in the end plate, and the effect of fastening the sealing tool on the end face of the end plate is achieved.

In order to ensure the sealing effect, the side surface of the sealing tool, which is close to the end plate, is required to have higher flatness and processing roughness, and as the threaded holes of the end plate are positioned at the periphery of the end plate, the sealing tool is huge in size, so that the processing difficulty and cost of the sealing tool are improved.

Disclosure of utility model

The utility model provides a sealing device, which is used for solving the defects that in the prior art, the sealing tool is huge in size and high in machining difficulty due to the fact that a sealing plate and a clamping assembly are installed by utilizing a through hole of an end plate, the effect of greatly reducing the size of the sealing plate is achieved, and the machining difficulty of the sealing plate is further reduced.

The present utility model provides a sealing device comprising:

a via hole for supplying the carrier plate to pass through on the end plate of closed coating film box includes:

The sealing plate is arranged on one side of the end plate, the outer edge size of the sealing plate is larger than that of the through hole, the outer edge size of the sealing plate is smaller than that of the end plate, and the sealing plate is in sealing contact with the end plate;

The clamping assemblies are arranged on the other side of the end plate, the connecting ends of the clamping assemblies penetrate through the through holes and then are connected with the sealing plate, and the clamping assemblies are used for driving the sealing plate to prop against the end plate.

According to the present utility model there is provided a sealing device, the clamping assembly comprising:

The connecting seat is arranged in a region corresponding to the sealing plate and the through hole, and can be inserted into the through hole;

a blocking member located on a side of the end plate remote from the sealing plate;

The fastener passes through the blocking piece and the through hole and is used for being detachably connected with the connecting seat, and the fastener is used for driving the blocking piece and the sealing plate to be clamped on two sides of the end plate.

According to the sealing device provided by the utility model, the blocking piece is a blocking plate, and the blocking plate is provided with a through hole for the fastener to pass through.

According to the sealing device provided by the utility model, the connecting seat is provided with the connecting hole, the connecting hole extends along the direction perpendicular to the sealing plate, and one end of the connecting hole far away from the sealing plate is opened;

The fastener is a quick locking pin, a locking part of the quick locking pin is used for penetrating through the through hole of the blocking plate and tensioning in the connecting hole of the connecting seat, and a pin head of the quick locking pin is used for limiting the blocking plate to move in a direction away from the sealing plate.

According to the sealing device provided by the utility model, the locking part of the quick locking pin comprises:

The inner part of the inserted link is provided with a jack, one end of the jack close to the pin head is opened, the outer side of the inserted link is provided with at least three tensioning holes, the axes of the tensioning holes are parallel to the radial direction of the inserted link, and the axes of the tensioning holes are positioned on the same plane;

the tensioning piece is slidably arranged in the tensioning hole;

The driving rod is inserted into the jack at one end and is located among the tensioning pieces, the other end of the driving rod is connected with the pin head, the outer side face of the driving rod is in threaded connection with the inner side face of the jack, the driving rod and at least one of the tensioning pieces are provided with driving faces, and the driving faces are used for converting axial movement of the driving rod into axial movement of the tensioning pieces.

According to the sealing device provided by the utility model, the threaded hole is formed in the connecting seat, the fastening piece is a bolt, and the threaded end of the bolt passes through the through hole of the blocking plate and is in threaded connection with the threaded hole in the connecting seat.

According to the sealing device provided by the utility model, the sealing plate is provided with the sealing groove at one side close to the end plate, the sealing groove surrounds the outer side of the through hole, and the sealing ring is arranged in the sealing groove.

According to the sealing device provided by the utility model, the sealing plate is provided with the step on one side close to the end plate, and the sealing groove is arranged on the step.

According to the sealing device provided by the utility model, the outer diameter of the connecting seat is smaller than or equal to the width of the through hole.

According to the sealing device provided by the utility model, the side, away from the end plate, of the sealing plate is also provided with a handle.

The sealing device is used for sealing the through holes on the end plate of the film plating box body for the carrier plate to pass through. The sealing device comprises a sealing plate and a clamping assembly, wherein the sealing plate is arranged on one side of the end plate, and the clamping assembly is arranged on the other side of the end plate. The outer edge dimension of the sealing plate is larger than that of the through hole, so that the sealing plate can completely cover the through hole, and the through hole is sealed. The outer edge dimension of the sealing plate is smaller than that of the end plate, so that the volume of the sealing plate is reduced, and the processing difficulty is reduced. The connecting ends of the clamping assemblies penetrate through the through holes and are connected with the sealing plate, the clamping assemblies can drive the sealing plate to be abutted against the end plate, and one side of the sealing plate, which is close to the end plate, is in sealing contact with one side of the end plate, which is close to the sealing plate. According to the sealing device provided by the utility model, the effect that the sealing plate is tightly abutted against the end plate by the clamping assembly is realized by using the through hole, the volume of the sealing plate is reduced, and the processing difficulty is greatly reduced.

Drawings

In order to more clearly illustrate the utility model or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of an end plate structure provided by the present utility model;

FIG. 2 is a front view of a seal provided by the present utility model;

FIG. 3 is a left side view of FIG. 2 provided by the present utility model;

FIG. 4 is a cross-sectional view of FIG. 3 provided by the present utility model;

FIG. 5 is a top view of FIG. 2 provided by the present utility model;

FIG. 6 is a schematic view of the internal structure of the quick lock pin provided by the present utility model;

Reference numerals:

100: a sealing plate; 110: sealing grooves; 120: a step; 200: an end plate; 210: a via hole; 310: a connecting seat; 320: a blocking plate; 330: a quick locking pin; 331: a rod; 332: a ball; 333: a driving rod; 334: a pin head; 400: a handle.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The sealing device of the present utility model is described below with reference to fig. 1-6.

Embodiments of the present utility model provide a sealing device for sealing a via 210 in an end plate 200 through which a carrier plate passes before vacuum leak detection is performed on a box of a plating apparatus.

The sealing device provided by the embodiment of the utility model comprises a sealing plate 100 and a clamping assembly, wherein the sealing plate 100 and the clamping assembly are respectively arranged at two sides of an end plate 200 of a film plating box body, the sealing plate 100 is connected with the clamping assembly through a through hole 210 on the end plate 200, and the clamping assembly is used for driving the sealing plate 100 to abut against the end plate 200, so that the sealing of the sealing plate 100 to the through hole 210 on the end plate 200 is realized.

In particular, the sealing plate 100 may be disposed outside the end plate 200, i.e., on the side remote from the cavity. Since the sealing plate 100 serves to close the via hole 210 of the end plate 200 through which the carrier plate passes, the outer edge size of the sealing plate 100 needs to be larger than the outer edge size of the via hole 210 so that the sealing plate 100 can entirely cover the via hole 210.

In the related art, since the sealing tool needs to be fixed by using the bolt holes at the edge of the end plate 200, the size of the sealing tool is at least equal to that of the end plate 200, resulting in a huge volume of the sealing tool. In addition, the side, close to the end plate 200, of the sealing tool needs to be in sealing contact with the end plate 200, and the machining precision requirement on the end face, close to the end plate 200, of the sealing tool is high, so that the machining difficulty of the sealing tool is greatly improved.

In the embodiment of the sealing device provided by the utility model, the clamping assembly is connected with the sealing plate 100 through the through hole 210, and the connection is not dependent on the bolt hole at the outer edge of the end plate 200, so the size of the sealing plate 100 can be reduced, as long as the sealing plate 100 can completely cover the through hole 210 and realize sealing connection.

Specifically, the clamping assembly may be disposed on the inner side of the end plate 200, i.e., on one side in the cavity, where the connection end of the clamping assembly may reach the outer side of the end plate 200 through the via hole 210, so as to connect the connection end of the clamping assembly with the sealing plate 100, and after connection, the clamping assembly may make the sealing plate 100 abut against the end plate 200, so as to finally realize sealing contact between the sealing plate 100 and the end plate 200.

According to the sealing device provided by the embodiment of the utility model, the through holes 210 on the end plate 200 of the coating equipment, through which the carrier plate passes, are used as channels, so that the connection between the clamping assembly and the sealing plate 100 is realized, and the connection of the sealing plate 100 is not dependent on the bolt holes on the end plate 200, therefore, the volume of the sealing plate 100 can be reduced as far as possible, and the sealing plate 100 can cover the through holes 210 and can realize sealing contact with the end plate 200. Thus, the processing area of the end plate 200 of the sealing plate 100 can be greatly reduced, and the processing difficulty of the sealing plate 100 is greatly reduced.

In some embodiments of the present utility model, the clamping assembly may include a connection seat 310, a blocking member, and a fastener.

The connection base 310 may have a cylindrical structure, one end of the connection base 310 is connected to a side of the sealing plate 100 near the end plate 200, and the connection base 310 is located in a region of the sealing plate 100 corresponding to the via hole 210. As such, the connection seat 310 may be inserted into the via 210 of the end plate 200 when the sealing plate 100 is sealingly connected with the end plate 200.

The barrier may be provided on the inner side of the end plate 200, i.e., the side of the end plate 200 remote from the sealing plate 100.

Fasteners may be inserted through the barriers and vias 210 and into the hollow interior of the connector block 310 to removably connect the connector block 310. During the insertion of the fastener into the connection socket 310, the fastener may drive the sealing plate 100 and the blocking member to clamp on both sides of the end plate 200, thereby achieving a sealing contact connection of the sealing plate 100 and the end plate 200.

In addition, the via hole 210 of the end plate 200 is generally a waist-shaped hole, and the extension length of the via hole 210 is long, so that at least two clamping assemblies are required to be disposed in the extension direction of the via hole 210. The provision of two clamping assemblies prevents the sealing plate 100 from rotating in a plane parallel to the end face of the end plate 200, and the provision of more than two clamping assemblies creates multiple fastening points that promote the sealing effect of the sealing plate 100.

In some embodiments of the present utility model, the blocking member may be a blocking plate 320, and a through hole through which the fastener passes is provided on the blocking plate 320. After the fasteners pass through the through holes and vias 210, and further connect with the connection seats 310, the fasteners may compress the barriers against the inside of the end plates 200.

For example, the blocking plate 320 may be a strip plate, the length of which needs to be greater than the width of the via 210. In use, the strip plate can be adjusted to a position where the length direction of the strip plate forms an angle with the extending direction of the via hole 210, and the blocking plate 320 can be prevented from directly passing through the via hole 210.

Alternatively, the blocking plate 320 may be a circular plate, and the outer diameter of the circular plate needs to be larger than the width of the via 210, so that the blocking plate 320 is prevented from directly passing through the via 210.

In some embodiments of the present utility model, the connection seat 310 may have a cylindrical structure, and the hollow portion thereof may have a connection hole with one end opened and one end closed, further, the connection seat 310 has one end opened away from the sealing plate 100, so that a fastener may be inserted into the connection hole, which may be a light hole.

The fastener may be a quick lock pin 330, the quick lock pin 330 including a locking portion and a pin head 334.

During connection, the locking portion of the quick locking pin 330 sequentially passes through the through hole of the blocking plate 320 and the through hole 210 of the end plate 200, and is finally inserted into the connection hole of the connection base 310, and is tightened in the connection hole to limit the axial movement of the quick locking pin 330.

In the process of inserting the quick locking pin 330 into the connecting hole, the sealing plate 100 and the blocking plate 320 are closely adhered and abutted against the two sides of the end plate 200, and when the connecting part of the quick locking pin 330 is expanded in the connecting hole, the fixing of the sealing plate 100 and the blocking plate 320 is realized, and the movement of the sealing plate 100 and the blocking plate 320 in the direction away from each other is limited.

Specifically, the locking portion of the quick lock pin 330 includes a plunger 331, a tension member, and a driving lever 333.

The insert rod 331 is used to pass through the through hole of the blocking plate 320 and the through hole 210 of the end plate 200 and then enter the connection hole of the connection socket 310. A receptacle is provided in the plunger 331 and is open at one end of the receptacle adjacent the pin head 334. The outer circumferential surface of the insert rod 331 is provided with a tension hole for communicating the inner side and the outer side of the insert hole. The axis of the tensioning hole is along the radial direction of the inserted link 331, and the axis of the tensioning hole is located on the same plane.

The tensioning members can be balls 332, the number of the balls 332 is the same as that of the tensioning holes, and the balls 332 and the tensioning holes are arranged in the jacks in one-to-one correspondence. The inner diameter of the tensioning hole is smaller than the outer diameter of the ball 332, so that the ball 332 can only be partially exposed through the tensioning hole, preventing rolling out of the ball 332 from the socket.

One end of the driving rod 333 is connected to the pin head 334, and the other end is used to penetrate into the jack. One end of the driving rod 333 extending into the jack may be a cone, and the end is located between the balls 332, when the driving rod 333 moves along the axial direction away from the pin head 334, the balls 332 are pressed to move towards the outside of the tensioning hole, and finally the balls 332 abut against the inner side surface of the connecting hole of the connecting seat 310, so as to achieve the locking effect of the quick locking pin 330.

The outer side surface of the driving rod 333 may be provided with an external thread, the inner side surface of the jack may be provided with an internal thread, the driving rod 333 is in threaded connection with the jack, and when the driving rod 333 can move to any position along the axial direction, the threads can limit the movement of the driving rod 333 along the axial direction.

In some embodiments of the present utility model, the connection base 310 may have a cylindrical structure, the hollow portion of the interior thereof may have a threaded hole, and the fastening member may have a bolt. During connection, bolts sequentially pass through the through holes of the blocking plate 320 and the through holes 210 of the end plate 200 and then enter the threaded holes of the connecting seat 310, and the sealing plate 100 and the blocking plate 320 can be clamped on two sides of the end plate 200 by tightening the bolts.

In some embodiments of the present utility model, a sealing groove 110 is provided at a side of the sealing plate 100 near the end plate 200, the sealing groove 110 is a closed annular groove, and the sealing groove 110 is provided around the outside of the hole 210. A seal ring is provided in the seal groove 110.

When the sealing plate 100 is pressed against the outside of the end plate 200, the sealing ring is pressed between the sealing groove 110 and the end plate 200, and sealing of the via hole 210 is achieved.

In some embodiments of the present utility model, a step 120 is provided at a side of the sealing plate 100 near the end plate 200, a coverage area of the step 120 is larger than a coverage area of the via 210, and a coverage area of the step 120 is smaller than an area of the sealing plate 100.

The side of the step 120 near the end plate 200 is a plane, and the seal groove 110 is provided on the side of the step 120 near the end plate 200. When the sealing plate 100 is processed, only the surface of the step close to the end plate 200 needs to be finished, so that the finishing area is greatly reduced, and the processing difficulty of the sealing plate 100 is further reduced.

In some embodiments of the present utility model, the outer diameter of the connection socket 310 may be less than or equal to the width of the via 210, so that the connection socket 310 may be conveniently inserted into the via 210 when the sealing plate 100 contacts the end plate 200.

In some embodiments of the present utility model, the side of the sealing plate 100 remote from the end plate 200 is provided with a handle 400. When the sealing plate 100 is mounted, an operator can adjust the position of the sealing plate 100 by means of the handle 400.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A sealing device for closing a via (210) in an end plate (200) of a plating tank for a carrier plate to pass through, comprising:

A sealing plate (100), the sealing plate (100) being configured to be disposed on one side of the end plate (200), an outer edge dimension of the sealing plate (100) being greater than an outer edge dimension of the via (210), and an outer edge dimension of the sealing plate (100) being less than an outer edge dimension of the end plate (200), the sealing plate (100) being in sealing contact with the end plate (200);

The clamping assemblies are arranged on the other side of the end plate (200), the connecting ends of the clamping assemblies penetrate through the through holes (210) and then are connected with the sealing plate (100), and the clamping assemblies are used for driving the sealing plate (100) to abut against the end plate (200).

2. The sealing device of claim 1, wherein the clamping assembly comprises:

A connection base (310), wherein the connection base (310) is arranged in a region of the sealing plate (100) corresponding to the via hole (210), and the connection base (310) can be inserted into the via hole (210);

A blocking member located on a side of the end plate (200) remote from the sealing plate (100);

and the fastener penetrates through the blocking piece and the through hole (210) and is used for being detachably connected with the connecting seat (310), and the fastener is used for driving the blocking piece and the sealing plate (100) to be clamped on two sides of the end plate (200).

3. A sealing arrangement according to claim 2, wherein the blocking member is a blocking plate (320), the blocking plate (320) being provided with a through hole for the fastener to pass through.

4. A sealing arrangement according to claim 3, characterized in that the connection seat (310) is provided with a connection hole extending in a direction perpendicular to the sealing plate (100) and which is open at an end remote from the sealing plate (100);

The fastener is a quick locking pin (330), a locking part of the quick locking pin (330) is used for penetrating through the through hole of the blocking plate (320) and tensioning in the connecting hole of the connecting seat (310), and a pin head (334) of the quick locking pin (330) is used for limiting the blocking plate (320) to move in a direction away from the sealing plate (100).

5. The sealing device according to claim 4, wherein the locking portion of the quick locking pin (330) comprises:

The plug rod (331), the inside of the plug rod (331) is provided with a jack, one end of the jack close to the pin head (334) is opened, the outside of the plug rod (331) is provided with at least three tensioning holes, the axes of the tensioning holes are parallel to the radial direction of the plug rod (331), and the axes of the tensioning holes are positioned on the same plane;

the tensioning piece is slidably arranged in the tensioning hole;

the driving rod (333), the one end of driving rod (333) inserts in the jack, and be located a plurality of between the tight piece that rises, the other end of driving rod (333) with pin head (334) are connected, the lateral surface of driving rod (333) with the medial surface threaded connection of jack, driving rod (333) with be provided with the driving surface on at least one of them that rises, the driving surface is used for with axial motion of driving rod (333) is converted into the axial motion that rises the tight piece.

6. A sealing arrangement according to claim 3, wherein the connection seat (310) is provided with a threaded hole, and the fastener is a bolt, and the threaded end of the bolt passes through the through hole of the blocking plate (320) and is then screwed with the threaded hole on the connection seat (310).

7. The sealing device according to claim 1, characterized in that a sealing groove (110) is arranged on one side of the sealing plate (100) close to the end plate (200), the sealing groove (110) surrounds the outer side of the through hole (210), and a sealing ring is arranged in the sealing groove (110).

8. The sealing arrangement according to claim 7, characterized in that the side of the sealing plate (100) adjacent to the end plate (200) is provided with a step (120), the sealing groove (110) being arranged on the step (120).

9. The sealing device of claim 2, wherein an outer diameter of the connection seat (310) is less than or equal to a width of the via (210).

10. The sealing device according to claim 1, characterized in that the side of the sealing plate (100) remote from the end plate (200) is further provided with a handle (400).