CN220952189U - Cooling device and single crystal furnace with same - Google Patents

Abstract

The utility model discloses a cooling device and a single crystal furnace with the same, wherein the cooling device comprises: the cooling device comprises a cooling main body, an annular pipe and a conveying pipe, wherein the cooling main body is annular, and a cooling flow passage is arranged in the cooling main body; the annular pipe is arranged at the top of the cooling main body, a plurality of guide holes are formed in the annular pipe, and the openings of the guide holes face the inside of the cooling main body; the conveying pipe is used for conveying gas, and is suitable for being connected with a gas source, and the conveying pipe is communicated with the annular pipe. Through setting up the inside transport air current of annular pipe to cooling body, form decurrent homogeneous air current in cooling body's inboard, form stable decurrent atmospheric pressure in the region on liquid level upper portion, form the suppression effect to the dust that causes the come-up and the granule that beats in the feeding process, improve the powder particle in the single crystal stick production process and float and the granule phenomenon of beating, reduce the quantity of granule bonding at cooling body's inner wall surface, reduce the pollution to cooling body's inner wall, the life of extension water-cooling screen.

Description

Cooling device and single crystal furnace with same

Technical Field

The utility model relates to the technical field of single crystal manufacturing, in particular to a cooling device and a single crystal furnace with the same.

Background

Monocrystalline silicon has wide market demands as a semiconductor material and is prepared by a common monocrystalline furnace. The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polysilicon. The water cooling screen is used as one of the important parts of the thermal field of the single crystal furnace, and is mainly used for adjusting the temperature gradient in the crystal pulling production process, and the heat conduction speed, namely the stability, of the water cooling screen directly influences important indexes such as the crystal pulling speed, the crystallization rate, the breakage rate and the like of the single crystal silicon rod.

In the working process of the single crystal furnace, along with the continuous lifting of the granular silicon feeding amount and feeding speed in the repeated feeding process, the problems of silicon powder floating, silicon jump and the like possibly caused in the feeding process are solved, the granular materials are adhered to the inner wall surface of the water cooling screen, the water cooling screen wall can be polluted, the service life of the water cooling screen is shortened, and the crystal pulling performance of a single crystal silicon rod is affected.

Disclosure of utility model

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present utility model is to provide a cooling device, which can improve the phenomena of silicon powder floating and silicon jumping in the single crystal production process, so that the crystal pulling process is stable, and the service life of a water cooling screen is prolonged.

Another object of the utility model is to propose a single crystal furnace.

According to an embodiment of the present utility model, a cooling apparatus includes: the annular cooling main body is internally provided with a cooling flow passage; the annular pipe is arranged at the top of the cooling main body, a plurality of guide holes are formed in the annular pipe, and the openings of the guide holes face the inside of the cooling main body; and the conveying pipe is used for conveying gas and is suitable for being connected with a gas source, and the conveying pipe is communicated with the annular pipe.

According to the cooling device provided by the embodiment of the utility model, the annular pipe is arranged to convey air flow into the cooling main body, downward uniform air flow is formed at the inner side of the cooling main body, stable downward air pressure is formed in the area at the upper part of the liquid level, and a pressing effect is formed on floating dust and jumping particles caused in the feeding process, so that the floating of the particles and the jumping of the particles in the production process of the single crystal rod are improved, the number of particles adhered to the surface of the inner wall of the cooling main body is reduced, the pollution to the inner wall of the cooling main body is reduced, and the service life of the water cooling screen is prolonged.

In some embodiments, the guide holes are configured to extend obliquely to guide air toward an inner wall of the cooling body.

In some embodiments, the included angle between the opening direction of the guide hole and the vertical direction is 10-15 degrees.

In some embodiments, the angle between the connecting lines between the adjacent two guide holes and the central point of the annular tube is 20-35 degrees.

In some embodiments, the guide holes have a diameter of 2mm to 5mm.

In some embodiments, the cooling device further comprises: the liquid inlet pipe and the liquid outlet pipe are respectively communicated with the cooling flow passage.

Optionally, the conveying pipe is at least partially arranged in the liquid inlet pipe and/or the liquid outlet pipe.

In some embodiments, the cooling device further comprises a connecting arm assembly connected to the cooling body, and the liquid inlet pipe, the liquid outlet pipe and the conveying pipe are respectively arranged in the connecting arm assembly.

Specifically, the connecting arm assembly comprises a first connecting arm and a second connecting arm which are arranged at intervals, the liquid inlet pipe is arranged in the first connecting arm, and the liquid outlet pipe is arranged in the second connecting arm; the delivery tube is at least partially disposed within the first connecting arm and/or within the second connecting arm.

The single crystal furnace provided by the embodiment of the utility model comprises the cooling device.

According to the single crystal furnace provided by the embodiment of the utility model, by arranging the cooling device, the phenomena of particle floating and particle jumping generated in the feeding process of the single crystal furnace are improved, and the working stability of the single crystal rod is higher.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

Fig. 1 is a schematic structural view of a cooling device according to a first partial embodiment of the present utility model;

FIG. 2 is a cross-sectional view according to the example shown in FIG. 1;

FIG. 3 is a top view of the example shown in FIG. 1;

fig. 4 is a schematic structural view of a cooling device according to a second partial embodiment of the present utility model;

FIG. 5 is a cross-sectional view according to the example shown in FIG. 4;

FIG. 6 is a top view of the example shown in FIG. 4;

Fig. 7 is a schematic structural view of a cooling device according to a third partial embodiment of the present utility model;

FIG. 8 is a cross-sectional view according to the example shown in FIG. 7;

Fig. 9 is a top view of the example shown in fig. 7.

Reference numerals:

a cooling device 100;

A cooling body 1; a vertical portion 11; an inclined portion 12;

An annular tube 2; a guide hole 20;

a conveying pipe 3;

a liquid inlet pipe 41; a liquid outlet pipe 42;

a first connecting arm 51; and a second connecting arm 52.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

A cooling device 100 according to an embodiment of the present utility model is described below with reference to fig. 1 to 9.

The cooling device 100 according to an embodiment of the present utility model includes: the cooling device comprises a cooling main body 1, an annular pipe 2 and a conveying pipe 3, wherein the cooling main body 1 is annular, and a cooling flow passage is formed in the cooling main body 1. The annular tube 2 is arranged at the top of the cooling body 1, and a plurality of guide holes 20 are formed in the annular tube 2, and the openings of the guide holes 20 face the inside of the cooling body 1. The delivery pipe 3 is used for delivering gas, one end of the delivery pipe 3 is suitable for being connected with a gas source, and the other end of the delivery pipe 3 is communicated with the annular pipe 2.

It is to be understood that the cooling apparatus 100 of the present utility model may be used in a single crystal furnace and that the cooling apparatus 100 may be used to regulate the temperature gradient during crystal pulling production. The following description will be made with reference to an example in which the cooling apparatus 100 is used in a single crystal furnace.

The single crystal furnace is in inert gas environment in operation, the conveying pipe 3 is suitable for conveying inert gas to the annular pipe 2, the annular pipe 2 is arranged at the top of the cooling main body 1, a plurality of guide holes 20 are formed in the annular pipe 2, and the guide holes 20 in the annular pipe 2 are formed towards the inside of the cooling main body 1. The air current flows out from the guiding hole 20, forms downward air current in the inboard of cooling main part 1, forms stable downward atmospheric pressure in the region of liquid level upper portion, forms the suppression effect to the dust that causes the come-up and the granule that beats in the charging process, improves the powder particle in the single crystal stick production process and floats and the granule phenomenon of beating, reduces the quantity that the granule bonds at cooling main part 1's inside wall surface, reduces the pollution to cooling main part 1's inside wall, prolongs the life of water-cooling screen. The compacting effect on dust and particles can also improve the feeding visual field and improve the working stability of feeding operation.

And the air flow can also blow the inner wall of the cooling main body 1, and the air flow can blow particles adhered on the inner wall of the cooling main body 1 into the liquid level below, so that the pollution to the water-cooling screen wall is reduced, and the service life of the water-cooling screen is prolonged. Particles adhered to the inner wall of the cooling main body 1 are blown into the liquid surface below, so that the particles can be prevented from falling on the single crystal rod, pollution is avoided, the crystal pulling process is stable, and the production quality of the single crystal rod is ensured.

The conveyer pipe 3 carries the air current to the annular pipe 2, a plurality of guiding holes 20 have been seted up on the annular pipe 2, compare in sharp pipeline, the air current flows out from the annular pipe 2 and can evenly cover on the inner wall of cooling main part 1, form decurrent even air current in the inboard of cooling main part 1, thereby form stable decurrent atmospheric pressure in the region on liquid level upper portion, the suppression effect to dust and granule is more even, and the air current blows evenly on the inner wall of cooling main part 1, avoid appearing only blowing a part of the inner wall of cooling main part 1 and the condition that does not cover other part appears, can promote the blowing effect of air current, the life of water-cooling screen is prolonged.

It can be understood that the single crystal furnace is in an inert gas environment during operation, and the inert gas is utilized to blow the side wall of the cooling main body 1, so that not only can the phenomena of particle floating and particle jumping in the single crystal rod production process be improved, but also the working environment of the single crystal furnace can be prevented from being damaged.

According to the cooling device 100 of the embodiment of the utility model, the annular pipe 2 is arranged to convey air flow into the cooling main body 1, downward uniform air flow is formed at the inner side of the cooling main body 1, stable downward air pressure is formed in the area above the liquid level, a pressing effect is formed on floating dust and jumping particles caused in the feeding process, floating of the powder particles and jumping of the particles in the production process of the single crystal rod are improved, the number of particles adhered to the inner wall surface of the cooling main body 1 is reduced, pollution to the inner wall of the cooling main body 1 is reduced, and the service life of the water cooling screen is prolonged.

In some embodiments of the present utility model, as shown in fig. 1, the cooling body 1 includes a vertical portion 11 and an inclined portion 12, the inclined portion 12 is connected below the vertical portion 11, and the annular tube 2 is disposed at the top end of the vertical portion 11, and as shown in fig. 3, the shape of the annular tube 2 is the same as the cross-sectional shape of the vertical portion 11.

The cross-sectional area of the inclined portion 12 gradually decreases in a direction from top to bottom, and the inclined portion 12 has a truncated cone shape. The water cooling screen may regulate the temperature gradient during crystal pulling, and in some embodiments of the utility model, a serpentine circulation channel is formed within the inclined portion 12.

In some embodiments of the utility model, the guide holes 20 are configured to extend obliquely to guide air towards the inner wall of the cooling body 1, and the air flow can blow particles adhered to the inner wall of the cooling body 1 into the liquid surface below, so that pollution to the water-cooling screen wall is reduced, and the service life of the water-cooling screen is prolonged.

In some embodiments of the present utility model, the opening direction of the guide hole 20 coincides with the extending direction of the inner wall of the inclined portion 12, the opening direction of the guide hole 20 on the annular tube 2 is such that a vertical line extending in the vertical direction is provided along the center of the guide hole 20, the vertical line intersects the inclined portion 12, and the angle between the opening direction of the guide hole 20 and the vertical line is the same as the angle between the vertical line and the inclined portion 12.

The blowing effect of air current to the inner wall of cooling body 1 is better, and the air current forms the even air current of following the inner wall of cooling body 1 after flowing out from guiding hole 20, and the air current flows out from annular pipe 2 and can even cover on the inner wall of cooling body 1, blows the granule that bonds on the inner wall of cooling body 1 to the below liquid level in, reduces the pollution to the water-cooling screen wall, prolongs the life of water-cooling screen.

And as shown in fig. 2, the inclined portion 12 is in a shape of a truncated cone, and the distance between the inner walls of the inclined portion 12 is gradually reduced in the direction from top to bottom, so that the extension lines of the opening directions of the plurality of guide holes 20 intersect, and the intersection point is located at the position above the liquid level, so that stable downward air pressure is formed in the area above the liquid level, the phenomena of powder particle floating and particle jumping in the production process of the single crystal rod can be improved, and the service life of the water cooling screen is prolonged.

In some embodiments of the present utility model, the angle between the extending direction of the inner wall of the inclined portion 12 and the vertical direction is 10 degrees to 15 degrees, and correspondingly, the angle between the opening direction of the guide hole 20 and the vertical direction is also 10 degrees to 15 degrees.

Since the opening direction of the guide hole 20 coincides with the extending direction of the inner wall of the inclined portion 12 in the up-down direction, when the angle between the extending direction of the inner wall of the inclined portion 12 and the vertical direction is 12 degrees, the angle between the opening direction of the guide hole 20 and the vertical direction is 12 degrees correspondingly.

In some other embodiments of the utility model, a guide tube is provided at the guide hole 20, the guide tube extending in the direction of the opening.

The air flow can be further guided by the guide pipe, compared with the air flow which directly flows out from the guide hole 20, the guide pipe has stronger guide effect on the air flow, and the air flow uniformly blows on the inner wall of the cooling main body 1 after flowing out along the guide pipe, so that particles adhered on the inner wall of the cooling main body 1 can be blown into the liquid level below, the pollution to the water-cooling screen wall is reduced, and the service life of the water-cooling screen is prolonged.

It will be appreciated that the length of the guide tube cannot be too long to avoid interference with the single crystal rod during its production.

A plurality of guide holes 20 are provided in the annular tube 2, and the guide holes 20 are arranged at intervals along the extending direction of the annular tube 2. In some embodiments of the present utility model, the distance between two adjacent guide holes 20 is such that the angle between the line connecting the two guide holes 20 and the center point of the annular tube 2 is 20-35 degrees.

In some embodiments of the present utility model, the plurality of guide holes 20 are uniformly distributed on the annular tube 2, the distances between the plurality of guide holes 20 are the same, and the included angles between the connecting lines between the two adjacent guide holes 20 and the central point of the annular tube 2 are also the same, so that the air flow flowing out of the plurality of guide holes 20 is uniformly covered on the inner wall of the cooling main body 1, the blowing effect of the air flow can be improved, the pressing effect on dust and particles is more uniform, and the service life of the water cooling screen is prolonged.

In other embodiments of the utility model, the plurality of pilot holes 20 are unevenly disposed on the annular tube 2. In the actual use process, due to equipment difference, working habit difference and the like, particles are more easily adhered to a certain specific part on the inner wall of the cooling main body 1, so that a plurality of guide holes 20 can be densely distributed in the area corresponding to the specific part on the annular pipe 2, the air flow can intensively blow the specific part on the inner wall of the cooling main body 1, and the working efficiency is improved.

In some embodiments of the present utility model, the center points of the plurality of guide holes 20 are located on the same circle such that the distances between the plurality of guide holes 20 and the inner wall in the vertical direction are the same.

In other embodiments of the present utility model, the center points of the plurality of pilot holes 20 are located on different circles.

Therefore, the arrangement positions and the number of the guide holes 20 may be selected according to actual needs.

In some embodiments of the utility model, the diameter of the annular tube 2 is 10mm-15mm.

In some embodiments of the present utility model, the guide hole 20 has a diameter of 2mm to 5mm.

In some embodiments of the present utility model, the plurality of guide holes 20 are the same size, and the plurality of guide holes 20 have uniform diameters.

In other embodiments of the present utility model, the plurality of guide holes 20 are different in size. The size of the guide hole 20 can be selected according to practical needs.

In some embodiments of the utility model, the delivery tube 3 is adapted to deliver argon to the annular tube 2, with one end of the delivery tube 3 being connected to a source of argon and the other end being in communication with the annular tube 2.

In some embodiments of the present utility model, the cooling device 100 is a water cooled screen.

In some embodiments of the present utility model, the cooling body 1 defines a cooling flow passage therein, and as shown in fig. 1 and 2, the cooling device 100 further includes: the liquid inlet pipe 41 and the liquid outlet pipe 42, and the liquid inlet pipe 41 and the liquid outlet pipe 42 are respectively communicated with the cooling flow channel. The cooling liquid flows from the liquid inlet pipe 41 into the cooling flow passage, the cooling main body 1 can adjust the temperature gradient in the crystal pulling production process, and then the cooling liquid subjected to heat exchange flows out from the liquid outlet pipe 42.

In some embodiments of the utility model, the delivery tube 3 is at least one. The conveyer pipe 3 carries gas to the annular pipe 2, and the air flow that the guiding hole 20 that is close to conveyer pipe 3 flows out is great, and the air flow that the guiding hole 20 that keeps away from conveyer pipe 3 flows out is less, consequently can make the air flow that a plurality of guiding holes 20 on the annular pipe 2 flow more even through setting up a plurality of conveyer pipes 3, can promote the blowing effect of air current, and is more even to the suppression effect of dust and granule, extension water-cooling screen's life.

In the embodiment of the first part of the utility model, as shown in fig. 1-3, the delivery tube 3 is arranged outside the inlet tube 41 and the outlet tube 42.

In the embodiment of the second part of the utility model, as shown in fig. 4-6, the transfer tube 3 is at least partially arranged in the inlet tube 41 and/or the outlet tube 42. It will be appreciated that the liquid inlet pipe 41 and the liquid outlet pipe 42 need to be in communication with the cooling liquid, while one end of the delivery pipe 3 is in communication with the argon source, and the other end of the delivery pipe 3 is in communication with the annular pipe 2, so that a part of the pipe body of the delivery pipe 3 may be disposed in the liquid inlet pipe 41 and/or the liquid outlet pipe 42, and the liquid inlet pipe 41 and/or the liquid outlet pipe 42 may play a role in limiting and protecting the delivery pipe 3.

Alternatively, the delivery tube 3 may be one, and the delivery tube 3 may be disposed in the liquid inlet tube 41 or in the liquid outlet tube 42. The number of the conveying pipes 3 may be two, wherein one conveying pipe 3 is arranged in the liquid inlet pipe 41, and the other conveying pipe 3 is arranged in the liquid outlet pipe 42.

In the third embodiment of the present utility model, as shown in fig. 7 to 9, the cooling device 100 further includes a connection arm assembly connected to the cooling body 1, and the liquid inlet pipe 41, the liquid outlet pipe 42 and the conveying pipe 3 are respectively disposed in the connection arm assembly, where the connection arm assembly performs a limiting and protecting function on the liquid inlet pipe 41, the liquid outlet pipe 42 and the conveying pipe 3.

In the embodiment of the third part of the utility model, the connecting arm assembly comprises a first connecting arm 51 and a second connecting arm 52 which are arranged at intervals, the liquid inlet pipe 41 is arranged in the first connecting arm 51, the liquid outlet pipe 42 is arranged in the second connecting arm 52, and the conveying pipe 3 is at least partially arranged in the first connecting arm 51 and/or in the second connecting arm 52.

Alternatively, the delivery tube 3 may be one, and the delivery tube 3 may be disposed in the first connecting arm 51 or in the second connecting arm 52. The number of the conveying pipes 3 may be two, wherein one conveying pipe 3 is arranged in the first connecting arm 51 and the other conveying pipe 3 is arranged in the second connecting arm 52.

In one embodiment of the third part of the present utility model, as shown in fig. 8, there are two delivery pipes 3, wherein one delivery pipe 3 and the liquid inlet pipe 41 are disposed together in the first connecting arm 51, and the other delivery pipe 3 and the liquid outlet pipe 42 are disposed together in the second connecting arm 52.

A single crystal furnace according to an embodiment of the present utility model includes the cooling apparatus 100 of any one of the above.

According to the single crystal furnace provided by the embodiment of the utility model, by arranging the cooling device 100, the phenomena of particle floating and particle jumping generated in the feeding process of the single crystal furnace are improved, and the working stability of the single crystal rod is higher.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the utility model, a "first feature" or "second feature" may include one or more of such features.

In the description of the present utility model, "plurality" means two or more.

Other configurations, such as water cooled screens and single crystal furnaces, according to embodiments of the present utility model are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A cooling device, comprising:

The annular cooling main body is internally provided with a cooling flow passage;

The annular pipe is arranged at the top of the cooling main body, a plurality of guide holes are formed in the annular pipe, and the openings of the guide holes face the inside of the cooling main body;

And one end of the conveying pipe is suitable for being connected with a gas source, and the other end of the conveying pipe is communicated with the annular pipe.

2. The cooling device of claim 1, wherein the guide hole is configured to extend obliquely to guide air toward an inner wall of the cooling body.

3. The cooling device according to claim 2, wherein an included angle between an opening direction of the guide hole and a vertical direction is 10 degrees to 15 degrees.

4. A cooling device according to claim 1, wherein the angle between the line connecting adjacent two of the guide holes and the center point of the annular tube is 20-35 degrees.

5. The cooling device according to claim 1, wherein the guide holes have a diameter of 2mm to 5mm.

6. The cooling device of claim 1, further comprising: the liquid inlet pipe and the liquid outlet pipe are respectively communicated with the cooling flow passage.

7. The cooling device according to claim 6, characterized in that the conveying pipe is at least partially arranged in the liquid inlet pipe and/or the liquid outlet pipe.

8. The cooling device of claim 6, further comprising a connecting arm assembly connected to the cooling body, wherein the liquid inlet tube, the liquid outlet tube, and the delivery tube are disposed within the connecting arm assembly, respectively.

9. The cooling device of claim 8, wherein the connecting arm assembly comprises a first connecting arm and a second connecting arm disposed at intervals, the liquid inlet tube being disposed within the first connecting arm, the liquid outlet tube being disposed within the second connecting arm; the delivery tube is at least partially disposed within the first connecting arm and/or within the second connecting arm.

10. A single crystal furnace comprising the cooling device according to any one of claims 1 to 9.