CN220943188U - Isostatic pressing mould device without elephant foot - Google Patents
Isostatic pressing mould device without elephant foot Download PDFInfo
- Publication number
- CN220943188U CN220943188U CN202322516272.4U CN202322516272U CN220943188U CN 220943188 U CN220943188 U CN 220943188U CN 202322516272 U CN202322516272 U CN 202322516272U CN 220943188 U CN220943188 U CN 220943188U
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- deformation
- rubber
- core rod
- metal core
- cavity
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- 238000000462 isostatic pressing Methods 0.000 title claims abstract description 26
- 241000406668 Loxodonta cyclotis Species 0.000 title claims abstract description 10
- 229920001971 elastomer Polymers 0.000 claims abstract description 100
- 239000005060 rubber Substances 0.000 claims abstract description 100
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000003292 glue Substances 0.000 claims description 17
- 239000004033 plastic Substances 0.000 claims description 16
- 229920003023 plastic Polymers 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 3
- -1 polyethylene Polymers 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 208000029277 split foot Diseases 0.000 claims 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 7
- 239000000843 powder Substances 0.000 description 17
- 239000007788 liquid Substances 0.000 description 13
- 239000013077 target material Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000013013 elastic material Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The utility model relates to a non-elephant foot isostatic pressing die device, which comprises a columnar metal core rod, a rubber sleeve sleeved on the metal core rod and rubber cover components sleeved on the metal core rod and closing two ends of a target tube cavity, wherein the rubber cover components comprise rubber covers and rubber ring pieces. A target tube cavity is formed between the rubber sleeve and the metal core rod, the rubber ring piece is sleeved on the metal core rod and located in the target tube cavity, the rubber ring piece is provided with a deformation cavity and a deformation area which elastically deforms towards the direction of the deformation cavity, the deformation area faces the target tube cavity, and the rubber cover is connected to one end of the metal core rod and is abutted to the rubber ring piece. In the isostatic pressing process of the rotary sputtering target blank, the deformation cavity can enable the axial pressure and the radial pressure of the end target in the die to be consistent with the pressure of other parts, so that the end effect is eliminated, and the generation of 'like feet' is avoided.
Description
Technical Field
The utility model relates to the technical field of sputtering target materials, in particular to an isostatic pressing die device without an elephant foot.
Background
The rotary sputtering target material is a circular tube-shaped vacuum coating material. At present, the common manufacturing process of the rotary sputtering target blank is an isostatic pressing process. The principle of the isostatic pressing process is that a die is immersed in liquid, the liquid is pressurized by a pressurizing system, the pressure can be uniformly transmitted to the surface of the die in all directions by a liquid medium, and after the powder in the die is subjected to uniform pressure, the intermolecular distance is shortened, so that the physicochemical property is changed. Most of the dies required for processing the rotary sputtering target blank are inner and outer concentric dies, and generally comprise an inner core, an outer rubber sleeve and an end cover, and the inner cavity of the die is in a circular tube shape. Filling the target powder into a mould, and filling the mould into an isostatic pressing machine for compression molding to obtain the rotary sputtering target blank.
However, the conventional processing technology produces end effects, so that the rotating sputtering target blank after isostatic pressing has a phenomenon that two end parts are thicker than a middle part, and the thick end parts are also called as 'elephant feet'. The specific reason for this end effect is that the isostatic pressing process in principle can transfer pressure isotropically through the liquid medium to the die, which cannot transfer pressure isotropically to the work piece in the die. The specific reason is that the parts of the mould for processing the rotary sputtering target blank, which are subjected to the pressure of the liquid medium, comprise an outer rubber sleeve and an end cover. The end covers are axially buckled at two ends of the outer rubber sleeve, and interference fit is adopted, namely the contact surfaces of the end covers and the outer rubber sleeve are tightly attached. When the end cover receives axial pressure of a liquid medium, the contact surface of the end cover and the outer rubber sleeve can generate reverse friction force, and a part of axial pressure can be counteracted, so that the axial pressure of end target powder received by the end cover is smaller than the radial pressure received by the outer rubber sleeve; on the other hand, the end cover is propped in the outer gum cover end, and when the outer gum cover receives radial pressure, the radial pressure at outer gum cover middle part is comparatively even, and outer gum cover end receives the holding power of end cover, and a part radial pressure is offset, and outer gum cover terminal deformation is limited to lead to the radial pressure that tip target powder received to be less than the radial pressure that middle part target powder received. It can be seen that the pressure to which the target powder is subjected at the end of the die is less than the pressure to which the target powder is subjected in the middle of the die, thereby producing an end effect.
The end effect not only can lead the two ends of the blank of the rotary sputtering target material to generate the image feet, thereby generating the problems of stress concentration, cracking and the like; and the density of the target material is inconsistent on the microcosmic scale, and the physicochemical properties of the target material are different. In the subsequent processing, the "elephant foot" needs to be cut off, which causes the technical problem of reduced yield, and therefore, improvement is needed.
Disclosure of utility model
In order to overcome the problems in the related art, the embodiment of the utility model provides an isostatic pressing die device without an elephant foot, which is used for solving the technical problem that an end effect is generated in the isostatic pressing process of a rotary sputtering target blank.
According to a first aspect of an embodiment of the present utility model, there is provided a non-elephant foot isostatic pressing mould device, comprising:
a columnar metal core rod;
the rubber sleeve is sleeved on the metal core rod, and a target tube cavity is formed between the rubber sleeve and the metal core rod;
The plastic cover assembly is respectively sleeved on the metal core rod and seals the two ends of the target tube cavity, the plastic cover assembly comprises a plastic cover and a plastic ring piece, the plastic ring piece is sleeved on the metal core rod and located in the target tube cavity, the plastic ring piece is provided with a deformation cavity and a deformation area which is elastically deformed towards the direction of the deformation cavity, the deformation area is towards the target tube cavity, and the plastic cover is connected to one end of the metal core rod and is abutted to the plastic ring piece.
In one embodiment, the deformation cavities are arranged in a plurality and are arranged at intervals around the center of the rubber ring piece.
In an embodiment, the rubber ring piece comprises an annular pipe body and a plurality of deformation holes distributed around the pipe body at intervals, the deformation holes are of blind hole structures, and the deformation areas are located at bottoms of the deformation holes.
In an embodiment, the deformation holes are distributed on the central lines of two or more concentric circles of the pipe body at intervals, and the deformation holes on the central lines of two adjacent concentric circles are distributed in a staggered manner.
In one embodiment, the ratio of the total area of the holes of the deformation holes to the section of the pipe body is set to be A, wherein A is more than or equal to 0.5 and less than or equal to 0.8.
In an embodiment, the rubber ring member is made of one material selected from silica gel, polyethylene and rubber.
In an embodiment, the glue cover assembly is symmetrically arranged.
In one embodiment, the peripheral wall of the grommet is provided with a conical surface.
In an embodiment, the rubber cover comprises a plug-in portion and a flange portion protruding out of the plug-in portion, the plug-in portion is sleeved on the metal core rod, and the rubber sleeve is abutted to the flange portion.
In an embodiment, the rubber sleeve comprises a rubber tube part and assembling parts positioned at two ends of the rubber tube part, a target tube cavity is formed between the rubber tube part and the metal core rod, and the rubber cover assembly is assembled on the assembling parts.
The technical scheme provided by the embodiment of the utility model can comprise the following beneficial effects: the rubber cover assembly comprises a rubber cover and a rubber ring piece, the rubber ring piece is located between the rubber cover and the target tube cavity, and the rubber ring piece is provided with a deformation cavity and a deformation area which elastically deforms towards the direction of the deformation cavity. In the isostatic pressing process, the rubber ring piece is subjected to radial pressure transmitted by the rubber tube and powder in the target cavity, the pressure in the deformation cavity is increased, the pressure is axially transmitted to the deformation area, the deformation quantity is absorbed by the rubber ring piece, and the thickness of the rotary sputtering target blank corresponding to the target tube cavity is kept balanced. Secondly, the rubber cover assembly is sleeved on the metal core rod and is positioned in the rubber sleeve, the rubber cover pushes the rubber ring piece to be abutted against powder in the tube target cavity, and all parts of the rubber sleeve can uniformly act on the tube target cavity with axial pressure. According to the technical scheme provided by the embodiment of the utility model, the axial pressure and the radial pressure of the end target in the tube target cavity are consistent with the pressure of other parts in the isostatic pressing process of the rotary sputtering target blank, so that the end effect is eliminated, and the generation of 'like feet' is avoided.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the utility model and together with the description, serve to explain the principles of the utility model.
Fig. 1 is an assembled cross-sectional schematic view showing a mold device in an initial state according to an exemplary embodiment.
Fig. 2 is a cross-sectional view of an adhesive ring member according to an exemplary embodiment.
FIG. 3 is a cross-sectional view of an adhesive ring member shown according to an exemplary embodiment.
FIG. 4 is a schematic illustration of an assembled cross-section after isostatic pressing of a foot-less isostatic pressing die arrangement, according to an exemplary embodiment.
In the drawing, a metal core rod 10; a gum cover 20; a target tube cavity 21; a hose portion 22; a fitting portion 23; a glue lid assembly 30; a glue cover 40; a flange portion 41; a plug-in portion 42; a glue loop 50; a deformation chamber 51; a deformation zone 52; a tube body 53; deformation holes 511.
Description of the embodiments
Wherein the drawings are for illustrative purposes only and are shown in schematic, non-physical, and not intended to be limiting of the present patent; for the purpose of better illustrating embodiments of the utility model, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the size of the actual product; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numbers in the drawings of embodiments of the utility model correspond to the same or similar components; in the description of the present utility model, it should be understood that, if the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, only for convenience in describing the present utility model and simplifying the description, rather than indicating or implying that the apparatus or elements being referred to must have a specific orientation, be constructed and operated in a specific orientation, so that the terms describing the positional relationships in the drawings are merely for exemplary illustration and should not be construed as limiting the present patent, and that the specific meaning of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances.
In the description of the present utility model, unless explicitly stated and limited otherwise, the term "coupled" or the like should be interpreted broadly, as it may be fixedly coupled, detachably coupled, or integrally formed, as indicating the relationship of components; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between the two parts or interaction relationship between the two parts. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1 to 4, the present utility model provides a non-split isostatic die apparatus comprising a cylindrical metal mandrel 10, a gum cover 20 and a gum cover assembly 30, the gum cover assembly 30 comprising a gum cover 40 and a gum ring member 50. The rubber cover assembly 30 is in clearance fit connection with the outer diameter of the metal core rod 10, and the rubber sleeve 20 is in tight fit connection with the rubber cover assembly 30.
The rubber sleeve 20 comprises a rubber tube portion 22 and assembling portions 23 positioned at two ends of the rubber tube portion 22, the rubber tube portion 22 is sleeved outside the metal core rod 10, and a target tube cavity 21 is formed between the rubber tube portion 22 and the metal core rod 10. The two glue cover assemblies 30 are respectively sleeved at two ends of the metal core rod 10 to seal the target tube cavity 21, and the sealed target tube cavity 21 is a molding cavity of the rotary sputtering target blank and is used for filling target powder.
The rubber cover assembly 30 comprises a rubber cover 40 and a rubber ring piece 50, a round hole is formed in the center of the rubber ring piece 50, and the rubber ring piece 50 is sleeved on the metal core rod 10 through the round hole. The glue cap 40 is connected to one end of the metal core rod 10 and abuts the glue ring 50 such that the glue ring 50 defines the end of the target tube cavity 21. The rubber ring member 50 and the rubber cover 40 are located at the assembling portion 23, wherein the rubber cover 40 and the rubber ring member 50 are abutted against the inner wall of the assembling portion 23, so that the pipe diameter of the assembling portion 23 is larger than that of the rubber pipe portion 22. Preferably, the glue cover 40 is sealingly connected to the inner wall of the fitting portion 23.
The rubber cover 40 includes a plug portion 42 and a flange portion 41 protruding from the plug portion 42, the plug portion 42 is sleeved on the metal core rod 10, and the rubber sleeve 20 abuts against the flange portion 41. The rubber ring 50 is provided with a plurality of deformation cavities 51 around the center at intervals, deformation areas 52 elastically deforming towards the deformation cavities 51, and the deformation areas 52 face the target tube cavity 21.
In this embodiment, the deformation cavity 51 of the glue ring 50 is specifically a deformation hole 511, and the deformation hole 511 has a blind hole structure and is distributed at intervals around the tube 53. The deformation region 52 is located at the thin-walled bottom of the deformation hole 511.
As shown in fig. 2, the ring member 50 can be regarded as a plurality of blind hole structures formed at intervals from the bottom, so as to realize the position and range control of the material reduction and deformation region 52. After the mold is assembled, the deformation area 52 faces the direction of the target tube cavity 21 and abuts against the target powder, and the glue cover 40 abuts against the opening end of the glue ring 50 and compresses the target powder. The glue cover 40 and the blind holes form a closed air chamber, i.e. a deformation chamber 51. After the isostatic pressing is started, the stress analysis of the rubber ring 50 shows that the external pressure of the rubber ring 50 is equal to the pressure of the isostatic pressing liquid medium, and the axial internal and external pressure of the deformation cavity 51 is equal to the pressure of the isostatic pressing liquid medium, namely the pressure in the deformation cavity 51 is also equal to the pressure of the isostatic pressing liquid medium. Since the pressure in the deformation cavity 51 is isotropic, the deformation region 52 at the bottom of the deformation hole 511 is equal in the axial direction to the inner and outer pressure cavities. It follows that the axial pressure to which the end of the target tube cavity 21 is subjected is equal to the pressure of the isostatic liquid medium, i.e. also equal to the radial pressure to which the target tube cavity 21 is subjected. It should be noted that the glue cover 40 and the blind hole form a closed air chamber, which is not a necessary condition for the deformation cavity 51 to work effectively. Even if the tightness of the glue cover 40 and the blind hole is not tight, the liquid permeates into the deformation cavity 51, and because the liquid pressure is isotropic, the axial pressure applied to the tail end of the target tube cavity 21 is equal to the pressure of the isostatic pressing liquid medium, namely, the radial pressure applied to the target tube cavity 21.
In order to transfer the pressure in the deformation cavity 51 to the target tube cavity 21 as much as possible, the deformation holes 511 are preferably densely arranged at the bottom of the glue ring 50 at positions corresponding to the target tube cavity 21, in this embodiment, the deformation holes 511 are distributed on the center lines of three concentric circles of the tube body 53 at intervals, and the deformation holes 511 on the center lines of two adjacent concentric circles are distributed in a staggered manner. The ratio of the total area of the holes of the deformation holes 511 to the cross section of the tube body 53 is preferably slightly larger than the ratio of the cross section of the target tube cavity 21 to the wrapping cross section of the rubber sleeve 20, but is not excessively large, otherwise, the tube body 53 is excessively weak in structure and may collapse irregularly after being pressed. Therefore, the ratio of the total area of the holes of the deformed hole 511 to the cross section of the tube 53 is preferably 0.5 or more and 0.8 or less.
On the other hand, after the isostatic pressing is started, the rubber sleeve 20 receives radial pressure and deforms by inward shrinkage, and the diameter of the rubber sleeve 20 becomes smaller after the pressure is applied. In order to ensure that the diameter of the rubber sleeve 20 at the end part of the target tube cavity 21 is contracted to the same degree, the bottom of the rubber ring piece 50 is compressed by the radial pressure of the rubber sleeve 20, and the contraction degree is consistent with the compression degree of target powder. The compression degree of the target powder can be measured by the ratio of the isostatic pressure to the deformation of the target powder, the elastic modulus of the rubber ring piece 50 is the same as the ratio, and the rubber ring piece 50 can be made of any elastic material such as silica gel, polyethylene, rubber and the like. By selecting an elastic material with proper elastic modulus, after the target tube cavity 21 receives isostatic pressure, the deformation of the tail end of the rubber sleeve 20 and the deformation of the rubber tube part 22 are consistent, and the radial pressure of the rubber sleeve 20 at each position are uniform, so that the radial pressure of the end target material powder is ensured to be equal to the radial pressure of the rubber tube part 22 target material powder, and the generation of 'like feet' is avoided.
After the rubber sleeve 20 is subjected to isostatic pressing, the pipe diameter of the rubber pipe part 22 is reduced, the tail end of the rubber sleeve 20 contacted with the end cover is supported by the end cover, and the pipe diameter of the tail end of the rubber sleeve 20 is kept unchanged. In order to ensure that the pipe diameter change from the tail end of the rubber sleeve 20 to the transition area of the rubber pipe portion 22 is regular and orderly after being pressed, the outer peripheral wall of the rubber ring piece 50 can be provided with a conical surface so as to avoid irregular collapse. Preferably, the bottom of the rubber ring 50 and the tube 53 are matched with elastic materials with different elastic moduli, the elastic modulus of the bottom material of the rubber ring 50 is smaller than that of the tube 53, the outer peripheral wall of the rubber ring 50 is deformed into a conical surface after being pressed, and the transition region of the rubber sleeve 20 which is the conical surface is supported from the inside.
Other embodiments of the utility model will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This utility model is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the utility model and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the utility model being indicated by the following claims.
It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.
Claims (10)
1. A non-elephant foot isostatic pressing die arrangement, comprising:
a columnar metal core rod;
the rubber sleeve is sleeved on the metal core rod, and a target tube cavity is formed between the rubber sleeve and the metal core rod;
The plastic cover assembly is respectively sleeved on the metal core rod and seals the two ends of the target tube cavity, the plastic cover assembly comprises a plastic cover and a plastic ring piece, the plastic ring piece is sleeved on the metal core rod and located in the target tube cavity, the plastic ring piece is provided with a deformation cavity and a deformation area which is elastically deformed towards the direction of the deformation cavity, the deformation area is towards the target tube cavity, and the plastic cover is connected to one end of the metal core rod and is abutted to the plastic ring piece.
2. The split foot isostatic mold arrangement as defined in claim 1, wherein said deformation cavities are provided in plurality and spaced around the center of said ring member.
3. The isopiestic mold device of claim 2, wherein the elastomeric ring member comprises an annular tubular body portion and a plurality of deformation holes spaced around the tubular body portion, the deformation holes being blind-hole in configuration, the deformation zone being located at the bottom of the deformation holes.
4. The isopiestic pressure die device without elephant foot according to claim 3, wherein a plurality of the deformation holes are distributed on the center line of two or more concentric circles of the tube body portion at intervals, and the deformation holes on the center lines of two adjacent concentric circles are distributed in a staggered manner.
5. A non-like foot isostatic pressing mould device as claimed in claim 3, wherein the ratio of the total area of the holes of the deformation holes to the section of the pipe body is set as a, wherein a is more than or equal to 0.5 and less than or equal to 0.8.
6. The isopiestic mold device of claim 1, wherein the grommet member is made of one of silicone, polyethylene, and rubber.
7. The isopiestic mold device of claim 1, wherein the cap assembly is symmetrically disposed.
8. The split foot isostatic mold arrangement as defined in claim 1, wherein the peripheral wall of the glue ring member is provided as a conical surface.
9. The isopiestic pressure die device of claim 1, wherein the rubber cap comprises a plug portion and a flange portion protruding from the plug portion, the plug portion is sleeved on the metal core rod, and the rubber sleeve abuts against the flange portion.
10. The isopiestic pressure die device of claim 1, wherein the rubber sleeve comprises a rubber tube portion, an assembly portion at each end of the rubber tube portion, a target tube cavity formed between the rubber tube portion and the metal mandrel, and the rubber cap assembly is assembled to the assembly portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322516272.4U CN220943188U (en) | 2023-09-15 | 2023-09-15 | Isostatic pressing mould device without elephant foot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322516272.4U CN220943188U (en) | 2023-09-15 | 2023-09-15 | Isostatic pressing mould device without elephant foot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220943188U true CN220943188U (en) | 2024-05-14 |
Family
ID=91009939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322516272.4U Active CN220943188U (en) | 2023-09-15 | 2023-09-15 | Isostatic pressing mould device without elephant foot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220943188U (en) |
-
2023
- 2023-09-15 CN CN202322516272.4U patent/CN220943188U/en active Active
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