CN220933260U - Objective lens switching device - Google Patents
Objective lens switching device Download PDFInfo
- Publication number
- CN220933260U CN220933260U CN202322776497.3U CN202322776497U CN220933260U CN 220933260 U CN220933260 U CN 220933260U CN 202322776497 U CN202322776497 U CN 202322776497U CN 220933260 U CN220933260 U CN 220933260U
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- China
- Prior art keywords
- objective lens
- objective
- driving module
- switching device
- lenses
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- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000013016 damping Methods 0.000 claims description 11
- 238000012544 monitoring process Methods 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
Abstract
The utility model provides an objective lens switching device, which belongs to the field of optical measurement of semiconductor wafers, and comprises a driving module, an objective lens moving part, a plurality of objective lenses with different parameters, an objective lens locking ring and a balance guide rail module; the plurality of objective lenses are connected to the objective lens moving part through the objective lens locking ring, and the objective lens moving part is arranged on the driving module; the plurality of objective lenses are driven by the driving module to move along with the objective lens moving piece to realize switching; according to the objective lens switching device, under the condition that single objective lens parameters or application ranges are not enhanced, the objective lens requirement range of wafer detection can be realized by switching objective lenses with different parameters, the cost is reduced, the two side ranges are improved, and the objective lens switching device is convenient to popularize and apply in the field of semiconductor wafer optical detection.
Description
Technical Field
The utility model belongs to the field of optical measurement of semiconductor wafers, and particularly relates to an objective lens switching device.
Background
In the wafer measurement process, the objective lens is nearest to the wafer to be measured, which is directly related to the imaging quality. However, in the conventional optical design, the single objective lens cannot meet the requirements of different scenes, such as different requirements of magnification, wave band, field of view, and the like. Therefore, in the nano-scale bright field inspection (BFI-Bright Field Inspection) of semiconductor wafers, a new objective lens solution needs to be developed to realize multi-scene application in face of different requirements.
Disclosure of utility model
In order to overcome the disadvantages of the prior art, an objective lens switching device according to the present utility model is provided, which solves the above-mentioned problems.
Design principle: the objective lenses with different requirement parameters are adopted, and the objective lenses are switched through the switching mechanism, so that the requirements of different objective lenses are met. The specific scheme is as follows.
An objective switching device comprises a driving module, an objective moving part, a plurality of objective lenses with different parameters and a plurality of objective lens locking rings; the objective lenses are connected to the objective lens moving part through an objective lens locking ring, and the objective lens moving part is arranged on the driving module; and the plurality of objective lenses are driven by the driving module to move along with the objective lens moving piece to realize switching.
Further, a displacement monitoring unit and a limiting damping unit are also arranged at the driving module; the displacement monitoring unit is fixedly arranged outside the movable part of the driving module and used for monitoring the displacement of the movable part in real time; the limiting damping unit is arranged on the movable part of the driving module and moves along with the movable part of the driving module and is used for limiting a damping stop at the end part of the movable part of the driving module.
Further, the objective moving part comprises a switching adapter plate and an objective mounting plate, a plurality of objective mounting holes which are arranged in a straight line are formed in the objective mounting plate, and a plurality of objective lenses with different parameters are mounted in the objective mounting holes through the objective locking ring.
Further, the objective lens switching device further comprises a balance guide rail module, the balance guide rail module comprises an auxiliary sliding rail, an auxiliary sliding block and a balance adapter, the auxiliary sliding rail is parallel to the linear arrangement direction of the objective lenses, and the auxiliary sliding block is connected to the objective lens moving piece through the balance adapter, so that the stability of the device is enhanced.
Compared with the prior art, the utility model has the beneficial effects that: according to the objective lens switching device, under the condition that single objective lens parameters or application ranges are not enhanced, the objective lens requirement range of wafer detection can be realized by switching objective lenses with different parameters, the cost is reduced, the two side ranges are improved, and the objective lens switching device is convenient to popularize and apply in the field of semiconductor wafer optical detection.
Drawings
FIG. 1 is a schematic diagram of an objective lens switching device according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of an objective lens mover;
FIG. 3 is a schematic view of an objective lens locking ring;
FIG. 4 is a schematic view of an objective lens switching device at another view angle;
FIG. 5 is a schematic diagram of another embodiment of an objective lens switching device;
fig. 6 is a plan view of the objective lens switching device.
In the figure:
10. An objective lens moving member; 11. switching the adapter plate; 12. an objective lens mounting plate; 13. an objective lens mounting hole;
20. an objective lens;
30. An objective lens locking ring;
40. a driving motor;
50. A screw rod transmission assembly;
60. a displacement monitoring unit; 61. a limit sensor; 62. a limiting piece;
70. A limit damping unit;
80. A balance guide rail module; 81. an auxiliary slide rail; 82. an auxiliary slide block; 83. a balance adapter; 84. guide rail limiting blocks.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
1-4, The apparatus includes a drive module, an objective mover 10, a plurality of objective lenses 20 of different parameters, and a plurality of objective lens locking rings 30.
Connection relation: a plurality of the objective lenses 20 are connected to the objective lens mover 10 through an objective lens locking ring 30, the objective lens mover 10 being disposed on the driving module; the plurality of objective lenses 20 are driven by the driving module to be switched along with the movement of the objective lens moving member 10.
Wherein, the driving module adopts a linear motor or an electric cylinder mechanism, and the objective lens moving part 10 is mounted on a movable part of the linear motor or the electric cylinder mechanism.
In a specific example, when a linear motor is used, the objective lens mover 10 is mounted on a mover of the linear motor and moves accordingly.
Alternatively, when an electric cylinder mechanism is employed, which includes a driving motor 40 and a screw driving assembly 50, the objective mover 10 is mounted on a slider of the screw driving assembly 50 and moves accordingly.
Alternatively, the drive servo may be selected according to the requirement of the precision level, and the objective lens moving member 10 is mounted on the movable adapter of the drive servo of the higher precision level and moves with it.
The objective moving member 10 comprises a switching adapter plate 11 and an objective mounting plate 12, wherein a plurality of objective mounting holes 13 which are arranged in a straight line are formed in the objective mounting plate 12, and a plurality of objective lenses 20 with different parameters are mounted in the objective mounting holes 13 through the objective locking ring 30.
Wherein, the driving module is also provided with a displacement monitoring unit 60 and a limit damping unit 70; the displacement monitoring unit 60 is fixedly arranged outside the movable part of the driving module and is used for monitoring the displacement of the movable part in real time; the limiting damping unit 70 is arranged on the movable part of the driving module and moves along with the movable part of the driving module, and is used for limiting a damping stop at the end part of the movable part of the driving module.
In a specific example, the displacement monitoring unit 60 employs a grating ruler, a displacement sensor, a photoelectric switch, a limit detector, etc. sensing or detecting unit, in the illustration, a limit detector is employed, which includes two limit sensors 61 and one limit plate 62 connected by sensor mounting sheet metal.
Further, referring to fig. 5 and 6, the objective lens switching device further includes a balance rail module 80, the balance rail module 80 includes an auxiliary slide rail 81, an auxiliary slider 82, and a balance adapter 83, the auxiliary slide rail 81 is parallel to the direction in which the plurality of objective lenses 20 are arranged in a straight line, and the auxiliary slider 82 is connected to the objective lens mover 10 through the balance adapter 83, thereby enhancing the stability of the device.
The balance rail module 80 further includes rail stoppers 84 disposed at both ends of the auxiliary rail 81. To achieve limited damping of its ends.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (6)
1. An objective lens switching device, characterized in that: the device comprises a driving module, an objective lens moving part (10), a plurality of objective lenses (20) with different parameters and a plurality of objective lens locking rings (30); a plurality of objective lenses (20) are connected to the objective lens moving member (10) through an objective lens locking ring (30), and the objective lens moving member (10) is arranged on the driving module; the plurality of objective lenses (20) are driven by the driving module to be switched along with the movement of the objective lens moving piece (10).
2. The objective lens switching device according to claim 1, wherein: the driving module adopts a linear motor or an electric cylinder mechanism, and the objective lens moving part (10) is mounted to a movable part of the linear motor or the electric cylinder mechanism.
3. The objective lens switching device according to claim 1 or 2, characterized in that: a displacement monitoring unit (60) and a limit damping unit (70) are also arranged at the driving module; the displacement monitoring unit (60) is fixedly arranged outside the movable part of the driving module and is used for monitoring the displacement of the movable part in real time; the limiting damping unit (70) is arranged on the movable part of the driving module and moves along with the movable part of the driving module and is used for limiting a damping stop at the end part of the movable part of the driving module.
4. An objective lens switching device according to claim 3, characterized in that:
The objective lens moving part (10) comprises a switching adapter plate (11) and an objective lens mounting plate (12), a plurality of objective lens mounting holes (13) which are arranged in a straight line are formed in the objective lens mounting plate (12), and a plurality of objective lenses (20) with different parameters are mounted in the objective lens mounting holes (13) through the objective lens locking ring (30).
5. An objective lens switching device according to claim 3, characterized in that:
The objective lens switching device further comprises a balance guide rail module (80), the balance guide rail module (80) comprises an auxiliary sliding rail (81), an auxiliary sliding block (82) and a balance adapter (83), the auxiliary sliding rail (81) is parallel to the linear arrangement direction of the objective lenses (20), and the auxiliary sliding block (82) is connected to the objective lens moving piece (10) through the balance adapter (83) so as to enhance the stability of the device.
6. The objective lens switching device according to claim 5, wherein:
The balance guide rail module (80) further comprises guide rail limiting blocks (84) arranged at two ends of the auxiliary sliding rail (81).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310612979.7A CN116609918A (en) | 2023-05-29 | 2023-05-29 | Objective lens switching device |
| CN2023106129797 | 2023-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220933260U true CN220933260U (en) | 2024-05-10 |
Family
ID=87676174
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310612979.7A Withdrawn CN116609918A (en) | 2023-05-29 | 2023-05-29 | Objective lens switching device |
| CN202322776497.3U Active CN220933260U (en) | 2023-05-29 | 2023-10-17 | Objective lens switching device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310612979.7A Withdrawn CN116609918A (en) | 2023-05-29 | 2023-05-29 | Objective lens switching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN116609918A (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010001604B4 (en) * | 2010-02-04 | 2022-09-08 | Carl Zeiss Microscopy Gmbh | Device for mounting optical microscope components |
| DE102018130629B3 (en) * | 2018-12-03 | 2020-04-23 | Carl Mahr Holding Gmbh | Lens holder and connection device for the interchangeable attachment of a lens |
| DE202020100602U1 (en) * | 2020-02-04 | 2020-05-07 | Global Boom International Limited | Rotary lens locking device |
| CN218767499U (en) * | 2022-10-31 | 2023-03-28 | 慕藤光(深圳)智能光学有限公司 | Objective lens switching device and optical device |
-
2023
- 2023-05-29 CN CN202310612979.7A patent/CN116609918A/en not_active Withdrawn
- 2023-10-17 CN CN202322776497.3U patent/CN220933260U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN116609918A (en) | 2023-08-18 |
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