CN220932831U - Multipurpose carrier for semiconductor element optical measuring instrument - Google Patents
Multipurpose carrier for semiconductor element optical measuring instrument Download PDFInfo
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- CN220932831U CN220932831U CN202322801003.2U CN202322801003U CN220932831U CN 220932831 U CN220932831 U CN 220932831U CN 202322801003 U CN202322801003 U CN 202322801003U CN 220932831 U CN220932831 U CN 220932831U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 42
- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 238000002955 isolation Methods 0.000 claims abstract description 25
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 4
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 239000000969 carrier Substances 0.000 abstract description 2
- 238000000605 extraction Methods 0.000 abstract description 2
- 238000007689 inspection Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model discloses a multipurpose carrier for an optical measuring instrument of a semiconductor element, and relates to the technical field of semiconductor carriers. The light-shielding frame is arranged on the top side of the base, a detection lens is arranged on the inner wall of the top side of the light-shielding frame, a light source is arranged on the top side of the base, and two fixing blocks are symmetrically arranged on the inner walls of the two sides of the light-shielding frame. According to the utility model, the semiconductor is in an environment isolated from the outside in the detection process by the arrangement of the light isolation frame and the extraction plate, so that the influence of outside light on the detection result is avoided, and the detection result is more accurate; meanwhile, the semiconductor to be detected is clamped and fixed through the fixing block and is matched with the arrangement of the telescopic rotating rod, so that the semiconductor can rotate along with the rotation of the telescopic rotating rod, the direction of the semiconductor in the vertical direction is regulated, and in addition, the direction of the semiconductor in the horizontal direction is regulated through the arrangement of the rotating disc, so that the semiconductor is thoroughly detected.
Description
Technical Field
The utility model relates to the technical field of semiconductor carriers, in particular to a multipurpose carrier for an optical measuring instrument of a semiconductor element.
Background
For advanced and high-performance wafer process technologies, efforts must be made to improve wafer yield and performance, and advanced process upgrades require rapid iterations of semiconductor inspection technologies, and the prior-stage quantity inspection equipment used for physical inspection is divided into two types of equipment according to different functions, namely measurement equipment and defect inspection equipment. The measuring equipment is mainly used for measuring indexes such as transparent film thickness, opaque film thickness, film stress, doping concentration, critical dimension, registration accuracy and the like. Wherein the defect detection type device is mainly used for detecting defects on the surface of a wafer, such as an optical microscope and a scanning electron microscope. A conventional multipurpose carrier (publication No. CN 214308887U) capable of optical measurement and inspection of semiconductor devices exposes at least the following defects in use:
1. in actual use, the semiconductor to be detected is usually irradiated by a light source, light passing through the semiconductor is sensed, and the internal condition of the semiconductor is judged by the photoelectric effect principle of the semiconductor;
2. in practical use, when the semiconductor is detected, the semiconductor block is often clamped and fixed, so that the semiconductor can only be detected in one direction at a time, and a worker can carry out more thorough detection only by manually adjusting the direction of the semiconductor, which is more troublesome, so that the multipurpose carrier of the semiconductor element optical measuring instrument is developed.
Disclosure of utility model
The utility model mainly aims to provide a multipurpose carrier for an optical measuring instrument of a semiconductor element, which can effectively solve the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
The utility model provides a semiconductor element optical measurement appearance multipurpose microscope carrier, includes the base, a light isolation frame is installed to the topside of base, a detection lens is installed to the topside inner wall of light isolation frame, the light source is installed to the topside of base, just the light source is corresponding with the detection lens, two fixed blocks are installed to the both sides inner wall symmetry of light isolation frame, and two the fixed block can stretch out and draw back in step, one of them the fixed block can rotate under the drive of rotation driving source, the both sides inner wall that light isolation frame and fixed block correspond is provided with a slide rail respectively, and two common sliding connection has a board of taking out between the slide rail, the topside of taking out the board rotates and is connected with a rolling disc, the rolling disc can rotate under the drive of adjustment direction driving source, just the board of taking out can slide under the drive of sliding driving source.
Preferably, the inner walls of the two sides corresponding to the light isolation frame and the fixed block are respectively fixedly connected with an outer sleeve, an inner slide rod is slidably connected between the inner walls of each outer sleeve, and one end of each inner slide rod is rotatably connected with the corresponding fixed block.
Preferably, one end of each inner slide bar, which is opposite to the corresponding fixed block, is fixedly connected with a spring, and each spring is connected with the corresponding inner wall of the light isolation frame.
Preferably, one of the inner slide bars is rotatably connected with a telescopic rotating rod between the inner walls, one end of the telescopic rotating rod is fixedly connected with a corresponding fixed block, and the other end of the telescopic rotating rod penetrates through the inner side of a corresponding spring and is fixedly connected with the output end of the rotation driving source.
Preferably, a light transmission opening is formed in the center of the top side of the drawing plate, two side pushing blocks are symmetrically and fixedly connected to the top end of one side of the drawing plate, the rotating disc is located in a space surrounded by the two side pushing blocks, pushing sloping surfaces are respectively formed at two ends of the two side pushing blocks, and the pushing sloping surfaces are matched with corresponding sides of the corresponding fixing blocks.
Preferably, the light source is a desk lamp body, a lens is arranged on the top side of the base, and the lens corresponds to the lamp body.
Compared with the prior art, the utility model has the following beneficial effects:
According to the utility model, the semiconductor is in an environment isolated from the outside in the detection process by the arrangement of the light isolation frame and the extraction plate, so that the influence of outside light on the detection result is avoided, and the detection result is more accurate;
Meanwhile, the semiconductor to be detected is clamped and fixed through the fixing block and is matched with the arrangement of the telescopic rotating rod, so that the semiconductor can rotate along with the rotation of the telescopic rotating rod, the direction of the semiconductor in the vertical direction is regulated, and in addition, the direction of the semiconductor in the horizontal direction is regulated through the arrangement of the rotating disc, so that the semiconductor is thoroughly detected.
Drawings
FIG. 1 is an isometric view of the present utility model;
FIG. 2 is a schematic view of a base structure of the present utility model;
FIG. 3 is a schematic view of a detection frame according to the present utility model;
FIG. 4 is a schematic view of a side clamping device according to the present utility model;
Fig. 5 is a schematic diagram of a drawer plate structure according to the present utility model.
In the figure: 101. a base; 102. a lens; 103. a lamp body; 201. a light-blocking frame; 202. a slide rail; 203. a rotating motor; 204. a fixed block; 205. an outer sleeve; 206. an inner slide bar; 207. a spring; 208. a telescopic rotating rod; 301. a baffle; 302. a rotating disc; 303. a side pushing block; 304. a light transmission port; 305. and (5) drawing the plate.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1-5, the present utility model provides a technical solution:
The utility model provides a semiconductor element optical measurement appearance multipurpose microscope carrier, including base 101, a light isolation frame 201 is installed to the topside of base 101, a detection lens is installed to the topside inner wall of light isolation frame 201, the light source is installed to the topside of base 101, and the light source is corresponding with the detection lens, two fixed blocks 204 are installed to the both sides inner wall symmetry of light isolation frame 201, and two fixed blocks 204 can synchronous flexible, one of them fixed block 204 can rotate under the drive of rotation drive source, the both sides inner wall that light isolation frame 201 and fixed block 204 correspond is provided with a slide rail 202 respectively, common sliding connection has a board 305 that takes out between the two slide rails 202, the topside rotation of board 305 is connected with a slice rolling disc 302, rolling disc 302 can rotate under the drive of transfer drive source, and board 305 can slide under the drive of slip drive source. In this embodiment, the rotation driving source is a rotation motor 203, and the rotation motor 203 is fixedly connected to the outer side of the light shielding frame 201.
The inner walls of the two sides corresponding to the light isolation frame 201 and the fixed block 204 are respectively fixedly connected with an outer sleeve 205, an inner slide rod 206 is slidably connected between the inner walls of each outer sleeve 205, and one end of each inner slide rod 206 is rotatably connected with the corresponding fixed block 204. One end of each inner slide bar 206, which is opposite to the corresponding fixed block 204, is fixedly connected with a spring 207, and each spring 207 is connected with the corresponding inner wall of the light isolation frame 201. One end of the telescopic rotating rod 208 is fixedly connected with the corresponding fixed block 204, and the other end of the telescopic rotating rod 208 penetrates through the inner side of the corresponding spring 207 and is fixedly connected with the output end of the rotation driving source. A light-transmitting opening 304 is formed in the center of the top side of the drawing plate 305, two side pushing blocks 303 are symmetrically and fixedly connected to the top end of one side of the drawing plate 305, the rotating disc 302 is located in a space surrounded by the two side pushing blocks 303, pushing sloping surfaces are respectively formed at two ends of the two side pushing blocks 303, and the pushing sloping surfaces are matched with corresponding sides of the corresponding fixed blocks 204. In this embodiment, two sides of the drawing board 305 are respectively provided with a baffle 301 for being connected with the light-isolating frame 201 to form a complete frame structure. The light source is a desk lamp body 103, and a lens 102 is arranged on the top side of the base 101, and the lens 102 corresponds to the lamp body 103. In this embodiment, the light isolation frame 201 can be lifted and lowered by the lifting driving source.
When the multipurpose carrier for the optical measuring instrument for the semiconductor element is used, the semiconductor to be detected is placed on the surface of the rotating disc 302 and is sent into the light isolation frame 201, the fixing blocks 204 in the light isolation frame 201 are pushed away to two sides along with the insertion of the side pushing blocks 303, the fixing blocks 204 rebound in opposite directions after passing over the side pushing blocks 303, the semiconductor blocks are clamped, the semiconductor blocks are fixed above the light transmitting holes 304 for detection, the clamped semiconductor blocks are driven to rotate through the rotation of the telescopic rotating rods 208, after the detection is completed, the pulling plates 305 are driven to slide outwards through the sliding driving source, the fixing blocks 204 are pushed away to two sides by the side pushing blocks 303, the semiconductor falls on the upper surface of the rotating disc 302, the semiconductor is enabled to rotate ninety times and then the pulling plates 305 are enabled to stretch into the light isolation frame 201 again by the rotation of the rotating disc 302, and the semiconductor is clamped again, and the second detection is carried out.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a semiconductor component optical measurement appearance multipurpose carrier, includes base (101), its characterized in that: a light isolation frame (201) is installed on the top side of a base (101), a detection lens is installed on the top side inner wall of the light isolation frame (201), a light source is installed on the top side of the base (101), the light source is corresponding to the detection lens, two fixing blocks (204) are symmetrically installed on the two side inner walls of the light isolation frame (201), the two fixing blocks (204) can stretch out and draw back synchronously, one fixing block (204) can rotate under the drive of a rotation driving source, one sliding rail (202) is respectively arranged on the two side inner walls corresponding to the light isolation frame (201) and the fixing block (204), a drawing plate (305) is connected between the two sliding rails (202) in a sliding mode, a rotating disc (302) is connected to the top side of the drawing plate (305) in a rotating mode, the rotating disc (302) can rotate under the drive of the direction-adjusting driving source, and the drawing plate (305) can slide under the drive of the sliding driving source.
2. The multipurpose carrier for optical measurement devices of claim 1, wherein: the light isolation frame is characterized in that two outer sleeves (205) are fixedly connected to the inner walls of two sides corresponding to the light isolation frame (201) and the fixed blocks (204) respectively, an inner slide rod (206) is slidably connected between the inner walls of each outer sleeve (205), and one end of each inner slide rod (206) is rotatably connected with the corresponding fixed block (204).
3. The multipurpose carrier for optical measurement devices of claim 2, wherein: one end of each inner sliding rod (206) opposite to the corresponding fixed block (204) is fixedly connected with a spring (207), and each spring (207) is connected with the corresponding inner wall of the light isolation frame (201).
4. A semiconductor component optical metrology tool multipurpose carrier according to claim 3, wherein: one of the inner slide bars (206) is rotatably connected with a telescopic rotating rod (208) between the inner walls, one end of the telescopic rotating rod (208) is fixedly connected with a corresponding fixed block (204), and the other end of the telescopic rotating rod (208) penetrates through the inner side of a corresponding spring (207) and is fixedly connected with the output end of the rotation driving source.
5. The multipurpose carrier for optical measurement devices of claim 1, wherein: a light transmission opening (304) is formed in the center of the top side of the drawing plate (305), two side pushing blocks (303) are symmetrically connected to the top end of one side of the drawing plate (305), the rotating disc (302) is located in a space surrounded by the two side pushing blocks (303), pushing sloping surfaces are respectively formed at the two ends of the two side pushing blocks (303), and the pushing sloping surfaces are matched with the corresponding sides of the corresponding fixed blocks (204).
6. The multipurpose carrier for optical measurement devices of claim 1, wherein: the light source is a desk lamp body (103), a lens (102) is arranged on the top side of the base (101), and the lens (102) corresponds to the lamp body (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322801003.2U CN220932831U (en) | 2023-10-19 | 2023-10-19 | Multipurpose carrier for semiconductor element optical measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322801003.2U CN220932831U (en) | 2023-10-19 | 2023-10-19 | Multipurpose carrier for semiconductor element optical measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220932831U true CN220932831U (en) | 2024-05-10 |
Family
ID=90934975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322801003.2U Active CN220932831U (en) | 2023-10-19 | 2023-10-19 | Multipurpose carrier for semiconductor element optical measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220932831U (en) |
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2023
- 2023-10-19 CN CN202322801003.2U patent/CN220932831U/en active Active
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