CN220927026U - Placing device for single crystal chuck and seed crystal - Google Patents
Placing device for single crystal chuck and seed crystal Download PDFInfo
- Publication number
- CN220927026U CN220927026U CN202322994963.5U CN202322994963U CN220927026U CN 220927026 U CN220927026 U CN 220927026U CN 202322994963 U CN202322994963 U CN 202322994963U CN 220927026 U CN220927026 U CN 220927026U
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- Prior art keywords
- push
- seed crystal
- chuck
- placement
- pull
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- 239000013078 crystal Substances 0.000 title claims abstract description 65
- 230000000149 penetrating effect Effects 0.000 claims abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 4
- 206010053615 Thermal burn Diseases 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a placing device for a single crystal chuck and seed crystals, which comprises a device body, wherein the device body consists of two vertical plates and a bottom plate, the two vertical plates are positioned above the bottom plate and are mutually symmetrical, a plurality of grooves are respectively arranged on the inner sides of the two vertical plates, the two adjacent grooves are symmetrical, the device body also comprises a push-pull plate provided with a plurality of placing holes, and two ends of the push-pull plate are placed between the two vertical plates through penetrating the grooves. The utility model avoids the complicated procedure of wrapping after the seed crystal is taken out, and realizes the common storage of the chuck and the seed crystal; the counting situation of seed crystals is convenient and quick, and the working efficiency is effectively improved; can effectively reduce the potential safety hazards of heavy hammer, seed crystal, scald and scratch.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon manufacture, in particular to a placing device for a monocrystalline chuck and seed crystals.
Background
The graphite chuck is equipment for installing seed crystals in a single crystal furnace, and is one of important parts for producing single crystal silicon. At present, no effective device is available in the market for placing the heavy hammer of the seed crystal and the graphite chuck. The graphite chuck and the seed crystal are taken out from the furnace, the temperature is high, the graphite chuck is not convenient to store, and the graphite chuck is easy to burn by people when being placed everywhere; the seed crystal is also required to be wrapped when being stored, so that scalding and scratch of personnel are easy to cause; meanwhile, when the seed crystal is taken, the service condition of the seed crystal cannot be counted efficiently, so that the counting is inconvenient.
Disclosure of utility model
The utility model aims to provide a placing device for a monocrystalline chuck and seed crystals, which is characterized in that through a device body arranged below a bottom plate and provided with universal wheels, grooves are arranged on the inner side of a vertical plate of the device body, adjacent grooves are mutually symmetrical, a push-pull plate with protrusions at two ends penetrates into the grooves, the protrusions are matched with a limiting groove to limit, a plurality of placing holes which are equal in transverse and longitudinal directions are arranged in the push-pull plate, and a plurality of cylinders for placing heavy weights are arranged above the bottom plate, so that the problems in the prior art are solved.
In order to solve the technical problems, the utility model adopts the following scheme:
The utility model provides a placer for single crystal chuck and seed crystal, includes the device body, and the device body comprises two risers and bottom plate, and two risers are located the top of bottom plate and mutual symmetry, set up a plurality of recesses respectively in the inboard of two risers, and two adjacent recesses symmetry still include the push-and-pull board that is equipped with a plurality of holes of placing, the both ends of push-and-pull board are arranged in between two risers through penetrating the recess.
Preferably, the top or the bottom of the groove extends upwards or downwards to form a limit groove, protrusions are arranged at two ends of the push-pull plate, the width of each protrusion is matched with the width of the corresponding limit groove, and the width of each limit groove is smaller than that of the corresponding groove.
Preferably, the gripping portion is provided in the plate surface of the push-pull plate remote from the protrusion.
Preferably, the inner diameter of the placement hole is matched with the outer diameter of the lower part of the seed crystal.
Preferably, the arrangement modes of the placement holes are respectively arranged transversely and longitudinally, and the number of the transverse placement holes is equal to that of the longitudinal placement holes and is a multiple of 5.
Preferably, a plurality of cylinders are arranged above the plate surface of the bottom plate, and the outer diameter of each cylinder is matched with the inner diameter of the heavy hammer.
Preferably, the distance between two adjacent push-pull plates is larger than 30cm.
Preferably, a plurality of universal wheels for movement are provided below the base plate.
Preferably, the device body and the push-pull plate are made of stainless steel.
The utility model has the beneficial effects that: according to the utility model, the plurality of grooves are formed in the two vertical plates of the device body, the push-pull plates with the same number of placing holes are transversely and longitudinally arranged and penetrate through the grooves, the protrusions at the two ends of the push-pull plates move in the limiting grooves, so that seed crystals are placed in the placing holes or heavy weights are placed above the cylinders, and the inner parts of the heavy weights surround the outer peripheral surfaces of the cylinders. The utility model can be provided with a multi-layer push-pull plate, avoids the complicated procedure of wrapping after the seed crystal is taken out, and can be provided with a graphite chuck at the lowest layer so as to realize the common storage of the chuck and the seed crystal; the counting situation of seed crystals is convenient and quick, and the working efficiency is effectively improved; can effectively reduce the potential safety hazards of heavy hammer, seed crystal, scald and scratch.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a front view of the present utility model;
FIG. 3 is a schematic view of a partially enlarged structure of the circled portion of FIG. 2 according to the present utility model;
Fig. 4 is a top view of the present utility model.
Reference numerals: 1-device body, 10-bottom plate, 101-cylinder, 11-riser, 110-recess, 1101-spacing groove, 12-universal wheel, 2-push-and-pull board, 20-arch, 21-gripping portion, 22-hole of placing, 3-seed crystal, 4-weight.
Detailed Description
The present utility model will be described in further detail with reference to examples and drawings, but embodiments of the present utility model are not limited thereto.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "configured," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Examples
The embodiment of the utility model relates to a placement device for a single crystal chuck and a seed crystal 3, which comprises a device body 1, wherein the device body 1 consists of two vertical plates 11 and a bottom plate 10, the two vertical plates 11 are positioned above the bottom plate 10 and are symmetrical to each other, a plurality of grooves 110 are respectively arranged on the inner sides of the two vertical plates 11, the two adjacent grooves 110 are symmetrical, the placement device also comprises a push-pull plate 2 provided with a plurality of placement holes 22, and two ends of the push-pull plate 2 are placed between the two vertical plates 11 by penetrating the grooves 110.
Specifically, as shown in fig. 1-4, two risers 11 of the device body 1 are fixed above two sides of the bottom plate 10, the two risers 11 are symmetrical to each other and simultaneously provided with a plurality of grooves 110 on the inner side surface of the two risers, two adjacent grooves 110 in the same riser 11 are symmetrical to each other, the push-pull plate 2 is placed in the groove 110 on the same horizontal line, and the seed crystal 3 is stored through the placement hole 22, so that the special storage of the seed crystal 3 is facilitated, and personnel scalding caused by everywhere storage is avoided.
Further, the top or bottom of the groove 110 extends upward or downward to form a limit groove 1101, two ends of the push-pull plate 2 are provided with protrusions 20, the width of the protrusions 20 is matched with the width of the limit groove 1101, and the width of the limit groove 1101 is smaller than the width of the groove 110.
Specifically, as shown in fig. 3, the protrusion 20 is used for limiting the entire push-pull plate 2 by penetrating into the limiting groove 1101, so as to avoid the seed crystal 3 from being damaged or polluted due to the offset in the process of placing the seed crystal 3, and the limiting grooves 1101 in the adjacent grooves 110 of the same riser 11 are symmetrical to each other.
Further, a grip portion 21 is provided in the plate surface of the push-pull plate 2 away from the projection 20. Specifically, the position of the holding portion 21 is a plate surface without the protrusions 20, the holding portion 21 is convenient for the hands of the workers to hold at the position, the pushing and pulling plate 2 is pushed and pulled back and forth, and the holding portion 21 adopts a block-shaped or handle-shaped structure or other structures, so that the workers can conveniently pull and pull the plate.
Further, the inner diameter of the placement hole 22 is adapted to the outer diameter of the lower portion of the seed crystal 3. Specifically, the seed crystal 3 has an upper edge and a lower edge, the outer diameter of the upper edge is larger than the outer diameter of the lower edge, the inner diameter of the placement hole 22 is placed in adaptation with the outer diameter of the lower edge of the seed crystal 3, and meanwhile, the overall thickness of the push-pull plate 2 is set according to actual storage requirements. A plurality of push-pull plates 2 can be arranged, so that the placement utilization rate of the seed crystal 3 in the push-pull plates 2 is improved.
Further, the arrangement modes of the placement holes 22 are respectively set in the transverse direction and the longitudinal direction, and the number of the transverse placement holes 22 is equal to the number of the longitudinal placement holes 22 and is a multiple of 5. Specifically, the plurality of placement holes 22 are arranged transversely and longitudinally, and the number of the transverse arrangement is the same as the number of the longitudinal arrangement and is a multiple of 5, so that the use condition of the seed crystal 3 can be counted efficiently and rapidly.
Further, a plurality of columns 101 are arranged above the plate surface of the bottom plate 10, and the outer diameter of each column 101 is matched with the inner diameter of the heavy hammer 4. Specifically, the heavy hammer 4 is placed above the cylinder 101, so that the phenomenon that the heavy hammer 4 rolls back and forth is avoided, and meanwhile, the heavy hammer is convenient to place and take.
Further, the distance between two adjacent push-pull plates 2 is larger than 30cm. Specifically, the whole length of a single seed crystal 3 is 25cm, the distance between two adjacent push-pull plates 2 is set to be more than 30cm, the seed crystal 3 is stored in the placing hole 22, and the seed crystal 3 cannot swing around after being placed, so that a plurality of seed crystals 3 are prevented from colliding.
Further, a plurality of universal wheels 12 for movement are provided below the base plate 10. The device body 1 and the push-pull plate 2 are made of stainless steel materials. Specifically, the universal wheel 12 is used for moving the whole device body 1 to the position where the seed crystal 3 needs to be placed, so that the worker is prevented from moving back and forth to place the seed crystal 3, and the working efficiency is improved. The device body 1 and the push-pull plate 2 are made of stainless steel materials, so that the service life of the whole device can be effectively prolonged, and the utilization rate of the device can be improved.
The working principle of the utility model is as follows: firstly, push-pull plates 2 with the same number of placing holes 22 in the transverse and longitudinal directions are penetrated into grooves 110 in vertical plates 11, hand grabbing and holding parts 21 penetrate, when the push-pull plates 2 are penetrated, protrusions 20 at two ends of the push-pull plates 2 move in limiting grooves 1101, and meanwhile, the push-pull plates 2 are limited to avoid left-right displacement in the grooves 110. Further, the seed crystal 3 is placed in the placement hole 22 or the weight 4 is placed above the cylinder 101, and the inside of the weight 4 is surrounded on the outer peripheral surface of the cylinder 101. The utility model can be provided with the multi-layer push-pull plate 2, so that the complicated procedure of wrapping the seed crystal 3 after being taken out is avoided, and the graphite chuck can be placed at the lowest layer, so that the chuck and the seed crystal 3 can be stored together; the seed crystal 3 can be stored without wrapping after being taken out, so that the use counting situation is convenient and quick, and the working efficiency is effectively improved; the potential safety hazards of the heavy hammer 4, the seed crystal 3 and the scald scratch can be effectively reduced.
The foregoing description of the preferred embodiment of the utility model is not intended to limit the utility model in any way, but rather to cover all modifications, equivalents, improvements and alternatives falling within the spirit and principles of the utility model.
Claims (9)
1. A placer for single crystal chuck and seed crystal, its characterized in that, including device body (1), device body (1) comprises two risers (11) and bottom plate (10), and two risers (11) are located the top of bottom plate (10) and mutual symmetry, set up a plurality of recess (110) respectively in the inboard of two risers (11), and two adjacent recess (110) symmetry still include push-and-pull board (2) that are equipped with a plurality of hole (22) of placing, the both ends of push-and-pull board (2) are arranged in between two risers (11) through penetrating recess (110).
2. The placement device for the single crystal chuck and the seed crystal according to claim 1, wherein the top or the bottom of the groove (110) extends upwards or downwards to form a limit groove (1101), protrusions (20) are arranged at two ends of the push-pull plate (2), the width of the protrusions (20) is matched with the width of the limit groove (1101), and the width of the limit groove (1101) is smaller than the width of the groove (110).
3. A placement device for monocrystalline chucks and seed crystals according to claim 2, characterized in that a grip (21) is provided in the plate surface of the push-pull plate (2) remote from the projections (20).
4. A placement device for a monocrystalline chuck and a seed crystal according to claim 2, characterized in, that the inner diameter of the placement hole (22) is adapted to the outer diameter of the lower part of the seed crystal (3).
5. The placement device for a single crystal chuck and seed crystal according to claim 2, wherein the placement holes (22) are arranged in a transverse direction and a longitudinal direction, and the number of the transverse placement holes (22) is equal to the number of the longitudinal placement holes (22) and is a multiple of 5.
6. A placement device for single crystal chucks and seed crystals according to claim 2, characterised in that a plurality of cylinders (101) are arranged above the plate surface of the base plate (10), the outer diameter of the cylinders (101) being adapted to the inner diameter of the weight (4).
7. A placement device for monocrystalline chucks and seed crystals according to claim 2, characterized in that the spacing between adjacent two push-pull plates (2) is more than 30cm.
8. A placement device for monocrystalline chucks and seed crystals according to claim 2, characterized in that a plurality of universal wheels (12) for movement are provided under the base plate (10).
9. A placement device for single crystal chucks and seed crystals according to claim 2, characterised in that the device body (1) and push-pull plate (2) are made of stainless steel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322994963.5U CN220927026U (en) | 2023-11-07 | 2023-11-07 | Placing device for single crystal chuck and seed crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322994963.5U CN220927026U (en) | 2023-11-07 | 2023-11-07 | Placing device for single crystal chuck and seed crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
CN220927026U true CN220927026U (en) | 2024-05-10 |
Family
ID=90939134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202322994963.5U Active CN220927026U (en) | 2023-11-07 | 2023-11-07 | Placing device for single crystal chuck and seed crystal |
Country Status (1)
Country | Link |
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CN (1) | CN220927026U (en) |
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2023
- 2023-11-07 CN CN202322994963.5U patent/CN220927026U/en active Active
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