CN220926932U - Gas spraying device used in vacuum cavity - Google Patents
Gas spraying device used in vacuum cavity Download PDFInfo
- Publication number
- CN220926932U CN220926932U CN202322539336.2U CN202322539336U CN220926932U CN 220926932 U CN220926932 U CN 220926932U CN 202322539336 U CN202322539336 U CN 202322539336U CN 220926932 U CN220926932 U CN 220926932U
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- guide
- sealing
- spraying
- seat
- spray
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- 238000005507 spraying Methods 0.000 title claims abstract description 52
- 238000007789 sealing Methods 0.000 claims abstract description 43
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 230000007704 transition Effects 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims description 21
- 239000007921 spray Substances 0.000 claims description 17
- 238000001914 filtration Methods 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 22
- 239000012495 reaction gas Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 3
- 235000017491 Bambusa tulda Nutrition 0.000 description 3
- 241001330002 Bambuseae Species 0.000 description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 239000011425 bamboo Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a gas spraying device for a vacuum cavity, which comprises a flow guide seat, wherein the top of the flow guide seat is provided with a sealing frame, a flow guide pipeline is arranged on the sealing frame, the bottom of the flow guide pipeline is provided with a filtering grating plate, the filtering grating plate is communicated with the flow guide seat, one end of the flow guide pipeline is hermetically provided with an air inlet pipe, a flow guide mechanism is arranged in the air inlet pipe, an air flow adjusting mechanism is arranged in the flow guide seat, the bottom of the flow guide seat is provided with a sealing flange seat, the sealing flange seat can be connected and sealed at an air inlet of the vacuum cavity, the bottom of the sealing flange seat is in threaded fit with a spraying plate, the top of the spraying plate is also provided with a transition cover, a week flow groove is arranged on the transition cover, one side of the flow guide pipeline is also provided with a detecting mechanism, and the detecting mechanism is fixed on the sealing frame.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a gas spraying device used in a vacuum cavity.
Background
Currently, atomic layer deposition technology is widely used in the fabrication of high-end micro-nano devices, and has become one of the core equipment in semiconductor fabrication. Batch ALD equipment is an important branch of ALD equipment, it is through letting in reaction gas to placing in the vacuum chamber of a plurality of wafers, carry out atomic layer deposition coating film technology simultaneously to multi-disc wafer, carry out continuous spraying operation, but current spraying equipment is simply offered and is sprayed the board, carry out the spraying of reaction gas, can't carry out stable control to the reaction gas of leading-in, the range of spraying appears easily to be little, the gas velocity of flow phenomenon too slow or too fast, can't carry out real-time supervision to the reaction gas of leading-in simultaneously, can't learn inside atmospheric pressure change, the extrusion damage that the reaction gas too much leads to inside wafer appears easily, the stability that leads to gas spraying is poor, the air current direction is disturbed, lead to actual deposition coating film effect not good, need spray many times, very consuming time consumptive material.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model provides a gas spraying device used in a vacuum cavity, which aims to solve the problems in the prior art.
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a gas spraying device for in vacuum cavity, includes the guide holder, the guide holder top is provided with the seal frame, install the water conservancy diversion pipeline on the seal frame, water conservancy diversion pipeline bottom is provided with the filtration grid board, filtration grid board intercommunication guide holder, water conservancy diversion pipeline one end sealing installation has the intake pipe, be provided with guiding mechanism in the intake pipe, be provided with air current adjustment mechanism in the guide holder, the guide holder bottom is provided with the seal flange seat, seal flange seat joinable seals at the vacuum cavity air inlet, seal flange seat bottom screw-thread fit has the spray plate top still is provided with the transition cover, be provided with a week's flow groove on the transition cover, water conservancy diversion pipeline one side still is provided with detection mechanism, detection mechanism fixes on the seal frame.
Preferably, the flow guiding mechanism comprises a positioner, the positioner is arranged in the air inlet pipe, a positioning bearing is arranged in the positioner, a turbine shaft is arranged in the positioning bearing, and the other end of the turbine shaft is arranged in the flow guiding pipeline.
Preferably, the air flow adjusting mechanism comprises an electric cylinder, the electric cylinder is symmetrically arranged in a flow guide seat, a flow guide opening is arranged in the center of the flow guide seat, a symmetrical sealing plate is arranged in the flow guide opening, the sealing plate is in sliding fit in the flow guide seat, one end of the sealing plate is connected with one end of the electric cylinder through a sliding block, and the sealing plate is driven to horizontally move through the electric cylinder.
Preferably, a sealing groove is arranged at the bottom of the sealing flange seat, a sealing ring is arranged in the sealing groove, and the sealing is tightly pressed and sealed through a spraying plate.
Preferably, the outer circumferential surface of the spraying plate is provided with clamping grooves, and the clamping grooves are distributed in a circumferential array.
Preferably, the top of the spraying plate is provided with a plurality of airflow loops, the airflow loops are distributed from outside to inside at equal intervals, a plurality of spraying ports are arranged between each airflow loop, the spraying ports are circumferentially distributed, a first spraying cylinder is arranged in each spraying port, a second spraying cylinder is further arranged in the center of the spraying plate, and the bottoms of the first spraying cylinder and the second spraying cylinder are honeycomb meshes.
Preferably, the detection mechanism comprises a detection cylinder, one end of the detection cylinder is communicated with the diversion pipeline, the other end of the detection cylinder is provided with a pressure gauge, and the pressure gauge is used for detecting the internal air pressure.
The utility model provides a gas spraying device for a vacuum cavity, which has the following beneficial effects:
This a gas spraying device for in vacuum cavity, through the setting of turbine axle, can stabilize quick direction promotion to reaction gas, and utilize the detection section of thick bamboo of water conservancy diversion pipeline one end and manometer to detect the inside pressure of water conservancy diversion pipeline, utilize the electronic jar of setting to drive the closing plate and carry out relative or opposite movement, thereby adjust the air current and get into the bore, increase or slow down the velocity of flow, adjust according to actual conditions, the easy operation is convenient, whole can direct mount in vacuum cavity air inlet department, it is more convenient to install, can carry out the transition direction to reaction gas through the transition cover, the later stage of being convenient for spray the operation, through setting up the air current ring road on spray the board, can stabilize accurate direction to reaction gas, and realize the inside all-round spraying of vacuum cavity under the effect of first section of thick bamboo and second section of thick bamboo, guarantee to wait to coat the spraying stability of piece.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a front view of the present utility model;
FIG. 3 is a top view of the present utility model;
FIG. 4 is an enlarged view of a portion of FIG. 3 in accordance with the present utility model;
FIG. 5 is a cross-sectional view of FIG. 2 in accordance with the present utility model;
Fig. 6 is an overall half cross-sectional view of the present utility model.
In the figure: 1. a diversion seat; 2. a sealing frame; 3. a diversion pipeline; 301. a filter grating plate; 4. an air inlet pipe; 5. a positioner; 501. positioning a bearing; 6. a detection cylinder; 7. a pressure gauge; 8. sealing the flange seat; 801. a seal ring; 9. a spray plate; 901. a first spray cylinder; 902. a second spray cylinder; 903. an airflow loop; 904. a clamping groove; 10. an electric cylinder; 11. a sealing plate; 111. a slide block; 12. a transition cover; 121. a flow channel; 13. a turbine shaft.
Detailed Description
Embodiments of the present utility model are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the utility model but are not intended to limit the scope of the utility model.
In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the utility model. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1 to 6, the present utility model provides a technical solution: the utility model provides a gas spraying device for in vacuum cavity, including guide holder 1, guide holder 1 top is provided with seal frame 2, install guide pipeline 3 on the seal frame 2, guide pipeline 3 bottom is provided with the filtration grid board 301, the filtration grid board 301 intercommunication guide holder 1, guide pipeline 3 one end seals and installs intake pipe 4, carry out the input of reaction gas through intake pipe 4, be provided with guiding mechanism in the intake pipe 4, guiding mechanism is including locator 5, locator 5 installs in intake pipe 4, be provided with locating bearing 501 in the locator 5, install turbine shaft 13 in the locating bearing 501, the turbine shaft 13 other end is installed in guide pipeline 3, after the gas lets in, turbine shaft 13 rotates and can realize quick boosting, improve the velocity of flow, be provided with air flow adjustment mechanism in the guide holder 1, air flow adjustment mechanism can carry out the control of air current, realize can be fast slow, follow-up spraying operation of being convenient for.
The air flow regulating mechanism comprises an electric cylinder 10, the electric cylinder 10 is symmetrically arranged in a guide seat 1, a guide opening is arranged in the center of the guide seat 1, a symmetrical sealing plate 11 is arranged in the guide opening, the sealing plate 11 is in sliding fit in the guide seat 1, one end of the sealing plate 11 is connected with one end of the electric cylinder 10 through a sliding block 111, the electric cylinder 10 drives the sealing plate 11 to horizontally move, so that the flow caliber is changed, the air flow rate is influenced, a sealing flange seat 8 is arranged at the bottom of the guide seat 1, the sealing flange seat 8 can be connected and sealed at an air inlet of a vacuum cavity, so that air is blown into the air, a spraying plate 9 is in threaded fit with the bottom of the sealing flange seat 8, a sealing groove 801 is arranged in the sealing groove, the sealing groove is assembled with the sealing ring 801, the outer circumferential surface of the spraying plate 9 is tightly sealed by pressing, clamping grooves 904 are distributed in a circumferential array, and the spraying plate 9 can be conveniently disassembled and assembled by the slotting.
As shown in fig. 6, the top of the spraying plate 9 is provided with a plurality of airflow loops 903, the plurality of airflow loops 903 are distributed from outside to inside at equal intervals, a plurality of spraying ports are arranged between each airflow loop 903, the plurality of spraying ports are distributed circumferentially, a first spraying cylinder 901 is installed in each spraying port, the center of the spraying plate 9 is also provided with a second spraying cylinder 902, the bottoms of the first spraying cylinder 901 and the second spraying cylinder 902 are both honeycomb meshes, so that spraying gas is further diffused, the top of the spraying plate 9 is also provided with a transition cover 12, a week of flow groove 121 is arranged on the transition cover 12, gas is diffused through the flow groove 121, later spraying operation is facilitated, one side of the guide pipeline 3 is also provided with a detection mechanism, the detection mechanism is fixed on the sealing frame 2, the detection mechanism comprises a detection cylinder 6, one end of the detection cylinder 6 is communicated with the guide pipeline 3, the other end of the detection cylinder 6 is provided with a pressure gauge 7, the internal gas pressure is detected through the pressure gauge 7, and the gas size is convenient to adjust.
Specific use and action of the embodiment: the reaction gas is introduced from the gas inlet pipe 4, the gas flow drives the turbine shaft 13 to rotate, the reaction gas is rapidly guided to the guide seat 1 below, the pressure gauge 7 on one side of the guide pipeline 3 is used for detection and observation, if the pressure is smaller than a preset value, the electric cylinder 10 is used for driving the sealing plate 11 to close up, so that the caliber is reduced, the gas flow is accelerated, the pressure begins to become larger, otherwise, the sealing plate 11 is flared, the gas flow speed is slow, the gas flow can be flexible and changeable, the gas flows to the transition cover 12 through the guide seat 1, the transition guiding of the gas is carried out, the dispersed flow is carried out, and finally, the reaction gas is sprayed out from the first spraying cylinder 901 and the second spraying cylinder 902 through the gas flow loop 903 on the spraying plate 9, so that the to-be-coated piece in the vacuum cavity is rapidly and stably sprayed.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (7)
1. A gas spraying device for in vacuum cavity, its characterized in that: including guide holder (1), guide holder (1) top is provided with seal frame (2), install guide pipeline (3) on seal frame (2), guide pipeline (3) bottom is provided with and filters grid board (301), filter grid board (301) intercommunication guide holder (1), guide pipeline (3) one end sealing arrangement has intake pipe (4), be provided with guiding mechanism in intake pipe (4), be provided with air current adjustment mechanism in guide holder (1), guide holder (1) bottom is provided with seal flange seat (8), seal flange seat (8) joinable seal is at vacuum cavity air inlet, seal flange seat (8) bottom screw-thread fit has spray board (9) the spray board (9) top still is provided with transition cover (12), be provided with flow groove (121) a week on transition cover (12), guide pipeline (3) one side still is provided with detection mechanism, detection mechanism fixes on seal frame (2).
2. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the flow guiding mechanism comprises a positioner (5), the positioner (5) is installed in the air inlet pipe (4), a positioning bearing (501) is arranged in the positioner (5), a turbine shaft (13) is installed in the positioning bearing (501), and the other end of the turbine shaft (13) is installed in the flow guiding pipeline (3).
3. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the air flow adjusting mechanism comprises an electric cylinder (10), the electric cylinder (10) is symmetrically arranged in a guide seat (1), a guide opening is formed in the center of the guide seat (1), a symmetrical sealing plate (11) is arranged in the guide opening, the sealing plate (11) is in sliding fit in the guide seat (1), one end of the sealing plate (11) is connected with one end of the electric cylinder (10) through a sliding block (111), and the sealing plate (11) is driven to horizontally move through the electric cylinder (10).
4. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the bottom of the sealing flange seat (8) is provided with a sealing groove, a sealing ring (801) is arranged in the sealing groove, and the sealing groove is tightly pressed and sealed through a spraying plate (9).
5. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the outer circumferential surface of the spraying plate (9) is provided with clamping grooves (904), and the clamping grooves (904) are distributed in a circumferential array.
6. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the utility model discloses a honeycomb mesh structure, including spraying board (9), a plurality of air current loops (903) are provided with a plurality of air current loops (903) from outside to inside equidistance distribution, be provided with a plurality of mouths that spray between every air current loops (903), a plurality of mouths that spray are circumference and distribute, install first spray tube (901) in a plurality of mouths that spray, spray board (9) center still is provided with second spray tube (902), first spray tube (901) are honeycomb mesh with second spray tube (902) bottom.
7. A gas shower apparatus for use in a vacuum chamber as defined in claim 1, wherein: the detection mechanism comprises a detection cylinder (6), one end of the detection cylinder (6) is communicated with the guide pipeline (3), the other end of the detection cylinder (6) is provided with a pressure gauge (7), and the pressure gauge (7) is used for detecting the internal air pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322539336.2U CN220926932U (en) | 2023-09-18 | 2023-09-18 | Gas spraying device used in vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322539336.2U CN220926932U (en) | 2023-09-18 | 2023-09-18 | Gas spraying device used in vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220926932U true CN220926932U (en) | 2024-05-10 |
Family
ID=90969162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322539336.2U Active CN220926932U (en) | 2023-09-18 | 2023-09-18 | Gas spraying device used in vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220926932U (en) |
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2023
- 2023-09-18 CN CN202322539336.2U patent/CN220926932U/en active Active
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