CN220925545U - Vacuum seal rotary lifting transmission device - Google Patents
Vacuum seal rotary lifting transmission device Download PDFInfo
- Publication number
- CN220925545U CN220925545U CN202322822401.2U CN202322822401U CN220925545U CN 220925545 U CN220925545 U CN 220925545U CN 202322822401 U CN202322822401 U CN 202322822401U CN 220925545 U CN220925545 U CN 220925545U
- Authority
- CN
- China
- Prior art keywords
- lifting
- plate
- cavity bottom
- transmission
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 41
- 238000007789 sealing Methods 0.000 claims abstract description 19
- 230000007704 transition Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 25
- 238000007599 discharging Methods 0.000 claims description 17
- 230000001360 synchronised effect Effects 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 11
- 238000007664 blowing Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000017105 transposition Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a vacuum sealing rotary lifting transmission device, which comprises a cavity bottom plate, wherein a transmission cavity is arranged in the upper space of the cavity bottom plate, a transition cavity is arranged in the lower space of the cavity bottom plate, a bracket is fixed on the upper surface of the cavity bottom plate through a screw, a lifting plate and a lifting structure for driving the lifting plate to lift are arranged on one side of the bracket, and a sliding rod penetrates through the middle of the lifting plate; according to the utility model, by arranging the magazine transferring structure, one group of sliding rods can drive the four groups of magazines to rotate and feed simultaneously, and the structure is suitable for the wafer semiconductor magazines with continuous external feeding and larger loading capacity.
Description
Technical Field
The utility model relates to the technical field of semiconductor dry photoresist removing equipment, in particular to a vacuum sealing rotary lifting transmission device.
Background
In the processes of photoresist removal, polymer removal and the like on the surface of a semiconductor wafer, a plasma vacuum cavity is arranged outside a product to be processed, and a vacuum transmission device between the vacuum cavities belongs to one of semiconductor micromachining equipment components. Currently, sealing mechanisms for realizing rigid motion sealing on the market often have the problems of insufficient sealing precision or hardware damage caused by insufficient rigid motion or excessive rigid motion.
In chinese patent CN210984764U a vacuum chamber is disclosed comprising: the device comprises a shell, wherein an inlet for allowing the cassette to enter the shell is formed in a first side wall of the shell, and transmission mechanisms for driving the cassette to move along a direction perpendicular to the first side wall are arranged on a second side wall and a third side wall of the shell; the bottom of the cassette is contacted with the driving wheel assembly, the first transmission shaft is in dynamic seal with the shell, and the driving device is in dynamic seal with the shell; and the lifting mechanism is positioned inside the shell.
The vacuum chamber can realize the rotation motion and the linear motion of the driving wheel assembly at the same time and ensure the tightness in the vacuum chamber, but the structure is only suitable for small-size to-be-processed pieces, and has poor suitability for the wafer semiconductor material box with the external continuous feeding and larger loading capacity.
Disclosure of utility model
The utility model aims to provide a vacuum sealing rotary lifting transmission device, which aims to solve the problem that the sealing performance of a transmission structure in a vacuum chamber in the prior art in the background art is not good enough for a large-volume semiconductor material box.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a rotatory lift transmission device of vacuum seal, includes the cavity bottom plate, the top space of cavity bottom plate sets up to the transmission chamber, the below space of cavity bottom plate sets up to the transition chamber, the upper surface of cavity bottom plate has the support through the screw fixation, one side of support is provided with lifter plate and the elevation structure that drives the lifter plate and go up and down, the middle part of lifter plate is run through there is the slide bar, the slide bar rotates with the lifter plate to be connected, the one end of lifter plate is provided with drive slide bar pivoted rotating structure, magazine transshipment structure is installed to the bottom of slide bar.
Preferably, the magazine transfer structure comprises a discharging platform, a magazine body is arranged above the discharging platform, a through groove for the magazine body to penetrate is formed in the upper surface of the cavity bottom plate, and a sealing plate for sealing the through groove is fixed on the outer wall of the magazine body.
Preferably, the blowing platform is provided with two sets of, every group the magazine body of blowing platform top all is provided with two, the bottom of slide bar is through the screw fixation there being the connecting plate, the both ends of connecting plate are respectively through screw and two sets of blowing platform fixed connection.
Preferably, a feeding hole is formed in one side of the material box body, and the feeding holes of the two material box bodies above the two groups of material discharging platforms are arranged in a mirror image mode.
Preferably, the lifting structure comprises a screw rod, the top end of the screw rod is rotationally connected with the support, the bottom end of the screw rod penetrates through the lifting plate and is in threaded connection with the lifting plate, a longitudinal guide rail is arranged on one side of the support through a screw, one end of the lifting plate is fixedly connected with a sliding block of the longitudinal guide rail through the screw, and a transmission structure for driving the screw rod to rotate is arranged at the top of the support.
Preferably, the transmission structure comprises a lifting motor, the lifting motor is fixedly connected with the support, a driving gear is fixed on the outer wall of a rotating shaft at the output end of the lifting motor, a transmission gear is fixed on the top end of the screw rod, and the driving gear is meshed with the transmission gear.
Preferably, the rotating structure comprises a rotating motor, the rotating motor is fixedly connected with the lifting plate, the output end of the rotating motor and the outer wall of the top end of the sliding rod are both fixed with synchronous wheels, and the two synchronous wheels are in transmission connection through a synchronous belt.
Compared with the prior art, the utility model has the beneficial effects that:
According to the utility model, the four groups of material boxes can be driven to rotate and feed simultaneously by the aid of the material box transferring structure, the material box transferring structure can be suitable for continuously feeding wafers and semiconductor material boxes with larger loading capacity at the outer part, the lifting plate can drive the sliding rods and the four groups of material boxes to integrally lift or descend by the aid of the lifting plate and the transmission structure, and the material boxes with wafers are displaced into the transmission cavity from the transition cavity.
Drawings
FIG. 1 is an isometric view of the present utility model;
FIG. 2 is a front view of the present utility model;
Fig. 3 is a side view of the present utility model.
In the figure: 1. a cavity bottom plate; 2. a transmission cavity; 3. a transition chamber; 4. a bracket; 5. a lifting plate; 6. a lifting structure; 7. a slide bar; 8. a rotating structure; 9. a magazine transfer structure; 901. a discharging platform; 902. a magazine body; 903. a through groove; 904. a connecting plate; 905. a feed inlet; 906. a sealing plate; 601. a screw rod; 602. a longitudinal guide rail; 603. a lifting motor; 604. a drive gear; 605. a transmission gear; 801. a rotating motor; 802. and synchronizing the wheels.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-3, the present utility model provides a technical solution: the utility model provides a rotatory lift transmission device of vacuum seal, includes cavity bottom plate 1, cavity bottom plate 1's top space sets up to transmission chamber 2, cavity bottom plate 1's below space sets up to transition chamber 3, cavity bottom plate 1's upper surface has support 4 through the screw fixation, one side of support 4 is provided with lifter plate 5 and drives lifter plate 5 lift's elevation structure 6, the middle part of lifter plate 5 runs through has slide bar 7, slide bar 7 rotates with lifter plate 5 to be connected, the one end of lifter plate 5 is provided with drives slide bar 7 pivoted rotating structure 8, magazine transshipment structure 9 is installed to the bottom of slide bar 7.
The magazine transferring structure 9 comprises a discharging platform 901, a magazine body 902 is arranged above the discharging platform 901, a through groove 903 penetrating through the magazine body 902 is formed in the upper surface of the cavity bottom plate 1, and a sealing plate 906 which is convenient to seal the through groove 903 is fixed on the outer wall of the magazine body 902. Through setting up the baiting platform 901, for the feed box body 902 provides the support, when the baiting platform 901 rotated 180, can drive the feed box body 902 and rotate 180, make four feed box bodies 902 once only can realize the feeding of two feed boxes. When the sealing plate 906 is driven to rise, the sealing plate is tightly attached to the bottom of the through groove 903, so that the sealing performance between the cavity bottom plate 1 and the device shell is improved, and the wafer plasma treatment is facilitated.
The feeding platform 901 is provided with two groups, every group the magazine body 902 of feeding platform 901 top all is provided with two, the bottom of slide bar 7 is through the screw fixation there being connecting plate 904, the both ends of connecting plate 904 are respectively through screw and two groups feeding platform 901 fixed connection. By arranging the sliding rod 7 and the connecting plate 904, when the sliding rod 7 rotates, the two groups of discharging platforms 901 can be driven to rotate through the connecting plate 904.
One side of the material box body 902 is provided with a feeding hole 905, and the feeding holes 905 of the two material box bodies 902 above the two groups of material discharging platforms 901 are arranged in a mirror image mode. The feed port 905 is provided for placing a wafer.
The lifting structure 6 comprises a screw rod 601, the top end of the screw rod 601 is rotationally connected with the support 4, the bottom end of the screw rod 601 penetrates through the lifting plate 5 and is in threaded connection with the lifting plate 5, a longitudinal guide rail 602 is arranged on one side of the support 4 through a screw, one end of the lifting plate 5 is fixedly connected with a sliding block of the longitudinal guide rail 602 through a screw, and a transmission structure for driving the screw rod 601 to rotate is arranged at the top of the support 4. After the lifting motor 603 is started, the screw rod 601 rotates, so that the lifting plate 5 moves upwards or downwards under the guidance of the longitudinal guide rail 602, and the discharging platform 901 is driven to lift.
The transmission structure comprises a lifting motor 603, the lifting motor 603 is fixedly connected with a support 4, a driving gear 604 is fixed on the outer wall of a rotating shaft at the output end of the lifting motor 603, a transmission gear 605 is fixed on the top end of the screw rod 601, and the driving gear 604 is meshed with the transmission gear 605. After the lifting motor 603 is started, the driving gear 604 drives the transmission gear 605 to rotate, and the screw rod 601 is driven to rotate.
The rotating structure 8 comprises a rotating motor 801, the rotating motor 801 is fixedly connected with the lifting plate 5, synchronous wheels 802 are fixed on the output end of the rotating motor 801 and the outer wall of the top end of the sliding rod 7, and the two synchronous wheels 802 are connected through a synchronous belt in a transmission mode. After the rotating motor 801 is started, the synchronizing wheel 802 rotates, and the synchronizing wheel 802 at the top of the sliding rod 7 rotates through the synchronous belt to drive the sliding rod 7 to rotate, so that two groups of discharging platforms 901 rotate 180 degrees.
When the wafer feeding device is used, the material box body 902 filled with wafers is positioned above the material discharging platforms 901, the rotating motor 801 is started, the synchronous wheel 802 at the top of the sliding rod 7 is rotated through the synchronous belt, the sliding rod 7 is driven to rotate, and two groups of material discharging platforms 901 are rotated for 180 degrees to perform transposition feeding; after the wafer loading is finished, the lifting motor 603 is started, the driving gear 604 drives the transmission gear 605 to rotate, the driving screw rod 601 rotates, the lifting plate 5 moves upwards under the guide of the longitudinal guide rail 602, the discharging platform 901 is driven to ascend, the discharging platform 901 enters the transmission cavity 2 above through the through groove 903 until the upper surface of the sealing plate 906 is tightly attached to the lower surface of the through groove 903, and the sealing performance between the cavity bottom plate 1 and the device shell can be improved in the mode, so that the wafer plasma treatment is facilitated.
This elevation structure 6 rotates through the lead screw 601 and realizes, and the accuracy is more accurate, and blowing platform 901 can not be because closing plate 906 rises not in place, makes the clearance that leaves of leading to the groove 903 bottom to influence the leakproofness between cavity bottom plate 1 and the shell, and blowing platform 901 can not damage closing plate 906 because excessive displacement, can not influence sealing performance when rotatory lift to the wafer.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a rotatory lift transmission device of vacuum seal which characterized in that: including cavity bottom plate (1), the top space of cavity bottom plate (1) sets up to transmission chamber (2), the below space of cavity bottom plate (1) sets up to transition chamber (3), the upper surface of cavity bottom plate (1) has support (4) through the screw fixation, one side of support (4) is provided with lifter plate (5) and drives lifter structure (6) that lifter plate (5) go up and down, the middle part of lifter plate (5) is run through and is had slide bar (7), slide bar (7) are connected with lifter plate (5) rotation, the one end of lifter plate (5) is provided with drive slide bar (7) pivoted rotating structure (8), magazine transfer structure (9) is installed to the bottom of slide bar (7).
2. The vacuum sealed rotary lifting transmission device according to claim 1, wherein: the material box transferring structure (9) comprises a material discharging platform (901), a material box body (902) is arranged above the material discharging platform (901), a through groove (903) for the material box body (902) to penetrate is formed in the upper surface of the cavity bottom plate (1), and a sealing plate (906) for sealing the through groove (903) is fixed on the outer wall of the material box body (902).
3. A vacuum sealed rotary lifting transfer device according to claim 2, wherein: the automatic feeding device is characterized in that two groups of feeding platforms (901) are arranged, two groups of feeding box bodies (902) above the feeding platforms (901) are arranged, connecting plates (904) are fixed to the bottom ends of sliding rods (7) through screws, and two ends of each connecting plate (904) are fixedly connected with the two groups of feeding platforms (901) through screws respectively.
4. A vacuum sealed rotary lifting transfer device according to claim 3, wherein: one side of the material box body (902) is provided with a feeding hole (905), and the feeding holes (905) of the two material box bodies (902) above the two discharging platforms (901) are arranged in a mirror image mode.
5. The vacuum sealed rotary lifting transmission device according to claim 4, wherein: the lifting structure (6) comprises a screw rod (601), the top end of the screw rod (601) is rotationally connected with a support (4), the bottom end of the screw rod (601) penetrates through the lifting plate (5) and is in threaded connection with the lifting plate (5), a longitudinal guide rail (602) is arranged on one side of the support (4) through a screw, one end of the lifting plate (5) is fixedly connected with a sliding block of the longitudinal guide rail (602) through the screw, and a transmission structure for driving the screw rod (601) to rotate is arranged at the top of the support (4).
6. The vacuum sealed rotary lifting transmission device according to claim 5, wherein: the transmission structure comprises a lifting motor (603), the lifting motor (603) is fixedly connected with a support (4), a driving gear (604) is fixed on the outer wall of a rotating shaft at the output end of the lifting motor (603), a transmission gear (605) is fixed on the top end of a screw rod (601), and the driving gear (604) is meshed with the transmission gear (605).
7. The vacuum sealed rotary lifting transmission device according to claim 6, wherein: the rotating structure (8) comprises a rotating motor (801), the rotating motor (801) is fixedly connected with the lifting plate (5), the output end of the rotating motor (801) and the outer wall of the top end of the sliding rod (7) are both fixed with synchronous wheels (802), and the two synchronous wheels (802) are connected through a synchronous belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322822401.2U CN220925545U (en) | 2023-10-20 | 2023-10-20 | Vacuum seal rotary lifting transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322822401.2U CN220925545U (en) | 2023-10-20 | 2023-10-20 | Vacuum seal rotary lifting transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220925545U true CN220925545U (en) | 2024-05-10 |
Family
ID=90935355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322822401.2U Active CN220925545U (en) | 2023-10-20 | 2023-10-20 | Vacuum seal rotary lifting transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220925545U (en) |
-
2023
- 2023-10-20 CN CN202322822401.2U patent/CN220925545U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20010014268A1 (en) | Multi-axis transfer arm with an extensible tracked carriage | |
| CN220925545U (en) | Vacuum seal rotary lifting transmission device | |
| CN112429406A (en) | Automatic over-and-under type freeze-dried powder storage box convenient to get and put | |
| CN108274489B (en) | Medical auxiliary manipulator | |
| CN113625158B (en) | Power amplifier chip test system and test method | |
| CN111313078B (en) | Lithium cell production is with electric core income shell device | |
| CN220692974U (en) | Shell paint dipping device | |
| CN113280989B (en) | Air tightness detection jig and detection method for photoelectric module tail fiber packaging structure | |
| CN112993495A (en) | High-flux button cell assembling automation device | |
| CN115754671B (en) | Detection device and method based on chip production | |
| CN111341722A (en) | Adjustable limiting and clamping device for chip processing | |
| CN113437012B (en) | Semiconductor process chamber and semiconductor process equipment | |
| CN216547951U (en) | Wafer storage bin | |
| CN113003237B (en) | Parallel moving frame based on double-power drive and unloading device thereof | |
| CN220032576U (en) | Animal remedy processing save set | |
| CN209515888U (en) | A kind of integrated side seal tooling of lithium ion battery | |
| CN112827761A (en) | Conductive aluminum foil adhesive tape processing and gluing device | |
| CN214878497U (en) | Automatic substrate conveying device | |
| CN110987811A (en) | Part data rotary scanning equipment | |
| CN215968742U (en) | Automatic variable pitch mechanism for butt joint of mechanical arms | |
| CN215248197U (en) | Transplanting material box | |
| CN221125909U (en) | Integrated mechanical clamping mechanism for semiconductor | |
| CN221316784U (en) | Automatic laminating machine | |
| CN216709899U (en) | Goat's milk powder production is with folding processing case unpacking machine | |
| CN220321777U (en) | Explosion-proof vacuum drying oven and chrysanthemum blue anti-influenza tablet preparation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |