CN220918679U

CN220918679U - PECVD drying device

Info

Publication number: CN220918679U
Application number: CN202323019310.1U
Authority: CN
Inventors: 杨骥; 师海峰; 鲍少娟; 黄金; 冀杨洲; 杨文亮; 任法渊; 李莎; 高英杰; 杨泽奇; 潘国鑫; 张娟; 程风
Original assignee: Jinneng Photovoltaic Technology Co Ltd; Jinneng Clean Energy Technology Ltd
Current assignee: Jinneng Photovoltaic Technology Co Ltd; Jinneng Clean Energy Technology Ltd
Priority date: 2023-11-08
Filing date: 2023-11-08
Publication date: 2024-05-10
Anticipated expiration: 2033-11-08

Abstract

The utility model belongs to the technical field of solar cells, and particularly discloses a PECVD drying device which comprises a base, a traveling component, a drying agent, a wireless humidity sensor and a drying box. According to the utility model, the drying box on the base is driven to move by the walking component, the automatic environment is dried by the drying agent arranged in the drying box, so that the humidity in the automatic environment can be ensured to be within the set threshold range, meanwhile, the wireless humidity sensor is configured to monitor the environment humidity in real time, and the reminding of the drying agent replacement can be timely performed under the condition that the environment humidity does not reach the standard.

Description

PECVD drying device

Technical Field

The utility model relates to the technical field of solar cells, in particular to a PECVD drying device.

Background

The PECVD equipment is one of important equipment for coating films in photovoltaic equipment, and the process principle is as follows: the PECVD technology is that glow discharge is generated on a cathode of a process cavity (namely a tray for placing a sample) by utilizing low-temperature plasma under low air pressure, the sample is heated to a preset temperature by utilizing glow discharge (or an additional heating body), then a proper amount of process gas is introduced, and the gas is subjected to a series of chemical reactions and plasma reactions to finally form a solid film on the surface of the sample. In the reaction process, the reaction gas enters the furnace chamber from the gas inlet and gradually diffuses to the surface of the sample, and under the action of an electric field excited by the radio frequency source, the reaction gas is decomposed into electrons, ions, active groups and the like. These decomposition products chemically react to form the initial components and side reactants of the film, and these products are adsorbed to the sample surface in the form of chemical bonds to form crystal nuclei of the solid film, which grow gradually into islands, which continue to grow into continuous films. During film growth, various byproducts gradually detach from the surface of the film and are discharged from the outlet by the vacuum pump.

Plasma Enhanced Chemical Vapor Deposition (PECVD) is one of the chemical vapor deposition, and its low deposition temperature is its most prominent advantage. The PECVD deposited film has excellent electrical properties, good substrate adhesion and excellent step coverage, and has wide application in the fields of very large scale integrated circuits, photoelectric devices, MEMS and the like due to the advantages.

Different batteries correspond to different processes, different processes correspond to distinct PECVD equipment, and the following are coating processes required by three different batteries PERC, BSF, HJT: in the case of BSF cells, the primary function of the PECVD apparatus is to plate a front surface silicon nitride anti-reflective film; in the PERC battery process, PECVD equipment is mainly plated with a back passivation film except a front surface antireflection film, and comprises an aluminum oxide film and a silicon nitride film, wherein in actual production, a layer of Al2O3 is plated firstly, and SiNx is deposited on both sides; in the core application of HJT is amorphous silicon thin film deposition.

Because heterojunction battery needs the multilayer amorphous silicon film of double-sided deposition, consequently, use plate PECVD equipment more, and need carry out automatic turn over piece when depositing the double-sided battery, and automatic turn over piece in-process because the high temperature state of support plate can condense the steam in the environment on the support plate, and then bring into the reaction cavity, cause harmful effects to the technology, consequently, PECVD automation environment's humidity is important influence factor, at present for its main control scheme for the nitrogen gas of letting in after sealing, but the leakage of nitrogen gas can cause the staff to stifle, and the automation operation in-process always need open the door to handle, just need take out nitrogen gas after working again this moment, waste time and energy, influence equipment utilization ratio. Therefore, how to effectively control the humidity of the PECVD automation environment in the production of heterojunction cells is a problem that needs to be solved in the industry.

Disclosure of utility model

The utility model aims to provide a PECVD drying device, which is used for improving the controllability of the automation environment of PECVD equipment, achieving the aim of standardized humidity control and avoiding various inconveniences and dangers brought to production by a conventional nitrogen-introducing mode.

In order to achieve the above purpose, the utility model provides a PECVD drying device, which adopts the following technical scheme:

the utility model provides a PECVD drying device, includes base, walking part, drier, wireless humidity sensor and drying cabinet, the lower extreme of base sets up walking part, the upper end of base supports the drying cabinet, be provided with in the drying cabinet the drier, the outside of drying cabinet sets up wireless humidity sensor.

Further, the signal output end of the wireless humidity sensor is connected with the signal input end of the processing terminal.

Further, the processing terminal is a computer or a smart phone.

Further, the walking component comprises a driving wheel piece and a steering assembly, wherein the steering assembly is connected with the driving wheel piece so as to control the driving wheel piece to steer.

Further, the steering assembly comprises a steering shaft and a steering driving component, the steering driving component is fixed on the base, the torque output end of the steering driving component is connected with one end of the steering shaft, and the other end of the steering shaft is connected with the driving wheel piece.

Further, the steering driving part comprises a steering motor, a first gear shaft and a second gear shaft, wherein the torque output end of the steering motor is coaxially connected with the first gear shaft, the first gear shaft is meshed with the second gear shaft, and the second gear shaft is coaxially connected with the steering shaft.

Further, the driving wheel piece includes casing, wheel body, drive shaft and driving motor, the steering spindle with the casing is connected, the outside of casing rotationally is provided with the wheel body, driving motor set up in the casing, driving motor's moment output end is connected the one end of drive shaft, the other end of drive shaft is connected the wheel body.

Further, the number of the wheel bodies is two, the wheel bodies are symmetrically arranged on two sides of the shell, the driving motor is provided with two moment output ends, and the two moment output ends of the driving motor are respectively connected with one wheel body through a driving shaft.

Further, the number of the walking parts is 4.

The beneficial effects of the utility model are as follows: according to the PECVD drying device, the drying box on the base is driven to move by the travelling component, the automatic environment is dried by the drying agent arranged in the drying box, so that the humidity in the automatic environment can be ensured to be within the set threshold range, meanwhile, the wireless humidity sensor is configured to monitor the environment humidity in real time, and the reminding of the drying agent replacement can be timely carried out under the condition that the environment humidity does not reach the standard.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.

Fig. 1 illustrates a front view of a PECVD drying apparatus according to an embodiment of the present utility model.

Fig. 2 shows a top view of a PECVD drying apparatus according to an embodiment of the present utility model.

Fig. 3 is a schematic diagram showing a structure of a PECVD drying apparatus according to an embodiment of the present utility model when a processing terminal is provided.

Fig. 4 illustrates a front view of a PECVD drying apparatus according to an embodiment of the present utility model.

Fig. 5 shows a section A-A in fig. 4.

In the figure, 1 is a base, 2 is a walking component, 21 is a driving wheel, 211 is a shell, 212 is a wheel body, 213 is a driving shaft, 214 is a driving motor, 22 is a steering assembly, 23 is a steering shaft, 24 is a steering driving component, 241 is a steering motor, 242 is a first gear shaft, 243 is a second gear shaft, 3 is a drying agent, 4 is a wireless humidity sensor, 5 is a drying box, and 6 is a processing terminal.

Detailed Description

Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict.

In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the utility model. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The following describes in further detail the embodiments of the present utility model with reference to the drawings and examples.

The embodiment of the utility model provides a PECVD drying device, as shown in fig. 1 and 2, which comprises a base 1, a traveling component 2, a drying agent 3, a wireless humidity sensor 4 and a drying box 5, wherein the traveling component 2 is arranged at the lower end of the base 1, the drying box 5 is supported at the upper end of the base 1, the drying agent 3 is arranged in the drying box 5, and the wireless humidity sensor 4 is arranged at the outer side of the drying box 5.

The desiccant 3 is an existing product, which may be in bulk form or in a bag form, placed in a drying oven 5. The drying cabinet 5 is an upper end open-ended box body, and the drier 3 placed in the drying cabinet 5 is contacted with the air in the automatic environment through the upper end opening of the drying cabinet 5, so that the drying function is realized. The wireless humidity sensor 4 can remotely send signals under the condition of wireless connection so as to remotely send out the collected environmental humidity in the automatic environment. The walking component 2 is used for driving the base 1 and the drying box 5 to move, so that the contact between the drying agent 3 and the air in the automatic environment can be ensured, and the drying effect of the PECVD drying device can be ensured by continuously moving in the automatic drying environment.

In some embodiments, in order to facilitate the staff to obtain the real-time environmental humidity in time, the PECVD drying apparatus may include a processing terminal 6, as shown in fig. 3, where the signal output end of the wireless humidity sensor 4 is connected to the signal input end of the processing terminal 6. The wireless humidity sensor 4 may be connected to the processing terminal 6 by a signal based on a mature bluetooth technology, a WiFi technology, a 4G technology or a 5G technology, so as to wirelessly feed the collected ambient humidity to the processing terminal 6, the processing terminal 6 may simply process and display the ambient humidity, and the processing terminal 6 may be implemented as a computer or a smart phone. The staff can judge whether the environmental humidity accords with the set threshold according to the environmental humidity displayed by the processing terminal 6, if the set threshold is more than 20%, the situation that the environmental humidity is too high is indicated if the set threshold is more than 20%, and the desiccant 3 is in failure at the moment with high probability, so that the desiccant 3 needs to be replaced in time.

In some embodiments, as shown in fig. 4, the walking member 2 includes a driving wheel member 21 and a steering assembly 22, and the steering assembly 22 is connected to the driving wheel member 21 to control steering of the driving wheel member 21.

The driving wheel member 21 is used for driving the whole drying device to move, and the driving wheel member 21 can be realized as a driving wheel with a motor, for example, and the driving wheel moves on the supporting surface under the action of the motor. The driving wheel piece 21 can only linearly move, so that the steering assembly 22 is arranged, the steering assembly 22 is utilized to drive the driving wheel piece 21 to steer, the traveling component 2 can realize linear or curved traveling, the traveling component 2 can move according to a set track by controlling the driving wheel piece 21 and the steering assembly 22, the drying agent 3 can be ensured to be contacted with air in an automatic environment under the condition of moving according to the set track, and the drying effect of the PECVD drying device is improved.

The specific construction of the drive wheel assembly 21 and the steering assembly 22 and their operation will be described in detail in the present embodiment.

As shown in fig. 4, the steering assembly 22 includes a steering shaft 23 and a steering driving member 24, the steering driving member 24 is fixed on the base 1, a torque output end of the steering driving member 24 is connected to one end of the steering shaft 23, and the other end of the steering shaft 23 is connected to the driving wheel member 21. The steering driving part 24 provides power for the rotation of the steering shaft 23, and when the steering shaft 23 rotates, the driving wheel member 21 is driven to steer.

Illustratively, the steering driving member 24 includes a steering motor 241, a first gear shaft 242, and a second gear shaft 243, the torque output end of the steering motor 241 is coaxially connected to the first gear shaft 242, the first gear shaft 242 is meshed with the second gear shaft 243, and the second gear shaft 243 is coaxially connected to the steering shaft 23.

The steering motor 241 is a forward/reverse motor. When the steering motor 241 rotates forward, the first gear shaft 242 is driven to rotate clockwise, and the second gear shaft 243 meshed with the first gear shaft 242 also rotates clockwise, at this time, the steering shaft 23 also rotates clockwise, so as to drive the driving wheel member 21 to steer to the right. Similarly, when the steering motor 241 rotates reversely, the first gear shaft 242 is driven to rotate counterclockwise, and the second gear shaft 243 meshed with the first gear shaft 242 also rotates counterclockwise, at this time, the steering shaft 23 also rotates counterclockwise, and drives the driving wheel member 21 to steer to the left. Therefore, the adjustment of the traveling direction of the driving wheel member 21 can be achieved by controlling the steering motor 241.

As shown in fig. 5, the driving wheel 21 includes a housing 211, a wheel body 212, a driving shaft 213, and a driving motor 214, the steering shaft 23 is connected to the housing 211, the wheel body 212 is rotatably disposed on the outer side of the housing 211, the driving motor 214 is disposed in the housing 211, a torque output end of the driving motor 214 is connected to one end of the driving shaft 213, and the other end of the driving shaft 213 is connected to the wheel body 212.

The driving wheel member 21 is driven by the driving motor 214 to rotate the wheel body 212 via the driving shaft 213, thereby realizing traveling. The different rotation directions of the driving motor 214 control the wheel 212 to move forward or backward, for example, the driving motor 214 rotates forward to move forward the wheel 212, and the driving motor 214 rotates backward to move backward the wheel 212.

In some embodiments, the two wheels 212 are symmetrically disposed on two sides of the housing 211, the driving motor 214 has two torque output ends, and the two torque output ends of the driving motor 214 are respectively connected to one wheel 212 through one driving shaft 213.

That is, one driving wheel member 21 adopts a double-wheel structure layout, and the double wheels are driven by one driving motor 214, and the double-wheel structure layout can ensure the running stability of the driving wheel member 21.

In some embodiments, the number of the walking members 2 is 4, and in the case of a square base 1, for example, four walking members 2 may be disposed at four corners of the square base 1 with respect to the base 1.

According to the running component 2 described in the above embodiment, in actual implementation, a running track can be set according to an actual automation environment, and the running component 2 can be controlled to automatically walk back and forth in the automation environment according to the set running track by controlling the driving motor 214 and the steering motor 241, so that the environment humidity can be ensured without manual intervention.

The utility model can avoid the inconvenience and the danger brought to the production by the conventional nitrogen-introducing mode.

Under the conventional nitrogen-introducing mode, the PECVD automatic sealing chamber is filled with nitrogen, the environmental humidity can be kept below 20%, when fragments appear on the carrier plate, the equipment is stopped, the nitrogen is pumped away until the oxygen content in the environment reaches 21%, and the sealing door is opened to treat the fragments; after the treatment is completed, the sealing door is closed, nitrogen is introduced again until the ambient humidity reaches below 20%, and the equipment is opened to continue production. The time for cleaning the fragments is 5min, and the time for stopping the equipment to start up is 60min.

When fragments appear on the carrier plate, the equipment is stopped, the sealing door is opened for fragment cleaning, the sealing door is closed, and the equipment is opened for continuous production. The time for cleaning the fragments is 5min, and the time for stopping the equipment to start up is 5min.

When the PECVD drying device is used, the equipment downtime is greatly reduced, the utilization rate of the PECVD equipment is improved, the productivity is improved, the PECVD equipment has the characteristic that the influence of the coating continuity on the process is large, the implementation of the device can better ensure the equipment continuity, and the guarantee is provided for the process stability.

The above embodiments are only for illustrating the present utility model, not for limiting the present utility model, and various changes and modifications may be made by one of ordinary skill in the relevant art without departing from the spirit and scope of the present utility model, and therefore, all equivalent technical solutions are also within the scope of the present utility model, and the scope of the present utility model is defined by the claims.

Claims

1. The PECVD drying device is characterized by comprising a base, a traveling component, a drying agent, a wireless humidity sensor and a drying box, wherein the traveling component is arranged at the lower end of the base, the drying box is supported at the upper end of the base, the drying agent is arranged in the drying box, and the wireless humidity sensor is arranged at the outer side of the drying box.

2. The PECVD drying apparatus of claim 1, wherein the signal output of the wireless humidity sensor is connected to a signal input of a processing terminal.

3. The PECVD drying apparatus of claim 2, wherein the processing terminal is a computer or a smart phone.

4. The PECVD drying apparatus of claim 1, wherein the walking member comprises a drive wheel member and a steering assembly coupled to the drive wheel member to control steering of the drive wheel member.

5. The PECVD drying apparatus of claim 4, wherein the steering assembly comprises a steering shaft and a steering drive member, the steering drive member being fixed to the base, a torque output end of the steering drive member being connected to one end of the steering shaft, and the other end of the steering shaft being connected to the driving wheel member.

6. The PECVD drying apparatus of claim 5, wherein the steering driving member comprises a steering motor, a first gear shaft and a second gear shaft, the torque output end of the steering motor is coaxially connected to the first gear shaft, the first gear shaft is engaged with the second gear shaft, and the second gear shaft is coaxially connected to the steering shaft.

7. The PECVD drying apparatus of claim 5, wherein the driving wheel member comprises a housing, a wheel body, a driving shaft and a driving motor, the steering shaft is connected with the housing, the wheel body is rotatably arranged on the outer side of the housing, the driving motor is arranged in the housing, a torque output end of the driving motor is connected with one end of the driving shaft, and the other end of the driving shaft is connected with the wheel body.

8. The PECVD drying apparatus of claim 7, wherein the number of the wheels is two, the wheels are symmetrically arranged at two sides of the shell, the driving motor is provided with two moment output ends, and the two moment output ends of the driving motor are respectively connected with one wheel body through one driving shaft.

9. PECVD drying apparatus according to any one of claims 1 to 8, wherein the number of the traveling members is 4.