CN220892917U - Water cooling system of polysilicon reduction furnace - Google Patents
Water cooling system of polysilicon reduction furnace Download PDFInfo
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- CN220892917U CN220892917U CN202322494523.3U CN202322494523U CN220892917U CN 220892917 U CN220892917 U CN 220892917U CN 202322494523 U CN202322494523 U CN 202322494523U CN 220892917 U CN220892917 U CN 220892917U
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 249
- 238000001816 cooling Methods 0.000 title claims abstract description 43
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 37
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 34
- 230000008020 evaporation Effects 0.000 claims description 15
- 238000001704 evaporation Methods 0.000 claims description 15
- 239000000498 cooling water Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052710 silicon Inorganic materials 0.000 abstract description 12
- 239000010703 silicon Substances 0.000 abstract description 12
- 238000004891 communication Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 3
- 239000005052 trichlorosilane Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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Abstract
The utility model discloses a water cooling system of a polysilicon reduction furnace, which relates to the technical field of polysilicon reduction furnaces and mainly aims to save the natural cooling time of a silicon rod in a rod disassembly process. The main technical scheme of the utility model is as follows: a polysilicon reduction furnace water cooling system comprising: one end of the first water inlet pipe is connected to the lower end of the flash tank, the other end of the first water inlet pipe is connected to the inlet of the lower end of the reduction furnace bell jacket, one end of the first water return pipe is connected to the outlet of the upper end of the reduction furnace bell jacket, and the other end of the first water return pipe is connected to the upper end of the flash tank; the lower end of the first water tank is connected with an electrode jacket inlet, the second water inlet pipe is communicated with the first heat exchanger, the electrode jacket outlet is connected with one end of a second water return pipe, and the other end of the second water return pipe is connected with the upper end of the first water tank; the lower end of the second water tank is connected with the inlet of the lower end of the bell jar jacket of the reduction furnace, the third water inlet pipe is communicated with the first space of the second heat exchanger, and the outlet of the upper end of the bell jar jacket of the reduction furnace is connected with the upper end of the second water tank.
Description
Technical Field
The utility model relates to the technical field of polysilicon reduction furnaces, in particular to a water cooling system of a polysilicon reduction furnace.
Background
The polysilicon is mainly applied in the field of solar photovoltaic and electronic communication products, and in recent years, along with the continuous development of the economy of China, the market of the solar photovoltaic and electronic communication products is rapidly expanded, and the demand of the polysilicon as a core raw material of the solar photovoltaic and electronic communication products is also increased. In the existing polysilicon production system, the reduction system is an important ring in the polysilicon production process, and the operation efficiency is a direct factor influencing the polysilicon yield.
In domestic polysilicon production enterprises, more than 80% of the polysilicon is produced by adopting an improved Siemens method process, when the polysilicon is produced by the improved Siemens method, trichlorosilane and hydrogen are mixed according to a certain proportion and then are sprayed into a reducing furnace through a pipeline through a chassis nozzle, a vapor phase chemical deposition reaction is carried out under the conditions of 1080-1200 ℃ and 6bar, and after the trichlorosilane is reduced, the trichlorosilane is deposited on an electrified silicon core to form a polysilicon rod. After the growth of the polysilicon rod reaches the product requirement, the electrode is powered off, the reduction furnace is cooled, and the rod removing operation is carried out when the temperature of the polysilicon rod is reduced to below 80 ℃.
At present, in most reducing furnace cooling systems, a reducing furnace bell jar is cooled by high temperature water at 110-150 ℃, a chassis is cooled by hot water at 80-100 ℃, and an electrode is cooled by medium temperature water at 30-50 ℃. In the reaction stage of the reduction furnace, the heat of the bell jar is taken away by high-temperature water and then is flashed by a high-temperature water flash tank, so that the heat is recycled. In the cooling stage of the reduction furnace, the initial temperature of high-temperature water from the high-temperature water flash tank is high, the temperature of the polysilicon rod after the furnace is disassembled is about 200 ℃, the requirement of rod disassembly cannot be met due to overhigh temperature, natural cooling is needed for two hours, and the rod disassembly operation is carried out when the temperature of the polysilicon rod is reduced to below 80 ℃.
Disclosure of utility model
In view of the above, the utility model provides a water cooling system of a polysilicon reduction furnace, which mainly aims to not only ensure that the heat energy recovery of a high-temperature water flash tank is not affected, but also improve the heat exchange efficiency of a reduction furnace bell jar, so that a polysilicon rod can reach the rod disassembling temperature when disassembling the furnace, and the natural cooling time of the silicon rod in the rod disassembling process is saved.
In order to achieve the above purpose, the present utility model mainly provides the following technical solutions:
In one aspect, the present utility model provides a polycrystalline silicon reduction furnace water cooling system comprising: a flash evaporation part, an electrode cooling part and a bell jar cooling part;
The flash evaporation part comprises a flash evaporation tank, a first water inlet pipe and a first water return pipe, one end of the first water inlet pipe is connected to the lower end of the flash evaporation tank, the other end of the first water inlet pipe is connected to the lower end inlet of a reduction furnace bell jacket, one end of the first water return pipe is connected to the upper end outlet of the reduction furnace bell jacket, the other end of the first water return pipe is connected to the upper end of the flash evaporation tank, the first water inlet pipe is provided with a first valve, and the first water return pipe is provided with a second valve;
The electrode cooling part comprises a first water tank and a first heat exchanger, the lower end of the first water tank is connected with one end of a second water inlet pipe, the other end of the second water inlet pipe is connected with an electrode jacket inlet, the second water inlet pipe is communicated with the first heat exchanger, an electrode jacket outlet is connected with one end of a second water return pipe, and the other end of the second water return pipe is connected with the upper end of the first water tank;
The bell jar cooling part comprises a second water tank and a second heat exchanger, the lower end of the second water tank is connected with one end of a third water inlet pipe, the other end of the third water inlet pipe is connected with the lower end inlet of a reduction furnace bell jar jacket, the third water inlet pipe is communicated with a first space of the second heat exchanger, the upper end outlet of the reduction furnace bell jar jacket is connected with one end of a third water return pipe, the other end of the third water return pipe is connected with the upper end of the second water tank, a third valve is arranged on the third water inlet pipe, and a fourth valve is arranged on the third water return pipe;
The second water inlet pipe is connected to an inlet of a second space of the second heat exchanger through a first connecting pipe, the second water return pipe is connected to an inlet of the second space of the second heat exchanger through a second connecting pipe, an outlet of the second space of the second heat exchanger is connected to the upper end of the first water tank through a fourth water return pipe, a fifth valve is installed on the first connecting pipe, and a sixth valve is installed on the second connecting pipe.
The aim and the technical problems of the utility model can be further realized by adopting the following technical measures.
Optionally, the water pump further comprises a first water pump, a second water pump and a third water pump, wherein the first water pump is installed on the first water inlet pipe, the second water pump is installed on the second water inlet pipe, and the third water pump is installed on the third water inlet pipe.
Optionally, the device further comprises a seventh valve and an eighth valve, wherein the seventh valve is arranged at the inlet of the lower end of the reduction furnace bell jacket, and the eighth valve is arranged at the outlet of the upper end of the reduction furnace bell jacket.
Optionally, the heat exchanger further comprises a circulating cooling water pipe, the second water inlet pipe is communicated with the first space of the first heat exchanger, and the circulating cooling water pipe is communicated with the second space of the first heat exchanger.
On the other hand, the utility model also provides a water cooling method of the polysilicon reduction furnace, when the reduction furnace operates, the water cooling system of the polysilicon reduction furnace is used, and the method comprises the following steps:
(1) Closing the third valve, the fourth valve, the fifth valve and the sixth valve, and opening the first valve and the second valve;
(2) The water in the flash tank enters a reduction furnace bell jacket through the first water inlet pipe, then returns to the flash tank through the first water return pipe, and the heat of the reduction furnace bell is transferred to the flash tank;
(3) And water in the first water tank enters the electrode jacket through the second water inlet pipe and then returns to the first water tank through the second water return pipe, and in the process, the water in the first water tank is cooled through the first heat exchanger.
On the other hand, the utility model also provides a water cooling method of the polysilicon reduction furnace, when the reduction furnace is shut down, the water cooling system of the polysilicon reduction furnace is used, and the method comprises the following steps:
(1) Closing the first valve and the second valve, opening the third valve and the fourth valve, and simultaneously opening one of the fifth valve and the sixth valve;
(2) The water in the second water tank enters a bell jacket of the reduction furnace through the third water inlet pipe and then returns to the second water tank through the third water return pipe;
(3) And water in the first water tank enters the electrode jacket through the second water inlet pipe and then returns to the first water tank through the second water return pipe, and in the process, the water in the second water inlet pipe or the second water return pipe is distributed to the second space of the second heat exchanger to take away heat of the water in the first space of the second heat exchanger.
Optionally, in step (1), the sixth valve is opened, and when the fifth valve is closed, the first stage of furnace shutdown is performed; and opening the fifth valve, and closing the sixth valve, wherein the second stage is a furnace shutdown stage.
Optionally, the duration of the first stage of the furnace shutdown is 3.5-4.5 hours, or when the temperature in the bell jar of the reduction furnace is reduced to between 150 and 250 ℃, the first stage of the furnace shutdown is ended.
By the technical scheme, the utility model has at least the following advantages:
After the furnace is stopped, the running cooling system is separated from the high-temperature water flash tank, so that the flash system of the original high-temperature water flash tank is not affected; when the reduction furnace is disassembled, the bell jar temperature is low, so that the risk of scalding in the furnace disassembly process is effectively prevented, and the working safety is improved; the temperature of the silicon rod after the furnace is disassembled meets the rod disassembling requirement, the time for naturally cooling the silicon rod is saved, and the working efficiency is improved.
Drawings
Fig. 1 is a schematic structural diagram of a water cooling system of a polysilicon reduction furnace according to an embodiment of the present utility model.
Reference numerals in the drawings of the specification include: the flash tank 1, the first water inlet pipe 2, the first water return pipe 3, the first valve 4, the second valve 5, the first water tank 6, the first heat exchanger 7, the second water inlet pipe 8, the second water return pipe 10, the second water tank 11, the second heat exchanger 12, the third water inlet pipe 13, the reduction furnace bell jacket 14, the third water return pipe 15, the third valve 16, the fourth valve 17, the first connecting pipe 18, the second connecting pipe 19, the fourth water return pipe 20, the fifth valve 21, the sixth valve 22, the electrode 23, the first water pump 24, the second water pump 25, the third water pump 26, the seventh valve 27, the eighth valve 28, and the circulating cooling water pipe 29.
Detailed Description
In order to further describe the technical means and effects adopted for achieving the preset aim of the utility model, the following detailed description refers to the specific implementation, structure, characteristics and effects according to the application of the utility model with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
The utility model is described in further detail below with reference to the drawings and examples.
As shown in fig. 1, in one aspect, an embodiment of the present utility model provides a water cooling system for a polycrystalline silicon reduction furnace, comprising: a flash evaporation part, an electrode cooling part and a bell jar cooling part;
The flash evaporation part comprises a flash evaporation tank 1, a first water inlet pipe 2 and a first water return pipe 3, one end of the first water inlet pipe 2 is connected to the lower end of the flash evaporation tank 1, the other end of the first water inlet pipe 2 is connected to the lower end inlet of a reduction furnace bell jacket 14, one end of the first water return pipe 3 is connected to the upper end outlet of the reduction furnace bell jacket 14, the other end of the first water return pipe is connected to the upper end of the flash evaporation tank 1, a first valve 4 is arranged on the first water inlet pipe 2, and a second valve 5 is arranged on the first water return pipe 3;
The electrode cooling part comprises a first water tank 6 and a first heat exchanger 7, the lower end of the first water tank 6 is connected with one end of a second water inlet pipe 8, the other end of the second water inlet pipe 8 is connected with an electrode 23 jacket inlet, the second water inlet pipe 8 is communicated with the first heat exchanger 7, an electrode 23 jacket outlet is connected with one end of a second water return pipe 10, and the other end of the second water return pipe 10 is connected with the upper end of the first water tank 6;
The bell jar cooling part comprises a second water tank 11 and a second heat exchanger 12, the lower end of the second water tank 11 is connected with one end of a third water inlet pipe 13, the other end of the third water inlet pipe 13 is connected with the lower end inlet of a reduction furnace bell jar jacket 14, the third water inlet pipe 13 is communicated with a first space of the second heat exchanger 12, the upper end outlet of the reduction furnace bell jar jacket 14 is connected with one end of a third water return pipe 15, the other end of the third water return pipe 15 is connected with the upper end of the second water tank 11, a third valve 16 is arranged on the third water inlet pipe 13, and a fourth valve 17 is arranged on the third water return pipe 15;
Wherein the second water inlet pipe 8 is connected to the inlet of the second space of the second heat exchanger 12 through the first connecting pipe 18, the second water return pipe 10 is connected to the inlet of the second space of the second heat exchanger 12 through the second connecting pipe 19, the outlet of the second space of the second heat exchanger 12 is connected to the upper end of the first water tank 6 through the fourth water return pipe 20, the first connecting pipe 18 is provided with a fifth valve 21, and the second connecting pipe 19 is provided with a sixth valve 22.
In the technical scheme of the utility model, after the furnace is stopped, the running cooling system is separated from the high-temperature water flash tank 1, so that the flash evaporation system of the original high-temperature water flash tank 1 is not influenced; when the reduction furnace is disassembled, the bell jar temperature is low, so that the risk of scalding in the furnace disassembly process is effectively prevented, and the working safety is improved; the temperature of the silicon rod after the furnace is disassembled meets the rod disassembling requirement, the time for naturally cooling the silicon rod is saved, and the working efficiency is improved.
As shown in fig. 1, in the specific embodiment, the water pump further includes a first water pump 24, a second water pump 25, and a third water pump 26, where the first water pump 24 is mounted on the first water inlet pipe 2, the second water pump 25 is mounted on the second water inlet pipe 8, and the third water pump 26 is mounted on the third water inlet pipe 13.
In the present embodiment, specifically, the first water pump 24 provides power for circulating high-temperature water between the flash tank 1 and the reduction furnace bell jar jacket 14; the second water pump 25 provides power for the circulation of cooling water in the jacket of the electrode 23 and the first water tank 6; the third water pump 26 provides power for the circulation of cooling water between the second water tank 11 and the reduction furnace bell jacket 14.
As shown in fig. 1, in the specific embodiment, the valve further comprises a seventh valve 27 and an eighth valve 28, wherein the seventh valve 27 is installed at the lower end inlet of the reduction furnace bell jar jacket 14, and the eighth valve 28 is installed at the upper end outlet of the reduction furnace bell jar jacket 14.
In the present embodiment, specifically, when the maintenance of the reduction furnace bell is required, the seventh valve 27 and the eighth valve 28 are closed, and then the reduction furnace bell jacket 14 and the related cooling water pipe are isolated.
As shown in fig. 1, in the specific embodiment, the circulating cooling water pipe 29 is further included, the second water inlet pipe 8 is communicated with the first space of the first heat exchanger 7, and the circulating cooling water pipe 29 is communicated with the second space of the first heat exchanger 7.
In this embodiment, specifically, the circulating water is cooled by the glass fiber reinforced plastic cooling tower, and then the cooled circulating water is led to the second space of the first heat exchanger 7 through the circulating cooling water pipe 29, so that the water temperature in the first space of the first heat exchanger 7 is reduced.
On the other hand, another embodiment of the utility model also provides a water cooling method for a polysilicon reduction furnace, when the reduction furnace is operated, the water cooling system for the polysilicon reduction furnace is used, and the method comprises the following steps:
(1) Closing the third valve 16, the fourth valve 17, the fifth valve 21 and the sixth valve 22, and opening the first valve 4 and the second valve 5;
(2) The water in the flash tank 1 enters a reduction furnace bell jacket 14 through a first water inlet pipe 2, and then returns to the flash tank 1 through a first water return pipe 3, so that the heat of the reduction furnace bell is transferred to the flash tank 1;
(3) The water in the first water tank 6 enters the electrode 23 jacket through the second water inlet pipe 8, and then returns to the first water tank 6 through the second water return pipe 10, and in the process, the water in the first water tank 6 is cooled through the first heat exchanger 7.
In the embodiment, specifically, when the reduction furnace is operated, the cooling of the reduction furnace bell jar and the cooling of the electrode 23 are respectively and independently operated, and the heat of the reduction furnace bell jar is recycled by the flash tank 1, so that the comprehensive utilization of energy is ensured; after the third valve 16, the fourth valve 17, the fifth valve 21 and the sixth valve 22 are closed, the high-temperature water in the bell jacket 14 of the reduction furnace cannot flow into the second water tank 11 in series, so that the high-temperature water heat is guaranteed to be efficiently recycled by the flash tank 1.
On the other hand, another embodiment of the utility model also provides a water cooling method for a polysilicon reduction furnace, when the reduction furnace is shut down, the water cooling system for the polysilicon reduction furnace is used, and the method comprises the following steps:
(1) Closing the first valve 4 and the second valve 5, opening the third valve 16, the fourth valve 17, and simultaneously opening one of the fifth valve 21 and the sixth valve 22;
(2) The water in the second water tank 11 enters the bell jacket 14 of the reduction furnace through the third water inlet pipe 13 and then returns to the second water tank 11 through the third water return pipe 15;
(3) The water in the first water tank 6 enters the electrode 23 jacket through the second water inlet pipe 8 and then returns to the first water tank 6 through the second water return pipe 10, and in the process, the water in the second water inlet pipe 8 or the second water return pipe 10 flows to the second space of the second heat exchanger 12 to take away the heat of the water in the first space of the second heat exchanger 12.
In this embodiment, specifically, the water in the second water inlet pipe 8 or the second water return pipe 10 flows into the second space of the second heat exchanger 12, so as to take away the heat of the water in the first space of the second heat exchanger 12, and pull down the temperature of the water in the first space of the second heat exchanger 12, so that the water entering the jacket 14 of the reduction furnace bell is kept at a lower temperature, and the heat of the reduction furnace bell is taken away efficiently.
In a specific embodiment, in the step (1), the first stage of furnace shutdown is performed when the sixth valve 22 is opened and the fifth valve 21 is closed; the second stage of the furnace shutdown is when the fifth valve 21 is opened and the sixth valve 22 is closed.
In this embodiment, specifically, in the first stage of furnace shutdown, the temperature of the reduction furnace bell jar is higher, the water flowing through the jacket of the electrode 23 receives the heat of the electrode 23 to raise the temperature, and then enters the second space of the second heat exchanger 12, and at this time, the water temperature in the first space of the second heat exchanger 12 is pulled down to a relatively small extent, so that the water temperature in the reduction furnace bell jar jacket 14 is kept at 110-150 ℃, the water temperature entering the reduction furnace bell jar jacket 14 and the silicon rod temperature in the reduction furnace are prevented from being greatly different, the silicon rod is prevented from being cooled too fast to damage the crystal structure, and the material collapse is prevented;
In the second stage of furnace shutdown, the temperature of the silicon rod is reduced greatly, the water in the second water inlet pipe 8 is not required to receive the heat of the electrode 23 to raise the temperature, directly enters the second space of the second heat exchanger 12, and pulls down the water temperature in the first space of the second heat exchanger 12, so that the temperature difference between the water in the bell jacket 14 of the reduction furnace and the silicon rod in the bell jacket does not exceed the design requirement, the crystal structure of the silicon rod is prevented from being damaged, and finally, the temperature of the silicon rod reaches the rod disassembly temperature when the reduction furnace is disassembled.
In specific embodiments, the first stage of the furnace shutdown is terminated when the duration of the first stage of the furnace shutdown is 3.5-4.5 hours, or when the temperature in the bell jar of the reduction furnace is reduced to between 150 and 250 ℃.
In this embodiment, specifically, the automatic stop is started, and at the end of the first stage of the shutdown (over 3.5 to 4.5 hours), the temperature (150 to 250 ℃) in the reduction furnace bell reaches the timing at which the seventh valve 27 and the eighth valve 28 can be switched, so that the first stage of the shutdown enters the second stage of the shutdown.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (4)
1. A water cooling system for a polycrystalline silicon reduction furnace, comprising:
The flash evaporation part comprises a flash evaporation tank, a first water inlet pipe and a first water return pipe, one end of the first water inlet pipe is connected to the lower end of the flash evaporation tank, the other end of the first water inlet pipe is connected to the lower end inlet of a reduction furnace bell jacket, one end of the first water return pipe is connected to the upper end outlet of the reduction furnace bell jacket, the other end of the first water return pipe is connected to the upper end of the flash evaporation tank, the first water inlet pipe is provided with a first valve, and the first water return pipe (3) is provided with a second valve;
The electrode cooling part comprises a first water tank and a first heat exchanger, the lower end of the first water tank is connected with one end of a second water inlet pipe, the other end of the second water inlet pipe is connected with an electrode jacket inlet, the second water inlet pipe is communicated with the first heat exchanger, an electrode jacket outlet is connected with one end of a second water return pipe, and the other end of the second water return pipe is connected with the upper end of the first water tank;
The bell jar cooling part comprises a second water tank and a second heat exchanger, the lower end of the second water tank is connected with one end of a third water inlet pipe, the other end of the third water inlet pipe is connected with the lower end inlet of a reduction furnace bell jar jacket, the third water inlet pipe is communicated with a first space of the second heat exchanger, the upper end outlet of the reduction furnace bell jar jacket is connected with one end of a third water return pipe, the other end of the third water return pipe is connected with the upper end of the second water tank, a third valve is arranged on the third water inlet pipe, and a fourth valve is arranged on the third water return pipe;
The second water inlet pipe is connected to an inlet of a second space of the second heat exchanger through a first connecting pipe, the second water return pipe is connected to an inlet of the second space of the second heat exchanger through a second connecting pipe, an outlet of the second space of the second heat exchanger is connected to the upper end of the first water tank through a fourth water return pipe, a fifth valve is installed on the first connecting pipe, and a sixth valve is installed on the second connecting pipe.
2. The water cooling system of the polysilicon reduction furnace according to claim 1, wherein,
Still include first water pump, second water pump and third water pump, first water pump install in first inlet tube, the second water pump install in the second inlet tube, the third water pump install in the third inlet tube.
3. The water cooling system of the polysilicon reduction furnace according to claim 1, wherein,
The device also comprises a seventh valve and an eighth valve, wherein the seventh valve is arranged at the inlet of the lower end of the reduction furnace bell jacket, and the eighth valve is arranged at the outlet of the upper end of the reduction furnace bell jacket.
4. The water cooling system of the polysilicon reduction furnace according to claim 1, wherein,
The circulating cooling water pipe is communicated with the second space of the first heat exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322494523.3U CN220892917U (en) | 2023-09-14 | 2023-09-14 | Water cooling system of polysilicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322494523.3U CN220892917U (en) | 2023-09-14 | 2023-09-14 | Water cooling system of polysilicon reduction furnace |
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| Publication Number | Publication Date |
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| CN220892917U true CN220892917U (en) | 2024-05-03 |
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| CN202322494523.3U Active CN220892917U (en) | 2023-09-14 | 2023-09-14 | Water cooling system of polysilicon reduction furnace |
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| CN (1) | CN220892917U (en) |
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2023
- 2023-09-14 CN CN202322494523.3U patent/CN220892917U/en active Active
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