CN219137000U

CN219137000U - Cooling water circulation system of Czochralski crystal growing furnace

Info

Publication number: CN219137000U
Application number: CN202223501928.7U
Authority: CN
Inventors: 卢亮; 鞠贵冬; 李煜川; 黄晶晶; 唐姊瑀
Original assignee: Jiangsu Shuangliang Cooling System Co ltd; Shuangliang Eco Energy Systems Co Ltd
Current assignee: Jiangsu Shuangliang Cooling System Co ltd; Shuangliang Eco Energy Systems Co Ltd
Priority date: 2022-12-27
Filing date: 2022-12-27
Publication date: 2023-06-06
Anticipated expiration: 2032-12-27

Abstract

The utility model provides a cooling water circulation system of a Czochralski single crystal furnace, which is installed in combination with a Czochralski single crystal furnace component, wherein the Czochralski single crystal furnace component comprises a furnace bottom, an auxiliary chamber, a main chamber upper part, a main chamber lower part, an isolation valve, a power cabinet, a water cooling screen and a pump, and the cooling water circulation system of the Czochralski single crystal furnace comprises a first pipeline and a second pipeline; the first pipeline is closely attached to the furnace bottom, the auxiliary chamber, the upper part of the main chamber, the lower part of the main chamber and the isolation valve in series, and comprises a first cooling tower and a first reservoir; the second pipeline is connected in series and clings to the power cabinet, the water cooling screen and the pump, and comprises a second cooling tower and a second reservoir. The cooling water circulation system of the Czochralski crystal growing furnace has better water saving effect.

Description

Cooling water circulation system of Czochralski crystal growing furnace

Technical Field

The utility model relates to the technical field related to a Czochralski single crystal furnace, in particular to a cooling water circulation system of the Czochralski single crystal furnace.

Background

Photovoltaic power generation is an important new energy utilization mode, and has the advantages of high efficiency and low cost compared with wind energy, tidal energy and the like. At present, photovoltaic power generation is generally carried out by adopting a photovoltaic cell, and an important substrate in the process of manufacturing the photovoltaic cell when monocrystalline silicon is adopted. The main method for manufacturing single crystal silicon in the prior art is a Czochralski method, which is carried out in a Czochralski single crystal furnace, a piece of single crystal silicon with a required crystal orientation is used as a seed crystal, the melted semiconductor grade silicon solution is used for growing the silicon single crystal on the seed crystal, the grown silicon single crystal is just like a replica of the seed crystal, the silicon single crystal has the crystal orientation identical to that of the seed crystal, and the silicon single crystal rod is a terminal product formed by the Czochralski silicon single crystal method.

The Czochralski single crystal furnace needs to be cooled in the use process, and is generally realized by a cooling water circulation system. The existing cooling water circulation system mostly adopts a single-way water inlet to reach a cooling area, and circulates from a water outlet to a water inlet after cooling. The water consumption is larger in the working process of the cooling water circulation system, and partial water evaporation loss exists in the cooling link, so that the water consumption is further increased. In order to save water resources, especially in areas where water resources are scarce, it is necessary to save water as much as possible during the operation of the cooling water circulation system.

At present, for saving water, the water flow is generally controlled, but the water flow is limited by the safety of a furnace body, the influence of thermal field power and the like, the descending amplitude of the water flow is limited, the evaporation loss condition cannot be effectively improved, and the water saving effect is not ideal. In addition, the existing cooling water circulation system is high in setting cost and use cost. It can be seen that there is a need in the art for improvements to the existing cooling water circulation systems of czochralski crystal growing furnaces to enhance water conservation while reducing costs.

Disclosure of Invention

Therefore, the utility model aims to provide a cooling water circulation system of a Czochralski crystal growing furnace, which comprises two waterways respectively connected with different areas of the furnace body, and is used for respectively delivering water for cooling according to cooling requirements so as to effectively save water and reduce cost.

In order to achieve the above purpose, the utility model provides a cooling water circulation system of a Czochralski single crystal furnace, which is installed in combination with a Czochralski single crystal furnace component, wherein the Czochralski single crystal furnace component comprises a furnace bottom, an auxiliary chamber, a main chamber upper part, a main chamber lower part, an isolation valve, a power cabinet, a water cooling screen and a pump, and the cooling water circulation system of the Czochralski single crystal furnace comprises a first pipeline and a second pipeline; the first pipeline is closely attached to the furnace bottom, the auxiliary chamber, the upper part of the main chamber, the lower part of the main chamber and the isolation valve in series, and comprises a first cooling tower and a first reservoir; the second pipeline is connected in series and clings to the power cabinet, the water cooling screen and the pump, and comprises a second cooling tower and a second reservoir.

Preferably, the first cooling tower is a combined wet and dry cooling tower.

Preferably, the water temperature after cooling of the first cooling tower is 25-35 ℃.

Preferably, the second cooling tower is an air cooling tower.

Preferably, the water temperature after cooling of the second cooling tower is 35-60 ℃.

Preferably, the first reservoir and the second reservoir are the same reservoir.

Compared with the prior art, the cooling water circulation system of the Czochralski crystal growing furnace has the advantages that: the cooling water circulation system of the Czochralski crystal growing furnace is respectively connected with different areas of the furnace body through two waterways, and is controlled in a differentiated way, so that the heat exchange quantity of cold and hot water can be effectively reduced, the starting time of spraying of a dry-wet combined cooling tower is reduced, the water consumption generated by evaporation is reduced, and the water-saving effect is better; the air cooling tower can replace part of functions of the dry-wet combined cooling tower, thereby being beneficial to reducing the cost.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of a cooling water circulation system of a Czochralski crystal growing furnace.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1, a cooling water circulation system of a czochralski crystal growing furnace is installed in combination with a czochralski crystal growing furnace assembly, which comprises a furnace bottom 31, an auxiliary chamber 32, a main chamber upper part 33, a main chamber lower part 34, an isolation valve 35, a power cabinet 36, a water cooling screen 37 and a pump 38. The cooling water circulation system of the Czochralski crystal growing furnace comprises a first pipeline 1 and a second pipeline 2. The first pipe 1 is in series closely to the furnace floor 31, the auxiliary chamber 32, the main chamber upper portion 33, the main chamber lower portion 34, and the isolation valve 35, and the first pipe 1 includes the first cooling tower 11 and the first water reservoir 12. The second conduit 2 is in series against the power supply cabinet 36, the water cooling screen 37 and the pump 38, and the second conduit 2 includes the second cooling tower 21 and the second reservoir 22. The first pipeline 1 and the second pipeline 2 are respectively connected with different areas of the furnace body, and are respectively cooled by water according to cooling requirements, so that water is effectively saved and the cost is reduced.

Specifically, the first cooling tower 11 is a combined dry and wet cooling tower. The cooling water in the first pipeline 1 is cooled by the first cooling tower 11, and the water temperature after the cooling of the first cooling tower 11 is 25-35 ℃. The cooling volume of the first cooling tower is 50% -90% of that of the original single-pipeline condition.

The second cooling tower 21 is an air cooling tower. The cooling water in the second pipeline 2 is cooled by the second cooling tower 21, and the water temperature after cooling by the second cooling tower 21 is 35-60 ℃. Specifically, the second cooling tower 21 is a variable frequency air cooling controlled cooling tower.

The single crystal furnace component corresponding to the first pipeline 1 has more strict requirements on water temperature and water flow control and higher safety risk, so that the dry-wet combined cooling tower is adopted.

The first reservoir 12 and the second reservoir 22 may be the same reservoir.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The cooling water circulation system of the Czochralski single crystal furnace is installed in combination with a Czochralski single crystal furnace component, and the Czochralski single crystal furnace component comprises a furnace bottom, an auxiliary chamber, a main chamber upper part, a main chamber lower part, an isolation valve, a power cabinet, a water cooling screen and a pump, and is characterized in that the cooling water circulation system of the Czochralski single crystal furnace comprises a first pipeline and a second pipeline; the first pipeline is closely attached to the furnace bottom, the auxiliary chamber, the upper part of the main chamber, the lower part of the main chamber and the isolation valve in series, and comprises a first cooling tower and a first reservoir; the second pipeline is connected in series and clings to the power cabinet, the water cooling screen and the pump, and comprises a second cooling tower and a second reservoir.

2. The czochralski crystal growing furnace cooling water circulation system of claim 1, wherein the first cooling tower is a combined dry and wet cooling tower.

3. The cooling water circulation system of the czochralski crystal growing furnace of claim 2, wherein the water temperature after cooling of the first cooling tower is 25-35 ℃.

4. The czochralski crystal growing furnace cooling water circulation system of claim 1, wherein the second cooling tower is an air cooling tower.

5. The cooling water circulation system of the Czochralski crystal growing furnace of claim 4, wherein the water temperature after cooling of the second cooling tower is 35-60 ℃.

6. The czochralski crystal growing furnace cooling water circulation system of claim 1, wherein the first reservoir and the second reservoir are the same reservoir.