CN220884174U - Wafer storage box transfer car body - Google Patents
Wafer storage box transfer car body Download PDFInfo
- Publication number
- CN220884174U CN220884174U CN202322505517.3U CN202322505517U CN220884174U CN 220884174 U CN220884174 U CN 220884174U CN 202322505517 U CN202322505517 U CN 202322505517U CN 220884174 U CN220884174 U CN 220884174U
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- carrier plate
- storage box
- mounting hole
- guide wheel
- fixed
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- 238000003860 storage Methods 0.000 title claims abstract description 21
- 230000000712 assembly Effects 0.000 claims abstract description 4
- 238000000429 assembly Methods 0.000 claims abstract description 4
- 238000005096 rolling process Methods 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer storage box transfer vehicle body, which comprises: the vehicle seat chassis is fixedly provided with an electric cabinet above, one side of the vehicle seat chassis is fixedly provided with a mounting frame, two guide rail frames are vertically and symmetrically arranged on the mounting frame, a carrying mechanism is arranged on the guide rail frames in a sliding mode, a driving rod is arranged on the mounting frame, and the telescopic end of the driving rod is connected with the carrying mechanism; the carrying mechanism comprises: the carrier plate is provided with a plurality of rollers which are arranged up and down, each roller can be embedded in the carrier plate in a relatively rolling way, the carrier plate is provided with a plurality of mounting holes which are horizontally and longitudinally arranged and distributed, and the mounting holes are internally provided with transfer wheel assemblies in a rotating way; the mounting hole sites which are horizontally and longitudinally arranged are distributed in a staggered manner, so that adjacent mounting hole sites are distributed in a cross shape.
Description
Technical Field
The utility model belongs to the technical field of wafer box storage, and particularly relates to a wafer box transfer vehicle body.
Background
Wafer cassette transfer is a critical step in the semiconductor manufacturing process, and requires high stability and accuracy to ensure the quality and performance of the final chip, at present, a special transfer vehicle and a carrier are usually used when the wafer cassette is transferred, and although the transfer vehicle in the prior art can take and place from the bottom of the wafer cassette through a carrier plate, unexpected situations usually occur in the process, such as unstable taking of the wafer cassette, failure of positioning the center of the wafer cassette on the carrier plate, and the like, which result in unexpected dropping of the wafer cassette. Therefore, it is necessary to provide a wafer cassette transport vehicle body to solve the above-mentioned problems in the prior art.
Disclosure of utility model
In order to achieve the above purpose, the present utility model provides the following technical solutions: a wafer cassette transfer vehicle body, comprising: the vehicle seat chassis is fixedly provided with an electric cabinet above, one side of the vehicle seat chassis is fixedly provided with a mounting frame, two guide rail frames are vertically and symmetrically arranged on the mounting frame, a carrying mechanism is arranged on the guide rail frames in a sliding mode, a driving rod is arranged on the mounting frame, and the telescopic end of the driving rod is connected with the carrying mechanism;
The carrying mechanism comprises: the carrier plate is provided with a plurality of rollers which are arranged up and down, each roller can be embedded in the carrier plate in a relatively rolling way, the carrier plate is provided with a plurality of mounting holes which are horizontally and longitudinally arranged and distributed, and the mounting holes are internally provided with transfer wheel assemblies in a rotating way;
the mounting hole sites which are horizontally and longitudinally arranged are staggered, so that adjacent mounting hole sites are distributed in a cross shape;
the transfer wheel assembly includes:
The guide wheel is rotatably arranged in the mounting hole site;
the fixing frames are vertically fixed below the carrier plate left and right, a connecting rod is rotatably arranged between the fixing frames through a bearing, and a plurality of bevel gears are fixed on the connecting rod;
The double-end gears are vertically and rotatably arranged on the carrier plate and positioned below the guide wheels, the lower ends of the double-end gears are meshed with the bevel gears for transmission, driven teeth are coaxially fixed on one sides of the guide wheels, and the driven teeth are meshed with the upper ends of the double-end gears for transmission;
the control motor is fixed on the carrier plate, and the output end of the control motor is fixed with the link rod;
The middle part of the guide wheel is provided with an annular cavity, a plurality of inner cavities are circumferentially arranged in the guide wheel, the inner cavities are communicated with the annular cavity, a plunger rod is slidably arranged in the inner cavities, and a supporting piece is fixed at one end of the plunger rod; the rubber ring is sleeved outside the guide wheel, and the supporting piece is propped against and contacted with the rubber ring.
Further, preferably, the guide wheels arranged in the horizontal and vertical directions can synchronously rotate in the forward and reverse directions.
Further, preferably, the guide wheel controls the wafer storage box to carry out straight line, oblique line or steering transportation in a rotating fit.
Further, preferably, an air flow cover is coaxially and rotatably arranged on one side of the guide wheel, the air flow cover is in sealing connection with the annular cavity, and an air pipe is connected outside the air flow cover.
Further preferably, the support member can be elastically expanded by the rubber ring under the synchronous driving of the plunger rod, so that the bottom of the wafer storage box on the carrier plate can be correspondingly lifted.
Compared with the prior art, the utility model has the beneficial effects that:
According to the utility model, the wafer storage box is mainly taken and placed through the loading plate, and the transfer wheel assembly can control the wafer storage box to carry out multidirectional transportation through the guide wheels which are horizontally and longitudinally arranged, so that the safety is high.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of a carrying mechanism according to the present utility model;
FIG. 3 is a schematic view of a transfer wheel assembly according to the present utility model;
FIG. 4 is a schematic view of the structure of the airflow hood according to the present utility model;
FIG. 5 is a schematic view of a guide wheel according to the present utility model;
In the figure: 1. a saddle chassis; 11. an electric control box; 2. a mounting frame; 21. a guide rail frame; 22. a driving rod; 3. a loading mechanism; 31. a carrier plate; 32. installing hole sites; 33. a roller; 4. a transfer wheel assembly; 41. a guide wheel; 42. a fixing frame; 43. a link rod; 44. a bevel gear; 45. double-ended gears; 46. an airflow cover; 47. an air pipe; 5. an inner cavity; 51. a plunger rod; 52. a support member; 53. a rubber ring.
Detailed Description
Referring to fig. 1-5, in an embodiment of the present utility model, a wafer cassette transport vehicle body includes: the vehicle seat comprises a vehicle seat chassis 1, an electric cabinet 11 is fixed above the vehicle seat chassis 1, a mounting frame 2 is fixed on one side of the vehicle seat chassis 1, two guide rail frames 21 are vertically and symmetrically arranged on the mounting frame 2, a carrying mechanism 3 is slidably arranged on the guide rail frames 21, a driving rod 22 is arranged on the mounting frame 2, and the telescopic end of the driving rod 22 is connected with the carrying mechanism 3; the vertical displacement adjustment of the object carrying mechanism is controlled;
The carrying mechanism 3 includes: the carrier plate 31 is provided with a plurality of rollers 33 which are arranged up and down, each roller 33 can be embedded in the carrier plate 31 in a relatively rolling way, the carrier plate 31 is provided with a plurality of mounting hole sites 32 which are arranged horizontally and longitudinally, and the mounting hole sites 32 are internally provided with transfer wheel assemblies 4 in a rotating way;
the mounting hole sites 32 which are horizontally and longitudinally arranged are staggered, so that adjacent mounting hole sites 32 are distributed in a cross shape;
The transfer wheel assembly 4 comprises:
The guide wheel 41 is rotatably arranged in the mounting hole site 32;
The fixing frames 42 are vertically fixed below the carrier plate 31 from left to right, a connecting rod 43 is rotatably arranged between the fixing frames 42 through a bearing, and a plurality of bevel gears 44 are fixed on the connecting rod 43;
The double-headed gears 45 are vertically and rotatably arranged on the carrier plate 31 and positioned below the guide wheels 41, the lower ends of the double-headed gears 45 are meshed with the bevel gears 44 for transmission, driven teeth are coaxially fixed on one side of the guide wheels 41, and the driven teeth are meshed with the upper ends of the double-headed gears 45 for transmission;
A control motor fixed on the carrier plate 31, wherein the output end of the control motor is fixed with the link rod 43; so that the guide wheels in the same row or column can synchronously rotate;
The middle part of the guide wheel 41 is provided with an annular cavity, a plurality of inner cavities 5 are circumferentially arranged in the guide wheel 41, the inner cavities 5 are communicated with the annular cavity, a plunger rod 51 is slidably arranged in the inner cavities 5, and a supporting piece 52 is fixed at one end of the plunger rod 51; the guide wheel 41 is sleeved with a rubber ring 53, and the supporting piece 52 is abutted against and contacted with the rubber ring 53, so that radial expansion of the rubber ring is realized.
In this embodiment, the guide wheels 41 arranged in the transverse and longitudinal directions can synchronously rotate in the forward and reverse directions.
As a preferred embodiment, the guide wheels 41 control the wafer storage box to perform linear, oblique or turning transportation in a rotating fit, and each guide wheel arranged transversely or longitudinally can synchronously rotate in the same direction during linear transportation, so that the wafer storage box performs transverse displacement and longitudinal displacement; in oblique line transportation, transversely arranged guide wheels synchronously rotate in cooperation with longitudinally arranged guide wheels, and the wafer storage box performs oblique line transportation; in the steering transportation, the guide wheels which are distributed left and right (or are distributed front and back) below the wafer storage box can synchronously rotate reversely, and the wafer storage box is steered and transported.
In this embodiment, an air flow cover 46 is coaxially and rotatably disposed on one side of the guide wheel 41, the air flow cover 46 is in sealing connection with the annular cavity, and an air pipe 47 is connected to the outside of the air flow cover 46, so as to realize elastic deformation adjustment of rubber rings on the guide wheels.
In this embodiment, the supporting member 52 can elastically expand the rubber ring under the synchronous driving of the plunger rod 51, so that the bottom of the wafer storage box on the carrier plate 31 can be correspondingly lifted, especially in transportation, and the bottom of the wafer storage box is separated from the carrier plate under the elastic expansion of the rubber ring on each guide wheel, so as to improve transportation flexibility.
Specifically, in the process of carrying the wafer storage box through the carrier plate, the guide wheel on the carrier plate can drive the wafer storage box to carry out straight line, oblique line or steering transportation under the cooperation rotation according to the transportation direction, and the wafer storage box has higher controllability and high transportation precision.
The foregoing description is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical solution of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (5)
1. The utility model provides a wafer storage box transfer automobile body which characterized in that: it comprises the following steps: the vehicle seat chassis (1) is fixedly provided with an electric cabinet (11) above, one side of the vehicle seat chassis (1) is fixedly provided with a mounting frame (2), two guide rail frames (21) are vertically and symmetrically arranged on the mounting frame (2), a carrying mechanism (3) is slidably arranged on the guide rail frames (21), a driving rod (22) is arranged on the mounting frame (2), and the telescopic end of the driving rod (22) is connected with the carrying mechanism (3);
The carrying mechanism (3) comprises: the carrier plate (31) is provided with a plurality of rollers (33) which are arranged up and down, each roller (33) can be embedded into the carrier plate (31) in a relatively rolling way, the carrier plate (31) is provided with a plurality of mounting hole sites (32) which are horizontally and longitudinally arranged and distributed, and the mounting hole sites (32) are internally provided with transfer wheel assemblies (4) in a rotating way;
The mounting hole sites (32) which are horizontally and longitudinally arranged are staggered, so that adjacent mounting hole sites (32) are in cross arrangement;
The transfer wheel assembly (4) comprises:
the guide wheel (41) is rotatably arranged in the mounting hole site (32);
The fixing frames (42) are vertically fixed below the carrier plates (31) left and right, connecting rods (43) are rotatably arranged between the fixing frames (42) through bearings, and a plurality of bevel gears (44) are fixed on the connecting rods (43);
The double-end gears (45) are vertically and rotatably arranged on the carrier plate (31) and positioned below the guide wheels (41), the lower ends of the double-end gears (45) are meshed with the bevel gears (44) for transmission, driven teeth are coaxially fixed on one sides of the guide wheels (41), and the driven teeth are meshed with the upper ends of the double-end gears (45) for transmission;
The control motor is fixed on the carrier plate (31), and the output end of the control motor is fixed with the connecting rod (43);
The middle part of the guide wheel (41) is provided with an annular cavity, a plurality of inner cavities (5) are circumferentially arranged in the guide wheel (41), the inner cavities (5) are communicated with the annular cavity, a plunger rod (51) is slidably arranged in the inner cavities (5), and a supporting piece (52) is fixed at one end of the plunger rod (51); the rubber ring (53) is sleeved outside the guide wheel (41), and the supporting piece (52) is abutted against and contacted with the rubber ring (53).
2. The wafer cassette transport vehicle of claim 1, wherein: the guide wheels (41) arranged horizontally and vertically can synchronously rotate in the forward and reverse directions.
3. The wafer cassette transport vehicle of claim 1, wherein: the guide wheel (41) controls the wafer storage box to carry out straight line, oblique line or steering transportation in the rotating fit.
4. The wafer cassette transport vehicle of claim 1, wherein: one side of the guide wheel (41) is coaxially and rotatably provided with an air flow cover (46), the air flow cover (46) is in sealing connection with the annular cavity, and an air pipe (47) is connected outside the air flow cover (46).
5. The wafer cassette transport vehicle of claim 1, wherein: the supporting piece (52) can elastically expand the rubber ring under the synchronous driving of the plunger rod (51) so that the bottom of the wafer storage box on the carrier plate (31) can be correspondingly lifted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322505517.3U CN220884174U (en) | 2023-09-15 | 2023-09-15 | Wafer storage box transfer car body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322505517.3U CN220884174U (en) | 2023-09-15 | 2023-09-15 | Wafer storage box transfer car body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220884174U true CN220884174U (en) | 2024-05-03 |
Family
ID=90876580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322505517.3U Active CN220884174U (en) | 2023-09-15 | 2023-09-15 | Wafer storage box transfer car body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220884174U (en) |
-
2023
- 2023-09-15 CN CN202322505517.3U patent/CN220884174U/en active Active
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