CN220878327U - Reaction device of waste gas treatment equipment and waste gas treatment equipment - Google Patents

Abstract

The utility model provides a reaction device of waste gas treatment equipment and waste gas treatment equipment, comprising a reaction cavity and a turbulence assembly, wherein the turbulence assembly comprises a support piece and a turbulence piece, the turbulence piece is arranged on the support piece, the reaction cavity is provided with an air inlet, the support piece is arranged on the air inlet, the turbulence piece is positioned in at least one of the interior of the reaction cavity and the air inlet, after waste gas passes through the turbulence piece, the turbulence kinetic energy of the waste gas is increased, the turbulence degree of a flow field in the reaction cavity is improved, the waste gas heat exchange in the reaction cavity is increased, the temperature distribution non-uniformity of the waste gas is reduced, the temperature difference is reduced, the problem of non-uniform temperature distribution in the reaction cavity is solved, and the reaction efficiency of the waste gas in the reaction cavity is improved; the turbulence degree of the flow field in the reaction cavity is improved, the flow speed of waste gas close to the inner wall surface of the reaction cavity is increased, and the problem that dust in the waste gas is easily adsorbed on the inner wall surface and accumulated due to stable air flow in the reaction cavity is solved.

Description

Reaction device of waste gas treatment equipment and waste gas treatment equipment

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a reaction device of waste gas treatment equipment and the waste gas treatment equipment.

Background

In the semiconductor industry, exhaust gas treatment devices are used to treat exhaust gases generated by wafer processing, and through chemical reactions, reduce the emission of harmful gases. The exhaust gas treatment amount per unit time is a key factor for evaluating the quality of an exhaust gas treatment apparatus. The influence factors of the treatment amount of the waste gas in unit time are represented by the residence time of the waste gas in the reaction cavity, whether the reaction is sufficient or not and whether the equipment is stable or not.

When the waste gas treatment equipment is used for treating waste gas, the waste gas directly enters the reaction cavity through the connecting pipe, the electric heating rod is used for heating the waste gas introduced into the reaction cavity, and in the reaction cavity, the electric heating rod needs to be set at a higher temperature to ensure that the temperature of the waste gas far away from the electric heating rod reaches the reaction temperature, so that the problem of energy waste exists; when waste gas flows through the reaction cavity through the connecting pipe, the air flow in the reaction cavity is stable, dust in the waste gas is easy to adsorb on the surface of the inner wall, and dust accumulation is caused.

Disclosure of utility model

The utility model provides a reaction device of waste gas treatment equipment, which is used for solving one of the problems existing in the prior art and realizing the improvement of the reaction efficiency of waste gas in a reaction cavity; the energy consumption of the equipment is reduced; dust accumulation on the surface of the inner wall of the reaction cavity is avoided; reducing the noise of the equipment.

The utility model provides a reaction device of waste gas treatment equipment, which comprises a reaction cavity and a turbulent flow component, wherein the turbulent flow component comprises a supporting piece and a turbulent flow piece, the turbulent flow piece is arranged on the supporting piece, the reaction cavity is provided with an air inlet, the supporting piece is arranged on the air inlet, and the turbulent flow piece is positioned in at least one of the inside of the reaction cavity and the air inlet.

According to one embodiment of the present utility model, the spoiler comprises a first rotating shaft and a first spoiler, wherein two ends of the first rotating shaft are rotatably connected with the supporting member, the first spoiler is disposed on the first rotating shaft, and an axial direction of the first rotating shaft is coplanar with a plane where the first spoiler is located, so that a ventilation area of the air inlet is changed during the overturning process of the first spoiler.

According to one embodiment of the present utility model, the first spoiler is an elliptical plate, and the long diameter of the first spoiler is disposed along the axial direction of the first rotating shaft.

According to one embodiment of the present utility model, the turbulence member includes a flow dividing portion and a plurality of turbulence blades, the flow dividing portion is connected to the support member, an axial direction of the flow dividing portion is set along an air intake direction of the air inlet, the turbulence blades are located inside the reaction chamber, and the plurality of turbulence blades are uniformly disposed around the axial direction of the flow dividing portion and connected to the flow dividing portion.

According to one embodiment of the utility model, the turbulence blades are curved in an arc shape from the flow dividing part to the side wall direction of the reaction cavity.

According to one embodiment of the present utility model, the flow dividing part includes a first flow dividing ring and a second flow dividing ring, the second flow dividing ring is connected to the supporting member through the first flow dividing ring, the inner diameter of the second flow dividing ring gradually increases along the air intake direction of the air intake, and the turbulence blades are disposed on the outer circumferential surface of the second flow dividing ring.

According to one embodiment of the utility model, the first diverter ring is connected to the support by a plurality of connection plates, which are evenly distributed around the first diverter ring.

According to an embodiment of the present utility model, the spoiler further includes a second rotating shaft and a second spoiler, two ends of the second rotating shaft are rotatably connected with the inner peripheral surface of the first diverter ring, the second spoiler is disposed on the second rotating shaft, and an axial direction of the second rotating shaft is coplanar with a plane where the second spoiler is located, so as to change a ventilation area of the first diverter ring in a overturning process of the second spoiler.

According to one embodiment of the present utility model, the second spoiler is an elliptical plate, and the long diameter of the second spoiler is disposed along the axial direction of the second rotating shaft.

The present utility model also provides an exhaust gas treatment apparatus comprising: a reaction device of an exhaust gas treatment apparatus as claimed in any one of the above.

According to the reaction device of the waste gas treatment equipment, the reaction cavity is provided with the air inlet, the air inlet is provided with the supporting piece, the supporting piece is provided with the turbulence piece, the turbulence piece is fixed at the air inlet of the reaction device through the supporting piece, external waste gas enters the reaction cavity from the air inlet, flows through the supporting piece and the turbulence piece firstly, and then enters the whole reaction cavity to be filled. After the waste gas passes through the turbulence piece, the turbulent kinetic energy of the waste gas is increased, and the turbulent flow of the waste gas is generated in the reaction cavity, so that the turbulence degree of the flow field in the reaction cavity is improved.

It can be understood that the temperature of the waste gas in the reaction cavity, which is close to the heating component, is higher, the temperature of the waste gas, which is far away from the heating component, is lower, and the waste gas with different temperatures in the reaction cavity is mixed through the chaotic flow of the waste gas, so that the heat exchange of the waste gas in the reaction cavity is increased, the non-uniformity of the temperature distribution of the waste gas is reduced, the temperature difference is reduced, the problems that the temperature distribution in the reaction cavity is non-uniform, the temperature of the waste gas, which is close to the heating component, is higher, and the temperature of the waste gas, which is far away from the heating component, is lower are solved, and the reaction efficiency of the waste gas in the reaction cavity is improved; and because the turbulence degree of the waste gas in the reaction cavity is increased, the flow line of the waste gas in the reaction cavity is increased, so that the residence time of the waste gas in the reaction cavity is prolonged, the reaction time of the waste gas is prolonged, the waste gas is enabled to react more fully in the reaction cavity, and the reaction efficiency of the waste gas in the reaction cavity is further improved. And through the chaotic flow of the waste gas, when the temperature of all waste gas in the reaction cavity reaches the reaction temperature, the required set temperature of the heating part is lower, the problem of energy waste is solved, and the energy consumption of equipment is reduced. The turbulence degree of the flow field inside the reaction cavity is improved, the flow speed of waste gas close to the upper surface of the inner wall surface of the reaction cavity is increased, dust in the waste gas is easily adsorbed on the inner wall surface when the inner air flow of the reaction cavity is stable is avoided, the problem of dust accumulation is caused, the service life of equipment is prolonged, and meanwhile, the number of scraper mechanisms required for cleaning the dust attached to the inner wall surface of the reaction cavity is reduced by reducing dust accumulation, so that noise caused by the operation of the scraper mechanisms is reduced.

In addition to the technical problems, features of the constituent technical solutions and advantages brought by the technical features of the technical solutions described above, other technical features of the present utility model and advantages brought by the technical features of the technical solutions will be further described with reference to the accompanying drawings or will be understood through practice of the present utility model.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic structural view of a reaction device of an exhaust gas treatment apparatus according to the present utility model;

FIG. 2 is a top view of a reaction device of an exhaust gas treatment apparatus provided by the present utility model;

FIG. 3 is a cross-sectional view of a reaction device of an exhaust gas treatment apparatus provided by the present utility model;

FIG. 4 is a second schematic structural view of a reaction device of an exhaust gas treatment apparatus according to the present utility model;

FIG. 5 is a third schematic diagram of a reaction apparatus of an exhaust treatment device according to the present utility model;

FIG. 6 is a schematic view of an exhaust gas treatment device according to the present utility model;

fig. 7 is an enlarged view of a portion a of fig. 6.

Reference numerals:

100. a reaction chamber; 110. an air inlet;

200. A spoiler assembly; 210. a support; 220. a spoiler; 230. a connecting plate; 221. a first rotating shaft; 222. a first spoiler; 223. a split flow section; 224. turbulence blades; 225. a first shunt ring; 226. a second split ring; 227. a second rotating shaft; 228. and the second spoiler.

Detailed Description

Embodiments of the present utility model are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the utility model but are not intended to limit the scope of the utility model.

In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.

In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

Furthermore, in the description of the embodiments of the present utility model, unless otherwise indicated, the meaning of "a plurality of", "a plurality of" means two or more, and the meaning of "a plurality of", "a plurality of" means one or more ".

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

As shown in fig. 1 to 7, the present utility model provides a reaction apparatus of an exhaust gas treatment device, which comprises a reaction chamber 100 and a turbulence assembly 200, wherein the turbulence assembly 200 comprises a support member 210 and a turbulence member 220, the turbulence member 220 is disposed on the support member 210, the reaction chamber 100 is provided with an air inlet 110, the support member 210 is disposed on the air inlet 110, and the turbulence member 220 is disposed in at least one of the interior of the reaction chamber 100 and the air inlet 110.

In the reaction device of the exhaust gas treatment apparatus according to the embodiment of the present utility model, the reaction chamber 100 is provided with the air inlet 110, the air inlet 110 is provided with the support member 210, the support member 210 is provided with the turbulence member 220, the turbulence member 220 is fixed at the air inlet 110 of the reaction device by the support member 210, and the external exhaust gas enters the reaction chamber 100 from the air inlet 110, flows through the support member 210 and the turbulence member 220, and then enters the whole reaction chamber 100. After the exhaust gas passes through the turbulence piece 220, the turbulent kinetic energy of the exhaust gas is increased, and the turbulent flow occurs in the reaction cavity 100, so that the turbulence degree of the flow field in the reaction cavity 100 is improved.

It can be understood that the temperature of the exhaust gas in the reaction chamber 100 near the heating component is higher, the temperature far away from the heating component is lower, and the exhaust gas with different temperatures in the reaction chamber 100 is mixed through the chaotic flow of the exhaust gas, so that the heat exchange of the exhaust gas in the reaction chamber 100 is increased, the non-uniformity of the temperature distribution of the exhaust gas is reduced, the temperature difference is reduced, the problems that the temperature distribution in the reaction chamber 100 is non-uniform, the temperature of the exhaust gas near the heating component is high, and the temperature far away from the heating component is lower are solved, and the reaction efficiency of the exhaust gas in the reaction chamber 100 is improved; and because the turbulence degree of the waste gas in the reaction cavity 100 is increased, the flow line of the waste gas in the reaction cavity 100 is increased, so that the residence time of the waste gas in the reaction cavity 100 is prolonged, the reaction time of the waste gas is prolonged, the waste gas is more fully reacted in the reaction cavity 100, and the reaction efficiency of the waste gas in the reaction cavity 100 is further improved. And through the chaotic flow of the waste gas, when the temperature of all the waste gas in the reaction cavity 100 reaches the reaction temperature, the required set temperature of the heating component is lower, the problem of energy waste is solved, and the energy consumption of equipment is reduced. The turbulence degree of the flow field inside the reaction cavity 100 is improved, the flow speed of waste gas close to the upper surface of the inner wall surface of the reaction cavity 100 is increased, dust in the waste gas is easy to adsorb on the inner wall surface when the inner air flow of the reaction cavity 100 is stable is avoided, the problem of dust accumulation is caused, the service life of equipment is prolonged, and meanwhile, the number of scraper mechanisms required for cleaning the dust attached to the inner wall surface of the reaction cavity 100 is reduced by reducing dust accumulation, so that noise caused by the operation of the scraper mechanisms is reduced.

In this embodiment, as shown in fig. 7, an air inlet 110 is formed above the reaction chamber 100, a supporting member 210 is disposed at the air inlet 110, a spoiler 220 is connected below the supporting member 210, and the air inlet 110, the supporting member 210 and the spoiler 220 are coaxially disposed.

In other embodiments, the gas inlet 110 may be formed around the reaction chamber 100, so that exhaust gas may enter the reaction chamber 100; the air inlet 110, the supporting piece 210 and the spoiler 220 can be arranged in a staggered and different shaft way, so that the exhaust gas can flow through the spoiler 220 to realize end flow energy increase; the supporting member 210 may also be disposed inside the reaction chamber 100, so as to fix the spoiler 220 in the reaction chamber 100.

According to an embodiment of the present utility model, the spoiler 220 includes a first rotating shaft 221 and a first spoiler 222, wherein two ends of the first rotating shaft 221 are rotatably connected to the support 210, the first spoiler 222 is disposed on the first rotating shaft 221, and an axial direction of the first rotating shaft 221 is coplanar with a plane of the first spoiler 222, so as to change a ventilation area of the air inlet 110 during the overturning process of the first spoiler 222.

In this embodiment, as shown in fig. 1 to 3, two ends of the first rotating shaft 221 are inserted into the inner surface of the supporting member 210 and are rotatably connected with the supporting member 210, the first spoiler 222 is disposed on the first rotating shaft 221, and the axial direction of the first rotating shaft 221 is coplanar with the plane of the first spoiler 222, so as to change the ventilation area of the air inlet 110 during the overturning process of the first spoiler 222.

In fig. 1, the dashed line indicates the flow direction of the exhaust gas, and the first spoiler 222 is forced to rotate around the first rotating shaft 221 under the pushing of the exhaust gas flow, and during the rotation of the first spoiler 222, the distance and the relative position between the edge of the first spoiler 222 and the inner wall of the air inlet 110 change, so that the ventilation area of the air inlet 110 changes, and the flow rate of the exhaust gas changes. Specifically, the ventilation area is increased, under the condition that the flow rate of the exhaust gas is unchanged, the flow rate of the exhaust gas is reduced, and because the ventilation area is changed in real time along with the rotation of the first spoiler 222, the flow rate of the exhaust gas entering the reaction cavity 100 is also changed in real time, and the exhaust gas with different flow rates increases the turbulence degree of the exhaust gas flowing in the reaction cavity 100, so that the exhaust gas with different temperatures in the reaction cavity 100 is mixed, the temperature distribution non-uniformity in the reaction cavity 100 is reduced, the residence time of the exhaust gas in the reaction cavity 100 is improved, the reaction of the exhaust gas in the reaction cavity 100 is more complete, and the reaction efficiency of the exhaust gas is improved; and at the same time, the flow rate of the exhaust gas on the inner wall surface of the reaction chamber 100 is increased, and the number of dust in the exhaust gas attached to the inner wall surface of the reaction chamber 100 is reduced.

In other embodiments, the first shaft 221 may not be disposed on the support 210, i.e., a mounting hole for placing the first shaft 221 is formed on the inner wall surface of the gas inlet 110 of the reaction chamber 100, and two ends of the first shaft 221 are rotatably connected to the mounting hole.

The first rotating shaft 221 may further be provided with a rotating motor, and it is understood that, under the condition of low exhaust gas flow rate, the rotating motor may assist in rotating the first rotating shaft 221 and the first spoiler 222, so as to increase the flow energy of the exhaust gas end and improve the exhaust gas flow rate.

According to an embodiment of the present utility model, the first spoiler 222 is an elliptical plate, and the long diameter of the first spoiler 222 is disposed along the axial direction of the first rotating shaft 221.

As shown in fig. 1 to 3, the first spoiler 222 is fixed on the first rotating shaft 221, and a long diameter of the first spoiler 222 is disposed along an axial direction of the first rotating shaft 221. It should be noted that, in the present embodiment, the elliptical plate body is designed based on the annular supporting member 210, which not only meets the requirement of changing the ventilation area of the air inlet 110, but also effectively prevents external impurities from entering the reaction chamber 100 when no exhaust gas is introduced.

In other embodiments, the shape of the first spoiler 222 is designed according to the opening of the air inlet 110 or the support 210, if the opening of the air inlet 110 or the support 210 is rectangular, the first spoiler 222 is correspondingly arranged to be rectangular, so as to meet the requirement of changing the ventilation area of the air inlet 110, and when no exhaust gas is passed, the external impurities can be effectively prevented from entering the reaction chamber 100.

In other embodiments, the long diameter of the first spoiler 222 may also be disposed perpendicular to the axial direction of the first rotating shaft 221, i.e., the short diameter of the first spoiler 222 is disposed along the axial direction of the first rotating shaft 221.

According to an embodiment of the present utility model, the spoiler 220 includes a diverting portion 223 and a plurality of spoiler blades 224, the diverting portion 223 is connected with the support 210, the axial direction of the diverting portion 223 is arranged along the air intake direction of the air inlet 110, the spoiler blades 224 are located inside the reaction chamber 100, and the plurality of spoiler blades 224 are uniformly arranged around the axial direction of the diverting portion 223 and connected with the diverting portion 223.

As shown in fig. 4 to 5, the spoiler 220 includes a diverting portion 223 and a plurality of spoiler blades 224, the diverting portion 223 is connected with the support 210, the support 210 is connected to the air inlet 110, the axial direction of the diverting portion 223 is set along the air inlet direction of the air inlet 110, the diverting portion 223 diverts the exhaust gas, the exhaust gas flows along the surface of the diverting portion 223, the surface of the diverting portion 223 is provided with a plurality of spoiler blades 224 uniformly arranged around the axial direction of the diverting portion 223, after the exhaust gas passes through the spoiler blades 224, the exhaust gas flow direction and velocity change due to the obstructing effect of the spoiler blades 224 and the outer surface of the diverting portion 223, the turbulence of the waste gas is increased, the waste gas with different flow directions and fluidity flowing out of the flow dividing part 223 flows in the reaction cavity 100 until the waste gas collides with the inner wall surface of the reaction cavity 100 and bounces, the flow speed of the bounced waste gas is reduced and the flow direction is changed, and the waste gas collides with the waste gas flowing out of the flow dividing part 223, so that the turbulence of the waste gas in the reaction cavity 100 is further increased, the waste gas with different temperatures in the reaction cavity 100 is mixed, the non-uniformity of the temperature distribution in the reaction cavity 100 is reduced, the residence time of the waste gas in the reaction cavity 100 is prolonged, the waste gas is reacted more fully in the reaction cavity 100, and the waste gas reaction efficiency is improved; and at the same time, the flow rate of the exhaust gas on the inner wall surface of the reaction chamber 100 is increased, and the number of dust in the exhaust gas attached to the inner wall surface of the reaction chamber 100 is reduced.

In the present embodiment, the splitting portion 223 has a conical shape with a curved outer surface, and six turbulence blades 224, and in other embodiments, the splitting portion 223 may have other shapes, such as a pyramid, and the number of turbulence blades 224 may be selected as required.

In this embodiment, the flow dividing portion 223 is fixedly connected to the supporting member 210, and in other embodiments, the flow dividing portion 223 is rotatably connected to the supporting member 210, and it can be understood that, because the exhaust gas flow path formed by the surfaces of the flow dividing blade 224 and the flow dividing portion 223 and the axial direction of the flow dividing portion 223 are at a certain angle, the flow dividing portion 223 can rotate around the axial direction of the flow dividing portion 223 under the action of the exhaust gas, and the direction of the exhaust gas flowing out of the flow dividing portion 223 is changed in real time, so that the turbulence of the exhaust gas in the reaction chamber 100 is further improved.

According to an embodiment of the present utility model, the turbulence blades 224 are curved from the diverting portion 223 toward the sidewall of the reaction chamber 100. The turbulence blades 224 are curved from the flow dividing portion 223 to the sidewall direction of the reaction chamber 100, and project the turbulence blades 224 to a horizontal plane, and at this time, the turbulence blades 224 are uniformly arranged around the flow dividing portion 223 in a vortex shape. Through the turbulent flow blades 224 arranged in an arc shape, the flow direction of the exhaust gas on the outer surface of the flow dividing part 223 is changed, and the exhaust gas with a plurality of flow directions forms more exhaust gas with different flow directions after the collision of the inner wall surface of the reaction chamber 100, so that the exhaust gas turbulence in the reaction chamber 100 is improved.

In the present embodiment, as shown in fig. 4 and 5, the broken line is the flow direction of the exhaust gas, and the flow direction of the exhaust gas flowing along the axial direction of the flow dividing portion 223 is changed into the oblique rotation movement after passing through the flow disturbing blade 224.

According to an embodiment of the present utility model, the flow dividing part 223 includes a first flow dividing ring 225 and a second flow dividing ring 226, the second flow dividing ring 226 is connected to the support 210 through the first flow dividing ring 225, the inner diameter of the second flow dividing ring 226 is gradually increased along the air intake direction of the air inlet 110, and the turbulence blades 224 are disposed on the outer circumferential surface of the second flow dividing ring 226.

In this embodiment, as shown in fig. 4 to 6, in the process of introducing the exhaust gas into the reaction chamber 100, part of the exhaust gas flows from the inside of the first splitter ring 225 to the inside of the second splitter ring 226, and since the inner diameter of the second splitter ring 226 gradually increases along the air inlet direction of the air inlet 110, the ventilation area increases due to the increase of the inner diameter under the condition that the exhaust gas flow rate is unchanged, at this time, the flow direction of the exhaust gas is unchanged, the flow speed of the exhaust gas is reduced, the turbulence of the exhaust gas in the reaction chamber 100 is increased, the other part of the exhaust gas flows to the outer circumferential surface of the second splitter ring 226 along the outer circumferential surface of the first splitter ring 225, the turbulence blades 224 are arranged on the outer circumferential surface of the second splitter ring 226, and the widths of the adjacent turbulence blades 224 and the outer circumferential surface of the second splitter ring 226 gradually increase from the inlet of the flow channel to the outlet of the flow channel, so that the ventilation area of the flow channel increases, the flow speed of the exhaust gas is correspondingly reduced, and the flow direction of the exhaust gas is changed, and the turbulence of the exhaust gas in the reaction chamber 100 is further improved.

According to one embodiment of the present utility model, the first diverter ring 225 is connected to the support 210 by a plurality of connection plates 230, and the plurality of connection plates 230 are uniformly distributed around the first diverter ring 225. Referring to fig. 5, a plurality of connection plates 230 are uniformly distributed around the first diverting ring 225, one end of which is connected to the outer surface of the first diverting ring 225 and the other end of which is connected to the inner surface of the supporting member 210.

In this embodiment, the number of the connection plates 230 is four, and in other embodiments, the number of the connection plates can be adjusted as required.

In other embodiments, a filter screen may be disposed between the plurality of connection plates 230 to prevent impurities from entering the reaction chamber 100.

According to an embodiment of the present utility model, the spoiler 220 further includes a second rotating shaft 227 and a second spoiler 228, wherein two ends of the second rotating shaft 227 are rotatably connected to an inner peripheral surface of the first diverter ring 225, the second spoiler 228 is disposed on the second rotating shaft 227, and an axial direction of the second rotating shaft 227 is coplanar with a plane of the second spoiler 228, so as to change a ventilation area of the first diverter ring 225 during the overturning process of the second spoiler 228.

In this embodiment, as shown in fig. 5 to 7, under the pushing of a part of the flow of the exhaust gas, the second spoiler 228 is forced to rotate around the second rotating shaft 227, and in the rotating process of the second spoiler 228, the ventilation area of the first flow dividing ring 225 is changed, so that the flow rate of the exhaust gas is changed, and as the ventilation area is changed in real time with the second spoiler 228, the flow rate of the exhaust gas flowing into the reaction chamber 100 is also changed in real time, and the turbulence degree of the exhaust gas flowing into the reaction chamber 100 is increased due to the exhaust gas with different flow rates.

The other part of the waste gas flows along the outer surface of the flow dividing part 223, a plurality of turbulence blades 224 which are uniformly arranged around the axial direction of the flow dividing part 223 are arranged on the surface of the flow dividing part 223, after the waste gas passes through the turbulence blades 224, the flow direction and the flow speed of the waste gas are changed due to the blocking effect of the turbulence blades 224 and the outer surface of the flow dividing part 223, the turbulence of the waste gas is increased, the waste gas with different flow directions and flow degrees flowing out of the flow dividing part 223 flows in the reaction cavity 100 until the waste gas collides with the inner wall surface of the reaction cavity 100, the flow speed of the rebounded waste gas is reduced and the flow direction is changed, the waste gas collides with the waste gas flowing out of the flow dividing part 223, so that the turbulence of the waste gas in the reaction cavity 100 is further increased, the waste gas with different temperatures in the reaction cavity 100 is mixed, the temperature distribution non-uniformity in the reaction cavity 100 is reduced, the retention time of the waste gas in the reaction cavity 100 is improved, the reaction efficiency of the waste gas is improved; and at the same time, the flow rate of the exhaust gas on the inner wall surface of the reaction chamber 100 is increased, and the number of dust in the exhaust gas attached to the inner wall surface of the reaction chamber 100 is reduced.

According to an embodiment of the present utility model, the second spoiler 228 is an elliptical plate, and the long diameter of the second spoiler 228 is disposed along the axial direction of the second rotating shaft 227.

As shown in fig. 6 and 7, the second spoiler 228 is fixed on the second rotating shaft 227, and the long diameter of the second spoiler 228 is disposed along the axial direction of the second rotating shaft 227. It should be noted that, in this embodiment, the elliptical plate body is designed based on the first split ring 225 with a circular ring shape, so as to not only meet the requirement of changing the ventilation area of the first split ring 225, but also effectively avoid external impurities from entering the reaction chamber 100 when exhaust gas is not passed.

In other embodiments, the shape of the second spoiler 228 is designed according to the shape of the first flow distribution ring 225, if the inner wall section of the first flow distribution ring 225 is rectangular, the second spoiler 228 is correspondingly arranged to be rectangular, so as to meet the requirement of changing the ventilation area of the first flow distribution ring 225, and when no exhaust gas is passed, external impurities can be effectively prevented from entering the reaction chamber 100.

In other embodiments, the long diameter of the second spoiler 228 may also be perpendicular to the axial direction of the second rotating shaft 227, i.e., the short diameter of the second spoiler 228 is disposed along the axial direction of the second rotating shaft 227.

The embodiment of the utility model also provides an exhaust gas treatment device, which comprises the reaction device of the exhaust gas treatment device.

In this embodiment, as shown in fig. 1 to 7, the exhaust gas treatment apparatus includes a reaction device, a reaction chamber 100 of the reaction device is provided with an air inlet 110, the air inlet 110 is provided with a support member 210, the support member 210 is provided with a turbulence member 220, the turbulence member 220 is fixed at the air inlet 110 of the reaction device through the support member 210, and external exhaust gas enters the reaction chamber 100 from the air inlet 110, flows through the support member 210 and the turbulence member 220, and then enters the whole reaction chamber 100. After the exhaust gas passes through the turbulence piece 220, the turbulent kinetic energy of the exhaust gas is increased, and the turbulent flow occurs in the reaction cavity 100, so that the turbulence degree of the flow field in the reaction cavity 100 is improved.

The turbulence piece 220 solves the problems that the temperature distribution inside the waste gas treatment equipment is uneven, the temperature of waste gas close to the heating component is high, and the temperature far away from the heating component is low, so that the reaction efficiency of waste gas in the waste gas treatment equipment is improved; and because the turbulence degree of the waste gas in the waste gas treatment equipment is increased, the flowing line of the waste gas in the waste gas treatment equipment is increased, so that the residence time of the waste gas in the waste gas treatment equipment is prolonged, the reaction time of the waste gas is prolonged, the waste gas is enabled to react more fully in the waste gas treatment equipment, and the reaction efficiency of the waste gas in the waste gas treatment equipment is further improved. And through the chaotic flow of waste gas, when all waste gas temperatures in the waste gas treatment equipment reach the reaction temperature, the required set temperature of the heating component is lower, the problem of energy waste is solved, and the equipment energy consumption is reduced. The turbulence degree of the flow field inside the waste gas treatment equipment is improved, the flow speed of waste gas close to the upper surface of the inner wall surface of the reaction cavity 100 is increased, dust in the waste gas is easy to adsorb on the inner wall surface when the inner air flow of the reaction cavity 100 is stable is avoided, the problem of dust accumulation is caused, the service life of the equipment is prolonged, and meanwhile, the number of scraper mechanisms required for cleaning the dust attached to the inner wall surface of the reaction cavity 100 is reduced by reducing dust accumulation, so that noise caused by the operation of the scraper mechanisms is reduced.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims (9)

1. A reaction device of an exhaust gas treatment apparatus, characterized in that: the device comprises a reaction cavity and a turbulent flow assembly, wherein the turbulent flow assembly comprises a supporting piece and a turbulent flow piece, the turbulent flow piece is arranged on the supporting piece, the reaction cavity is provided with an air inlet, the supporting piece is arranged on the air inlet, and the turbulent flow piece is positioned in at least one of the inside of the reaction cavity and the air inlet;

The spoiler comprises a first rotating shaft and a first spoiler, two ends of the first rotating shaft are rotationally connected with the supporting piece, the first spoiler is arranged on the first rotating shaft, and the axial direction of the first rotating shaft is coplanar with the plane where the first spoiler is located, so that the ventilation area of the air inlet is changed in the overturning process of the first spoiler.

2. The reaction device of an exhaust gas treatment apparatus according to claim 1, wherein: the first spoiler is an elliptical plate body, and the long diameter of the first spoiler is arranged along the axial direction of the first rotating shaft.

3. The reaction device of an exhaust gas treatment apparatus according to claim 1, wherein: the vortex piece includes reposition of redundant personnel portion and a plurality of vortex blade, reposition of redundant personnel portion with support piece connects, the axial of reposition of redundant personnel portion is followed the direction of admitting air of air inlet sets up, the vortex blade is located inside the reaction chamber, and a plurality of vortex blade centers on the axial of reposition of redundant personnel portion evenly sets up and with the reposition of redundant personnel portion connects.

4. A reaction apparatus of an exhaust gas treatment device according to claim 3, wherein: the turbulent flow blades are bent from the flow dividing part to the side wall direction of the reaction cavity to form an arc shape.

5. A reaction apparatus of an exhaust gas treatment device according to claim 3, wherein: the flow dividing part comprises a first flow dividing ring and a second flow dividing ring, the second flow dividing ring is connected with the supporting piece through the first flow dividing ring, the inner diameter of the second flow dividing ring is gradually increased along the air inlet direction of the air inlet, and the turbulence blades are arranged on the outer peripheral surface of the second flow dividing ring.

6. The reaction device of an exhaust gas treatment apparatus according to claim 5, wherein: the first flow distribution ring is connected with the supporting piece through a plurality of connecting plates, and the connecting plates are uniformly distributed around the first flow distribution ring.

7. The reaction device of an exhaust gas treatment apparatus according to any one of claims 5 to 6, wherein: the spoiler further comprises a second rotating shaft and a second spoiler, two ends of the second rotating shaft are rotationally connected with the inner peripheral surface of the first diverting ring, the second spoiler is arranged on the second rotating shaft, and the axial direction of the second rotating shaft is coplanar with the plane where the second spoiler is located, so that the ventilation area of the first diverting ring is changed in the overturning process of the second spoiler.

8. The reaction device of an exhaust gas treatment apparatus according to claim 7, wherein: the second spoiler is an elliptical plate body, and the long diameter of the second spoiler is arranged along the axial direction of the second rotating shaft.

9. An exhaust gas treatment device, characterized in that: reaction apparatus comprising an exhaust gas treatment device according to any one of claims 1 to 8.