CN104984644A - Gas injection device - Google Patents
Gas injection device Download PDFInfo
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- CN104984644A CN104984644A CN201510397779.XA CN201510397779A CN104984644A CN 104984644 A CN104984644 A CN 104984644A CN 201510397779 A CN201510397779 A CN 201510397779A CN 104984644 A CN104984644 A CN 104984644A
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- air inlet
- gas
- vane
- injection apparatus
- gas injection
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Abstract
The invention discloses a gas injection device. The gas injection device comprises a rotary vane (45) which is installed in a cavity (6) through a transmission shaft and a driving device (41) which drives the rotary vane (45) to rotate. The rotary vane (45) is provided with a plurality of blades (47). The cavity (6) is provided with a first gas inlet (43) allowing first gas to enter the cavity and a second gas inlet (42) allowing second gas to enter the cavity. The rotary vane (45) can rotate so as to stir the first gas and the second gas, so that the first gas and the second gas can be evenly mixed. The gas injection device effectively solves the problem that the efficiency is low when waste gas is treated in an electric heating mode. The invention further discloses an electric heating device comprising the gas injection device.
Description
Technical field
The present invention relates to gas mixing technology field, particularly relate to a kind of gas injection apparatus.In addition, the invention still further relates to a kind of electric heating equipment comprising above-mentioned gas injection device.
Background technology
In semicon industry, containing the difficult in a large number and greenhouse gases of limiting emission in the waste gas of discharge, as carbon tetrafluoride gas.At present, conventional exhaust-gas treatment mode has fuel combustion, plasma, high temperature catalyst etc., and wherein, fuel combustion mode uses the most extensive.But fuel combustion mode not only consumes energy comparatively large, and also can produce the oxynitrides with secondary pollution, and also need to process other pyrophoric gas in processing procedure, during process, combustion air proportioning is excessive also can produce particle clogging.
In prior art, in the same industry, also adopt Electric heating to carry out exhaust-gas treatment, before needing gas to be processed to enter electric heating chamber, directly spray into reducing gas, then enter the reaction of electrical heating high-temperature district.But waste gas mixes not good in this mode with reducing gas, Mixed Zone scope is little, and comparatively large in energy consumption, and electrical heating processing mode can only processing section greenhouse gases, and handling rate is lower, reduces discharging fractional energy savings lower.
In sum, the problem how effectively during solution Electric heating process waste gas, efficiency is lower is current those skilled in the art's urgent problem.
Summary of the invention
The object of this invention is to provide a kind of gas injection apparatus, the problem that when efficiently solving Electric heating process waste gas, efficiency is lower; Another object of the present invention is to provide a kind of electric heating equipment comprising above-mentioned gas injection device.
For solving the problems of the technologies described above, the invention provides following technical scheme:
A kind of gas injection apparatus, comprise the vane be installed on by power transmission shaft in cavity, and the drive unit driving described vane to rotate, described vane has several blades, described cavity has the first air inlet entered for the first gas and the second air inlet entered for the second gas, and the rotation of described vane can stir described first gas and described second gas and vapor permeation is even.
Preferably, described cavity has described first air inlet and the second air inlet described in several, and each described blade place all offers the first gas outlet be communicated with described first air inlet, and described second air inlet is communicated with second gas outlet.
Preferably, each described blade has multiple described first gas outlet.
Preferably, also comprise the ring flange for installing described vane at the top cover place being installed on described cavity, described ring flange offers through hole, the first air inlet pipe be communicated with described first air inlet and the second air inlet pipe be communicated with described second air inlet all enter described cavity through described through hole, described first air inlet pipe is arranged at the central part of described ring flange, and described second air inlet pipe is arranged at the circumferential part of described ring flange.
Preferably, described first air inlet pipe and described second air inlet pipe are fixed on described ring flange, the end of described second air inlet pipe is arranged at the top of described vane, described first air inlet pipe is communicated with described first gas outlet by the 3rd air inlet pipe, and described 3rd air inlet pipe and described first air inlet pipe are rotationally connected and can rotate with described vane.
Preferably, described first gas outlet is communicated with the escape pipe be upturned.
Preferably, described drive unit is specially CD-ROM drive motor, the driving shaft of described CD-ROM drive motor is provided with the first gear, described power transmission shaft is provided with the second gear, described driving shaft is through the through hole of described ring flange, and described first gear is meshed with described second gear.
Preferably, described vane is hollow vane, and the central axis of described hollow vane has blow vent, and described first gas outlet is opened on the lamellar body of described blade, and described first air inlet is communicated with described first gas outlet by described blow vent.
Preferably, described vane is entity vane, the central axis of described entity vane is provided with the total breather pipe be communicated with described first air inlet, described blade is provided with point breather pipe be communicated with described total breather pipe, and described first gas outlet is opened on described point breather pipe.
The present invention also provides a kind of electric heating equipment, and comprise cavity and be installed on electrically heated rod on described cavity and be installed on the gas injection apparatus in described cavity, described gas injection apparatus is specially the gas injection apparatus described in above-mentioned any one.
Gas injection apparatus provided by the present invention, comprise vane and drive unit, vane is installed in cavity by power transmission shaft, specifically, cavity can be the electrical heating cavity of electric heating equipment, also can be the cavity of miscellaneous equipment, drive unit can drive vane to rotate, and vane has several blades, the quantity of blade can according to the different sets itself of concrete service condition, such as arrange five blades, each blade can be uniformly distributed, and now vane rotates more steady.Cavity has the first air inlet and the second air inlet, and the first gas enters cavity from the first air inlet, and the second gas enters cavity from the second air inlet, and such as, the first gas is reducing gas, and the second gas is waste gas.Driving vane rotates, and waste gas and reducing gas all enter in cavity, and before entering electrical heating high-temperature district, vane rotation can stir the first gas and the second gas and vapor permeation is even.
After this gas injection apparatus can make waste gas enter cavity, and mix with reducing gas before entering electrical heating high-temperature district, waste gas and reducing gas can be made fully to mix by the stirring of vane, both mixing are more even.The gas mixed enters the reaction of electrical heating high-temperature district again, can under the promotion of high temperature, waste gas and reducing agent be made better to be reacted, extremely unmanageable greenhouse gases also can process simultaneously, the treatment effeciency of waste gas effectively improves, maintenance frequency reduces, save a large amount of energy consumption, energy-saving and emission-reduction rate improves, and use cost reduces.
The present invention also provides a kind of electric heating equipment, and comprise cavity and be installed on electrically heated rod on cavity and be installed on the gas injection apparatus in cavity, this gas injection apparatus is specially any one gas injection apparatus above-mentioned.Because above-mentioned gas injection apparatus has above-mentioned technique effect, the electric heating equipment with this gas injection apparatus also should have corresponding technique effect.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the electric heating equipment that Fig. 1 provides for detailed description of the invention a kind of in the present invention;
Fig. 2 is the assembly drawing of Fig. 1;
Fig. 3 is the structural representation of gas injection apparatus in Fig. 1;
Fig. 4 is the partial enlarged drawing at A place in Fig. 3.
In accompanying drawing, mark is as follows:
Top cover, 4-gas injection apparatus, 5-electrically heated rod, 6 cavitys, 41-drive unit, 42-second air inlet, 43-first air inlet, 44 ring flanges, 45-vane, 46-first gas outlet, 47-blade, 48-first gear under 1-upper top cover, 2-holder, 3-.
Detailed description of the invention
Core of the present invention is to provide a kind of gas injection apparatus, the problem that when efficiently solving Electric heating process waste gas, efficiency is lower; Another core of the present invention is to provide a kind of electric heating equipment comprising above-mentioned gas injection device.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Please refer to Fig. 1 to Fig. 4, the structural representation of the electric heating equipment that Fig. 1 provides for detailed description of the invention a kind of in the present invention; Fig. 2 is the assembly drawing of Fig. 1; Fig. 3 is the structural representation of gas injection apparatus in Fig. 1; Fig. 4 is the partial enlarged drawing at A place in Fig. 3.
In a kind of detailed description of the invention, gas injection apparatus provided by the present invention, comprise vane 45 and drive unit 41, vane 45 is installed in cavity 6 by power transmission shaft, specifically, cavity 6 can be the electrical heating cavity 6 of electric heating equipment, also can be the cavity 6 of miscellaneous equipment, drive unit 41 can drive vane 45 to rotate, vane 45 has several blades 47, and the quantity of blade 47 according to the different sets itself of concrete service condition, can such as arrange five blades 47, each blade 47 can be uniformly distributed, and now vane 45 rotates more steady.Cavity 6 has the first air inlet 43 and the second air inlet 42, first gas enters cavity 6 from the first air inlet 43, and the second gas enters cavity 6 from the second air inlet 42, and such as, the first gas is reducing gas, and the second gas is waste gas.Drive vane 45 to rotate, waste gas and reducing gas all enter in cavity 6, and before entering electrical heating high-temperature district, vane 45 rotation can stir the first gas and the second gas and vapor permeation is even.
After this gas injection apparatus can make waste gas enter cavity 6, and mix with reducing gas before entering electrical heating high-temperature district, waste gas and reducing gas can be made fully to mix by the stirring of vane 45, both mixing are more even.The gas mixed enters the reaction of electrical heating high-temperature district again, can under the promotion of high temperature, waste gas and reducing agent be made better to be reacted, extremely unmanageable greenhouse gases also can process simultaneously, the treatment effeciency of waste gas effectively improves, maintenance frequency reduces, save a large amount of energy consumption, energy-saving and emission-reduction rate improves, and use cost reduces.
Above-mentioned gas injection device is only a kind of preferred version, specifically be not limited thereto, pointed adjustment can be made according to actual needs on this basis, thus obtain different embodiments, cavity 6 has one first air inlet 43 and several second air inlets 42, the quantity of the second air inlet 42 can be determined according to practical situations, each blade 47 place all offers the first gas outlet 46 be communicated with the first air inlet 43, preferably, the opening direction of the first gas outlet 46 is contrary with the rotation direction of vane 45, second air inlet 42 is communicated with second gas outlet, that is the quantity of the first air inlet 43 is identical with the quantity of blade 47, the quantity of the second air inlet 42 is identical with the quantity of the second air inlet 42, now the quantity of the first gas outlet 46 and the second gas outlet is multiple, multiple first gas outlet 46 disperses distribution, multiple second air inlet 42 preferably also disperses distribution, preferably, multiple second air inlet 42 is uniformly distributed, the Mixed Zone scope of the first gas and the second gas is improved with this, increase mixing contact area, be conducive to both to mix.
Obviously, under the guidance of this thought, those skilled in the art can carry out some changes according to the difference of concrete occasion to the first gas outlet 46 in above-mentioned detailed description of the invention, each blade 47 has multiple first gas outlet 46.On each blade 47, the quantity of the first gas outlet 46 is unrestricted, and can be one, now gas injection apparatus structure is simpler; On each blade 47, the quantity of the first gas outlet 46 also can be multiple, and now the quantity of the first gas outlet 46 increases further, is conducive to the first gas and mixes well with the second gas, improves the treatment effeciency of waste gas further, improves energy-saving and emission-reduction rate.
On the basis of above-mentioned detailed description of the invention, those skilled in the art can according to the difference of concrete occasion, some changes are carried out to gas injection apparatus, also comprise the ring flange 44 for installing vane 45 at the top cover place being installed on cavity 6, ring flange 44 offers through hole, the first air inlet pipe be communicated with the first air inlet 43 and the second air inlet pipe be communicated with the second air inlet 42 all enter cavity 6 through through hole, first air inlet pipe is arranged at the central part of ring flange 44, and the second air inlet pipe is arranged at the circumferential part of ring flange 44.Ring flange 44 is installed on the top cover place of cavity 6, and top cover is divided into upper top cover 1 and lower top cover 3, and ring flange 44 is installed between upper top cover 1 and lower top cover 3, and vane 45 is installed on ring flange 44, and ring flange 44 is convenient to install vane 45.First air inlet 43 is communicated with the first gas outlet 46 by the first air inlet pipe, and the second air inlet 42 is communicated with the second gas outlet by the second air inlet pipe, and ring flange 44 offers some through holes, and the first air inlet pipe and the second air inlet pipe all enter cavity 6 through through hole.The quantity of the first air inlet pipe is one, can be arranged at the center of ring flange 44, and the quantity of the second air inlet pipe is multiple, the circumferential part of ring flange 44 can be arranged at, such as be distributed in uniformly around the first air inlet pipe, this distribution mode is not only easy, and attractive in appearance.Certainly, this distribution mode be one preferred embodiment, being not unique, can also be other distribution mode, concrete adopts which kind of distribution mode, does not do further restriction.
It needs to be noted, gas injection apparatus provided by the present invention should not be restricted to this kind of situation, first air inlet pipe and the second air inlet pipe are fixed on ring flange 44, the end of the second air inlet pipe is arranged at the top of vane 45, first air inlet pipe is communicated with the first gas outlet 46 by the 3rd air inlet pipe, and the 3rd air inlet pipe and the first air inlet pipe are rotationally connected and can rotate with vane 45.First air inlet pipe and the second air inlet pipe are fixed on ring flange 44, are such as welded on ring flange 44.The end of the second air inlet pipe is arranged at the top of vane 45, and preferably, the end of the second air inlet pipe is close to vane 45, and the end of the second air inlet pipe and the upper surface of vane 45 have less gap.May produce particle at the second gas outlet place of the second air inlet pipe end, vane 45 ceaselessly rotates, and can wipe the particle at the second gas outlet place off, with anti-clogging second gas outlet.Also be provided with the 3rd air inlet pipe between first air inlet pipe and the first gas outlet 46, the first air inlet pipe is communicated with the first gas outlet 46 by the 3rd air inlet pipe, and the 3rd air inlet pipe and the first air inlet pipe are rotationally connected, and the 3rd air inlet pipe can be rotated with vane 45.
In order to optimize technique scheme further, the first gas outlet 46 is communicated with the escape pipe be upturned.The end of the second air inlet pipe is arranged at the top of vane 45, first gas outlet 46 is arranged at blade 47 place, in order to make the first gas and the second gas better mix, can connect escape pipe in the first gas outlet 46, escape pipe is upturned, and towards the second gas outlet place.
Gas injection apparatus provided by the present invention, in the immovable situation of other parts, drive unit 41 is specially CD-ROM drive motor, the driving shaft of CD-ROM drive motor is provided with the first gear 48, power transmission shaft is provided with the second gear, driving shaft is through the through hole of ring flange 44, and the first gear 48 is meshed with the second gear.Drive unit 41 is specifically as follows CD-ROM drive motor, and CD-ROM drive motor can be air motor or electro-motor.Upper top cover 1 has holder 2, for fixed drive motor, the driving shaft of CD-ROM drive motor passes the through hole of ring flange 44, and driving shaft is provided with the first gear 48, power transmission shaft is provided with the second gear, the first gear 48 is meshed with the second gear.CD-ROM drive motor drives the first gear 48 and the second gears meshing, the second gear driven drive axis, and then drives vane 45 to rotate, and this drive unit 41 structure is simple, and it is convenient to control.Certainly, drive unit 41 also can be other suitable drive unit 41, and such as motor reducer drives, and concrete which kind of drive unit 41 that uses does not do requirement, as long as can meet the job requirement driving vane 45 to rotate, all in protection scope of the present invention.
Preferably, vane 45 is hollow vane 45, and the central axis of hollow vane 45 has blow vent, and the first gas outlet 46 is opened on the lamellar body of blade 47, and the first air inlet 43 is communicated with the first gas outlet 46 by blow vent.Vane 45 can be hollow, and vane 45 has hollow chamber, and hollow vane 45 has blow vent, and blow vent can be opened in central axis.First air inlet 43 is communicated with blow vent, first gas outlet 46 is opened on the lamellar body of blade 47, preferably, first gas outlet 46 is opened in the upper surface of lamellar body, can save and connect in the first gas outlet 46 escape pipe be upturned, by hollow vane 45 first gas from the first gas outlet 46 out.Hollow vane 45, using the hollow chamber of self as vent line, does not need to arrange extra vent line, and structure is comparatively simple, lighter in weight.
Another inventive concept provided by the present invention is, according to the difference of vane 45 form, this difference can wait various conventional means to obtain by experiment, correspondingly adjust the form of vane 45, vane 45 is entity vane 45, the central axis of entity vane 45 is provided with the total breather pipe be communicated with the first air inlet 43, and blade 47 is provided with point breather pipe be communicated with total breather pipe, the first gas outlet 46 is opened on point breather pipe.Vane 45 also can be entity, and entity vane 45 is provided with vent line, and vent line is divided into total breather pipe and point breather pipe.Total breather pipe can be arranged at central axis, and the diameter of total breather pipe is comparatively large, is communicated with, is namely communicated with the end of the 3rd air inlet pipe with the first air inlet 43.Divide breather pipe to be arranged on each blade 47, a point breather pipe is communicated with total breather pipe, and the first gas outlet 46 is opened on point breather pipe, with this first gas from the first gas outlet 46 out.Entity vane 45 is entity, and processing and manufacturing is more convenient, and service life is longer.
Based on the gas injection apparatus 4 provided in above-described embodiment, present invention also offers a kind of electric heating equipment, the gas injection apparatus 4 that this electric heating equipment comprises cavity 6 and is installed on electrically heated rod on cavity 65 and is installed in cavity 6, wherein gas injection apparatus 4 is any one gas injection apparatus 4 in above-described embodiment.The gas injection apparatus 4 in above-described embodiment is have employed, so the beneficial effect of this electric heating equipment please refer to above-described embodiment due to this electric heating equipment.
In this description, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a gas injection apparatus, it is characterized in that, comprise the vane (45) be installed on by power transmission shaft in cavity (6), and the drive unit (41) driving described vane (45) to rotate, described vane (45) has several blades (47), described cavity (6) has the first air inlet (43) entered for the first gas and the second air inlet (42) entered for the second gas, and described vane (45) rotation can stir described first gas and described second gas and vapor permeation is even.
2. gas injection apparatus according to claim 1, it is characterized in that, described cavity (6) has described first air inlet (43) and the second air inlet (42) described in several, each described blade (47) place all offers the first gas outlet (46) be communicated with described first air inlet (43), and described second air inlet (42) is communicated with second gas outlet.
3. gas injection apparatus according to claim 2, is characterized in that, each described blade (47) has multiple described first gas outlet (46).
4. gas injection apparatus according to claim 3, it is characterized in that, also comprise the ring flange (44) for installing described vane (45) at the top cover place being installed on described cavity (6), (44) offer through hole with described ring flange, the first air inlet pipe be communicated with described first air inlet (43) and the second air inlet pipe be communicated with described second air inlet (42) all enter described cavity (6) through described through hole, described first air inlet pipe is arranged at the central part of described ring flange (44), described second air inlet pipe is arranged at the circumferential part of described ring flange (44).
5. gas injection apparatus according to claim 4, it is characterized in that, described first air inlet pipe and described second air inlet pipe are fixed on described ring flange (44), the end of described second air inlet pipe is arranged at the top of described vane (45), described first air inlet pipe is communicated with described first gas outlet (46) by the 3rd air inlet pipe, and described 3rd air inlet pipe and described first air inlet pipe are rotationally connected and can rotate with described vane (45).
6. gas injection apparatus according to claim 5, is characterized in that, described first gas outlet (46) is communicated with the escape pipe be upturned.
7. gas injection apparatus according to claim 3, it is characterized in that, described drive unit (41) is specially CD-ROM drive motor, the driving shaft of described CD-ROM drive motor is provided with the first gear (48), described power transmission shaft is provided with the second gear, described driving shaft is through the through hole of described ring flange (44), and described first gear (48) is meshed with described second gear.
8. the gas injection apparatus according to any one of claim 3-7, it is characterized in that, described vane (45) is hollow vane (45), the central axis of described hollow vane (45) has blow vent, described first gas outlet (46) is opened on the lamellar body of described blade (47), and described first air inlet (43) is communicated with described first gas outlet (46) by described blow vent.
9. the gas injection apparatus according to any one of claim 3-7, it is characterized in that, described vane (45) is entity vane (45), the central axis of described entity vane (45) is provided with the total breather pipe be communicated with described first air inlet (43), described blade (47) is provided with point breather pipe be communicated with described total breather pipe, described first gas outlet (46) is opened on described point breather pipe.
10. an electric heating equipment, the electrically heated rod (5) comprising cavity (6) and be installed on described cavity (6) and the gas injection apparatus (4) be installed in described cavity (6), it is characterized in that, described gas injection apparatus (4) is specially the gas injection apparatus (4) described in any one of claim 1 to 9.
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CN201510397779.XA CN104984644A (en) | 2015-07-08 | 2015-07-08 | Gas injection device |
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CN201510397779.XA CN104984644A (en) | 2015-07-08 | 2015-07-08 | Gas injection device |
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CN107051200A (en) * | 2016-12-28 | 2017-08-18 | 华电电力科学研究院 | A kind of rotary ammonia-spraying grid applied to SCR denitration system |
CN107694289A (en) * | 2017-10-19 | 2018-02-16 | 泉州市天龙环境工程有限公司 | A kind of gas recovery system and its recovery process for plant equipment water paint |
CN108479211A (en) * | 2018-04-09 | 2018-09-04 | 马鞍山科宇环境工程有限公司 | A kind of chemical industry station-service pre-dehumidified bag filter |
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Application publication date: 20151021 |