CN220867498U - Base and coating equipment - Google Patents

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a base and coating equipment. The base comprises a base main body, a supporting mechanism and a jacking adjusting mechanism, wherein the base main body is used for bearing a substrate to be coated, the supporting mechanism comprises a rotation adjusting plate and a fixing plate, the rotation adjusting plate is rotationally connected with the fixing plate, the rotation adjusting plate is supported at the bottom of the base main body, the rotation adjusting plate can rotate on a vertical surface relative to the fixing plate so as to drive the levelness of the base main body to be adjusted, and the jacking adjusting mechanism is used for jacking the rotation adjusting plate to rotate relative to the fixing plate. The levelness adjustment mode of the base main body ensures the stability of jacking adjustment of the rotation adjusting plate and the base main body, and further ensures the adjustment precision of the base main body. The substrate to be coated is borne in the coating cavity by the coating equipment through the base, so that the adjusting precision and stability of the base main body are improved, and the coating effect of the substrate to be coated is ensured.

Description

Base and coating equipment

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a base and coating equipment.

Background

In the existing semiconductor heat treatment process, according to different use scenes, a coating film with corresponding material and thickness needs to be grown on a substrate. In the existing coating process, a substrate is required to be placed on a base for coating, if the levelness of the base in a coating cavity is changed in a deflection manner, the thickness of the coating is uneven, and the main current solution is to add an adjusting device at the bottom of the base, so that the levelness of the base in the coating cavity is adjusted.

When the levelness of the substrate to be coated of the bearing is adjusted, the base is generally overlapped on the bearing plate, then an adjusting plate is arranged at the bottom of the bearing plate, a plurality of adjusting screws are arranged on the adjusting plate at intervals, the adjusting screws are in threaded connection with the adjusting plate, the adjusting screws are screwed to penetrate through the adjusting plate to be abutted against the bottom of the bearing plate, the adjusting screws are screwed, so that the adjusting screws lift the bearing plate, gaps between the bearing plate and the adjusting plate are adjusted, the levelness of the base is adjusted, but in the adjusting mode, the bearing plate is only supported through the plurality of adjusting screws, the stability of supporting and adjusting the bearing plate and the base is greatly reduced, and the adjusting precision is also affected.

Therefore, a susceptor and a plating apparatus are needed to solve the above problems.

Disclosure of utility model

The utility model aims to provide a base and a film plating device, which are used for improving the adjusting precision and the adjusting stability of a base main body and ensuring the film plating effect of a substrate to be plated.

To achieve the purpose, the utility model adopts the following technical scheme:

A susceptor, comprising:

The base body is used for bearing a substrate to be coated;

the support mechanism comprises a rotation adjusting plate and a fixed plate, the rotation adjusting plate is rotationally connected with the fixed plate, the rotation adjusting plate is supported at the bottom of the base main body, and the rotation adjusting plate can rotate on a vertical surface relative to the fixed plate so as to drive and adjust the levelness of the base main body; and

And the jacking adjusting mechanism is configured to jack the rotation adjusting plate to rotate relative to the fixed plate.

Preferably, the jacking adjusting mechanism comprises a jacking executing assembly, wherein the jacking executing assembly is used for jacking the rotation adjusting plate to rotate relative to the fixed plate, and the upper end face of the jacking executing assembly is in contact with the rotation adjusting plate surface or in line contact with the rotation adjusting plate surface.

As a preferable scheme, the jacking execution assembly is a wedge-shaped sliding block, the jacking adjustment mechanism further comprises a supporting base plate and an adjusting driving assembly, the supporting base plate is fixedly connected to the fixing plate, and the adjusting driving assembly can drive the wedge-shaped sliding block to move to the bottom of the rotating adjustment plate along the supporting base plate, so that the upper end face of the wedge-shaped sliding block jacks the rotating adjustment plate to rotate relative to the fixing plate.

Preferably, a guide groove is formed in the upper end face of the support base plate, the guide groove extends along the moving direction of the wedge-shaped sliding block, and the wedge-shaped sliding block moves along the guide groove.

Preferably, the adjustment driving assembly includes:

The mounting seat is fixed with the rotation adjusting plate; and

The adjusting screw rod extends along the moving direction of the wedge-shaped sliding block, the adjusting screw rod is rotationally connected with the mounting seat, and the adjusting screw rod rotationally penetrates through the mounting seat to be in threaded connection with the wedge-shaped sliding block.

Preferably, the adjustment driving assembly further comprises:

and the adjusting hand wheel is fixedly connected to the end part of the adjusting screw rod.

Preferably, the base further comprises:

The position adjusting mechanism comprises a first adjusting plate, a second adjusting plate, a first adjusting assembly and a second adjusting assembly, wherein the base main body is superposed on the first adjusting plate, the first adjusting plate is superposed on the second adjusting plate, the second adjusting plate is superposed on the rotating adjusting plate, the first adjusting assembly is configured to drive the first adjusting plate to translate relative to the second adjusting plate along a first direction, the second adjusting assembly is configured to drive the second adjusting plate to translate relative to the rotating adjusting plate along a second direction, and the first direction and the second direction are mutually perpendicular.

As a preferred scheme, the first adjusting assembly comprises a first supporting seat and a first adjusting screw rod, the first supporting seat is fixedly connected with the second adjusting plate, a first screwing hand wheel is arranged at the end part of the first adjusting screw rod, the first adjusting screw rod extends along the first direction, the first adjusting screw rod is in threaded connection with the first supporting seat, and the first adjusting screw rod is screwed through the first supporting seat and is fixedly connected with the first adjusting plate;

the second adjusting assembly comprises a second supporting seat and a second adjusting screw rod, the second supporting seat is fixedly connected with the rotating adjusting plate, a second screwing hand wheel is arranged at the end part of the second adjusting screw rod, the second adjusting screw rod extends along the second direction, the second adjusting screw rod is in threaded connection with the second supporting seat, and the second adjusting screw rod is screwed to penetrate through the second supporting seat and is fixedly connected with the second adjusting plate.

Preferably, the first adjusting assembly further comprises a first limiting piece, and the first limiting piece can be arranged on the first adjusting screw rod with the adjusted relative position so as to limit the axial movement of the first adjusting screw rod;

The second adjusting assembly further comprises a second limiting piece which can be arranged on the second adjusting screw rod with the adjusted relative position so as to limit the axial movement of the second adjusting screw rod.

A coating apparatus comprising a coating chamber and a base as described above, the base body being located within the coating chamber.

The utility model has the beneficial effects that:

The utility model provides a base, which comprises a base main body, a supporting mechanism and a jacking adjusting mechanism, wherein the base main body is used for bearing a substrate to be coated, the supporting mechanism comprises a rotation adjusting plate and a fixed plate, the rotation adjusting plate is rotationally connected with the fixed plate, the rotation adjusting plate is supported at the bottom of the base main body, and the rotation adjusting plate can rotate on a vertical surface relative to the fixed plate so as to drive and adjust the levelness of the base main body, and the jacking adjusting mechanism is used for jacking the rotation adjusting plate to rotate relative to the fixed plate. This base is through adjusting rotation regulating plate for the rotation angle of fixed plate in vertical face and then adjusts the levelness of base main part, has improved the stability to the adjustment of base main part levelness greatly, and then has improved the precision to the adjustment of base main part levelness.

The utility model also provides a coating device, which adopts the base to bear the substrate to be coated in the coating cavity, so that the stability of the adjustment of the levelness of the base main body and the adjustment precision of the levelness of the base main body are improved, and the coating effect of the substrate to be coated is ensured.

Drawings

FIG. 1 is a side view of a coating apparatus provided by an embodiment of the present utility model;

Fig. 2 is a schematic structural diagram of a jacking adjustment mechanism according to an embodiment of the present utility model;

FIG. 3 is a front view of a plating apparatus according to an embodiment of the present utility model;

fig. 4 is an isometric view of a base provided by an embodiment of the present utility model.

In the figure:

100. A base; 200. a film coating chamber;

1. A base body;

2. a support mechanism; 21. rotating the adjusting plate; 22. a fixing plate;

3. A jacking adjustment mechanism; 31. a support backing plate; 311. a first connection plate; 312. a second connecting plate; 3121. a guide groove; 313. reinforcing rib plates; 32. jacking the execution assembly; 33. adjusting the drive assembly; 331. a mounting base; 332. adjusting a screw rod; 333. an adjusting hand wheel; 334. a bushing; 335. a gasket; 336. clamping springs;

4. A position adjusting mechanism; 41. a first adjustment plate; 42. a second adjusting plate; 43. a first adjustment assembly; 431. a first support base; 432. a first adjusting screw; 4321. a first screwing hand wheel; 433. a first limiting member; 4331. a first limit nut; 44. a second adjustment assembly; 441. a second support base; 442. a second adjusting screw; 4421. a second screwing hand wheel; 443. a second limiting piece; 4431. and the second limit nut.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1, the present embodiment provides a plating apparatus mainly including a plating chamber 200 and a base 100, where the base 100 is used to carry a substrate to be plated in the plating chamber 200, and the base 100 can adjust the levelness and horizontal position of the substrate to be plated in the plating chamber 200, so as to ensure that the substrate to be plated is uniformly plated in the plating chamber 200, and ensure the plating effect of the substrate to be plated.

When the levelness of a substrate to be coated is adjusted by the existing base, the base is generally overlapped on the supporting plate, then an adjusting plate is arranged at the bottom of the supporting plate, a plurality of adjusting screws are arranged on the adjusting plate at intervals, the adjusting screws are in threaded connection with the adjusting plate, the adjusting screws are screwed to penetrate through the adjusting plate to be abutted against the bottom of the supporting plate, the adjusting screws are screwed, so that the adjusting screws lift the supporting plate, gaps between the supporting plate and the adjusting plate are adjusted, and the levelness of the base is adjusted. However, in the above adjusting mode, the supporting plate is only supported by a plurality of adjusting screws, so that the stability of supporting and adjusting the supporting plate and the base is greatly reduced, and the adjusting precision is also affected.

In order to solve the above-mentioned problems, as shown in fig. 1 and 2, the susceptor 100 provided in this embodiment includes a susceptor body 1, a supporting mechanism 2 and a lifting adjusting mechanism 3, wherein the susceptor body 1 is used for carrying a substrate to be coated, the supporting mechanism 2 includes a rotation adjusting plate 21 and a fixing plate 22, the rotation adjusting plate 21 is rotationally connected with the fixing plate 22, the rotation adjusting plate 21 is supported at the bottom of the susceptor body 1, the rotation adjusting plate 21 can rotate on a vertical plane relative to the fixing plate 22 to drive and adjust the levelness of the susceptor body 1, and the lifting adjusting mechanism 3 is used for lifting the rotation adjusting plate 21 to rotate relative to the fixing plate 22. The base 100 adjusts the levelness of the base main body 1 by adjusting the rotation angle of the rotation adjusting plate 21 relative to the fixed plate 22, so that the stability of the levelness adjustment of the base main body 1 is greatly improved, the accuracy of the levelness adjustment of the base main body 1 is further improved, and the film coating effect of a substrate to be coated is ensured.

According to the coating equipment provided by the embodiment, the substrate to be coated is borne in the coating cavity 200 by the base 100, so that the stability of the adjustment of the levelness of the base main body 1 and the adjustment precision of the levelness of the base main body 1 are improved, and the coating effect of the substrate to be coated is ensured.

In addition, when the levelness of the substrate to be coated is adjusted by the existing base, the supporting plate is supported by the plurality of adjusting screws, point contact is arranged between the adjusting screws and the supporting plate, and the adjusting screws are easy to cause screwing damage to the supporting plate in the screwing and jacking process of the supporting plate, so that the adjusting precision is greatly influenced.

In order to solve the above-mentioned problem, in the present embodiment, the jacking adjustment mechanism 3 includes a jacking actuating component 32, the jacking actuating component 32 is used for jacking the rotation adjustment plate 21 to rotate relative to the fixed plate 22, and the upper end surface of the jacking actuating component 32 is in surface contact or line contact with the rotation adjustment plate 21, so as to reduce the jacking abrasion between the jacking actuating component 32 and the rotation adjustment plate 21, improve the protection of the rotation adjustment plate 21, and further improve the adjustment accuracy of the levelness of the base body 1 by the jacking actuating component 32.

Specifically, as shown in fig. 2, in the present embodiment, the jacking execution assembly 32 is a wedge-shaped slider, the jacking adjustment mechanism 3 further includes a support pad 31 and an adjustment driving assembly 33, the support pad 31 is fixedly connected to the fixed plate 22, and the adjustment driving assembly 33 can drive the wedge-shaped slider to move to the bottom of the rotation adjustment plate 21 along the support pad 31, so that the upper end surface of the wedge-shaped slider jacks the rotation adjustment plate 21 to rotate relative to the fixed plate 22. By designing the jacking actuating element 32 in the form of a wedge-shaped slider, it is ensured that the wedge-shaped slider is in surface contact or line contact when jacking the rotation angle of the adjustment plate 21. In addition, by providing the support pad 31, a supporting effect is provided for the sliding of the wedge slider. Preferably, in this embodiment, the upper end surface of the wedge-shaped slider is a plane, and the lower end surface of the wedge-shaped slider in moving contact with the support pad 31 is an inclined surface. In other embodiments, the upper end surface of the wedge slider may be designed as an inclined surface, and the lower end surface of the wedge slider in moving contact with the support pad 31 may be designed as a flat surface.

It should be noted that, in other embodiments, the jacking execution assembly 32 may be designed in a form of a jacking block, the jacking block is supported at the bottom of the rotation adjustment plate 21, the jacking adjustment mechanism 3 further includes a jacking driving assembly, an output end of the jacking driving assembly is connected with the jacking block, and the jacking driving assembly is used for driving the jacking block to lift, so that the jacking block jacking adjustment rotation adjustment plate 21 rotates relative to the fixing plate 22. It should be noted that the jacking driving assembly may be a jacking cylinder or a linear motor.

It should be noted that, in this embodiment, one end of the rotation adjusting plate 21 may be rotationally connected to the fixed plate 22 through a rotation hinge, and one end of the rotation adjusting plate 21 may also be rotationally connected to the fixed plate 22 through a rotation shaft or a spring, and the form of the rotation connection between the rotation adjusting plate 21 and the fixed plate 22 is not specifically limited in this embodiment.

Preferably, as shown in fig. 2, a guide groove 3121 is opened on an upper end surface of the support pad 31, the guide groove 3121 extends in a moving direction (front-rear direction in the drawing) of the wedge slider, and the wedge slider moves along the guide groove 3121. By providing the guide groove 3121 on the support pad 31, a guide effect is provided for the movement of the wedge-shaped slider, and the adjustment accuracy of the levelness of the base body 1 is further ensured. In addition, by providing the guide groove 3121, it is also convenient for the adjustment drive assembly 33 to drive the wedge-shaped slider between the rotation adjustment plate 21 and the support pad 31, ensuring the jacking adjustment effect of the wedge-shaped slider. In this embodiment, the bottom wall of the guide groove 3121 is an inclined surface, and the bottom wall of the guide groove 3121 is attached to the lower end surface of the wedge slider, thereby ensuring the accuracy of guiding the wedge slider.

In this embodiment, the support pad 31 includes a first connecting plate 311, a second connecting plate 312, and a reinforcing rib plate 313, where the first connecting plate 311 is connected to the fixing plate 22, the second connecting plate 312 is connected to the first connecting plate 311 at an included angle, a guiding slot 3121 is formed in an upper end surface of the second connecting plate 312, and the reinforcing rib plate 313 is connected between the first connecting plate 311 and the second connecting plate 312. The structural design of the support pad 31 greatly improves the structural strength and structural stability of the support pad 31. It should be noted that, the support pad 31 is an integral part, the second connecting plate 312 is vertically connected to the first connecting plate 311, the rotation adjusting plate 21 is lapped on the upper end surface of the second connecting plate 312, and the wedge-shaped slider is moved along the guide groove 3121 so as to be interposed between the rotation adjusting plate 21 and the second connecting plate 312, so that the jacking adjustment rotation adjusting plate 21 rotates by a certain angle with respect to the fixing plate 22.

Preferably, in this embodiment, the jacking adjustment mechanism 3 further includes a locking member (not shown) that can lock the rotation adjustment plate 21 with the second connection plate 312 in an adjusted relative position. Specifically, the locking member may be a bolt, when the wedge-shaped slider needs to be driven to move, the bolt is unscrewed at this time, so that the rotation adjusting plate 21 rotates by a certain angle relative to the fixing plate 22 under the jacking adjustment of the wedge-shaped slider, and after the relative position of the wedge-shaped slider is adjusted, the bolt is screwed to lock the rotation adjusting plate 21 and the second connecting plate 312, so that the support backing plate 31 stably supports and fixes the rotation adjusting plate 21. The bolt has the advantages of convenience in operation, low cost and reliability in connection.

In the present embodiment, as shown in fig. 2, the adjustment driving assembly 33 includes a mount 331 and an adjustment screw 332, wherein the mount 331 is fixed to the lower end surface of the rotation adjustment plate 21, the adjustment screw 332 extends in the moving direction (front-rear direction in the drawing) of the wedge slider, the adjustment screw 332 is rotatably connected to the mount 331, and the adjustment screw 332 is rotatably connected to the wedge slider through the mount 331. By screwing the adjusting screw rod 332, the wedge-shaped sliding block can slide along the adjusting screw rod 332, so that the adjusting wedge-shaped sliding block slides between the rotating adjusting plate 21 and the second connecting plate 312, and then the adjusting plate 21 is rotated to drive the mounting seat 331 and the adjusting screw rod 332 to deflect a certain angle relative to the supporting base plate 31 and the fixing plate 22 under the effect of jacking adjustment of the wedge-shaped sliding block. The adjustment is performed through the adjusting screw rod 332, so that the adjustment precision is guaranteed, and the operation is convenient. In other embodiments, the wedge-shaped slider may be directly driven to move in the front-rear direction by a linear motor, a linear cylinder, or the like.

To facilitate the screwing operation of the adjustment screw 332, in this embodiment, the adjustment driving assembly 33 further includes an adjustment hand wheel 333, and the adjustment hand wheel 333 is fixedly connected to an end portion of the adjustment screw 332, so that an operator can apply a rotational force to the adjustment screw 332. In addition, in the present embodiment, the adjusting hand wheel 333 may also be directly driven to rotate by an electric structure.

In order to limit the axial movement of the adjusting screw 332 relative to the mounting seat 331 and ensure the driving precision of the wedge-shaped sliding block, in this embodiment, the adjusting driving assembly 33 further comprises a bushing 334, a gasket 335 and a clamp spring 336, wherein the bushing 334 is sleeved on the adjusting screw 332 and clamped between the adjusting hand wheel 333 and the mounting seat 331, the clamp spring 336 is clamped on the periphery of the adjusting screw 332, the clamp spring 336 is positioned on one side, far away from the adjusting hand wheel 333, of the mounting seat 331, the gasket 335 is clamped between the mounting seat 331 and the clamp spring 336, and the adjusting screw 332 sequentially passes through the bushing 334, the mounting seat 331, the gasket 335 and the clamp spring 336 and then is in threaded connection with the wedge-shaped sliding block. In this embodiment, the standard components such as the bushing 334, the spacer 335, and the clip 336 may be made of stainless steel.

Preferably, as shown in fig. 3 and 4, in the present embodiment, the rotation adjusting plate 21 is a U-shaped plate, a bottom plate of the U-shaped plate is rotatably connected to the fixing plate 22, two side wall plates of the U-shaped plate are oppositely disposed in the left-right direction, and two jacking adjusting mechanisms 3 are disposed at intervals in the left-right direction, and wedge-shaped sliders in each jacking adjusting mechanism 3 are used for jacking the side wall plates of the U-shaped plate on the corresponding side of the adjustment. The design further improves the stability and reliability of the levelness adjustment of the base main body 1.

In order to facilitate adjustment of the horizontal position of the base body 1 in the coating chamber 200, as shown in fig. 1, 3 and 4, the base 100 provided in this embodiment further includes a position adjustment mechanism 4, where the position adjustment mechanism 4 includes a first adjustment plate 41, a second adjustment plate 42, a first adjustment assembly 43 and a second adjustment assembly 44, where the first adjustment plate 41 is stacked with the base body 1, the second adjustment plate 42 is stacked with the first adjustment plate 41, the second adjustment plate 42 is stacked with the rotation adjustment plate 21, the first adjustment assembly 43 is used to drive the first adjustment plate 41 to translate in a first direction (front-rear direction in the drawing) relative to the second adjustment plate 42, and the second adjustment assembly 44 is used to drive the second adjustment plate 42 to translate in a second direction (left-right direction in the drawing) relative to the rotation adjustment plate 21. The position adjusting mechanism 4 not only realizes the adjustment of each position of the base main body 1 in the horizontal direction, but also ensures that each adjusting plate is in a mode of being overlapped up and down, so that the structure is more compact and reasonable.

In this embodiment, as shown in fig. 1, the first adjusting assembly 43 includes a first supporting seat 431 and a first adjusting screw 432, wherein the first supporting seat 431 is fixedly connected with the second adjusting plate 42, a first screwing hand wheel 4321 is disposed at an end of the first adjusting screw 432, the first adjusting screw 432 extends along the front-back direction, the first adjusting screw 432 is in threaded connection with the first supporting seat 431, and the first adjusting screw 432 is screwed through the first supporting seat 431 and is fixedly connected with the first adjusting plate 41. When it is necessary to adjust the horizontal position of the base body 1 in the front-rear direction, the first screw hand wheel 4321 is screwed, and then the first adjusting screw 432 pulls the first adjusting plate 41 to support the base body 1 to translate in the front-rear direction relative to the first support 431 and the second adjusting plate 42.

As shown in fig. 3, the second adjusting assembly 44 includes a second supporting seat 441 and a second adjusting screw 442, wherein the second supporting seat 441 is fixedly connected with the rotating adjusting plate 21, a second screwing hand wheel 4421 is disposed at an end of the second adjusting screw 442, the second adjusting screw 442 extends along a left-right direction, the second adjusting screw 442 is in threaded connection with the second supporting seat 441, and the second adjusting screw 442 is screwed through the second supporting seat 441 and is fixedly connected with the second adjusting plate 42. When it is necessary to adjust the horizontal position of the base body 1 in the left-right direction, the second screw hand wheel 4421 is screwed, and then the second adjusting screw 442 pulls the second adjusting plate 42 to support the first adjusting plate 41 and the base body 1 to translate in the left-right direction with respect to the second supporting seat 441 and the rotation adjusting plate 21.

It should be noted that, in the present embodiment, the first screwing hand wheel 4321 and the second screwing hand wheel 4421 may also be directly rotated by an electric structure.

After the horizontal position of the base body 1 in the coating chamber 200 is adjusted, because a gap exists between the first screwing hand wheel 4321 and the first supporting seat 431 and a gap also exists between the second screwing hand wheel 4421 and the second supporting seat 441, under the action of vibration, the first adjusting screw 432 and the second adjusting screw 442 are easy to axially displace, so that the horizontal position of the base body 1 is affected.

In order to solve the above-mentioned problems, as shown in fig. 1 and 3, the first adjusting assembly 43 further includes a first stopper 433, and when the horizontal position of the base body 1 in the front-rear direction is adjusted, the first stopper 433 can be disposed on the first adjusting screw 432 to restrict the first adjusting screw 432 from moving axially. The second adjusting assembly 44 further includes a second limiting member 443, and after the horizontal position of the base body 1 in the left-right direction is adjusted, the second limiting member 443 can be disposed on the second adjusting screw 442 to limit the second adjusting screw 442 from moving axially.

Specifically, in the present embodiment, as shown in fig. 1, the first limiting member 433 includes two first limiting nuts 4331, the two first limiting nuts 4331 are arranged at intervals and are in threaded connection with the first adjusting screw 432, after the horizontal position of the base body 1 in the front-rear direction is adjusted, by screwing the two first limiting nuts 4331 on the first adjusting screw 432, one of the first limiting nuts 4331 is abutted against the front side of the first supporting seat 431, and the other first limiting nut 4331 is abutted against the rear side of the first supporting seat 431, so that the axial movement of the first adjusting screw 432 is limited. When the horizontal position of the base body 1 in the front-rear direction needs to be adjusted, the two first limit nuts 4331 are unscrewed from the first adjusting screw 432. It should be noted that, in other embodiments, the first limiting member 433 may also be designed as a clamping washer, and the clamping washer is clamped in a gap between the first screwing hand wheel 4321 and the first supporting seat 431, so as to avoid axial movement of the first screwing hand wheel 4321 and the first adjusting screw 432.

In this embodiment, as shown in fig. 3, the second limiting member 443 includes two second limiting nuts 4431, the two second limiting nuts 4431 are arranged at intervals and are in threaded connection with the second adjusting screw 442, after the horizontal position of the base body 1 in the left-right direction is adjusted, one of the second limiting nuts 4431 is abutted against the left side of the second supporting seat 441, and the other second limiting nut 4431 is abutted against the right side of the second supporting seat 441, so that the axial movement of the second adjusting screw 442 is limited. When the horizontal position of the base body 1 in the left-right direction needs to be adjusted, the two second limit nuts 4431 are unscrewed from the second adjusting screw 442. It should be noted that, in other embodiments, the second limiting member 443 may be configured as a clamping washer, and the clamping washer is clamped in a gap between the second screwing hand wheel 4421 and the second supporting seat 441, so as to avoid axial movement of the second screwing hand wheel 4421 and the second adjusting screw 442.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. A base, comprising:

a base body (1) for carrying a substrate to be coated;

The supporting mechanism (2), the supporting mechanism (2) comprises a rotation adjusting plate (21) and a fixed plate (22), the rotation adjusting plate (21) is rotationally connected with the fixed plate (22), the rotation adjusting plate (21) is supported at the bottom of the base main body (1), and the rotation adjusting plate (21) can rotate on a vertical surface relative to the fixed plate (22) so as to drive and adjust the levelness of the base main body (1); and

And a jacking adjustment mechanism (3), wherein the jacking adjustment mechanism (3) is configured to jack the rotation adjustment plate (21) to rotate relative to the fixed plate (22).

2. The base according to claim 1, characterized in that the jacking actuating mechanism (3) comprises a jacking actuating assembly (32), the jacking actuating assembly (32) is used for jacking the rotation adjusting plate (21) to rotate relative to the fixed plate (22), and the upper end surface of the jacking actuating assembly (32) is in surface contact or line contact with the rotation adjusting plate (21).

3. The base according to claim 2, wherein the jacking execution assembly (32) is a wedge-shaped sliding block, the jacking adjustment mechanism (3) further comprises a supporting base plate (31) and an adjustment driving assembly (33), the supporting base plate (31) is fixedly connected to the fixed plate (22), and the adjustment driving assembly (33) can drive the wedge-shaped sliding block to move to the bottom of the rotation adjustment plate (21) along the supporting base plate (31) so that the upper end face of the wedge-shaped sliding block jacks the rotation adjustment plate (21) to rotate relative to the fixed plate (22).

4. A base according to claim 3, characterized in that the upper end surface of the support pad (31) is provided with a guide groove (3121), the guide groove (3121) extending in the direction of movement of the wedge-shaped slider, which moves along the guide groove (3121).

5. A base according to claim 3, characterized in that the adjustment drive assembly (33) comprises:

The mounting seat (331), the said mounting seat (331) is fixed with said rotation regulating plate (21); and

The adjusting screw rod (332), the adjusting screw rod (332) is along the direction of movement of wedge slider extension, adjusting screw rod (332) with mount pad (331) rotation is connected, and adjusting screw rod (332) rotation is passed mount pad (331) with wedge slider threaded connection.

6. The base of claim 5, wherein the adjustment drive assembly (33) further comprises:

And the adjusting hand wheel (333) is fixedly connected to the end part of the adjusting screw rod (332).

7. The base of any one of claims 1-4, further comprising:

Position adjustment mechanism (4), position adjustment mechanism (4) including first adjustment board (41), second adjustment board (42), first adjustment subassembly (43) and second adjustment subassembly (44), first adjustment board (41) are last to be superimposed with base main part (1), second adjustment board (42) are last to be superimposed with first adjustment board (41), second adjustment board (42) are superimposed on rotation adjustment board (21), first adjustment subassembly (43) are configured to drive first adjustment board (41) are relative to second adjustment board (42) translation along first direction, second adjustment subassembly (44) are configured to drive second adjustment board (42) are relative to rotation adjustment board (21) translation along the second direction, first direction and second direction mutually perpendicular.

8. The base according to claim 7, wherein the first adjusting assembly (43) comprises a first supporting seat (431) and a first adjusting screw (432), the first supporting seat (431) is fixedly connected with the second adjusting plate (42), a first screwing hand wheel (4321) is arranged at the end part of the first adjusting screw (432), the first adjusting screw (432) extends along the first direction, the first adjusting screw (432) is in threaded connection with the first supporting seat (431), and the first adjusting screw (432) is screwed through the first supporting seat (431) to be fixedly connected with the first adjusting plate (41);

The second adjusting assembly (44) comprises a second supporting seat (441) and a second adjusting screw rod (442), the second supporting seat (441) is fixedly connected with the rotating adjusting plate (21), a second screwing hand wheel (4421) is arranged at the end part of the second adjusting screw rod (442), the second adjusting screw rod (442) extends along the second direction, the second adjusting screw rod (442) is in threaded connection with the second supporting seat (441), and the second adjusting screw rod (442) is screwed through the second supporting seat (441) and is fixedly connected with the second adjusting plate (42).

9. The base of claim 8, wherein the first adjustment assembly (43) further comprises a first stop (433), the first stop (433) being positionable on the first adjustment screw (432) in an adjusted relative position to limit axial movement of the first adjustment screw (432);

The second adjustment assembly (44) further includes a second stop (443), the second stop (443) being positionable on the second adjustment screw (442) with an adjusted relative position to limit axial movement of the second adjustment screw (442).

10. A coating apparatus comprising a coating chamber (200) and a base according to any one of claims 1 to 9, the base body (1) being located within the coating chamber (200).