CN220856519U - Comb-shaped top tooth ceramic plate combined structural member - Google Patents

Abstract

The utility model discloses a comb-shaped top tooth ceramic sheet plate combined structural member, which comprises a base member, wherein one side of the base member is provided with an integer number of ceramic sheet plates, the number of the ceramic sheet plates is larger than one, each ceramic sheet plate is provided with a plugging main plate, each plugging main plate is provided with four column clamping plates, the left and right sides of each four column clamping plate are provided with left and right small pieces, a card loading and unloading area is formed by the hollow areas among the left and right small pieces on the two sides of each four column clamping plate and the upper top of the four column clamping plates, and a card loading and unloading area is formed by the rectangular hollow areas among every two adjacent ceramic sheet plates and the upper parts of the corresponding side surfaces of the base member. The utility model can solve the problem of a top tooth sucker structural part for processing a solar silicon wafer: a specification top tooth sucking disc structure only can correspondingly carry one type of silicon wafer, is unreasonable in design, cannot be leveled and consistent in upper and lower clamping clips, and is unstable and easy to cause side inclination or disorder to scratch the silicon wafer, so that the problem of scrapping of the reloaded clamping silicon wafer is solved.

Description

Comb-shaped top tooth ceramic plate combined structural member

Technical Field

The utility model relates to the technical field of carrying clamping combined structural members for producing and manufacturing solar silicon wafers, in particular to a comb-shaped top tooth ceramic plate combined structural member.

Background

In the production and manufacturing process of the solar silicon wafer, a comb-shaped manipulator is required to be used for grabbing, the comb-shaped manipulator can grab a plurality of solar silicon wafers at one time, and the ceramic wafer carrying and clamping combined structural member is an important part for manufacturing the comb-shaped manipulator and grabbing the solar silicon wafer in cooperation with the manipulator.

The existing ceramic plate-mounted clamping combined structural member exists when in use: the whole design is unreasonable, and a specification top tooth sucking disc structure only can correspond to and load a model silicon chip, and upper and lower clamp cards can not be level and consistent, and clamping the silicon chip is unstable and easily causes side inclination or disorder and scrapes the silicon chip each other, leads to the problem that the reloading clamping silicon chip is scrapped. Therefore, a comb-shaped top tooth ceramic plate combined structural member is developed and set.

Disclosure of utility model

The utility model aims to solve the problems in the use of the existing ceramic plate carrying and clamping combined structural member, and provides a comb-shaped top-tooth ceramic plate combined structural member. The structure can realize stable clamping of two kinds of silicon wafers with different types by the clamping combined structure, ensures that the whole structure is smooth, consistent, stable, good in clamping firmness, stable and free from side inclination or disorder, and is suitable for popularization and use as a carrying clamping combined structure for producing and manufacturing solar silicon wafers.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

The utility model provides a comb-shaped top tooth ceramic wafer board composite structure, includes the base spare, is equipped with a quantity of integer ceramic wafer boards that is greater than one on the side of base spare, still includes:

Each ceramic wafer dividing plate is provided with a plugging main plate, each plugging main plate is provided with four column clamping plates in a clamping way, the upper top of each four column clamping plate is provided with a trapezoid groove with the bottom surface being horizontal, the trapezoid groove can improve the stability of clamping the silicon wafer and the top of the four column clamping plate, and can prevent the contact part of the silicon wafer and the upper top of the four column clamping plate from shaking and wearing,

The left and right sides of each four-column clamping plate are respectively inserted with a left small piece and a right small piece,

The left small piece, the right small piece at two sides of each four-column clamping plate piece and the upper top of the four-column clamping plate piece form a card loading and unloading area together, the card loading and unloading area can be matched with and loaded with silicon chips of one type,

A rectangular hollow area is arranged between every two adjacent ceramic wafer separating plates, a card loading and unloading two areas are formed by the rectangular hollow area between every two adjacent ceramic wafer separating plates and the upper part of the corresponding side face of the base member, and the card loading and unloading two areas can be matched for loading silicon wafers of another model.

In order to ensure that the plugging main board is mounted on the base main body part with good stability and more convenient replacement and adjustment, preferably, the base main body part is provided with a base main body part, the base main body part is provided with a longitudinal vertical rectangular hole, the shape and the size of the rectangular hole are matched and correspond to the shape and the size of the bottom of the plugging main board, the design of the base main body part and the rectangular hole can ensure that the bottom of the plugging main board is stably plugged on the base main body part without deflection and disorder,

The design can fix the plugging main board on the base main body part through the half sinking pin groove and the pin column body, and after a period of continuous use, when one or more plugging main boards need to be adjusted or replaced, the pin column body is taken out, the plugging main board can be pulled out from the base main body part, the assembly and disassembly adjustment is safe and stable, and the replacement adjustment is more convenient.

In order to ensure that the silicon wafers loaded in the two card loading and unloading areas have good flatness consistency and cannot be scratched and damaged by side inclination or disorder, furthermore, the two sides of the bottom surface of the base main body piece are provided with L-shaped grooves which are symmetrically distributed along the horizontal middle vertical surface of the bottom surface,

The L-shaped groove of the base main body piece is internally provided with a flat base plate, the bottom surface of the inserted main board inserted in the rectangular hole on the base main body piece is good in horizontal consistency through the design of the flat base plate, the inserted main board inserted on the base main body piece is ensured to be flat and consistent up and down, the design can avoid carrying silicon chips loaded in the two card loading and unloading areas, the situation that upper clamping cards and lower clamping cards cannot be flat and inconsistent cannot occur, and the silicon chips clamped in the two card loading and unloading areas are laterally inclined or disordered, so that the silicon chips are scratched and damaged.

In order to prevent the left and right small pieces mounted on the plugging main board from being damaged by thermal expansion, preferably, the upper top of the plugging main board is provided with an inverted T-shaped part which is connected with the lower main body part of the plugging main board into a whole, the left and right sides of the inverted T-shaped part are provided with flat table boards, the flat table boards are provided with shallow grooves,

The bottoms of the left small piece and the right small piece are provided with small bosses, the shapes and the sizes of the small bosses are matched with those of the shallow grooves on the platform surface,

Through the design of the small boss and the shallow groove, the left small piece and the right small piece can be arranged on the platform surfaces at the two sides of the inverted T-shaped part of the plugging main board with good stability,

After the silicon wafer is loaded on the combined structural member, the combined structural member and the silicon wafer are integrally conveyed into a heat treatment device, and when the silicon wafer is subjected to heat treatment, a shallow groove can provide a thermal expansion expandable area for a left small piece, a right small piece and a plugging main board, so that the left small piece, the right small piece and the plugging main board are prevented from being damaged and scrapped due to mutual collision and cracking caused by thermal expansion at the installation area positions of the left small piece, the right small piece and the plugging main board.

In order to ensure that the four-column clamping plate is clamped on the plugging main board stably and not deflected, the four-column clamping plate is prevented from tilting laterally and scratching the solar silicon wafer, further, the left side and the right side of the inverted T-shaped part are provided with groove areas, the groove areas on the left side and the right side of the inverted T-shaped part are symmetrically distributed along the longitudinal middle vertical plane of the inverted T-shaped part, the groove areas are mutually matched with the left side and the right side of the bottom of the four-column clamping plate,

The groove area and the design along vertical symmetry in the longitudinal direction of the inverted T-shaped part enable the overall stability of the four-column clamping plate piece clamped on the plugging main board to be good, and ensure that the four-column clamping plate piece clamped on the plugging main board is stable and not deflected.

In order to make the solar silicon wafer loaded on the upper top surface of the four-column clamping plate member stable and not inclined, furthermore, the upper top surface of the four-column clamping plate member is provided with a V-shaped groove, the bottom of the V-shaped groove is provided with a horizontal plane, the V-shaped groove is matched with the plane of the bottom of the silicon wafer, the silicon wafer loaded on the upper top surface of the four-column clamping plate member has good stability and not inclined,

The left and right sides of the bottom of the four-column clamping plate piece are provided with inward clamping hook bodies, the clamping hook bodies can enable the four-column clamping plate piece to be stably clamped at the upper top of the inverted T-shaped part on the plugging main board,

The overall thickness of the four-column clamping plate is smaller than the sum of the thicknesses of the inverted T-shaped part, the left small piece and the right small piece on the plugging main board, and when the two-region silicon wafer loading and unloading are carried out on the card, the design can prevent the side face of the four-column clamping plate from scraping the silicon wafer in the two-region card loading and unloading.

In order to enable the loaded solar silicon wafer to smoothly enter the hollow areas between the left small piece and the right small piece and between the upper parts of the inverted T-shaped parts on the plugging main board from the upper top parts of the left small piece and the right small piece, preferably, the inner sides of the upper tops of the left small piece and the right small piece are provided with slope surfaces, the slope surfaces enable the loaded solar silicon wafer to smoothly enter the hollow areas between the left small piece and the right small piece and between the upper parts of the inverted T-shaped parts on the plugging main board from the upper tops of the left small piece and the right small piece,

The shape and the size of the lower parts of the right small plate and the left small plate are correspondingly matched with the shape and the size of the left and the right flat table surfaces of the inverted T-shaped part at the top of the plugging main plate,

The lower parts of the left small piece and the right small piece can be stably clamped at the left side and the right side of the inverted T-shaped part on the four-column clamping plate and the plugging main plate,

Through the designs, the phenomenon that the upper clamping card and the lower clamping card of the silicon wafer loaded in the card loading and unloading area are not smooth and inconsistent can be avoided, the silicon wafer clamped in the card loading and unloading area is laterally inclined or disordered, and the silicon wafer is scratched and damaged,

The lower parts of the left small piece and the right small piece on the plugging main board can be provided with transverse perforations, the shapes and the sizes of the transverse perforations of the three parts are matched and correspond to each other, the transverse perforations can be embedded with pin connecting pieces or cementing pieces,

At this time, can be provided with horizontal perforation on the reverse T shape portion on the grafting mainboard, the lower part of left side small piece and right small piece also can be provided with horizontal perforation, and the shape and the size of the horizontal perforation of these three places match each other and correspond, and horizontal perforation can inlay and be equipped with round pin connecting piece or cementing piece, and this kind of design can make the connection stability between the three of the reverse T shape portion of left side small piece, right side small piece and grafting mainboard better.

Compared with the prior art, the utility model provides a comb-shaped top tooth ceramic plate combined structural member, which has the following beneficial effects:

1. The comb-shaped top tooth ceramic sheet plate combined structural member utilizes an integral ceramic sheet plate with the number larger than one arranged on the side surface of a base member, wherein the ceramic sheet plate is provided with a plugging main board, four column clamping plate members are clamped and arranged on the plugging main board, left small sheet members and right small sheet members are arranged on the left side and the right side of the four column clamping plate members, a card loading and unloading area is jointly formed by the left small sheet members on the two sides of the four column clamping plate members, a hollow area of the right small sheet members and the upper top of the four column clamping plate members, the card loading and unloading area can be matched with and load silicon wafers of one type,

A rectangular hollow area is arranged between every two adjacent ceramic split plates, a card loading and unloading two areas are formed by the rectangular hollow area between every two adjacent ceramic split plates and the upper part of the corresponding side surface of the base member, the card loading and unloading two areas can be matched for loading silicon chips of another model,

Through the combined design of the first card loading and unloading area and the second card loading and unloading area, two silicon wafers with different types can be clamped by one clamping combined structural member, and the problem that the whole design of the traditional ceramic wafer plate carrying clamping combined structural member is unreasonable, and one specification of top tooth sucker structural member can only correspondingly carry silicon wafers with one type is solved;

2. The comb-shaped top tooth ceramic plate combined structural member is characterized in that a longitudinal vertical rectangular hole is formed in a base main body member of a base member, and the bottom of a plugging main plate can be stably plugged into the base main body member through the design of the base main body member and the rectangular hole without deflection and disorder;

the L-shaped grooves are formed in the two sides of the bottom surface of the base main body piece, a flat base substrate is arranged in the L-shaped grooves of the base main body piece, the bottom surface of the inserted main board inserted in the rectangular hole in the base main body piece is good in horizontal consistency through the design of the flat base substrate, the inserted main board inserted in the base main body piece is ensured to be flat and consistent up and down, the design can avoid that silicon chips loaded in the two card loading and unloading areas cannot be flat and inconsistent up and down clamping cards, and the silicon chips clamped in the two card loading and unloading areas are inclined or disordered to scratch and damage the silicon chips;

The V-shaped grooves are formed in the upper top surface of the four-column clamping plate, the horizontal surfaces are arranged at the bottoms of the V-shaped grooves, the V-shaped grooves are matched with the horizontal surfaces, so that silicon wafers loaded on the upper top surface of the four-column clamping plate are good in stability and not inclined, and the silicon wafers are scratched and damaged by the matching design of the right small plate, the left small plate, the inverted T-shaped part of the plugging main plate and the V-shaped grooves on the four-column clamping plate;

The problem of current ceramic wafer board carries clamping to hold composite structure spare, upper and lower clamp can not be level and unanimous, and clamping silicon chip is unstable and easily causes side slope or disordered and scratch the silicon chip each other, leads to transshipment clamping silicon chip to scrap is solved.

Drawings

FIG. 1 is a schematic view of a comb-shaped top tooth ceramic plate assembly according to the present utility model;

FIG. 2 is an overall schematic of a single ceramic tile in accordance with the present utility model;

FIG. 3 is a schematic view of the base member of the present utility model;

FIG. 4 is a schematic view showing the assembly and disassembly of the base body member and the flat base substrate of the base member of the present utility model;

FIG. 5 is a schematic diagram illustrating the assembly of a plugging main board and four column clamping boards of the ceramic wafer pallet according to the present utility model;

Fig. 6 is a schematic diagram of disassembly and assembly of a plugging main board, four column clamping boards, a left small piece and a right small piece in the utility model.

In the figure: 1. a base body member; 2. a ceramic tile plate; 3. leveling the base substrate; 4. plugging a main board; 5. a right widget; 6, left small pieces; 7. four-column clamping plate members; 8. a card loading and unloading area; 9. a card loading and unloading second area; 10. v-shaped grooves; 11. a rectangular hole; 12. a half-countersunk pin slot; 13. a hook body; 14. an inverted T-shaped portion; 15. a flat table top; 16. a shallow trench; 17. a small boss; 18. a slope surface; 19. a trench region.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

In the description of the present utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

The present utility model will be described in further detail with reference to examples and embodiments.

Example 1:

referring to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, a comb-shaped top tooth ceramic sheet plate combined structural member includes a base member, an integer number of ceramic sheet plates 2, the number of which is greater than one, are arranged on one side surface of the base member, and the comb-shaped top tooth ceramic sheet plate combined structural member further includes:

Each ceramic wafer separating plate 2 is provided with a plugging main plate 4, each plugging main plate 4 is clamped with four column clamping plate pieces 7, the upper top of each four column clamping plate piece 7 is provided with a trapezoid groove with the bottom surface being horizontal, the trapezoid groove can improve the stability of clamping the silicon wafer and the top of the four column clamping plate pieces 7, and can prevent the contact part of the silicon wafer and the top of the four column clamping plate pieces 7 from shaking and wearing,

The left and right sides of each four-column clamping plate piece 7 are respectively inserted with a left small piece 6 and a right small piece 5,

The left small piece 6, the right small piece 5 and the upper top of the four-column clamping plate 7 form a card loading and unloading area 8 together, the card loading and unloading area 8 can be matched with and loaded with silicon chips of one type,

A rectangular hollow area is arranged between every two adjacent ceramic split plates 2, a card loading and unloading two areas 9 are formed by the rectangular hollow area between every two adjacent ceramic split plates 2 and the upper part of the corresponding side surface of the base member, and the card loading and unloading two areas 9 can be matched for loading silicon wafers of another model;

The base member is provided with a base main body member 1, the base main body member 1 is provided with a rectangular hole 11 which is vertical in the longitudinal direction, the shape and the size of the rectangular hole 11 are matched with the shape and the size of the bottom of the plugging main board 4, the design of the base main body member 1 and the rectangular hole 11 can ensure that the bottom of the plugging main board 4 is stably plugged on the base main body member 1 without deflection and disorder,

The half sinking pin groove 12 is formed in one side surface of the base main body part 1, pin column parts can be inserted into the half sinking pin groove 12, the design can fix the plugging main board 4 on the base main body part 1 through the half sinking pin groove 12 and the pin column parts, after the plugging main board 4 is continuously used for a period of time, when one or more plugging main boards 4 need to be adjusted or replaced, after the pin column parts are taken out, the plugging main board 4 can be pulled out from the base main body part 1, the assembly and the disassembly adjustment are safe and stable, and the replacement adjustment is more convenient;

The two sides of the bottom surface of the base main body piece 1 are provided with L-shaped grooves, the L-shaped grooves on the two sides of the bottom surface of the base main body piece 1 are symmetrically distributed along the horizontal middle vertical surface of the bottom surface,

The L-shaped groove of the base main body piece 1 is internally provided with the flat base substrate 3, the design of the flat base substrate 3 ensures that the bottom surface of the inserted mainboard 4 inserted in the rectangular hole 11 on the base main body piece 1 has good horizontal consistency, ensures that the inserted mainboard 4 inserted on the base main body piece 1 is flat and consistent up and down, and can avoid that the silicon wafers loaded in the two card loading and unloading areas 9 cannot be flat and inconsistent up and down clamping, and the silicon wafers clamped in the two card loading and unloading areas 9 are inclined or disordered to scratch and damage the silicon wafers;

the upper top of the plugging main board 4 is provided with an inverted T-shaped part 14, the inverted T-shaped part 14 and the lower main body part of the plugging main board 4 are mutually connected into a whole,

The left and right sides of the inverted T-shaped part 14 are provided with groove areas 19, the groove areas 19 on the left and right sides of the inverted T-shaped part 14 are symmetrically distributed along the longitudinal middle vertical plane of the inverted T-shaped part 14, the groove areas 19 are matched with the left and right sides of the bottom of the four-column clamping plate 7,

The groove area 19 and the design of vertical symmetry along the longitudinal middle of the inverted T-shaped part 14 can ensure that the overall stability of the four-column clamping plate piece 7 clamped on the plugging main board 4 is good, and ensure that the four-column clamping plate piece 7 is clamped on the plugging main board 4 stably and not deflected;

The upper top surface of the four-column clamping plate 7 is provided with a V-shaped groove 10, the bottom of the V-shaped groove 10 is provided with a horizontal plane, the V-shaped groove 10 is matched with the plane of the bottom of the silicon wafer, so that the silicon wafer loaded on the upper top surface of the four-column clamping plate 7 has good stability and is not inclined,

The left and right sides of the bottom of the four-column clamping plate piece 7 are provided with inward clamping hook bodies 13, the clamping hook bodies 13 can ensure that the four-column clamping plate piece 7 is stably clamped at the upper top of the inverted T-shaped part 14 on the plugging main board 4,

The overall thickness of the four-column clamping plate 7 is smaller than the sum of the thicknesses of the inverted T-shaped part 14, the left small piece 6 and the right small piece 5 on the plugging main board 4, and when the two areas 9 for loading and unloading the silicon wafers are loaded on the cards, the design can prevent the side surfaces of the four-column clamping plate 7 from scraping the silicon wafers in the two areas 9 for loading and unloading the cards;

The inner sides of the upper tops of the left small piece 6 and the right small piece 5 are provided with slope surfaces 18, the slope surfaces 18 can enable the loaded solar silicon wafers to smoothly enter into a hollow area between the left small piece 6 and the right small piece 5 and between the upper parts of the inverted T-shaped parts 14 on the plugging main board 4 from the upper tops of the left small piece 6 and the right small piece 5,

The shape and the size of the lower parts of the right small plate 5 and the left small plate 6 are correspondingly matched with the shape and the size of the left and the right flat table surfaces 15 of the inverted T-shaped part 14 on the top of the plugging main plate 4,

The lower parts of the left small piece 6 and the right small piece 5 can be stably clamped on the left side and the right side of the inverted T-shaped part 14 on the four-column clamping plate 7 and the plugging main plate 4,

Through the designs, the phenomenon that the upper clamping card and the lower clamping card of the silicon wafer loaded in the card loading and unloading area 8 are not smooth and inconsistent can be avoided, the silicon wafer clamped in the card loading and unloading area 8 is laterally inclined or disordered, and the silicon wafer is scratched and damaged,

In addition, the upper surface of the plugging main board 4, the lower parts of the left small piece 6 and the right small piece 5 can be provided with transverse perforations, the shapes and the sizes of the transverse perforations of the three parts are matched and correspond to each other, the transverse perforations can be embedded with pin connection pieces or cementing pieces,

At this time, the inverted T-shaped portion 14 on the plugging main board 4 can be further provided with a transverse perforation, and the lower portions of the left small piece 6 and the right small piece 5 can also be provided with transverse perforations, the shapes and the sizes of the transverse perforations at the three positions are matched and correspond to each other, and the transverse perforations can be embedded with a pin connecting piece or a cementing piece, so that the connection stability among the left small piece 6, the right small piece 5 and the inverted T-shaped portion 14 of the plugging main board 4 is better due to the design.

Example 2:

Referring to fig. 5 and 6, basically, embodiment 1 is different in that, in order to prevent the left and right small pieces 6 and 5 mounted on the plugging main board 4 from being damaged each other due to thermal expansion, the plugging main board 4 has an inverted T-shaped portion 14 at the upper top, the inverted T-shaped portion 14 is integrally connected with the lower main body portion of the plugging main board 4, the inverted T-shaped portion 14 has a land 15 on the left and right sides, the land 15 has a shallow groove 16,

The bottoms of the left small piece 6 and the right small piece 5 are provided with small bosses 17, the shape and the size of the small bosses 17 are matched with those of the shallow grooves 16 on the platform surface 15,

By the design of the small boss 17 and the shallow groove 16, the left small piece 6 and the right small piece 5 can be arranged on the platform surfaces at the two sides of the inverted T-shaped part 14 of the plugging main board 4 with good stability,

After the silicon wafer is loaded on the combined structural member, the combined structural member and the silicon wafer are integrally conveyed into a heat treatment device, when the silicon wafer is subjected to heat treatment, the shallow groove 16 can provide a thermal expansion expandable area for the left small piece 6, the right small piece 5 and the plugging main board 4, so that the left small piece 6, the right small piece 5 and the plugging main board 4 are prevented from being damaged and scrapped due to mutual collision and cracking caused by thermal expansion at the installation area positions of the left small piece 6, the right small piece 5 and the plugging main board 4.

The utility model solves the problems of the prior ceramic plate carrying and clamping combined structural member when in use: the whole design is unreasonable, a specification top tooth sucking disc structure can only correspond to carry and adorn a model silicon chip, upper and lower clamp card can not level and unanimity, clamping silicon chip is unstable and easily causes the side to incline or to be disordered and scrape the silicon chip each other, lead to the problem that the clamp dress silicon chip is scrapped, this comb-shaped top tooth ceramic sheet board composite structure can realize that the clamp composite structure stably presss from both sides the silicon chip of two different models, and it is good to ensure whole level and unanimous stability clamp fastness, can not scratch the silicon chip surface in the carrying and loading process, clamping silicon chip is stable can not take place side to incline or to be disordered, be fit for using widely as the carrying clamp composite structure that the production was used to make solar silicon chip.

The present utility model is not limited to the above-mentioned embodiments, and any person skilled in the art, based on the technical solution of the present utility model and the inventive concept thereof, can be replaced or changed equally within the scope of the present utility model.

Claims (7)

1. The utility model provides a comb-shaped top tooth ceramic wafer board composite structure, includes the base spare, is equipped with a quantity of integer ceramic wafer boards that is greater than one on the side of base spare, its characterized in that still includes:

Each ceramic chip board is provided with a plugging main board, each plugging main board is provided with four column clamping boards in a clamping way, the upper top of each four column clamping board is provided with a trapezoid groove with the bottom surface being horizontal,

The left and right sides of each four-column clamping plate are respectively inserted with a left small piece and a right small piece,

The left small piece, the right small piece at two sides of each four-column clamping plate piece and the upper top of the four-column clamping plate piece form a card loading and unloading area together, the card loading and unloading area can be matched with and loaded with silicon chips of one type,

A rectangular hollow area is arranged between every two adjacent ceramic wafer separating plates, a card loading and unloading two areas are formed by the rectangular hollow area between every two adjacent ceramic wafer separating plates and the upper part of the corresponding side face of the base member, and the card loading and unloading two areas can be matched for loading silicon wafers of another model.

2. The comb-shaped top tooth ceramic plate combined structural member according to claim 1, wherein the base member is provided with a base main body member, the base main body member is provided with a rectangular hole which is vertical in the longitudinal direction, the shape and the size of the rectangular hole are matched and correspond to the shape and the size of the bottom of the plugging main plate,

A half sinking pin groove is formed in one side face of the base main body piece, and a pin column piece can be inserted into the half sinking pin groove.

3. The comb-shaped top tooth ceramic plate combined structural member according to claim 2, wherein the two sides of the bottom surface of the base main body are provided with L-shaped grooves, the L-shaped grooves on the two sides of the bottom surface of the base main body are symmetrically distributed along the horizontal middle vertical surface of the bottom surface,

A flat base plate is arranged in the L-shaped groove of the base main body, and the flat base plate can enable the bottom surface of the inserted mainboard in the rectangular hole on the base main body to be good in horizontal consistency.

4. The comb-shaped top tooth ceramic plate combined structural member according to claim 1, wherein the upper top of the plugging main plate is provided with an inverted T-shaped part, the inverted T-shaped part and the lower main body part of the plugging main plate are mutually connected into a whole, the left side and the right side of the inverted T-shaped part are provided with flat table boards, the flat table boards are provided with shallow grooves,

The bottoms of the left small piece and the right small piece are provided with small bosses, and the shapes and the sizes of the small bosses are matched with those of the shallow grooves on the platform surface.

5. The comb-shaped top tooth ceramic plate composite structure according to claim 4, wherein the inverted-T-shaped part is provided with groove areas on the left and right sides, the groove areas on the left and right sides of the inverted-T-shaped part are symmetrically distributed along the longitudinal middle vertical plane of the inverted-T-shaped part, and the groove areas are matched with the left and right sides of the bottom of the four-column clamping plate.

6. The comb-shaped top tooth ceramic plate combined structural member according to claim 5, wherein the upper top surface of the four-column clamping plate is provided with a V-shaped groove, the bottom of the V-shaped groove is provided with a horizontal plane, the V-shaped groove is matched with the plane of the bottom of the silicon wafer,

The left and right sides of the bottom of the four-column clamping plate piece are provided with inward clamping hook bodies, the clamping hook bodies can enable the four-column clamping plate piece to be stably clamped at the upper top of the inverted T-shaped part on the plugging main board,

The overall thickness of the four-column clamping plate is smaller than the sum of the thicknesses of the inverted T-shaped part, the left small piece and the right small piece on the plugging main board.

7. The comb-shaped top tooth ceramic plate combined structural member according to claim 1, wherein the inner sides of the upper tops of the left and right small pieces are provided with slope surfaces, the shapes and the sizes of the lower parts of the right and left small pieces are correspondingly matched with the shapes and the sizes of the flat table surfaces on the left and right sides of the inverted T-shaped part of the upper top of the plugging main plate,

The lower parts of the upper surface of the plugging main board, the left small piece and the right small piece can be provided with transverse perforations, the shapes and the sizes of the transverse perforations of the upper surface, the left small piece and the right small piece are matched and correspond to each other, and the pin connecting piece or the cementing piece can be embedded in the transverse perforations.