CN220829115U - Reduction tail gas waste heat utilization device and polycrystalline silicon production line - Google Patents
Reduction tail gas waste heat utilization device and polycrystalline silicon production line Download PDFInfo
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- CN220829115U CN220829115U CN202320301718.9U CN202320301718U CN220829115U CN 220829115 U CN220829115 U CN 220829115U CN 202320301718 U CN202320301718 U CN 202320301718U CN 220829115 U CN220829115 U CN 220829115U
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- trichlorosilane
- tail gas
- preheater
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- 239000007789 gas Substances 0.000 title claims abstract description 112
- 239000002918 waste heat Substances 0.000 title claims abstract description 52
- 230000009467 reduction Effects 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 16
- 239000005052 trichlorosilane Substances 0.000 claims abstract description 113
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims abstract description 110
- 239000001257 hydrogen Substances 0.000 claims abstract description 36
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 36
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000006200 vaporizer Substances 0.000 claims description 13
- 229920005591 polysilicon Polymers 0.000 abstract description 13
- 230000008016 vaporization Effects 0.000 abstract description 4
- 238000009834 vaporization Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 239000000498 cooling water Substances 0.000 description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000007788 liquid Substances 0.000 description 11
- 239000002994 raw material Substances 0.000 description 6
- 230000003068 static effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Abstract
The utility model provides a reducing tail gas waste heat utilization device and a polysilicon production line, and relates to the field of polysilicon production. The reducing tail gas waste heat utilization device comprises a tail gas pipeline, a first jacket, a second jacket, a hydrogen preheater and a trichlorosilane preheater, wherein an inlet of the tail gas pipeline is used for being connected with a tail gas discharge port of the reducing furnace, and the hydrogen preheater and the trichlorosilane preheater are connected with the tail gas pipeline. Reducing tail gas generated in the reducing furnace is discharged into a tail gas pipeline through a tail gas discharge port and flows through the trichlorosilane preheater, so that heat exchange is carried out between the trichlorosilane preheater and the trichlorosilane, and the temperature of the trichlorosilane is improved. At this time, the amount of steam used in the vaporization process of trichlorosilane is reduced, so that the production cost is reduced, and the effective utilization of the waste heat of the reduction tail gas is realized.
Description
Technical Field
The utility model relates to the field of polysilicon production, in particular to a reducing tail gas waste heat utilization device and a polysilicon production line.
Background
Polysilicon is an important raw material for the information industry and the solar cell industry. With the gradual shortage of resources such as petroleum, coal and the like, the position of solar energy in energy is more and more important, and the solar photovoltaic power generation industry is paid unprecedented high importance, and particularly, the rapid development is kept in the last decade.
The scale and technology of the polysilicon production at the present stage are mature, and the optimization space is negligible. On the basis, the production cost is greatly reduced. Wherein, the improvement of the residual heat utilization rate of the reducing tail gas is extremely critical.
However, the waste heat utilization of the reduction tail gas is a general problem in the photovoltaic industry, and most manufacturers do not fully utilize the waste heat in the reduction tail gas, so that the control of the production cost of the polysilicon is seriously affected.
Disclosure of utility model
In order to solve the problems in the prior art, one of the purposes of the utility model is to provide a reducing tail gas waste heat utilization device.
The utility model provides the following technical scheme:
The utility model provides a reduction tail gas waste heat utilization device, includes tail gas pipeline and trichlorosilane pre-heater, the entry of tail gas pipeline is used for connecting the tail gas discharge port of reducing furnace, trichlorosilane pre-heater connect in the tail gas pipeline.
As a further alternative scheme of the reducing exhaust gas waste heat utilization device, the reducing exhaust gas waste heat utilization device further comprises a first jacket, the first jacket is arranged on the exhaust gas pipeline, and the first jacket is arranged between the trichlorosilane preheater and the reducing furnace.
As a further alternative to the reducing tail gas waste heat utilization device, the outlet of the first jacket is connected with a first flash tank.
As a further alternative scheme of the reducing tail gas waste heat utilization device, the reducing tail gas waste heat utilization device further comprises a second jacket, the second jacket is arranged on the tail gas pipeline, the second jacket is arranged between the trichlorosilane preheater and the reducing furnace, and an outlet of the second jacket is connected with a second flash tank.
As a further alternative to the reducing exhaust gas waste heat utilization device, the first jacket is located between the second jacket and the reducing furnace, and the pressure of steam flashed from the second flash tank is smaller than that of steam flashed from the first flash tank.
As a further alternative scheme of the reducing tail gas waste heat utilization device, the reducing tail gas waste heat utilization device further comprises a trichlorosilane superheater, and an outlet of the first flash tank is communicated with the trichlorosilane superheater.
As a further alternative to the reducing exhaust gas waste heat utilization device, the reducing exhaust gas waste heat utilization device further includes a trichlorosilane vaporizer.
As a further alternative scheme of the reducing tail gas waste heat utilization device, the reducing tail gas waste heat utilization device further comprises a hydrogen preheater, the hydrogen preheater is connected to the tail gas pipeline, and the hydrogen preheater is located between the trichlorosilane preheater and the reducing furnace.
As a further alternative to the reducing tail gas waste heat utilization device, the hydrogen preheater is located between the trichlorosilane preheater and the second jacket.
It is another object of the present utility model to provide a polysilicon production line.
The utility model provides the following technical scheme:
A polysilicon production line comprises a reduction furnace and the reduction tail gas waste heat utilization device.
The embodiment of the utility model has the following beneficial effects:
In the reducing tail gas waste heat utilization device, an inlet of the tail gas pipeline is connected with a tail gas discharge port of the reducing furnace, and the trichlorosilane preheater is connected with the tail gas pipeline. Reducing tail gas generated in the reducing furnace is discharged into a tail gas pipeline through a tail gas discharge port and flows through the trichlorosilane preheater, so that heat exchange is carried out between the trichlorosilane preheater and the trichlorosilane, and the temperature of the trichlorosilane is improved. At this time, the amount of steam used in the vaporization process of trichlorosilane is reduced, so that the production cost is reduced, and the effective utilization of the waste heat of the reduction tail gas is realized.
In order to make the above objects, features and advantages of the present utility model more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic structural diagram of a polysilicon production line according to an embodiment of the present utility model;
Fig. 2 shows a flow path diagram of reducing exhaust in a reducing exhaust waste heat utilization device according to an embodiment of the present utility model;
Fig. 3 shows a flow path diagram of cooling water in a reducing exhaust gas waste heat utilization device according to an embodiment of the present utility model;
Fig. 4 shows a flow path diagram of trichlorosilane in a reducing tail gas waste heat utilization device provided by an embodiment of the utility model.
Description of main reference numerals:
10-a reduction furnace; 20-a static mixer; 100-tail gas pipeline; a 200-trichlorosilane preheater; 210-a first trichlorosilane pipeline; 220-a second trichlorosilane pipeline; 300-a first jacket; 310-a first water supply pipeline; 320-a first return line; 400-a second jacket; 410-a second water supply line; 420-a second return line; 500-a first flash tank; 600-a second flash tank; 700-trichlorosilane superheater; 710-fourth trichlorosilane pipeline; 720-a first steam conduit; 730-a first steam condensate conduit; 800-trichlorosilane vaporizer; 810-a third trichlorosilane pipeline; 820-a second steam conduit; 830-a second steam condensate conduit; 900-hydrogen preheater; 910-a first hydrogen conduit; 920-second hydrogen conduit.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used in the description of the templates herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Examples
Referring to fig. 1 and 2 together, the present embodiment provides a reducing exhaust gas waste heat utilization device for waste heat utilization of reducing exhaust gas generated by a reducing furnace 10, wherein the pipelines through which cooling water, steam and steam condensate flow are shown by dotted lines. The reducing exhaust waste heat utilization device comprises an exhaust pipeline 100 and a trichlorosilane preheater 200, wherein an inlet of the exhaust pipeline 100 is connected with an exhaust emission port of the reducing furnace 10, and the trichlorosilane preheater 200 is connected to the exhaust pipeline 100.
The connection of the trichlorosilane preheater 200 to the tail gas pipeline 100 means that the tail gas pipeline 100 is disconnected at the trichlorosilane preheater 200 to form two interfaces. Along the flow direction of the reducing exhaust gas, the interface positioned at the upstream is connected with the inlet of the trichlorosilane preheater 200, and the interface positioned at the downstream is connected with the outlet of the trichlorosilane preheater 200.
In this embodiment, the trichlorosilane preheater 200 is a tubular heat exchanger having a tube side and a shell side. Wherein, the tube side inlet and the tube side outlet of the trichlorosilane preheater 200 are respectively connected with the tail gas pipeline 100. In addition, the inlet of the shell side of the trichlorosilane preheater 200 is connected with a first trichlorosilane pipeline 210, and the outlet of the shell side of the trichlorosilane preheater 200 is connected with a second trichlorosilane pipeline 220.
In use, the reducing off-gas produced in the reducing furnace 10 is discharged into the off-gas pipe 100 through the off-gas discharge port and flows through the trichlorosilane preheater 200. At the same time, the liquid trichlorosilane is transferred into the trichlorosilane preheater 200 through the first trichlorosilane pipeline 210, exchanges heat with the reduction tail gas flowing through the trichlorosilane preheater 200, and absorbs the waste heat in the reduction tail gas. The liquid trichlorosilane after the temperature rise flows out of the trichlorosilane preheater 200 through the second trichlorosilane pipeline 220 to be further vaporized. At this time, the amount of steam used in the vaporization process of the liquid trichlorosilane is reduced, so that the production cost is reduced, and the effective utilization of the waste heat of the reduction tail gas is realized.
Referring to fig. 1 and fig. 3 together, in some embodiments, the reducing exhaust gas waste heat utilization device further includes at least a first jacket 300. The first jacket 300 is sleeved on the tail gas pipe 100, and the first jacket 300 is positioned between the trichlorosilane preheater 200 and the reduction furnace 10. In addition, a first water supply pipe 310 and a first water return pipe 320 are connected to the first jacket 300.
When in use, cooling water with certain temperature and pressure flows into the first jacket 300 through the first water supply pipeline 310, exchanges heat with the reduction tail gas in the tail gas pipeline 100, and absorbs waste heat in the reduction tail gas. The cooling water with the increased temperature flows out of the first jacket 300 through the first water return pipe 320 to be used, and the waste heat utilization of the reducing exhaust gas is realized while the reducing exhaust gas is cooled.
Similarly, the reducing exhaust gas waste heat utilization device described above further includes a second jacket 400. The second jacket 400 is sleeved on the tail gas pipe 100, and the second jacket 400 is positioned between the trichlorosilane preheater 200 and the reduction furnace 10. In addition, a second water supply pipe 410 and a second water return pipe 420 are connected to the second jacket 400.
In use, cooling water at a certain temperature and pressure flows into the second jacket 400 through the second water supply pipe 410, exchanges heat with the reducing exhaust gas in the exhaust gas pipe 100, and absorbs waste heat in the reducing exhaust gas. The cooling water having the increased temperature flows out of the second jacket 400 through the second water return pipe 420 to be used.
Obviously, by exchanging heat between the first jacket 300 and the second jacket 400, cooling water with different temperatures can be obtained, which is suitable for more situations.
In the present embodiment, the first jacket 300 is located between the second jacket 400 and the reduction furnace 10, and the temperature of the cooling water flowing out through the first water return pipe 320 is higher than the temperature of the cooling water flowing out through the second water return pipe 420.
It will be appreciated that a greater number of jackets may be provided on the exhaust line 100 to obtain a greater variety of different temperatures of cooling water, and will not be described in detail herein.
Further, the outlet of the first jacket 300 is connected to a first flash tank 500 through a first water return pipe 320, and the first flash tank 500 flashes high pressure steam using cooling water in the first water return pipe 320 as a raw material. The outlet of the second jacket 400 is connected with a second flash tank 600 through a second return water pipe 420, and the second flash tank 600 flashes out high-pressure steam by taking cooling water in the second return water pipe 420 as a raw material.
It is apparent that the pressure of the vapor flashed from the second flash tank 600 is less than the pressure of the vapor flashed from the first flash tank 500.
Correspondingly, the reducing exhaust gas waste heat utilization device further comprises a trichlorosilane superheater 700 and a trichlorosilane vaporizer 800, and the outlet of the first flash tank 500 is communicated with the trichlorosilane superheater 700.
When in use, the liquid trichlorosilane flowing out through the second trichlorosilane pipeline 220 enters the trichlorosilane vaporizer 800 to exchange heat with the steam from other sources, and is vaporized after absorbing the heat of the steam. The gaseous trichlorosilane further enters the trichlorosilane superheater 700, exchanges heat with the steam flashed from the first flash tank 500, absorbs the heat of the steam, and then further heats up.
Referring to fig. 4, in the present embodiment, the trichlorosilane vaporizer 800 has a trichlorosilane inlet, a trichlorosilane outlet, a steam inlet, and a steam outlet. Wherein the trichlorosilane inlet of the trichlorosilane vaporizer 800 is connected with the second trichlorosilane pipeline 220, and further connected with the shell side outlet of the trichlorosilane preheater 200. The trichlorosilane outlet of the trichlorosilane vaporizer 800 is connected with a third trichlorosilane pipeline 810, and is connected with the trichlorosilane superheater 700 through the third trichlorosilane pipeline 810. The steam inlet of the trichlorosilane vaporizer 800 is connected with a second steam pipeline 820 for the inflow of the steam from other sources. In addition, a second steam condensate pipe 830 is connected to the steam outlet of the trichlorosilane vaporizer 800 for discharging the condensed steam.
In this embodiment, trichlorosilane superheater 700 is a tubular heat exchanger having a tube side and a shell side. Wherein, the tube side inlet of the trichlorosilane superheater 700 is connected with a third trichlorosilane pipeline 810, and the tube side outlet of the trichlorosilane superheater 700 is connected with a fourth trichlorosilane pipeline 710. The shell side inlet of the trichlorosilane superheater 700 is connected with a first steam pipeline 720, and is connected with the outlet of the first flash tank 500 through the first steam pipeline 720. In addition, a first steam condensate pipe 730 is connected to the shell side outlet of the trichlorosilane superheater 700 for discharging the condensed steam.
Referring again to fig. 1 and 2, in some embodiments, the reducing exhaust gas waste heat utilization device further includes a hydrogen preheater 900. Similar to the trichlorosilane preheater 200, the hydrogen preheater 900 is connected to the tail gas pipe 100, and the hydrogen preheater 900 is located between the trichlorosilane preheater 200 and the reduction furnace 10.
Specifically, the hydrogen preheater 900 is located between the trichlorosilane preheater 200 and the second jacket 400, and the hydrogen preheater 900 is a tubular heat exchanger having a tube side and a shell side.
Wherein, the tube side inlet and the tube side outlet of the hydrogen preheater 900 are respectively connected with the tail gas pipeline 100. In addition, the shell side inlet of the hydrogen preheater 900 is connected to a first hydrogen pipe 910, and the shell side outlet of the hydrogen preheater 900 is connected to a second hydrogen pipe 920.
In use, the reduced exhaust gas flowing into the exhaust conduit 100 flows through the hydrogen preheater 900. At the same time, the recovered hydrogen is transferred into the hydrogen preheater 900 through the first hydrogen pipe 910, exchanges heat with the reduced tail gas flowing through the hydrogen preheater 900, absorbs the residual heat in the reduced tail gas, and flows out of the hydrogen preheater 900 through the second hydrogen pipe 920 after the temperature is raised.
When the device is used, the reducing tail gas waste heat utilization device cools the reducing tail gas through the first jacket 300 and the second jacket 400, cooling water with different temperatures is obtained, and then high-pressure steam with different pressures is flashed by taking the cooling water as a raw material. The cooled reduction tail gas flows into the hydrogen preheater 900 to heat the recovered hydrogen, and then flows into the trichlorosilane preheater 200 to heat the liquid trichlorosilane. The heated liquid trichlorosilane enters the trichlorosilane vaporizer 800, exchanges heat with steam with relatively low pressure, absorbs the heat of the steam and is vaporized. The vaporized gaseous trichlorosilane enters the trichlorosilane superheater 700, exchanges heat with steam with relatively high pressure, absorbs the heat of the steam and then continuously heats.
In a word, the reducing exhaust gas waste heat utilization device can utilize the waste heat in the reducing exhaust gas to improve the temperature when the liquid trichlorosilane enters the trichlorosilane vaporizer 800, reduce the steam amount used during the vaporization of the liquid trichlorosilane, and simultaneously reduce the use amount of cooling water. On the basis, the reducing tail gas waste heat utilization device further utilizes the heat in the reducing tail gas absorbed by the cooling water, so that the full utilization of the waste heat in the reducing tail gas is finally realized, and the production cost is reduced.
Referring to fig. 1, the present embodiment further provides a polysilicon production line, which includes a reduction furnace 10, a static mixer 20, and the reduction exhaust gas waste heat utilization device.
Wherein the exhaust gas discharge port of the reduction furnace 10 is connected to the inlet of the exhaust gas pipe 100. The fourth trichlorosilane pipe 710 and the second hydrogen pipe 920 are connected with the inlet of the static mixer 20, and the outlet of the static mixer 20 is connected with the raw material inlet of the reduction furnace 10 through pipes.
In one embodiment of the present embodiment, 185 ℃ cooling water flows into the first jacket 300 through the first water supply pipe 310 to primarily cool the reduced exhaust gas. The temperature of the cooling water is raised to 205 ℃, and high-pressure steam of 1.0Mpa is flashed by the first flash tank 500 for the trichlorosilane superheater 700 and the whole polysilicon production line. The cooling water of 135 deg.c flows into the second jacket 400 through the second water supply pipe 410 to further cool the primarily cooled reduced exhaust gas. The temperature of the cooling water is raised to 155 ℃, and high-pressure steam of 0.2Mpa is flashed out through the second flash tank 600 for the whole polysilicon production line.
After two cooling passes, the temperature of the reduced tail gas is reduced to about 170 ℃. The 170 ℃ reduction tail gas enters the hydrogen preheater 900 to exchange heat with the recovered hydrogen, so that the recovered hydrogen is heated to 130 ℃, and the reduction tail gas is cooled to 152 ℃. The reducing tail gas at 152 ℃ enters a trichlorosilane preheater 200 to exchange heat with liquid trichlorosilane at 65 ℃ so that the temperature of the liquid trichlorosilane is increased to 92 ℃, and the reducing tail gas is reduced to below 120 ℃.
The liquid trichlorosilane after heat exchange enters a trichlorosilane vaporizer 800, absorbs the heat of 0.4Mpa high-pressure steam, vaporizes, and heats to 113 ℃. The vaporized gaseous trichlorosilane enters a trichlorosilane superheater 700, absorbs the heat of high-pressure steam of 1.0Mpa and then rises to 170 ℃. Finally, gaseous trichlorosilane at 170 ℃ is fully mixed with hydrogen at 130 ℃ through the static mixer 20, and the mixed gas enters the reduction furnace 10 for reaction.
Wherein, a similar jacket is arranged on the furnace body of the reduction furnace 10, and 0.4Mpa high-pressure steam is flashed by taking cooling water flowing through the jacket as raw material.
Any particular values in all examples shown and described herein are to be construed as merely illustrative and not a limitation, and thus other examples of exemplary embodiments may have different values.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The above examples merely represent a few embodiments of the present utility model, which are described in more detail and are not to be construed as limiting the scope of the present utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model.
Claims (5)
1. The reducing tail gas waste heat utilization device is characterized by comprising a tail gas pipeline, a trichlorosilane preheater, a first jacket, a second jacket and a trichlorosilane superheater, wherein an inlet of the tail gas pipeline is used for being connected with a tail gas discharge port of a reducing furnace, and the trichlorosilane preheater is connected with the tail gas pipeline;
The first jacket is arranged on the tail gas pipeline and is positioned between the trichlorosilane preheater and the reduction furnace;
The outlet of the first jacket is connected with a first flash tank;
The second jacket is arranged in the tail gas pipeline, is positioned between the trichlorosilane preheater and the reduction furnace, and is connected with a second flash tank at an outlet;
The first jacket is positioned between the second jacket and the reduction furnace, and the pressure of steam flashed from the second flash tank is smaller than that of steam flashed from the first flash tank;
And the outlet of the first flash tank is communicated with the trichlorosilane superheater.
2. The reducing exhaust gas waste heat utilization device according to claim 1, further comprising a trichlorosilane vaporizer.
3. The reducing exhaust gas waste heat utilization device according to claim 1 or 2, further comprising a hydrogen preheater connected to the exhaust gas pipe, the hydrogen preheater being located between the trichlorosilane preheater and the reduction furnace.
4. The reduced tail gas waste heat utilization device of claim 3, wherein the hydrogen preheater is located between the trichlorosilane preheater and the second jacket.
5. A polycrystalline silicon production line, characterized by comprising a reduction furnace and the reduction tail gas waste heat utilization device according to any one of claims 1 to 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320301718.9U CN220829115U (en) | 2023-02-23 | 2023-02-23 | Reduction tail gas waste heat utilization device and polycrystalline silicon production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320301718.9U CN220829115U (en) | 2023-02-23 | 2023-02-23 | Reduction tail gas waste heat utilization device and polycrystalline silicon production line |
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| CN220829115U true CN220829115U (en) | 2024-04-23 |
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| CN202320301718.9U Active CN220829115U (en) | 2023-02-23 | 2023-02-23 | Reduction tail gas waste heat utilization device and polycrystalline silicon production line |
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| Country | Link |
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| CN (1) | CN220829115U (en) |
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