CN220828525U - Two-stage shutoff valve - Google Patents
Two-stage shutoff valve Download PDFInfo
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- CN220828525U CN220828525U CN202321059690.9U CN202321059690U CN220828525U CN 220828525 U CN220828525 U CN 220828525U CN 202321059690 U CN202321059690 U CN 202321059690U CN 220828525 U CN220828525 U CN 220828525U
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- piston
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- valve core
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- 238000007789 sealing Methods 0.000 claims description 94
- 239000013013 elastic material Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model relates to a two-stage shutoff valve, which is characterized in that a cylinder is internally provided with two stages of driving and can move up and down, a first piston and a second piston divide the interior of the cylinder into three cavities, the first cavity is positioned above the first piston and the second piston, the second cavity is positioned below the first piston, a third cavity is positioned below the second piston, a valve rod is fixedly connected with the first piston, a sleeve is fixedly connected with the second piston, the sleeve is fixedly connected with a valve core, a channel is arranged in the valve rod and is respectively communicated with a first air source port and the second cavity, and the side surface of the cylinder is provided with a second air source port which is communicated with a third cavity. According to the utility model, the first air source port is arranged at the top of the air cylinder, and the second air source port is arranged at the side surface of the air cylinder, so that the problems of air supply and air exhaust of the two-stage driving mechanism are solved; the valve rod is driven by the first piston to act so as to control the small channel to open and close, the sleeve and the valve core are driven by the second piston to act so as to control the large channel to open and close, and the problems that the small channel is used for feeding air slowly and stably and the large channel is used for feeding air fully are solved.
Description
Technical Field
The utility model relates to the field of shut-off valves, in particular to a two-stage shut-off valve.
Background
The two-stage shutoff valve is mainly applied to the semiconductor industry, and the existing pneumatic shutoff valve is basically a single-stage driving mechanism and cannot realize two-stage driving control.
Meanwhile, the existing shut-off valve is full supply pressure, and when the vacuum chamber returns to the atmospheric pressure, the full supply pressure enters the chamber to cause turbulence of indoor air flow and even to roll up particles.
Disclosure of Invention
The utility model aims to solve the problems, and provides a two-stage shutoff valve which solves the problems of gas supply and gas exhaust of a two-stage driving mechanism of the two-stage shutoff valve; the problem of small channel is slowly fed gas steady pressure earlier, and then the full volume of big passageway is fed gas is solved.
A two-stage shut-off valve comprising: the lower valve body and cylinder, the cylinder includes two-stage actuating mechanism, but reciprocates, the cylinder includes cylinder body, valve rod, first piston, second piston, sleeve and case, the second piston is located the cylinder body inside, first piston is located the second piston inside, first piston and second piston separate the cylinder body inside into three cavity, first cavity is located between first piston, second piston, cylinder body and the valve rod, the second cavity is located between first piston, second piston, sleeve and the valve rod, the third cavity is located between second piston, cylinder body and the sleeve, the cylinder body top is equipped with first air supply mouth, valve rod and first piston fixed connection, the inside passageway that is equipped with of valve rod, the passageway both ends of valve rod are linked together with first air supply mouth and second cavity respectively, the cylinder body side is equipped with the second air supply mouth, second air supply mouth and third cavity are linked together, sleeve and second piston fixed connection, sleeve and case fixed connection, be equipped with sealed pad and the case sealing washer on the valve rod.
On the basis of the technical scheme, the novel cylinder comprises a first spring, a second sealing ring and a fourth sealing ring, wherein the cylinder body of the cylinder comprises an end cover and a cylinder body, the cylinder body is fixedly connected with the end cover, the first spring and the second spring are located in a first cavity, two ends of the first spring are respectively contacted with the end cover and a first piston, two ends of the second spring are respectively contacted with the end cover and a second piston, the second sealing ring is sleeved outside the first piston and is in sliding connection with the inner wall of the second piston, and the fourth sealing ring is sleeved outside the second piston and is in sliding connection with the inner wall of the cylinder body.
On the basis of the technical scheme, the novel valve rod sealing device further comprises a sealing retaining ring and a third sealing ring, the cross section of the sealing retaining ring is rectangular, the inner side and the outer side of the sealing retaining ring are respectively attached to the valve rod and the sleeve, the sealing retaining ring is fixed to the sleeve, the valve rod is in sliding connection with the sealing retaining ring, the inner side and the outer side of the third sealing ring are respectively attached to the sleeve and the second piston, the third sealing ring is fixed to the second piston and the sleeve, and the sealing retaining ring is made of polytetrafluoroethylene.
On the basis of the technical scheme, the novel valve is characterized by further comprising a fifth sealing ring, a sixth sealing ring and a first sealing ring, wherein the inner side and the outer side of the fifth sealing ring are respectively attached to the sleeve and the cylinder, the fifth sealing ring is fixed to the cylinder, the inner side and the outer side of the sixth sealing ring are respectively attached to the valve rod and the sleeve, the sixth sealing ring is fixed to the sleeve, the inner side and the outer side of the first sealing ring are respectively attached to the cylinder and the lower valve body, and the seventh sealing ring is fixed to the cylinder.
On the basis of the technical scheme, two groups of sleeve medium through holes are formed in the sleeve, the sleeve is fixedly connected with the valve core, a valve core small channel hole is formed in the middle of the valve core, a valve core sealing gasket and a valve rod sealing gasket are arranged on the valve core, and a valve core sealing gasket small channel hole is formed in the middle of the valve core sealing gasket.
On the basis of the technical scheme, the cylinder body is fixedly connected with the lower valve body, the lower valve body is provided with an inlet, an outlet and a valve seat, the inlet and the outlet are communicated through the valve seat, the valve core sealing gasket and the valve seat are both revolution bodies, and the valve core sealing gasket is made of elastic materials.
The utility model has the following advantages: the first air source port is arranged at the top of the air cylinder, and the second air source port is arranged on the side surface of the air cylinder, so that the problems of air supply and air exhaust of the two-stage driving mechanism are solved; the valve rod is driven by the first piston to act so as to control the small channel to open and close, the sleeve and the valve core are driven by the second piston to act so as to control the large channel to open and close, and the problems that the small channel is used for feeding air slowly and stably and the large channel is used for feeding air fully are solved.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is apparent that the drawings in the following description are only one embodiment of the present utility model, and that other embodiments of the drawings may be derived from the drawings provided without inventive effort for a person skilled in the art.
Fig. 1: the utility model relates to a schematic cross-sectional structure diagram of a two-stage shut-off valve when the two-stage shut-off valve is closed;
Fig. 2: the utility model relates to a schematic cross-sectional structure diagram of a secondary shutoff valve when a small channel is opened;
Fig. 3: the utility model relates to a schematic cross-sectional structure diagram of a two-stage shutoff valve when a large channel is opened;
fig. 4: the utility model discloses a schematic sectional structure of a two-stage shut-off valve.
Detailed Description
The utility model is further illustrated by the following figures and examples:
embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
Examples
As shown in fig. 1, 2 and 3, the present embodiment provides a two-stage shut-off valve, including: the lower valve body 19 and the cylinder, the cylinder includes two-stage actuating mechanism, but reciprocates, the cylinder includes cylinder body, valve rod 8, first piston 9, second piston 10, sleeve 7 and case 16, second piston 10 is located the cylinder body inside, first piston 9 is located the second piston 10 inside, first piston 9 and second piston 10 separate into three cavity with the cylinder body inside, first cavity 31 is located between first piston 9, second piston 10, cylinder body and the valve rod 8, second cavity 32 is located between first piston 9, second piston 10, sleeve 7 and valve rod 8, third cavity 33 is located between second piston 10, cylinder body and sleeve 7, the cylinder body top is equipped with first air source mouth 20, valve rod 8 and first piston 9 fixed connection, the passageway both ends of valve rod 8 are linked together with first air source mouth 20 and second cavity 32 respectively, the cylinder body side is equipped with second air source mouth 21, second cavity 21 and third cavity 7 are linked together with valve rod 7 and case 8, the sealing pad is equipped with the valve core 16 fixed connection with the valve rod 7, the sealing pad is equipped with the valve case 16.
On the basis of the technical scheme, the novel air cylinder further comprises a first spring 2, a second spring 3, a second sealing ring 4 and a fourth sealing ring 11, wherein the cylinder body of the air cylinder comprises an end cover 1 and a cylinder body 14, the cylinder body 14 is fixedly connected with the end cover 1, the first spring 2 and the second spring 3 are located in a first cavity 31, two ends of the first spring 2 are respectively contacted with the end cover 1 and the first piston 9, two ends of the second spring 3 are respectively contacted with the end cover 1 and the second piston 10, the second sealing ring 4 is sleeved on the outer side of the first piston 9 and is in sliding connection with the inner wall of the second piston 10, and the fourth sealing ring 11 is sleeved on the outer side of the second piston 10 and is in sliding connection with the inner wall of the cylinder body 14.
On the basis of the technical scheme, the novel valve rod sealing device further comprises a sealing retaining ring 5 and a third sealing ring 6, the cross section of the sealing retaining ring 5 is rectangular, the inner side and the outer side of the sealing retaining ring 5 are respectively attached to a valve rod 8 and a sleeve 7, the sealing retaining ring 5 is fixed to the sleeve 7, the valve rod 8 is in sliding connection with the sealing retaining ring 5, the inner side and the outer side of the third sealing ring 6 are respectively attached to the sleeve 7 and a second piston 10, the third sealing ring 6 is fixed to the second piston 10 and the sleeve 7, and the sealing retaining ring 5 is made of polytetrafluoroethylene.
On the basis of the technical scheme, the valve further comprises a fifth sealing ring 12, a sixth sealing ring 13 and a first sealing ring 15, wherein the inner side and the outer side of the fifth sealing ring 12 are respectively attached to the sleeve 7 and the cylinder 14, the fifth sealing ring 12 is fixed to the cylinder 14, the inner side and the outer side of the sixth sealing ring 13 are respectively attached to the valve rod 8 and the sleeve 7, the sixth sealing ring 13 is fixed to the sleeve 7, the inner side and the outer side of the first sealing ring 15 are respectively attached to the cylinder 14 and the lower valve body 19, and the first sealing ring 15 is fixed to the cylinder 14.
On the basis of the technical scheme, two groups of sleeve medium through holes 22 are formed in the sleeve 7, the sleeve 7 is fixedly connected with the valve core 16, a valve core small channel hole 25 is formed in the middle of the valve core 16, a valve core sealing pad 17 and a valve rod sealing pad 18 are arranged on the valve core 16, and a valve core sealing pad small channel hole 26 is formed in the middle of the valve core sealing pad 17.
On the basis of the technical scheme, the cylinder 14 is fixedly connected with the lower valve body 19, the lower valve body 19 is provided with an inlet 23, an outlet 24 and a valve seat 27, the inlet 23 and the outlet 24 are communicated through the valve seat 27, a valve core small passage hole 25, a valve core sealing gasket small passage hole 26 and a sleeve medium through hole 22, the valve core sealing gasket 17, the valve core 16 and the valve seat 27 are all revolution bodies, and the valve core sealing gasket 17 and the valve rod sealing gasket 18 are made of elastic materials.
Working principle:
When the valve is opened in the initial stage, high-pressure gas enters the communication hole 28 from the first gas source port 20, and the high-pressure gas sequentially passes through the axial blind hole 29 and the radial through hole 30 and then enters the second cavity 32. The high-pressure gas pushes the first piston 9 upwards to move, so that the valve rod 8 is driven to move upwards, the valve rod 8 is separated from the valve rod sealing gasket 18, the valve core small passage hole 25 is opened, a gas medium enters from the inlet 23 and flows out from the outlet 24 after passing through the valve seat 27, the valve core sealing gasket small passage hole 26, the valve core small passage hole 25 and the sleeve medium through hole 22, and the gas flow direction is shown by an arrow in fig. 2.
The valve main air supply is opened and the initial air supply is stopped, the air source is disconnected from the first air source port 20, and the second cavity 32 is communicated with the outside atmosphere. The high-pressure gas enters the third cavity 33 from the second gas source port 21, the second piston 10 is pushed upwards by the high-pressure gas to move upwards, the sleeve 7, the valve core 16 and the valve core sealing gasket 17 are driven to move upwards, the valve rod 8 and the piston 9 are pushed by the valve core 16 to move upwards, the pressure generated by the high-pressure gas in the third cavity 33 overcomes the force of the first spring 2 and the force of the second spring 3, the valve main channel is in an open state, the gas medium flows out from the outlet 24 after passing through the valve seat 27, and the flow direction of the gas is shown by an arrow in fig. 3.
When the valve is closed, the air source is disconnected from the second air source port 21, and the third cavity 33 is communicated with the outside atmosphere. The first spring 2 and the second spring 3 rebound to respectively push the first piston 9 and the second piston 10 to move downwards, the gas in the second cavity 32 is discharged outwards from the first gas source port 20 along the channel, and the gas in the third cavity 33 is discharged outwards from the second gas source port 21. The first piston 9 drives the valve rod 8 to move downwards, the valve rod 8 is pressed with the valve rod sealing gasket 18 to close the valve core small channel hole 25, the second piston 10 drives the sleeve 8 and the valve core 16 to move downwards, the valve core sealing gasket 17 is pressed with the valve seat to close the large channel hole, and the inlet 23 and the outlet 24 are disconnected.
The present utility model has been described above by way of example, but the present utility model is not limited to the above-described embodiments, and any modifications or variations based on the present utility model fall within the scope of the present utility model.
Claims (6)
1. A two-stage shut-off valve, comprising: the lower valve body (19) and the air cylinder, the air cylinder comprises a two-stage driving mechanism and can move up and down, the air cylinder comprises a cylinder body, a valve rod (8), a first piston (9), a second piston (10), a sleeve (7) and a valve core (16), the second piston (10) is positioned in the cylinder body, the first piston (9) and the second piston (10) divide the interior of the cylinder body into three cavities, the first cavity (31), the second cavity (32) and a third cavity (33), the first cavity (31) is positioned between the first piston (9), the second piston (10), the cylinder body and the valve rod (8), the second cavity (32) is positioned between the first piston (9), the second piston (10), the sleeve (7) and the valve rod (8), the third cavity (33) is positioned between the second piston (10), the cylinder body and the sleeve (7), the top of the cylinder body is provided with a first air source port (20), the first cavity (8) is fixedly connected with the first piston (9), the second cavity (8) is fixedly connected with the first air port (20) and the second air port (8) through the first air port (21) and the second air port (8), the second air source port (21) is communicated with the third cavity (33), the sleeve (7) is fixedly connected with the second piston (10), the sleeve (7) is fixedly connected with the valve core (16), and the valve core (16) is provided with a valve core sealing gasket (17) and a valve rod sealing gasket (18).
2. A two-stage shut-off valve as in claim 1 wherein: still include first spring (2), second spring (3), second sealing washer (4) and fourth sealing washer (11), the cylinder body includes end cover (1) and barrel (14), barrel (14) and end cover (1) fixed connection, first spring (2) and second spring (3) are located first cavity (31), first spring (2) both ends respectively with end cover (1) and first piston (9) contact, second spring (3) both ends respectively with end cover (1) and second piston (10) contact, second sealing washer (4) suit is in the outside of first piston (9), with second piston (10) inner wall sliding connection, fourth sealing washer (11) suit is in the outside of second piston (10), with barrel (14) inner wall sliding connection.
3. A two-stage shut-off valve as in claim 2 wherein: still include seal retainer plate (5) and third sealing washer (6), the cross-section of seal retainer plate (5) is the rectangle, the inside and outside both sides of seal retainer plate (5) are laminated with valve rod (8) and sleeve (7) respectively, seal retainer plate (5) are fixed with sleeve (7), valve rod (8) and seal retainer plate (5) sliding connection, the inside and outside both sides of third sealing washer (6) are laminated with sleeve (7) and second piston (10) respectively, third sealing washer (6) are fixed with second piston (10) and sleeve (7), seal retainer plate (5) are polytetrafluoroethylene and make.
4. A two-stage shut-off valve as in claim 2 wherein: still include fifth sealing washer (12), sixth sealing washer (13) and first sealing washer (15), the inside and outside both sides of fifth sealing washer (12) laminate with sleeve (7) and barrel (14) respectively, fifth sealing washer (12) are fixed with barrel (14), the inside and outside both sides of sixth sealing washer (13) laminate with valve rod (8) and sleeve (7) respectively, sixth sealing washer (13) are fixed with sleeve (7), the inside and outside both sides of first sealing washer (15) laminate with barrel (14) and lower valve body (19) respectively, first sealing washer (15) are fixed with barrel (14).
5. A two-stage shut-off valve as in claim 1 wherein: two sets of sleeve medium through holes (22) are formed in the sleeve (7), the sleeve (7) is fixedly connected with the valve core (16), a valve core small channel hole (25) is formed in the middle of the valve core (16), a valve core sealing gasket (17) and a valve rod sealing gasket (18) are arranged on the valve core (16), and a valve core sealing gasket small channel hole (26) is formed in the middle of the valve core sealing gasket (17).
6. A two-stage shut-off valve as in claim 1 wherein: the valve is characterized in that the lower valve body (19) is fixedly connected with the cylinder body (14), an inlet (23), an outlet (24) and a valve seat (27) are formed in the lower valve body (19), the inlet (23) and the outlet (24) are communicated through the valve seat (27), a valve core small passage hole (25), a valve core sealing gasket small passage hole (26) and a sleeve medium through hole (22), the valve core sealing gasket (17), the valve core (16) and the valve seat (27) are all revolution bodies, and the valve core sealing gasket (17) and the valve rod sealing gasket (18) are made of elastic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321059690.9U CN220828525U (en) | 2023-05-06 | 2023-05-06 | Two-stage shutoff valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321059690.9U CN220828525U (en) | 2023-05-06 | 2023-05-06 | Two-stage shutoff valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220828525U true CN220828525U (en) | 2024-04-23 |
Family
ID=90721572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321059690.9U Active CN220828525U (en) | 2023-05-06 | 2023-05-06 | Two-stage shutoff valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220828525U (en) |
-
2023
- 2023-05-06 CN CN202321059690.9U patent/CN220828525U/en active Active
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