CN220827459U - Photovoltaic cell coating reaction furnace - Google Patents
Photovoltaic cell coating reaction furnace Download PDFInfo
- Publication number
- CN220827459U CN220827459U CN202322682595.0U CN202322682595U CN220827459U CN 220827459 U CN220827459 U CN 220827459U CN 202322682595 U CN202322682595 U CN 202322682595U CN 220827459 U CN220827459 U CN 220827459U
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- furnace body
- heating furnace
- spiral coil
- photovoltaic cell
- flange
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 25
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 14
- 239000010935 stainless steel Substances 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 241000950638 Symphysodon discus Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- HOQADATXFBOEGG-UHFFFAOYSA-N isofenphos Chemical compound CCOP(=S)(NC(C)C)OC1=CC=CC=C1C(=O)OC(C)C HOQADATXFBOEGG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model discloses a photovoltaic cell coating reaction furnace, which relates to the technical field of photovoltaic cell coating equipment and comprises a heating furnace body and a stainless steel barrel fixedly arranged in the heating furnace body, wherein a flange is fixedly arranged at a furnace mouth of the heating furnace body, an air inlet pipeline is fixedly arranged in the flange, a spiral coil is fixedly arranged on the inner wall of the stainless steel barrel, the spiral coil is communicated with the air inlet pipeline, and a plurality of funnel holes which are uniformly distributed are formed in the inner ring of the spiral coil. The utility model can discharge the reaction gas into the heating furnace body uniformly by arranging the plurality of hopper holes in the single spiral coil, so that the temperature difference is not easy to generate in the heating furnace body due to air inlet, the uniformity of the temperature in the heating furnace body is ensured, the uniformity of film forming is improved, the single spiral coil is easier to overhaul, the hopper holes can diffuse the reaction gas discharged from the spiral coil under the self structure, and the uniformity of the hopper holes in the process of discharging is improved.
Description
Technical Field
The utility model relates to the technical field of photovoltaic cell coating equipment, in particular to a photovoltaic cell coating reaction furnace.
Background
Photovoltaic cells generally refer to solar cells. Solar cells are devices that directly convert electrical energy into electrical energy through either photochemical effects. The PECVD device is equipment for plating a reflection reducing film in the production process of the solar cell, and the reflection reducing film can effectively improve the efficiency of the cell, so that the uniformity among the cells is important, and the process gas always flows in the process, flows into a quartz tube orifice to generate chemical reaction, and is pumped by a vacuum pump.
The prior art discloses a photovoltaic cell coating reaction furnace, which comprises a heating furnace body, wherein one end of the heating furnace body is provided with a furnace mouth, a flange group is arranged at the furnace mouth, and a plurality of air inlet pipelines are arranged in the flange group. The photovoltaic cell coating reaction furnace can avoid the phenomenon that after reaction gas enters the heating furnace body, temperature difference occurs in the heating furnace body along the axial direction, the uniformity of the temperature in the heating furnace body is affected, and the thickness of a coating film is uneven and the working efficiency is reduced.
Aiming at the above documents, the inventor considers that the number of the shunt air pipes is more, so that the interfaces of the shunt air pipes and the air inlet pipeline are more, the installation time of people on the shunt air pipes can be increased by more interfaces, and if a certain interface is slightly leaked, people are required to check the interfaces one by one, so that the overhaul time is prolonged, and the overhaul difficulty is increased.
Disclosure of utility model
Aiming at the defects existing in the prior art, the utility model provides a photovoltaic cell coating reaction furnace, which comprises the following specific technical scheme:
The utility model provides a photovoltaic cell coating film reacting furnace, includes the heating furnace body and fixedly establishes at the inside stainless steel bucket of heating furnace body, the fixed flange that is equipped with in furnace mouth department of heating furnace body, the flange internal fixation is equipped with the admission line, stainless steel bucket inner wall is fixed to be equipped with spiral coil, be linked together between spiral coil and the admission line, a plurality of hopper holes of evenly distributed have been seted up to spiral coil inner circle, the hopper hole increases gradually along spiral coil inner wall to spiral coil outer wall's direction diameter size, the one end activity that the flange was kept away from to the heating furnace body is equipped with the roof.
Through adopting above-mentioned technical scheme, through the setting of a plurality of hopper holes in the single spiral coil, can be to the more even everywhere in the firing furnace body of discharging into of reaction gas, make in the firing furnace body be difficult for because the temperature difference that takes place of admitting air.
Optionally, the stainless steel barrel is kept away from the fixed vacuum pipe joint that is equipped with of one end inner wall of flange, vacuum pipe joint one end runs through and extends to the heating furnace body outside.
By adopting the technical scheme, the vacuum pipe joint can be connected with an external vacuum pump to pump out the process gas after the reaction in the reaction furnace.
Optionally, the heating furnace body is kept away from the fixed plate that is equipped with symmetric distribution of one end outer wall of flange, the fixed plate internal thread is equipped with the threaded rod, the threaded rod is kept away from the fixed cake that is equipped with of one end of flange, the roof rotates and establishes at the cake outer wall.
Through adopting above-mentioned technical scheme, the cake can be connected threaded rod and roof two for threaded rod and roof two can not break away from each other.
Optionally, roof one side is fixed to be equipped with anti-skidding rubber pad, the roof is located between threaded rod and the anti-skidding rubber pad, the threaded rod is kept away from the fixed rocking handle that is equipped with of one end of roof.
By adopting the technical scheme, people can shake the rocking handle to drive the threaded rod to rotate.
Optionally, two first semicircle ring rubber blocks of symmetric distribution and cooperation butt are fixed to fixed board one side, the threaded rod screw thread is established two between the first semicircle ring rubber block inner wall, one side that the first semicircle ring rubber block was kept away from to the fixed board is fixed to be equipped with two second semicircle ring rubber blocks of symmetric distribution and cooperation butt, the threaded rod screw thread is established two between the second semicircle ring rubber block inner wall.
Through adopting above-mentioned technical scheme, can scrape the part through first semicircle ring rubber piece and second semicircle ring rubber piece to rotatory in the attached foreign matter on the threaded rod and leave.
In summary, the present utility model includes at least one of the following beneficial effects:
1. Through the setting of a plurality of hopper holes in the single spiral coil pipe, can be to the more even everywhere in the heating furnace body of discharging into of reaction gas, be difficult for producing the difference in temperature because admitting air in the messenger heating furnace body, guarantee the homogeneity of temperature in the heating furnace body to improve the homogeneity of film formation, single spiral coil pipe is more easy to overhaul, and the hopper hole can spread the reaction gas of discharging in the spiral coil pipe under self structure, improves the homogeneity when hopper hole exhausts.
2. Can install the reacting furnace through the flange, rotate through rocking handle drive threaded rod, drive the roof and remove, roof after the removal can roof pressure to the peripheral object of reacting furnace on, improve the holistic stability of reacting furnace, can scrape the part through first semicircle ring rubber piece and second semicircle ring rubber piece to rotatory in the last adhering to foreign matter of threaded rod and leave, make these foreign matters be difficult for getting into and wearing and tearing fixed plate and threaded rod junction, convenient and practical.
Drawings
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic view of the interior of the overall structure of the present utility model;
Fig. 3 is an enlarged view of the structure a of fig. 2 in accordance with the present utility model.
Reference numerals illustrate: 1. heating the furnace body; 11. a stainless steel barrel; 12. a vacuum pipe joint; 13. a flange; 14. an air intake duct; 2. a spiral coil; 21. a funnel hole; 3. a fixing plate; 31. a threaded rod; 32. a rocking handle; 33. round cakes; 34. a top plate; 35. an anti-slip rubber pad; 36. a first semicircular rubber block; 37. and a second semicircular rubber block.
Detailed Description
The utility model is described in further detail below with reference to fig. 1-3.
The embodiment of the utility model discloses a photovoltaic cell coating reaction furnace, which comprises a heating furnace body 1 and a stainless steel barrel 11 fixedly arranged in the heating furnace body 1, wherein the heating furnace body 1 can support, fix and heat the stainless steel barrel 11, a flange 13 is fixedly arranged at a furnace mouth of the heating furnace body 1, the heating furnace body 1 can be installed in a target installation area by penetrating the flange 13 through bolts, an air inlet pipeline 14 is fixedly arranged in the flange 13, and the flange 13 can support and fix the air inlet pipeline 14.
Referring to fig. 1-2, a vacuum pipe joint 12 is fixedly arranged on the inner wall of one end of the stainless steel barrel 11 far away from the flange 13, one end of the vacuum pipe joint 12 penetrates and extends to the outside of the heating furnace body 1, the extending end of the vacuum pipe joint 12 can be connected with an external vacuum pump, and the vacuum pipe joint 12 can be matched with the vacuum pump to pump out process gas after reaction in the reaction furnace.
Referring to fig. 2-3, a spiral coil 2 is fixedly arranged on the inner wall of the stainless steel barrel 11, the spiral coil 2 can be supported and fixed by the stainless steel barrel 11, the spiral coil 2 is a spiral quartz tube, the spiral coil 2 is communicated with an air inlet pipeline 14, and the air inlet pipeline 14 can send reaction gas into the spiral coil 2.
Referring to fig. 2-3, a plurality of funnel holes 21 are uniformly distributed in the inner ring of the spiral coil pipe 2, and the diameter sizes of the funnel holes 21 gradually increase along the direction from the inner wall of the spiral coil pipe 2 to the outer wall of the spiral coil pipe 2, so that the end of the funnel hole 21 on the inner side of the spiral coil pipe 2 is narrower, the end of the funnel hole 21 on the outer side of the spiral coil pipe 2 is wider, the gas exhausted by the spiral coil pipe 2 can be diffused, and the uniformity of the gas exhausted by the spiral coil pipe 2 and the funnel hole 21 is improved.
Referring to fig. 1-2, a symmetrically distributed fixing plate 3 is fixedly arranged on the outer wall of one end, far away from the flange 13, of the heating furnace body 1, a threaded rod 31 is arranged in the internal thread of the fixing plate 3, the heating furnace body 1 can support and fix the fixing plate 3, and the fixing plate 3 can support and limit the threaded rod 31 through threads.
Referring to fig. 1-2, a round cake 33 is fixedly arranged at one end of the threaded rod 31 far away from the flange 13, a top plate 34 is movably arranged at one end of the heating furnace body 1 far away from the flange 13, the top plate 34 is rotatably arranged on the outer wall of the round cake 33, the round cake 33 can connect the threaded rod 31 and the top plate 34, the threaded rod 31 and the top plate 34 cannot be separated from each other, and the round cake 33 is in the shape of an existing discus.
Referring to fig. 1-2, an anti-slip rubber pad 35 is fixedly arranged on one side of the top plate 34, the top plate 34 is located between the threaded rod 31 and the anti-slip rubber pad 35, the threaded rod 31 can move after rotating, so that the top plate 34 and the anti-slip rubber pad 35 are driven to move, the top plate 34 can be propped against peripheral objects of the reaction furnace after moving, the overall stability of the reaction furnace is improved, the anti-slip rubber pad 35 can carry out soft protection on the objects propped against the top plate 34, and the outer surfaces of the objects are not easy to damage when the top plate 34 is propped against.
Referring to fig. 1-2, a rocking handle 32 is fixedly arranged at one end of the threaded rod 31 far from the top plate 34, and people can rock the rocking handle 32 to drive the threaded rod 31 to rotate.
Referring to fig. 1-2, two first semicircular rubber blocks 36 which are symmetrically distributed and matched and abutted are fixedly arranged on one side of the fixing plate 3, a threaded rod 31 is arranged between the inner walls of the two first semicircular rubber blocks 36 in a threaded mode, two second semicircular rubber blocks 37 which are symmetrically distributed and matched and abutted are fixedly arranged on one side of the fixing plate 3, away from the first semicircular rubber blocks 36, of the fixing plate, the threaded rod 31 is arranged between the inner walls of the two second semicircular rubber blocks 37 in a threaded mode, and the first semicircular rubber blocks 36 and the second semicircular rubber blocks 37 are in semicircular shapes.
The first semicircular rubber block 36 and the second semicircular rubber block 37 have elasticity and certain strength, and can scrape off the foreign matters attached to the threaded rod 31 in rotation, so that the foreign matters are not easy to enter and abrade the joint of the fixed plate 3 and the threaded rod 31, and the service lives of the fixed plate 3 and the threaded rod 31 are prolonged.
The implementation principle of the photovoltaic cell coating reaction furnace provided by the embodiment of the utility model is as follows:
During the film coating reaction, the reaction gas enters from the air inlet pipeline 14 and is uniformly discharged to all positions in the heating furnace body 1 after being guided and diffused by a plurality of hopper holes 21 in a single spiral coil pipe 2, so that temperature difference is not easy to generate in the heating furnace body 1 due to air inlet, the uniformity of the temperature in the heating furnace body 1 is ensured, and the uniformity of film forming is improved.
People can also install the reaction furnace through the flange 13, then people can drive the threaded rod 31 to rotate through shaking the rocking handle 32 to drive the top plate 34 and the anti-skid rubber pad 35 to move, and the moved top plate 34 can be propped against peripheral objects of the reaction furnace to improve the overall stability of the reaction furnace.
The above embodiments are not intended to limit the scope of the present utility model, so: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.
Claims (8)
1. The utility model provides a photovoltaic cell coating reaction furnace, includes heating furnace body (1) and fixes stainless steel bucket (11) of establishing inside heating furnace body (1), the fixed flange (13) that is equipped with in furnace mouth department of heating furnace body (1), flange (13) internal fixation is equipped with admission line (14), its characterized in that: the stainless steel barrel (11) inner wall is fixed and is equipped with spiral coil (2), be linked together between spiral coil (2) and air inlet pipe (14), a plurality of hopper holes (21) of evenly distributed have been seted up to spiral coil (2) inner circle, direction diameter size of hopper hole (21) along spiral coil (2) inner wall to spiral coil (2) outer wall increases gradually, the one end activity that flange (13) was kept away from to heating furnace body (1) is equipped with roof (34).
2. A photovoltaic cell coating reactor as set forth in claim 1 wherein: the inner wall of one end of the stainless steel barrel (11) far away from the flange (13) is fixedly provided with a vacuum pipe joint (12), and one end of the vacuum pipe joint (12) penetrates through and extends to the outside of the heating furnace body (1).
3. A photovoltaic cell coating reactor as set forth in claim 1 wherein: the heating furnace body (1) is kept away from fixed board (3) that are equipped with symmetric distribution of one end outer wall of flange (13), fixed board (3) internal thread is equipped with threaded rod (31).
4. A photovoltaic cell coating reactor according to claim 3, characterized in that: a round cake (33) is fixedly arranged at one end, far away from the flange (13), of the threaded rod (31), and the top plate (34) is rotatably arranged on the outer wall of the round cake (33).
5. The photovoltaic cell coating reaction furnace of claim 4, wherein: an anti-skid rubber pad (35) is fixedly arranged on one side of the top plate (34), and the top plate (34) is positioned between the threaded rod (31) and the anti-skid rubber pad (35).
6. The photovoltaic cell coating reaction furnace of claim 5, wherein: one end of the threaded rod (31) far away from the top plate (34) is fixedly provided with a rocking handle (32).
7. The photovoltaic cell coating reaction furnace of claim 6, wherein: two first semicircular rubber blocks (36) which are symmetrically distributed and matched and abutted are fixedly arranged on one side of the fixing plate (3), and the threaded rod (31) is arranged between the inner walls of the two first semicircular rubber blocks (36) in a threaded mode.
8. The photovoltaic cell coating reaction furnace of claim 7, wherein: two second semicircular rubber blocks (37) which are symmetrically distributed and matched and abutted are fixedly arranged on one side, away from the first semicircular rubber block (36), of the fixing plate (3), and the threaded rod (31) is arranged between the inner walls of the two second semicircular rubber blocks (37) in a threaded mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322682595.0U CN220827459U (en) | 2023-10-07 | 2023-10-07 | Photovoltaic cell coating reaction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322682595.0U CN220827459U (en) | 2023-10-07 | 2023-10-07 | Photovoltaic cell coating reaction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220827459U true CN220827459U (en) | 2024-04-23 |
Family
ID=90726858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322682595.0U Active CN220827459U (en) | 2023-10-07 | 2023-10-07 | Photovoltaic cell coating reaction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220827459U (en) |
-
2023
- 2023-10-07 CN CN202322682595.0U patent/CN220827459U/en active Active
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