CN220796695U - Wafer box adapter rack - Google Patents

Abstract

The utility model relates to the technical field of wafer production, and particularly discloses a wafer box adapter frame. The adapter rack comprises an adapter rack main body, a fixed block and a pressing block assembly; the adapter rack main body comprises a first plate and a second plate fixedly connected with the first plate; the fixing block is concavely provided with a positioning groove which can be matched and positioned with the blocking protrusion of the wafer box, the first plate is detachably provided with at least one fixing block, the second plate is detachably provided with at least one fixing block, and the wafer box positioned at the positioning position is matched with all the fixing blocks; the briquetting subassembly movable mounting is in the face of going up of first board, and briquetting subassembly is the same with the quantity of inductor, and every briquetting subassembly all is located the top of an inductor, and the wafer box that is located the locate position supports and presses in all briquetting subassemblies to promote to make briquetting subassembly support and press in the inductor. The adaptive frame achieves the purpose of positioning the wafer box at the positioning position by means of the structural design, ensures the positioning effect on the wafer box and improves the positioning efficiency of the wafer box adaptive frame on the slide holder.

Description

Wafer box adapter rack

Technical Field

The utility model relates to the technical field of wafer production, in particular to a wafer box adapter frame.

Background

Wafers are a very expensive product that must be kept from damage during placement. Wherein the wafer box is a device for holding wafers and sapphires commonly in the industry. At present, the operators are usually handled by manual light handling and light placing, and the placing process needs to be very careful, so that the requirements on the quality of the operators are very high. If the manual picking is damaged or falls, great benefit loss is brought to the company. At present, an adapter rack is often adopted in the field as a carrier to bear and carry the wafer box, and the adapter rack bearing the wafer box can be directly assembled on a bearing table, so that the problem of poor interchangeability of a carrying table can be solved.

However, the adapter rack is also required to be provided with a fixing piece with a positioning groove, and the adapter rack utilizes the positioning groove to position the clamping protrusion on the wafer box. However, for different types of adapter racks, the fixtures to which they are adapted need special customization. Meanwhile, the positioning groove is required to be matched and positioned with the clamping plug protrusions with different sizes, and therefore more complex requirements are put on the structure of the clamping plug fixing piece.

Currently, the above-mentioned problems are solved only by means of temporarily replacing the fixing blocks. This results in a large number of fixing blocks to be prepared, which increases the cost of production, and the fixing blocks need to be re-aligned every time they are replaced, which is inefficient in adjustment and inconvenient for work.

Disclosure of Invention

The utility model aims to provide a wafer box adapter rack so as to ensure the positioning effect on a wafer box and improve the positioning efficiency of the wafer box adapter rack on a slide holder.

To achieve the purpose, the utility model adopts the following technical scheme:

the wafer box adapter rack is used for bearing the wafer box positioned at the positioning position and can be installed on a carrying platform, the carrying platform is provided with a plurality of sensors, and the wafer box adapter rack comprises an adapter rack main body, a fixed block and a pressing block assembly; the adapter rack main body comprises a first plate and a second plate fixedly connected to the first plate, wherein the second plate and the first plate form an included angle, and the first plate is parallel to a horizontal plane; the fixing blocks are concavely provided with positioning grooves, the positioning grooves can be matched and positioned with the blocking protrusions of the wafer boxes, at least one fixing block is detachably arranged on the first plate towards the plate surface of the second plate, at least one fixing block is detachably arranged on the second plate towards the plate surface of the first plate, and the wafer boxes positioned at the positioning positions are matched with all the fixing blocks; the briquetting components are movably mounted on the upper plate surface of the first plate, the number of the briquetting components is the same as that of the inductors, each briquetting component is located above one inductor, and the wafer boxes located at the locating positions are propped against all the briquetting components so as to push the briquetting components to be propped against the inductors.

As the preferred technical scheme of wafer box adapter frame, briquetting subassembly includes the briquetting main part, go up the concave holding tank that is equipped with of face, the briquetting main part activity set up in the holding tank, just the briquetting main part with the tank bottom elastic connection of holding tank, the briquetting main part hole has been seted up to the tank bottom of holding tank, and the one end activity of connecting pin wears to establish the briquetting main part hole with the briquetting main part is connected, the other end of connecting pin is used for supporting the pressure inductor.

As the preferred technical scheme of wafer box adapter frame, the rigid coupling has a plurality of briquetting posts on the briquetting main part, the tank bottom of holding tank has been seted up the guiding hole that briquetting post quantity is the same, every briquetting post all movable mounting in one in the guiding hole.

As the preferred technical scheme of wafer box adapter frame, can dismantle in the briquetting main part and be connected with the briquetting, it is concave to be equipped with to support the indent to support the briquetting, is located the wafer box of location position with all support briquetting assorted, support the indent can with the protruding matching location of card stopper of wafer box.

As the preferable technical scheme of wafer box adapter frame, the fixed block has relative locating surface and connecting surface, the connecting surface with the second board or first board laminating mutually, the constant head tank is concave to be located on the locating surface, the tank bottom of constant head tank is on a parallel with the locating surface.

As the preferred technical scheme of wafer box adapter frame, the fixed block has a plurality of locating holes in a run through, the locating hole is the shoulder hole, the aperture in locating hole is followed from the locating surface to the direction of connecting surface reduces gradually, the retaining member passes the locating hole and locking connect in second board or first board.

As the preferable technical scheme of the wafer box adapter frame, at least two corners of the positioning surface are provided with open pore areas, and all the positioning holes are positioned in the open pore areas.

As the preferred technical scheme of wafer box adapter frame, first board has a plurality of spacing slot holes link up, spacing slot hole quantity with the quantity of slide holder reference column is the same, and every the reference column homoenergetic is passed one spacing slot hole, every spacing slot hole's extending direction is mutually different.

As the preferred technical scheme of wafer box adapter frame, the mounting hole has been link up to first board, the screens recess has been seted up to first board, one side of screens recess with the mounting hole intercommunication, the clamp lock of slide holder can pass the mounting hole and butt in the tank bottom of screens recess.

As a preferred technical solution of the wafer cassette adapter, the first plate and the second plate are arranged in an L-shape.

The utility model has the beneficial effects that:

this wafer box adapter frame is with the help of the setting of first board and second board, can fix a position the wafer box simultaneously from bottom and one side, combines the arrangement of fixed block on first board and the second board, can utilize the cooperation between the card stopper arch of constant head tank and wafer box to reach the effect of location, has improved the spacing ability of wafer box adapter frame to the wafer box above, helps realizing the accurate positioning of wafer box on the position of location. Through the mode that sets up three briquetting subassembly, realized the fool-proof design of wafer box installation on wafer box adapter frame again, if operating personnel can't place wafer box level on the wafer box adapter frame, then all briquetting subassemblies can't be effectively pushed down simultaneously, cause the slide holder to sense the wafer box through the inductor from this. At this time, the wafer holder judges that the wafer box cannot be placed on the positioning position, so that the subsequent processing flow cannot be carried out, the situation that the wafer holder is started by mistake is avoided, the situation that the wafer box and the wafer on the wafer holder are damaged is avoided, and the running risk of the wafer holder is reduced.

Drawings

FIG. 1 is a schematic diagram of a prior art stage;

FIG. 2 is a schematic view of a wafer cassette adapter provided in an embodiment of the present utility model;

FIG. 3 is a partial cross-sectional view of a first plate provided by an embodiment of the present utility model;

fig. 4 is a schematic structural diagram of a first view of a fixing block according to an embodiment of the present utility model;

fig. 5 is a schematic structural diagram of a second view of a fixing block according to an embodiment of the present utility model.

In the figure:

100. an adapter rack body; 110. a first plate; 111. a clamping groove; 112. a first limiting long hole; 113. a second limiting slot; 114. a guide hole; 115. a mounting hole; 120. a second plate; 130. a handle; 140. a limiting block;

200. a fixed block; 210. positioning holes; 220. a positioning groove;

300. a briquetting assembly; 310. a briquette main body; 320. a connecting pin;

400. an elastic member;

900. a slide holder; 910. clamping and locking; 920. an inductor; 930. and positioning columns.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

As shown in fig. 1, a conventional slide holder 900 is provided with a clamp lock 910, a plurality of positioning posts 930, and a plurality of sensors 920. The positioning column 930 is used to define the position of the wafer cassette, and the sensor 920 is used to detect whether the wafer cassette is horizontally placed, and the stage 900 is locked and connected to the wafer cassette by the clamp lock 910.

As shown in fig. 2 to 5, the present embodiment provides a wafer cassette adapter for carrying a wafer cassette located at a positioning position, the wafer cassette adapter being capable of being mounted on a stage 900, the stage 900 being provided with a plurality of sensors 920, the wafer cassette adapter including an adapter body 100, a fixing block 200 and a pressing block assembly 300; the adapter rack main body 100 comprises a first plate 110 and a second plate 120 fixedly connected to the first plate 110, wherein the second plate 120 and the first plate 110 form an included angle, and the first plate 110 is parallel to the horizontal plane; the fixing blocks 200 are concavely provided with positioning grooves 220, the positioning grooves 220 can be matched and positioned with the blocking protrusions of the wafer boxes, at least one fixing block 200 is detachably arranged on the first plate 110 towards the plate surface of the second plate 120, at least one fixing block 200 is detachably arranged on the second plate 120 towards the plate surface of the first plate 110, and the wafer boxes positioned at the positioning positions are matched with all the fixing blocks 200; the press block assemblies 300 are movably mounted on the upper plate surface of the first plate 110, the number of the press block assemblies 300 is the same as that of the inductors 920, each press block assembly 300 is located above one inductor 920, and the wafer boxes located at the locating positions are pressed against all press block assemblies 300 so as to push the press block assemblies 300 to be pressed against the inductors 920.

The wafer box adapter frame can position the wafer box from the bottom and one side simultaneously by means of the arrangement of the first plate 110 and the second plate 120, and the positioning effect can be achieved by utilizing the cooperation between the positioning groove 220 and the clamping protrusion of the wafer box by combining the arrangement of the fixing blocks 200 on the first plate 110 and the second plate 120. Through the mode that sets up three briquetting subassemblies 300, realized the foolproof design of wafer box installation on the wafer box adapter frame again, if operating personnel fail to place the wafer box level on the wafer box adapter frame, then all briquetting subassemblies 300 can not effectively be pushed down simultaneously, makes slide holder 900 can not sense the wafer box through inductor 920 from this. At this time, the stage 900 judges that the wafer cassette cannot be placed on the positioning position, so that the subsequent processing flow will not be performed, thereby avoiding the occurrence of false start of the stage 900, avoiding the situation that the wafer cassette and the wafer thereon are damaged, and reducing the risk of operation of the stage 900.

The design that second board 120 is the contained angle setting with first board 110 has improved the location structure of wafer box adapter frame to the wafer box, has ensured the smooth installation of fixed block 200 on adapter frame main part 100, has reduced the setting degree of difficulty of fixed block 200, has reduced the kind demand to fixed block 200, has improved the availability factor and the economic benefits of fixed block 200.

The stoppers 140 are selectively detachably mounted on the first plate 110 for positioning wafer cassettes with different sizes. The limiting block 140 is used for positioning the edge of the wafer cassette so that the wafer cassette is precisely positioned on the wafer cassette adapter.

Specifically, three positioning columns 930 and three sensors 920 are disposed on the slide holder 900, the three positioning columns 930 are uniformly spaced around the clamp lock 910, and the three sensors 920 are uniformly spaced around the clamp lock 910.

In this embodiment, the briquetting assembly 300 includes a briquetting main body 310, the upper plate surface is concave to be equipped with the holding tank, and briquetting main body 310 activity sets up in the holding tank, and briquetting main body 310 and the tank bottom elastic connection of holding tank, and the briquetting main body hole has been seted up to the tank bottom of holding tank, and briquetting main body hole and briquetting main body 310 connection are worn to establish in the activity of connecting pin 320's one end, and connecting pin 320's the other end is used for supporting pressure sensor 920.

The pressing block assembly 300 is movably mounted above the sensor 920, and when the pressing block assembly 300 is pressed by the wafer cassette placed at the positioning position, the pressing block main body 310 moves down to drive the connecting pin 320 to press the sensor 920, so as to detect whether the wafer cassette is placed on the wafer cassette adapter rack. And when the cassette placed on the cassette adapter is taken away, the pressing body 310 is reset by the elastic force. The matched design of the three sensors 920 helps to improve the capability of the stage 900 to detect whether the wafer cassette is horizontally placed, and reduce the risk of detecting result errors.

Further, a plurality of press block columns are fixedly connected to the press block main body 310, the bottom of the accommodating groove is provided with guide holes 114 with the same number of press block columns, and each press block column is movably installed in one guide hole 114.

The position of the briquetting main body 310 is limited by the design of the briquetting column and the corresponding guide hole 114, the movement of the briquetting main body 310 is guided, and the possibility that the briquetting main body 310 generates relative movement outside the design requirement track is avoided.

Illustratively, the press body 310 is connected with the bottom of the receiving groove by a plurality of elastic members 400. The provision of the elastic member 400 not only connects the first plate 110 with the press block assembly 300, but also assists in resetting the press block body 310, eliminating the possibility of false triggering of the sensor 920 when a cassette is not placed on the cassette adapter. Specifically, the elastic member 400 is a spring, which has the characteristics of low manufacturing cost and small occupied space.

In this embodiment, the pressing block main body 310 is detachably connected with a pressing block, the pressing block is concavely provided with a pressing groove, the wafer box located at the positioning position is matched with all the pressing blocks, and the pressing groove can be matched and positioned with the clamping protrusion of the wafer box. Specifically, the pressing block and the fixing block 200 have the same shape, and the above arrangement enables the wafer cassette adapter rack to position the portion of the wafer cassette pressed on the pressing block assembly 300, thereby avoiding the difficulty in positioning the wafer cassette due to the special structure, and expanding the types and sizes of the wafer cassette that the adapter rack main body 100 can position.

Illustratively, the fixing block 200 has an opposite positioning surface and a connecting surface, the connecting surface is attached to the second plate 120 or the first plate 110, the positioning groove 220 is concavely formed on the positioning surface, and the bottom of the positioning groove 220 is parallel to the positioning surface. The design realizes the structural limitation of the fixed block 200, reduces the production difficulty of the fixed block 200, optimizes the stress condition of the fixed block 200, ensures that the arrangement position of the positioning groove 220 is accurate and controllable, is beneficial to ensuring the accurate matching of the positioning groove 220 and the blocking protrusion, and is beneficial to ensuring the positioning stability.

Further, the fixing block 200 is penetrated with a plurality of positioning holes 210, the positioning holes 210 are stepped holes, the aperture of the positioning holes 210 is gradually reduced along the direction from the positioning surface to the connecting surface, and the locking member passes through the positioning holes 210 and is locked and connected to the second plate 120 or the first plate 110.

The design of the stepped hole reduces the locking difficulty of the locking piece in the positioning hole 210, is beneficial to improving the dismounting efficiency of the fixing block 200 on the adapter frame main body 100, has simple and reliable structure, is convenient to process, and is beneficial to reducing the position conflict between the locking piece and the fixing block 200.

Still further, at least two corners of the positioning surface are provided with open areas, and all positioning holes 210 are located in the open areas. The limitation of the open area plans the installation position of the locking piece, improves the stability and reliability of the connection of the fixing block 200 on the adapter frame main body 100, is beneficial to improving the disassembly and assembly efficiency of the fixing block 200 on the adapter frame main body 100, and simplifies the structure of the wafer box adapter frame.

The provision of the perforated area also enables the mounting block 200 to optimally design the mounting location of the mounting block 200 on the adapter frame body 100 according to the location of the existing holes on the stage 900. In order to realize the relative position adjustment of the locking member on the fixing block 200, the shape of the positioning hole 210 is defined as a long hole, thereby improving the interchangeability of the adapter frame main body 100 and further expanding the variety and size of the wafer cassette in which the adapter frame main body 100 can be positioned.

The first plate 110 is penetrated with a plurality of limiting long holes, the number of the limiting long holes is the same as that of the positioning columns 930 of the slide holder 900, each positioning column 930 can pass through one limiting long hole, and the extending directions of each limiting long hole are different from each other. In this embodiment, the three limiting slots extend in directions different from each other, so that the three positioning posts 930 can only be connected with the three limiting slots in a unique position. The above design ensures the positioning effect of the first plate 110 on the slide holder 900 and ensures the relative position fixation of the adapter frame main body 100 and the slide holder 900.

Further, the stopper slot includes a first stopper slot 112 not communicating with the edge of the first plate 110 and a second stopper slot 113 communicating with the edge of the first plate 110.

Illustratively, the first plate 110 is penetrated by a mounting hole 115, the first plate 110 is provided with a clamping groove 111, one side of the clamping groove 111 is communicated with the mounting hole 115, and the clamping lock 910 of the slide holder 900 can pass through the mounting hole 115 and is abutted against the bottom of the clamping groove 111.

The design that the clamping groove 111 is communicated with the mounting hole 115 simplifies the locking and matching structure of the first plate 110 and the clamping lock 910, and reduces the manufacturing cost of the adapter frame main body 100.

The limiting grooves and the clamping grooves 111 are defined by the relative positions of the positioning posts 930 and the clamping locks 910, so that the wafer cassette adapter rack can be detachably mounted on the carrier 900. By means of the above structural coordination, the relative positions of the wafer cassettes and the carrier 900 are planned, so that corresponding limiting blocks 140 can be selected according to different wafer cassette sizes, the carrier 900 can load and carry a plurality of different wafer cassettes, and the use flexibility of the carrier 900 is improved.

In the present embodiment, the first plate 110 and the second plate 120 are arranged in an L shape.

The above design achieves structural definition of the adapter body 100, reduces difficulty in arrangement of other components on the first plate 110 and the second plate 120, optimizes space layout of the wafer cassette adapter, and reduces space occupied by the wafer cassette adapter.

A handle 130 is also fixedly connected to the adapter body 100. Specifically, the handle 130 is disposed on the first plate 110. The handle 130 reduces the difficulty of taking and carrying the wafer cassette adapter and reduces the risk of damaging the wafer cassette by accident.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. Wafer box adapter frame for bear the wafer box that is located the locate position, wafer box adapter frame can install in slide holder (900), slide holder (900) are equipped with a plurality of inductors (920), its characterized in that, wafer box adapter frame includes:

the adapter rack comprises an adapter rack main body (100) and a first support body, wherein the adapter rack main body comprises a first plate (110) and a second plate (120) fixedly connected to the first plate (110), the second plate (120) and the first plate (110) are arranged at an included angle, and the first plate (110) is parallel to the horizontal plane;

the wafer box comprises a fixed block (200), wherein the fixed block (200) is concavely provided with a positioning groove (220), the positioning groove (220) can be matched and positioned with a blocking protrusion of the wafer box, the first plate (110) faces to the plate surface of the second plate (120) and is detachably provided with at least one fixed block (200), the second plate (120) faces to the plate surface of the first plate (110) and is detachably provided with at least one fixed block (200), and the wafer box positioned at the positioning position is matched with all the fixed blocks (200);

the briquetting components (300) are movably mounted on the upper plate surface of the first plate (110), the number of the briquetting components (300) is the same as that of the inductors (920), each briquetting component (300) is located above one inductor (920), and the wafer boxes located at the locating positions are pressed against all the briquetting components (300) so as to push the briquetting components (300) to be pressed against the inductors (920).

2. The wafer cassette adapter rack according to claim 1, wherein the press block assembly (300) comprises a press block main body (310), a containing groove is concavely formed in the upper plate surface, the press block main body (310) is movably arranged in the containing groove, the press block main body (310) is elastically connected with the bottom of the containing groove, a press block main body hole is formed in the bottom of the containing groove, one end of a connecting pin (320) movably penetrates through the press block main body hole and is connected with the press block main body (310), and the other end of the connecting pin (320) is used for propping against the inductor (920).

3. The wafer cassette adapter as recited in claim 2, wherein a plurality of press blocks are fixedly connected to the press block main body (310), guide holes (114) with the same number of press blocks are formed in the bottom of the accommodating groove, and each press block is movably mounted in one of the guide holes (114).

4. The wafer cassette adapter as defined in claim 2, wherein the pressing block body (310) is detachably connected with a pressing block, the pressing block is concavely provided with a pressing groove, the wafer cassette located at the positioning position is matched with all the pressing blocks, and the pressing groove can be matched and positioned with a blocking protrusion of the wafer cassette.

5. The wafer cassette adapter as recited in claim 1, wherein the fixed block (200) has opposing locating surfaces and a connecting surface, the connecting surface being in contact with the second plate (120) or the first plate (110), the locating slot (220) being recessed in the locating surface, and a bottom of the locating slot (220) being parallel to the locating surface.

6. The wafer cassette adapter as claimed in claim 5, wherein the fixing block (200) has a plurality of positioning holes (210) penetrating therethrough, the positioning holes (210) are stepped holes, and the diameters of the positioning holes (210) are gradually reduced in a direction from the positioning surface to the connection surface, and locking members pass through the positioning holes (210) and are locked to the second plate (120) or the first plate (110).

7. The wafer cassette adapter as recited in claim 6, wherein at least two corners of the locating surface are provided with open areas, all of the locating holes (210) being located within the open areas.

8. The wafer cassette adapter rack according to claim 1, wherein the first plate (110) has a plurality of limiting slots penetrating therethrough, the number of limiting slots is the same as the number of positioning posts (930) of the stage (900), and each of the positioning posts (930) is capable of penetrating through one of the limiting slots, and the extending directions of each of the limiting slots are different from each other.

9. The wafer cassette adapter as recited in claim 1, wherein the first plate (110) has a mounting hole (115) therethrough, the first plate (110) has a clamping groove (111) formed therein, one side of the clamping groove (111) is in communication with the mounting hole (115), and a clamp lock (910) of the stage (900) can pass through the mounting hole (115) and abut against a bottom of the clamping groove (111).

10. The cassette adapter as recited in any one of claims 1-9, wherein the first plate (110) and the second plate (120) are arranged in an L-shape.