CN220796665U - Anti-slip structure of ceramic wafer at upper part of liquid crystal panel dry etching machine - Google Patents
Anti-slip structure of ceramic wafer at upper part of liquid crystal panel dry etching machine Download PDFInfo
- Publication number
- CN220796665U CN220796665U CN202322387302.6U CN202322387302U CN220796665U CN 220796665 U CN220796665 U CN 220796665U CN 202322387302 U CN202322387302 U CN 202322387302U CN 220796665 U CN220796665 U CN 220796665U
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- China
- Prior art keywords
- ceramic plate
- dry etching
- etching machine
- sealing cap
- liquid crystal
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- 239000000919 ceramic Substances 0.000 title claims abstract description 56
- 238000001312 dry etching Methods 0.000 title claims abstract description 15
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 12
- 238000007789 sealing Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 4
- -1 polytetrafluoroethylene Polymers 0.000 claims abstract description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 4
- 210000002421 cell wall Anatomy 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000003754 machining Methods 0.000 abstract 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
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- Drying Of Semiconductors (AREA)
Abstract
The utility model provides an anti-skid structure of a ceramic plate at the upper part of a liquid crystal panel dry etching machine, which comprises a ceramic plate with a positioning hole, wherein the other side of the ceramic plate is provided with a groove, the groove is arranged at the back surface of the ceramic plate, the anti-skid structure also comprises a sealing cap made of polytetrafluoroethylene material, the sealing cap is sleeved at the end part of a fixing screw, and the fixing screw is spirally connected with an upper electrode plate of the dry etching machine and is used for fixing the upper electrode plate. According to the utility model, by changing the structural style of the upper ceramic plate, processing the groove on the back surface of the upper ceramic plate and matching with the sealing cap, the ceramic plate is fixed on the upper electrode plate and cannot slide, the screws can be completely covered, the phenomena that the electrode plate fixing screws are exposed and react with the process gas to cause abnormal products are avoided, the success rate of post-maintenance re-machining is greatly improved, the utilization rate of a machine is improved, and the productivity of the machine is improved.
Description
Technical Field
The utility model relates to the technical field of dry etchers, in particular to an anti-slip structure of a ceramic wafer at the upper part of a liquid crystal panel dry etcher.
Background
The upper electrode of the liquid crystal panel dry etching machine consists of 24 electrode plates, and each electrode plate is separated by a teflon block, as shown in figure 1. Each upper electrode plate is locked through fixing the peripheral fixing holes of the electrode plates through screws, and then the screw hole sites 7 are covered through the upper ceramic plates, so that the abnormal etching caused by the exposure of metal screws is avoided.
The 16 trapezoidal ceramic plates are positioned by only 1 hole site, the ceramic plates cannot be completely fixed, and the situation that the ceramic plates can slightly move exists, as shown in fig. 2, namely one end of each ceramic plate can slide around the center line of the hole site, so that screws of an upper electrode plate cannot be fully covered by the upper ceramic plate, and the screws are exposed and react with process gas in a cavity, so that the product is abnormal, and the yield is affected.
Disclosure of Invention
The utility model aims to solve the technical problem of providing an anti-slip structure of a ceramic plate at the upper part of a liquid crystal panel dry etching machine, which ensures that the ceramic plate is fixed on an upper electrode plate and cannot slide, and can completely cover screws.
The utility model is realized in the following way:
the utility model provides an anti-skid structure of a ceramic plate at the upper part of a liquid crystal panel dry etching machine, which comprises a ceramic plate with a positioning hole, wherein the other side of the ceramic plate is provided with a groove, the anti-skid structure also comprises a sealing cap made of polytetrafluoroethylene material, and the sealing cap is sleeved at the end part of a fixing screw spirally connected with an electrode plate at the upper part of the dry etching machine.
Further, the cell wall of recess comprises two arc lateral walls and two sharp lateral walls, two the sharp lateral wall sets up respectively in the upper and lower both sides of recess, and two the interval of sharp lateral wall and the external diameter phase-match of closing cap make the outer wall of closing cap contacts with sharp lateral wall, two the arc lateral wall sets up in the left and right sides of recess, and two the interval of arc lateral wall is greater than the external diameter of closing cap.
Further, the sealing cap is provided with a through hole, the through hole is communicated with a hole site arranged on the core part of the fixing screw, and a gap is reserved between the upper end of the sealing cap and the top wall of the groove.
Furthermore, the ceramic plate is of a trapezoid structure, and the groove is formed in one side of the inclined edge of the ceramic plate close to the trapezoid structure.
The utility model has the advantages that: through changing upper portion potsherd structural style, processing the recess in the back of upper portion potsherd to the cooperation sealing cap makes the potsherd fix on upper portion electrode plate, can not take place to slide, can cover the screw completely, avoids electrode plate fixed screw to expose and process gas takes place the reaction, causes the product unusual, improves back maintenance and again quick-witted success rate and also promotes greatly, has improved the board utilization ratio, and the board productivity promotes.
Drawings
The utility model will be further described with reference to examples of embodiments with reference to the accompanying drawings.
Fig. 1 is a prior art connection structure of a plurality of ceramic sheets covering an upper electrode plate.
FIG. 2 is a schematic view showing a ceramic plate sliding around the center line of a hole site to expose a screw hole in the prior art.
FIG. 3 is a schematic view of the ceramic wafer structure of the present utility model.
Fig. 4 is a schematic view of the structure of the ceramic sheet of the present utility model when it is fixed to the upper electrode plate.
Fig. 5 is a partial enlarged view of fig. 4 at a.
FIG. 6 is a schematic view showing a structure in which the upper end of the cap of the present utility model is fitted into the groove.
The reference numerals in the figures illustrate:
1. a ceramic sheet; 11. positioning holes; 12. a groove; 2. sealing the cap; 21. a through hole; 3. a set screw; 4. an upper electrode plate; 5. an arcuate sidewall; 6. a straight sidewall.
Detailed Description
Referring to fig. 3 to 6, the utility model provides an anti-slip structure of a ceramic plate at the upper part of a liquid crystal panel dry etching machine, which comprises a ceramic plate 1 with a positioning hole 11, wherein the other side of the ceramic plate 1 is provided with a groove 12, the groove 12 is arranged at the back of the ceramic plate 1, the anti-slip structure also comprises a sealing cap 2 made of polytetrafluoroethylene material, the sealing cap 2 is sleeved at the end part of a fixing screw 3, and the fixing screw 3 is spirally connected with an upper electrode plate 4 of the dry etching machine and is used for fixing the upper electrode plate 4.
Specifically, the groove wall of the groove 12 is composed of two arc-shaped side walls 5 and two linear side walls 6, the two linear side walls 6 are respectively arranged at the upper side and the lower side of the groove 12, the distance between the two linear side walls 6 is matched with the outer diameter of the sealing cap 2, the outer wall of the sealing cap 2 is in contact with the linear side walls 6, and the two arc-shaped side walls 5 are arranged at the left side and the right side of the groove 12. Since the mounting sizes of the set screws 3 at 16 positions of the upper electrode plate 4 cannot be completely uniform, the interval between the two arc-shaped side walls 5 is set to be larger than the outer diameter of the cap 2, so that the grooves 12 can accommodate the set screws 3 of different size intervals.
Specifically, the sealing cap 2 is provided with a through hole 21, the through hole 21 is communicated with a hole formed in the core of the fixing screw 3, a gap is formed between the upper end of the sealing cap 2 and the top wall of the groove 12, when the ceramic plate 1 is fixed on the upper electrode plate 4, gas in the slot hole of the upper electrode plate 4 for installing the fixing screw 3 is discharged from the hole through the gap, the through hole 21 and the hole of the fixing screw core, so that a pressure difference is formed on the upper side and the lower side of the ceramic plate 1, and the ceramic plate 1 is better fixed.
Specifically, the ceramic plate 1 has a trapezoid structure, and the groove 12 is formed on one side of the oblique side of the ceramic plate 1 close to the trapezoid structure.
The utility model is specifically used as follows:
when the ceramic plate 1 of the upper electrode plate 4 is fixed, the sealing cap 2 is sleeved at the end part of the fixing screw 3, then the groove 12 is aligned with the sealing cap 2, and the screw for fixing the ceramic plate 1 is screwed into one end of the ceramic plate 1. After the screw is completely screwed, since the sealing cap 2 is embedded in the groove 12 formed at the other end of the ceramic plate 1, both the left and right ends of the ceramic plate 1 are fixed, so that the ceramic plate 1 does not slide to avoid the leakage of the fixing screw 3 covered by the ceramic plate 1, and when the ceramic plate 1 is fixed on the upper electrode plate 4, the gas in the slot hole of the upper electrode plate 4 for installing the fixing screw 3 is discharged through the gap, the through hole 21 and the hole position of the fixing screw core, thereby forming a pressure difference on the upper and lower sides of the ceramic plate 1 and better fixing the ceramic plate 1.
By changing the structural style of the upper ceramic plate 1, the groove 12 is processed on the back of the upper ceramic plate 1 and matched with the sealing cap 2, so that the ceramic plate 1 is fixed on the upper electrode plate 4 and cannot slide, screws can be covered completely, the condition that the electrode plate fixing screws 3 are exposed and react with process gas to cause abnormal products is avoided, the success rate of post-maintenance and recovery is improved greatly, the operation rate of a machine is improved, and the productivity of the machine is improved.
While specific embodiments of the utility model have been described above, it will be appreciated by those skilled in the art that the specific embodiments described are illustrative only and not intended to limit the scope of the utility model, and that equivalent modifications and variations of the utility model in light of the spirit of the utility model will be covered by the claims of the present utility model.
Claims (4)
1. The utility model provides a liquid crystal display panel dry etching machine upper portion potsherd's antiskid structure, including the potsherd that has a locating hole, its characterized in that: the other side of the ceramic plate is provided with a groove, the anti-skid structure further comprises a sealing cap made of polytetrafluoroethylene materials, and the sealing cap is sleeved at the end part of a fixing screw in spiral connection with an electrode plate at the upper part of the dry etching machine.
2. The anti-slip structure of an upper ceramic plate of a liquid crystal panel dry etching machine as claimed in claim 1, wherein: the cell wall of recess comprises two arc lateral walls and two sharp lateral walls, two the sharp lateral wall sets up respectively in the upper and lower both sides of recess, and two the interval of sharp lateral wall and the external diameter phase-match of closing cap make the outer wall of closing cap contacts with sharp lateral wall, two the arc lateral wall sets up in the left and right sides of recess, and two the interval of arc lateral wall is greater than the external diameter of closing cap.
3. The anti-slip structure of an upper ceramic plate of a liquid crystal panel dry etching machine as claimed in claim 1, wherein: the sealing cap is provided with a through hole which is communicated with a hole site arranged on the core part of the fixed screw, and a gap is reserved between the upper end of the sealing cap and the top wall of the groove.
4. The anti-slip structure of an upper ceramic plate of a liquid crystal panel dry etching machine as claimed in claim 1, wherein: the ceramic plate is of a trapezoid structure, and the groove is formed in one side of the bevel edge of the ceramic plate close to the trapezoid structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322387302.6U CN220796665U (en) | 2023-09-04 | 2023-09-04 | Anti-slip structure of ceramic wafer at upper part of liquid crystal panel dry etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322387302.6U CN220796665U (en) | 2023-09-04 | 2023-09-04 | Anti-slip structure of ceramic wafer at upper part of liquid crystal panel dry etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220796665U true CN220796665U (en) | 2024-04-16 |
Family
ID=90632833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322387302.6U Active CN220796665U (en) | 2023-09-04 | 2023-09-04 | Anti-slip structure of ceramic wafer at upper part of liquid crystal panel dry etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220796665U (en) |
-
2023
- 2023-09-04 CN CN202322387302.6U patent/CN220796665U/en active Active
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