CN220788752U

CN220788752U - Feeding and discharging auxiliary tool for evaporation coating

Info

Publication number: CN220788752U
Application number: CN202322438482.6U
Authority: CN
Inventors: 杨洋
Original assignee: Tiantong Ruihong Technology Co ltd
Current assignee: Tiantong Ruihong Technology Co ltd
Priority date: 2023-09-08
Filing date: 2023-09-08
Publication date: 2024-04-16
Anticipated expiration: 2033-09-08

Abstract

The utility model discloses an auxiliary tool for feeding and discharging an evaporation coating, and belongs to the technical field of evaporation coating equipment. The evaporation coating feeding and discharging auxiliary tool is used for supporting a bearing disc, the bearing disc comprises a disc body and a first connecting part arranged at the middle part of the disc body, the evaporation coating feeding and discharging auxiliary tool comprises a bearing seat, a protection groove is arranged on the bearing seat, the depth dimension of the protection groove is larger than the length dimension of the first connecting part, and the inner diameter dimension of the protection groove is larger than the outer diameter dimension of the first connecting part; in the state that the first connecting part is inserted into the protection groove, the side wall supporting disc body which is arranged on the periphery of the protection groove is arranged on the side wall of the periphery of the first connecting part. The auxiliary tool for feeding and discharging the evaporation coating can realize effective protection of the first connecting part and simultaneously completely leak the through holes on the disc body, so that operators can conveniently place quartz wafers at the positions of the through holes.

Description

Feeding and discharging auxiliary tool for evaporation coating

Technical Field

The utility model relates to the technical field of evaporation coating equipment, in particular to an auxiliary tool for feeding and discharging evaporation coating.

Background

Evaporation coating is a common surface treatment technique for forming a thin film on the surface of an object to be treated by heating the material to its evaporation temperature and then depositing the evaporating substance on the surface of the object to be treated. The back plating of quartz wafers is a special evaporation plating technique for forming a metal film on the back of the quartz wafer.

Referring to fig. 1, in the process of back plating a quartz wafer, an operator first takes out a carrier tray 1 carrying the quartz wafer from an evaporation plating apparatus, then places the quartz wafer on the carrier tray 1, and then places the carrier tray 1 inside the evaporation plating apparatus to realize a plating operation. The bearing plate 1 is of an umbrella-shaped structure, the bearing plate 1 comprises a plate body 11, a first connecting portion 12 is arranged on the bottom side of the middle of the plate body 11, a second connecting portion 13 is arranged on the top side of the middle of the plate body 11, and when the bearing plate 1 is placed inside the evaporation coating equipment, the first connecting portion 12 and the second connecting portion 13 are used for being matched and connected with other structures in the evaporation coating equipment. The tray body 11 is provided with a plurality of through holes 111, and the diameter of the through holes 111 is larger than the diameter of the quartz wafer so that the quartz wafer can pass through the through holes 111. The edge of the through hole 111 is provided with a plurality of support pieces 14 extending toward the center of the through hole 111, and the plurality of support pieces 14 are used for supporting the quartz wafer.

In the process of placing the quartz wafer on the tray body 11, contact between the first connecting portion 12 and the second connecting portion 13 and the rest of the structure needs to be avoided as much as possible, so as to protect the first connecting portion 12 and the second connecting portion 13, and ensure that when the carrying tray 1 is placed in the evaporation coating equipment, the precision of the first connecting portion 12 and the second connecting portion 13 meets the matching requirement with the rest of the structure in the evaporation coating equipment. In the prior art, an operator supports the tray body 11 by using a rectangular rod-shaped frame included in the evaporation coating apparatus, and the first connecting portion 12 and the second connecting portion 13 are located at a hollow position of the rectangular rod-shaped frame, so that protection is achieved for the first connecting portion 12 and the second connecting portion 13. However, in the process of placing the quartz wafer on the tray body 11 by the operator, the rectangular rod-shaped frame, while supporting the tray body 11, also shields a portion of the through holes 111 on the tray body 11, and the operator needs to move the tray body 11 so that the shielded through holes 111 leak out and then place the quartz wafer at the positions of the through holes 111. In this process, the unstable support of the tray body 11 may cause a drop, and the drop of the quartz wafer from the tray body 11 may also cause great inconvenience to the operator in placing the quartz wafer.

Therefore, there is a need for an auxiliary tool for loading and unloading the evaporation coating to solve the above problems.

Disclosure of Invention

The utility model aims to provide an auxiliary tool for loading and unloading of an evaporation coating, which can realize effective protection of a first connecting part and simultaneously leak all through holes on a disc body, so that operators can conveniently place quartz wafers at the positions of the through holes.

To achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides a unloading auxiliary fixtures on evaporation coating for support and bear the weight of the dish, bear the weight of the dish and include the dish body and locate the first connecting portion of dish body middle part, unloading auxiliary fixtures includes on the evaporation coating:

the bearing seat is provided with a protection groove, the depth dimension of the protection groove is larger than the length dimension of the first connecting part, and the inner diameter dimension of the protection groove is larger than the outer diameter dimension of the first connecting part; and in a state that the first connecting part is inserted into the protection groove, the side wall of the periphery of the protection groove of the bearing seat supports the side wall of the periphery of the first connecting part of the disc body.

Preferably, the auxiliary tool for loading and unloading the evaporation coating further comprises a first protection pad, one end of the first protection pad is abutted to the bearing seat, and the other end of the first protection pad is abutted to the disc body in a state that the first connection portion is inserted into the protection groove.

Preferably, a chamfer is arranged at one end of the first protection pad far away from the bottom of the protection groove, and the chamfer is inclined outwards along the direction far away from the bottom of the protection groove.

Preferably, the auxiliary tool for feeding and discharging the evaporation coating further comprises a second protection pad, the second protection pad is annular, the second protection pad is arranged in the protection groove, the outer side of the second protection pad is in butt joint with the side wall of the protection groove, and the inner side of the second protection pad is in butt joint with the first connection portion in the state that the first connection portion is inserted into the protection groove.

Preferably, the auxiliary tool for feeding and discharging the evaporation coating further comprises a supporting component, the supporting component is arranged in the vertical direction, and the bearing seat can rotate around the axial direction of the supporting component relative to the supporting component.

Preferably, the supporting component comprises a supporting rod and a pressure bearing, the supporting rod is connected with a fixed part of the pressure bearing, and the bearing seat is connected with a rotating part of the pressure bearing;

and/or

The auxiliary tool for feeding and discharging the evaporation coating further comprises a lifting assembly, wherein the output end of the lifting assembly is connected with the supporting assembly, and the lifting assembly is used for adjusting the height of the bearing seat.

Preferably, the auxiliary tool for feeding and discharging the evaporation coating further comprises a locking assembly, and the locking assembly comprises:

the locking plate is connected with the fixing part of the pressure bearing;

the locking screw is in threaded connection with the locking plate, and the locking screw can pass the locking plate and butt in the lateral wall of bearing seat.

Preferably, the support assembly comprises a support rod;

the bearing seat bottom wall is provided with a rotating groove, and one end of the supporting rod is rotationally arranged in the rotating groove.

the locking sleeve is fixedly connected with the supporting rod and is arranged on the periphery of the bearing seat in a surrounding mode; the side wall of the locking sleeve is provided with a positioning hole, and the side wall of the bearing seat is provided with a plurality of positioning grooves;

and one end of the locking pin can pass through the positioning hole and is alternatively inserted into the positioning groove.

Preferably, a magnetic attraction piece is arranged at one end of the locking pin inserted into the positioning groove, and the material of the bearing seat can be attracted by magnetic force.

The utility model has the beneficial effects that:

according to the auxiliary tool for loading and unloading the evaporation coating, the bearing seat is arranged to support the bearing disc, the protection groove arranged on the bearing seat can effectively protect the first connecting part on the bearing disc, when the first connecting part is inserted into the protection groove, the bearing seat supports the central position of the bearing disc, through holes on the bearing disc can be completely exposed, and an operator can conveniently place quartz wafers on the bearing disc.

The first connecting part is inserted into the protective groove to support the bearing plate, compared with the rectangular frame to support the bearing plate, the first connecting part is arranged in the middle of the bearing plate, so that the center of gravity of the middle of the bearing plate can be uniformly supported, quartz wafers are placed on the periphery of the bearing plate, and in the rotating process of the bearing plate, the stress of the quartz wafers placed on the periphery of the bearing plate is uniform, so that the falling probability of the quartz wafers from the bearing plate can be reduced; and the first connecting part is inserted into the protection groove, so that the connection strength between the bearing seat and the bearing disc can be enhanced, and the falling probability of the bearing disc from the bearing seat is reduced.

In addition, because the inside back of spliced protection groove of first connecting portion, the degree of depth size of protection groove is greater than the length dimension of first connecting portion for there is the clearance between the tank bottom of protection groove and the lower terminal surface of first connecting portion, can avoid the lower terminal surface of first connecting portion to take place to contact with the protection groove tank bottom, thereby avoid external force to produce the extrusion to first connecting portion lower terminal surface, and then realize the protection to first connecting portion, with this precision that guarantees first connecting portion satisfies the demand that reaches the cooperation with other structures in the evaporation coating equipment. Because the internal diameter size of the protection groove is greater than the external diameter size of the first connecting part, the first connecting part is positioned inside the protection groove, the area of the side wall supporting disc body of the bearing seat at the periphery of the protection groove is enlarged, and the supporting stability of the bearing disc is further improved.

Drawings

FIG. 1 is an isometric view of a prior art carrier platter;

fig. 2 is a first isometric view of a loading disc of embodiment 1 provided by the utility model mounted on an auxiliary feeding and discharging tool for evaporation coating;

FIG. 3 is a second axial view of the auxiliary tooling for loading and unloading the evaporation coating film mounted on the carrier plate of embodiment 1;

FIG. 4 is a partial cross-sectional view of the carrier receptacle and carrier tray of embodiment 1 provided by the present utility model;

FIG. 5 is an isometric view of the auxiliary tooling for loading and unloading the evaporation coating film mounted on the carrier plate of the embodiment 2;

fig. 6 is a partial cross-sectional view of a carrier seat and a carrier tray according to embodiment 2 of the present utility model.

In the figure:

1. a carrying tray; 11. a tray body; 111. a through hole; 12. a first connection portion; 13. a second connecting portion; 14. a support sheet;

2. a bearing seat; 21. a protection groove; 22. a first protection pad; 23. a second protection pad; 24. a rotating groove; 25. a limit groove;

3. a support assembly; 31. a support rod; 32. a pressure bearing;

4. a locking assembly; 41. a locking plate; 411. a first connection plate; 412. a second connecting plate; 42. a locking screw; 43. a locking sleeve; 44. a locking pin;

5. a lifting assembly;

6. a limit component; 61. and a limit rod.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.

Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "fixed" are to be construed broadly, and may be, for example, either fixed or removable; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.

Example 1

As shown in fig. 1 to 4, the present embodiment provides an auxiliary tool for loading and unloading an evaporation coating, which can realize effective protection of the first connection portion 12, and simultaneously leak all the through holes 111 on the tray body 11, so as to facilitate the operators to place quartz wafers at the positions of the through holes 111.

The auxiliary tool for loading and unloading the evaporation coating is used for supporting the bearing disc 1, and the bearing disc 1 comprises a disc body 11 and a first connecting part 12 arranged at the middle part of the disc body 11. The auxiliary tool for loading and unloading the evaporation coating comprises a bearing seat 2, wherein a protection groove 21 is arranged on the bearing seat 2, the depth dimension of the protection groove 21 is larger than the length dimension of the first connecting portion 12, and the inner diameter dimension of the protection groove 21 is larger than the outer diameter dimension of the first connecting portion 12. When the first connecting portion 12 is inserted into the protection slot 21, the sidewall of the outer periphery of the protection slot 21 of the carrier 2 supports the sidewall of the outer periphery of the first connecting portion 12 of the tray body 11.

In this embodiment, the evaporation coating loading and unloading auxiliary tool supports the bearing disc 1 through the bearing seat 2 instead of the rectangular rod-shaped frame in the prior art, and compared with the rectangular rod-shaped frame in the prior art, the bearing seat 2 supports the first connecting portion 12 positioned in the middle of the bearing disc 1, so that a uniform support can be formed on the center of gravity of the middle of the bearing disc 1, when the bearing disc 1 needs to be rotated, the bearing disc 1 rotates around the axis of the first connecting portion 12, and as the bearing seat 2 supports the bearing disc 1, the stability of the bearing disc 1 in the rotating process can be improved, and the falling probability of the bearing disc 1 from the bearing seat 2 is reduced. Meanwhile, through holes 111 on the periphery of the carrying disc 1 can be completely leaked, so that operators can conveniently place quartz wafers on the carrying disc 1, and as the stability of the carrying disc 1 in the rotating process is improved, the stability of the quartz wafers placed on the carrying disc 1 can be improved accordingly, and the falling probability of the quartz wafers on the carrying disc 1 in the rotating process of the carrying disc 1 is reduced.

In addition, because the depth dimension of the protection groove 21 is greater than the length dimension of the protection first connecting portion 12, when the first connecting portion 12 is inserted into the protection groove 21, a gap is reserved between the groove bottom of the protection groove 21 and the lower end face of the first connecting portion 12, and contact between the lower end face of the first connecting portion 12 and the groove bottom of the protection groove 21 can be avoided, so that extrusion of external force to the lower end face of the first connecting portion 12 is avoided, protection of the first connecting portion 12 is further achieved, and therefore the precision of the first connecting portion 12 is guaranteed to meet the requirement of matched connection with other structures in evaporation coating equipment. Since the inner diameter of the protection groove 21 is larger than the outer diameter of the first connecting portion 12, the first connecting portion 12 is located inside the protection groove 21, the area of the side wall supporting disc body 11 of the bearing seat 2 on the outer periphery of the protection groove 21 is enlarged, and the supporting stability of the bearing disc 1 is further improved.

In order to avoid the conditions of collision scratch and the like generated in the supporting process of the bearing seat 2 on the bearing disc 1, the evaporation coating loading and unloading auxiliary tool further comprises a first protection pad 22, one end of the first protection pad 22 is abutted with the bearing seat 2, and the other end of the first protection pad 22 is abutted with the disc body 11 in a state that the first connecting part 12 is inserted into the protection groove 21. The first protection pad 22 is provided as an elastic pad, and the first protection pad 22 is provided as a rubber pad, for example.

In order to improve the efficiency of the first connecting portion 12 inserted into the protection groove 21, the end of the first protection pad 22 away from the bottom of the protection groove 21 is provided with a chamfer which is inclined outwardly in a direction away from the bottom of the protection groove 21. The chamfer is arranged to provide guiding function for the process of inserting the first connecting portion 12 into the protection groove 21, so that the first connecting portion 12 can be smoothly inserted into the protection groove 21.

The auxiliary tool for feeding and discharging the evaporation coating film further comprises a second protection pad 23, the second protection pad 23 is annular, the second protection pad 23 is arranged inside the protection groove 21, the outer side of the second protection pad 23 is in butt joint with the side wall of the protection groove 21, and the inner side of the second protection pad 23 is in butt joint with the first connection portion 12 in the state that the first connection portion 12 is inserted into the protection groove 21. The second protection pad 23 is provided as an elastic pad, and the second protection pad 23 is provided as a rubber pad, for example. By providing the second protection pad 23, the position of the first connection portion 12 inside the protection groove 21 can be fixed, so that the first connection portion 12 cannot shake inside the protection groove 21, and the stability of supporting the carrier tray 1 by the carrier seat 2 can be improved.

In order to facilitate operators to place quartz wafers on the bearing plate 1, the auxiliary tool for loading and unloading the evaporation coating further comprises a supporting component 3, the supporting component 3 is arranged in the vertical direction, and the bearing seat 2 can rotate around the axial direction of the supporting component 3 relative to the supporting component 3. When the bearing seat 2 rotates, due to the fact that a certain friction force exists between the second protection pad 23 and the bearing disc 1, the bearing disc 1 can be driven to rotate together, an operator can stand still at a position in the process of placing quartz wafers on the bearing disc 1, through the mode of rotating the bearing seat 2, the through holes 111, in which the quartz wafers are placed on the bearing disc 1, are rotated to the positions of the operator, the through holes 111, in which the quartz wafers are not placed on the bearing disc 1, are rotated to the positions of the operator, and the situation that the operator rotates around the bearing disc 1 to place the quartz wafers can be avoided.

Because the bearing seat 2 is arranged below the bearing disc 1, and the size of the bearing disc 1 is larger than that of the bearing seat 2, the bearing disc 1 is of an arc umbrella-shaped structure, and after the bearing seat 2 supports the bearing disc 1, operators are not easy to contact with the bearing seat 2. Further, the first connecting portion 12 and the second protection pad 23 which is arranged in an annular mode are in interference fit, and because the second protection pad 23 is an elastic pad, the first connecting portion 12 cannot be damaged by the interference fit, and the pressing force generated between the interference fit can enable an operator to directly operate the bearing disc 1 to drive the bearing seat 2 to rotate together, so that the operation of the operator is facilitated.

With respect to the arrangement of the support assembly 3, in the present embodiment, the support assembly 3 includes a support rod 31 and a pressure bearing 32, the support rod 31 is connected to a fixed portion of the pressure bearing 32, and the carrier 2 is connected to a rotating portion of the pressure bearing 32. The arrangement of the pressure bearing 32 enables a simple and efficient realization of the rotation of the carrier seat 2 relative to the support rod 31.

In order to avoid the situation that an operator rotates the carrying disc 1 in the process of placing the quartz wafer, the evaporation coating feeding and discharging auxiliary tool further comprises a locking assembly 4, the locking assembly 4 comprises a locking plate 41 and a locking screw 42, and the locking plate 41 is connected with the fixing part of the pressure bearing 32. The locking screw 42 is screwed to the locking plate 41, and the locking screw 42 can pass through the locking plate 41 and abut against the side wall of the bearing seat 2. The locking screw 42 is abutted against the side wall of the bearing seat 2 to fix the position of the bearing seat 2 by the compression force generated by the threaded connection between the locking screw 42 and the locking plate 41.

The locking plate 41 includes a first connection plate 411 and a second connection plate 412 which are L-shaped, the first connection plate 411 is horizontally arranged and connected with the fixing portion of the pressure bearing 32, the second connection plate 412 is vertically arranged and connected with the first connection plate 411, a gap is formed between the second connection plate 412 and the side wall of the bearing seat 2, and the locking screw 42 can rotate inside the threaded hole on the locking plate 41 to be far away from or close to the bearing seat 2. The setting of locking plate 41 and locking screw 42 can be after the seat 2 rotates certain angle with the locking of seat 2, makes things convenient for operating personnel to place quartz wafer on to the loading tray 1.

In order to adapt to the operators of different heights and place quartz wafer on to bearing plate 1, evaporation coating goes up unloading auxiliary fixtures still includes lifting assembly 5, and lifting assembly 5's output is connected with supporting component 3, and lifting assembly 5 is used for adjusting the height of bearing seat 2. The lifting assembly 5 can be designed or selected by a person skilled in the art according to practical situations, and will not be described herein.

Example 2

As shown in fig. 5 to 6, the present embodiment provides an auxiliary tool for loading and unloading an evaporation coating, which has the same structure as that of embodiment 1, and the same points are not repeated, and the difference is that the supporting component 3 includes a supporting rod 31, a rotating groove 24 is formed on the bottom wall of the bearing seat 2, and one end of the supporting rod 31 is rotatably disposed in the rotating groove 24.

In order to lock and bear seat 2, unloading auxiliary fixtures still includes locking subassembly 4 on the evaporation coating, and locking subassembly 4 includes locking sleeve 43 and locking pin 44, locking sleeve 43 and bracing piece 31 fixed connection, and locking sleeve 43's top is open structure, and the week side of bearing seat 2 is located to locking sleeve 43 ring, and locking sleeve 43 lateral wall is provided with the locating hole, and bearing seat 2 lateral wall is provided with a plurality of constant head tanks. One end of the locking pin 44 can pass through the positioning hole and be alternatively inserted into the positioning groove. The locking pin 44 and the locking sleeve 43 can lock the bearing seat 2 relative to the supporting rod 31 after the bearing seat 2 rotates for a certain angle, so that operators can conveniently place quartz wafers on the bearing disc 1.

In order to strengthen the connection strength of the locking pin 44 in the positioning groove, a magnetic attraction piece is arranged at one end of the locking pin 44 inserted into the positioning groove, and the material of the bearing seat 2 can be attracted by magnetic force. Illustratively, the end of the locking pin 44 is provided with a magnet, and the bearing seat 2 is made of stainless steel. When the locking pin 44 is located inside the positioning groove, the locking pin 44 can be magnetically attracted to the groove wall of the positioning groove, and the connection strength of the locking pin 44 in the positioning groove can be enhanced by the magnetic attraction between the locking pin 44 and the groove wall of the positioning groove.

In order to avoid bearing seat 2 to drop from bracing piece 31 in the circumstances emergence of rotating the in-process, evaporation coating goes up unloading auxiliary fixtures still includes spacing subassembly 6, and spacing subassembly 6 can strengthen the connection stability between bearing seat 2 and the bracing piece 31.

The limiting assembly 6 comprises an annular limiting groove 25 arranged on the side wall of the bearing seat 2, the limiting assembly 6 further comprises a limiting rod 61, the limiting rod 61 is connected to the side wall of the locking sleeve 43 in a threaded mode, one end of the limiting rod 61 is located outside the locking sleeve 43, and the other end of the limiting rod 61 is located inside the locking sleeve 43. By rotating the stopper rod 61 in the forward or reverse direction, one end of the stopper rod 61 located inside the locking sleeve 43 can be inserted into the stopper groove 25 or removed from the stopper groove 25.

When in use, an operator inserts the first connecting part 12 into the protection groove 21, so that the first protection pad 22 is abutted with the bottom surface of the tray body 11, the second protection pad 23 is abutted with the side wall of the first connecting part 12, the position of the bearing seat 2 is locked and fixed through the locking component 4, and then a quartz wafer can be placed on the bearing tray 1. When the carrying disc 1 is required to rotate, an operator firstly releases the locking state of the locking component 4, rotates the carrying disc 1 by a certain angle, locks the carrying seat 2 through the locking component 4 again, and places quartz wafers at different positions on the carrying disc 1 in sequence.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. The utility model provides a unloading auxiliary fixtures on evaporation coating for support and bear dish (1), bear dish (1) including dish body (11) and locate first connecting portion (12) of dish body (11) middle part, its characterized in that, unloading auxiliary fixtures includes on the evaporation coating:

the bearing seat (2), the bearing seat (2) is provided with a protection groove (21), the depth dimension of the protection groove (21) is larger than the length dimension of the first connecting part (12), and the inner diameter dimension of the protection groove (21) is larger than the outer diameter dimension of the first connecting part (12); the first connecting portion (12) is inserted into the protection groove (21), and the bearing seat (2) supports the disc body (11) on the side wall of the periphery of the protection groove (21) on the side wall of the periphery of the first connecting portion (12).

2. The auxiliary tool for loading and unloading of the evaporation coating according to claim 1, further comprising a first protection pad (22), wherein one end of the first protection pad (22) is abutted to the bearing seat (2), and the other end of the first protection pad (22) is abutted to the tray body (11) in a state that the first connection portion (12) is inserted into the protection groove (21).

3. The auxiliary tool for loading and unloading of the evaporation coating according to claim 2, wherein a chamfer is arranged at one end of the first protection pad (22) away from the bottom of the protection groove (21), and the chamfer is inclined outwards along a direction away from the bottom of the protection groove (21).

4. The auxiliary tool for loading and unloading of the evaporation coating film according to claim 2, further comprising a second protection pad (23), wherein the second protection pad (23) is annular, the second protection pad (23) is arranged in the protection groove (21), the outer side of the second protection pad (23) is abutted to the side wall of the protection groove (21), and the inner side of the second protection pad (23) is abutted to the first connection part (12) in a state of being inserted into the protection groove (21).

5. The auxiliary tool for loading and unloading of the evaporation coating according to claim 1, further comprising a supporting component (3), wherein the supporting component (3) is arranged along a vertical direction, and the bearing seat (2) can rotate relative to the supporting component (3) around an axial direction of the supporting component (3).

6. The evaporative coating feeding and discharging auxiliary tool according to claim 5, wherein the supporting assembly (3) comprises a supporting rod (31) and a pressure bearing (32), the supporting rod (31) is connected with a fixed part of the pressure bearing (32), and the bearing seat (2) is connected with a rotating part of the pressure bearing (32);

and/or

The auxiliary tool for feeding and discharging the evaporation coating film further comprises a lifting assembly (5), wherein the output end of the lifting assembly (5) is connected with the supporting assembly (3), and the lifting assembly (5) is used for adjusting the height of the bearing seat (2).

7. The evaporative coating loading and unloading auxiliary fixture according to claim 6, wherein the evaporative coating loading and unloading auxiliary fixture further comprises a locking assembly (4), and the locking assembly (4) comprises:

a locking plate (41), the locking plate (41) being connected with the fixed part of the pressure bearing;

the locking screw (42) is in threaded connection with the locking plate (41), and the locking screw (42) can penetrate through the locking plate (41) and abut against the side wall of the bearing seat (2).

8. The auxiliary tool for loading and unloading the evaporation coating according to claim 5, wherein the supporting component (3) comprises a supporting rod (31);

the bottom wall of the bearing seat (2) is provided with a rotating groove (24), and one end of the supporting rod (31) is rotatably arranged in the rotating groove (24).

9. The evaporative coating loading and unloading auxiliary fixture according to claim 8, wherein the evaporative coating loading and unloading auxiliary fixture further comprises a locking assembly (4), and the locking assembly (4) comprises:

the locking sleeve (43), the locking sleeve (43) is fixedly connected with the supporting rod (31), and the locking sleeve (43) is annularly arranged on the periphery of the bearing seat (2); the side wall of the locking sleeve (43) is provided with a positioning hole, and the side wall of the bearing seat (2) is provided with a plurality of positioning grooves;

and one end of the locking pin (44) can pass through the positioning hole and be alternatively inserted into the positioning groove.

10. The auxiliary tool for loading and unloading of the evaporation coating according to claim 9, wherein a magnetic attraction piece is arranged at one end of the locking pin (44) inserted into the positioning groove, and the material of the bearing seat (2) can be attracted by magnetic force.