CN220746073U - MPCVD device for depositing diamond - Google Patents
MPCVD device for depositing diamond Download PDFInfo
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- CN220746073U CN220746073U CN202322020272.5U CN202322020272U CN220746073U CN 220746073 U CN220746073 U CN 220746073U CN 202322020272 U CN202322020272 U CN 202322020272U CN 220746073 U CN220746073 U CN 220746073U
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- cavity
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- cooling
- main cavity
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- 239000010432 diamond Substances 0.000 title claims abstract description 28
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 28
- 238000000151 deposition Methods 0.000 title claims abstract description 27
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 54
- 238000001816 cooling Methods 0.000 claims abstract description 38
- 239000010453 quartz Substances 0.000 claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000006243 chemical reaction Methods 0.000 claims abstract description 29
- 230000005540 biological transmission Effects 0.000 claims abstract description 20
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 15
- 239000011733 molybdenum Substances 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 46
- 238000007789 sealing Methods 0.000 claims description 9
- 239000011229 interlayer Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 235000017899 Spathodea campanulata Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses an MPCVD device for depositing diamond, which comprises a microwave resonant reaction cavity and a microwave transmission device positioned below, wherein the microwave resonant reaction cavity comprises a main cavity positioned at the upper part and a base cavity positioned at the lower part, one side of the top of the main cavity is provided with an air inlet mechanism, an annular quartz plate horizontally spans the buckling connection position of the main cavity and the base cavity, a water-cooling antenna and a sample table integrated mechanism are nested in a central hole of the annular quartz plate, a vertical coaxial antenna communicated with the bottom of the water-cooling antenna and the sample table integrated mechanism extends to the outside of a coaxial waveguide positioned at the microwave transmission device, a water-cooling mechanism which extends into the inside of the water-cooling antenna and the sample table integrated mechanism is arranged in the cavity of the vertical coaxial antenna and is used for cooling a molybdenum table, and the molybdenum table is arranged above the water-cooling antenna and the sample table integrated mechanism; the main cavity is provided with a door opening and closing mechanism which is convenient for taking and placing products, and the other side of the main cavity is provided with a vacuum tube for exhausting. The device effectively ensures the vacuum degree in the cavity and maintains the air pressure required by the reaction.
Description
Technical Field
The utility model belongs to the technical field of microwave plasma chemical vapor deposition, and particularly relates to an MPCVD device for depositing diamond.
Background
The microwave source converts electric energy into microwave energy, and the microwave energy enters the reaction cavity through the circulator, the three pins and the mode conversion antenna and is focused on the upper part of the deposition substrate to form a strong electric field area, and the gas in the excitation reaction chamber is excited into plasma, so that the rapid and high-quality single crystal diamond deposition is finally realized.
The microwave plasma deposition device uses quartz materials as windows for isolating the reaction cavity from the outside air and transmitting microwaves, but the problem of the conventional spark-over ball of the single-mode cylindrical cavity cannot be solved all the time, quartz is etched, pollution is caused to deposited diamond, the air tightness of the multi-mode reaction cavity is poor, the air pressure stability in the reaction cavity is difficult to ensure, the problem of the spark-over ball etching quartz is solved by a certain quartz tube structure, but the microwave power cannot exceed 8kw, a glue ring is burned, and the risk of microwave leakage exists.
Disclosure of Invention
The utility model provides an MPCVD device for depositing diamond, which can effectively ensure the vacuum degree in a cavity, maintain the air pressure required by reaction, effectively isolate the cavity from the outside air, and finally realize the rapid and high-quality deposition of high-quality diamond to meet the market and scientific research demands.
The utility model is realized by the following technical scheme:
the MPCVD device for depositing the diamond comprises a microwave transmission device and a microwave resonance reaction cavity communicated with the microwave transmission device for depositing the diamond, wherein the microwave transmission device is positioned below the microwave resonance reaction cavity, and an annular quartz plate, a molybdenum table, a water-cooled antenna and a sample table integrated mechanism are arranged in the microwave resonance reaction cavity;
the microwave resonant reaction cavity comprises a main cavity positioned at the upper part and a base cavity positioned at the lower part, an air inlet mechanism is further arranged at one side of the top of the main cavity, the annular quartz plate horizontally spans the side wall arranged between the buckling connection parts of the main cavity and the base cavity, the water-cooling antenna and the sample table integrated mechanism are nested and arranged in a central hole of the annular quartz plate, a vertical coaxial antenna communicated with the bottom of the water-cooling antenna and the sample table integrated mechanism extends to the outside of a coaxial waveguide positioned in the microwave transmission device, a water-cooling mechanism which extends to the inside of the water-cooling antenna and the sample table integrated mechanism is arranged in the inner cavity of the vertical coaxial antenna and is used for cooling a molybdenum table, and the molybdenum table is arranged above the water-cooling antenna and the sample table integrated mechanism;
one side of the main cavity is provided with a door opening and closing mechanism which is convenient for taking and placing products, and the other side of the main cavity is provided with a vacuum tube for exhausting.
Further, the water cooling mechanism comprises a water inlet pipe and a water outlet pipe which are arranged in the inner cavity of the vertical coaxial antenna, a water stop plate is horizontally arranged in the inner cavity of the integrated mechanism of the water cooling antenna and the sample table, a plurality of circulating holes for circulating water are formed in the water stop plate, and the circulating holes are communicated with the water inlet pipe and the water outlet pipe of the inner cavity of the vertical coaxial antenna.
Further, the air inlet mechanism comprises an air inlet long rod with one end positioned outside the main cavity, an annular air inlet cavity is formed in the top of the side wall of the main cavity, the air inlet long rod is communicated with the annular air inlet cavity, and a plurality of air inlets are uniformly formed in the inner wall of the annular air inlet cavity.
Further, the buckling connection part of the main cavity and the base cavity is fixed by a screw, and a water cooling interlayer for cooling the cavity is arranged on the cavity wall of the main cavity.
Further, a row of vent holes for radiating heat of the quartz plate are formed in the side wall of the base cavity.
Furthermore, the annular quartz plate is respectively connected with the side walls of the main cavity and the base cavity and the integrated mechanism of the water-cooling antenna and the sample table in a sealing way through sealing rings.
Further, a plurality of cylindrical observation pipes are arranged on the side wall of the main cavity, and the cylindrical observation pipes are connected with the observation window through the CF flange.
Further, the door opening and closing mechanism is a cavity door arranged on one side of the main cavity, and the cavity door is detachably connected with the fixing seat.
Further, the door opening and closing mechanism is a top cover arranged at the top of the main cavity, and the top cover is detachably connected with the top of the main cavity.
Further, the microwave transmission device comprises a waveguide tube which is horizontally arranged and is communicated with a coaxial waveguide which is vertically arranged, two locking parts which are arranged in a spliced mode and used for fixing the vertical coaxial antenna are arranged at the bottom of the coaxial waveguide, a water pipe connector is arranged below the locking parts, and a water inlet and a water outlet of the water pipe connector are respectively communicated with two water pipes of an inner cavity of the vertical coaxial antenna;
the device is characterized in that a terminal cover is arranged at one end of the waveguide tube, a piston is arranged in the cavity of the waveguide tube, the piston is connected with a screw rod for controlling the movement of the piston, and a nut is sleeved outside the screw rod.
The utility model has the beneficial effects that:
(1) The utility model comprises a microwave transmission device and a microwave resonance reaction cavity communicated with the microwave transmission device, wherein the microwave transmission device is in a down-feed microwave input mode, a microwave source generates microwaves, the microwaves are transmitted and fed into the reaction cavity through a circulator, three pins, a waveguide tube and a mode converter, gas is uniformly fed into the reaction cavity through an air inlet mechanism and finally discharged into the atmosphere through a vacuumizing device, low-pressure gas in the reaction cavity is ionized into a fourth-state plasma state by a strong electric field focused by microwaves above a molybdenum table, the plasma contains an excited-state carbon source and collides with diamond crystal seeds on the molybdenum table to form bond crystals, and the higher the concentration of excited-state particles in the plasma is, the higher the collision frequency is, the better the deposition quality is, so that the epitaxial growth of the diamond is finally realized;
(2) The water cooling mechanism is further arranged in the integrated mechanism of the water cooling antenna and the sample table, so that the structure of the equipment is simplified to the greatest extent, meanwhile, the molybdenum table and the water cooling antenna are effectively cooled, the annular quartz plate is in sealing connection with the side wall of the cavity and the side wall of the antenna through the rubber ring, the pressure in the reaction chamber is smaller than the external atmospheric pressure in the vacuumizing process, the sealing performance of the quartz ring with the side wall of the cavity and the side wall of the antenna is better and better along with the reduction of the air pressure in the reaction chamber, a central hole is hollowed in the middle of the annular quartz plate, and the microwave power can be 10kw or higher; the use of the annular quartz plate avoids the problems of poor air tightness and the like of the annular quartz tube, and avoids the risk of a jump ball, so that the stability of equipment is greatly improved;
in summary, the utility model has simple structure, reasonable design and simple use, solves the problems that the cylindrical cavity cannot work under severe conditions, the operation of the jump fireball is unstable and the like easily, uses the stainless steel antenna above the fireball to replace quartz, avoids the phenomenon of diamond pollution caused by etching quartz, and simultaneously uses the multimode microwave resonant cavity, thereby increasing the area for effectively depositing the diamond, being more beneficial to large-scale use and stable industrial production, and the reaction cavity of the type can accommodate larger feed-in power and greatly improve the growth speed and quality.
Drawings
FIG. 1 is a schematic view of the whole structure of the door of the present utility model when the door is opened and closed on the side wall;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a schematic view of the whole structure of the opening and closing door of the present utility model at the top;
reference numerals: 1. waveguide tube 2, locking part 3, water stop plate, 4, screw rod, 5, nut, 6, piston, 7, terminal cover, 8, coaxial waveguide, 9, base cavity, 10, annular quartz plate, 11, water-cooled antenna and sample platform integrated mechanism, 12, molybdenum platform, 13, main cavity, 14, VCR female head, 15, inlet long rod, 16, vacuum tube, 17, cavity door, 18, cylinder observation tube, 19, top cap.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model.
The MPCVD device for depositing the diamond comprises a microwave transmission device and a microwave resonance reaction cavity communicated with the microwave transmission device for depositing the diamond, wherein the microwave transmission device is positioned below the microwave resonance reaction cavity, and an annular quartz plate 10, a molybdenum table 12 for depositing the diamond, a water-cooled antenna and sample table integrated mechanism 11 are arranged in the microwave resonance reaction cavity;
the microwave resonance reaction cavity comprises a main cavity 13 positioned at the upper part and a base cavity 9 positioned at the lower part, wherein the buckling connection part of the main cavity 13 and the base cavity 9 is fixed by a screw, and a water cooling interlayer used for cooling the cavity is arranged in the cavity wall of the main cavity 13. An air inlet mechanism is further arranged on one side of the top of the main cavity 13, the air inlet mechanism comprises an air inlet long rod 15 positioned outside the main cavity, an annular air inlet cavity channel is arranged on the top of the side wall of the main cavity 13, the air inlet long rod 15 is communicated with the annular air inlet cavity channel, a circle of air inlet holes are uniformly formed in the inner wall of the annular air inlet cavity channel, and a VCR female head 14 is sleeved on the outer air inlet long rod 15;
the annular quartz plate 10 horizontally spans the side wall between the buckling connection part of the main cavity 13 and the base cavity 9, a row of vent holes are formed in the side wall of the base cavity 9, and the annular quartz plate is used for radiating heat for the annular quartz plate and is connected with the cavity and the outside atmosphere. The water-cooling antenna and the integral sample stage mechanism 11 are nested and arranged in a central hole of the annular quartz plate 10, and the annular quartz plate 10 is respectively connected with the side walls of the main cavity 13 and the base cavity 9 and the integral sample stage mechanism in a sealing way through sealing rings.
The vertical coaxial antenna communicated with the bottom of the integrated mechanism 11 of the water-cooled antenna and the sample table extends to the outside of the coaxial waveguide of the microwave transmission device, and a water-cooled mechanism which extends to the inside of the integrated mechanism 11 of the water-cooled antenna and the sample table and is used for cooling the molybdenum table is arranged in the inner cavity of the vertical coaxial antenna;
the water cooling mechanism comprises a water inlet pipe and a water outlet pipe which are arranged in the inner cavity of the vertical coaxial antenna, a water-stop plate 3 is horizontally arranged in the inner cavity of the integrated mechanism 11 of the water cooling antenna and the sample platform, a plurality of circulating holes for circulating water are formed in the water-stop plate 3, the circulating holes are communicated with the water inlet pipe and the water outlet pipe of the inner cavity of the vertical coaxial antenna, and the molybdenum platform 12 is arranged above the integrated mechanism 11 of the water cooling antenna and the sample platform;
the main cavity 13 is provided with a door opening and closing mechanism which is convenient for taking and placing products, the door opening and closing mechanism can be a cavity door 17 arranged on one side of the main cavity, the cavity door 17 is detachably connected with a fixed seat, so that the products can be taken and placed conveniently, and a sealing rubber ring and an electromagnetic shielding strip are arranged at the joint of the cavity door 17 and the fixed seat, so that the vacuum degree in the cavity is ensured; the door opening and closing mechanism can also be a top cover 19 arranged at the top of the main cavity 13, namely, the top of the main cavity 13 is in an opening form, the top cover 19 is detachably connected with the top of the main cavity 13, and a handle is arranged on the top cover 19, so that the door opening and closing mechanism is convenient to grasp.
A vacuum tube 16 for exhausting is provided at the other side of the main chamber 13, and the vacuum tube 16 is connected with an exhaust tube. The side wall of the main cavity 13 is also provided with a plurality of cylindrical observation pipes 18 for observing the growth state of the product, and the cylindrical observation pipes are connected with an observation window through a CF flange. The outside of the observation window is provided with an infrared detector, and the observation window is connected with a device for fixing the infrared detector.
Further, the microwave transmission device comprises a waveguide tube 1 which is horizontally arranged, the waveguide tube 1 is communicated with a coaxial waveguide tube 8 which is vertically arranged, two locking parts 2 which are arranged in a split way and used for fixing a vertical coaxial antenna are arranged at the bottom of the coaxial waveguide tube 8, a water pipe connector is arranged below the locking parts 2, and a water inlet and a water outlet of the water pipe connector are respectively communicated with two water pipes of an inner cavity of the vertical coaxial antenna;
the microwave oven is characterized in that one end of the waveguide tube 1 is provided with a terminal cover 7, a piston 6 for adjusting the reflectivity of microwaves is arranged in the inner cavity of the waveguide tube 1, the piston 6 is connected with a screw 4 for controlling the movement of the piston, and a nut 5 is sleeved outside the screw 4.
While the basic principles, principal features and advantages of the present utility model have been shown and described, it will be understood by those skilled in the art that the present utility model is not limited by the foregoing embodiments, which are described in the foregoing description merely illustrate the principles of the utility model, and various changes and modifications may be made therein without departing from the spirit and scope of the utility model as defined in the appended claims and their equivalents.
Claims (10)
1. An MPCVD apparatus for depositing diamond, characterized by: the device comprises a microwave transmission device and a microwave resonance reaction cavity communicated with the microwave transmission device and used for depositing diamond, wherein the microwave transmission device is positioned below the microwave resonance reaction cavity, and an annular quartz plate (10), a molybdenum table (12), a water-cooling antenna and sample table integrated mechanism (11) are arranged in the microwave resonance reaction cavity;
the microwave resonance reaction cavity comprises a main cavity (13) positioned at the upper part and a base cavity (9) positioned at the lower part, an air inlet mechanism is further arranged at one side of the top of the main cavity (13), the annular quartz plate (10) horizontally spans the side wall arranged between the buckling connection parts of the main cavity (13) and the base cavity (9), the water-cooling antenna and the sample table integrated mechanism (11) are nested in a central hole of the annular quartz plate (10), a vertical coaxial antenna communicated with the bottom of the water-cooling antenna and the sample table integrated mechanism (11) extends to the outside of a coaxial waveguide of the microwave transmission device, a water-cooling mechanism which extends to the inside of the water-cooling antenna and the sample table integrated mechanism (11) and is used for cooling a molybdenum table is arranged in an inner cavity of the vertical coaxial antenna, and the molybdenum table (12) is arranged above the water-cooling antenna and the sample table integrated mechanism (11);
a door opening and closing mechanism which is convenient for taking and placing products is arranged on the main cavity (13), and a vacuum tube (16) for exhausting is arranged on the other side of the main cavity (13).
2. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the water cooling mechanism comprises a water inlet pipe and a water outlet pipe which are arranged in the inner cavity of the vertical coaxial antenna, a water-stop plate (3) is horizontally arranged in the inner cavity of the water cooling antenna and sample table integrated mechanism (11), a plurality of circulating holes for circulating water are formed in the water-stop plate (3), and the circulating holes are communicated with the water inlet pipe and the water outlet pipe of the inner cavity of the vertical coaxial antenna.
3. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the air inlet mechanism comprises an air inlet long rod (15) with one end positioned outside the main cavity, an annular air inlet cavity is formed in the top of the side wall of the main cavity (13), the air inlet long rod (15) is communicated with the annular air inlet cavity, and a plurality of air inlets are uniformly formed in the inner wall of the annular air inlet cavity.
4. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the buckling connection part of the main cavity (13) and the base cavity (9) is fixed by a screw, and a water cooling interlayer for cooling the cavity is arranged on the cavity wall of the main cavity (13).
5. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the side wall of the base cavity (9) is provided with a row of vent holes for radiating heat of the quartz plate.
6. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the annular quartz plate (10) is respectively connected with the side walls of the main cavity (13) and the base cavity (9) through sealing rings, and the water-cooled antenna is connected with the sample stage integrated mechanism in a sealing way.
7. An MPCVD apparatus for depositing diamond according to claim 1, wherein: a plurality of cylindrical observation pipes (18) are arranged on the side wall of the main cavity (13) and are connected with the observation window through CF flanges.
8. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the door opening and closing mechanism is a cavity door (17) arranged on one side of the main cavity (13), and the cavity door (17) is detachably connected with the fixing seat.
9. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the door opening and closing mechanism is a top cover (19) arranged at the top of the main cavity (13), and the top cover (19) is detachably connected with the top of the main cavity (13).
10. An MPCVD apparatus for depositing diamond according to claim 1, wherein: the microwave transmission device comprises a waveguide tube (1) which is horizontally arranged, the waveguide tube (1) is communicated with a coaxial waveguide tube (8) which is vertically arranged, two locking parts (2) which are spliced and arranged and used for fixing a vertical coaxial antenna are arranged at the bottom of the coaxial waveguide tube (8), a water pipe connector is arranged below the locking parts (2), and a water inlet and a water outlet of the water pipe connector are respectively communicated with two water pipes of an inner cavity of the vertical coaxial antenna; the novel high-efficiency high-power microwave oven is characterized in that a tail end cover (7) is arranged at one end of the waveguide tube (1), a piston (6) is arranged in an inner cavity of the waveguide tube (1), the piston (6) is connected with a screw rod (4) for controlling the movement of the piston, and a screw cap (5) is sleeved outside the screw rod (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322020272.5U CN220746073U (en) | 2023-07-31 | 2023-07-31 | MPCVD device for depositing diamond |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322020272.5U CN220746073U (en) | 2023-07-31 | 2023-07-31 | MPCVD device for depositing diamond |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220746073U true CN220746073U (en) | 2024-04-09 |
Family
ID=90563953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322020272.5U Active CN220746073U (en) | 2023-07-31 | 2023-07-31 | MPCVD device for depositing diamond |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220746073U (en) |
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2023
- 2023-07-31 CN CN202322020272.5U patent/CN220746073U/en active Active
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