CN220738773U - Dual vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades - Google Patents
Dual vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades Download PDFInfo
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- CN220738773U CN220738773U CN202322215805.5U CN202322215805U CN220738773U CN 220738773 U CN220738773 U CN 220738773U CN 202322215805 U CN202322215805 U CN 202322215805U CN 220738773 U CN220738773 U CN 220738773U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 61
- 230000009977 dual effect Effects 0.000 title claims description 11
- 239000007789 gas Substances 0.000 claims abstract description 123
- 238000006243 chemical reaction Methods 0.000 claims abstract description 93
- 239000007788 liquid Substances 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 239000003513 alkali Substances 0.000 claims abstract description 12
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 22
- 230000001105 regulatory effect Effects 0.000 claims description 17
- 239000007795 chemical reaction product Substances 0.000 claims description 16
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims description 4
- 230000006378 damage Effects 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 1
- 239000002912 waste gas Substances 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000012495 reaction gas Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 239000010963 304 stainless steel Substances 0.000 description 2
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- -1 hydrogen fluoride ions Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910000601 superalloy Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Drying Of Semiconductors (AREA)
Abstract
The utility model discloses double vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades, and belongs to the technical field of cleaning of aero-engines and gas turbine blades. The apparatus includes: a reaction furnace, a double vacuum structure and top feeding; the lower end of the sealing cover is connected with a workpiece frame for placing a workpiece, and the upper end of the sealing cover is connected with an exhaust pipe and a gas pipe; the triple gas leakage detection system is provided with gas leakage sensors above the gas control cabinet, the alkali liquid pool and the reaction furnace; the device is safe and efficient, has long service life, has very good cleaning effect on the inner surface of the crack of the workpiece, can not damage the workpiece, and is suitable for cleaning carbon deposition and oxides on the inner surface of the crack of aero-engines and gas turbine blades, impellers and other similar workpieces with various sizes.
Description
Technical Field
The utility model relates to the technical field of cleaning of aero-engine and gas turbine blades, in particular to double-vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades.
Background
As the aeroengine and the gas turbine blade are used as important components of the aeroengine and the gas turbine, the fatigue resistance, the high temperature resistance and the corrosion resistance of the aeroengine and the gas turbine blade are strictly required, and as the aeroengine and the gas turbine blade work at high temperature for a long time, oxide layers are often generated on the surface and the internal crack of the blade, the corrosion degree of the surface of the aeroengine and the gas turbine blade is increased, the follow-up braze welding repair is not facilitated, and if the aeroengine and the gas turbine blade are cleaned irregularly, great potential safety hazards are left.
At present, the domestic modes such as mechanical polishing method and sanding are generally adopted, and the modes have the defects of long working time, high labor intensity, harm to human bodies and difficulty in cleaning the inside of cracks. The blade cleaning problem can be solved by using hydrogen fluoride ion cleaning. Compared with the traditional mode, the process has the following advantages: 1. the cleaning efficiency is high, and the cleaning device is suitable for batch maintenance; 2. the workpiece can not be in physical contact with the surface of the workpiece, and the damage to the machine body is small; 3. the cleaning quality can be ensured with flexibility and controllability. The method of cleaning by utilizing the hydrogen fluoride ions is particularly suitable for removing and cleaning the oxide layer in microcracks on the surface of a workpiece. However, the current fluorine-hydrogen ion cleaning equipment has certain technical defects, specifically: the high vacuum or the periodic change state of the internal air pressure is required to be kept for a long time before the cleaning chamber works, the vacuum furnace wall of the common equipment is a single-layer outer wall, and the furnace wall is easy to deform at a high temperature; in addition, the design of a single-layer furnace wall is also prone to gas leakage.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art and provide a double-vacuum fluorine-hydrogen ion cleaning device for cleaning blades. The equipment adopts a double vacuum structure, ensures that the air pressure inside and outside the reaction chamber is consistent, and the reaction chamber is not deformed when being cleaned at high temperature; the porous gas homogenizing tool can ensure that gas is completely dispersed into the reaction chamber, so that the reaction atmosphere in the furnace is stable; the triple gas leakage sensing system monitors gas leakage, and the waste gas treatment system absorbs waste gas, so that environmental pollution can not be caused. The cleaning equipment has the characteristics of good cleaning effect, no damage to workpieces, high cleaning speed, high safety coefficient and the like. Can be used for cleaning the fluorine-hydrogen ions of pollutants such as carbon deposit and oxide on the inner surfaces of cracks of gas turbine aero-engine and gas turbine blades, impellers and other similar parts.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
a double vacuum fluorine hydrogen ion cleaning device for cleaning blades comprises a reaction furnace, a vacuum pumping system, a gas control cabinet, a reaction product processing system and a gas leakage sensor; wherein:
and (3) a reaction furnace: the device is a closed cavity, adopts a double vacuumizing structure and comprises a furnace shell, a reaction chamber and a sealing cover; the reaction chamber is arranged in the furnace shell, and a sealing cover is arranged above the reaction chamber;
and (3) vacuumizing system: the device comprises a mechanical vacuum pump and a liquid ring vacuum pump, wherein the mechanical vacuum pump is used for vacuumizing a space between a furnace shell and a reaction chamber, and the liquid ring vacuum pump is used for vacuumizing the space in the reaction chamber;
gas control cabinet: two hydrogen fluoride cylinders and other gas (such as hydrogen, helium and the like) interfaces are arranged in the gas cylinder;
reaction product treatment system: comprises a liquid ring vacuum pump, a scrubber and an alkali liquid pool;
gas leakage sensor: including hydrogen fluoride gas sensors and hydrogen gas sensors.
The reaction chamber is internally provided with a workpiece frame and an air homogenizing tool, the workpiece frame is provided with a central support column, and the central support column is provided with a plurality of plate-shaped frame bodies for placing workpieces; the center pillar is of a porous tubular structure, the center pillar is sleeved on the outer surface of the gas homogenizing tool, and the gas homogenizing tool is of a porous tubular structure.
The sealing cover is provided with a gas pipe, the lower end of the gas pipe is connected with a gas homogenizing tool, and the upper end of the gas pipe is connected with a corresponding gas interface on the gas control cabinet.
The sealing cover is provided with an exhaust port I, an exhaust pipe I is welded on the exhaust port I, and the exhaust pipe I is connected to a reaction product treatment system.
An exhaust port II is arranged on the furnace shell and is communicated with a space between the furnace shell and the reaction chamber; the outer wall of the exhaust port II is welded with the furnace shell; and the exhaust port II is connected with the exhaust pipe II in a sealing way, and the exhaust pipe II is connected with a mechanical vacuum pump.
Further, heating wires are arranged between the furnace shell and the reaction chamber and around the upper, middle and lower positions outside the reaction chamber.
In the reactant treatment system, the exhaust pipe I is sequentially connected with a vacuum exhaust valve, a liquid ring vacuum pump and a gas-liquid separator, the upper end of the gas-liquid separator is connected with a scrubber, and the bottom end of the gas-liquid separator is connected with an alkali liquid pool; the air path is provided with a vacuum regulating valve; the scrubber comprises two venturi scrubbers and a packed tower scrubber arranged in series.
The gas leakage sensor is arranged above the gas control cabinet, the reaction product processing system and the reaction furnace.
The double vacuum fluorine-hydrogen ion cleaning equipment for cleaning the blades of the aero-engine and the gas turbine has the beneficial effects that:
1. the device adopts top feeding, is equipped with work rest and even gas frock that are used for placing the work piece respectively in the reaction chamber, and the inner chamber and the gas-supply mouth of work piece are linked together, and the air current gets into the reaction chamber of reacting furnace through even gas frock and gas-supply mouth, permeates in the crack of work piece, realizes the washing of work piece, makes work piece everywhere can all realize surface cleaning, and work efficiency is high.
2. The reaction furnace adopts a double vacuumizing structure, and a mechanical vacuum pump is responsible for pumping the space between the furnace shell and the reaction chamber; the vacuum liquid ring pump is responsible for the evacuation of reaction chamber and the discharge of reaction tail gas, and this kind of dual evacuation structural design for the pressure difference between the inner and outer of reaction chamber wall is little, has avoided the deformation of reaction chamber wall under the high temperature, has promoted the life of equipment, and in addition, this kind of design can effectively reduce the reaction gas risk of leaking, has improved the security of equipment.
3. The device is provided with a triple gas leakage detection system, and gas leakage sensors are arranged above a gas control cabinet and an alkali liquid pool and above a reaction furnace. The gas leakage sensor is connected with the automatic control system, can timely alarm the gas leakage condition and make automatic safety response measures, and ensures the safety of a user when the gas leakage occurs.
Drawings
Fig. 1 is a schematic structural view of a dual vacuum fluorine hydrogen ion cleaning apparatus for cleaning a blade according to an embodiment of the present utility model.
Fig. 2 is a sectional view of a reaction furnace of a double vacuum fluorine hydrogen ion cleaning apparatus for cleaning a blade according to an embodiment of the present utility model.
FIG. 3 is a schematic diagram of a reaction product processing system of a dual vacuum fluorine hydride cleaning device for blade cleaning in accordance with one embodiment of the utility model.
In the figure: 1. an exhaust valve; 2. a mechanical vacuum pump; 3. a blower; 4. a reaction furnace; 5. a cover; 6. a pneumatic clamp; 7. a gas leakage sensor; 8. a hanging plate; 9. a gas pipe; 10. an exhaust pipe I; 11. a furnace shell; 12. an exhaust port II; 13. a reaction chamber; 14. a heating wire; 15. a work piece holder; 16. homogenizing gas tool; 17. a vacuum regulating valve; 18. three-way exhaust valve (three-way regulating valve); 19. a gas-liquid separator; 20. a liquid ring vacuum pump; 21. and a vacuum exhaust valve.
Detailed Description
Preferred embodiments of the present utility model will be described in more detail below. While the preferred embodiments of the present utility model are described below, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
The utility model provides double vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades of an aeroengine and a gas turbine, which comprises a reaction furnace, a vacuumizing system, a gas control cabinet, a reaction product processing system and a gas leakage sensor, wherein the reaction furnace is connected with the vacuumizing system; the parts are specifically as follows:
and (3) a reaction furnace: adopts a double vacuum structure, and comprises a furnace shell, a reaction chamber and a sealing cover; the reaction chamber is arranged in the furnace shell, and a sealing cover is arranged above the reaction chamber; temperature control areas (provided with heating wires) are arranged at the upper, middle and lower positions outside the reaction chamber; a gas homogenizing tool and a workpiece frame are arranged in the reaction chamber; the workpiece frame is provided with a center pillar, and a plurality of plate-shaped frame bodies for placing workpieces are arranged on the center pillar; the center pillar is porous tubular structure, center pillar suit in even gas frock surface, even gas frock is porous tubular structure, has the space between center pillar and the even gas frock. The reaction chamber and the workpiece frame are made of RA330 nickel-based superalloy, the furnace shell is made of 304 stainless steel, and the workpiece frame comprises a support column, a heat insulation solid shelf, a gas distribution gasket and a gas preheating pipe.
And (3) sealing cover: the reactor is arranged at the upper end of the reactor body and is made of 304 stainless steel; the sealing cover is provided with a process gas delivery pipe 9 and a process waste gas exhaust port I, and the lower end of the gas delivery pipe 9 stretches into the reaction chamber and is connected with a gas homogenizing tool 16; the gas homogenizing tool is not limited to a specific structure, and can uniformly convey gas into the reaction chamber, and is a cylindrical barrel provided with a plurality of gas conveying holes as shown in fig. 2. And an exhaust pipe I10 is welded on the exhaust port I, and the upper end of the exhaust pipe I10 is connected to a reaction product treatment system. The distance between the lower end of the exhaust pipe I10 and the reaction chamber is adjustable between 500 mm and 600 mm;
gas control cabinet: two hydrogen fluoride cylinders are arranged in the gas-liquid separator, an air inlet interface is arranged outside the gas-liquid separator, and a gas control cabinet for other gases (such as hydrogen, helium and the like) can be externally connected with the air inlet interface to be connected with the conveying pipe 9.
Gas leakage sensor: comprises a hydrogen fluoride gas sensor and a hydrogen gas sensor; gas leakage sensors are arranged above the gas control cabinet, the reaction product treatment system (alkali liquor tank) and the reaction furnace.
And (3) vacuumizing system: comprising a mechanical vacuum pump 2 and a liquid ring vacuum pump 20, wherein: the mechanical vacuum pump is responsible for pumping air in the space between the furnace shell and the reaction chamber, and the liquid ring vacuum pump is responsible for vacuumizing the reaction chamber and exhausting reaction tail gas.
Reaction product treatment system: comprises a scrubber and an alkali liquid pool.
Optionally, the wall thickness of the reaction chamber and the furnace shell of the reaction furnace is between 9 and 10mm, and the exhaust valve 1 is arranged outside the furnace body and can be switched between normal pressure and vacuum operation states. The reaction furnace and the sealing cover are both sealed by water cooling, the sealing groove and the engagement surface of the O-shaped ring are maintained, and 8 pneumatic clamps are positioned at the edge of the sealing cover and used for fixing the sealing cover of the reaction furnace.
The diameter of the working area (the inner diameter of the cylindrical reaction chamber) is adjustable between 500 and 700mm, the height is adjustable between 500 and 900mm, and the alloy is prepared from an RA330 nickel-based superalloy material through surface heat treatment, and is high-temperature resistant and corrosion resistant;
specifically, a circle of heating wires are respectively wound around the upper, middle and lower parts of the outer wall of the reaction chamber, and thermocouples are arranged near each heating wire and used for feeding back the temperature in the furnace; the heating wire is made of iron-chromium-aluminum alloy, is annularly wound outside the reaction chamber, and can continuously operate in an environment with the temperature of more than 1000 ℃.
Optionally, the diameter of the gas pipe on the sealing cover is 15-20mm.
Specifically, the reaction gas enters the reaction chamber through a gas pipe, the lower end of the gas pipe is connected with a gas homogenizing tool in a mode of hidden connection of bolts and nuts, a workpiece to be cleaned is placed on a workpiece frame, in one example, the reaction gas is hydrogen fluoride and hydrogen, the reaction gas is diffused into the reaction chamber through the gas homogenizing tool, and gas conveying holes on the gas homogenizing tool are communicated with the reaction chamber; in the heating process, only argon is introduced into the cavity, and after the cavity reaches the cleaning temperature, reaction gas is introduced to start cleaning the surface of the workpiece, and reaction products are pumped away along with tail gas, so that the workpiece is not damaged, and the device is safe and efficient.
Optionally, the upper end of the gas pipe is connected with the gas outlet end of the gas supply equipment (hydrogen fluoride gas cylinder and the like) in a sealing way.
Specifically, two hydrogen fluoride cylinders are arranged in the gas control cabinet, and other gas (such as hydrogen and helium) interfaces are also arranged, and in one example, the reaction gas is hydrogen fluoride and hydrogen, and the gas enters the reaction chamber through a gas homogenizing tool.
Specifically, a gas leakage sensor is arranged above a gas control cabinet, a reaction product processing system and a reaction furnace, and when the concentration detected by the hydrogen fluoride gas sensor is more than 1 ppm, an alarm is sent out, and an operator checks; when the concentration is more than 3 ppm, the system is shut down; and when the leakage of the concentration of the hydrogen sensor is detected to be more than or equal to 2%, the system gives an alarm, all the treatment processes are stopped immediately, the hydrogen starting valve is closed, and the safety of operators is ensured when the equipment runs.
Optionally, the apparatus further comprises an exhaust pipe I, the diameter of which is selectable between 30-60 mm.
Specifically, blast pipe I10 one end with gas vent I is linked together, and the gas vent I10 suit in the reaction chamber is in intake pipe 9 outer lane, and length is optional between 500-600mm, and gas vent I outer wall and closing cap welding have increased the inside leakproofness of reaction chamber.
Specifically, the other end of the exhaust pipe I10 is connected with a reactant treatment system, specifically, the exhaust pipe I is sequentially connected with a vacuum exhaust valve 21, a liquid ring vacuum pump 20 and a gas-liquid separator 19, the upper end of the gas-liquid separator 19 is connected with a scrubber, and the bottom end of the gas-liquid separator 19 is connected with an alkali liquid pool; the air path is also provided with a three-way regulating valve 18 and a vacuum regulating valve 17, one end of the vacuum regulating valve 17 is connected with one port of the three-way regulating valve 18, and the other end of the vacuum regulating valve 17 is connected with a pipeline between the vacuum exhaust valve 21 and the liquid ring vacuum pump; the other two ports of the three-way regulating valve 18 are respectively connected with a scrubber and a gas-liquid separator 19. The scrubber comprises two venturi scrubber and packed tower scrubber combinations arranged in series.
In the reactant treatment system, circulation is carried out through a liquid ring vacuum pump, and in the normal pressure treatment process, waste gas passes through a scrubber (two groups of scrubbers which are arranged in a light series connection mode, each group of scrubber comprises a Venturi scrubber and a packed tower scrubber which are connected in series), so that four opportunities are provided for NaOH to react with the waste gas, and neutralization is carried out. The waste gas firstly flows through a first Venturi scrubber, then flows to a first countercurrent filling tower scrubber, then flows through a second Venturi scrubber, finally flows to a second countercurrent filling tower scrubber, and then discharges the neutralized waste gas outside a process plant; during the vacuum treatment, the exhaust gas is passed through a liquid ring vacuum pump and a venturi scrubber/packed tower scrubber combination arranged in series. The liquid ring vacuum pump and the gas-liquid separator provide initial neutralization, then the neutralization is carried out through the Venturi scrubber and the countercurrent filling tower, and finally the waste gas is discharged outside the process factory building.
Specifically, the exhaust pipe I is connected with a vacuum regulating valve 17 for regulating the air pressure in the reaction chamber, when the vacuum regulating valve is opened, less suction is generated in the reaction kettle, higher pressure is generated in the reactor, and when the vacuum regulating valve is closed, more suction is generated in the reaction kettle, and lower pressure is generated in the reactor.
Examples
In this embodiment, the workpieces to be cleaned are conventional aircraft engine and gas turbine rotor blades.
The structure of the cleaning device is shown in fig. 1 to 3. The reaction furnace 4 is of a double-layer structure, a reaction chamber 13 in the reaction furnace is a closed cavity, and a workpiece frame 15 and a gas homogenizing tool 16 are respectively arranged in the reaction chamber 13; an exhaust port II 12 between the furnace body and the reaction chamber is arranged on the right side of the reaction furnace 4, and the exhaust port II 12 is connected with a mechanical vacuum pump 2; the heating wire 14 is arranged in the space between the furnace body 11 and the reaction chamber 13 and surrounds the periphery of the reaction chamber 13; the sealing cover 5 is arranged above the reaction furnace 4, 8 pneumatic clamps 6 are arranged around the sealing cover to ensure the tightness of the reaction chamber 13, and a hanging plate 8 is arranged above the sealing cover 5 to facilitate the hanging movement of the hanging machine; a blower 3 is arranged below the reaction furnace 4 and used for rapid cooling in the furnace;
an exhaust valve 1, a gas pipe 9 and a reaction gas exhaust pipe I10 are arranged above the reaction furnace 4;
the gas pipe 9 is connected with a hydrogen fluoride cylinder and a hydrogen gas cylinder, the reaction gas exhaust pipe I10 is connected with a vacuum exhaust valve 21 and then connected with a liquid ring vacuum pump 20, and meanwhile, the side of the gas outlet pipeline is provided with a vacuum regulating valve 17 so as to control the pressure in the reaction chamber.
The gas-liquid separator 19 is connected with an alkali liquid pool, and three ports of the three-way exhaust valve 18 are respectively connected with the vacuum regulating valve 17, the gas-liquid separator 19 and the scrubber.
The gas leakage sensor 7 is arranged above the reaction furnace 4, the alkali liquid pool and the gas control cabinet;
in summary, when the surfaces of the blades of the aeroengine and the gas turbine are cleaned, the blades are placed on the workpiece frame 15, the liquid ring vacuum pump 20 and the mechanical vacuum pump are used for pumping air from the reaction chamber 13, the furnace body and the space between the reaction chambers respectively, the reaction chambers are guaranteed to be in a vacuum state with equivalent internal and external pressure, argon is introduced through the gas transmission pipe 9 for repeatedly purging three times, then the temperature of the heating wire 14 is regulated, after the cleaning temperature is reached, hydrogen and hydrogen fluoride are introduced, the waste gas after the cleaning of the workpieces sequentially passes through the reaction gas exhaust pipe I10, the vacuum exhaust valve 21, the liquid ring vacuum pump 20, the gas-liquid separator 19, the scrubber and the alkali liquid pool, so that the waste gas treatment is completed, and meanwhile, the gas leakage sensor 7 monitors whether gas leakage occurs above the reaction furnace 4, so that the safety of the equipment is guaranteed when the equipment is operated, therefore, the surfaces of the blades and the cracks of the blades can be effectively cleaned, the blades do not need to be cleaned secondarily, the reactants are not pumped along with the waste gas, the parts cannot be damaged, and the safety and the efficiency of blade cleaning are guaranteed.
The foregoing description of embodiments of the utility model has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (8)
1. A double vacuum fluorine hydrogen ion cleaning equipment for blade washs which characterized in that: the equipment comprises a reaction furnace, a vacuumizing system, a gas control cabinet, a reaction product processing system and a gas leakage sensor; wherein:
and (3) a reaction furnace: the device is a closed cavity, adopts a double vacuumizing structure and comprises a furnace shell, a reaction chamber and a sealing cover; the reaction chamber is arranged in the furnace shell, and a sealing cover is arranged above the reaction chamber;
and (3) vacuumizing system: the device comprises a mechanical vacuum pump and a liquid ring vacuum pump, wherein the mechanical vacuum pump is used for vacuumizing a space between a furnace shell and a reaction chamber, and the liquid ring vacuum pump is used for vacuumizing the space in the reaction chamber;
gas control cabinet: two hydrogen fluoride cylinders are arranged in the cabinet, and a gas interface is arranged on the cabinet;
reaction product treatment system: comprises a scrubber and an alkali liquid pool;
gas leakage sensor: including hydrogen fluoride gas sensors and hydrogen gas sensors.
2. The dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 1, wherein: the reaction chamber is internally provided with a workpiece frame and an air homogenizing tool, the workpiece frame is provided with a central support column, and the central support column is provided with a plurality of plate-shaped frame bodies for placing workpieces; the center pillar is of a porous tubular structure, the center pillar is sleeved on the outer surface of the gas homogenizing tool, and the gas homogenizing tool is of a porous tubular structure.
3. The dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 1, wherein: the sealing cover is provided with a gas pipe, the lower end of the gas pipe is connected with a gas homogenizing tool, and the upper end of the gas pipe is connected with a corresponding gas interface on the gas control cabinet.
4. A dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 3, wherein: the sealing cover is provided with an exhaust port I, an exhaust pipe I is welded on the exhaust port I, and the exhaust pipe I is connected to a reaction product treatment system.
5. The dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 1, wherein: an exhaust port II is arranged on the furnace shell and is communicated with a space between the furnace shell and the reaction chamber; the outer wall of the exhaust port II is welded with the furnace shell; and the exhaust port II is connected with the exhaust pipe II in a sealing way, and the exhaust pipe II is connected with a mechanical vacuum pump.
6. The dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 1, wherein: and heating wires are arranged between the furnace shell and the reaction chamber and around the outer side of the reaction chamber at three positions, namely upper, middle and lower positions.
7. The double vacuum fluorine hydride cleaning apparatus for blade cleaning of claim 4, wherein: in the reaction product treatment system, the exhaust pipe I is sequentially connected with a vacuum exhaust valve, a liquid ring vacuum pump and a gas-liquid separator, the upper end of the gas-liquid separator is connected with a scrubber, and the bottom end of the gas-liquid separator is connected with an alkali liquid pool; the air path is provided with a vacuum regulating valve; the scrubber comprises two venturi scrubbers and a packed tower scrubber arranged in series.
8. The dual vacuum fluorine hydride cleaning apparatus for cleaning blades as claimed in claim 1, wherein: the gas leakage sensor is arranged above the gas control cabinet, the reaction product processing system and the reaction furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322215805.5U CN220738773U (en) | 2023-08-17 | 2023-08-17 | Dual vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322215805.5U CN220738773U (en) | 2023-08-17 | 2023-08-17 | Dual vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220738773U true CN220738773U (en) | 2024-04-09 |
Family
ID=90558736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322215805.5U Active CN220738773U (en) | 2023-08-17 | 2023-08-17 | Dual vacuum fluorine-hydrogen ion cleaning equipment for cleaning blades |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220738773U (en) |
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2023
- 2023-08-17 CN CN202322215805.5U patent/CN220738773U/en active Active
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