CN220738683U - Cleaning equipment - Google Patents

Abstract

The utility model discloses a cleaning device, comprising: the machine body and spray the subassembly, wash the chamber in the organism, it is used for placing by the cleaning piece to wash the chamber, spray the subassembly including spray the main part, spray the board and divide the water spare, spray the board locate in the main part and with spray the main part and inject and hold the chamber, spray and be formed with evenly distributed a plurality of holes that spray on the board, spray the subassembly and pass through the hole that sprays and wash the chamber intercommunication, divide the water spare to locate to hold the intracavity and lie in the top that sprays the board, divide the water spare to be formed with the water spare, be formed with a plurality of evenly set up branch discharge orifices on the lateral wall of water spare, the washing liquid in the water spare is suitable for to overflow to holding the intracavity through branch discharge orifice, flow into the cleaning chamber through spraying the hole, be used for wasing by the cleaning piece. According to the cleaning equipment provided by the utility model, the spraying area can be increased, so that each part of the cleaned part is effectively sprayed, and the cleaning liquid can be uniformly sprayed onto the cleaned part, so that the cleaning effect of the cleaning equipment on the cleaned part is better.

Description

Cleaning equipment

Technical Field

The utility model relates to the field of semiconductor manufacturing, in particular to cleaning equipment.

Background

In the related art, the oil-based cutting fluid after the wire cutting of the semiconductor silicon wafer can be cleaned by using cleaning equipment. However, the spraying structure in the related art cleaning apparatus is to directly provide spraying holes on the spraying pipe, which results in uneven spraying of the cleaning liquid onto the semiconductor silicon wafer, and smaller spraying area, thereby resulting in poor cleaning effect on the cleaned piece. Accordingly, improvements are needed.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present utility model is to provide a cleaning apparatus, in which a spray assembly is configured to include a spray main body, a spray plate, and a water diversion member, a receiving cavity is defined by the spray plate and the spray main body, the water diversion member is disposed in the receiving cavity, and a cleaning liquid can flow into the receiving cavity after being diverted through the water diversion member, and then is sprayed onto a sprayed member in the cleaning cavity through the spray plate, so that a spray area can be increased, each part of the cleaned member can be effectively sprayed, and a cleaning liquid can be uniformly sprayed onto the cleaned member, so that a cleaning effect of the cleaning apparatus on the cleaned member can be better.

The cleaning device according to an embodiment of the present utility model includes: the cleaning device comprises a machine body, a cleaning device and a cleaning device, wherein a cleaning cavity is arranged in the machine body and is used for placing a cleaned piece; the spraying assembly is arranged on the machine body and located above the cleaning cavity, the spraying assembly comprises a spraying main body, a spraying plate and a water dividing piece, the spraying plate is arranged in the spraying main body and is limited to be contained in the cleaning cavity together with the spraying main body, a plurality of spraying holes which are evenly distributed are formed in the spraying plate, the spraying assembly is communicated with the cleaning cavity through the spraying holes, the water dividing piece is arranged in the containing cavity and located above the spraying plate, the water dividing piece is formed with a water dividing cavity, a plurality of evenly arranged water dividing holes are formed in the side wall of the water dividing piece, and cleaning liquid in the water dividing cavity is suitable for overflowing into the containing cavity through the water dividing holes and flows into the cleaning cavity through the spraying holes to be used for cleaning the cleaned piece.

According to the cleaning equipment disclosed by the utility model, the spraying assembly is arranged to be of a structure comprising the spraying main body, the spraying plate and the water diversion piece, the accommodating cavity is defined between the spraying plate and the spraying main body, the water diversion piece is arranged in the accommodating cavity, cleaning liquid can flow into the accommodating cavity after being diverted through the water diversion piece, and then the cleaning liquid is sprayed onto the sprayed piece in the cleaning cavity through the spraying plate, so that the spraying area can be increased, each part of the cleaned piece can be effectively sprayed, the cleaning liquid can be uniformly sprayed onto the cleaned piece, and the cleaning effect of the cleaning equipment on the cleaned piece is better.

According to some embodiments of the present utility model, the plurality of spraying plates are arranged at intervals in the vertical direction, a plurality of sub-chambers are defined between the spraying plates and the spraying main body, and the water diversion member is disposed in the sub-chamber at the uppermost layer.

According to some embodiments of the utility model, the water diversion cavity extends along a first direction, one end of the water diversion piece along the first direction is connected with a liquid inlet pipe, the liquid inlet pipe is used for conveying cleaning liquid into the water diversion cavity, the diversion holes are formed in two side walls of the water diversion piece, which are oppositely arranged along a second direction, at least part of the diversion holes are distributed at intervals along the first direction, the second direction is perpendicular to the first direction, a buffer plate is arranged in the water diversion cavity, and communication holes are formed in the buffer plate.

According to some alternative embodiments of the utility model, the water dividing member is a plurality of water dividing members arranged at intervals along the second direction.

According to some alternative embodiments of the utility model, the shower plate is provided with a support frame, and the water diversion member is supported on the support frame, so that the bottom wall of the water diversion member is spaced from the shower plate.

According to some alternative embodiments of the utility model, a mounting opening is formed in the top of the machine body, the mounting opening is communicated with the cleaning cavity, and the spray assembly is mounted on the mounting opening.

According to some embodiments of the utility model, the machine body further comprises a liquid storage cavity communicated with the cleaning cavity, the liquid storage cavity is positioned below the cleaning cavity, and a liquid discharge hole communicated with the cleaning cavity and the liquid storage cavity is formed in the bottom wall of the cleaning cavity; the cleaning equipment further comprises a circulating pump, and the circulating pump is connected with the spraying assembly through the liquid inlet pipe.

According to some alternative embodiments of the present utility model, a pick-and-place opening is formed on a side wall of the cleaning cavity, and the cleaned piece is suitable for being placed into the cleaning cavity or taken out from the cleaning cavity through the pick-and-place opening; the cleaning equipment comprises an overflow box, the overflow box is arranged on one side of the machine body, on which the taking and placing opening is formed, the overflow box is positioned outside the cleaning cavity and is close to the bottom wall of the taking and placing opening, and cleaning liquid overflowed from the taking and placing opening is suitable for flowing into the overflow box.

According to some alternative embodiments of the utility model, the overflow box is connected with the liquid storage cavity through a connecting pipe, the overflow box is higher than the liquid storage cavity, and the cleaning liquid in the overflow box is suitable for flowing into the liquid storage cavity through the connecting pipe.

According to some optional embodiments of the utility model, further comprising: the liquid level sensor is arranged on the overflow box or the connecting pipe;

the cleaning equipment comprises an overflow alarm, wherein the liquid level sensor is electrically connected with the overflow alarm, and the overflow alarm alarms when the liquid level value detected by the liquid level sensor is higher than a preset value; and/or the liquid level sensor is electrically connected with the circulating pump, and when the liquid level value detected by the liquid level sensor is higher than a preset value, the circulating pump stops working.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a perspective view of a cleaning apparatus according to some embodiments of the present utility model;

FIG. 2 is another angled perspective view of the cleaning apparatus of FIG. 1;

FIG. 3 is another angled perspective view of the cleaning apparatus of FIG. 1;

fig. 4 is an enlarged view at a in fig. 3;

FIG. 5 is a perspective view of a spray assembly of the cleaning apparatus of FIG. 1;

FIG. 6 is another angular perspective view of the spray assembly of the cleaning apparatus of FIG. 1;

FIG. 7 is a schematic view showing the cooperation of a part of the structure of the cleaning apparatus in FIG. 1;

fig. 8 is a schematic view showing the cooperation of a part of the structure of the cleaning apparatus in fig. 1.

Reference numerals:

100. a cleaning device;

1. a body; 11. cleaning the cavity; 12. a taking and placing port; 13. a liquid storage cavity; 14. a liquid discharge hole;

2. a spray assembly; 21. a spray body; 22. a spray plate; 23. spraying holes; 24. a receiving chamber; 25. a sub-accommodation chamber;

30. a spacer bracket; 31. a support frame; 32. a circulation pump; 33. a filter; 34. a liquid inlet pipe; 35. a liquid inlet main pipe; 36. a liquid inlet branch pipe;

40. a water dividing member; 41. a diversion aperture; 42. a buffer plate; 43. a water distribution cavity; 44. a sub-water-dividing cavity;

5. opening and closing a door;

6. an overflow box; 61. a connecting pipe; 62. an overflow trough; 63. a cover plate; 64. an overflow port;

7. a liquid level sensor.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

A cleaning apparatus 100 according to an embodiment of the present utility model is described below with reference to fig. 1 to 8.

As shown in fig. 1 to 8, the cleaning apparatus 100 according to the embodiment of the present utility model includes a machine body 1 and a spray assembly 2. The machine body 1 is internally provided with a cleaning cavity 11, and the cleaning cavity 11 is used for placing a cleaned piece. For example, the workpiece to be cleaned may be a semiconductor silicon wafer, and the cleaning apparatus 100 may be used to clean an oil-based cutting fluid after wire-cutting the semiconductor silicon wafer.

The spray assembly 2 is arranged on the machine body 1 and is positioned above the cleaning cavity 11. The spray assembly 2 comprises a spray main body 21, a spray plate 22 and a water diversion member 40, wherein the spray plate 22 is arranged in the spray main body 21 and is defined with a containing cavity 24 between the spray main body 21, a plurality of spray holes 23 which are uniformly distributed are formed in the spray plate 22, and the spray assembly 2 is communicated with the cleaning cavity 11 through the spray holes 23. The accommodating cavity 24 can play a role in buffering the cleaning liquid, the spraying plate 22 is arranged in the spraying main body 21, the coverage area of the spraying plate 22 is larger, the spraying area of the spraying plate 22 is also larger, and the cleaning liquid can be sprayed to the cleaned parts more uniformly by arranging a plurality of spraying holes 23 which are respectively uniform on the spraying plate 22, so that the cleaning liquid can clean all parts of the cleaned parts more uniformly. For example, the cleaning liquid may chemically neutralize to remove contaminants from the surface of the article being cleaned.

The water diversion member 40 is disposed in the accommodating chamber 24 above the shower plate 22, and the water diversion member 40 is formed with a water diversion chamber 43. By providing the water-dividing chamber 43, the cleaning liquid can be buffered. A plurality of evenly arranged diversion holes 41 are formed on the side wall of the diversion member 40, and the cleaning liquid in the diversion chamber 43 is adapted to overflow into the accommodating chamber 24 through the diversion holes 41, flow into the cleaning chamber 11 through the shower holes 23, and are used for cleaning the cleaned member. The diversion holes 41 are arranged on the side wall of the water diversion piece 40, and the area of the spray plate 22 covered by the cleaning liquid after flowing out of the water diversion piece 40 is larger, so that the uniformity of the distribution of the cleaning liquid in the accommodating cavity 24 is improved.

According to the cleaning device 100 of the present utility model, by arranging the spray assembly 2 to have a structure including the spray main body 21, the spray plate 22 and the water diversion member 40, the accommodating cavity 24 is defined between the spray plate 22 and the spray main body 21, the water diversion member 40 is arranged in the accommodating cavity 24, and the cleaning liquid can flow into the accommodating cavity 24 after being diverted through the water diversion member 40, and then is sprayed onto the sprayed member in the cleaning cavity 11 through the spray plate 22, so that the spray area can be increased, each part of the cleaned member can be effectively sprayed, and the cleaning liquid can be uniformly sprayed onto the cleaned member, thereby the cleaning device 100 has a good cleaning effect on the cleaned member.

According to some embodiments of the present utility model, referring to fig. 6 to 8, the shower plates 22 are plural, the plural shower plates 22 are arranged at intervals in the up-down direction, a plurality of sub-receiving chambers 25 are defined between the plural shower plates 22 and the shower body 21, and the water dividing member is disposed in the sub-receiving chamber 25 at the uppermost layer.

By the arrangement, the cleaning liquid in the water distributing cavity 43 of the water distributing member overflows into the uppermost sub-containing cavity 25 through the water distributing hole 41, and then the cleaning liquid flows downwards from the uppermost sub-containing cavity 25 to sequentially flow through the plurality of sub-containing cavities 25, so that the uniformity of the distribution of the cleaning liquid sprayed onto the cleaned member can be improved. And the spray plate 22 can play a certain filtering role on the cleaning liquid, so that the cleaning liquid sprayed into the cleaning cavity 11 has a better cleaning effect on the cleaned parts. Through setting up a plurality of spray plates 22, other spray plates 22 still can play reposition of redundant personnel, filterable effect when a spray plate 22 is stopped up to can guarantee that the washing liquid can spray more evenly to wasing in the chamber 11, can improve the cleaning performance of cleaning equipment 100 to the cleaning member.

For example, the shower plate 22 may be two; as another example, the shower plate 22 may be three; for another example, the shower plate 22 may be four.

According to some embodiments of the present utility model, referring to fig. 7, the water dividing chamber 43 extends in a first direction (referring to e1 direction in the drawing), one end of the water dividing member 40 in the first direction is connected to the liquid inlet pipe 34, the liquid inlet pipe 34 is used for conveying the cleaning liquid into the water dividing chamber 43, the water dividing holes 41 are formed on two side walls of the water dividing member 40 opposite to each other in a second direction (referring to e2 direction in the drawing), and at least part of the water dividing holes 41 are arranged at intervals in the first direction, and the second direction is perpendicular to the first direction. For example, the partial flow dividing holes 41 are arranged at intervals in the first direction; for example, all of the flow holes 41 are spaced apart in the first direction.

By arranging at least part of the flow holes 41 at intervals along the first direction, the arrangement direction of the flow distribution holes 41 is consistent with the extending direction of the water distribution cavity 43, so that the cleaning liquid in the water distribution cavity 43 can flow out of the flow distribution holes 41 more uniformly, and the cleaning liquid can flow out of two opposite sides of the water distribution piece 40 along the second direction, the area of the spray plate 22 covered after the cleaning liquid flows out of the water distribution piece 40 is relatively increased, the cleaning liquid can be distributed in the accommodating cavity 24 more uniformly, and the cleaning equipment 100 can clean the cleaned piece better.

The water distribution chamber 43 is provided with a buffer plate 42, and the buffer plate 42 is formed with a communication hole. The buffer plate 42 divides the water diversion chamber 43 in the water diversion member 40 into two sub-water diversion chambers 44 arranged in the second direction, and the communication hole communicates the two sub-water diversion chambers 44. Through setting up the buffer board 42, reduce the velocity of flow of washing liquid, avoid because the washing liquid velocity of flow is faster, the washing liquid flows to the other end of water distribution chamber 44 from the one end of water distribution chamber 44 directly, causes the unable uniform flow of washing liquid from the reposition of redundant personnel hole 41 of water distribution spare 40 lateral wall to make the washing liquid can more evenly distribute in the water distribution box, make the washing liquid can evenly spray to by the washing piece on, thereby be favorable to improving the cleaning performance of cleaning equipment 100 to by the washing piece.

According to some alternative embodiments of the present utility model, referring to fig. 7, the water dividing members 40 are provided in plurality at intervals along the second direction. By arranging the plurality of water dividing members 40 at intervals along the second direction, the cleaning liquid can be distributed more uniformly in the accommodating chamber 24, and the cleaning effect of the cleaning liquid for cleaning the cleaning object can be improved.

Optionally, the liquid inlet pipe 34 includes a liquid inlet main pipe 35 and a plurality of liquid inlet branch pipes 36, the liquid inlet main pipe 35 is connected with one end of the water dividing member 40 along the first direction, the plurality of liquid inlet branch pipes 36 are connected with the liquid inlet main pipe 35 and located at the downstream side of the liquid inlet main pipe 35, the number of the liquid inlet branch pipes 36 is the same as and corresponds to the number of the water dividing members 40 one by one, and each liquid inlet branch pipe 36 is suitable for conveying the cleaning liquid into the corresponding water dividing member 40. The cleaning liquid is split from the main liquid inlet pipe 35 to each of the liquid inlet branch pipes 36, and flows into the water distribution chamber 43 corresponding to each of the liquid inlet branch pipes 36, respectively, so that the uniformity of the flow of the cleaning liquid into the water distribution member 40 can be improved.

According to some alternative embodiments of the present utility model, referring to fig. 8, a support frame 31 is provided on the shower plate 22, and the water dividing member 40 is supported on the support frame 31 such that the bottom wall of the water dividing member 40 is spaced apart from the shower plate 22. By setting the bottom wall of the water dividing member 40 to be spaced apart from the shower plate 22, the bottom wall of the water dividing member 40 can be prevented from covering the shower plate 22, so that the cleaning liquid is distributed more uniformly when being sprayed from the shower plate 22 onto the cleaning object, and the cleaning effect of the cleaning device 100 on the cleaning object is improved.

According to some alternative embodiments of the present utility model, referring to fig. 6 to 8, the number of spray plates 22 is two, and the two spray plates 22 are arranged at intervals, and the spray plates 22 positioned below the two spray plates 22 form the bottom wall of the spray body 21, so that the cleaning liquid can be conveniently sprayed into the cleaning cavity 11, and the number of parts can be reduced. A spacing bracket 30 is arranged between the two spray plates 22, and the upper spray plate 22 of the two spray plates 22 is supported on the spacing bracket 30. By arranging the upper spray plates 22 to be supported by the spacing brackets 30, the two spray plates 22 can be spaced apart in the vertical direction, and the arrangement is simple in structure, facilitates the installation of the upper spray plates 22, and facilitates the mating connection of the two spray plates 22.

According to some alternative embodiments of the present utility model, referring to fig. 2 and 3, a mounting port is formed at the top of the body 1, the mounting port communicates with the cleaning chamber 11, and the spray assembly 2 is mounted to the mounting port. This arrangement facilitates the production, installation of the spray assembly 2 and the spraying of the cleaning liquid in the spray assembly 2 into the cleaning chamber 11.

According to some embodiments of the present utility model, referring to fig. 1-3, the machine body 1 further has a liquid storage chamber 13 in communication with the cleaning chamber 11, the liquid storage chamber 13 is located below the cleaning chamber 11, and a drain hole 14 in communication between the cleaning chamber 11 and the liquid storage chamber 13 is formed in a bottom wall of the cleaning chamber 11. The cleaning solution is sprayed to the cleaned part in the cleaning cavity 11 by the spray plate 22, and the cleaning solution after cleaning the cleaned part flows into the liquid storage cavity 13 from the liquid discharge hole 14 under the action of gravity.

The cleaning apparatus 100 further comprises a circulation pump 32, the circulation pump 32 being connected to the spray assembly 2 via a feed pipe 34. The cleaning liquid of the cleaned part flows into the liquid storage cavity 13, the circulating pump 32 conveys the cleaning liquid in the liquid storage cavity 13 into the spray assembly 2 through the liquid inlet pipe 34, and the cleaning liquid can be recycled, so that the consumption of the cleaning liquid is reduced, and the use cost of the cleaning equipment 100 is reduced.

This setting can reduce the probability of being washed the piece by the filth secondary pollution, can make cleaning equipment 100 to being washed the cleaning performance of piece better to reduce the consumption of washing liquid, reduced the use cost of cleaning equipment 100.

According to some alternative embodiments of the present utility model, referring to fig. 1 to 4, a sidewall of the washing chamber 11 is formed with a pick-and-place port 12, and the washed piece is adapted to be put into the washing chamber 11 or taken out from the washing chamber 11 through the pick-and-place port 12. Through setting up getting and putting mouth 12 in the lateral wall that washs chamber 11, get the height of putting mouth 12 lower, be convenient for by the washing piece put into or take out through getting and putting mouth 12.

The cleaning apparatus 100 includes an overflow box 6, the overflow box 6 is disposed on one side of the machine body 1 where the pick-and-place opening 12 is formed, the overflow box 6 is disposed outside the cleaning chamber 11 and near the bottom wall of the pick-and-place opening 12, and cleaning liquid overflowed through the pick-and-place opening 12 is adapted to flow into the overflow box 6. By providing the overflow box 6, the cleaning liquid overflowed from the taking and placing port 12 can be collected, the cleaning liquid can be prevented from overflowing from the cleaning cavity 11 to damage other parts of the cleaning device 100, and the safety of the cleaning device 100 can be improved.

According to some alternative embodiments of the present utility model, referring to fig. 1-3, the washing apparatus 100 further comprises a switch door 5 for opening and closing the access opening 12, the bottom wall of the access opening 12 being higher than the bottom wall of the washing chamber 11. The switch door 5 is provided on the body 1 so as to be movable up and down between a first position, in which the switch door 5 opens the access opening 12, and a second position, in which the switch door 5 closes the access opening 12, above the second position. When the switch door 5 is at the first position, the switch door 5 opens the taking and placing opening 12, a cleaned piece can be placed into the cleaning cavity 11 through the taking and placing opening 12, then the switch door 5 moves downwards to the second position, the switch door 5 closes the taking and placing opening 12, the cleaned piece starts to be cleaned, after cleaning, the switch door 5 moves upwards to the first position, the switch door 5 opens the taking and placing opening 12, and the cleaned piece is taken out. This arrangement facilitates opening and closing of the door 5 and opening and closing of the pick-and-place opening 12, facilitates the putting in and taking out of the cleaned member, and can conveniently clean the cleaned member.

According to some alternative embodiments of the utility model, referring to fig. 2 and 3, the overflow box 6 is connected with the liquid storage cavity 13 through a connecting pipe 61, the overflow box 6 is higher than the liquid storage cavity 13, and the cleaning liquid in the overflow box 6 is suitable to flow into the liquid storage cavity 13 through the connecting pipe 61. This setting can retrieve the washing liquid that overflows to the stock solution intracavity 13, can reduce the waste of washing liquid to through setting up overflow box 6 to be higher than stock solution intracavity 13, make things convenient for the washing liquid in the overflow box 6 to flow into stock solution intracavity 13 under the effect of gravity.

Optionally, the overflow box 6 includes an overflow groove 62 and a cover plate 63, an overflow port 64 is formed on the cover plate 63, and the cleaning liquid overflowed through the pick-and-place port 12 is adapted to flow into the overflow box 6 through the overflow port 64, and the overflow groove 62 is connected to the connection pipe 61. The cover plate 63 prevents the cleaning liquid in the overflow tank 62 from being splashed or overflowed.

According to some alternative embodiments of the utility model, referring to fig. 2, the cleaning apparatus 100 further comprises a liquid level sensor 7, the liquid level sensor 7 being provided to the overflow box 6 or the connection pipe 61. Wherein, cleaning equipment 100 includes overflow alarm, and level sensor 7 is connected with overflow alarm electricity, and when the liquid level value that level sensor 7 detected is higher than the default value, overflow alarm reports to the police. This setting can in time detect through level sensor 7 that the liquid level value of the washing liquid that overflows in the washing chamber 11 is higher than the default, and after the overflow alarm reported to the police, relevant staff can in time inspect the operating condition of cleaning equipment 100 to can prevent that the washing liquid from overflowing in the overflow box 6, can improve the security of cleaning equipment 100.

According to some alternative embodiments of the present utility model, referring to fig. 2, the liquid level sensor 7 is electrically connected to the circulation pump 32, and the circulation pump 32 stops when the liquid level value detected by the liquid level sensor 7 is higher than a preset value. When the liquid level value detected by the liquid level sensor 7 is higher than the preset value, the circulating pump 32 can be stopped in time by the setting, and the safety of the cleaning equipment 100 can be further improved.

According to some alternative embodiments of the present utility model, referring to fig. 2, the cleaning apparatus 100 further includes: a liquid level sensor 7, the liquid level sensor 7 being provided in the overflow box 6 or in the connection pipe 61. Wherein, cleaning equipment 100 includes overflow alarm, and level sensor 7 is connected with overflow alarm electricity, and when the liquid level value that level sensor 7 detected is higher than the default value, overflow alarm reports to the police. The liquid level sensor 7 is electrically connected with the circulation pump 32, and when the liquid level value detected by the liquid level sensor 7 is higher than a preset value, the circulation pump 32 stops working. The setting can detect in time that the liquid level value of the cleaning liquid overflowed in the cleaning cavity 11 is higher than a preset value, after the overflow alarm gives an alarm, relevant staff can check the working condition of the cleaning equipment 100 in time, and when the liquid level value detected by the liquid level sensor 7 is higher than the preset value through setting the liquid level sensor 7 to be electrically connected with the circulating pump 32, the circulating pump 32 can be stopped in time, so that a large amount of cleaning liquid can be prevented from overflowing from the cleaning cavity 11, and the safety of the cleaning equipment 100 can be improved.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A cleaning apparatus, comprising:

the cleaning device comprises a machine body, a cleaning device and a cleaning device, wherein a cleaning cavity is arranged in the machine body and is used for placing a cleaned piece;

the spraying assembly is arranged on the machine body and located above the cleaning cavity, the spraying assembly comprises a spraying main body, a spraying plate and a water dividing piece, the spraying plate is arranged in the spraying main body and is limited to be contained in the cleaning cavity together with the spraying main body, a plurality of spraying holes which are evenly distributed are formed in the spraying plate, the spraying assembly is communicated with the cleaning cavity through the spraying holes, the water dividing piece is arranged in the containing cavity and located above the spraying plate, the water dividing piece is formed with a water dividing cavity, a plurality of evenly arranged water dividing holes are formed in the side wall of the water dividing piece, and cleaning liquid in the water dividing cavity is suitable for overflowing into the containing cavity through the water dividing holes and flows into the cleaning cavity through the spraying holes to be used for cleaning the cleaned piece.

2. The cleaning apparatus of claim 1, wherein the plurality of shower plates are arranged at intervals in an up-down direction, a plurality of sub-chambers are defined between the shower plates and the shower body, and the water dividing member is disposed in the uppermost sub-chamber.

3. The cleaning apparatus according to claim 1, wherein the water diversion chamber extends in a first direction, one end of the water diversion member in the first direction is connected to a liquid inlet pipe for conveying cleaning liquid into the water diversion chamber, the diversion holes are formed in two side walls of the water diversion member which are oppositely arranged in a second direction, at least part of the diversion holes are arranged at intervals in the first direction, the second direction is perpendicular to the first direction, a buffer plate is arranged in the water diversion chamber, and communication holes are formed in the buffer plate.

4. A cleaning apparatus according to claim 3 wherein the water dividing member is a plurality of water dividing members spaced apart along the second direction.

5. A cleaning apparatus according to claim 3 wherein the shower plate is provided with a support frame, the water dividing member being supported by the support frame such that the bottom wall of the water dividing member is spaced from the shower plate.

6. The cleaning apparatus of claim 1, wherein a mounting port is formed in a top portion of the body, the mounting port being in communication with the cleaning chamber, the spray assembly being mounted to the mounting port.

7. The cleaning apparatus of claim 1, wherein the body further has a liquid storage chamber in communication with the cleaning chamber, the liquid storage chamber being located below the cleaning chamber, a bottom wall of the cleaning chamber being formed with a liquid discharge hole in communication with the cleaning chamber and the liquid storage chamber; the cleaning equipment further comprises a circulating pump, and the circulating pump is connected with the spraying assembly through a liquid inlet pipe.

8. The cleaning apparatus according to claim 7, wherein a sidewall of the cleaning chamber is formed with a pick-and-place opening through which the article to be cleaned is adapted to be placed into or taken out of the cleaning chamber;

the cleaning equipment comprises an overflow box, the overflow box is arranged on one side of the machine body, on which the taking and placing opening is formed, the overflow box is positioned outside the cleaning cavity and is close to the bottom wall of the taking and placing opening, and cleaning liquid overflowed from the taking and placing opening is suitable for flowing into the overflow box.

9. The cleaning apparatus of claim 8, wherein the overflow box is connected to the reservoir via a connecting tube, the overflow box being higher than the reservoir, and the cleaning liquid in the overflow box being adapted to flow into the reservoir via the connecting tube.

10. The cleaning apparatus of claim 9, further comprising: the liquid level sensor is arranged on the overflow box or the connecting pipe;

the cleaning equipment comprises an overflow alarm, wherein the liquid level sensor is electrically connected with the overflow alarm, and the overflow alarm alarms when the liquid level value detected by the liquid level sensor is higher than a preset value; and/or the liquid level sensor is electrically connected with the circulating pump, and when the liquid level value detected by the liquid level sensor is higher than a preset value, the circulating pump stops working.