CN220730287U - Disassembling and assembling device of probe card - Google Patents

Abstract

The utility model provides a probe card dismounting device, which comprises a probe card handle, a circuit board and a plurality of probes, wherein the probes and the probe card handle are fixed on the circuit board, the dismounting device is used for dismounting or mounting the probe card, and the dismounting device comprises: the isolation plate is provided with a through hole, and the through hole allows the probe card handle to pass through; the fixing plate is fixedly connected with the isolation plate through a fixing rod, and the fixing plate is connected with the probe card handle; a rotating fixed block rotatably connected to the fixed plate, allowing the rotating fixed block to rotate, and clamping the probe card handle between the rotating fixed block and the fixed plate; and an insulating sheet mounted between the machine and the circuit board, wherein the insulating sheet is provided with a central hole, and the probe is allowed to pass through the central hole and extend into the machine. The utility model ensures the safe disassembly and assembly of the probe card.

Description

Disassembling and assembling device of probe card

Technical Field

The utility model relates to the technical field of semiconductor detection, in particular to a probe card dismounting device.

Background

In the field of semiconductor technology, wafer acceptance testing (wafer acceptance test, WAT) may be performed on wafers in order to detect electrical parameters of the wafer product. In the testing process, the electrical test is mainly performed by directly contacting the probes of the probe card with the wafer, and if the probe card generates leakage current, the test data can be directly affected, so that the probe card needs to be disassembled and assembled frequently for maintenance and test and investigation. When the probe card is manually disassembled and assembled by an operator, fingers or sleeves and the like can easily contact the surface of the probe card to cause the pollution of the probe card, and when the probe card is disassembled, the mica sheet at the bottom of the probe card can be taken up, so that the mica sheet is scratched to the probe. Meanwhile, when the probe card is installed, the probe card cannot be placed and positioned at one time due to the influence of the distance, and the risk of scratch on the surface of the probe card can be increased.

Disclosure of Invention

In view of the above drawbacks of the prior art, an object of the present utility model is to provide a probe card mounting/dismounting device, which can solve the problem of damage to the probe card caused by improper mounting/dismounting of the probe card.

To achieve the above and other related objects, the present utility model provides a disassembling and assembling apparatus of a probe card including a probe card handle, a circuit board, and a plurality of probes, the probes and the probe card handle being fixed to the circuit board, the disassembling and assembling apparatus being for disassembling or assembling the probe card, and the disassembling and assembling apparatus comprising:

the isolation plate is provided with a through hole, and the through hole allows the probe card handle to pass through;

the fixing plate is fixedly connected with the isolation plate through a fixing rod, and the fixing plate is connected with the probe card handle;

a rotating fixed block rotatably connected to the fixed plate, allowing the rotating fixed block to rotate, and clamping the probe card handle between the rotating fixed block and the fixed plate; and

and the insulating sheet is arranged between the machine table and the circuit board, a central hole is formed in the insulating sheet, and the probe is allowed to pass through the central hole and extend into the machine table.

In an embodiment of the utility model, the probe card handle includes a connection board, the connection board passes through the through hole and is connected with the bottom of the fixing board, and the connection board and the fixing board are connected by the rotation fixing block in a clamping manner.

In an embodiment of the present utility model, the probe card handle includes a plurality of connection bars, the connection bars are fixedly connected to the connection plates, and the length of the connection bars is greater than the length of the fixing bars.

In one embodiment of the utility model, the rotating fixture includes an opening that allows the outer edge of the web to fit in.

In an embodiment of the present utility model, the rotary fixing block is L-shaped, and one end of the rotary fixing block is connected to the fixing plate, and the other end is movably connected to the connecting plate.

In an embodiment of the present utility model, the rotating fixing block is detachably connected to the fixing plate through a bolt, wherein the bolt is fixedly connected to the rotating fixing block, and the bolt is connected to the fixing plate through a thread.

In an embodiment of the present utility model, the rotation fixing block is connected to the connection plate while the bolt is in a fastened state, and the connection plate is clamped between the rotation fixing block and the fixing plate.

In an embodiment of the utility model, when the connecting plate is connected to the fixing plate, the circuit board is parallel to the isolation plate.

In an embodiment of the present utility model, a mounting hole is provided on the isolation board, a first perforation is provided on the circuit board, a second perforation is provided on the insulation sheet, a third perforation is provided on the machine, wherein the mounting hole, the first perforation, the second perforation and the third perforation are coaxially distributed, the dismounting device comprises a fixing pin, and the fixing pin sequentially penetrates through the mounting hole, the first perforation, the second perforation and the third perforation to be connected with the machine.

In an embodiment of the utility model, a first positioning hole is formed in the circuit board, a second positioning hole is formed in the insulating sheet, and the first positioning hole and the second positioning hole are coaxially distributed, wherein the dismounting device comprises positioning piles, and the positioning piles are installed in the first positioning hole and the second positioning hole.

In summary, the utility model provides a probe card disassembling device, which can realize the disassembly and assembly of a probe card by clamping or loosening the probe card handle by a protective jig. Because of the action of the isolation plate, fingers, clothes and the like of an operator cannot touch the probe card, so that the probe card cannot be polluted. The mounting holes at two ends of the isolation plate are provided with the fixing pins, the fixing pins axially move and sequentially penetrate through the first perforation, the second perforation and the third perforation, so that the probe card can be positioned and placed once when being mounted, and the insulation sheet cannot scratch the probe to cause damage to the probe when the probe card is dismounted. In this embodiment, through the effect of protection tool, realize safe dismouting probe card, guarantee that the probe card does not receive pollution or damage.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a probe card assembly and disassembly apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a protection tool of an assembling and disassembling device of a probe card according to an embodiment of the utility model;

FIG. 3 is a schematic diagram showing a mounting structure of a rotary fixing block of a probe card mounting/dismounting device according to an embodiment of the utility model;

fig. 4 is a schematic structural view of a probe card assembling and disassembling device according to the present utility model.

Description of element numbers:

10. a probe card; 11. a circuit board; 111. a first perforation; 112. a first positioning hole; 12. a chuck; 13. a probe; 14. a probe card handle; 141. a connecting plate; 142. a connecting rod; 20. a protective jig; 21. a partition plate; 211. a through hole; 212. a mounting hole; 213. a fixing pin; 22. a handle; 221. a fixing plate; 222. a fixed rod; 223. rotating the fixed block; 224. an opening; 225. a threaded hole; 226. a bolt; 30. an insulating sheet; 31. a second perforation; 32. a second positioning hole; 33. a central bore; 40. a machine table; 41. a third perforation; 42. and (5) positioning piles.

Detailed Description

The following description of the embodiments of the present utility model will be made more clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the scope of the present utility model, since any structural modifications, proportional changes, or adjustments of size, which may fall within the spirit and scope of the present utility model without affecting the efficacy or the achievement of the present utility model, should not be construed as limiting the scope of the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated thereby, the features defining "first," "second," or the like, may explicitly or implicitly include one or more such features. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

And after the wafer product flow is finished and before quality inspection, measuring the electrical parameters of the specific test structure through the WAT. The method mainly detects the process condition of each wafer product through the probe card, and can timely early warn possible conditions according to the actual production condition of the WAT detection data reaction production line. The safe disassembly and assembly of the probe card are ensured, and the stable and accurate electrical test of the wafer is realized, so that the quality and stability of the semiconductor manufacturing process are evaluated.

Referring to fig. 1, in an embodiment of the present utility model, a disassembling device for detecting a probe card 10 is used for disassembling or assembling the probe card 10. The probe card 10 includes a circuit board 11, the circuit board 11 being a printed circuit board (Printed Circuit Board, PCB). In the present embodiment, the circuit board 11 is provided in a circular shape, and in other embodiments, is provided in a square shape, a rectangular shape, or the like. The circuit board 11 is provided with a plurality of first through holes 111, and the first through holes 111 are close to the outer edge of the circuit board 11. The number of first perforations 111 is, for example, 2 to 4, and in this embodiment, 2 first perforations 111 are provided. The first through holes 111 are provided at both ends of the circuit board 11 and are symmetrical along the center of the circuit board 11. In the present embodiment, the first perforation 111 is provided in a circular shape, and in other embodiments, is provided in a square shape, a rectangular shape, or the like. The circuit board 11 is further provided with a plurality of first positioning holes 112, and the number of the first positioning holes 112 is, for example, 4 to 6, and in this embodiment, the number of the first positioning holes 112 is, for example, 4. Specifically, the first positioning holes 112 are equally spaced, wherein 2 first positioning holes 112 and the first through hole 111 are located on the same diameter line, and are located in the middle of the first through hole 111 and the outer edge of the circuit board 11. In the present embodiment, the first positioning holes 112 are provided in a circular shape, and in other embodiments, the first positioning holes 112 are provided in a square shape, a rectangular shape, or the like.

Referring to fig. 1, in an embodiment of the present utility model, the probe card 10 further includes a chuck 12 and a plurality of probes 13, wherein one end of the chuck 12 is fixedly connected to the circuit board 11, and the other end is fixedly connected to the probes 13. In the present embodiment, the chuck 12 is provided in a rectangular parallelepiped shape, and in other embodiments, is provided in other shapes such as a square, an oval, and the like, without being particularly limited. The number of the probes 13 is set according to the type or size of the wafer to be tested, and the circuit board 11 is electrically connected with the plurality of probes 13 through the chuck 12, so that the electrical test is performed through the probes 13.

Referring to fig. 1, in an embodiment of the present utility model, a probe card handle 14 is disposed on a probe card 10, i.e. the probe card handle 14 is fixedly connected to a circuit board 11. The probe card handle 14 includes a connecting plate 141 and a plurality of connecting rods 142, adjacent connecting rods 142 being disposed in parallel, and in other embodiments, adjacent connecting rods 142 may not be parallel. One end of the connecting rod 142 is fixedly connected to the connecting plate 141, the other end extends along the axial direction to be fixedly connected with the circuit board 11, and the connecting plate 141 is arranged in parallel with the circuit board 11. The number of the connection bars 142 is, for example, 3 to 6, and in the present embodiment, 4 connection bars 142 are provided. The connection plate 141 is provided in a circular shape, and the diameter of the connection plate 141 is smaller than that of the circuit board 11, and in other embodiments, the connection plate 141 is provided in a trapezoid, a rectangle, or the like, and the diameter of the connection plate 141 is equal to or smaller than that of the circuit board 11. The shape of the connection plate 141 is not particularly limited, and may be easily grasped by hand or gripped by a jig.

Referring to fig. 1 and 2, in an embodiment of the utility model, the apparatus for assembling and disassembling the probe card 10 further includes a protection fixture 20. The protective jig 20 includes a partition plate 21. In the present embodiment, the partition plate 21 is provided in a circular shape, and the diameter of the partition plate 21 is equal to or larger than the diameter of the circuit board 11, and in other embodiments, the partition plate 21 is provided in a square shape, a rectangular shape, or the like. Meanwhile, in the present embodiment, the partition plate 21 is provided as a transparent plate so that the probe card 10 is clearly seen through the transparent plate. A through hole 211 is provided in the partition plate 21. In the present embodiment, the through holes 211 are provided in a circular shape, and the diameter of the through holes 211 is smaller than the diameter of the partition plate 21, and the diameter of the through holes 211 is larger than the diameter of the cross section of the probe card handle 14, i.e., the diameter of the through holes 211 is larger than the diameter of the connection plates 141, so that the connection plates 141 pass through the through holes 211. The partition plate 21 is provided with a plurality of mounting holes 212, and the mounting holes 212 are near the outer edge of the partition plate 21. The number of the mounting holes 212 is, for example, 2 to 4, and in this embodiment, 2 mounting holes 212 are, for example. The mounting holes 212 are provided at both ends of the partition plate 21 and are symmetrical along the center of the partition plate 21. One end of the fixing pin 213 passes through the mounting hole 212 and is fixedly coupled to the mounting hole 212. Since the mounting hole 212 is located in the same axial direction as the first through hole 111, the other end of the fixing pin 213 moves in the axial direction through the circuit board 11, i.e., the other end of the fixing pin 213 passes through the first through hole 111.

Referring to fig. 1 and 2, in an embodiment of the utility model, the protection fixture 20 includes a handle 22, and the handle 22 is fixedly connected with the isolation board 21. The handle 22 includes a fixing plate 221 and a plurality of fixing rods 222, wherein adjacent fixing rods 222 are arranged in parallel, one end of each fixing rod 222 is fixedly connected to the fixing plate 221, the other end of each fixing rod extends along the axial direction and is fixedly connected with the corresponding isolation plate 21, and the fixing plates 221 are arranged in parallel with the isolation plate 21. The number of the fixing rods 222 is, for example, 3 to 6, and in this embodiment, 4 fixing rods 222 are, for example. The length of the connecting rod 142 is greater than the fixing rod 222 so that the circuit board 11 is located below the isolation plate 21 and is not in contact with the isolation plate 21 when the probe card handle 14 passes through the through hole 211.

Referring to fig. 1 to 3, in an embodiment of the present utility model, two ends of the fixing plate 221 are provided with rotation fixing blocks 223, and the rotation fixing blocks 223 are provided with, for example, 2 to 4, and in the present embodiment, the rotation fixing blocks 223 are provided with, for example, 2. Screw holes 225 are formed in two ends of the fixing plate 221, and the rotary fixing block 223 is movably connected to the screw holes 225 through bolts 226, so that the rotary fixing block 223 can rotate around the bolts 226 as axes. The rotation fixing block 223 is provided in an L shape, one end of the L-shaped rotation fixing block 223 is connected to the fixing plate 221 by a bolt 226, and the other end of the L-shaped rotation fixing block 223 is provided in parallel with the fixing plate 221 and forms an opening 224. In the present embodiment, the left side rotation fixing block 223 of the fixing plate 221 is screwed to the left side of the drawing to be loose, and screwed to the right side of the drawing to be fastened, and the rotation fixing block 223 is fixedly connected to the fixing plate 221 in the fastened state. In the loose state, the rotation fixing block 223 is rotatably connected to the fixing plate 221. Similarly, the right side rotation fixing block 223 of the fixing plate 221 is disposed opposite. Before using the protection fixture 20, taking the left side rotation fixing block 223 of the fixing plate 221 as an example, screwing the rotation fixing block 223 leftwards, and making the opening 224 formed by the rotation fixing block 223 outwards, so that the connection plate 141 is not located between the rotation fixing block 223 and the fixing plate 221, the connection plate 141 is not clamped with the opening 224, that is, the rotation fixing block 223 is not clamped with the connection plate 141, and at this time, the probe card handle 14 can be loosened by the protection fixture 20. When the protection jig 20 is required to be used, the rotary fixing block 223 is screwed right, the opening 224 formed by the rotary fixing block 223 is inwards, the connecting plate 141 is positioned between the rotary fixing block 223 and the fixing plate 221, the connecting plate 141 is clamped with the opening 224, the rotary fixing block 223 is allowed to be clamped with the connecting plate 141, and the probe card handle 14 can be clamped by the protection jig 20. Similarly, the right side rotation fixing block 223 of the fixing plate 221 acts opposite to the left side rotation fixing block 223 of the fixing plate 221. Allowing the protective jig 20 to drive the probe card handle 14 to realize the disassembly and assembly of the probe card 10.

Referring to fig. 3 and 4, in an embodiment of the utility model, the apparatus for disassembling and assembling the probe card 10 further includes an insulating sheet 30, the insulating sheet 30 is disposed on a surface of the machine 40, and the circuit board 11 is disposed on the insulating sheet 30. In the present embodiment, the insulating sheet 30 is provided in a circular shape, and the diameter of the insulating sheet 30 is equal to or larger than the diameter of the circuit board 11, and in other embodiments, the insulating sheet 30 is provided in a square shape, a rectangular shape, or the like. Meanwhile, in the present embodiment, the insulating sheet 30 is a mica sheet, and in other embodiments, other insulating materials are selected for the insulating sheet 30. When the probe card 10 is used for electrical testing, the insulating sheet 30 is positioned between the circuit board 11 and the machine 40, so that the direct contact leakage between the circuit board 11 and the surface of the machine 40 can be effectively prevented. The insulating sheet 30 is provided with a central hole 33. In the present embodiment, the center hole 33 is provided in a circular shape, and the diameter of the center hole 33 is larger than the diameter of the cross section of the chuck 12. Wherein the probe 13 extends into the machine 40 through the central hole 33. A wafer (not shown) is mounted in the machine 40, and the probes 13 are connected to the wafer after passing through the central holes 33, so that the wafer can be tested by the probes 13. The insulating sheet 30 is provided with a plurality of second through holes 31, and the second through holes 31 are close to the outer edge of the insulating sheet 30. The number of second perforations 31 is, for example, 2 to 4, and in the present embodiment, 2 second perforations 31 are, for example. The second through holes 31 are provided at both ends of the insulating sheet 30 and are symmetrical along the center of the insulating sheet 30. In the present embodiment, the second through holes 31 are provided in a circular shape, and in other embodiments, are provided in a square shape, a rectangular shape, or the like. The insulating sheet 30 is further provided with a plurality of second positioning holes 32, and the second positioning holes 32 are close to the outer diameter of the insulating sheet 30. The number of the second positioning holes 32 is, for example, 4 to 6, and in this embodiment, 4 second positioning holes 32 are, for example. Specifically, the second positioning holes 32 are equally spaced, wherein 2 second positioning holes 32 are positioned on the same horizontal line as the second through holes 31, and are positioned in the middle of the outer diameters of the second positioning holes 32 and the insulating sheet 30. In the present embodiment, the second through holes 31 are provided in a circular shape, and in other embodiments, the second through holes 31 are provided in a square shape, a rectangular shape, or the like. Since the second through hole 31 is located in the same axial direction as the mounting hole 212 and the first through hole 111, the other end of the fixing pin 213 moves in the axial direction, sequentially passing through the circuit board 11 and the insulating sheet 30, i.e., the other end of the fixing pin 213 passes through the first through hole 111 and the second through hole 31.

Referring to fig. 3 and 4, in an embodiment of the present utility model, a plurality of third through holes 41 are disposed on the surface of the machine 40, wherein the number of the third through holes 41 is, for example, 2 to 4, in the present embodiment, 2, and the number of the third through holes 41 is, for example, circular, and in other embodiments, 4, and square, rectangular, etc. are disposed on the surface of the machine 40. Since the third through hole 41 is located in the same axial direction as the mounting hole 212, the first through hole 111, and the second through hole 31, the other end of the fixing pin 213 moves in the axial direction to pass through the circuit board 11, the insulating sheet 30, and the machine 40 in order, i.e., the other end of the fixing pin 213 passes through the first through hole 111, the second through hole 31, and the third through hole 41 in order. The surface of the machine 40 is also provided with a plurality of positioning piles 42, for example, 4 to 6 positioning piles 42 are provided, and in this embodiment, 4 positioning piles 42 are provided, for example. The positioning piles 42 pass through the second positioning holes 32, so that the insulating sheet 30 is placed on the surface of the machine 40. When the probe card 10 is used for electrical testing, the positioning piles 42 pass through the first positioning holes 112, so that the circuit board 11 is placed on the surface of the insulating sheet 30.

Referring to fig. 3, in one embodiment of the present utility model, when electrical testing of a wafer is required using the probe card 10, an operator grasps the handle 22 to place the protection tool 20 over the probe card 10. At this time, the protective jig 20 is moved downward in the axial extending direction so that the probe card handle 14 passes through the through hole 211 until the probe card handle 14 is positioned at the bottom of the handle 22, and the surface of the probe card handle 14 is in direct contact with the bottom of the handle 22, i.e., the surface of the first connection plate 141 and the bottom surface of the first fixing plate 221. The opening 224 formed by the rotational securing block 223 is directed inward such that the securing plate 221 is positioned between the connecting plate 141 and the rotational securing block 223, allowing the rotational securing block 223 to engage the connecting plate 141, i.e., the probe card handle 14 is movably coupled to the grip 22. Since the height of the probe card handle 14 is greater than the height of the fixing bar 222, there is a gap between the spacer 21 and the circuit board 11, and no direct contact is made. Therefore, the isolation board 21 can effectively prevent the fingers or clothes from touching the surface of the circuit board 11 when the operator grabs the handle 22 without touching the circuit board 11 and generating leakage influence, thereby polluting the probe card 10. At this time, the probe card 10 and the protection tool 20 are further moved downward along the axial extending direction, because one end of the fixing pin 213 is fixedly connected to the isolation board 21, and the other end of the fixing pin is moved along the axial direction, the fixing pin 213 sequentially passes through the first through hole 111, the second through hole 31 and the third through hole 41, and plays a role in positioning, so that the probe card 10 can be positioned and placed once, one end of the probe card 10 passes through the central hole 33, so that the probe 13 passes through the central hole 33 and stretches into the machine 40 to contact with the wafer, and electrical test can be performed safely without damaging the probe card 10.

Referring to fig. 3 and 4, in one embodiment of the present utility model, when the probe card 10 needs to be disassembled, the steps of installing the protection tool 20 on the probe card handle 14 by the operator are the same as described above. The operator grips the handle 22, and the fingers and clothes of the operator, etc. do not touch the surface of the circuit board 11 due to the shielding of the partition board 21, thereby causing contamination of the probe card 10. At this time, the probe card 10 and the protection jig 20 connected are moved upward in the axial extension direction, and since one end of the fixing pin 213 is fixedly connected to the separation plate 21 and the other end is moved in the axial direction, the first through hole 111, the second through hole 31 and the third through hole 41 are sequentially penetrated, so that the placement of the insulating sheet 30 is restricted. As the probes 13 gradually get away from the wafer, the insulating sheet 30 is not scraped to the probes 13, so that the probes 13 are damaged. When the probes 13 extend out of the machine 40 through the central holes 33 and do not contact the wafer, the probe card 10 for electrical testing is successfully removed from the machine 40. At this time, the opening 224 formed by the rotation fixing block 223 is directed outward, the probe card handle 14 is separated from the grip 22, the detachment of the probe card 10 is completed, and the detached probe card 10 is placed in a cassette for storage.

Referring to fig. 3 and 4, in an embodiment of the present utility model, when the same lot of wafers to be tested are electrically tested, the single wafer test takes no less than 21 minutes, and more than 3 wafers are electrically tested to have errors, an engineer may detect that there is an abnormality in the machine 40, and then manually and timely analyze the test data is required. If the electrical test error of the wafer is not detected in time, the test data can be analyzed after all the wafers to be tested are tested in one batch, so that the error is found. In both cases, a great deal of time is spent on the part of the engineer. If the surface is contaminated or damaged during the assembly and disassembly of the probe card 10, the probe card 10 will be affected to generate leakage current, and electrical testing of the wafer will be erroneous. Repair of damaged probe card 10 is costly and time consuming. If the damaged probe card 10 is directly replaced, it is more expensive. In this embodiment, the safe disassembly and assembly of the probe card 10 during the actual testing of the wafer are ensured, the accurate testing is realized without affecting the leakage current generated by the probe card 10, and the extra time and cost are not generated by replacing the damaged probe card 10.

In summary, the present utility model provides a probe card assembling and disassembling device, which helps to safely assemble and disassemble the probe card 10 by providing the protection tool 20. Specifically, the protection fixture 20 includes a handle 22 and a spacer 21, and the handle 22 is movably connected with the probe card handle 14 by a rotation fixing block 223. Due to the effect of the isolation plate 21, the fingers and clothes of the operator do not touch the probe card 10 while gripping the protection jig 20, thereby causing contamination of the probe card 10. The protection jig 20 further comprises a plurality of fixing pins 213, one end of each fixing pin 213 is fixedly connected to the isolation plate 21, the other end of each fixing pin 213 moves along the axial direction, and sequentially passes through the circuit board 11, the insulating sheet 30 and the machine 40, so that when the probe 13 passes through the central hole 33 and stretches into the machine 40, the probe card 10 can be positioned and placed once, and when the probe 13 passes through the central hole 33 and stretches out of the machine 40, the insulating sheet 30 cannot scratch the probe 13, and the probe 13 is damaged. In this embodiment, through the function of the protection fixture 20, the probe card 10 is safely disassembled and assembled, and the probe card 10 is ensured not to be polluted or damaged, so as to perform efficient and accurate electrical test.

The embodiments of the utility model disclosed above are intended only to help illustrate the utility model. The examples are not intended to be exhaustive or to limit the utility model to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best understand and utilize the utility model. The utility model is limited only by the claims and the full scope and equivalents thereof.

Claims (10)

1. The utility model provides a dismouting device of probe card, its characterized in that, probe card (10) include probe card handle (14), circuit board (11) and a plurality of probe (13), probe (13) with probe card handle (14) are fixed on circuit board (11), dismouting device is used for dismantling or install probe card (10), and dismouting device includes:

a spacer (21), wherein a through hole (211) is arranged on the spacer (21), and the through hole (211) allows the probe card handle (14) to pass through;

a fixing plate (221) fixedly connected with the isolation plate (21) through a fixing rod (222), wherein the fixing plate (221) is connected with the probe card handle (14);

a rotational mounting block (223) rotatably coupled to the mounting plate (221) allowing the rotational mounting block (223) to rotate and clamping the probe card handle (14) between the rotational mounting block (223) and the mounting plate (221); and

an insulating sheet (30) is installed between the machine table (40) and the circuit board (11), wherein a central hole (33) is formed in the insulating sheet (30), and the probe (13) is allowed to pass through the central hole (33) and extend into the machine table (40).

2. The probe card assembling and disassembling device according to claim 1, wherein the probe card handle (14) comprises a connecting plate (141), the connecting plate (141) is connected with the bottom of the fixing plate (221) through the through hole (211), and the connecting plate (141) is connected with the fixing plate (221) through the rotating fixing block (223) in a clamping manner.

3. The probe card assembling and disassembling device according to claim 2, wherein the probe card handle (14) comprises a plurality of connecting rods (142), the connecting rods (142) are fixedly connected to the connecting plates (141), and the length of the connecting rods (142) is greater than the length of the fixing rods (222).

4. The apparatus for mounting and dismounting a probe card according to claim 2, wherein the rotation fixing block (223) includes an opening (224), the opening (224) allowing the outer edge of the connection plate (141) to be fitted.

5. The apparatus for assembling and disassembling a probe card according to claim 2, wherein the rotation fixing block (223) is L-shaped, and one end of the rotation fixing block (223) is connected to the fixing plate (221), and the other end is movably connected to the connecting plate (141).

6. The probe card assembling and disassembling device according to claim 2, wherein the rotary fixing block (223) is detachably connected with the fixing plate (221) through a bolt (226), wherein the bolt (226) is fixedly connected with the rotary fixing block (223), and the bolt (226) is in threaded connection with the fixing plate (221).

7. The apparatus according to claim 6, wherein the rotation fixing block (223) is connected to the connection plate (141) and the connection plate (141) is clamped between the rotation fixing block (223) and the fixing plate (221) when the bolt (226) is in a fastened state.

8. The apparatus for removing and installing a probe card according to claim 7, wherein the circuit board (11) is parallel to the partition board (21) when the connection board (141) is connected to the fixing board (221).

9. The probe card assembling and disassembling device according to claim 1, wherein the isolation board (21) is provided with a mounting hole (212), the circuit board (11) is provided with a first perforation (111), the insulating sheet (30) is provided with a second perforation (31), the machine (40) is provided with a third perforation (41), the mounting hole (212), the first perforation (111), the second perforation (31) and the third perforation (41) are coaxially distributed, wherein the assembling and disassembling device comprises a fixing pin (213), and the fixing pin (213) sequentially penetrates through the mounting hole (212), the first perforation (111), the second perforation (31) and the third perforation (41) to be connected with the machine (40).

10. The probe card dismounting device according to claim 1, wherein the circuit board (11) is provided with a first positioning hole (112), the insulating sheet (30) is provided with a second positioning hole (32), the first positioning hole (112) and the second positioning hole (32) are coaxially distributed, and the dismounting device comprises a positioning pile (42), and the positioning pile (42) is mounted in the first positioning hole (112) and the second positioning hole (32).