CN220730056U - Detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal - Google Patents
Detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal Download PDFInfo
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- CN220730056U CN220730056U CN202322168418.0U CN202322168418U CN220730056U CN 220730056 U CN220730056 U CN 220730056U CN 202322168418 U CN202322168418 U CN 202322168418U CN 220730056 U CN220730056 U CN 220730056U
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Abstract
The application relates to a detection and measurement microscopic system based on 4F double-mirror closed-loop scanning confocal, which comprises a light source module, a scanning module, a light collection module, a detection module and an image reconstruction module; the light source module is used for outputting laser; the scanning module comprises a resonance galvanometer and an objective lens, wherein the resonance galvanometer is used for reflecting laser to the galvanometer, the galvanometer is used for reflecting laser, and the laser passes through the objective lens to the sample surface; the light collection module is used for collecting laser reflected by the sample surface to the detection module; the detection module is used for converting the optical signals into electric signals and transmitting the electric signals to the image reconstruction module; the image reconstruction module is used for receiving the electric signals and generating images of the sample according to the electric signals. The application has the following effects: the convenience of user operation can be improved.
Description
Technical Field
The application relates to the field of optical scanning imaging technology, in particular to a detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal.
Background
Confocal laser scanning microscopy is a high-photosensitivity, high-resolution instrument. The laser is used as a light source, and the confocal imaging scanning system, the electron optical system and the microcomputer image analysis system are used for forming the confocal imaging scanning system. The light beam is focused and falls on tiny points of different depths of the sample, and the moving scanning is carried out, so that the image formed by the reflected light of any point in the sample can be accurately received and generated to be transmitted to a color display through the color display of the electric signal, and then the image is connected with a microcomputer image analysis system for analysis and processing.
At present, a confocal microscope adopting a laser spot scanning mode is an important instrument in the fields of industrial detection, industrial measurement, laser direct writing, product quality inspection and the like, and needs to be applied in many occasions.
With respect to the related art in the above, the inventors consider that there are the following drawbacks: the existing confocal microscope has precise and complex structure, and a user is relatively complex in operation.
Disclosure of Invention
In order to improve convenience of user operation, the application provides a detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal.
The application provides a detection and measurement microscopic system based on 4F double-mirror closed-loop scanning confocal adopts the following technical scheme:
a detection and measurement microscopic system based on 4F double-mirror closed-loop scanning confocal comprises a light source module, a scanning module, a light collection module, a detection module and an image reconstruction module;
the light source module is used for outputting laser;
the scanning module comprises a resonance galvanometer and an objective lens, the resonance galvanometer is used for reflecting laser to the galvanometer, the galvanometer vibrating mirror is used for reflecting laser, and the laser passes through the objective lens to the sample surface;
the light collection module is used for collecting laser reflected by the sample surface to the detection module;
the detection module is used for converting the optical signals into electric signals and transmitting the electric signals to the image reconstruction module;
the image reconstruction module is used for receiving the electric signals and generating images of the sample according to the electric signals.
By adopting the technical proposal, the light source module can provide laser for the scanning module, the scanning module can irradiate the sample, the light reflected by the sample is collected to the detection module through the light collecting module, the detection module can convert the light signal into the electric signal, the image reconstruction module can generate an image of the sample according to the electric signals, the resonance galvanometer and the resonance galvanometer rotate, along with deflection of the resonance galvanometer and the galvanometer, A scanning area range is formed on the sample surface, so that the sample can be scanned, and further the sample can be detected and measured, and the operation mode is convenient.
Preferably, the scanning module further comprises a polarization beam splitter prism and a quarter wave plate, the polarization beam splitter prism is arranged between the light source module and the quarter wave plate, the quarter wave plate is arranged between the resonance galvanometer and the polarization beam splitter prism, and laser output by the light source module sequentially passes through the polarization beam splitter prism and the quarter wave plate to the resonance galvanometer.
By adopting the technical scheme, after the laser output by the light source module irradiates the polarization splitting prism, the emergent light is vertically polarized linear polarization, the vertically polarized linear polarization can be changed into circular polarization after passing through the quarter wave plate, and then the light beam irradiates the resonant galvanometer.
Preferably, the scanning module further comprises a first lens group, a second lens group and a lens reflex mirror, the first lens group and the second lens group are both located on one side of the lens reflex mirror, a plurality of gratings and a first photoelectric detector are arranged on the other side of the lens reflex mirror, the first lens group is located between the resonance galvanometer mirror and the lens reflex mirror, the second lens group is located between the lens reflex mirror and the galvanometer mirror, laser reflected by the resonance galvanometer mirror passes through the first lens group and then reaches the lens reflex mirror, the lens reflex mirror is used for reflecting part of laser to pass through the second lens group and reach the galvanometer mirror, and the first photoelectric detector is used for detecting laser which passes through the lens reflex mirror and reaches the plurality of gratings.
Through adopting above-mentioned technical scheme, the light beam after the resonance mirror that shakes passes first lens group, the light beam passes the second lens group through the perspective mirror again, shine again on the galvanometer mirror, a 4F system can be constituteed to first lens group and second lens group, the looks of the light beam of the reflecting surface of resonance mirror that shakes is formed on the reflecting surface of galvanometer mirror, the light beam is after shining the perspective mirror, there is a small part light to pass the perspective mirror, the light that passes the perspective mirror shines on the multi-line grating, first photoelectric detector can detect the light of shining on the multi-line grating, with this detectable resonance mirror deflection position, form the closed loop control of light beam position.
Preferably, the scanning module further comprises a scanning lens and a field lens, and the laser reflected by the galvanometer mirror sequentially passes through the scanning lens and the field lens to the objective lens.
By adopting the technical scheme, the light beam irradiates the scanning lens and the field lens after passing through the galvanometer mirror, finally irradiates the objective lens, and irradiates the surface of the sample after passing through the objective lens, so that the phase difference and distortion can be corrected.
Preferably, the scanning module further comprises a runner, and the plurality of objective lenses are connected to the runner.
By adopting the technical scheme, the rotating wheel is rotated to switch the objective lens, so that the light beam can irradiate the sample surface through different objective lenses.
Preferably, the light collection module comprises a collection lens for collecting laser light reflected back from the sample surface and a variable pinhole between the collection lens and the detection module.
By adopting the technical scheme, the light reflected from the sample surface is focused through the collecting lens and passes through the variable pinhole, so that the stray light of the non-focal surface can be filtered, and an effective optical signal can be irradiated to the detection module.
Preferably, the light collecting module further comprises a neutral attenuation sheet, the collecting lens, the variable pinhole and the neutral attenuation sheet are sequentially arranged, and the detecting module is used for receiving laser passing through the neutral attenuation sheet.
By adopting the technical scheme, the light passing through the variable pinholes passes through the neutral attenuation sheet, and the neutral attenuation sheet can attenuate the light intensity, so that the light intensity can be attenuated to a reasonable range of the detection module, and the detection module can process the light signal.
Preferably, the scanning module further comprises a reflecting mirror, the scanning lens and the field lens are both located at one side of the reflecting mirror, and the reflecting mirror is used for reflecting laser output by the scanning lens to the field lens.
By adopting the technical scheme, the reflector can reflect the light beam passing through the scanning lens to the field lens, so that the light path can be adjusted.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the light source module can provide laser for the scanning module, the scanning module can irradiate the sample, the light reflected by the sample is collected to the detection module through the light collecting module, the detection module can convert the light signal into an electric signal, the image reconstruction module can generate an image of the sample according to the electric signal, the resonance galvanometer and the resonance galvanometer can rotate, and a scanning area range is formed on the sample surface along with the deflection of the resonance galvanometer and the resonance galvanometer, therefore, the sample can be scanned, and further the sample can be detected and measured, and the operation mode is convenient;
2. after laser output by the light source module irradiates the polarization splitting prism, emergent light is vertically polarized linear polarization, the vertically polarized linear polarization can be changed into circular polarization after passing through the quarter wave plate, and then light beams irradiate the resonant galvanometer;
3. the light beam after passing through the resonance galvanometer mirror passes through the first lens group, the light beam passes through the second lens group through the lens and the reflector, and irradiates on the galvanometer, the first lens group and the second lens group can form a 4F system to image the phase of the light beam on the reflecting surface of the resonance galvanometer, after the light beam irradiates the transflector, a small part of light passes through the transflector, the light passing through the transflector irradiates the multi-line grating, and the first photoelectric detector can detect the light irradiated on the multi-line grating, so that the deflection position of the resonant galvanometer can be detected, and the closed-loop control of the light beam position is formed.
Drawings
Fig. 1 is an overall schematic diagram of a detection measurement microscope system based on 4F double-mirror closed-loop scanning confocal according to an embodiment of the present application.
Reference numerals illustrate:
100. a light source module;
200. a scanning module; 203. an objective lens; 204. a resonant vibrating mirror; 205. galvanometer; 206. a polarization beam splitter prism; 207. a quarter wave plate; 208. a first lens group; 209. a second lens group; 210. a transflector; 211. a multi-line grating; 212. a first photodetector; 213. a scanning lens; 214. a field lens; 215. a rotating wheel; 216. a reflecting mirror;
300. a light collection module; 301. a collection lens; 302. a variable pinhole; 303. a neutral attenuation sheet;
400. a detection module;
500. and (3) a sample.
Detailed Description
The present application is described in further detail below in conjunction with fig. 1.
The embodiment of the application discloses a detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal. Referring to fig. 1, the 4F double-mirror closed-loop scanning confocal detection measurement microscopic system includes a light source module 100, a scanning module 200, a light collecting module 300, a detection module 400 and an image reconstruction module, wherein the light source module 100 is used for providing laser to the scanning module 200, the scanning module 200 is used for scanning a sample 500 by the laser, the light collecting module 300 is used for collecting a light beam reflected by the sample 500, the detection module 400 is used for receiving the light beam reflected by the sample 500 and converting an optical signal into an electrical signal, and the image reconstruction module is used for generating an image of the sample 500 according to the electrical signal, so that the sample 500 can be scanned.
Referring to fig. 1, a light source module 100 employs a laser that outputs laser light. The scanning module 200 includes a polarization splitting prism 206, a quarter wave plate 207, a resonant galvanometer 204, a first lens group 208, a second lens group 209, a galvanometer 205, a scanning lens 213, a field lens 214, and an objective lens 203. The polarization beam splitter prism 206, the quarter wave plate 207, the resonant galvanometer mirror 204, the first lens group 208, the second lens group 209, the galvanometer mirror 205, the scanning lens 213, the field lens 214, and the objective lens 203 are sequentially spaced apart in the laser light transmission direction. After the laser emitted by the laser irradiates the polarization splitting prism 206, the emergent light is vertically polarized linear polarization, the vertically polarized linear polarization is changed into circular polarization after passing through the quarter wave plate 207, and then the light beam irradiates the resonant galvanometer 204, and the scanning speed can be improved by arranging the resonant galvanometer 204. In this embodiment, the resonant galvanometer 204 is of the 4K type, and in other embodiments, the resonant galvanometer 204 is of the 8K or 12K or 16K type. The light beam passing through the resonant galvanometer mirror 204 passes through the first lens group 208, a lens reflecting mirror 210 is arranged on one side of the first lens group 208 far away from the resonant galvanometer mirror 204, the first lens group 208 and the second lens group 209 are both positioned on one side of the lens reflecting mirror 210, a part of the light beam is reflected to the second lens group 209 through the lens reflecting mirror 210, and the light beam reflected to the second lens group 209 irradiates the galvanometer mirror 205 through the second lens group 209. The first lens group 208 and the second lens group 209 constitute a 4F system.
The side of the lens assembly 210 away from the first lens assembly 208 is provided with a multi-line grating 211 and a first photodetector 212, the multi-line grating 211 is located between the lens assembly 210 and the first photodetector 212, and the multi-line grating 211 is disposed at the focal point of the lens assembly 210. After the light beam passing through the first lens group 208 irradiates the lens 210, another part of the light beam passes through the lens 210 and the multi-line grating 211, a plurality of first photodetectors 212 are arranged, each first photodetector 212 is distributed at intervals along the length direction of the multi-line grating 211, and the first photodetectors 212 are used for detecting the light beam irradiated on the multi-line grating 211, so that the deflection position of the resonant vibration mirror 204 can be detected.
The light beam passes through the galvanometer mirror 205 and then irradiates the scanning lens 213, a reflecting mirror 216 is arranged on one side of the scanning lens 213 away from the galvanometer mirror 205, and the scanning lens 213 and the field lens 214 are both positioned on one side of the reflecting mirror 216. The reflecting mirror 216 reflects the light beam outputted from the scanning lens 213 to the field lens 214, the sample 500 is placed under the objective lens 203, and the light beam passes through the objective lens 203 and irradiates the surface of the sample 500.
The light collecting module 300 is located at one side of the polarization beam splitter prism 206, the light collecting module 300 includes a collecting lens 301, a variable pinhole 302 and a neutral attenuation sheet 303, the polarization beam splitter prism 206, the collecting lens 301, the variable pinhole 302 and the neutral attenuation sheet 303 are sequentially arranged at intervals, and the variable pinhole 302 is located at the focus of the collecting lens 301.
After the laser irradiates the surface of the sample 500, the objective 203 collects the laser signal reflected from the surface of the sample 500, returns to the quarter wave plate 207 along the original optical path, and transforms the circularly polarized light into horizontally polarized light after passing through the quarter wave plate 207 again, and reflects to ninety degrees when irradiated to the polarization splitting prism 206, so as to be separated from the laser incident on the laser. The returned laser signals focus the reflected laser through the collecting lens 301, the laser signals are transmitted to the detection module 400 through the neutral attenuation sheet 303, the detection module 400 adopts a second photoelectric detector, the laser signals passing through the neutral attenuation sheet 303 irradiate on the target surface of the second photoelectric detector, the second photoelectric detector converts the optical signals into electric signals, and the image reconstruction module adopts a data acquisition card.
The scanning module 200 further includes a rotating wheel 215, a plurality of objective lenses 203, and each objective lens 203 is disposed below the rotating wheel 215 at equal angular intervals, and the objective lens 203 can be adjusted by rotating the rotating wheel 215.
The implementation principle of the detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal is as follows: after the laser outputs laser light, the laser light sequentially passes through the polarization splitting prism 206, the quarter wave plate 207, the resonant galvanometer 204, the first lens group 208, the lens-reflecting mirror 210, the second lens group 209, the galvanometer mirror 205, the scanning lens 213, the reflecting mirror 216, the field lens 214 and the objective lens 203, and irradiates on the surface of the sample 500, the original path of the light beam reflected by the surface of the sample 500 returns to the quarter wave plate 207 and irradiates on the polarization splitting prism 206 and then is transmitted to the collecting lens 301, the light beam sequentially passes through the collecting lens 301, the variable pinhole 302 and the neutral attenuator 303 and then is transmitted to the second photoelectric detector, the second photoelectric detector converts the light signal into an electric signal, and the image reconstruction module is used for receiving the electric signal and generating an image of the sample 500 according to the electric signal. The deflectable resonant galvanometer mirror 204 and the deflectable resonant galvanometer mirror 205 can form a scanning area range on the sample 500 along with the deflection of the resonant galvanometer mirror 204 and the galvanometer mirror 205, so that the sample 500 can be scanned, and further the sample 500 can be detected and measured, and the operation mode is convenient.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (8)
1. A detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal is characterized in that: comprises a light source module (100), a scanning module (200), a light collection module (300), a detection module (400) and an image reconstruction module;
the light source module (100) is used for outputting laser;
the scanning module (200) comprises a resonance galvanometer (204), a galvanometer (205) and an objective lens (203), the resonant galvanometer (205) is used for reflecting laser light to the resonant galvanometer (204), the galvanometer mirror (205) is used for reflecting laser, and the laser passes through the objective lens (203) to the surface of the sample (500);
the light collection module (300) is used for collecting laser light reflected by the surface of the sample (500) to the detection module (400);
the detection module (400) is used for converting the optical signals into electric signals and transmitting the electric signals to the image reconstruction module;
the image reconstruction module is configured to receive the electrical signal and generate an image of the sample (500) from the electrical signal.
2. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 1, wherein: the scanning module (200) further comprises a polarization beam splitting prism (206) and a quarter wave plate (207), the polarization beam splitting prism (206) is arranged between the light source module (100) and the quarter wave plate (207), the quarter wave plate (207) is arranged between the resonance galvanometer (204) and the polarization beam splitting prism (206), and laser output by the light source module (100) sequentially passes through the polarization beam splitting prism (206) and the quarter wave plate (207) to the resonance galvanometer (204).
3. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 2, wherein: the scanning module (200) further comprises a first lens group (208), a second lens group (209) and a lens mirror (210), wherein the first lens group (208) and the second lens group (209) are both positioned on one side of the lens mirror (210), a multi-line grating (211) and a first photoelectric detector (212) are arranged on the other side of the lens mirror (210), the first lens group (208) is positioned between the resonance galvanometer mirror (204) and the lens mirror (210), the second lens group (209) is positioned between the lens mirror (210) and the galvanometer mirror (205), laser reflected by the resonance galvanometer mirror (204) passes through the first lens group (208) and then reaches the lens mirror (210), and the lens mirror (210) is used for reflecting part of laser to pass through the second lens group (209) to the galvanometer mirror (205), and the first photoelectric detector (212) is used for detecting the laser which passes through the lens mirror (210) and reaches the multi-line grating (211).
4. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 3, wherein: the scanning module (200) further comprises a scanning lens (213) and a field lens (214), and laser reflected by the galvanometer mirror (205) sequentially passes through the scanning lens (213) and the field lens (214) to the objective lens (203).
5. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 1, wherein: the scanning module (200) further comprises a runner (215), a plurality of the objective lenses (203) are arranged, and the plurality of objective lenses (203) are connected to the runner (215).
6. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 1, wherein: the light collection module (300) comprises a collection lens (301) and a variable pinhole (302), wherein the collection lens (301) is used for collecting laser light reflected back by the surface of the sample (500), and the variable pinhole (302) is positioned between the collection lens (301) and the detection module (400).
7. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 6, wherein: the light collection module (300) further comprises a neutral attenuation sheet (303), the collection lens (301), the variable pinhole (302) and the neutral attenuation sheet (303) are sequentially arranged, and the detection module (400) is used for receiving laser passing through the neutral attenuation sheet (303).
8. The 4F double-mirror closed-loop scanning confocal detection measurement microscopy system according to claim 4, wherein: the scanning module (200) further comprises a reflecting mirror (216), the scanning lens (213) and the field lens (214) are both positioned on one side of the reflecting mirror (216), and the reflecting mirror (216) is used for reflecting laser output by the scanning lens (213) to the field lens (214).
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| CN202322168418.0U CN220730056U (en) | 2023-08-11 | 2023-08-11 | Detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal |
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| CN202322168418.0U CN220730056U (en) | 2023-08-11 | 2023-08-11 | Detection measurement microscopic system based on 4F double-mirror closed-loop scanning confocal |
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