CN220728889U - Continuous kiln of gas tightness - Google Patents
Continuous kiln of gas tightness Download PDFInfo
- Publication number
- CN220728889U CN220728889U CN202322407381.2U CN202322407381U CN220728889U CN 220728889 U CN220728889 U CN 220728889U CN 202322407381 U CN202322407381 U CN 202322407381U CN 220728889 U CN220728889 U CN 220728889U
- Authority
- CN
- China
- Prior art keywords
- gas
- furnace body
- replacement chamber
- kiln
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004891 communication Methods 0.000 claims abstract description 28
- 238000007789 sealing Methods 0.000 claims abstract description 7
- 230000000903 blocking effect Effects 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 26
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 230000001276 controlling effect Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 96
- 238000010438 heat treatment Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000006467 substitution reaction Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000005457 optimization Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- GELKBWJHTRAYNV-UHFFFAOYSA-K lithium iron phosphate Chemical compound [Li+].[Fe+2].[O-]P([O-])([O-])=O GELKBWJHTRAYNV-UHFFFAOYSA-K 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000007774 positive electrode material Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
Abstract
The utility model relates to an airtight continuous kiln, comprising: a furnace body; the gas replacement chamber is communicated with the furnace body; the gate is arranged between the furnace body and the gas replacement chamber and is used for sealing and blocking the furnace body and the gas replacement chamber; the communication pipeline is arranged between the furnace body and the gas replacement chamber and is respectively communicated with the furnace body and the gas replacement chamber; the switch valve is arranged on the communication pipeline and used for controlling the switch of the communication pipeline. The utility model provides an airtight continuous kiln, which can adjust the air pressure balance between a gas replacement chamber and a furnace body before a gate between the gas replacement chamber and the furnace body is opened, so that the stable air flow established in the furnace body is not obviously influenced when the gate is opened.
Description
Technical Field
The utility model relates to the technical field of sintering kilns, in particular to an airtight continuous kiln.
Background
The kiln body of the airtight continuous kiln is provided with a tunnel-shaped kiln body, and the kiln body is a working space for performing heat treatment on a processing object. The kiln body is provided with openings at two ends, one end is an inlet for a processing object to enter the kiln body, and the other end is an outlet for the processing object after heat treatment. When a specific process gas (e.g., high-purity oxygen or nitrogen) is introduced into the furnace body and the object to be processed is heat-treated in the furnace body, the heat treatment is performed under the protection of a special atmosphere.
When a processing object enters and exits the furnace body, in order to prevent the ambient gas (usually air) outside the furnace body from entering the furnace body and interfering with the special atmosphere control in the furnace body, an inlet gas replacement chamber and an outlet gas replacement chamber are respectively arranged at the inlet and the outlet of the furnace body. The inlet of the furnace body is connected with the outlet of the inlet gas replacement chamber, and the outlet of the furnace body is connected with the inlet of the outlet gas replacement chamber. Airtight shutters are provided at both ends of the inlet and outlet gas substitution chambers (inlet and outlet of the gas substitution chamber, respectively) to seal the inlet and outlet, respectively. Before the object enters the furnace body, the object enters the inlet replacement chamber (at this time, an airtight gate between the inlet replacement chamber and the furnace body is closed), then the inlet gate of the inlet replacement chamber is closed, the air in the inlet replacement chamber is replaced with the same gas as the gas in the furnace body through multiple times of inflation and deflation, then the gate between the inlet replacement chamber and the furnace body is opened, and the object is input into the furnace body from the inlet replacement chamber to start the heat treatment operation. After the heat treatment operation is completed, the object leaves the kiln through the outlet replacement chamber by the similar procedure as described above. Through the kiln structure and the operation method, the gas outside the kiln can not enter the kiln body when a processing object enters and exits the kiln body, and the special atmosphere control in the kiln body is disturbed.
For the gas-tight continuous kiln with the gas replacement chamber, the opening and closing actions of the gate between the gas replacement chamber and the kiln body can greatly influence the air flow in the kiln body, especially the air flow along the length direction of the kiln, and because the gas replacement chamber is different from the air pressure environment in the kiln body, the air flow disturbance can be caused at the moment of opening the gate, the grain growth and lattice optimization in the materials in the kiln body are disturbed, and the quality of the materials is influenced.
Disclosure of Invention
Therefore, the utility model aims to solve the technical problem that the air flow is unstable when the gate is opened due to the inconsistent air pressure in the furnace body and the air displacement chamber to influence the quality of materials in the prior art, and provides the air-tightness continuous kiln which can adjust the air pressure balance between the air displacement chamber and the furnace body before the gate between the air displacement chamber and the furnace body is opened, so that the stable air flow established in the furnace body cannot be obviously influenced when the gate is opened.
In order to solve the technical problems, the utility model provides an airtight continuous kiln, which comprises:
a furnace body;
the gas replacement chamber is communicated with the furnace body;
the gate is arranged between the furnace body and the gas replacement chamber and is used for sealing and blocking the furnace body and the gas replacement chamber;
the communication pipeline is arranged between the furnace body and the gas replacement chamber and is respectively communicated with the furnace body and the gas replacement chamber;
the switch valve is arranged on the communication pipeline and used for controlling the switch of the communication pipeline.
In one embodiment of the present utility model, the apparatus further comprises a pressure detecting device, wherein the pressure detecting device is used for detecting a pressure difference between the furnace body and the gas replacement chamber, comparing the detected pressure difference with a preset threshold pressure difference, and controlling the switch valve to enable the communicating pipeline to be in a closed or conducting state.
In one embodiment of the present utility model, the pressure detecting means is a gas flow meter provided on the communication pipe for detecting the pressure of the gas flowing in the communication pipe and the direction of the gas flowing.
In one embodiment of the present utility model, the pressure detecting device is a pressure sensor respectively disposed in the furnace body and the gas replacing chamber, and separately detects the pressure values in the furnace body and the gas replacing chamber, and then performs differential pressure calculation.
In one embodiment of the utility model, the on-off valve is a manual valve or an automatic valve, and when the on-off valve is an automatic valve, the automatic valve is in control connection with the pressure detection device.
In one embodiment of the present utility model, the on-off valve is a flow rate regulating valve, and can control the size of the on-off of the communication pipe.
In one embodiment of the utility model, the furnace body is a tunnel kiln, a pusher kiln or a roller kiln.
In one embodiment of the utility model, the gate is driven by a driving source to realize opening and closing actions, and the gate is in sealing connection with the furnace body and the gas replacement chamber.
In one embodiment of the present utility model, the gas replacement chambers are provided at both sides of the furnace body, and include: an inlet gas displacement chamber and an outlet gas displacement chamber.
In one embodiment of the utility model, the communicating pipeline and the furnace body are arranged at the bottom or corners of the furnace body, and the communicating position is far away from the sintered materials in the furnace body.
Compared with the prior art, the technical scheme of the utility model has the following advantages:
the gas tightness continuous kiln is characterized in that a communication pipeline is arranged between a furnace body and a gas replacement chamber, and the closing and the conduction of the communication pipeline are controlled through a switch valve. When the furnace body processes materials, the communicating pipeline is controlled to be in a closed state, and the atmosphere environment in the furnace can not be damaged. When the material needs to be controlled to enter and exit the furnace body, the communicating pipeline is controlled to be in a conducting state, so that the air pressure in the air replacement chamber and the air pressure in the adjacent furnace body are balanced, then the gate is controlled to be opened, obvious interference to stable air flow established in the furnace body is avoided, waste gas of the heating section is prevented from flowing back to the constant temperature section, grain growth and lattice adjustment in the material of the constant temperature section are affected, and the quality of products is ensured.
Drawings
In order that the utility model may be more readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic view of an embodiment of the airtight continuous kiln of the present utility model;
FIG. 2 is a schematic view of another embodiment of the airtight continuous kiln of the present utility model;
description of the specification reference numerals: 1. a furnace body; 2. a gas displacement chamber; 3. a gate; 4. a communication pipe; 5. a switch valve; 6. a gas flow meter.
Detailed Description
The present utility model will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the utility model and practice it.
As described above, in the continuous kiln production operation, different temperature ranges (warm ranges) are usually provided in the furnace body along the longitudinal direction of the kiln. The furnace body is sequentially divided into a heating section from an inlet to an outlet: the temperature is gradually changed from low to high; and (3) heat preservation: the temperature is kept at the highest heat treatment temperature; and (3) a cooling section: the temperature gradually decreases from the high temperature to a temperature at which the object can be discharged. During heat treatment, particularly thermochemical treatment, some materials (e.g., ternary positive electrode materials or lithium iron phosphate materials) typically undergo chemical reactions in the warm section, producing gaseous by-products (exhaust gases), which typically end up before entering the constant temperature section. In the constant temperature section, the object to be processed is kept at a high temperature for a period of time, on the one hand, to ensure the complete end of the reaction, and on the other hand, to give the material sufficient time to optimize, for example, the growth of crystals inside the material and the optimization of crystal lattice inside the crystals (reduction of defects). From the perspective of product quality control, waste gas generated in the temperature rising section is prevented from entering the constant temperature area, otherwise, crystal growth and lattice optimization in the constant temperature area are disturbed, and the product quality is influenced.
Therefore, in the production operation of the kiln, it is also generally necessary to control the direction of the air flow in the kiln body. In general, intake and exhaust are provided in each furnace body of the successive furnaces. Taking a roller kiln as an example, an air inlet is usually arranged at the bottom of the kiln, and an air outlet is arranged at the top of the kiln, so that in each section of kiln body, air flows upwards from the bottom, and the purpose of the roller kiln is to input clean process gas into the kiln body and take away waste gas generated by material reaction from the air outlet. On the other hand, by pressure control, for example, the air pressure of the temperature raising section is set to be low (for example, negative pressure state) and the air pressure of the constant temperature section is set to be high (for example, positive pressure state), so that the gas in the furnace body flows from the constant temperature section to the temperature raising section along the length direction of the kiln, thereby preventing the exhaust gas generated in the temperature raising section from entering the constant temperature section. By controlling the air inlet and the air outlet of each section of furnace body, the air pressure setting of a higher constant temperature section and the air pressure setting of a lower temperature rising section can be realized. For example, the exhaust gas amount of the constant temperature section may be set to a low exhaust gas amount (set by the rotation speed of the exhaust fan), and the exhaust gas amount of the temperature increasing section may be set to a high exhaust gas amount.
The gas atmosphere is generated under the condition that the furnace body is sealed, but when materials enter and exit, the gate needs to be opened, and the gas pressure environment is necessarily destroyed, so that the disturbance of the gas flow is caused. Taking the operation of the intake air replacement chamber as an example: the furnace inlet is connected with the outlet of the inlet replacement chamber through an airtight gate. When the airtight shutters at both ends of the replacement chamber are closed, the inlet gas replacement chamber repeatedly fills and discharges the same process gas as the furnace body, and the atmosphere in the inlet gas replacement chamber is replaced with the same atmosphere as the furnace body, and then the shutter between the inlet replacement chamber and the furnace body can be opened, and the processing object in the inlet replacement chamber can be input into the furnace body. Before opening the gate, however, the gas pressure in the inlet gas displacement chamber tends to be inconsistent with the gas pressure at the furnace inlet (the beginning of the warm-up section). Therefore, when the gate is opened, the air pressure in the inlet replacement chamber affects the air pressure in the temperature rising section, thereby causing air flow disturbance along the length direction of the kiln. Particularly, when the air pressure of the inlet replacement chamber is higher than that of the heating section, the air in the inlet replacement chamber can be caused to rush into the heating section, and the original air flow flowing from the constant temperature section to the heating section stably flows reversely, so that waste gas generated by material reaction in the heating section is brought into the constant temperature section, the grain growth and lattice optimization in the material in the constant temperature section are disturbed, and the quality of the material is affected.
The utility model provides an airtight continuous kiln, which aims to solve the problem that the quality of materials is affected by unstable air flow when a gate is opened due to inconsistent air pressure in a furnace body and an air replacement chamber. Before the gate between the gas replacement chamber and the furnace body is opened, the air pressure balance between the gas replacement chamber and the furnace body is regulated, so that the stable air flow established in the furnace body can not be obviously influenced when the gate is opened. The gas-tight continuous kiln of the utility model will be further described with reference to specific examples.
Example 1
Referring to fig. 1, the present embodiment discloses an airtight continuous kiln, comprising: furnace body 1, gas substitution chamber 2, gate 3, communicating pipe 4 and ooff valve 5, wherein: the furnace body 1 is tunnel-like, the both ends of furnace body 1 have the opening, and one end is the entry that the processing object got into furnace body 1, and one end is the export after the processing object accomplished the thermal treatment, sets up gas replacement room 2 with furnace body 1 intercommunication sets up, gas replacement room 2 sets up the both sides of furnace body 1, include: an inlet gas replacement chamber 2 and an outlet gas replacement chamber 2, wherein the inlet gas replacement chamber 2 is communicated with an inlet of the furnace body 1, the outlet gas replacement chamber 2 is communicated with an outlet of the furnace body 1, a gate 3 is arranged between the furnace body 1 and the gas replacement chamber 2 and is used for sealing and blocking the furnace body 1 and the gas replacement chamber 2, the gate 3 is driven by a driving source to realize opening and closing actions, the gate 3 is in sealing connection with the furnace body 1 and the gas replacement chamber 2, when the gate 3 is closed, the furnace body 1 is in a relatively sealed state, the furnace body 1 cannot exchange gas with the gas replacement chamber 2, and when the gate 3 is opened, materials are allowed to enter the furnace body 1 from the gate 3; the communicating pipe is arranged between the furnace body 1 and the gas replacement chamber 2 and is respectively communicated with the furnace body 1 and the gas replacement chamber 2, the switch valve 5 is arranged on the communicating pipe 4 to control the switch of the communicating pipe 4, the switch valve 5 is used for controlling the closing and the conduction of the communicating pipe 4, when the furnace body 1 processes materials, the communicating pipe 4 is controlled to be in a closed state, the atmosphere environment in the furnace is not damaged, when the materials need to be controlled to enter and exit the furnace body 1, the communicating pipe 4 is controlled to be in a conducting state, the gas replacement chamber 2 and the gas pressure in the adjacent furnace body 1 are balanced, then the gate 3 is controlled to be opened, obvious interference can not be generated on the stable gas flow established in the furnace body 1, the waste gas in a heating section can not be caused to flow back to a constant temperature section, the growth grains and the lattice adjustment in the materials in the constant temperature section are influenced, and the quality of products is ensured.
Example 2
In the above embodiment 1, it is critical to determine how to achieve the air pressure balance between the furnace body 1 and the air displacement chamber 2 in actual use, and only when the air pressure balance is achieved or the air pressure balance threshold is reached, the shutter 3 may be opened. Therefore, it is also necessary to monitor the gas pressure in the furnace body 1 and the gas exchange chamber 2. Referring to fig. 2, in the present embodiment, the airtight continuous kiln includes not only a body, a gas substitution chamber 2, a shutter 3, a communication pipe 4, and an on-off valve 5, but also a pressure detecting device. The pressure detection device is used for detecting the pressure difference between the furnace body 1 and the gas replacement chamber 2, and transmitting the air pressure in the gas replacement chamber 2 and the air pressure signal in the furnace body 1 to the control system. When the material is needed to be fed and discharged, the control system compares the air pressure in the air displacement chamber 2 with the air pressure in the furnace body 1. The control system allows the shutter 3 to open when the two pressures are the same or close (an acceptable range of variation can be set). If the difference between the two is larger than the acceptable range, the control system starts the air charging or exhausting system of the air replacement chamber 2, increases or decreases the air pressure in the air replacement chamber 2 until the air pressure difference between the air pressure and the air pressure in the furnace body 1 reaches the acceptable range, and then the control system stops the air charging or exhausting system of the replacement chamber, so that the gate 3 is allowed to be opened for material inlet and outlet.
Specifically, in the present embodiment, the pressure detecting means is provided as a gas flow meter 6, and the gas flow meter 6 is provided on the communication pipe 4 for detecting the pressure of the gas flow and the direction of the gas flow in the communication pipe 4. When gas flows through the gas flowmeter 6, the pressure difference exists between the furnace body 1 and the gas replacement chamber 2. An acceptable gas flow range may be provided, indicating a differential imbalance when the gas flow exceeds this gas flow range, and indicating a differential balance when the gas flow is below this gas flow range, and the shutter 3 may be opened.
In other embodiments, the pressure detecting means may be provided as pressure sensors placed in the furnace body 1 and the gas substitution chamber 2, respectively. The pressure sensor is used for detecting the pressure values in the furnace body 1 and the gas replacement chamber 2 independently, and then differential pressure calculation is carried out.
Specifically, in this embodiment, the on-off valve 5 may be provided as a manual valve or an automatic valve. The opening and closing of the on-off valve 5 can be manually controlled according to the detection result of the pressure detection device. When the switch valve 5 is an automatic valve, the automatic valve is in control connection with the pressure detection device, and the switch valve 5 is automatically controlled to be opened and closed according to signals transmitted by the pressure detection device.
Specifically, the switch valve 5 is a flow regulating valve, and can control the switch size of the communication pipeline 4. The gas flow rate in the communication pipe 4 is controlled according to the volume sizes of the furnace body 1 and the gas replacement chamber 2. The greater the opening of the communication line, the faster the time to reach the air pressure equilibrium. The larger the volume of the gas substitution chamber 2, the larger the opening of the communication line required. The communication line may be sized for proper opening by a related calculation or experiment.
Specifically, in the above two embodiments, when the communication duct 4 is opened, in order to reduce the influence of the gas flowing through the communication duct 4 on the gas flow in the furnace body 1, the communication position of the communication duct 4 and the furnace body 1 is provided at the bottom or the corners of the furnace body 1. The communication position is far away from the sintered materials in the furnace body 1, so that the influence of gas flow on the materials is reduced.
Specifically, the gas tightness continuous kiln of the utility model can be provided with the kiln body 1 as a tunnel kiln, a push plate kiln, a trolley kiln or a roller kiln according to the use requirement, and the structure of the utility model is applicable to the tunnel kiln, the push plate kiln, the trolley kiln or the roller kiln.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present utility model will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.
Claims (10)
1. An airtight continuous kiln, comprising:
a furnace body;
the gas replacement chamber is communicated with the furnace body;
the gate is arranged between the furnace body and the gas replacement chamber and is used for sealing and blocking the furnace body and the gas replacement chamber;
the communication pipeline is arranged between the furnace body and the gas replacement chamber and is respectively communicated with the furnace body and the gas replacement chamber;
the switch valve is arranged on the communication pipeline and used for controlling the switch of the communication pipeline.
2. The gas-tight continuous kiln according to claim 1, characterized in that: the pressure detection device is used for detecting the pressure difference between the furnace body and the gas replacement chamber, comparing the detected pressure difference with a preset threshold pressure difference, and controlling the switch valve to enable the communicating pipeline to be in a closed or conducting state.
3. The gas-tight continuous kiln according to claim 2, characterized in that: the pressure detection device is a gas flowmeter, and the gas flowmeter is arranged on the communicating pipeline and is used for detecting the pressure of gas flowing in the communicating pipeline and the direction of the gas flowing.
4. The gas-tight continuous kiln according to claim 2, characterized in that: the pressure detection device is an air pressure sensor respectively arranged in the furnace body and the air replacement chamber, and is used for independently detecting air pressure values in the furnace body and the air replacement chamber and then carrying out differential pressure calculation.
5. The gas-tight continuous kiln according to claim 2, characterized in that: the switch valve is a manual valve or an automatic valve, and when the switch valve is an automatic valve, the automatic valve is in control connection with the pressure detection device.
6. The gas-tight continuous kiln according to claim 1, characterized in that: the switch valve is a flow regulating valve, and can control the size of a communicating pipeline switch.
7. The gas-tight continuous kiln according to claim 1, characterized in that: the furnace body is a tunnel kiln, a push plate kiln, a cart kiln or a roller kiln.
8. The gas-tight continuous kiln according to claim 1, characterized in that: the gate is driven by a driving source to realize opening and closing actions, and the gate is in sealing connection with the furnace body and the gas replacement chamber.
9. The gas-tight continuous kiln according to claim 1, characterized in that: the gas replacement room sets up the both sides of furnace body, include: an inlet gas displacement chamber and an outlet gas displacement chamber.
10. The gas-tight continuous kiln according to claim 1, characterized in that: the communicating pipeline is arranged at the bottom or the corners of the furnace body and is far away from the sintered materials in the furnace body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322407381.2U CN220728889U (en) | 2023-09-05 | 2023-09-05 | Continuous kiln of gas tightness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322407381.2U CN220728889U (en) | 2023-09-05 | 2023-09-05 | Continuous kiln of gas tightness |
Publications (1)
Publication Number | Publication Date |
---|---|
CN220728889U true CN220728889U (en) | 2024-04-05 |
Family
ID=90489882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202322407381.2U Active CN220728889U (en) | 2023-09-05 | 2023-09-05 | Continuous kiln of gas tightness |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN220728889U (en) |
-
2023
- 2023-09-05 CN CN202322407381.2U patent/CN220728889U/en active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107068587B (en) | The control pressurer system and compress control method of reaction chamber | |
TW202044338A (en) | Heat treatment apparatus and heat treatment method | |
US20130125797A1 (en) | Vertical Heat Treating Furnace | |
CN220728889U (en) | Continuous kiln of gas tightness | |
JP6061400B2 (en) | Method for controlling the protective gas atmosphere in a protective gas chamber for the treatment of metal strips | |
US8591824B2 (en) | Heat treating furnace | |
CN108231639A (en) | Semiconductor manufacturing apparatus and its SMIF casees, the cleaning method of wafer carrying case | |
CN216028616U (en) | Gas replacement controllable atmosphere protection convection heating aluminum brazing multi-chamber furnace | |
JPH05172473A (en) | Method and device for exhausting gas or fume from metallurgical vessel and electric furnace with said exhauster | |
CN113843467A (en) | Gas replacement controlled atmosphere protection convection heating aluminum brazing multi-chamber furnace and using method | |
CN211120597U (en) | Novel controllable atmosphere oxidation furnace | |
CN205505724U (en) | Multi -functional tubular atmosphere reactor | |
CN210048833U (en) | Zinc nose | |
CN205473926U (en) | Original mounting is gone back in succession to microwave | |
CN206666144U (en) | HIGH-PURITY SILICON purification fractional condensation device | |
JP3988332B2 (en) | Oxygen enrichment method for blast furnace | |
JPS6263421A (en) | Apparatus for heat-treating semiconductor wafer | |
TWI539006B (en) | Method for feeding hot gas to a shaft furnace | |
JPH09241761A (en) | Method for controlling pressure in continuous annealing furnace | |
CN216445289U (en) | Dry quenching device | |
CN106946260A (en) | HIGH-PURITY SILICON purification production fractional condensation device | |
CN221036712U (en) | Deamination vacuum rotary furnace | |
JP2744935B2 (en) | Processing equipment | |
CN117268094B (en) | Vacuum rotary furnace atmosphere system | |
CN210268237U (en) | Pressure stabilizing device of grate bonding furnace |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |