CN206666144U - HIGH-PURITY SILICON purification fractional condensation device - Google Patents

HIGH-PURITY SILICON purification fractional condensation device Download PDF

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Publication number
CN206666144U
CN206666144U CN201720386823.1U CN201720386823U CN206666144U CN 206666144 U CN206666144 U CN 206666144U CN 201720386823 U CN201720386823 U CN 201720386823U CN 206666144 U CN206666144 U CN 206666144U
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China
Prior art keywords
elema
group
graphite crucible
heater
circle
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CN201720386823.1U
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Chinese (zh)
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韩至成
陈睿
朱兴发
李亚逸
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SUZHOU ZHENWU ELECTRIC FURNACE CO Ltd
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SUZHOU ZHENWU ELECTRIC FURNACE CO Ltd
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Abstract

The utility model discloses a kind of HIGH-PURITY SILICON to purify with fractional condensation device, including body of heater, bell, graphite crucible, heater, feeder and cooling device;The heater includes:Surround three circle Elema groups of graphite crucible, and the heating control module of each circle Elema group work of control;The three circles Elema group includes:Lower area's Elema group, middle area's Elema Zu Heshang areas Elema group;The exhaust outlet for discharging waste gas in body of heater is additionally provided with the bell.The utility model HIGH-PURITY SILICON purification fractional condensation device, its is rational in infrastructure, can realize the fractional condensation of silicon liquid, be easy to purification process of high-purity silicon.

Description

HIGH-PURITY SILICON purification fractional condensation device
Technical field
It the utility model is related to HIGH-PURITY SILICON purification fractional condensation device.
Background technology
, it is necessary to purify silicon, it is necessary to be specifically designed suitable for carrying by segregating technique when domestic production industrial silicon or HIGH-PURITY SILICON The fractional condensation device of pure HIGH-PURITY SILICON.
Utility model content
The purpose of this utility model is that providing a kind of HIGH-PURITY SILICON purification segregates device, and its is rational in infrastructure, can realize silicon The fractional condensation of liquid, is easy to purification process of high-purity silicon.
To achieve the above object, the technical solution of the utility model is a kind of HIGH-PURITY SILICON purification fractional condensation device of design, is wrapped Include:Horizontal bell open-topped to be vertically arranged body of heater, that body of heater open top is closed, the silicon material storing apparatus in body of heater, For heating the heater of silicon material storing apparatus, the feeder of protective gas is passed through to silicon material storing apparatus, and is used for Cool down the cooling device of silicon material storing apparatus;
The body of heater includes:The furnace shell being built into by ceramic fiber block, and the stove inwall being built into by refractory brick;
The silicon material storing apparatus includes:It is open-topped to be vertically arranged outside cylindric graphite crucible, and parcel graphite crucible The refractory material knotting layer of wall;
The heater includes:Surround three circle Elema groups of graphite crucible, and each circle Elema group work of control Heating control module;Elema in each circle Elema group is vertically arranged, and the top of Elema is all fixed on bell;Each circle silicon Elema in carbon-point group is all located between graphite crucible and stove inwall, and the Elema in each circle Elema group is all with graphite earthenware Crucible is circumferentially uniform;
The three circle Elemas group includes surrounding graphite crucible successively from the inside to the outside:Lower area's Elema group, middle area's silicon-carbon Bang Zuheshang areas Elema group;The length of each Elema is more than each Elema in middle area's Elema group in lower area's Elema group Length;The length of each Elema is more than the length of each Elema in upper area's Elema group in middle area's Elema group;
The graphite crucible bottom is provided with protective gas input port, and the protective gas input port is closed by air brick;
The feeder includes:The appendix being connected after refractory material knotting layer with air brick, is carried to appendix For the mixed gas bag of protective gas, and filter, decompression venting valve, flow control valve, flow transmitter on appendix With normally opened control valve;
The exhaust outlet for discharging waste gas in body of heater is additionally provided with the bell;
The cooling device includes:The cooling storehouse to be reclined with silicon material storing apparatus bottom surface, and connected with cooling storehouse cold But gas inlet pipe and cooling gas efferent duct.
Preferably, the bell is equipped with the hoisting mechanism for driving it to open and close.
Preferably, the mixed gas bag is provided with argon gas input pipe, oxygen input tube and air inlet duct, and argon gas input pipe, Control valve is designed with oxygen input tube and air inlet duct.
Preferably, the bell bottom surface, which is provided with, is used to close the open-topped lower protruding block of graphite crucible, and the blast pipe passes through Wear the lower protruding block.
Preferably, the bottom of each Elema is corresponding with the bottom of graphite crucible in lower area's Elema group, middle area's silicon-carbon The bottom of each Elema and the middle part of graphite crucible are corresponding in rod group, the bottom of each Elema and graphite earthenware in upper area's Elema group The top of crucible is corresponding.
The advantages of the utility model and beneficial effect are:A kind of HIGH-PURITY SILICON purification fractional condensation device is provided, its structure is closed Reason, can realize the fractional condensation of silicon liquid, be easy to purification process of high-purity silicon.
Silicon material is put into graphite crucible, lifting bell closes body of heater open top, and three circle Elema groups also insert body of heater In, and three circle Elema groups surround graphite crucible successively from the inside to the outside, feeder is passed through protective gas to graphite crucible, each circle Silicon material is heated to be silicon liquid by the Elema work in Elema group, and after heating certain time, cooling storehouse is passed through cooling gas, and right Lower area's Elema group, middle area's Elema Zu Heshang areas Elema group reduce power until power off successively successively, make silicon liquid by it is lower extremely On solidify successively, realize the fractional condensation of silicon liquid, be easy to purification process of high-purity silicon.
Brief description of the drawings
Fig. 1 is schematic diagram of the present utility model.
Embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below Example is only used for clearly illustrating the technical solution of the utility model, and can not limit protection model of the present utility model with this Enclose.
The utility model specific implementation technical scheme be:
As shown in figure 1, a kind of HIGH-PURITY SILICON purification fractional condensation device, including:It is open-topped to be vertically arranged body of heater, by the top of body of heater The horizontal bell 21 of closure of openings, the silicon material storing apparatus in body of heater, for heating the heater of silicon material storing apparatus, The feeder of protective gas is passed through to silicon material storing apparatus, and for cooling down the cooling device of silicon material storing apparatus;
The body of heater includes:The furnace shell 11 being built into by ceramic fiber block, and the stove inwall 12 being built into by refractory brick;
The silicon material storing apparatus includes:It is open-topped to be vertically arranged cylindric graphite crucible 31, and parcel graphite crucible The refractory material knotting layer 32 of 31 outer walls;
The heater includes:Surround three circle Elema groups of graphite crucible 31, and each circle Elema group work of control The heating control module of work;Elema in each circle Elema group is vertically arranged, and the top of Elema is all fixed on bell 21;Respectively Elema in circle Elema group is all located between graphite crucible 31 and stove inwall 12, and the Elema in each circle Elema group is all It is circumferential uniform with graphite crucible 31;
The three circle Elemas group includes surrounding graphite crucible 31 successively from the inside to the outside:Lower area's Elema group 41, middle area Elema Zu42He Shang areas Elema group 43;The length of each Elema is more than middle area's Elema group in lower area's Elema group 41 The length of each Elema in 42;The length of each Elema is more than each silicon in upper area's Elema group 43 in middle area's Elema group 42 The length of carbon-point;
The bottom of graphite crucible 31 is provided with protective gas input port, and the protective gas input port is closed by air brick 51;
The feeder includes:The appendix 52 being connected after refractory material knotting layer 32 with air brick 51, to defeated Tracheae 52 provides the mixed gas bag of protective gas, and filter on appendix 52, decompression venting valve, flow control valve, Flow transmitter and normally opened control valve;
The exhaust outlet 22 for discharging waste gas in body of heater is additionally provided with the bell 21;
The cooling device includes:The cooling storehouse 6 to be reclined with silicon material storing apparatus bottom surface, and connected with cooling storehouse 6 Cooling gas input pipe and cooling gas efferent duct.
The bell 21 is equipped with the hoisting mechanism for driving it to open and close.
The mixed gas bag is provided with argon gas input pipe, oxygen input tube and air inlet duct, and argon gas input pipe, oxygen input Control valve is designed with pipe and air inlet duct.
The bottom surface of bell 21, which is provided with, to be used to close the open-topped lower protruding block 23 of graphite crucible 31, and the blast pipe runs through The lower protruding block 23.
The bottom of each Elema is corresponding with the bottom of graphite crucible 31 in lower area's Elema group 41, middle area's Elema group The bottom of each Elema is corresponding with the middle part of graphite crucible 31 in 42, the bottom of each Elema and graphite in upper area's Elema group 43 The top of crucible 31 is corresponding.
Silicon material is put into graphite crucible 31, lifting bell 21 closes body of heater open top, and three circle Elema groups are also inserted In body of heater, and three circle Elema groups surround graphite crucible 31 successively from the inside to the outside, and feeder is passed through protection to graphite crucible 31 Silicon material is heated to be silicon liquid by gas, each Elema work enclosed in Elema group, and after heating certain time, cooling storehouse 6 is passed through cold But gas, Qie Duixia areas Elema group 41, middle area's Elema Zu42He Shang areas Elema group 43 reduce power until successively successively Power-off, makes silicon liquid solidify successively from the bottom to top, realizes the fractional condensation of silicon liquid, be easy to purification process of high-purity silicon.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art For art personnel, on the premise of the utility model technical principle is not departed from, some improvements and modifications can also be made, these change Enter and retouch and also should be regarded as the scope of protection of the utility model.

Claims (5)

1. HIGH-PURITY SILICON purification fractional condensation device, it is characterised in that including:It is open-topped to be vertically arranged body of heater, by body of heater open top The horizontal bell of closing, the silicon material storing apparatus in body of heater, for heating the heater of silicon material storing apparatus, to silicon material Storing apparatus is passed through the feeder of protective gas, and for cooling down the cooling device of silicon material storing apparatus;
The body of heater includes:The furnace shell being built into by ceramic fiber block, and the stove inwall being built into by refractory brick;
The silicon material storing apparatus includes:It is open-topped to be vertically arranged cylindric graphite crucible, and wrap up graphite crucible outer wall Refractory material knotting layer;
The heater includes:Three circle Elema groups of encirclement graphite crucible, and control adding for each circle Elema group work Thermal control module;Elema in each circle Elema group is vertically arranged, and the top of Elema is all fixed on bell;Each circle Elema Elema in group is all located between graphite crucible and stove inwall, and the Elema in each circle Elema group is all with graphite crucible week To uniform;
The three circle Elemas group includes surrounding graphite crucible successively from the inside to the outside:Lower area's Elema group, middle area's Elema group With upper area's Elema group;The length of each Elema is more than the length of each Elema in middle area's Elema group in lower area's Elema group Degree;The length of each Elema is more than the length of each Elema in upper area's Elema group in middle area's Elema group;
The graphite crucible bottom is provided with protective gas input port, and the protective gas input port is closed by air brick;
The feeder includes:The appendix being connected after refractory material knotting layer with air brick, guarantor is provided to appendix Protect the mixed gas bag of gas, and filter on appendix, decompression venting valve, flow control valve, flow transmitter and often Open control valve;
The exhaust outlet being additionally provided with the bell;
The cooling device includes:The cooling storehouse to be reclined with silicon material storing apparatus bottom surface, and the cooling gas connected with cooling storehouse Body input pipe and cooling gas efferent duct.
2. HIGH-PURITY SILICON purification fractional condensation device according to claim 1, it is characterised in that it is opened the bell equipped with driving The hoisting mechanism closed.
3. HIGH-PURITY SILICON purification fractional condensation device according to claim 2, it is characterised in that it is defeated that the mixed gas bag is provided with argon gas Enter pipe, oxygen input tube and air inlet duct, and control valve is designed with argon gas input pipe, oxygen input tube and air inlet duct Door.
4. HIGH-PURITY SILICON purification fractional condensation device according to claim 3, it is characterised in that the bell bottom surface, which is provided with, to be used for The open-topped lower protruding block of graphite crucible is closed, the blast pipe runs through the lower protruding block.
5. HIGH-PURITY SILICON purification fractional condensation device according to claim 4, it is characterised in that each in lower area's Elema group The bottom of Elema is corresponding with the bottom of graphite crucible, the bottom of each Elema and the middle part of graphite crucible in middle area's Elema group Corresponding, the bottom of each Elema is corresponding with the top of graphite crucible in upper area's Elema group.
CN201720386823.1U 2017-04-13 2017-04-13 HIGH-PURITY SILICON purification fractional condensation device Active CN206666144U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720386823.1U CN206666144U (en) 2017-04-13 2017-04-13 HIGH-PURITY SILICON purification fractional condensation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720386823.1U CN206666144U (en) 2017-04-13 2017-04-13 HIGH-PURITY SILICON purification fractional condensation device

Publications (1)

Publication Number Publication Date
CN206666144U true CN206666144U (en) 2017-11-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106946260A (en) * 2017-04-13 2017-07-14 苏州振吴电炉有限公司 HIGH-PURITY SILICON purification production fractional condensation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106946260A (en) * 2017-04-13 2017-07-14 苏州振吴电炉有限公司 HIGH-PURITY SILICON purification production fractional condensation device

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