CN220708357U - Parallelism measuring device - Google Patents

Abstract

The application discloses a parallelism measuring device. The parallelism measuring apparatus includes: a carrier comprising a cantilever; the connecting rod group is rotatably connected to the cantilever; the detection assembly comprises two displacement detection pieces which are arranged on the connecting rod group in the same direction or in opposite directions, and the two displacement detection pieces are used for detecting the parallelism between two surfaces to be detected in a matched mode. Through the mode, the parallelism measuring device can effectively improve parallelism measuring accuracy.

Description

Parallelism measuring device

Technical Field

The application relates to the technical field of measurement tools, in particular to a parallelism measuring device.

Background

In precision machining technical field, often can use rotatory processing platform, fixed one or more mesa along circumference on its support, the support drives the mesa rotation, and the mesa passes through different processing stations in proper order, and the processing of the same or different processes is accomplished in proper order to the product that waits to process on it. When the laser processing is adopted, the horizontal consistency between each processing table surface and the laser processing lens is required to be ensured, so that the processing precision of a product to be processed on the laser processing table surface is ensured.

In the prior art, when parallelism detection is carried out on a processing table surface and a processing lens, a detection device is usually placed on the processing table surface to measure a plurality of points of the processing lens, data are read, parallelism between the processing table surface and the lens is analyzed, the detection device can bend a cantilever structure to cause sagging of the processing table surface, measurement accuracy can be influenced, and measurement accuracy is poor due to installation factors.

Disclosure of Invention

The application mainly provides a parallelism measuring device to solve parallelism measuring device's measurement accuracy not high problem.

In order to solve the technical problems, one technical scheme adopted by the application is as follows: a parallelism measuring apparatus is provided. The parallelism measuring apparatus includes: a carrier comprising a cantilever; the connecting rod group is rotatably connected to the cantilever; the detection assembly comprises two displacement detection pieces which are arranged on the connecting rod group in the same direction or in opposite directions, and the two displacement detection pieces are used for detecting the parallelism between two surfaces to be detected in a matching way.

In some embodiments, the connecting rod group includes rotary rod and connecting rod, the rotary rod rotate connect in on the cantilever and with the connecting rod is parallel arrangement, the connecting rod can be around the rotary rod rotates, two displacement detection spare set up in the connecting rod deviates from one side of rotary rod, two the direction of arranging of displacement detection spare with the axis of rotary rod is parallel.

In some embodiments, the connecting rod set further includes a first mounting rod and a second mounting rod, the first mounting rod and the second mounting rod are both vertically connected to the rotating rod and the connecting rod, and the two displacement detecting members are respectively connected to the first mounting rod and the second mounting rod.

In some embodiments, the carrier further comprises a linear bearing connected to the cantilever, the connecting rod set further comprises a first fixing piece connected to the rotating rod, the rotating rod penetrates through the linear bearing, and the first fixing piece is stopped at one end, away from the cantilever, of the linear bearing.

In some embodiments, the carrier further includes a second fixing member connected to a side of the cantilever away from the linear bearing, and the rotating rod further penetrates through the second fixing member, where the second fixing member is used for fastening the rotating rod and adjusting the fastening degree of the rotating rod.

In some embodiments, the displacement detector is a contact displacement detector.

In some embodiments, the parallelism measuring apparatus further includes a guide assembly disposed on the connection rod group for limiting from a direction perpendicular to the detection direction of the detection assembly.

In some embodiments, the guiding assembly comprises a mounting member and a rolling member, the mounting member is connected to the connecting rod set, the rolling member is rotatably connected to the mounting member, and is located above the detecting assembly and far away from the rotation center of the connecting rod set, and is used for rolling contact with the outer edge of the detected member along the vertical direction.

In some embodiments, the mounting member or the connecting rod set is provided with a waist-shaped adjusting hole, and the mounting member and the connecting rod set are connected through the waist-shaped adjusting hole.

In some embodiments, the carrier further comprises a support and a base, the support is connected between the cantilever and the base, and the cantilever, the support, and the base are connected in a C-shape.

The beneficial effects of this application are: unlike the prior art, the application discloses a parallelism measuring apparatus. The connecting rod group and the detection component can be positioned between two surfaces to be detected through the cantilever, so that the sagging of the processing table surface caused by the arrangement of the parallelism measuring device on the processing table surface is avoided, and the measuring precision of the parallelism measuring device can be improved; and through adopting two displacement detection pieces to reversely set up in the connecting rod group, two displacement detection pieces measure respectively with corresponding to wait to detect the distance between the face, therefore even because of the installation factor when there is certain inclination along with the axis of rotation, the measurement error of two displacement detection pieces can offset each other, and then promotes the measurement accuracy of this parallelism measuring device.

Drawings

For a clearer description of embodiments of the present application or of the solutions of the prior art, the drawings that are required to be used in the description of the embodiments or of the prior art will be briefly described, it being apparent that the drawings in the description below are only some embodiments of the present application, and that other drawings may be obtained, without inventive effort, by a person skilled in the art from these drawings, in which:

fig. 1 is a schematic structural diagram of a first embodiment of a parallelism detecting apparatus provided in the present application;

FIG. 2 is a schematic view of a stage in the parallelism detecting apparatus shown in FIG. 1;

FIG. 3 is a schematic view of the displacement detecting member in the parallelism detecting apparatus shown in FIG. 1;

FIG. 4 is a schematic view of the structure of the connecting rod group in the parallelism detecting apparatus shown in FIG. 1;

FIG. 5 is a schematic view of the structure of the guide assembly of the parallelism detecting apparatus shown in FIG. 1;

fig. 6 is a schematic view of the parallelism detecting apparatus shown in fig. 1 applied to a laser processing scene.

Detailed Description

The following description of the technical solutions in the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

The terms "first," "second," "third," and the like in the embodiments of the present application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", and "a third" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a parallelism measuring apparatus provided in the present application.

The parallelism measuring apparatus 100 can be applied to the technical field of precision machining, for example, when laser machining is adopted, the parallelism between each machining table top and the machining lens is required to be ensured, so that the machining precision of a product to be machined on the machining table top is ensured, and the parallelism measuring apparatus 100 can be used for detecting the parallelism between the machining table top and the machining lens with high precision.

The parallelism measuring apparatus 100 comprises a carrying platform 10, a connecting rod set 20 and a detecting assembly 30, wherein the connecting rod set 20 is rotatably connected to the carrying platform 10, and the detecting assembly 30 is connected to the connecting rod set 20 and can move along with the connecting rod set 20 to measure the parallelism of a plurality of positions.

Specifically, the carrier 10 includes a cantilever 12; the connecting rod set 20 is rotatably connected to the cantilever 12; the detecting assembly 30 includes two displacement detecting members 32 reversely disposed on the connecting rod set 20, and the two displacement detecting members 32 are used for cooperatively detecting the parallelism between two surfaces to be detected.

In the laser processing scene, the two surfaces to be detected may be the surfaces to be detected on the processing table surface and the processing lens, respectively. In the high-precision track calibration scenario, the two surfaces to be detected may be the surfaces to be detected of two parallel tracks, respectively.

For example, in a laser processing scene, the processing device comprises a rotary processing platform and a laser processing lens, the rotary processing platform is provided with a plurality of processing table tops along the circumferential direction, the laser processing lens is arranged above the processing table tops, the processing table tops can sequentially pass through different stations along the circumferential direction, and the products to be processed on the processing table tops sequentially finish the processing of the same or different procedures. Wherein, the horizontal consistency between each processing table surface and the laser processing lens is required to be ensured.

In this embodiment, the carrier 10 is carried outside the processing table, and the cantilever 12 can be suspended between the two surfaces to be detected, i.e. the weight of the carrier 10 can be prevented from being applied to the processing table, and sagging of the table is prevented, thereby affecting the parallelism measurement accuracy of the two surfaces to be detected.

Referring to fig. 1 and fig. 2 in combination, fig. 2 is a schematic structural diagram of a stage in the parallelism detecting apparatus shown in fig. 1.

The carrier 10 further comprises a support 14 and a base 16, the support 14 is connected between the cantilever 12 and the base 16, and the cantilever 12, the support 14 and the base 16 are connected in a C shape, so that a processing table surface to be measured can be accommodated between the cantilever 12 and the base 16, and measurement errors caused by the fact that the base 16 is borne on the processing table surface are avoided.

Specifically, one end of the cantilever 12 is fixedly connected to the upper end of the support 14, and can be used for assembling and connecting with workpieces such as the connecting rod set 20, and the base 16 is fixedly connected to the lower end of the support 14 and provided with a connecting structure, wherein the connecting structure can be a mounting hole or a mounting post, and the base 16 can be placed and fixed on a bearing surface outside the processing table.

In other words, the cantilever 12 is fixed and cannot move relative to the support 14 or the base 16 in this embodiment, so that the posture of the carrier 10 is kept unchanged, and movement errors are avoided.

Alternatively, the cantilever 12 may also be provided movably. For example, the boom 12 may be rotatable, and/or the boom 12 may be telescopically movable, and/or the boom 12 may be slidable, such that the number of times the carrier 10 is moved may be reduced, in combination with the range of motion of the boom 12 to expand the detectable range of the detection assembly 30.

For example, the cantilever 12 is rotatably connected to the support 14, or the support 14 is rotatably connected to the base 16, so that the cantilever 12 can rotate relative to the base 16, and the connecting rod set 20 and the detecting assembly 30 can rotate along with the cantilever 12. Alternatively, the cantilever 12 is slidably coupled to the support 14 and/or the support 14 is slidably coupled to the base 16, such that the cantilever 12 is slidable relative to the base 16, and the set of connecting rods 20 and the sensing assembly 30 are slidable along the cantilever 12. Alternatively, the boom 12 is rotatably coupled to the support 14 and the support 14 is slidably coupled to the base 16 such that the boom 12 can slide and rotate relative to the base 16.

In this embodiment, as shown in fig. 1, the rotation of the connecting rod set 20 is transferred to the cantilever 12, and the detecting assembly 30 can rotate around the rotation axis to continuously measure a plurality of points on two surfaces to be detected, so as to detect the parallelism between the two surfaces to be detected.

Further, the connecting rod set 20 is further slidably connected to the cantilever 12, so that the detecting assembly 30 is driven to slide by the connecting rod set 20 and the detecting assembly 30 can rotate around the rotation axis to perform multi-point measurement in a wider range, thereby detecting the parallelism between the two surfaces to be detected.

For example, the connecting rod set 20 is slidably connected to the cantilever 12 through a slider, and the connecting rod set 20 is further rotatably connected to the slider, that is, is indirectly slidably disposed with respect to the cantilever 12 through the slider, so as to effectively expand the detectable range of the detecting assembly 30, realize multi-point parallelism measurement on a larger area, and avoid the need to constantly move the position of the stage 10 due to too small measuring area.

Referring to fig. 1, the two displacement detecting members 32 are disposed on the connecting rod set 20 in opposite directions, i.e. the two displacement detecting members 32 are connected to the connecting rod set 20 and have opposite detecting directions. In this embodiment, two displacement detecting members 32 are disposed on the connecting rod set 20 along a vertical direction, a detecting direction of one displacement detecting member 32 located at an upper end of the connecting rod set 20 is upward along the vertical direction, and a detecting direction of another displacement detecting member 32 located at a lower end of the connecting rod set 20 is downward along the vertical direction, so as to detect a distance between a plurality of corresponding points of two surfaces to be detected, thereby determining a parallelism between the two surfaces to be detected.

In other usage scenarios, the parallelism detecting device 100 can also detect the parallelism between one detection surface and the reference surface by reserving one of the displacement detecting members 32 or disposing two displacement detecting members 32 at one end of the connecting rod set 20 in the same direction, so that the other detection surface can be used as the reference surface. In other words, by changing the setting conditions of the displacement detecting member 32, the parallelism detecting apparatus 100 can be adapted to a plurality of different parallelism detecting scenes.

Referring to fig. 3, fig. 3 is a schematic structural diagram of a displacement detecting member in the parallelism detecting apparatus shown in fig. 1. In this embodiment, the displacement detecting member 32 is a contact displacement detecting member, and includes a probe 320 that can move freely along a vertical direction, where the probe 320 contacts with a corresponding surface to be detected, so as to determine a distance between corresponding points between two surfaces to be detected, and continuously detect a distance between a plurality of corresponding points along with movement of the connecting rod set 20, so as to determine parallelism between the two surfaces to be detected.

Alternatively, the displacement detecting member 32 may be a non-contact displacement detecting member, such as an infrared detecting member, which can continuously detect the distance between a plurality of corresponding points along with the movement of the connecting rod set 20, so as to determine the parallelism between two surfaces to be detected.

In the original scheme of adopting a single displacement sensor to measure the flatness, firstly, the single displacement sensor is arranged on a processing table top, and the sagging of the processing table top is easy to cause; secondly, the single displacement sensor may have a certain inclination angle along with the rotation axis due to installation factors, and in the process of rotating around the rotation axis, the single displacement sensor has a highest point and a lowest point towards the top end of the surface to be detected, and the distance difference between the highest point and the lowest point causes measurement errors, so that flatness measurement is not accurate enough.

The cantilever 12 enables the connecting rod group 20 and the detection component 30 to be positioned between two surfaces to be detected, so that sagging of a processing table surface caused by the fact that the parallelism measuring device 100 is arranged on the processing table surface is avoided, and the measuring accuracy of the parallelism measuring device 100 can be improved; and by adopting the two displacement detecting members 32 to be reversely arranged on the connecting rod set 20, the two displacement detecting members 32 respectively measure the distance between the two corresponding surfaces to be detected, so that even if a certain inclination angle exists along with the rotation axis due to the installation factors, the measurement errors of the two displacement detecting members 32 can be mutually offset, and the measurement accuracy of the parallelism measuring device 100 is further improved.

For example, when the detecting end of the upper displacement detecting member 32 is at the highest point, the detected distance value is smaller than the correct value, and the corresponding measurement error is negative; the detection end of the lower displacement detection member 32 is also located at the highest point, and the detected distance value is larger than the correct value, and the corresponding measurement error is positive, so that the sum of the two measurement distances can offset the respective measurement errors, and the parallelism measurement accuracy is improved. The measurement and calculation processes at the rest positions are the same as above, and are not repeated.

Referring to fig. 1 and fig. 4 in combination, fig. 4 is a schematic structural diagram of a connecting rod set in the parallelism detecting apparatus shown in fig. 1.

In this embodiment, the connecting rod set 20 is rotatably connected to one end of the cantilever 12, which can meet the requirement of the parallelism detecting range of the surface to be detected on the processing table and the laser processing lens.

Specifically, the connecting rod group 20 includes a rotating rod 21 and a connecting rod 22, the rotating rod 21 is rotatably connected to the cantilever 12 and is parallel to the connecting rod 22, the connecting rod 22 can rotate around the rotating rod 21, two displacement detecting members 32 are disposed on one side of the connecting rod 22 away from the rotating rod 21, and the arrangement direction of the two displacement detecting members 32 is parallel to the axis of the rotating rod 21.

The connecting rod 22 is fixed relative to the rotating rod 21 and rotates with the rotation of the rotating rod 21, so that the two displacement detecting pieces 32 are driven to rotate to continuously detect the distance between a plurality of corresponding points, and the parallelism between two surfaces to be detected is measured.

The connecting rod 22 and the rotating rod 21 can be connected by other rods to realize fixation, so that the connecting rod 22 can rotate along with the rotating rod 21, wherein the distance between the connecting rod 22 and the rotating rod 21 can roughly define the rotation radius of the detecting component 30 relative to the rotating rod 21, and the connecting rod 22 is also used for calibrating the installation posture of the two displacement detecting pieces 32, so that the arrangement direction of the two displacement detecting pieces 32 is parallel to the axis of the rotating rod 21, the installation angle difference of the two displacement detecting pieces 32 is controlled to be within a very small range, and the installation angle error between the two displacement detecting pieces 32 is reduced, so that the parallelism measuring accuracy of the parallelism measuring device 100 is further improved.

In this embodiment, the connecting rod set 20 further includes a first mounting rod 23 and a second mounting rod 24 disposed in parallel, the first mounting rod 23 and the second mounting rod 24 are vertically connected to the rotating rod 21 and the connecting rod 33, and the two displacement detecting members 32 are respectively connected to the first mounting rod 23 and the second mounting rod 24.

Specifically, the first mounting rod 23 is fixedly connected to one end of the rotating rod 21 and the connecting rod 22, the second mounting rod 24 is respectively and fixedly connected to the other end of the rotating rod 21 and the connecting rod 33, so that the connecting rod 22 can correct the postures of the first mounting rod 23 and the second mounting rod 24, and the two displacement detecting members 32 are respectively mounted on the first mounting rod 23 and the second mounting rod 24, and the arrangement directions of the two displacement detecting members 32 are parallel to the axis of the rotating rod 21, so that the mounting angle error between the two displacement detecting members 32 can be reduced, and the parallelism measuring accuracy of the parallelism measuring apparatus 100 can be further improved.

Alternatively, the first mounting rod 23 and the second mounting rod 24 may be disposed in a crossed manner and connect the rotating rod 21 and the connecting rod 22, and the two displacement detecting members 32 are connected to the same side of the connecting rod 22, so that the connecting rod 22 may be used for alignment, so that the difference of the mounting angles of the two displacement detecting members 32 is within a very small range.

Optionally, the cantilever 12 is provided with a rotation hole, the connecting rod set 20 further includes a first fixing member 25 connected to the rotation rod 21, the rotation rod 21 is disposed in the rotation hole of the rotation rod 21 in a penetrating manner, the rotation rod 21 can rotate freely, and the first fixing member 25 stops on the cantilever 12 to prevent the rotation rod 21 from falling down along the axial direction.

In this embodiment, the carrier 10 further includes a linear bearing 13 connected to the cantilever 12, the connecting rod set 20 further includes a first fixing member 25 connected to the rotating rod 21, the rotating rod 21 is disposed on the linear bearing 13 in a penetrating manner, and the first fixing member 25 is stopped at one end of the linear bearing 13 facing away from the cantilever 12.

The linear bearing 13 can be a flanged linear bearing, the first fixing piece 25 is stopped on an end flange of the linear bearing 13, the rotary rod 21 can be prevented from falling downwards along the axial direction, on one hand, the linear bearing 13 can reduce the installation angle error of the rotary rod 21, on the other hand, the rotary smoothness of the rotary rod 21 can be improved, the measuring error caused by the installation error can be reduced, and the use convenience can be improved.

The first fixing member 25 may be a fixing ring, which may be inserted into any position of the rotation shaft 21 and is locked and fixed to the rotation shaft 21; the first fixing member 25 may be a fastener such as a pin, and the rotating rod 21 is correspondingly provided with a plurality of pin holes, and the first fixing member 25 is connected with different pin holes, so that different positions of the adjustable rotating rod 21 are arranged on the cantilever 12 and the linear bearing 13 in a penetrating manner.

Further, the carrier 10 further includes a second fixing member 15 connected to a side of the cantilever 12 away from the linear bearing 13, the rotating rod 21 is further disposed on the second fixing member 15 in a penetrating manner, and the second fixing member 15 is used for fastening the rotating rod 21 and adjusting the fastening degree of the rotating rod 21.

In other words, the second fixing member 15 provides an early warning force to fasten the rotating rod 21, so that the rotating rod 21 can be matched with the first fixing member 25 to prevent the rotating rod 21 from moving along the axial direction, and the rotating rod 21 can not rotate freely relative to the cantilever 12 when not stressed, and can rotate relative to the cantilever 12 only under the driving of external force; the tightness of the fastening piece on the second fixing piece 15 can be adjusted to adjust the fastening degree of the rotating rod 21, so that the difficulty degree of the connecting rod set 30 in rotation can be adjusted to more accord with the use habit of a user.

The second fixing element 15 may be a fixing ring which is connected to the side of the cantilever 12 facing away from the linear bearing 13 and is capable of holding the rotary rod 21.

Referring to fig. 1 and 5 in combination, fig. 5 is a schematic structural view of a guide assembly in the parallelism detecting apparatus shown in fig. 1.

Further, the parallelism measuring apparatus 100 further includes a guiding assembly 40, where the guiding assembly 40 is disposed on the connecting rod set 20 and is used for limiting the measuring position of the displacement detecting member 32 from a direction perpendicular to the detecting direction of the detecting assembly 30, so as to prevent damage caused by contact between the displacement detecting member 32 and precision devices such as a laser processing lens due to misoperation.

Specifically, the detecting component 30 is located between two surfaces to be detected during operation, for example, one of the surfaces to be detected belongs to a processing table, the other surface to be detected belongs to a laser processing lens, and the guiding component 40 may contact with a side surface of the laser processing lens to define a contact area between the probe 320 of the displacement detecting component 32 and the laser processing lens, so as to prevent the probe 320 from sliding onto the lens.

Alternatively, the guide assembly 40 may be a guide block or resilient pad or the like attached to the connector link set 20.

In this embodiment, the guiding assembly 40 includes a mounting member 42 and a rolling member 44, the mounting member 42 is connected to the connecting rod set 20, the rolling member 44 is rotatably connected to the mounting member 42, and is located above the detecting assembly 30 and far away from the rotation center of the connecting rod set 20, and is used for rolling contact with the outer edge of the detected member along the vertical direction, so as to reduce friction resistance in a rolling contact manner, and prevent the probe 320 from sliding onto the lens.

The mounting member 42 is connected to the first mounting bar 23, and the rolling member 44 may be a bearing, a ring, or the like, and the rolling member 44 may be mounted to the mounting member 42 by fasteners such as contour screws.

For example, in a laser processing scenario, when the rotating rod 21 rotates, the rolling member 44 rotates around the rotating rod 21 along the edge of the laser processing lens, so that the probe 320 detects around the edge structure end face of the lens, and the probe 320 is prevented from sliding onto the lens.

Further, the mounting member 42 or the connecting rod set 20 is provided with a waist-shaped adjusting hole 420, and the mounting member 42 and the connecting rod set 20 are connected through the waist-shaped adjusting hole 420, so that the position of the mounting member 42 relative to the connecting rod set 20 can be adjusted based on requirements, namely, the position of the mounting member 42 on the first mounting rod 23 is adjusted, so that the parallelism detection of the laser processing lenses with multiple sizes can be adapted.

Referring to fig. 6, fig. 6 is a schematic diagram illustrating a state of the parallelism detecting apparatus shown in fig. 1 applied to a laser processing scene.

In the laser processing scene, when the parallelism measuring device 100 detects the parallelism between the processing table top 101 and the laser processing lens 102, wherein the carrying platform 10 is arranged outside the processing table top 101, the sag of the surface to be detected on the processing table top due to dead weight is avoided, the cantilever 12 is suspended between the processing table top 101 and the laser processing lens 102, the rolling element 44 of the guiding component 40 is contacted with the edge of the laser processing lens 102, the probes 320 of the two displacement detecting elements 32 are respectively contacted with the surface to be detected on the processing table top 101 and the laser processing lens 102, when the rotating rod 21 rotates, the rolling element 44 rolls around the edge of the laser processing lens 102, and the two displacement detecting elements 32 continuously detect the distance between corresponding points on the two surfaces to be detected, so that the parallelism between the two surfaces to be detected can be measured.

Unlike the prior art, the application discloses a parallelism measuring apparatus. The connecting rod group and the detection component can be positioned between two surfaces to be detected through the cantilever, so that the sagging of the processing table surface caused by the arrangement of the parallelism measuring device on the processing table surface is avoided, and the measuring precision of the parallelism measuring device can be improved; and through adopting two displacement detection pieces to reversely set up in the connecting rod group, two displacement detection pieces measure respectively with corresponding to wait to detect the distance between the face, therefore even because of the installation factor when there is certain inclination along with the axis of rotation, the measurement error of two displacement detection pieces can offset each other, and then promotes the measurement accuracy of this parallelism measuring device.

The foregoing description is only exemplary embodiments of the present application and is not intended to limit the scope of the present application, and all equivalent structures or equivalent processes using the descriptions and the drawings of the present application, or direct or indirect application in other related technical fields are included in the scope of the present application.

Claims (10)

1. A parallelism measuring apparatus, characterized by comprising:

a carrier comprising a cantilever;

the connecting rod group is rotatably connected to the cantilever;

the detection assembly comprises two displacement detection pieces which are arranged on the connecting rod group in the same direction or in opposite directions, and the two displacement detection pieces are used for detecting the parallelism between two surfaces to be detected in a matching way.

2. The parallelism measuring apparatus according to claim 1, wherein the connecting rod group includes a rotating rod and a connecting rod, the rotating rod is rotatably connected to the cantilever and is disposed parallel to the connecting rod, the connecting rod is rotatable around the rotating rod, the two displacement detecting members are disposed on a side of the connecting rod facing away from the rotating rod, and an arrangement direction of the two displacement detecting members is parallel to an axis of the rotating rod.

3. The parallelism measuring apparatus according to claim 2, wherein the connecting rod group further comprises a first mounting rod and a second mounting rod, both of which are vertically connected to the rotating rod and the connecting rod, and the two displacement detecting members are connected to the first mounting rod and the second mounting rod, respectively.

4. The parallelism measuring apparatus according to claim 2, wherein the stage further comprises a linear bearing connected to the cantilever, the connecting rod group further comprises a first fixing member connected to the rotating rod, the rotating rod is disposed through the linear bearing, and the first fixing member is stopped at an end of the linear bearing facing away from the cantilever.

5. The parallelism measuring apparatus according to claim 4, wherein the stage further comprises a second fixing member connected to a side of the cantilever away from the linear bearing, the rotating rod further penetrates through the second fixing member, and the second fixing member is used for fastening the rotating rod and adjusting the fastening degree of the rotating rod.

6. The parallelism measuring apparatus according to any one of claims 1 to 5, wherein the displacement detecting member is a contact displacement detecting member.

7. The parallelism measuring apparatus according to claim 1, further comprising a guide member provided on the link group for limiting from a direction perpendicular to a detection direction of the detection member.

8. The parallelism measuring apparatus according to claim 7, wherein the guide assembly includes a mounting member connected to the link group and a rolling member rotatably connected to the mounting member, located above the detecting assembly and away from a rotation center of the link group, for rolling contact with an outer edge of the detected member in the vertical direction.

9. The parallelism measuring apparatus according to claim 8, wherein a waist-type adjusting hole is provided on the mount or the connection rod group, and the mount and the connection rod group are connected through the waist-type adjusting hole.

10. The parallelism measuring apparatus of claim 1, wherein the stage further comprises a support and a base, the support is connected between the cantilever and the base, and the cantilever, the support, and the base are connected in a C-shape.