CN220697295U - Wafer photoresist accuse is glued equipment - Google Patents
Wafer photoresist accuse is glued equipment Download PDFInfo
- Publication number
- CN220697295U CN220697295U CN202322316299.9U CN202322316299U CN220697295U CN 220697295 U CN220697295 U CN 220697295U CN 202322316299 U CN202322316299 U CN 202322316299U CN 220697295 U CN220697295 U CN 220697295U
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- China
- Prior art keywords
- fixedly connected
- wafer
- dispensing
- extrusion
- screw rod
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 24
- 238000001125 extrusion Methods 0.000 claims abstract description 44
- 239000003292 glue Substances 0.000 claims abstract description 24
- 230000001105 regulatory effect Effects 0.000 claims abstract description 17
- 238000012856 packing Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 2
- 235000017491 Bambusa tulda Nutrition 0.000 claims 2
- 241001330002 Bambuseae Species 0.000 claims 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 2
- 239000011425 bamboo Substances 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model belongs to the technical field of wafer dot glue, and particularly relates to wafer photoresist control equipment which comprises a base, a sliding rail and a frame body, wherein a wafer placing seat and a mounting frame are fixedly connected to the top of the base, a front-back regulating and controlling component is arranged between the sliding rail and the mounting frame, a transverse regulating and controlling component is arranged between the sliding rail and the frame body, an air cylinder and a glue cylinder are fixedly connected to the inner wall of the bottom of the frame body, an extrusion cylinder is fixedly connected to an output shaft of the air cylinder, a quantitative glue dispensing component is arranged between the extrusion cylinder and the glue cylinder, and a controller is fixedly connected to the front side of the mounting frame. The utility model has reasonable structural design, can regulate the position of the dispensing head up and down, front and back, left and right so as to perform dispensing operation on any position of the wafer, so that the dispensing is more convenient and efficient, the universality of the device is improved, and the dispensing can be quantitatively performed, so that the dispensing effect is better.
Description
Technical Field
The utility model relates to the technical field of wafer photoresist, in particular to wafer photoresist control equipment.
Background
In the prior art, a wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer has a circular shape. In practical application, the wafer needs to be dispensed.
And (3) searching: the utility model provides a wafer photoresist accuse of gluing equipment of authority publication number CN217797159U, this design proposes "traditional point glues equipment is intelligent inadequately, leads to inconvenient carry out the point to it and glues the operation, influences the prior art problem of wafer's machining efficiency, and to this problem to and the inconvenient quantitative point of point glues of gluing mechanism, we propose a wafer photoresist accuse to glue equipment and are used for solving above-mentioned problem.
Disclosure of Invention
The utility model aims to solve the defects, and provides a wafer photoresist control device.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a wafer photoresist accuse gluey equipment, includes base, slide rail and support body, seat and mounting bracket are placed to the top fixedly connected with wafer of base, be provided with front and back regulation and control subassembly between slide rail and the mounting bracket, be provided with horizontal regulation and control subassembly between slide rail and the support body, fixedly connected with cylinder and packing element on the bottom inner wall of support body, fixedly connected with recipient on the output shaft of cylinder, be provided with quantitative point between recipient and the packing element and glue the subassembly, the front side fixedly connected with controller of mounting bracket.
Preferably, the groove is arranged on the inner wall of the top of the mounting frame, the front-back regulating and controlling assembly comprises an upper motor fixedly connected to the front side of the mounting frame and an upper screw rod rotationally connected to the inner wall of the front-back side of the groove, an output shaft of the upper motor is fixedly connected to the front end of the upper screw rod, a sliding block is sleeved on the outer side thread of the upper screw rod, and the bottom of the sliding block is fixedly connected to the top of the sliding rail.
Preferably, the sliding block is sleeved in the groove in a sliding way.
Preferably, the transverse regulating and controlling assembly comprises a lower motor fixedly connected to one side of the sliding rail and a lower screw rod which is rotationally connected to the inner walls of two sides of the sliding rail, an output shaft of the lower motor is fixedly connected to one end of the lower screw rod, two moving plates are sleeved on the outer side of the lower screw rod in a threaded manner, and the frame body is fixedly connected to the bottoms of the two moving plates.
Preferably, both the moving plates are slidably sleeved in the sliding rail.
Preferably, the quantitative dispensing assembly comprises a driving motor fixedly connected to the inner wall of the rear side of the extrusion barrel, a rotary table is fixedly connected to an output shaft of the driving motor, a push-pull rod is rotationally connected to the front side of the rotary table, an extrusion plate is rotationally connected to the bottom end of the push-pull rod, the extrusion plate is arranged in the extrusion barrel in a sliding sealing manner, the bottom of the extrusion barrel is fixedly communicated with a dispensing head, and the same hose is fixedly communicated with the bottom of one side of the extrusion barrel.
Preferably, the top of the extrusion plate is fixedly connected with an ear plate, and the push-pull rod is rotationally connected to the front side of the ear plate.
Preferably, the dispensing head and the hose are internally provided with one-way valves.
According to the wafer photoresist control equipment, a wafer to be dispensed is placed in a wafer placing seat, an upper motor is started according to the position of dispensing, the upper motor drives an upper screw rod to rotate, the upper screw rod drives a sliding block and a sliding rail to move forwards and backwards, the position of dispensing can be further regulated and controlled, the lower screw rod is driven to rotate through a lower motor, the lower screw rod drives two moving plates, a frame body and a dispensing head to move transversely under the guidance of the sliding rail, the position of dispensing can be further regulated and controlled transversely, and after regulation and control are finished, an extrusion cylinder and the dispensing head are driven to move downwards through a cylinder, so that the distance between the dispensing head and the position to be dispensed can be regulated;
according to the wafer photoresist control equipment, the driving motor is started, the driving motor drives the rotary table to rotate, the rotary table drives the push-pull rod to reciprocate up and down, the push-pull rod drives the extrusion plate to reciprocate up and down, when the push-pull rod moves up, glue in the glue cylinder can be pumped into the hose and the extrusion cylinder, when the extrusion plate moves down, the glue just pumped into the extrusion cylinder can be extruded from the dispensing head to the wafer dome part for dispensing operation, and further dispensing can be quantitatively performed, so that the dispensing effect is better;
the utility model has reasonable structural design, can regulate the position of the dispensing head up and down, front and back, left and right so as to perform dispensing operation on any position of the wafer, so that the dispensing is more convenient and efficient, the universality of the device is improved, and the dispensing can be quantitatively performed, so that the dispensing effect is better.
Drawings
FIG. 1 is a schematic diagram of a wafer photoresist control apparatus according to the present utility model;
FIG. 2 is a cross-sectional view of a wafer photoresist control apparatus according to the present utility model;
FIG. 3 is a schematic diagram of a portion A of a wafer photoresist control apparatus according to the present utility model;
fig. 4 is a schematic structural diagram of a portion B of a wafer photoresist control apparatus according to the present utility model.
In the figure: 1. a base; 2. a mounting frame; 3. dispensing heads; 4. a controller; 5. an extrusion cylinder; 6. a motor is arranged; 7. a wafer placement base; 8. a frame body; 9. a cylinder; 10. a rubber cylinder; 11. a hose; 12. a slide rail; 13. a one-way valve; 14. an extrusion plate; 15. a push-pull rod; 16. a driving motor; 17. a turntable; 18. a lower motor; 19. a moving plate; 20. a lower screw rod; 21. feeding a screw rod; 22. a groove; 23. a sliding block.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1-4, a wafer photoresist control device comprises a base 1, a slide rail 12 and a frame body 8, wherein a wafer placing seat 7 and a mounting frame 2 are fixedly connected to the top of the base 1, a front-back regulating and controlling component is arranged between the slide rail 12 and the mounting frame 2, a transverse regulating and controlling component is arranged between the slide rail 12 and the frame body 8, an air cylinder 9 and a rubber cylinder 10 are fixedly connected to the inner wall of the bottom of the frame body 8, an extrusion cylinder 5 is fixedly connected to an output shaft of the air cylinder 9, a quantitative dispensing component is arranged between the extrusion cylinder 5 and the rubber cylinder 10, and a controller 4 is fixedly connected to the front side of the mounting frame 2.
In the utility model, a groove 22 is formed in the inner wall of the top of the mounting frame 2, the front-rear regulating component comprises an upper motor 6 fixedly connected to the front side of the mounting frame 2 and an upper screw rod 21 rotatably connected to the inner wall of the front side and the rear side of the groove 22, an output shaft of the upper motor 6 is fixedly connected to the front end of the upper screw rod 21, a sliding block 23 is sleeved on the outer side of the upper screw rod 21 in a threaded manner, the bottom of the sliding block 23 is fixedly connected to the top of the sliding rail 12, the upper motor 6 is started, the upper motor 6 drives the upper screw rod 21 to rotate, and the upper screw rod 21 drives the sliding block 23 and the sliding rail 12 to move forwards and backwards, so that the position of dispensing can be regulated forwards and backwards.
In the utility model, the sliding block 23 is sleeved in the groove 22 in a sliding way, and the sliding block 23 can be guided so as not to rotate together with the upper screw rod 21.
In the utility model, the transverse regulating and controlling assembly comprises a lower motor 18 fixedly connected to one side of the slide rail 12 and a lower screw rod 20 rotatably connected to the inner walls of the two sides of the slide rail 12, an output shaft of the lower motor 18 is fixedly connected to one end of the lower screw rod 20, two movable plates 19 are sleeved on the outer side threads of the lower screw rod 20, a frame body 8 is fixedly connected to the bottoms of the two movable plates 19, the lower screw rod 20 is driven to rotate by the lower motor 18, and the lower screw rod 20 drives the two movable plates 19, the frame body 8 and the dispensing head 3 to transversely move under the guidance of the slide rail 12, so that the position of dispensing can be transversely regulated and controlled.
In the utility model, the two moving plates 19 are both sleeved in the slide rail 12 in a sliding way, so that the moving plates 19 and the frame body 8 can be guided, and the movement of the moving plates is more stable.
According to the utility model, the quantitative dispensing assembly comprises a driving motor 16 fixedly connected to the inner wall of the rear side of the extrusion barrel 5, a rotary table 17 is fixedly connected to the output shaft of the driving motor 16, a push-pull rod 15 is rotatably connected to the front side of the rotary table 17, an extrusion plate 14 is rotatably connected to the bottom end of the push-pull rod 15, the extrusion plate 14 is arranged in the extrusion barrel 5 in a sliding sealing manner, the bottom of the extrusion barrel 5 is fixedly communicated with a dispensing head 3, the glue barrel 10 and one side bottom of the extrusion barrel 5 are fixedly communicated with one hose 11, the driving motor 16 is started, the driving motor 16 drives the rotary table 17 to rotate, the rotary table 17 drives the push-pull rod 15 to reciprocate up and down, the push-pull rod 15 drives the extrusion plate 14 to reciprocate up and down, when the extrusion plate 14 moves down, glue in the glue barrel 10 can be pumped into the hose 11 and the extrusion barrel 5, and the glue can be extruded from the dispensing head 3 to the crystal part to perform dispensing operation, and the dispensing operation can be performed quantitatively, so that the dispensing effect is better.
In the utility model, the top of the extrusion plate 14 is fixedly connected with the ear plate, and the push-pull rod 15 is rotatably connected to the front side of the ear plate, so that the extrusion plate 14 is conveniently rotatably connected to the bottom end of the push-pull rod 15.
In the utility model, the glue dispensing head 3 and the hose 11 are respectively provided with the one-way valve 13, and the direction of glue flow can be guided through the one-way valves, so that the glue can only flow into the extrusion cylinder 5 from the glue cylinder 10 and then be extruded from the glue dispensing head 3 for dispensing, thereby avoiding the condition of countercurrent.
In the utility model, when the wafer dispensing machine works, a wafer to be dispensed is placed in a wafer placing seat 7, an upper motor 6 is started according to the dispensing position, the upper motor 6 drives an upper screw rod 21 to rotate, the upper screw rod 21 drives a sliding block 23 and a sliding rail 12 to move forwards and backwards, the dispensing position can be further regulated and controlled, a lower screw rod 20 is driven to rotate through a lower motor 18, the lower screw rod 20 drives two moving plates 19, a frame body 8 and the dispensing head 3 to move transversely under the guidance of the sliding rail 12, the dispensing position can be further regulated and controlled transversely, after regulation and control, the cylinder 9 drives an extrusion cylinder 5 and the dispensing head 3 to move downwards so as to regulate the distance between the dispensing head 3 and the dispensing position, then a driving motor 16 is started, the driving motor 16 drives a rotary table 17 to rotate, the rotary table 17 drives a rod 15 to reciprocate upwards and downwards, the extruding plate 14 is driven to reciprocate upwards and downwards, the glue in the extrusion cylinder 10 is pumped into the extrusion cylinder 11 and the extrusion cylinder 5, when the glue is pushed and the dispensing cylinder 14 is moved upwards and then the dispensing position of the dispensing head 3 is further regulated and the dispensing position is realized.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (8)
1. Wafer photoresist accuse is glued equipment, a serial communication port, including base (1), slide rail (12) and support body (8), seat (7) and mounting bracket (2) are placed to the top fixedly connected with wafer of base (1), be provided with front and back regulation and control subassembly between slide rail (12) and mounting bracket (2), be provided with horizontal regulation and control subassembly between slide rail (12) and support body (8), fixedly connected with cylinder (9) and packing element (10) on the bottom inner wall of support body (8), fixedly connected with extrusion section of thick bamboo (5) on the output shaft of cylinder (9), be provided with quantitative point between extrusion section of thick bamboo (5) and the packing element (10) and glue the subassembly, the front side fixedly connected with controller (4) of mounting bracket (2).
2. The wafer photoresist control device according to claim 1, wherein the top inner wall of the mounting frame (2) is provided with a groove (22), the front-back regulating component comprises an upper motor (6) fixedly connected to the front side of the mounting frame (2) and an upper screw rod (21) rotationally connected to the front-back inner wall of the groove (22), an output shaft of the upper motor (6) is fixedly connected to the front end of the upper screw rod (21), a sliding block (23) is sleeved on an outer thread of the upper screw rod (21), and the bottom of the sliding block (23) is fixedly connected to the top of the sliding rail (12).
3. A wafer photoresist control device according to claim 2, characterized in that the slider (23) is slidably arranged in the recess (22).
4. The wafer photoresist control device according to claim 1, wherein the transverse control assembly comprises a lower motor (18) fixedly connected to one side of the sliding rail (12) and a lower screw rod (20) rotatably connected to inner walls of two sides of the sliding rail (12), an output shaft of the lower motor (18) is fixedly connected to one end of the lower screw rod (20), two moving plates (19) are sleeved on outer threads of the lower screw rod (20), and the frame body (8) is fixedly connected to bottoms of the two moving plates (19).
5. A wafer photoresist control device according to claim 4, characterized in that both moving plates (19) are slidably mounted in the slide rail (12).
6. The wafer photoresist control device according to claim 1, wherein the quantitative dispensing component comprises a driving motor (16) fixedly connected to the inner wall of the rear side of the extrusion barrel (5), a rotary table (17) is fixedly connected to an output shaft of the driving motor (16), a push-pull rod (15) is rotatably connected to the front side of the rotary table (17), an extrusion plate (14) is rotatably connected to the bottom end of the push-pull rod (15), the extrusion plate (14) is arranged in the extrusion barrel (5) in a sliding sealing manner, a dispensing head (3) is fixedly connected to the bottom of the extrusion barrel (5), and one hose (11) is fixedly connected to one side bottom of the extrusion barrel (10) and one side bottom of the extrusion barrel (5).
7. The wafer photoresist control device according to claim 6, wherein the top of the extrusion plate (14) is fixedly connected with an ear plate, and the push-pull rod (15) is rotatably connected to the front side of the ear plate.
8. A wafer photoresist control device according to claim 6, characterized in that the dispensing head (3) and the hose (11) are provided with one-way valves (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322316299.9U CN220697295U (en) | 2023-08-28 | 2023-08-28 | Wafer photoresist accuse is glued equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322316299.9U CN220697295U (en) | 2023-08-28 | 2023-08-28 | Wafer photoresist accuse is glued equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220697295U true CN220697295U (en) | 2024-04-02 |
Family
ID=90438860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322316299.9U Active CN220697295U (en) | 2023-08-28 | 2023-08-28 | Wafer photoresist accuse is glued equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220697295U (en) |
-
2023
- 2023-08-28 CN CN202322316299.9U patent/CN220697295U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |