CN220690141U - Plasma torch testing device - Google Patents

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a plasma torch testing device, which comprises a machine table, a plant source interface and a detection assembly, wherein a testing cavity is arranged in the machine table, a mounting port for mounting a plasma torch to be tested is arranged at the top of the machine table, the plant source interface comprises a circulating water interface and a nitrogen interface, the circulating water interface is suitable for communicating a plant circulating water outlet with a water inlet interface of the plasma torch to be tested, the nitrogen interface is suitable for communicating a plant nitrogen outlet with an air inlet of the plasma torch to be tested, the detection assembly comprises a water flow detector and a gas flow detector, the water flow detector is suitable for detecting circulating water flow entering the plasma torch to be tested, and the gas flow detector is suitable for detecting nitrogen flow entering the plasma torch to be tested. The plasma torch testing device can be operated for a long time and can be unattended, so that plasma torch damage caused by carelessness or slow reaction of manual monitoring is avoided, and a manufacturing enterprise generates great man-hour and material loss effects.

Description

Plasma torch testing device

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a plasma torch testing device.

Background

The toxic, harmful, inflammable and corrosive waste gas and dust generated in the semiconductor manufacturing process can be subjected to the pretreatment by adopting a plasma and water washing process, and the assembly quality of the plasma torch on the plasma waste gas treatment equipment directly influences the normal operation of the waste gas treatment equipment and the service life of the plasma torch. A long ignition test of 4 hours is required after each plasma torch is assembled to verify that it meets the design requirements. The initial test of the plasma torch needs to be carried out after the plasma torch on the finished product equipment is disassembled and replaced with the plasma torch to be tested, and the preparation work before the test is complicated.

The plasma torch is characterized in that a high temperature is generated in an arc of the plasma torch, circulating water is needed to be used in the ignition process of the plasma torch, and if the flow of cooling water is unstable or is cut off in the ignition process of the plasma torch, the plasma torch is damaged in a short time; nitrogen is the working gas for the plasma torch and, if instable flow or shut-off occurs, the plasma torch under test can be damaged by ablation in a very short time. When the current plasma torch is tested, operators need to monitor in real time, labor is consumed, and even if the manual monitoring is performed, the plasma torch is possibly damaged due to carelessness or slow reaction, so that a manufacturing enterprise generates great working hours and material loss.

Disclosure of Invention

The utility model provides a plasma torch testing device, which is used for solving one of the problems in the prior art, and realizing the effect of providing a plasma torch testing device which can run for a long time and can be unattended, avoiding the damage of the plasma torch caused by carelessness or slow reaction of manual monitoring, and enabling manufacturing enterprises to generate great working hours and material loss.

The utility model provides a plasma torch testing device which comprises a machine table, a plant source interface and a detection assembly, wherein a testing cavity is arranged in the machine table, a mounting port for mounting a plasma torch to be tested is arranged at the top of the machine table, the plant source interface comprises a circulating water interface and a nitrogen interface, the circulating water interface is suitable for communicating a plant circulating water outlet with a water inlet of the plasma torch to be tested, the nitrogen interface is suitable for communicating a plant nitrogen outlet with an air inlet of the plasma torch to be tested, the detection assembly comprises a water flow detector and a gas flow detector, the water flow detector is suitable for detecting circulating water flow entering the plasma torch to be tested, and the gas flow detector is suitable for detecting nitrogen flow entering the plasma torch to be tested.

According to the plasma torch testing device provided by the utility model, the detection assembly further comprises a temperature detector, and the temperature detector is suitable for detecting the shell temperature of the plasma torch.

According to the plasma torch testing device provided by the utility model, the plasma torch testing device further comprises an electric control assembly, and the electric control assembly is suitable for being electrically connected with the plasma torch to be tested to ignite the plasma torch to be tested.

According to the plasma torch testing device provided by the utility model, the electric control assembly comprises the electric control box and the plasma power supply, the electric control box is suitable for being connected with a three-phase power supply, the electric control box is connected with the plasma power supply and the detection assembly, the plasma power supply is suitable for being connected with an ignition anode and a ignition cathode of the plasma torch to be tested, and the water flow detector, the gas flow detector and the temperature detector are connected with the electric control box.

According to the plasma torch testing device provided by the utility model, the plasma torch testing device further comprises an alarm, and the alarm is connected with the electric cabinet.

According to the plasma torch testing device provided by the utility model, the plant source interface comprises a negative pressure interface which is suitable for being connected with a plant negative pressure fan, and the negative pressure interface is arranged at the bottom of the machine table and is communicated with the testing cavity.

According to the plasma torch testing device provided by the utility model, the pipeline, which is communicated with the factory circulation water outlet, of the circulating water interface is provided with the first valve body; and a second valve body is arranged on a pipeline of the nitrogen interface communicated with the factory nitrogen.

According to the plasma torch testing device provided by the utility model, the machine comprises the base and the rack, the rack and the plasma power supply are both arranged on the base, the mounting opening is arranged at the top of the rack, the testing cavity is enclosed by the rack, and the electric cabinet is arranged on the rack.

According to the plasma torch testing device provided by the utility model, the stand is provided with the observation window, and the observation window is suitable for observing the flame of the plasma torch to be tested.

According to the plasma torch testing device provided by the utility model, the base is provided with the universal wheel.

According to the plasma torch testing device provided by the utility model, the test cavity for simulating the reaction cavity of the semiconductor plasma waste gas treatment equipment is arranged in the machine table, the mounting port for being detachably connected with the plasma torch to be tested is arranged at the top of the machine table, namely, when a test is required, the plasma torch to be tested is mounted at the mounting port, the nozzle of the plasma torch to be tested stretches into the test cavity, and when the test is completed or stopped, the plasma torch to be tested can be dismounted from the mounting port. The plant source interface is used as an independent component and corresponds to the plant source, and the machine table and the plasma torch to be tested can be connected with the corresponding plant source.

According to the plasma torch testing device, the reaction cavity of the plasma waste gas treatment equipment for the semiconductor is simulated through the closed testing cavity, the factory source is connected with the machine through the factory source interface, and the environment state of the testing cavity in the machine is changed to simulate the environment state of the reaction cavity of the plasma waste gas treatment equipment for the semiconductor. And connecting a factory source with the plasma torch to be tested through a factory source interface, and providing working conditions for the plasma torch to be tested. The machine table and the plasma torch to be tested are connected with the factory source through the factory source interface, so that the process of connecting the factory source during testing is simplified, and the efficiency during batch testing of the plasma torches to be tested is improved.

It can be understood that the plasma torch testing device provided by the utility model is used for testing the plasma torch, and a finished semiconductor plasma waste gas treatment device does not need to be prepared before testing, namely, the testing and the production can be relatively and independently carried out without interference, and the finished semiconductor plasma waste gas treatment device used for the production does not need to be repeatedly started and stopped due to the testing work. The utility model is used as an independent plasma torch testing device, and can ensure that the machine is always in a connection state with the plant source through the arrangement of the plant source interface, and only the plasma torch to be tested is connected with the plant source interface in the testing process, thereby simplifying the assembly and disassembly procedures in the monitoring operation of the plasma torch to the greatest extent.

In the embodiment, a water flow detector is arranged on a pipeline communicated between a water inlet interface and a circulating water interface of a plasma torch to be detected and is used for monitoring the real-time flow of circulating cooling water; the gas flow detector is arranged on a pipeline communicated between the nitrogen interface and the gas inlet of the plasma torch to be detected and is used for monitoring the real-time flow of the input nitrogen. Through the setting of water flow detector and gas flow detector, can carry out real-time supervision to the key index of water route and gas circuit when the plasma torch test, reduce the manpower consumption, provide a but long-time operation and unmanned on duty's plasma torch testing arrangement, avoid leading to the plasma torch to damage because of carelessness or the reaction retardation of manual monitoring, make manufacturing enterprise produce very big man-hour and material loss.

In addition to the technical problems, features of the constituent technical solutions and advantages brought by the technical features of the technical solutions described above, other technical features of the present utility model and advantages brought by the technical features of the technical solutions will be further described with reference to the accompanying drawings or will be understood through practice of the present utility model.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a front view of a plasma torch testing apparatus provided by the present utility model;

FIG. 2 is a rear view of a plasma torch testing apparatus provided by the present utility model;

FIG. 3 is a schematic view of the structure of the mounting port of the plasma torch testing apparatus provided by the present utility model;

FIG. 4 is a schematic diagram of the piping connections of a plasma torch testing apparatus provided by the present utility model;

fig. 5 is an electrical control schematic of a plasma torch testing apparatus provided by the present utility model.

Reference numerals:

100. a machine table; 110. a test chamber; 120. a mounting port; 130. a base; 131. a universal wheel; 140. a stand; 141. an observation window;

200. a plant source interface; 210. a negative pressure interface; 220. a circulating water interface; 230. a nitrogen interface;

300. an electrical control assembly; 310. an electric control box; 311. a control button; 320. a plasma power supply;

400. a plasma torch to be measured; 410. a water inlet port; 420. a water outlet interface; 430. an air inlet;

510. a factory circulation water outlet; 520. a factory nitrogen outlet; 530. a three-phase power supply; 540. a factory circulation water return port; 550. a plant negative pressure fan;

610. a first valve body; 620. a second valve body;

700. a detection assembly; 710. a water flow detector; 720. a gas flow detector; 730. a temperature detector;

800. an alarm.

Detailed Description

Embodiments of the present utility model are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the utility model but are not intended to limit the scope of the utility model.

In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.

In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

Furthermore, in the description of the embodiments of the present utility model, unless otherwise indicated, the meaning of "a plurality of", "a plurality of" means two or more, and the meaning of "a plurality of", "a plurality of" means one or more ".

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

As shown in fig. 1 to 5, an embodiment of the present utility model provides a plasma torch testing device, which includes a machine 100, a factory source interface 200 and an electric control assembly 300, wherein a testing cavity 110 is provided in the machine 100, a mounting port 120 for mounting a plasma torch 400 to be tested is provided at the top of the machine 100, the factory source interface 200 includes a circulating water interface 220 and a nitrogen interface 230, the circulating water interface 220 is adapted to communicate a factory circulating water outlet 510 with a water inlet 410 of the plasma torch 400 to be tested, the nitrogen interface 230 is adapted to communicate a factory nitrogen outlet 520 with an air inlet 430 of the plasma torch 400 to be tested, the testing assembly 700 includes a water flow detector 710 and a gas flow detector 720, the water flow detector 710 is adapted to detect a circulating water flow entering the plasma torch 400 to be tested, and the gas flow detector 720 is adapted to detect a nitrogen flow entering the plasma torch 400 to be tested.

According to the plasma torch testing device provided by the embodiment of the utility model, the testing cavity 110 for simulating the reaction cavity of the semiconductor plasma waste gas treatment equipment is arranged in the machine 100, the mounting port 120 for detachably connecting with the plasma torch 400 to be tested is arranged at the top of the machine 100, namely, when the testing is required, the plasma torch 400 to be tested is mounted at the mounting port 120, the nozzle of the plasma torch 400 to be tested stretches into the testing cavity 110, and when the testing is completed or stopped, the plasma torch 400 to be tested can be dismounted from the mounting port 120. The factory source interface 200 is used as an independent component, and is arranged corresponding to the factory source, so that the machine 100 and the plasma torch 400 to be measured can be connected with the corresponding factory source.

According to the plasma torch testing device, the reaction cavity of the plasma waste gas treatment equipment for the semiconductor is simulated through the closed testing cavity 110, and the factory source is connected with the machine 100 through the factory source interface 200, so that the environment state of the testing cavity 110 in the machine 100 is changed, and the environment state in the reaction cavity of the plasma waste gas treatment equipment for the semiconductor is simulated. The factory source is connected with the plasma torch 400 to be measured through the factory source interface, and conditions required by work are provided for the plasma torch 400 to be measured. The machine 100 and the plasma torch 400 to be tested are connected with the factory source through the factory source interface 200, so that the process of connecting the factory source during testing is simplified, and the efficiency during batch testing of the plasma torch 400 to be tested is improved.

In the production working process of the existing semiconductor plasma waste gas treatment equipment, after the plasma torch is assembled, the plasma torch is tested by means of assembled semiconductor plasma waste gas treatment finished product equipment, and the steps are as follows:

the first step: disconnecting a power supply, a waterway, a gas circuit and a factory source of the semiconductor plasma waste gas treatment finished product equipment;

secondly, detaching a plasma torch on the semiconductor plasma waste gas treatment finished product equipment, and disconnecting a circuit, a waterway and a gas circuit of the plasma torch;

and a third step of: then, the plasma torch to be measured is arranged on the semiconductor plasma waste gas treatment finished product equipment and is connected with a circuit, a waterway and a gas circuit on the equipment;

fourth step: and connecting a power supply, a waterway and a gas circuit of the semiconductor plasma waste gas treatment finished product equipment with a factory source.

It can be understood that the plasma torch testing device provided by the utility model is used for testing the plasma torch, and a finished semiconductor plasma waste gas treatment device does not need to be prepared before testing, namely, the testing and the production can be relatively and independently carried out without interference, and the finished semiconductor plasma waste gas treatment device used for the production does not need to be repeatedly started and stopped due to the testing work. The utility model is used as an independent plasma torch testing device, and by the arrangement of the factory source interface 200, the machine can be ensured to be always in a connection state with the factory source, and only the plasma torch 400 to be tested is connected with the factory source interface 200 in the testing process, so that the assembly and disassembly procedures in the monitoring operation of the plasma torch are simplified to the greatest extent.

The water inlet 410 of the plasma torch 400 to be measured is disposed on the plasma torch 400 to be measured, and in a state where the plasma torch 400 to be measured is mounted on the machine 100, the water inlet 410 is located on a portion of the plasma torch 400 to be measured located outside the machine 100. The factory circulation water outlet 510 is connected with one end of the circulation water interface 220 through a pipeline, and the water inlet 410 of the plasma torch 400 to be measured at the other end of the circulation water interface 220 is connected with the other end of the circulation water interface through a pipeline. The water outlet port 420 of the plasma torch 400 to be measured is connected with the factory circulation water return port 540, circulating water flows through the circulating water port 220 from the factory circulation water outlet port 510 and then enters the inside of the plasma torch 400 to be measured through the water inlet port 410, and after being applied by the plasma torch 400 to be measured, the circulating water flows out from the water outlet port 420 and returns to the factory circulation water return port 540, so that the plasma torch 400 to be measured is cooled circularly.

The gas inlet 430 of the plasma torch 400 to be measured is disposed on the plasma torch 400 to be measured, and in a state where the plasma torch 400 to be measured is mounted to the machine 100, the gas inlet 430 is located on a portion of the plasma torch 400 to be measured located outside the machine 100. The factory nitrogen outlet 520 is connected with one end of the nitrogen interface 230 through a pipeline, the other end of the nitrogen interface 230 is connected with the air inlet 430 of the plasma torch 400 to be measured through a pipeline, and nitrogen flows from the factory nitrogen outlet 520 through the nitrogen interface 230 and enters the inside of the plasma torch 400 to be measured through the air inlet 430, so that the plasma torch 400 to be measured can be used.

The plasma torch is characterized in that a high temperature is generated in an arc of the plasma torch, circulating water is needed to be used in the ignition process of the plasma torch, and if the flow of cooling water is unstable or is cut off in the ignition process of the plasma torch, the plasma torch is damaged in a short time; nitrogen is the working gas for the plasma torch and, if instable flow or shut-off occurs, the plasma torch under test can be damaged by ablation in a very short time.

In this embodiment, the water flow detector 710 is disposed on a pipeline communicating between the water inlet 410 and the circulating water 220 of the plasma torch 400 to be measured, and is used for monitoring the real-time flow of the circulating cooling water; the gas flow detector 720 is disposed on a pipeline communicating between the nitrogen interface 230 and the gas inlet 430 of the plasma torch 400 to be measured, and is used for monitoring the real-time flow of the input nitrogen. Through the setting of water flow detector 710 and gas flow detector 720, can carry out real-time supervision to the key index of water route and gas circuit when the plasma torch test, reduce the manpower consumption, provide a but long-time operation and unmanned on duty's plasma torch testing arrangement, avoid leading to the plasma torch to damage because of carelessness or the reaction retardation of manual monitoring, make manufacturing enterprise produce very big man-hour and material loss.

In this embodiment, the circulating water interface 220 may be in the form of a quick-plug connector, so as to realize quick connection or disconnection between the factory circulating water outlet 510 and the water inlet 410 of the plasma torch 400 to be tested, simplify the process of connecting the factory source during testing, improve the efficiency of batch testing of the plasma torches 400 to be tested, and continuously flow the circulating water into the plasma torches 400 to be tested in a connected state, thereby absorbing heat generated during testing of the plasma torches 400 to be tested. In other embodiments, the circulating water interface 220 may employ other quick connect structural components.

In this embodiment, the nitrogen interface 230 is in the form of a quick plug, so that the factory nitrogen outlet 520 is quickly connected or disconnected with the air inlet 430 of the plasma torch 400 to be tested, the process of connecting the factory source during testing is simplified, the efficiency of batch testing of the plasma torches 400 to be tested is improved, and in the connected state, nitrogen continuously flows into the plasma torches 400 to be tested, so as to provide working conditions for the plasma torches 400 to be tested, and the testing accuracy is improved. In other embodiments, other quick connect structural components may be employed for nitrogen interface 230.

In this embodiment, the plasma torch 400 to be tested is mounted in the mounting opening 120 at the top of the machine 100 during testing, the mounting opening 120 is circular, and the machine 100 is rectangular. In other embodiments, the shape of the mounting opening 120 is adapted to the outer contour of the mounting location of the plasma torch 400 to be measured; to better simulate the reaction chamber of the plasma exhaust treatment device for semiconductors, the machine 100 and the test chamber 110 may be configured in a cylindrical shape.

According to one embodiment provided by the present utility model, the detection assembly 700 further comprises a temperature detector 730, the temperature detector 730 being adapted to detect the housing temperature of the plasma torch. In this embodiment, the temperature detector 730 is a movable temperature detector 730, and may be a heat conductive silicone grease adhered to the housing of the plasma torch 400 to be measured, so as to monitor the real-time temperature of the plasma torch 400 to be measured, and facilitate assembly and disassembly. And judging the ignition condition of the plasma torch 400 to be tested according to the real-time temperature of the plasma torch 400 to be tested, thereby maintaining the reliability and stability of the test.

According to one embodiment of the present utility model, the plasma torch testing apparatus further comprises an electrical control assembly 300, wherein the electrical control assembly 300 is adapted to be electrically connected to the plasma torch 400 to be tested, and to ignite the plasma torch 400 to be tested. The electronic control assembly 300 also provides electrical connection to the plasma torch 400 to be measured mounted on the machine 100 as a separate component. By driving the plasma torch 400 to be tested to ignite by the independent electric control assembly 300, the effect that the plasma torch 400 to be tested is tested without using a special plasma waste gas treatment device of a semiconductor is achieved.

According to one embodiment of the present utility model, the electric control assembly 300 includes an electric control box 310 and a plasma power supply 320, the electric control box 310 is adapted to be connected with a three-phase power supply 530, the electric control box 310 is connected with the plasma power supply 320, the plasma power supply 320 is adapted to be connected with the ignition anode and cathode of the plasma torch 400 to be measured, and the water flow detector 710, the gas flow detector 720 and the temperature detector 730 are all connected with the electric control box 310. In this embodiment, as shown in fig. 1, fig. 2 and fig. 5, the electric cabinet 310 is connected to the three-phase power supply 530, the three-phase power supply 530 has the leakage protection and overload protection functions, so as to effectively protect the plasma torch testing device, the electric cabinet 310 is connected to the plasma power supply 320, and provides power for the plasma power supply 320, the electric cabinet 310 is provided with a control button 311, including a scram button and a start button, so as to control the on-off of the power supply output to the plasma power supply 320, the plasma power supply 320 is suitable for being connected to the ignition anode and cathode of the plasma torch 400 to be tested, so that the plasma torch 400 to be tested can be driven to generate a plasma arc, and by providing the electric cabinet 310 and the plasma power supply 320, an independent plasma ignition control circuit is formed, and the plasma torch 400 to be tested is driven to ignite by matching with the circulating water of the factory and nitrogen, so that not only the working state of the plasma torch 400 to be tested in the plasma exhaust treatment device for a semiconductor is simulated, but also the effect of real-time control of the plasma torch 400 to be tested is achieved, and the protection and debugging work of the plasma torch 400 to be tested is facilitated.

In this embodiment, the water flow detector 710, the gas flow detector 720 and the temperature detector 730 are all connected with the PLC in the electric cabinet 310, and send the detected parameter information to the electric cabinet 310, and if the monitored parameter is out of the set range, the PLC immediately cuts off the plasma power supply 320 to protect the plasma torch 400 to be measured. The water flow detector 710, the gas flow detector 720, and the temperature detector 730 may employ corresponding sensors.

In this embodiment, the electric cabinet 310 is fixedly disposed at a position near the top of the rear of the machine 100, which is favorable for the operation of emergency stop and start buttons by the staff, the plasma power supply 320 is separately disposed at a position near the bottom of the side of the machine 100, the plasma power supply 320 adopts the existing finished product components, and the plasma power supply 320 is separately disposed to facilitate replacement and reduce the maintenance cost of the testing device.

In other embodiments, the electric cabinet 310 may be further connected to the machine 100 through a mechanical arm, specifically, one end of the mechanical arm is connected to the machine 100, the other end of the mechanical arm is connected to the electric cabinet 310, and by rotating the mechanical arm, the movement of the electric cabinet 310 is achieved, so that a worker can conveniently control the operation of the plasma torch 400 to be measured in the machine 100 in time.

According to one embodiment of the present utility model, the plasma torch testing apparatus further comprises an alarm 800, the alarm 800 being connected to the electric cabinet 310. When the water flow detector 710, the gas flow detector 720 and the temperature detector 730 detect that the actual parameters deviate from the set ranges, signals are sent to the electric cabinet 310 to immediately cut off the plasma power supply 320, protect the plasma torch 400 to be tested, and control the alarm 800 to send alarm indication to inform operators.

In this embodiment, the alarm 800 may employ a three-color alarm lamp, a yellow lamp indicates standby, a green lamp indicates that the plasma power source 320 is powered, and a red lamp indicates that the alarm is turned off, and in other embodiments, the alarm 800 may employ other alarm devices, such as a bell, etc.

According to an embodiment of the present utility model, the factory source interface 200 includes a negative pressure interface 210 adapted to be connected to a factory negative pressure fan 550, where the negative pressure interface 210 is disposed at the bottom of the machine 100 and is in communication with the test chamber 110. In this embodiment, as shown in fig. 1 and 2, the negative pressure interface 210 is disposed on a side wall near the bottom of the machine 100 and is communicated with the test chamber 110, and the factory negative pressure fan 550 forms negative pressure to suck out the gas generated by the ignition and combustion of the plasma torch 400 to be tested in the test chamber 110, and simulate the working state of the reaction chamber in the actual exhaust gas treatment device when the reaction chamber is connected with the factory negative pressure, so as to keep the negative pressure environment in the test chamber 110 consistent with the negative pressure environment in the reaction chamber of the actual exhaust gas treatment device, and improve the test accuracy.

According to an embodiment of the present utility model, a first valve body 610 is disposed on a pipeline where the circulating water interface 220 communicates with the service circulation water outlet 510. In this embodiment, as shown in fig. 4, the first valve body 610 is disposed on the pipeline that the circulating water interface 220 is communicated with the factory circulating water outlet 510, the circulating water flow is adjusted by the first valve body 610, and the operating state of the plasma torch 400 to be tested is observed by adjusting the circulating water flow, so as to determine whether the circulating water flow pipeline inside the plasma torch 400 to be tested is normal, and simulate the operating state of the plasma torch in the actual exhaust gas treatment device, so that the cooling mode and process of the plasma torch 400 to be tested are kept consistent with those of the plasma torch in the actual exhaust gas treatment device, and the test accuracy is improved.

In this embodiment, the first valve body 610 may be a manual valve, and in other embodiments, the first valve body 610 may be another valve body having a flow control function, such as a solenoid valve.

According to one embodiment of the present utility model, a second valve 620 is disposed on the pipeline where the nitrogen port 230 communicates with the factory nitrogen outlet 520. In this embodiment, as shown in fig. 4, the second valve body 620 is disposed on the pipeline where the nitrogen interface 230 is communicated with the factory nitrogen outlet 520, and the nitrogen flow is adjusted by the second valve body 620, it can be understood that the amounts of nitrogen needed by the to-be-measured plasma torches 400 with different specifications are different, and the use requirements of the to-be-measured plasma torches 400 with different specifications can be met by adjusting the nitrogen flow to the standard range, and the working state of the to-be-measured plasma torches 400 is observed to determine whether the nitrogen flow inside the to-be-measured plasma torches 400 is normal.

In this example, the second valve body 620 may be a manual valve, and the second valve body 620 may be another valve body having a flow control function, such as a solenoid valve.

According to an embodiment of the present utility model, the machine 100 includes a base 130 and a stand 140, both the stand 140 and a plasma power supply 320 are disposed on the base 130, a mounting opening 120 is disposed on the top of the stand 140, the stand 140 encloses a test cavity 110, and an electric cabinet 310 is disposed on the stand 140. In this embodiment, as shown in fig. 1 to 3, the rack 140 and the plasma power supply 320 are both independently disposed on the base 130, the top of the rack 140 is provided with the mounting opening 120 for mounting the plasma torch 400 to be tested, the rack 140 is of a closed structure, the enclosed test chamber 110 is used for simulating the reaction chamber of the plasma waste gas treatment device for semiconductors, and the electric cabinet 310 is disposed at the rear of the rack 140 near the top.

In this embodiment, the base 130 and the stand 140 all adopt aluminum profiles to build the main structure, the aluminum profiles have high strength, easy disassembly and assembly, good bearing performance, and are beneficial to realizing the design of the stand 140 with different sizes.

According to one embodiment of the present utility model, the stand 140 is provided with a viewing window 141, and the viewing window 141 is adapted to view the flame of the plasma torch 400 to be measured. In this embodiment, as shown in fig. 1 and 2, the observation window 141 is disposed at a position near the top of the front surface of the rack 140, corresponding to the nozzle position of the plasma torch 400 to be measured, and a worker can observe the plasma arc state through the observation window 141 to determine whether the nozzle state is good, thereby confirming the assembly quality of the plasma torch 400 to be measured.

In this embodiment, the observation window 141 is made of a transparent acrylic material with high light resistance Wen Fanghuan, so that the observation effect is better while the workers are protected. In other embodiments, the observation window 141 may be made of other high Wen Fanghuan light-resistant transparent materials, the shape and size of which can be adjusted according to practical situations, and the observation window 141 may be additionally provided with a cover body, which is opened when observation is needed and closed when observation is not needed.

According to one embodiment of the present utility model, the base 130 is provided with universal wheels 131. In this embodiment, as shown in fig. 1 and 2, the universal wheel 131 is disposed at the bottom of the base 130, so that the stand 140 connected to the base 130 can freely move according to the requirement, and the universal wheel 131 also has a locking function, so that the base 130 can be conveniently fixed in position, and the stand 140 can be conveniently tested.

The control method of the plasma torch testing device provided by the embodiment of the utility model is used for the plasma torch testing device of the embodiment, and comprises the following steps:

s1, a three-phase power supply 530 plug of the plasma torch testing device is connected with a three-phase power supply 530, a circulation interface is connected with a factory circulation water outlet 510, a nitrogen interface 230 is connected with a factory nitrogen outlet 520, and a negative pressure interface 210 is connected with a factory negative pressure fan 550.

S2, a plasma torch 400 to be measured is arranged at the mounting port 120 at the top of the machine 100, the circulating water interface 220 is connected with the factory circulating water outlet 510, the circulating water interface 220 is connected with the water inlet 410, the factory circulating water return port 540 is connected with the water outlet 420, the nitrogen interface 230 is connected with the factory nitrogen outlet 520, the nitrogen interface 230 is connected with the air inlet 430, and the ignition anode and cathode of the plasma torch 400 to be measured are connected with the plasma power supply 320.

S3, the first valve body 610 and the second valve body 620 are opened, the circulating water flow and the nitrogen flow are adjusted to the standard range according to the indication values of the water flow detector 710 and the gas flow detector 720, and the indication lamp of the alarm 800 is changed from red lamp indication to yellow lamp indication, so that the plasma power supply 320 can be started.

S4, pressing a start button of the control button 311 of the electric cabinet 310, when the alarm 800 does not give an alarm, a contactor in the electric cabinet 310 is attracted, the plasma power supply 320 starts the power-on control, and the indicator lamp of the alarm 800 is turned on in a green light.

S5, various parameters such as plasma driving current and voltage can be set through the touch screen of the plasma power supply 320, and then the plasma power supply can be operated by manual ignition on the touch screen.

S6, in the operation process, the water flow detector 710 monitors the flow of the factory circulating water in real time, the gas flow detector 720 monitors the flow of working nitrogen in real time, and the temperature detector 730 monitors the shell temperature of the plasma torch in real time. If any of the above monitored parameters is not in the standard range, the PLC of the electric cabinet 310 immediately sends out an instruction to turn off the power input of the plasma power supply 320, and the plasma arc is extinguished. The indicator light of the alarm 800 lights up with a red light to alert the operator to the process.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims (10)

1. A plasma torch testing device, characterized in that: including board, factory source interface and detection component, the inside test chamber that is equipped with of board, the top of board is equipped with the installing port that is used for the plasma torch that awaits measuring to install, factory source interface includes circulating water interface and nitrogen gas interface, the circulating water interface be suitable for with factory circulation delivery port with the inlet port intercommunication of plasma torch that awaits measuring, the nitrogen gas interface be suitable for with factory nitrogen gas export with the air inlet intercommunication of plasma torch that awaits measuring, detection component includes water flow detector and gas flow detector, water flow detector is suitable for detecting the circulating water flow who gets into plasma torch that awaits measuring, gas flow detector is suitable for detecting the nitrogen gas flow who gets into plasma torch that awaits measuring.

2. The plasma torch testing apparatus of claim 1, wherein: the detection assembly further includes a temperature detector adapted to detect a housing temperature of the plasma torch.

3. The plasma torch testing apparatus of claim 2, wherein: the plasma torch testing device further comprises an electric control assembly, and the electric control assembly is suitable for being electrically connected with the plasma torch to be tested to ignite the plasma torch to be tested.

4. A plasma torch testing apparatus according to claim 3, wherein: the electric control assembly comprises an electric control box and a plasma power supply, the electric control box is suitable for being connected with a three-phase power supply, the electric control box is connected with the plasma power supply and the detection assembly, the plasma power supply is suitable for being connected with an ignition anode and a ignition cathode of the plasma torch to be detected, and the water flow detector, the gas flow detector and the temperature detector are connected with the electric control box.

5. The plasma torch testing apparatus of claim 4, wherein: the plasma torch testing device further comprises an alarm, and the alarm is connected with the electric cabinet.

6. The plasma torch testing apparatus according to any one of claims 1 to 5, wherein: the plant source interface comprises a negative pressure interface which is suitable for being connected with a plant negative pressure fan, and the negative pressure interface is arranged at the bottom of the machine table and is communicated with the test cavity.

7. The plasma torch testing apparatus of claim 6, wherein: a first valve body is arranged on a pipeline which is communicated with the factory circulation water outlet through the circulating water interface; and a second valve body is arranged on a pipeline of the nitrogen interface communicated with the factory nitrogen.

8. The plasma torch testing apparatus of claim 4, wherein: the machine comprises a base and a rack, wherein the rack and the plasma power supply are both arranged on the base, the top of the rack is provided with an installation opening, the rack encloses the test cavity, and the electric cabinet is arranged on the rack.

9. The plasma torch testing apparatus of claim 8, wherein: the stand is provided with an observation window, and the observation window is suitable for observing the flame of the plasma torch to be measured.

10. The plasma torch testing apparatus of claim 8, wherein: the base is provided with universal wheels.