CN220681901U - Laser transfer printing machine - Google Patents
Laser transfer printing machine Download PDFInfo
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- CN220681901U CN220681901U CN202321129093.9U CN202321129093U CN220681901U CN 220681901 U CN220681901 U CN 220681901U CN 202321129093 U CN202321129093 U CN 202321129093U CN 220681901 U CN220681901 U CN 220681901U
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- 238000010023 transfer printing Methods 0.000 title abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 153
- 230000007246 mechanism Effects 0.000 claims abstract description 139
- 238000012546 transfer Methods 0.000 claims abstract description 135
- 239000002002 slurry Substances 0.000 claims abstract description 109
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 91
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 91
- 239000010703 silicon Substances 0.000 claims abstract description 91
- 238000007599 discharging Methods 0.000 claims abstract description 47
- 238000007639 printing Methods 0.000 claims abstract description 31
- 238000007790 scraping Methods 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 21
- 238000009434 installation Methods 0.000 claims description 21
- 230000001360 synchronised effect Effects 0.000 claims description 20
- 230000000295 complement effect Effects 0.000 claims description 9
- 230000000712 assembly Effects 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 6
- 230000007306 turnover Effects 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims 14
- 235000012431 wafers Nutrition 0.000 abstract description 61
- 239000003795 chemical substances by application Substances 0.000 abstract description 26
- 238000004513 sizing Methods 0.000 abstract description 26
- 239000013589 supplement Substances 0.000 abstract description 5
- 230000001502 supplementing effect Effects 0.000 abstract description 5
- 238000007650 screen-printing Methods 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- 230000009471 action Effects 0.000 description 8
- 238000005096 rolling process Methods 0.000 description 8
- 239000003638 chemical reducing agent Substances 0.000 description 7
- 230000006698 induction Effects 0.000 description 6
- 210000001503 joint Anatomy 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000013072 incoming material Substances 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000005341 toughened glass Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a laser transfer machine which comprises a sheet feeding guide rail, a sheet discharging guide rail, a transfer printing mechanism, an alignment mechanism, a glass mounting mechanism, a laser mechanism and a slurry supplementing mechanism, wherein the sheet feeding guide rail and the sheet discharging guide rail are respectively used for feeding and discharging silicon wafers, the alignment mechanism aligns the glass mounting mechanism with a transfer printing station on the transfer printing mechanism, the slurry supplementing mechanism supplements slurry on the glass mounting mechanism, the glass mounting mechanism is used for fixedly mounting transfer printing glass, and the laser mechanism is used for irradiating the transfer printing glass for printing. The laser transfer machine replaces the existing printing of silk screen and sizing agent, adopts high-energy continuous light beams generated by laser, instantly melts sizing agent in a groove on transfer glass onto a silicon wafer, controls the printing condition by controlling the path of the laser and the transfer glass, reduces damage caused by hard touch, has higher processing speed than silk screen printing, has smooth and flat molding surface, and is suitable for wide use.
Description
Technical Field
The utility model relates to the technical field of silicon wafer printing, in particular to a laser transfer machine.
Background
Photovoltaic solar silicon wafers (hereinafter referred to as silicon wafers) are the core part of a solar power generation system and the most valuable part of the solar power generation system. The silicon chip is used for converting solar energy into electric energy, and the electric energy is stored by a storage battery or directly loaded for working.
In the existing silicon wafer printing equipment, most of the silicon wafer printing equipment is coated with sizing agent on a screen, a scraper is pressed on one side of the screen from top to bottom, and when the scraper moves transversely, the sizing agent penetrates down from a groove of the screen, so that the sizing agent falls on a designated position on a silicon wafer, and a small part of the sizing agent is subjected to laser transfer printing, but the alignment capability is poor, toughened glass and the silicon wafer cannot be aligned, and the sizing agent needs to be manually supplemented, so that the production process and the product qualification rate in the later stage are influenced.
Disclosure of Invention
One object of the present utility model is to: the laser transfer printing machine changes the existing screen printing technology, improves the position alignment accuracy of toughened glass and silicon wafers by the alignment mechanism, can automatically supplement slurry, and prevents slurry shortage or slurry shortage, and has a compact and orderly overall structure for operation.
To achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a laser transfer machine, includes into piece guide rail, goes out piece guide rail, transfer mechanism, counterpoint mechanism, glass installation mechanism, laser mechanism and thick liquids complementary unit, advance the piece guide rail with go out the piece guide rail is located respectively the both sides of transfer mechanism and be used for the business turn over of silicon chip, counterpoint mechanism is in transfer mechanism's top and with glass installation mechanism aligns with the transfer station on the transfer mechanism, thick liquids complementary unit installs the lower extreme of counterpoint mechanism and supplements thick liquids on the glass installation mechanism, glass installation mechanism is in the middle part of thick liquids complementary unit and be used for fixed mounting transfer glass, laser mechanism is located the top of counterpoint mechanism is used for shining transfer glass and prints, and the silicon chip is imported from advancing the piece guide rail, gets into transfer mechanism and shifts to the transfer station in, and the glass installation mechanism that has installed transfer glass in advance begins the location of silicon chip on the transfer station to pass through the adjustment of XYT axle, then laser mechanism shines transfer glass and adheres to thick liquids on thick liquids shaping, and is used for fixedly installing transfer glass to the middle part of thick liquids complementary unit, and is gone out the transfer glass complementary to transfer mechanism to silicon chip after the printing.
As a preferred technical scheme, advance the piece guide rail and include into piece transportation rail and clamping piece wheel subassembly, advance the quantity of piece transportation rail and be three sections, clamping piece wheel subassembly straddles last section advance the middle part of piece transportation rail, advance the lower extreme fixedly connected with of piece transportation rail and advance the piece installation section bar, advance to be provided with on the piece installation section bar and advance the piece wire casing, advance the opening of piece wire casing and be in advance the both ends of piece wire casing, utilize clamping piece wheel subassembly to clap the silicon chip, walk the wire rod that whole piece guide rail needs simultaneously and advance the piece wire casing, guarantee to advance piece transportation rail and clamping piece wheel subassembly at the in-process of work, can not receive the influence of the wire rod of disordered placement, input the carousel mechanism with the silicon chip smoothly and print.
As a preferred technical scheme, transfer mechanism includes the printing carousel, be provided with a plurality of silicon chip stations on the printing carousel, every the below of silicon chip station is provided with the stock form module, the stock form module includes stock form roof, paper feed motor, paper feed axle and paper feed axle, the side of stock form roof is fixed with the stock form curb plate, the outside of stock form curb plate is provided with stock form action wheel and stock form follow the driving wheel, the paper feed motor with one side between the stock form action wheel transmission is connected, the stock form action wheel with be connected with the stock form between the driving wheel transmission of other side the stock form hold-in range, the one end of paper feed axle with one side the stock form follows the driving wheel connection, the one end of paper feed axle with one side the stock form is followed the printing station with the silicon chip that the front guide received, again exports the silicon chip from the back guide rail to install the module additional on the empty station, the stock form motor sends out the stock form and wipes the station of stock form, another motor withdraws the clean of silicon chip.
As a preferred technical scheme, glass installation mechanism includes counterpoint connecting plate, clamping cylinder, glass splint and transfer glass, clamping cylinder is located the both sides of counterpoint connecting plate, clamping cylinder's drive end vertical decurrent and with glass splint fixed connection, glass splint's medial surface with transfer glass's lateral surface is the incline plane, glass splint's lower extreme width is greater than glass splint's upper end width, transfer glass's upper end width is greater than transfer glass's lower extreme width, glass splint's medial surface with transfer glass's lateral surface is laminated each other, adopts toughened glass to print, utilizes the inclined plane laminating that forms between glass both sides and the support piece, holds glass upwards to fix on counterpoint connecting plate, and stability is strong, anti-drop and anti-tilt is effectual.
As a preferred technical scheme, counterpoint mechanism includes counterpoint subassembly fixing base, rendition glass subassembly, X axle locating component and Y axle locating component, be provided with X axle drive arrangement, X axle initiative slide and Y axle driven slide on the X axle locating component, X axle drive arrangement drive X axle initiative slide is in along X axle direction on the X axle locating component, Y axle driven slide is in along Y axle direction slides on the X axle initiative slide, be provided with Y axle drive arrangement, Y axle initiative slide and X axle driven slide on the Y axle locating component, Y axle drive arrangement drive Y axle initiative slide is in along Y axle direction slides on the Y axle locating component, X axle driven slide is in along X axle direction slides on the Y axle initiative slide, X axle driven slide with all install cross bearing pin on the Y axle driven slide, cross bearing pin with the rendition glass subassembly is connected, utilizes the X axle of controlling to coordinate with preceding back Y axle, changes transfer glass's rotation angle, has improved the accurate location glass of material that has also saved, has improved the use ratio of material.
As a preferred technical scheme, laser mechanism includes laser head support, laser head module and Z axle adjustment module, Z axle adjustment module includes Z axle adjustment frame, Z axle adjustment pole and Z axle slide, Z axle adjustment pole rotates on the Z axle adjustment frame, Z axle adjustment pole with Z axle slide threaded connection, Z axle slide is along vertical direction slip on the Z axle adjustment frame, Z axle adjustment frame is fixed on the laser head support, laser head module fixed connection is in on the Z axle slide, through the vertical position of Z axle adjustment module accurate control laser head module, satisfies laser to transfer glass's distance to make transfer glass print better on the silicon chip.
As a preferred technical scheme, slurry supplementing mechanism includes and scrapes the thick liquids mounting panel, scrapes thick liquids sideslip guide rail, scrapes thick liquids lifting unit and scrapes thick liquids subassembly, the both ends of scraping thick liquids sideslip guide rail are connected respectively on two scrape the thick liquids mounting panel, be provided with on the thick liquids mounting panel and scrape thick liquids sideslip subassembly, scrape thick liquids sideslip subassembly drive scrape the thick liquids subassembly and slide on the thick liquids sideslip guide rail, it has a plurality of thick liquids holes to scrape the upper end distribution of thick liquids subassembly, the drive end of scraping thick liquids lifting unit with scrape the thick liquids mounting panel and be connected, follow down and upwards carry out the supplementary thick liquids to transfer glass's lower surface, be convenient for constantly carry out laser transfer printing, improve the supplementary efficiency of thick liquids, guarantee that every piece silicon chip printing back can all carry out once complete paste supplementing action to transfer glass, the printing quality obtains effectual assurance.
As a preferred technical scheme, go out piece guide rail and lift up the subassembly including going out piece transportation rail, lift up the subassembly and including jacking cylinder, jacking crossbearer and jacking platform, the jacking cylinder is fixed go out the lower extreme inside of piece transportation rail, the drive end of jacking cylinder with the middle part of jacking crossbearer is connected, the jacking platform is connected the both sides of jacking crossbearer, the upper end of jacking platform to go out the middle part of piece transportation rail and bend, install the jacking subassembly additional on going out piece transportation rail for when the silicon chip is detected as the broken piece, reject the broken piece, can not reduce production efficiency on the production line under the circumstances that does not influence follow-up intact silicon chip persistence transportation.
The beneficial effects of the utility model are as follows: the utility model provides a laser transfer machine, beat on advancing the piece guide rail and get into transfer mechanism in transferring to the transfer station after, glass installation mechanism of pre-installation transfer glass begins to carry out the location of silicon chip on the transfer station along with counterpoint mechanism, and make transfer glass aim at the silicon chip through XYT axle adjustment, the precision in the transfer process has been improved, then laser mechanism irradiation transfer glass adheres to the shaping on the silicon chip with thick liquids, change current screen printing mode, adopt the high energy continuous beam of laser generation, fuse the thick liquids in the ditch inslot on the transfer glass on the silicon chip in the twinkling of an eye, the process speed is faster than screen printing, the shaping surface of silicon chip is smooth and even, be fit for wide use, and thick liquids replenishment mechanism carries out thick liquids to transfer glass after finishing printing, satisfy continuous uninterrupted production operation flow, transfer mechanism shifts the silicon chip to out the piece guide rail and discharges, each mechanism cooperation is smooth orderly.
Drawings
The utility model is described in further detail below with reference to the drawings and examples.
FIG. 1 is a schematic view of the overall structure of the front side of a laser transfer machine according to an embodiment;
FIG. 2 is a schematic view of the overall structure of the rear side of a laser transfer machine according to an embodiment;
fig. 3 is a schematic structural view of a sheet feeding guide rail according to an embodiment;
FIG. 4 is a schematic view of a clip wheel assembly according to an embodiment;
FIG. 5 is an exploded view of a transfer mechanism according to an embodiment;
FIG. 6 is an exploded view of a roll paper module according to an embodiment;
FIG. 7 is an exploded view of a vision mechanism according to an embodiment;
FIG. 8 is a schematic view of a glass mounting mechanism according to an embodiment;
FIG. 9 is a first exploded view of a glass mounting mechanism according to an embodiment;
FIG. 10 is a second exploded view of the glass mounting mechanism of the present embodiment;
FIG. 11 is an exploded view of an alignment mechanism according to an embodiment;
FIG. 12 is a schematic view of an X-axis positioning assembly according to an embodiment;
FIG. 13 is a schematic view of a Y-axis positioning assembly according to an embodiment;
FIG. 14 is an exploded view of an X-axis positioning assembly according to an embodiment;
FIG. 15 is an exploded view of a Y-axis positioning assembly according to an embodiment;
FIG. 16 is an exploded view of a lifting mechanism according to an embodiment;
FIG. 17 is an exploded view of a laser mechanism according to an embodiment;
FIG. 18 is an exploded view of the slurry replenishing mechanism according to the embodiment;
fig. 19 is a schematic structural view of a slurry replenishing mechanism according to an embodiment;
fig. 20 is a first schematic structural view of a sheet discharging guide rail according to an embodiment;
fig. 21 is a second schematic structural view of the sheet discharging guide rail according to the embodiment.
In fig. 1 to 21:
1. a sheet feeding guide rail; 101. feeding sheet conveying rails; 102. a clip wheel assembly; 103. feeding a sheet mounting section bar; 104. a sheet feeding slot; 105. an opening of the sheet feeding slot; 106. a sheet distance adjusting plate; 107. a sheet feeding sensor; 108. a sheet feeding motor; 109. a feeding driving wheel; 110. a sheet feeding driven wheel; 111. feeding a sheet conveying belt; 112. a clamping piece fixing seat; 113. a clamping piece wheel seat; 114. a clip guide rail; 115. a clip slider; 116. a clip pulley; 117. a clip sensor; 118. a clamping piece induction piece; 119. a clip motor; 120. a clip synchronizing wheel; 121. a clip belt;
2. a transfer mechanism; 201. a printing turntable; 202. a roll paper module; 203. a roll paper top plate; 204. a paper discharge motor; 205. a paper collecting motor; 206. a paper shaft is arranged; 207. a paper collecting shaft; 208. a roll paper side plate; 209. a roll paper driving wheel; 210. a roll paper driven wheel; 211. a roll paper synchronous belt; 212. a roll paper roller; 213. a roll paper speed reducer; 214. a roll paper motor plate; 215. a roll paper tensioning sleeve; 216. a roll paper tensioning wheel; 217. a roll paper bearing; 218. a roll paper lock nut; 219. a roll paper end cover; 220. a roll paper connecting plate; 221. a roller support plate; 222. pneumatic control combination; 223. a turntable cover plate; 224. a left station plate; 225. a right station plate; 226. a turntable motor mount; 227. a turntable motor; 228. a slip ring mounting plate; 229. an electrical slip ring;
3. A vision mechanism; 301. a visual support; 302. a front lens fixing plate; 303. a lens sliding plate; 304. a front camera fixing plate; 305. a board feeding camera; 306. a plate feeding light source; 307. a rear lens holder; 308. a rear camera fixing plate; 309. a board discharging camera; 310. a plate feeding static removing assembly; 311. a table top dust removing air knife; 312. a roll paper dust-removing air knife;
4. a glass mounting mechanism; 401. aligning the connecting plates; 402. a clamping cylinder; 403. a glass clamping plate; 404. transferring glass; 405. an inclined plane; 406. a cylinder mounting plate; 407. a glass front baffle; 408. a glass back plate; 409. a glass sensor; 410. a cross bearing pin;
5. an alignment mechanism; 501. the alignment assembly fixing seat; 502. transferring the glass assembly; 503. an X-axis positioning assembly; 504. a Y-axis positioning assembly; 505. an X-axis driving sliding seat; 506. a Y-axis driven slide carriage; 507. y-axis driving sliding seat; 508. an X-axis driven slide carriage; 509. a drag chain; 510. y-axis cavity position; 511. an X-axis cavity position; 512. the air cylinder air distribution assembly; 513. a Y-axis motor; 514. a Y-axis screw; 515. a Y-axis nut; 516. an X-axis motor; 517. an X-axis nut; 518. y-axis active sliding rail; 519. a Y-axis active sliding block; 520. x-axis active sliding rail; 521. an X-axis active sliding block; 522. x-axis driven slide rail; 523. x-axis driven sliding block; 524. y-axis driven slide rail; 525. y-axis driven sliding blocks;
6. A lifting mechanism; 601. lifting a base; 602. lifting the top seat; 603. a lifting motor; 604. a screw nut; 605. lifting the screw rod; 606. lifting synchronous wheels; 607. lifting a synchronous belt; 608. a lifting bearing; 609. a height detector;
7. a laser mechanism; 701. a laser head bracket; 702. a laser head module; 703. a Z-axis adjusting module; 704. a Z-axis adjusting frame; 705. a Z-axis adjusting rod; 706. a Z-axis sliding plate; 707. adjusting the fixing plate; 708. a laser head fixing plate; 709. a laser head connecting plate; 710. reinforcing ribs; 711. a displacement digital screen display; 712. an adjusting hand wheel;
8. a slurry replenishing mechanism; 801. a slurry scraping mounting plate; 802. scraping the slurry and transversely moving the guide rail; 803. a slurry scraping assembly; 804. a slurry outlet hole; 805. a slurry scraping motor plate; 806. a slurry scraping vertical movement motor; 807. a slurry scraping ball screw; 808. a slurry scraping connecting plate; 809. vertically moving the guide rail by the slurry scraping; 810. a sizing agent scraping transverse moving motor; 811. a slurry scraping synchronous wheel; 812. a slurry scraping driving shaft; 813. scraping a slurry synchronous belt; 814. a slurry scraping speed reducer; 815. a tensioning wheel; 816. a slurry inlet hole; 817. a safety shield;
9. a sheet discharging guide rail; 901. a sheet discharging transportation rail; 902. jacking the air cylinder; 903. jacking a transverse frame; 904. a jacking table; 905. a sheet discharging induction frame; 906. a sheet-out sensor; 907. a piece-discharging support column; 908. a piece-out mounting section bar; 909. a sheet outlet slot; 910. a sheet discharging distance adjusting plate; 911. and a material feeding sensor.
Detailed Description
The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.
As shown in fig. 1 to 2, in the present embodiment, a laser transfer machine includes a sheet feeding guide rail 1, a sheet discharging guide rail 9, a transfer mechanism 2, an alignment mechanism 5, a glass mounting mechanism 4, a laser mechanism 7, a paste replenishment mechanism 8, a vision mechanism 3 and a lifting mechanism 6, wherein the sheet feeding guide rail 1 and the sheet discharging guide rail 9 are respectively located at both sides of the transfer mechanism 2 and used for the in-and-out of a silicon wafer, the vision mechanism 3 is located above the transfer mechanism 2 and used for detecting the in-and-out of the silicon wafer, the lifting mechanism 6 is located below the transfer mechanism 2 and used for controlling the height of the alignment mechanism 5, the alignment mechanism 5 is located above the transfer mechanism 2 and aligns the glass mounting mechanism 4 with a transfer station on the transfer mechanism 2, the paste replenishment mechanism 8 is mounted at the lower end of the alignment mechanism 5 and supplements the paste on the glass mounting mechanism 4, the glass mounting mechanism 4 is located at the middle of the paste mechanism 8 and used for fixedly mounting the transfer glass, the glass mounting mechanism 7 is located above the transfer mechanism 404 and used for printing the glass on the upper side of the transfer mechanism 404.
The silicon chip is input from a chip feeding guide rail 1, the silicon chip enters a transfer mechanism 2 after being detected by a broken chip of a visual mechanism 3 and is transferred to a transfer station, a glass mounting mechanism 4 pre-mounted with transfer glass 404 starts to position the silicon chip on the transfer station along with an alignment mechanism 5, the transfer glass 404 is aligned to the silicon chip through adjustment of an XYT shaft, a lifting mechanism 6 controls the glass mounting mechanism 4 to be close to the silicon chip, then a laser mechanism 7 irradiates the transfer glass 404 to attach slurry to the silicon chip for forming, a slurry supplementing mechanism 8 supplements the slurry to the transfer glass 404 after printing is finished, and the transfer mechanism 2 transfers the silicon chip to a chip discharging guide rail 9 for discharging.
As shown in fig. 3, the feeding guide rail 1 comprises a feeding transport rail 101 and a clamping piece wheel assembly 102, the feeding transport rail 101 is three sections, the clamping piece wheel assembly 102 spans the middle of the feeding transport rail 101 of the last section, the lower end of the feeding transport rail 101 is fixedly connected with a feeding installation section bar 103, the feeding installation section bar 103 is provided with a feeding slot 104, and openings 105 of the feeding slot are arranged at two ends of the feeding slot 104.
The number of the film feeding transportation rails 101 is three, the clamping piece wheel assemblies 102 are positioned on the film feeding transportation rail 101 at the last section, the number of the sections of the film feeding transportation rail 101 is increased or reduced according to the actual butt joint front-end equipment or mechanism, the clamping piece wheel assemblies 102 are only required to be installed at the position of the turntable mechanism at the rear of the last butt joint for film shooting, and because the film feeding transportation rail 101 and the clamping piece wheel assemblies 102 all need an electric mechanism, wires in the aspect of electric control are hidden in the film feeding wire grooves 104, the fact that the wires cannot be randomly placed is ensured, the conveying work of the film feeding transportation rail 101 and the film shooting work of the clamping piece wheel assemblies 102 are influenced, the length direction of the film feeding wire grooves 104 is parallel to the conveying direction of the film feeding transportation rail 101, and the trend of the wires is from one end opening of the film feeding wire grooves 104 to the other end opening of the film feeding wire grooves 104.
The side of advance piece installation section bar 103 is provided with into piece distance adjusting plate 106, according to the butt joint requirement of difference, advances piece distance adjusting plate 106 effect under with whole advance piece guide rail 1's position and adjusts, satisfies the butt joint requirement under the different circumstances.
The middle part of the feeding transportation rail 101 is provided with a feeding sensor 107, a silicon wafer moves on the feeding transportation rail 101 and is sensed by the feeding sensor 107, so that transportation work can be carried out, otherwise, the feeding transportation rail 101 of the section can not move, and workers can conveniently check when abnormality occurs.
Each section of sheet feeding conveying rail 101 is provided with a sheet feeding motor 108, two ends of the sheet feeding conveying rail 101 are respectively connected with a sheet feeding driving wheel 109 and a sheet feeding driven wheel 110 in a rotating mode, the driving end of the sheet feeding motor 108 is connected with the middle of the sheet feeding driving wheel 109, a sheet feeding conveying belt 111 is connected between the sheet feeding driving wheel 109 and the sheet feeding driven wheel 110, and the sheet feeding motor 108 is responsible for providing power to the sheet feeding driving wheel 109 and is matched with the sheet feeding driven wheel 110, so that silicon wafers are continuously conveyed backwards on the sheet feeding conveying belt 111.
As shown in fig. 4, the clip assembly is further arranged on the clip feeding guide rail 1, and comprises a clip fixing seat 112, two groups of clip wheel seats 113 and a clip guide rail 114, wherein the clip guide rail 114 is fixed on the clip fixing seat 112, the lower ends of the two groups of clip wheel seats 113 are respectively provided with a clip slider 115, the clip sliders 115 slide on the clip guide rail 114, the two groups of clip wheel seats 113 are oppositely or back-moved on the clip fixing seat 112, the upper ends of the clip wheel seats 113 are provided with clip pulleys 116, and the clip pulleys 116 are distributed on the same clip wheel seat 113 at equal intervals.
When the silicon wafer is moved to the clamping piece assembly, the clamping piece wheel seats 113 on two sides are turned into a close state from a far state under the mutual sliding of the clamping piece sliding blocks 115 and the clamping piece guide rails 114, namely, the silicon wafer is moved in opposite directions, edges on two sides of the silicon wafer are flattened through the clamping piece pulleys 116 in rolling contact, so that the silicon wafer is positioned in the center of a conveying route, the conveying direction and the conveying position of the silicon wafer are ensured, then the clamping piece wheel seats 113 on two sides are moved back to the outermost position, after the flattened silicon wafer is transferred away, a new silicon wafer is conveyed, and the flattening action is repeated.
The clamping piece sensor 117 is fixed on the clamping piece fixing seat 112, the clamping piece sensing piece 118 is arranged on the clamping piece wheel seat 113, the clamping piece sensing piece 118 is in signal connection with the clamping piece sensor 117, and when the clamping piece wheel seat 113 performs shooting and resetting again, the clamping piece sensing piece 118 moves to enable the clamping piece sensor 117 to sense the limit position of the clamping piece wheel seat 113, so that the shooting time is intelligently controlled.
The clamping piece motor 119 is installed on the clamping piece fixing seat 112, the clamping piece synchronous wheel 120 is connected to the driving end of the clamping piece motor 119 in a transmission mode, the clamping piece synchronous wheel 120 rotates on the clamping piece fixing seat 112, the clamping piece belt 121 is transmitted between the clamping piece synchronous wheels 120, the lower end of the clamping piece wheel seat 113 is fixed on the clamping piece belt 121, when shooting is positioned, the clamping piece motor 119 controls the clamping piece synchronous wheel 120 to rotate, and the clamping piece wheel seat 113 is driven to move through the clamping piece belt 121, so that the clamping piece pulley 116 clamps and levels a silicon wafer on the conveying mechanism.
Each clamping piece wheel seat 113 is provided with three clamping piece pulleys 116, the three clamping piece pulleys 116 on the same side are distributed along the straight line direction, the three clamping piece pulleys 116 on each side apply thrust to the side edge of the silicon wafer simultaneously, under the condition that the distances are equal, the silicon wafer is more accurately aligned, the clamping piece pulleys 116 with the number of two, four, five, six and the like can be arranged according to the length of the silicon wafer, and the clamping piece pulleys 116 with the larger or smaller diameter size can also be arranged according to the width of the silicon wafer to be matched.
As shown in fig. 5 to 6, specifically, the transfer mechanism 2 includes a printing turntable 201, a plurality of silicon wafer stations are disposed on the printing turntable 201, a roll paper module 202 is disposed below each silicon wafer station, the roll paper module 202 includes a roll paper top plate 203, a paper discharging motor 204, a paper collecting motor 205, a paper discharging shaft 206 and a paper collecting shaft 207, a roll paper side plate 208 is fixed on a side edge of the roll paper top plate 203, the paper discharging motor 204 and the paper collecting motor 205 are both mounted on the roll paper side plate 208, a roll paper driving wheel 209 and a roll paper driven wheel 210 are disposed on an outer side of the roll paper side plate 208, the paper discharging motor 204 is in transmission connection with the roll paper driving wheel 209 on one side, the paper collecting motor 205 is in transmission connection with the roll paper driving wheel 209 on the other side, a roll paper synchronous belt 211 is in transmission connection between the roll paper driving wheel 209 and the roll paper driven wheel 210, one end of the paper discharging shaft 206 is connected with the roll paper driven wheel 210 on the other side, and one end of the paper collecting shaft 207 is connected with the roll paper driven wheel 210 on the other side, and a roll paper roller 212 is fixed on the front end of the roll paper side plate 208.
The paper discharge motor 204 controls the paper discharge shaft 206 to discharge the rolled wiping paper through the rotation of the paper rolling driving wheel 209 and the paper rolling driven wheel 210 on one side, and the wiping paper passes through the station where the silicon wafers are placed after passing through the rolling roller and upwards sweeps, then the wiping paper is wound back to the lower side, and the wiping paper is wound and stored on the paper collection shaft 207 through the rotation of the paper rolling driving wheel 209 and the paper rolling driven wheel 210 on the other side by the paper collection motor 205, so that the silicon wafer station can be cleaned after printing each time.
A roll paper speed reducer 213 is arranged between the driving end of the paper collecting motor 205 and the roll paper driving wheel 209, and between the driving end of the paper discharging motor 204 and the roll paper driving wheel 209, a roll paper motor plate 214 is fixed on the outer side of the roll paper side plate 208, the paper collecting motor 205 and the paper discharging motor 204 are respectively fixed on the roll paper motor plates 214 on the two sides, and in a driving structure, the paper collecting motor 205 and the paper discharging motor 204 are both decelerated through the roll paper speed reducer 213, and then power is transmitted to the rolling shafts.
The reel driving wheel and the reel driven wheel 210 are respectively provided with a reel tensioning sleeve 215, the reel side plate 208 is provided with a reel tensioning wheel 216, the reel tensioning wheel 216 is in rolling connection with the reel synchronous belt 211, a reel bearing 217 is respectively arranged between the reel driving wheel 209 and the reel side plate 208 and between the reel driven wheel 210 and the reel side plate 208, a reel locking nut 218 is arranged on the outer side of the reel bearing 217, a reel end cover 219 is arranged between the reel bearing 217 and the reel locking nut 218, the reel tensioning sleeve 215 and the reel tensioning wheel 216 can be kept in a tightening and stable state in order to control components in the moving process, the reel bearing 217 can not be loosened and offset, friction generated by movement is reduced, and the reel end cover 219 and the reel locking nut 218 are used for jacking. .
A roll paper connecting plate 220 is connected between the two roll paper side plates 208, a roll paper supporting plate 221 is fixed at the front end of the roll paper connecting plate 220, the end part of the roll paper roll shaft 212 rotates on the roll paper supporting plate 221, and the roll paper roll shaft 212 is driven by the roll paper supporting plate 221 to guide wiping paper.
The printing turntable 201 is provided with a pneumatic control assembly 222, the pneumatic control assembly 222 is covered with a turntable cover plate 223, the pneumatic control assembly 222 is used for connecting components such as an air pipe, and the like, and the turntable cover plate 223 is covered for protection.
The quantity of silicon wafer stations is four, four silicon wafer stations equidistant distribution is in the border of printing carousel 201, every silicon wafer station all has left station board 224 and right station board 225, the below of printing carousel 201 is provided with carousel motor seat 226, the middle part of carousel motor seat 226 is provided with carousel motor 227, the drive end of carousel motor 227 is connected at the middle part of printing carousel 201, the below of carousel motor seat 226 is provided with slip ring mounting panel 228, the middle part of slip ring mounting panel 228 is provided with electric slip ring 229, electric slip ring 229 is connected with carousel motor 227.
And printing two half silicon wafers at a time, connecting the front end guide rail with a silicon wafer station, connecting the printing position with a silicon wafer station, connecting the rear end guide rail with a silicon wafer station, cleaning wiping paper on an empty silicon wafer station, and carrying out empty printing on the rotation of the turntable 201 by the turntable motor 227 in the whole process, wherein the electric slip ring 229 brings electric quantity to the turntable motor 227.
As shown in fig. 7, a vision mechanism 3 is disposed above the transfer mechanism 2, the vision mechanism 3 includes a vision bracket 301, a front lens fixing plate 302 is disposed on the front side of the vision bracket 301, a lens sliding plate 303 is fixed on the upper end of the front lens fixing plate 302, a front camera fixing plate 304 is connected to the lens sliding plate 303 in a sliding manner, an in-board camera 305 and an in-board light source 306 are fixed on the front camera fixing plate 304, a rear lens fixing frame 307 is disposed on the rear side of the vision bracket 301, a rear camera fixing plate 308 is laterally slid on the rear lens fixing frame 307, and an out-board camera 309 is fixed on the rear camera fixing plate 308.
The plate feeding and static removing assembly 310 positioned in front of the vision mechanism 3 firstly removes static electricity from the silicon wafers fed by the plate feeding guide rail 1, then the plate feeding light source 306 lights, the four plate feeding cameras 305 respectively photograph the two half silicon wafers, the table dust removing air knife 311 removes dust from the transfer mechanism 2 after confirmation, the roll dust removing air knife 312 removes dust from the wiping paper, the wiping paper wipes the cleaning silicon wafer station, then transfer is carried out, the transfer is finished, the two plate discharging cameras 309 respectively break and detect the two half silicon wafers, and the intact silicon wafers are continuously conveyed out to the plate discharging guide rail 9 and discharged.
As shown in fig. 8 to 10, the glass mounting mechanism 4 includes an alignment connection plate 401, a clamping cylinder 402, a glass clamping plate 403 and a transfer glass 404, the clamping cylinder 402 is located at two sides of the alignment connection plate 401, the driving end of the clamping cylinder 402 is vertically downward and fixedly connected with the glass clamping plate 403, the inner side surface of the glass clamping plate 403 and the outer side surface of the transfer glass 404 are both inclined planes 405, the width of the lower end of the glass clamping plate 403 is greater than the width of the upper end of the glass clamping plate 403, the width of the upper end of the transfer glass 404 is greater than the width of the lower end of the transfer glass 404, and the inner side surface of the glass clamping plate 403 and the outer side surface of the transfer glass 404 are mutually attached.
Before the transfer glass 404 is installed, the driving end of the clamping cylinder 402 extends out, so that the glass clamping plate 403 moves to the bottommost position downwards, the transfer glass 404 is pushed into a space reserved by the glass clamping plate 403 from the front horizontally, the two sides of the glass clamping plate are attached to each other by means of the inclined planes 405 to keep a horizontal state, after the transfer glass 404 completely enters the lower part of the alignment connection plate 401, the clamping cylinder 402 contracts the driving end, the glass clamping plate 403 is pulled upwards, the transfer glass 404 is jacked upwards and fixed on the alignment connection plate 401 under the action of the inclined planes 405, and transfer printing actions are facilitated.
Specifically, the lower end of the alignment connection plate 401 is fixed with a cylinder mounting plate 406, the fixed end of the clamping cylinder 402 is fixed on the cylinder mounting plate 406, the side edge of the upper surface of the transfer glass 404 is attached to the lower end of the cylinder mounting plate 406, and when the transfer glass 404 is fixed, the transfer glass 404 is pressed on the cylinder mounting plate 406, that is, fixed with the alignment connection plate 401.
The glass front baffle 407 is arranged below the front end of the cylinder mounting plate 406, the glass front baffle 407 is blocked at the front two sides of the transfer glass 404, the glass rear baffle 408 is arranged at one side of the rear end of the glass clamping plate 403, the glass rear baffle 408 is blocked at the rear two sides of the transfer glass 404, the glass sensor 409 is arranged at the other side of the rear end of the glass clamping plate 403, the glass sensor 409 is in signal connection with the transfer glass 404, when the clamping cylinder 402 stretches out of the driving end, the glass front baffle 407 is positioned on the cylinder mounting plate 406, the entering of the transfer glass 404 cannot be blocked, after the transfer glass 404 is arranged, the rear is blocked at the position of the transfer glass 404 by the glass rear baffle 408, the distance is controlled, when the glass sensor 409 senses the transfer glass 404, the clamping cylinder 402 is used for controlling the transfer glass 404 to lift, and the front is blocked and fixed by the glass front baffle 407 on the cylinder mounting plate 406, and the front, back and forth stability is completed.
The alignment plate 401 is rotatably connected with a cross bearing pin 410, and the cross bearing pin 410 is used for aligning the alignment plate 401.
As shown in fig. 11 to 15, specifically, the alignment mechanism 5 includes an alignment component fixing seat 501, a transfer glass component 502, an X-axis positioning component 503 and a Y-axis positioning component 504, wherein the X-axis positioning component 503 and the Y-axis positioning component 504 are all mounted on the alignment component fixing seat 501, the transfer glass component 502 is located below the alignment component fixing seat 501, the X-axis positioning component 503 is provided with an X-axis driving device, an X-axis driving sliding seat 505 and a Y-axis driven sliding seat 506, the X-axis driving device drives the X-axis driving sliding seat 505 to slide on the X-axis positioning component 503 along the X-axis direction, the Y-axis driven sliding seat 506 to slide on the X-axis driving sliding seat 505 along the Y-axis direction, the Y-axis positioning component 504 is provided with a Y-axis driving device, a Y-axis driving sliding seat 507 and an X-axis driven sliding seat 508 along the Y-axis direction, the X-axis driven sliding seat 508 and the Y-axis driven sliding seat 506 are both mounted with cross bearing pins 410, and the cross bearing pins 410 are connected with the transfer glass component 502.
When the position of the transfer glass 404 needs to be adjusted, the X-axis driving sliding seat 505 is simply controlled by the X-axis driving device to slide on the X-axis positioning assembly 503 in the X-axis direction, and the X-axis driven sliding seat 508 is assisted to slide on the Y-axis driving sliding seat 507; in the Y-axis direction, the Y-axis driving slide seat 507 is simply controlled by the Y-axis driving device to slide on the Y-axis positioning assembly 504, so that the Y-axis driven slide seat 506 is assisted to slide on the X-axis driving slide seat 505; in the direction of the T axis, the X axis driving device and the Y axis driving device are required to be controlled together, and the cross bearing pin 410 is additionally arranged to rotate, so that the rotation of the angle of the transfer glass 404 is controlled, and the corresponding printing of the transfer glass 404 and the silicon wafer on the vertical position is satisfied.
The number of the X-axis positioning components 503 is four, the number of the Y-axis positioning components 504 is two, the number of the transfer glass components 502 is two, the two groups of X-axis positioning components 503 and the group of Y-axis positioning components 504 control the alignment of one group of transfer glass components 502, the two groups of X-axis positioning components 503 and the group of Y-axis positioning components 504 can replace the T-axis positioning components to adjust the angle of the transfer glass 404 on one side, the lower half piece of silicon wafer is aligned on the XYT, and the two groups of X-axis positioning components 503 and the group of Y-axis positioning components 504 on the other side are similar to each other.
Two sides of the alignment component fixing seat 501 are respectively provided with a Y-axis cavity position 510, the front side and the rear side of the alignment component fixing seat 501 are respectively provided with two X-axis cavity positions 511, the X-axis positioning component 503 is inserted into the X-axis cavity positions 511, the Y-axis positioning component 504 is inserted into the Y-axis cavity positions 510, and the two Y-axis cavity positions 510 and the X-axis cavity positions 511 are matched to control alignment of one half silicon wafer, so that the control of the transfer glass 404 is more stable and can not incline to one side.
The Y-axis driving device comprises a Y-axis motor 513, a Y-axis screw 514 and a Y-axis nut 515, wherein the driving end of the Y-axis motor 513 is connected with the Y-axis screw 514, the Y-axis nut 515 is arranged on the Y-axis driving sliding seat 507, and the Y-axis screw 514 is in threaded transmission connection with the Y-axis nut 515; the X-axis driving device comprises an X-axis motor 516, an X-axis screw rod and an X-axis nut 517, wherein the driving end of the X-axis motor 516 is connected with the X-axis screw rod, the X-axis nut 517 is arranged on the X-axis driving slide block 505, and the X-axis screw rod is in threaded transmission connection with the X-axis nut 517.
The transfer glass 404 is controlled to perform the X-axis direction, the Y-axis direction and the T-axis direction, and the power sources are an X-axis motor 516 and a Y-axis motor 513, which are controlled by the transmission of an X-axis screw and an X-axis nut 517 and the transmission of a Y-axis screw 514 and a Y-axis nut 515, respectively.
In the structure of active sliding adjustment, a Y-axis active sliding rail 518 is arranged on the Y-axis positioning component 504, a Y-axis active sliding block 519 is arranged on the Y-axis active sliding seat 507, and the Y-axis active sliding block 519 slides on the Y-axis active sliding rail 518; the X-axis positioning component 503 is provided with an X-axis driving sliding rail 520, the X-axis driving sliding seat 505 is provided with an X-axis driving sliding block 521, and the X-axis driving sliding block 521 slides on the X-axis driving sliding rail 520.
In the structure of the driven sliding adjustment, an X-axis driven sliding rail 522 is arranged on the Y-axis driving sliding seat 507, an X-axis driven sliding block 523 is arranged on the X-axis driven sliding seat 508, and the X-axis driven sliding block 523 slides on the X-axis driven sliding rail 522; the X-axis driving slide block 505 is provided with a Y-axis driven slide rail 524, the Y-axis driven slide block 506 is provided with a Y-axis driven slide block 525, and the Y-axis driven slide block 525 slides on the Y-axis driven slide rail 524.
The driving control and the driven control are connected with the sliding block and the sliding rail, so that the friction force is reduced, and meanwhile, the linear guide is performed, and the control is more convenient.
The upper end of counterpoint subassembly fixing base 501 installs cylinder minute gas row subassembly 512 and tow chain 509, and cylinder minute gas row subassembly 512 connects the pneumatic element of transfer glass subassembly 502, and the wire rod of X axle locating component 503 and Y axle locating component 504 has been arranged to the inside of tow chain 509, and the wire rod can not be disordered to pneumatic element's control and maintenance also can concentrate on cylinder minute gas row subassembly 512.
As shown in fig. 16, more importantly, a lifting mechanism 6 is adopted in the alignment, the lifting mechanism 6 comprises a lifting base 601, a lifting top seat 602 and a lifting motor 603, the lifting motor 603 is fixed on the lifting base 601, a screw nut 604 is installed on the periphery of the lifting base 601, a lifting screw 605 is connected to the screw nut 604 in a threaded manner, lifting synchronous wheels 606 are arranged at the lower end of the lifting screw 605 and the driving end of the lifting motor 603, a lifting synchronous belt 607 is connected between the lifting synchronous wheels 606 in a transmission manner, a lifting bearing 608 is installed on the lifting top seat 602, the upper end of the lifting screw 605 penetrates through the lifting bearing 608 and is in sliding connection with the lifting bearing 608, the upper end of the lifting screw 605 is connected with the lower end of the alignment mechanism 5 and is connected with the lower end of the glass mounting mechanism 4, the height of the transfer glass 404 is controlled, and a height detector 609 is further arranged at the top.
As shown in fig. 17, the laser mechanism 7 includes a laser head holder 701, a laser head module 702, and a Z-axis adjustment module 703, the Z-axis adjustment module 703 includes a Z-axis adjustment frame 704, a Z-axis adjustment lever 705, and a Z-axis slide plate 706, the Z-axis adjustment lever 705 rotates on the Z-axis adjustment frame 704, the Z-axis adjustment lever 705 is screwed with the Z-axis slide plate 706, the Z-axis slide plate 706 slides on the Z-axis adjustment frame 704 along the vertical direction, the Z-axis adjustment frame 704 is fixed on the laser head holder 701, and the laser head module 702 is fixedly connected on the Z-axis slide plate 706.
After the alignment mechanism 5 positions the silicon wafer, the Z-axis adjusting rod 705 is rotated, so that the Z-axis sliding plate 706 moves downwards to drive the laser head module 702 to be close to the transfer glass 404 on the alignment mechanism 5 downwards for laser transfer printing, after printing is finished, the Z-axis adjusting rod 705 is reversely rotated, so that the Z-axis sliding plate 706 is reset to the highest position upwards, the laser head module 702 is far away from the alignment mechanism 5, the alignment mechanism 5 is convenient to adjust the next silicon wafer, the laser head module 702 cannot be collided, and the operation is repeated to print the silicon wafer.
The Z-axis sliding plate 706 is fixedly provided with an adjusting and fixing plate 707, two sides of the adjusting and fixing plate 707 are fixedly connected with a laser head fixing plate 708, two sides of the laser head module 702 are locked on the laser head fixing plate 708, the front side of the laser head fixing plate 708 and the rear side of the laser head fixing plate 708 are fixedly connected with a laser head connecting plate 709, the laser head connecting plate 709 clamps the laser head module 702, the Z-axis sliding plate 706 and the laser head fixing plate 708 are connected through the adjusting and fixing plate 707, and the frame structure formed by the laser head connecting plate 709 and the laser head fixing plate 708 is used for protecting the laser head module 702.
The reinforcing rib 710 is connected between the upper end of the laser head fixing plate 708 and the adjusting fixing plate 707, and the existence of the reinforcing rib 710 enables the frame structure formed by the laser head fixing plate 708 and the laser head connecting plate 709 to be more stable, and the service life of the frame structure is prolonged.
The Z-axis adjusting frame 704 is fixedly provided with a displacement digital screen display 711, the displacement digital screen display 711 is connected with a Z-axis adjusting rod 705 through a signal, the top of the Z-axis adjusting rod 705 is provided with an adjusting hand wheel 712, when the Z-axis adjusting rod 705 is controlled, the adjusting hand wheel 712 is adopted to rotate for convenient control, and the lifting height is displayed on the displacement digital screen display 711, so that the observation is convenient.
As shown in fig. 18 to 19, the slurry replenishing mechanism 8 includes a slurry mounting plate 801, a slurry transverse guide rail 802, a slurry lifting assembly and a slurry scraping assembly 803, two ends of the slurry transverse guide rail 802 are respectively connected to the two slurry mounting plates 801, the slurry transverse assembly is arranged on the slurry mounting plate 801, the slurry transverse assembly is driven to slide on the slurry transverse guide rail 802, a plurality of slurry outlet holes 804 are distributed at the upper end of the slurry assembly 803, and the driving end of the slurry lifting assembly is connected with the slurry mounting plate 801.
When the slurry on the transfer glass 404 is insufficient, the slurry scraping lifting assembly controls the slurry scraping mounting plate 801 to lift upwards, so that the slurry scraping assembly 803 is close to the lower part of the transfer glass 404, the slurry scraping assembly controls the slurry scraping assembly 803 to move from one end of the slurry scraping transverse guide rail 802 to the other end, and slurry discharging holes 804 on the slurry scraping assembly 803 continuously supply slurry in the process of moving the slurry scraping assembly 803, so that the slurry can be replenished in the grooves with the insufficient slurry.
The slurry lifting assembly comprises a slurry motor plate 805, a slurry vertical movement motor 806, a slurry ball screw 807 and a slurry connecting plate 808, wherein the slurry vertical movement motor 806 is fixed on the slurry motor plate 805, the driving end of the slurry vertical movement motor 806 is in transmission connection with the slurry ball screw 807, the slurry ball screw 807 is in threaded connection with the slurry connecting plate 808, a slurry vertical movement guide rail 809 is arranged on the slurry motor plate 805 along the vertical direction, and the slurry connecting plate 808 slides on the slurry vertical movement guide rail 809.
In the vertical direction, the paste vertical movement motor 806 transmits rotating power to the paste ball screw 807, so that the paste ball screw 807 rotates, the paste connecting plate 808 which is in threaded transmission with the paste ball screw 807 rises upwards under the action of the paste vertical movement guide rail 809, so that the paste assembly 803 moves upwards along with the paste mounting plate 801, the paste assembly 803 can be close to the transfer glass 404 for feeding, and after feeding, the paste assembly 803 descends downwards and moves to a position which does not affect printing of the transfer glass 404.
The sizing agent sideslip subassembly is including scraping sizing agent sideslip motor 810, scrape sizing agent synchronizing wheel 811 and scraping sizing agent driving shaft 812, scrape sizing agent sideslip motor 810 and install on scraping sizing agent mounting panel 801, scrape sizing agent synchronizing wheel 811 and scrape sizing agent driving shaft 812 and all rotate and connect on scraping sizing agent mounting panel 801, the drive end of scraping sizing agent sideslip motor 810 is connected with scraping sizing agent driving shaft 812 transmission, the transmission is connected with between scraping sizing agent synchronizing wheel 811 and the sizing agent driving shaft 812 and scrapes sizing agent hold-in range 813, scrape sizing agent hold-in range 813 and connect between two scraping sizing agent mounting panels 801, the both ends of scraping sizing agent subassembly 803 are fixed respectively on the sizing agent hold-in range 813 of both sides.
During feeding, the slurry scraping transverse moving motor 810 controls the slurry scraping driving shaft 812 to rotate through the belt, and under the action of the slurry scraping synchronous belt 813 and the slurry scraping synchronous wheel 811, the slurry scraping synchronous belt 813 drives the slurry scraping assembly 803 to transversely move for feeding, so that complete materials can be fed to all grooves on the transfer glass 404.
More specifically, a slurry scraping speed reducer 814 is connected to the driving end of the slurry scraping and moving motor 810, the slurry scraping speed reducer 814 is in belt transmission connection with a slurry scraping driving shaft 812, a tensioning wheel 815 is rotatably connected to the slurry scraping and moving plate 801, the tensioning wheel 815 is located between the slurry scraping and moving synchronous wheels 811, the tensioning wheel 815 is in transmission connection with the slurry scraping and moving synchronous belt 813, the rotating speed is reduced from the driving end of the slurry scraping and moving motor 810 to the slurry scraping speed reducer 814, the slow speed of the slurry scraping and moving assembly 803 in the transverse direction is met, and the completion of slurry filling is guaranteed.
One end of the slurry scraping component 803 is provided with a slurry inlet hole 816, slurry is continuously input into the slurry scraping component 803 from the slurry inlet hole 816, the slurry is not interrupted, and resources for manually feeding the slurry are saved.
The outside of scraping thick liquids mounting panel 801 is provided with safety shield 817, and safety shield 817 cladding scrapes thick liquids sideslip subassembly, and under the protection of safety shield 817, the transmission operation of scraping thick liquids sideslip subassembly can not receive external influence, goes on smoothly.
As shown in fig. 20 to 21, the last sheet discharging guide rail 9 includes a sheet discharging transport rail 901 and a jacking assembly, the jacking assembly includes a jacking cylinder 902, a jacking cross frame 903 and a jacking table 904, the jacking cylinder 902 is fixed inside the lower end of the sheet discharging transport rail 901, the driving end of the jacking cylinder 902 is connected with the middle part of the jacking cross frame 903, the jacking table 904 is connected on two sides of the jacking cross frame 903, and the upper end of the jacking table 904 is bent towards the middle part of the sheet discharging transport rail 901.
After the silicon wafers printed by the transfer mechanism 2 enter the wafer discharging transportation rail 901, if the damaged silicon wafers or the poorly printed silicon wafers are found to exist after detection, the jacking cylinder 902 starts to work, the jacking cross frame 903 is jacked vertically upwards, the jacking platforms 904 on two sides of the jacking cross frame 903 are jacked, the jacking platforms 904 which are originally lower than the wafer discharging transportation rail 901 are lifted to exceed the height of the wafer discharging transportation rail 901, the silicon wafers on the wafer discharging transportation rail 901 are jacked, and at the moment, the wafer discharging transportation rail 901 can continue to smoothly pass through the rest silicon wafers, and the transportation of other silicon wafers cannot be affected.
The side of going out piece transportation rail 901 is provided with out piece induction frame 905, goes out the upper end of piece induction frame 905 and installs out piece inductor 906, goes out piece inductor 906 and is in the middle part top of going out piece transportation rail 901 to, go out piece transportation rail 901's quantity and be four sections, go out piece induction frame 905 and be located the one side of last section's play piece transportation rail 901, the jacking subassembly is in last section's play piece transportation rail 901, the silicon chip of carrying in the place ahead, after detecting as qualified, reach on last section's play piece transportation rail 901, go out piece inductor 906 and responded to having the silicon chip, carry out butt joint receiving with signal butt joint follow-up mechanism or equipment.
The lower part of the sheet conveying rail 901 is provided with a sheet outlet support column 907, the upper end of the sheet outlet support column 907 is transversely provided with a sheet outlet installation section 908, the sheet outlet installation section 908 is provided with a sheet outlet wire slot 909, and wires and air pipes adopted on the whole sheet outlet guide rail 9 are all arranged in the sheet outlet wire slot 909, so that the wires and the air pipes cannot be placed outside in a disordered manner, and the movement of each part is influenced.
The side of the outgoing sheet mounting section 908 is provided with an outgoing sheet distance adjusting plate 910, and the assembly position of the outgoing sheet mounting section 908 is controlled according to the position of the transfer printing and subsequent docking mechanism and the length of the silicon wafer, and is determined by the locking position of the outgoing sheet distance adjusting plate 910.
The outer sides of the first section and the second section of slice discharging transportation rail 901 are respectively provided with an incoming material sensor 911, the induction direction of the incoming material sensor 911 points to the middle part of the slice discharging transportation rail 901, and the incoming material sensors 911 are arranged on the slice discharging transportation rail 901 at the two ends of the front end, so that silicon slices are detected when passing through, otherwise, the slice discharging transportation rail 901 does not work.
It should be noted that the above embodiments are merely preferred embodiments of the present utility model and the applied technical principles, and any changes or substitutions easily conceivable to those skilled in the art within the scope of the present utility model are included in the scope of the present utility model.
Claims (8)
1. The utility model provides a laser transfer machine, its characterized in that includes into piece guide rail, goes out piece guide rail, transfer mechanism, counterpoint mechanism, glass installation mechanism, laser mechanism and thick liquids complementary unit, advance the piece guide rail with go out the piece guide rail is located respectively transfer mechanism's both sides and be used for the business turn over of silicon chip, counterpoint mechanism is in transfer mechanism's top and will glass installation mechanism aligns with the transfer station on the transfer mechanism, thick liquids complementary unit installs counterpoint mechanism's lower extreme and complement thick liquids on the glass installation mechanism, glass installation mechanism is in thick liquids complementary unit's middle part and be used for fixed mounting transfer glass, laser mechanism is located counterpoint mechanism's top is used for shining transfer glass and prints.
2. The laser transfer machine of claim 1, wherein the feeding guide rail comprises feeding transport rails and clamping piece wheel assemblies, the feeding transport rails are three sections, the clamping piece wheel assemblies span the middle of the last feeding transport rail, the lower ends of the feeding transport rails are fixedly connected with feeding installation sections, feeding installation sections are provided with feeding slots, and openings of the feeding slots are at two ends of the feeding slots.
3. The laser transfer machine of claim 1, wherein the transfer mechanism comprises a printing turntable, a plurality of silicon wafer stations are arranged on the printing turntable, a paper winding module is arranged below each silicon wafer station, the paper winding module comprises a paper winding top plate, a paper discharging motor, a paper collecting motor, a paper discharging shaft and a paper collecting shaft, a paper winding side plate is fixed on the side edge of the paper winding top plate, a paper winding driving wheel and a paper winding driven wheel are arranged on the outer side of the paper winding side plate, the paper discharging motor is in transmission connection with the paper winding driving wheel on one side, the paper collecting motor is in transmission connection with the paper winding driving wheel on the other side, a paper winding synchronous belt is in transmission connection with the paper winding driven wheel on the other side, one end of the paper discharging shaft is connected with the paper winding driven wheel on one side, and one end of the paper collecting shaft is connected with the paper winding driven wheel on the other side.
4. The laser transfer machine of claim 1, wherein the glass mounting mechanism comprises an alignment connection plate, a clamping cylinder, a glass clamping plate and transfer glass, the clamping cylinder is located on two sides of the alignment connection plate, the driving end of the clamping cylinder is vertically downward and fixedly connected with the glass clamping plate, the inner side surface of the glass clamping plate and the outer side surface of the transfer glass are both inclined planes, the width of the lower end of the glass clamping plate is larger than the width of the upper end of the glass clamping plate, the width of the upper end of the transfer glass is larger than the width of the lower end of the transfer glass, and the inner side surface of the glass clamping plate and the outer side surface of the transfer glass are mutually attached.
5. The laser transfer machine of claim 1, wherein the alignment mechanism comprises an alignment assembly fixing seat, a transfer glass assembly, an X-axis positioning assembly and a Y-axis positioning assembly, the X-axis positioning assembly is provided with an X-axis driving device, an X-axis driving sliding seat and a Y-axis driven sliding seat, the X-axis driving device drives the X-axis driving sliding seat to slide on the X-axis positioning assembly along an X-axis direction, the Y-axis driven sliding seat slides on the X-axis driving sliding seat along a Y-axis direction, the Y-axis positioning assembly is provided with a Y-axis driving device, a Y-axis driving sliding seat and an X-axis driven sliding seat, the Y-axis driving device drives the Y-axis driving sliding seat to slide on the Y-axis positioning assembly along a Y-axis direction, the X-axis driven sliding seat and the Y-axis driven sliding seat are provided with cross bearing pins, and the cross bearing pins are connected with the transfer glass assembly.
6. The laser transfer machine of claim 1, wherein the laser mechanism comprises a laser head support, a laser head module and a Z-axis adjustment module, the Z-axis adjustment module comprises a Z-axis adjustment frame, a Z-axis adjustment rod and a Z-axis slide plate, the Z-axis adjustment rod rotates on the Z-axis adjustment frame, the Z-axis adjustment rod is in threaded connection with the Z-axis slide plate, the Z-axis slide plate slides on the Z-axis adjustment frame along a vertical direction, the Z-axis adjustment frame is fixed on the laser head support, and the laser head module is fixedly connected on the Z-axis slide plate.
7. The laser transfer machine of claim 1, wherein the slurry replenishing mechanism comprises a slurry mounting plate, a slurry transverse guide rail, a slurry lifting assembly and a slurry scraping assembly, two ends of the slurry transverse guide rail are respectively connected to the two slurry mounting plates, the slurry transverse assembly is arranged on the slurry mounting plate and drives the slurry scraping assembly to slide on the slurry transverse guide rail, a plurality of slurry outlets are distributed at the upper end of the slurry scraping assembly, and the driving end of the slurry lifting assembly is connected with the slurry mounting plate.
8. The laser transfer machine of claim 1, wherein the sheet discharging guide rail comprises a sheet discharging transportation rail and a jacking assembly, the jacking assembly comprises a jacking cylinder, a jacking transverse frame and a jacking table, the jacking cylinder is fixed inside the lower end of the sheet discharging transportation rail, the driving end of the jacking cylinder is connected with the middle part of the jacking transverse frame, the jacking table is connected to two sides of the jacking transverse frame, and the upper end of the jacking table is bent towards the middle part of the sheet discharging transportation rail.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202321129093.9U CN220681901U (en) | 2023-05-11 | 2023-05-11 | Laser transfer printing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202321129093.9U CN220681901U (en) | 2023-05-11 | 2023-05-11 | Laser transfer printing machine |
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CN220681901U true CN220681901U (en) | 2024-03-29 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202321129093.9U Active CN220681901U (en) | 2023-05-11 | 2023-05-11 | Laser transfer printing machine |
Country Status (1)
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CN (1) | CN220681901U (en) |
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2023
- 2023-05-11 CN CN202321129093.9U patent/CN220681901U/en active Active
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