CN220671539U - Electric performance detection system of electrostatic chuck - Google Patents
Electric performance detection system of electrostatic chuck Download PDFInfo
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- CN220671539U CN220671539U CN202322207891.5U CN202322207891U CN220671539U CN 220671539 U CN220671539 U CN 220671539U CN 202322207891 U CN202322207891 U CN 202322207891U CN 220671539 U CN220671539 U CN 220671539U
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- 238000005259 measurement Methods 0.000 description 6
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Abstract
The utility model relates to the field of electrostatic chuck detection equipment, and discloses an electrostatic chuck electrical property detection system which comprises a control operation unit, a contact unit, a conversion unit, a resistance detection unit, a capacitance detection unit and a leakage detection unit, wherein the control operation unit is used for controlling the contact unit to convert the contact unit into the contact state; one end of the contact unit is electrically connected with an external electrostatic chuck, and the other end of the contact unit is electrically connected with the conversion unit; the switching unit is connected with any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit in a switchable connection mode and is used for enabling any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit to obtain signals from the contact unit; the control operation unit is in communication connection with the resistance detection unit, the capacitance detection unit and the electric leakage detection unit. The electrostatic chuck electrical property detection system can detect capacitance values, resistance values and leakage values of the electrostatic chuck without using three detection devices, and improves detection efficiency.
Description
Technical Field
The utility model relates to the field of electrostatic chuck detection equipment, in particular to an electrostatic chuck electrical property detection system.
Background
Currently, the electrical performance detection of the electrostatic chuck mainly includes the capacitance value from the electrode layer to the dielectric layer, the leakage value from the electrode layer to each layer, and the resistance value from the electrode layer to each layer. However, no device dedicated to the detection of electrical properties of electrostatic chucks is currently available. Therefore, we need to use a capacitance detector to measure its capacitance value, a resistance detector to measure its resistance value, and a leakage detector to detect its leakage. In the detection process, the worker needs to continuously carry the electrostatic chuck and carry out different detection actions, the process is very complicated, and meanwhile, a large amount of manpower and material resources are wasted, so that the detection cost is high.
Therefore, a detection system capable of detecting the capacitance value, the resistance value, and the leakage value of the electrostatic chuck is urgently needed.
CN104296786B discloses a digital bridge capacitance measuring module, comprising: the digital balance mechanism is composed of an excitation source unit, a capacitance balance bridge arm circuit, a capacitance measurement bridge arm circuit, a BIT detection bridge arm circuit, a summing circuit, a synchronous amplifying circuit, a zero balance unit and a CPU control operation unit, wherein the phase difference between the balance bridge arm in the capacitance balance bridge arm circuit and the capacitance measurement bridge arm circuit and the alternating signal phase difference of the measurement bridge arm are 180 degrees; the excitation source unit generates a 0-degree phase driving signal, an AC reference signal and an AC excitation signal for the zero-position balancing unit, the 0-degree phase driving signal drives the synchronous amplifying circuit to realize orthogonal filtering of the measuring signal, and the realized orthogonal filtering measuring signal is sent into the zero-position balancing unit to generate a rebalancing monitoring signal; the method comprises the steps that an AC reference signal drives a capacitance balance bridge arm circuit, an AC excitation signal drives a BIT detection bridge arm circuit in a time-sharing manner, two alternating current signals with the phase difference of 180 degrees between a balance bridge arm and a measurement bridge arm are summed through a summing circuit, the alternating current signals are filtered to be 0 DEG and 90 DEG phase driving signals through a band-pass filter circuit, a CPU control operation unit carries out balance control on a D/A converter in a zero-BIT balance unit according to a received rebalancing monitoring signal, data of the D/A converter is compared with theoretical data prestored in the CPU control operation unit, and the CPU control operation unit takes the D/A converter data when balance bridge arms and measurement bridge arms reach balance as a currently measured capacitance value. The digital bridge capacitance measuring module can measure the capacitance value, but can not measure the resistance value and the leakage value under the condition of detecting the electrical property of the electrostatic chuck, and needs additional equipment with low efficiency.
The technical problems to be solved by the utility model are as follows: how to change the original three-item electrical detection into an integrated one-stop type detection system, reduce the carrying cost, optimize the detection flow and improve the detection efficiency.
Disclosure of Invention
The utility model mainly aims to provide an electrostatic chuck electrical property detection system, wherein a capacitance detection unit, a resistance detection unit and a leakage detection unit are connected by a conversion unit of the detection system, and when one electrical property needs to be detected, the conversion unit is controlled by a control operation unit to enable the corresponding detection unit to be electrified for detection, so that the capacitance value, the resistance value and the leakage value of the detection system are detected.
In order to achieve the above purpose, the technical scheme adopted in the application is as follows:
an electrostatic chuck electrical property detection system comprises a control operation unit, a contact unit, a conversion unit, a resistance detection unit, a capacitance detection unit and a leakage detection unit; one end of the contact unit is electrically connected with an external electrostatic chuck, and the other end of the contact unit is electrically connected with the conversion unit; the switching unit is connected with any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit in a switchable connection mode and is used for enabling any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit to obtain signals from the contact unit; the control operation unit is in communication connection with the resistance detection unit, the capacitance detection unit and the electric leakage detection unit.
Preferably, the contact unit includes a first signal line and a second signal line; one end of the first signal wire is electrically connected with the upper surface of the external electrostatic chuck, and the other end of the first signal wire is electrically connected with the conversion unit; one end of the second signal wire is electrically connected with the lower surface of the external electrostatic chuck, and the other end of the second signal wire is electrically connected with the conversion unit.
Preferably, the free end of the first signal wire is provided with a metal disc contacted with the electrostatic chuck; the metal disc is used for increasing the contact area between the first signal wire and the electrostatic chuck.
Preferably, the switching unit includes a first switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the capacitance detecting unit, a second switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the resistance detecting unit, and a third switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the leakage detecting unit.
Preferably, the first switch module, the second switch module and the third switch module are all relays.
Preferably, the leakage detection unit comprises a current detection module for detecting the leakage value of an electrostatic chuck of the peripheral, a direct current power supply for providing high-voltage direct current for the current detection module, and an AD conversion module; one end of the current detection module is electrically connected with the conversion unit, and the other end of the current detection module is in communication connection with the AD conversion module; the control operation unit is in communication connection with the AD conversion module.
Preferably, the display unit is further included; the display unit is in communication connection with the control operation unit; the display unit is used for displaying the detection result data.
Preferably, the device further comprises an input unit; the input unit is in communication connection with the control operation unit; the input unit is used for inputting data into control operation.
Compared with the prior art, the scheme has the following beneficial effects:
1. when different items need to be detected, the electrical performance detection system of the electrostatic chuck can control the conversion unit through the control operation unit to connect different detection units, so that the detection system can detect capacitance values, resistance values and leakage values.
2. The electrostatic chuck electrical property detection system of the scheme uses the surface contact of the metal disc and the electrostatic chuck, increases the contact area of the first signal wire, and improves the measurement accuracy.
3. The electrostatic chuck electrical property detection system is provided with an input unit which can input a set value and specification information, so that the control operation unit judges the measured value and the set value, and the labor intensity of workers is reduced.
Drawings
FIG. 1 is a schematic diagram of an electrostatic chuck electrical performance detection system of example 1;
fig. 2 is a schematic diagram of the connection of the contact unit of embodiment 1;
fig. 3 is a schematic diagram of the connection of the conversion unit of embodiment 1;
fig. 4 is a schematic diagram of the connection of the resistance detection unit of embodiment 1.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the implementations of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Example 1
Referring to fig. 1 to 4, an electrostatic chuck electrical property detection system includes a control operation unit 6, a contact unit 5, a conversion unit 4, a resistance detection unit 2, a capacitance detection unit 1, and a leakage detection unit 3; one end of the contact unit 5 is electrically connected with an external electrostatic chuck 9, and the other end of the contact unit is electrically connected with the conversion unit 4; the conversion unit 4 is connected with any one of the resistance detection unit 2, the capacitance detection unit 1 and the electric leakage detection unit 3 in a switchable connection manner, and is used for realizing that any one of the resistance detection unit 2, the capacitance detection unit 1 and the electric leakage detection unit 3 obtains a signal from the contact unit 5; the control operation unit 6 is in communication connection with the resistance detection unit 2, the capacitance detection unit 1 and the electric leakage detection unit 3.
In this embodiment, when the capacitance value needs to be measured, the control operation unit 6 controls the conversion unit 4 to enable the capacitance detection unit 1 to be electrified, the contact unit 5 contacts the electrostatic chuck 9, and obtains a capacitance signal of the electrostatic chuck 9 to be transmitted to the capacitance detection unit 1, and the capacitance detection unit 1 converts the capacitance signal into data and transmits the data to the control operation unit 6 to perform operation, so that the capacitance value is finally obtained. When the resistance value or the leakage value needs to be detected, the contact unit 5 transmits the model of the electrostatic chuck 9 to the resistance detection unit 2 or the leakage detection unit 3 through the conversion unit 4 as well.
It should be noted that, the electrical performance detection system of the electrostatic chuck 9 may detect the capacitance value, the resistance value or the leakage value independently, or may automatically detect and store the capacitance value, the resistance value and the leakage value through the control operation unit 6.
The used control arithmetic unit adopts a singlechip for operation, the model is STM32, and other singlechips can be selected according to actual requirements.
The capacitance detection unit 1 is a capacitance digital conversion chip, the model is AD7745, the contact unit 5 transmits signals of the electrostatic chuck 9 to the AD7745 chip, the AD7745 chip converts the signals into digital signals, and the digital signals are transmitted to the control operation unit 6 for operation, storage and output of capacitance values.
The circuit diagrams of the resistance detection unit 2 and the leakage detection unit 3 are identical, and the calculation modes are different, specifically: the contact unit 5 transmits the signal of the electrostatic chuck 9 to the current detection module 31, and the signal of the current detection module 31 is converted into a digital signal through the a/D conversion module 23, transmitted to the control operation unit 6, calculates a resistance value according to ohm's law, and outputs the resistance value.
The leakage detection unit 3 is formed by a high-voltage direct-current power supply 32, a current detection module 31 and an A/D conversion module 33, the high-voltage direct-current power supply 32 provides voltage, the contact unit 5 transmits signals of the electrostatic chuck 9 to the current detection module 31, the signals of the current detection module 31 are converted into digital signals through the A/D conversion module 33 and transmitted to the control operation unit 6, the control operation unit 6 compares a current value with a set current threshold, and when the output current value is smaller than the current threshold, the electrostatic chuck 9 does not leak electricity, and the qualification is prompted.
Preferably, the contact unit 5 includes a first signal line 51 and a second signal line 53; one end of the first signal wire 51 is electrically connected with the upper surface of the external electrostatic chuck 9, and the other end of the first signal wire is electrically connected with the conversion unit 4; one end of the second signal line 53 is electrically connected to the lower surface of the peripheral electrostatic chuck 9, and the other end is electrically connected to the conversion unit 4.
In this embodiment, the first signal line 51 is in contact with the upper surface of the electrostatic chuck 9, that is, in contact with the dielectric layer of the electrostatic chuck 9, and the second signal line 53 is in contact with the base or electrode layer of the electrostatic chuck 9, and the capacitance, resistance or current measured at this time is the capacitance, resistance or current between the first signal line 51 and the second signal line 53.
Preferably, the free end of the first signal line 51 is provided with a metal disc 52 in contact with the electrostatic chuck 9; the metal plate 52 is used to increase the contact area of the first signal line 51 with the electrostatic chuck 9.
In this embodiment, the metal disc 52 is equivalent to a wire with a larger cross section and is connected to the first signal wire 51, so as to increase the contact area between the first signal wire 51 and the surface of the electrostatic chuck 9, and avoid that the contact area between the first signal wire 51 and the electrostatic chuck 9 is too small, so that the detection data is inaccurate. The second signal line 53 is connected to the conductive electrode layer or the base, so that no additional metal plate 52 is needed, and the cost is reduced.
Preferably, the switching unit 4 includes a first switching module 41 for maintaining or disconnecting the connection relationship between the electrostatic chuck 9 and the capacitance detecting unit 1, a second switching module 42 for maintaining or disconnecting the connection relationship between the electrostatic chuck 9 and the resistance detecting unit 2, and a third switching module 43 for maintaining or disconnecting the connection relationship between the electrostatic chuck 9 and the leakage detecting unit 3.
In this embodiment, the electrical performance detection system of the electrostatic chuck 9 needs to detect the capacitance value, the resistance value and the leakage value sequentially, and the control operation unit 6 controls the first switch module 41, the second switch module 42 and the third switch module 43 to be connected or disconnected, so as to realize the selection of detection items, and not only can detect any one detection item for the electrostatic chuck 9, but also can detect all items for the electrostatic chuck 9 sequentially.
Preferably, the first switch module 41, the second switch module 42, and the third switch module 43 are all relays. The relay has low cost, simple control mode, small volume and low production cost.
Preferably, the leakage detecting unit 3 includes a current detecting module 31 for detecting a leakage value of the electrostatic chuck 9 of the external device, and a dc power supply 32 and an AD converting module 33 for supplying high-voltage dc power to the current detecting module 31; one end of the current detection module 31 is electrically connected with the conversion unit 4, and the other end of the current detection module is in communication connection with the AD conversion module 33; the control arithmetic unit 6 is connected in communication with the AD conversion module 33.
Preferably, the display unit 7 is also included; the display unit 7 is in communication connection with the control operation unit 6; the display unit 7 is used for displaying the detection result data. In order to facilitate the staff to observe the detection result more intuitively.
Preferably, the input unit 8 is also included; the input unit 8 is in communication connection with the control operation unit 6; the input unit 8 is used for inputting data into a control operation.
In this embodiment, the requirements for electrical performance in the different electrostatic chucks 9 are not necessarily the same. Therefore, the input unit 8 is provided, and the appropriate value of the leakage current, the cross-sectional area of the metal plate 52, the item information, and the like can be set by itself, thereby further improving the versatility and operability of the electrical performance detection system of the electrostatic chuck 9.
While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.
Claims (8)
1. The electrical property detection system of the electrostatic chuck is characterized by comprising a control operation unit, a contact unit, a conversion unit, a resistance detection unit, a capacitance detection unit and a leakage detection unit; one end of the contact unit is electrically connected with an external electrostatic chuck, and the other end of the contact unit is electrically connected with the conversion unit; the switching unit is connected with any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit in a switchable connection mode and is used for enabling any one of the resistance detection unit, the capacitance detection unit and the electric leakage detection unit to obtain signals from the contact unit; the control operation unit is in communication connection with the resistance detection unit, the capacitance detection unit and the electric leakage detection unit.
2. The electrostatic chuck electrical property detection system of claim 1, wherein the contact unit comprises a first signal line and a second signal line; one end of the first signal wire is electrically connected with the upper surface of the external electrostatic chuck, and the other end of the first signal wire is electrically connected with the conversion unit; one end of the second signal wire is electrically connected with the lower surface of the external electrostatic chuck, and the other end of the second signal wire is electrically connected with the conversion unit.
3. The electrostatic chuck electrical property detection system of claim 2, wherein the free end of the first signal line is provided with a metal pad in contact with the electrostatic chuck; the metal disc is used for increasing the contact area between the first signal wire and the electrostatic chuck.
4. The electrostatic chuck electrical property detection system of claim 1, wherein the switching unit comprises a first switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the capacitance detection unit, a second switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the resistance detection unit, and a third switching module for maintaining or disconnecting a connection relationship between the electrostatic chuck and the leakage detection unit.
5. The electrostatic chuck electrical property detection system of claim 4, wherein the first, second, and third switch modules are relays.
6. The electrostatic chuck electrical property detection system according to claim 1, wherein the leakage detection unit comprises a current detection module for detecting a leakage value of the electrostatic chuck of the external device, a dc power supply for supplying high voltage dc power to the current detection module, and an AD conversion module; one end of the current detection module is electrically connected with the conversion unit, and the other end of the current detection module is in communication connection with the AD conversion module; the control operation unit is in communication connection with the AD conversion module.
7. The electrostatic chuck electrical property detection system according to any one of claims 1-6, wherein the detection system further comprises a display unit; the display unit is in communication connection with the control operation unit; the display unit is used for displaying the detection result data.
8. The electrostatic chuck electrical property detection system of claim 7, wherein the detection system further comprises an input unit; the input unit is in communication connection with the control operation unit; the input unit is used for inputting data into the control operation unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322207891.5U CN220671539U (en) | 2023-08-16 | 2023-08-16 | Electric performance detection system of electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322207891.5U CN220671539U (en) | 2023-08-16 | 2023-08-16 | Electric performance detection system of electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220671539U true CN220671539U (en) | 2024-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322207891.5U Active CN220671539U (en) | 2023-08-16 | 2023-08-16 | Electric performance detection system of electrostatic chuck |
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|---|---|
| CN (1) | CN220671539U (en) |
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2023
- 2023-08-16 CN CN202322207891.5U patent/CN220671539U/en active Active
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