CN220651058U - Gluing and fluid supplementing device - Google Patents

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a gluing and fluid supplementing device, which comprises: the device comprises a glue storage unit, a buffer unit and a suction unit; the glue storage unit is used for storing glue; the inner cavity of the buffer unit is communicated with the inner cavity of the glue storage unit, and the buffer unit is used for receiving the glue conveyed by the glue storage unit; the suction unit is used for sucking the colloid in the buffer unit and conveying the colloid to a designated position. In the utility model, the buffer unit is added between the glue storage unit and the suction unit, and can be flexibly arranged, for example, the buffer unit is arranged back to back with the suction unit, so that the distance between the buffer unit and the suction unit can be effectively reduced, the flowing distance of photoresist in the gluing process can be shortened, the liquid supplementing time in the gluing process can be further reduced, the capacity of a machine can be improved, and the production cost can be reduced.

Description

Gluing and fluid supplementing device

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a gluing and fluid supplementing device.

Background

Photoresists, also known as photoresists, refer to etch-resistant thin film materials whose solubility is changed by irradiation or radiation of ultraviolet light, electron beams, ion beams, X-rays, or the like. Photoresists are used as corrosion resistant coating materials during photolithography processes. When a semiconductor material is processed on a surface, a desired image can be obtained on the surface by using a photoresist with proper selectivity. Photoresists are classified into g/i line photoresists, krF photoresists, arF photoresists, EUV photoresists, etc. according to the exposure light source and the radiation source.

The viscosity of the photoresist is an important characteristic parameter, and the viscosity increases with the reduction of the solvent in the photoresist, wherein the parameter measures the flow characteristic of the photoresist; the higher the viscosity, the poorer the flowability of the photoresist.

In the photoetching process, a layer of photoresist is required to be coated on a wafer, and a suction device is required to suck the photoresist in a photoresist storage device through a pipeline in the photoresist coating process so as to supplement the photoresist to a photoresist coater. For photoresist with high viscosity and poor fluidity, such as polyimide photoresist, the flowing speed in a pipeline is low, the process of supplementing the photoresist is long, the whole photoresist coating process is long, in the process, other equipment machines are in a waiting state, and huge waste is caused for the productivity of the machines, so that the polyimide process yield is low.

Therefore, a glue coating and fluid supplementing device is needed to accelerate the supplementing speed of photoresist and improve the productivity of the machine.

Disclosure of Invention

The utility model aims to provide a glue spreading and fluid supplementing device, which is characterized in that a buffer unit is added between a glue storage unit and a suction unit, and the buffer unit can be flexibly arranged at a position close to the suction unit, so that the flowing distance of photoresist in the fluid supplementing process is shortened, the fluid supplementing time is further shortened, and the machine productivity is improved.

In order to solve the technical problems, the utility model provides a gluing and fluid supplementing device, which comprises: the device comprises a glue storage unit, a buffer unit and a suction unit;

the glue storage unit is used for storing glue;

the inner cavity of the buffer unit is communicated with the inner cavity of the glue storage unit, and the buffer unit is used for receiving the glue conveyed by the glue storage unit;

the suction unit is used for sucking the colloid in the buffer unit and conveying the colloid to a designated position.

Optionally, the buffer unit comprises a buffer tank, wherein the inner cavity of the buffer tank is communicated with the inner cavity of the glue storage unit through an input pipeline, and the inner cavity of the buffer tank is communicated with the liquid inlet of the suction unit through an output pipeline.

Optionally, a vent is provided on the buffer tank.

Optionally, the buffer unit further comprises a liquid level detection component, and the liquid level detection component is arranged in the buffer tank and used for detecting the liquid level of the colloid in the buffer tank.

Optionally, the liquid level detection assembly includes a first liquid level sensor and a second liquid level sensor, the first liquid level sensor is used for detecting a replenishing liquid level, the second liquid level sensor is used for detecting a stopping replenishing liquid level, and the stopping replenishing liquid level is higher than the replenishing liquid level.

Optionally, the liquid level detection assembly further comprises a third liquid level sensor for detecting a stop liquid level, the stop liquid level being higher than the stop replenishment liquid level.

Optionally, the gluing and fluid supplementing device further comprises a first detection unit, wherein the first detection unit is arranged on the input pipeline and is used for detecting whether the input pipeline is empty or not;

and/or; the gluing and liquid supplementing device further comprises a second detection unit, wherein the second detection unit is arranged on the output pipeline and used for detecting whether the output pipeline is empty or not.

Optionally, the glue storage unit comprises a glue storage tank, and a gas injection port is arranged on the glue storage tank.

Optionally, an exhaust port is arranged on the glue storage tank.

Optionally, the exhaust port comprises an overpressure exhaust port and an active exhaust port which are arranged on the glue storage tank.

So configured, in the present utility model, a buffer unit is added between the glue storage unit and the suction unit. Therefore, the glue can be conveyed into the buffer unit by the glue storage unit in advance before gluing, and the glue is sucked into the buffer unit by the suction unit during gluing so as to be conveyed to the gluing machine. The buffer unit does not need to be large in size, so that the buffer unit does not need to be large in size, the buffer unit can be provided with a small size, the buffer unit can be flexibly arranged, the buffer unit can be arranged back to back with the suction unit, the distance between the buffer unit and the suction unit can be effectively reduced, the flowing distance of photoresist in the gluing process can be shortened, the liquid supplementing time in the gluing process can be shortened, the machine yield can be improved, and the production cost can be reduced.

Drawings

FIG. 1 is a schematic diagram of a system structure of a glue applying and replenishing device according to an embodiment of the present utility model;

FIG. 2 is a control logic diagram of an embodiment of the present utility model.

Wherein, the reference numerals are as follows:

10-a glue storage unit; 11-a glue storage tank; 12-an air injection port; 13-overpressure vent; 14-an active exhaust port; 15-a first valve; 16-a pressure release valve; 17-a second valve; 18-an inner tank;

a 20-buffer unit; 21-a buffer tank; 22-vent; 23-a third valve;

30-a suction unit;

40-input pipeline;

50-an output pipe;

60-a liquid level detection assembly; 61-a first level sensor; 62-a second level sensor; 63-a third level sensor;

70-a first detection unit;

80-a second detection unit;

90-controller.

Detailed Description

The gluing and fluid supplementing device provided by the utility model is further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.

As used in this disclosure, the singular forms "a," "an," and "the" include plural referents, the term "or" are generally used in the sense of comprising "and/or" and the term "plurality" is generally used in the sense of comprising "at least one," the term "at least two" or "a plurality" are generally used in the sense of comprising "two or more," and the term "first," "second," "third," are used for descriptive purposes only and are not to be construed as indicating or implying any particular importance or quantity of technical features indicated. Thus, a feature defining "a first", "a second", "a third" may include one or at least two such features, either explicitly or implicitly. Furthermore, as used in this disclosure, "mounted," "connected," and "disposed" with respect to another element should be construed broadly to mean generally only that there is a connection, coupling, mating or transmitting relationship between the two elements, and that there may be a direct connection, coupling, mating or transmitting relationship between the two elements or indirectly through intervening elements, and that no spatial relationship between the two elements is to be understood or implied, i.e., that an element may be in any orientation, such as internal, external, above, below, or to one side, of the other element unless the context clearly dictates otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances. Furthermore, directional terms, such as above, below, upper, lower, upward, downward, left, right, etc., are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward toward the top of the corresponding drawing, downward or downward toward the bottom of the corresponding drawing.

In the semiconductor photoetching process, a layer of photoresist is required to be coated on a wafer, a suction device is required to suck the photoresist in a photoresist storage device through a pipeline in the gluing process so as to supplement the photoresist to a glue coater, and for the photoresist with high viscosity and poor fluidity, such as polyimide photoresist, the flow speed in the pipeline is slower, the process of supplementing the photoresist takes longer, the whole gluing process takes longer, and at the moment, other machines are in an empty waiting state, and huge waste is caused for the productivity of the machines, so that the polyimide process yield is very low.

The root cause of the slower fluid infusion is that the current glue storage device and the pumping device are relatively large in volume. In addition, the two can not be placed together due to the current technology, so that the distance between the two is too far, and the pipeline is too long; too long pipelines lead to longer flowing distance of photoresist in the process of replenishing liquid, thereby leading to slower replenishing liquid speed and lower yield.

For example, the polyimide with the viscosity of 18000CP is used for gluing the 7CC, the gluing time is about 40s, but because the speed of fluid infusion is too slow, under the condition that the power adjustment of the fluid infusion motor of the pumping device is maximum, the whole gluing period needs to consume about 480s, so that other machine units are in an empty waiting state, and the production beat is affected.

According to the embodiment, the buffer unit 20 is added between the glue storage unit 10 and the suction unit 30, and the buffer unit 20 can be flexibly arranged at a position close to the suction unit 30, so that the flowing distance of photoresist in the glue coating process is shortened, the liquid supplementing time is further shortened, and the machine yield is improved.

The gluing and fluid supplementing device comprises: a glue storage unit 10, a buffer unit 20, and a suction unit 30;

the photoresist storage unit 10 may have a tank-like, box-like, etc. structure having a storage cavity, and the photoresist storage unit 10 is mainly used for storing photoresist.

The inner cavity of the buffer unit 20 is communicated with the inner cavity of the glue storage unit 10, and the buffer unit 20 is used for receiving glue conveyed by the glue storage unit 10; the suction unit 30 is used for sucking the colloid in the buffer unit 20 and delivering the colloid to a designated position.

The buffer unit 20 may have a tank-like, box-like or like structure having a storage chamber. The glue storage unit 10 delivers glue into the buffer unit 20 to meet the amount of glue required for a single glue application. Therefore, the glue can be conveyed into the buffer unit 20 by the glue storage unit 10 in advance before the glue is applied, and the glue is sucked into the buffer unit 20 by the suction unit 30 to be conveyed to the glue applicator during the glue application. Since the amount of glue stored in the buffer unit 20 does not need to be too large, the buffer unit 20 does not need to have a too large storage chamber, and the buffer unit 20 can be provided with a smaller volume. Therefore, the buffer unit 20 can be flexibly arranged, for example, arranged back to back with the suction unit 30, so that the distance between the buffer unit 20 and the suction unit 30 can be effectively reduced, the flowing distance of photoresist in the photoresist coating process can be advantageously shortened, and the liquid supplementing time in the photoresist coating process can be further reduced, for example, when the buffer unit 20 and the suction unit 30 are arranged back to back, the whole photoresist coating period is shortened to about 150s from 480s, thereby being beneficial to improving the machine yield and reducing the production cost.

Referring to fig. 1, a glue storage unit 10 in this embodiment includes a glue storage tank 11. The glue storage tank 11 is provided with a gas injection port 12, the gas injection port 12 is externally connected with gas supply equipment, a first valve 15 is arranged on a pipeline between the gas injection port 12 and the gas supply equipment, and the first valve 15 can be opened and closed based on the using condition so as to control gas injection time. When the glue is required to be delivered into the buffer unit 20 through the glue storage unit 10, gas can be injected into the glue storage tank 11 through the gas injection port 12. By increasing the air pressure in the glue storage tank 11, the glue in the glue storage tank 11 is driven to automatically flow into the buffer unit 20. Preferably, the gas injection port 12 is arranged at the top of the glue storage tank 11, so that injected gas is not introduced into the glue body, and bubbles are prevented from being generated in the glue body.

In this embodiment, the glue storage tank 11 may adopt an existing structure, and includes a tank body and a cover body, where the cover body covers an upper port of the tank body, and the glue storage tank 11 is provided with an air outlet, and the air outlet includes an overpressure air outlet 13 and an active air outlet 14 disposed on the glue storage tank 11. The overpressure vent 13 is used for preventing the pressure inside the glue storage tank 11 from being excessively high to automatically release pressure, the overpressure vent 13 can be externally connected with a pressure release valve 16, the pressure of the pressure release valve 16 is set to realize the automatic pressure release of the glue storage tank 11, and the overpressure vent 13 belongs to passive pressure release. Meanwhile, the active exhaust port 14 can be externally connected with a second valve 17, the second valve 17 is used for controlling the opening and closing of the active exhaust port 14, and the active exhaust port 14 can be opened to actively reduce the pressure in the glue storage tank 11 so as to facilitate the opening of the cover body of the glue storage tank 11.

With continued reference to fig. 1, the glue storage unit 10 further includes an inner tank 18, the inner tank 18 is disposed inside the glue storage tank 11, the inner tank 18 is used for storing glue, and when the cover of the glue storage unit 10 is opened after the glue of the inner tank 18 is conveyed, the empty inner tank can be replaced by a full glue inner tank.

With continued reference to fig. 1, the buffer unit 20 includes a buffer tank 21, and the buffer tank 21 may be a self-made tank body meeting the storage requirement of photoresist, and the shape and size of the buffer tank are not limited. The inner cavity of the buffer tank 21 is communicated with the inner cavity of the glue storage unit 10 through the input pipeline 40, and the input pipeline 40 is communicated with the inner cavity of the inner tank 18 substantially directly because the glue storage unit 10 is provided with the inner tank 18 in the embodiment.

In other alternative embodiments, if the glue storage unit 10 is of a single-tank structure, the input pipe 40 may be directly connected to the inner cavity of the buffer tank 21.

The inner cavity of the buffer tank 21 is communicated with the liquid inlet of the suction unit 30 through an output pipeline 50; the suction unit 30 may employ an existing HV pump or other known suction structure.

With continued reference to fig. 1, the input pipe 40 and the output pipe 50 are connected to the top of the buffer tank 21, and the outlet end of the input pipe 40 is higher than the inlet end of the output pipe 50, and the inlet end of the output pipe 50 is close to the bottom of the buffer tank 21.

In other alternative embodiments, the output conduit 50 may also be connected to the bottom location of the buffer tank 21.

In addition, the buffer tank 21 is provided with a vent 22, the vent 22 is communicated with a third valve 23, the third valve 23 can adopt an electromagnetic valve, and the third valve 23 controls the opening and closing of the vent 22 so as to adjust the opening and closing of the vent 22 based on working conditions. For example, when the glue storage unit 10 is used for delivering glue into the buffer tank 21, the air vent 22 is opened, or when the machine is in a stop state, the air vent 22 is closed; alternatively, the third valve 23 may be controlled to be opened to adjust the internal pressure thereof by detecting the air pressure in the buffer tank 21 when the actual air pressure exceeds the air pressure threshold range.

Further, as shown in fig. 1, the buffer unit 20 further includes a liquid level detecting assembly 60 disposed in the buffer tank 21 for detecting the liquid level of the colloid in the buffer tank 21.

When the colloid liquid level in the buffer tank 21 is lower, the colloid storage unit 10 is required to convey colloid to the buffer tank 21, when the colloid liquid level in the buffer tank 21 is higher, the colloid is stopped to convey the colloid into the buffer tank 21, at least two liquid levels are arranged in the buffer tank 21, one liquid level is the liquid supplementing stopping level, the other liquid supplementing stopping level is higher than the liquid supplementing level, the liquid supplementing level is the lowest colloid liquid level, timely liquid supplementing is required when the colloid reaches the liquid level, the liquid supplementing stopping level is the theoretical full storage liquid level of the colloid, and when the colloid reaches the liquid supplementing stopping level, the liquid supplementing is stopped.

Thus, the liquid level detection assembly 60 comprises a first liquid level sensor 61 for detecting a replenishment liquid level and a second liquid level sensor 62 for detecting a stopped replenishment liquid level, the first liquid level sensor 61 being arranged to detect a stopped replenishment liquid level. In fig. 1, the setting position of the first liquid level sensor 61 corresponds to the replenishment liquid level, and the setting position of the second liquid level sensor 62 corresponds to the stop replenishment liquid level.

Wherein the first and second liquid level sensors 61, 62 may employ photo-electric sensors, for example, ELS series correlation photo-electric sensors, which include an emitter and a receiver, and if the gel liquid level is higher than the sensor, the optical path between the emitter and the receiver is blocked and the optical signal disappears. If the colloid liquid level is lower than the sensor, the optical path between the emitter and the receiver is communicated to generate an optical signal. Or the first liquid level sensor 61 and the second liquid level sensor 62 may be a static pressure type liquid level sensor, a floating ball type liquid level transmitter, an ultrasonic liquid level transmitter, a radar liquid level transmitter, or the like.

In this embodiment, in order to improve the reliability of the system, a third liquid level sensor 63 is further added, where the third liquid level sensor 63 is used to detect a stop liquid level, and the stop liquid level is higher than the stop replenishment liquid level. As shown in fig. 1, the installation position of the third liquid level sensor 63 corresponds to a stop liquid level, the stop liquid level is higher than the stop liquid level, if the colloid is detected to be at or higher than the stop liquid level, the colloid is still conveyed to the buffer tank 21 by the colloid storage unit 10 after being higher than the stop liquid level, and the possibility of generating faults exists, so that the stop maintenance liquid supplementing device is stopped at this time.

Further, the glue spreading and fluid supplementing device further includes a first detection unit 70, where the first detection unit 70 is disposed on the input pipeline 40 and is used for detecting whether the input pipeline 40 is empty or not; the glue spreading and fluid supplementing device further comprises a second detection unit 80, wherein the second detection unit 80 is arranged on the output pipeline 50 and is used for detecting whether the output pipeline 50 is empty or not.

The first detection unit 70 and the second detection unit 80 may also employ ELS series correlation photoelectric sensors, and if the input pipe 40 and the output pipe 50 are empty, the optical path between the transmitter and the receiver is communicated, and if the input pipe 40 and the output pipe 50 are full of colloid, the optical path between the transmitter and the receiver is interrupted.

The first detecting unit 70 and the second detecting unit 80 can detect the glue in the input pipeline 40 and the output pipeline 50 respectively to determine whether the pipe is empty, if the pipe is empty, the glue storage unit 10 and the buffer unit 20 may lack glue, and corresponding glue supplementing operation is required.

In other alternative embodiments, the first detection unit 70 and the second detection unit 80 may employ existing flowmeters through which flow in the pipeline is detected, with empty pipe being considered when the real-time flow is below a threshold and full pipe being considered when the real-time flow is above a flow threshold.

In other alternative embodiments, the first detecting unit 70 and the second detecting unit 80 may determine whether to empty the pipe by detecting bubbles. For example, with the existing ultrasonic sensor, the ultrasonic wave propagates straight in a uniform medium, but when reaching an interface or a different medium, reflection and refraction occur, and reflection and refraction law similar to geometrical optics are obeyed, and in the detection technology, transmission method, reflection method, frequency method and the like are commonly used. The ultrasonic detector has small attenuation and strong penetrability in liquid column and solid, obvious interface reflection and refraction, and high-frequency ultrasonic characteristic, and is convenient for counting actual pulse and ultrasonic pulse to judge the size of bubbles and the length of continuous liquid column. The ultrasonic air-breaking detector has high sensitivity and good reliability, and can detect continuous bubbles in a small gap. For example, a capacitive sensor can be adopted, and a capacitive polar plate is respectively arranged at two sides of the pipeline to detect the capacitance change condition between the two polar plates, and the change condition of the internal medium is estimated according to the change, so that the detection purpose is achieved. The detection of the empty pipe can be realized by adopting a plurality of existing technical means, and the detection is not repeated here.

In other alternative embodiments, the corresponding detection unit may alternatively be provided only on the input conduit 40 or the output conduit 50.

Referring to fig. 2, in the present embodiment, a controller 90 is communicatively connected to the first liquid level sensor 61, the second liquid level sensor 62, the third liquid level sensor 63, and the first valve 15;

when the controller 90 receives the liquid level signal of the first liquid level sensor 61, it represents that the buffer unit 20 lacks glue, at this time, the controller 90 sends an opening signal to the first valve 15, the gas injection port 12 is opened, gas is injected into the glue storage unit 10 through the gas injection port 12, and the glue in the glue storage unit 10 is conveyed into the buffer unit 20; when the controller 90 receives the liquid level signal from the second liquid level sensor 62, it represents that the buffer unit 20 is full of the gel, and at this time, the controller 90 sends a closing signal to the first valve 15, the gas injection port 12 is closed, and the gel is stopped being fed into the buffer unit 20. When the controller 90 receives the liquid level signal from the third liquid level sensor 63, it represents that the excessive amount of colloid in the buffer unit 20 is abnormal, and the controller 90 sends a shutdown signal to the machine to overhaul the system.

In other alternative embodiments, the controller 90 may also be communicatively connected to the third valve 23, and simultaneously send an open signal to the third valve 23 to open the vent 22 while the controller 90 sends an open signal to the first valve 15 to allow the buffer tank 21 to communicate with the outside.

In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.

The above description is only illustrative of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.

Claims (10)

1. A glue spreading and fluid infusion device, comprising: the device comprises a glue storage unit, a buffer unit and a suction unit;

the glue storage unit is used for storing glue;

the inner cavity of the buffer unit is communicated with the inner cavity of the glue storage unit, and the buffer unit is used for receiving the glue conveyed by the glue storage unit;

the suction unit is used for sucking the colloid in the buffer unit and conveying the colloid to a designated position.

2. The glue spreading and fluid infusion device according to claim 1, wherein the buffer unit comprises a buffer tank, the inner cavity of the buffer tank is communicated with the inner cavity of the glue storage unit through an input pipeline, and the inner cavity of the buffer tank is communicated with the liquid inlet of the suction unit through an output pipeline.

3. A glue spreading and fluid infusion device according to claim 2, wherein the buffer tank is provided with a vent.

4. The glue spreading and replenishing device of claim 2, wherein the buffer unit further comprises a liquid level detection assembly disposed in the buffer tank for detecting a liquid level of the glue in the buffer tank.

5. The glue dispensing and filling apparatus of claim 4, wherein said fluid level detection assembly comprises a first fluid level sensor for detecting a fill level and a second fluid level sensor for detecting a stop fill level, said stop fill level being higher than said fill level.

6. The glue dispensing apparatus of claim 5, wherein said fluid level detection assembly further comprises a third fluid level sensor for detecting a shut-down fluid level, said shut-down fluid level being higher than said stop dispensing level.

7. The glue dispensing and fluid infusion device of any one of claims 2-6, further comprising a first detection unit disposed on the input conduit for detecting whether the input conduit is empty or not;

and/or; the gluing and liquid supplementing device further comprises a second detection unit, wherein the second detection unit is arranged on the output pipeline and used for detecting whether the output pipeline is empty or not.

8. The glue spreading and replenishing device according to claim 1, wherein the glue storage unit comprises a glue storage tank, and a gas injection port is arranged on the glue storage tank.

9. The glue spreading and fluid infusion device of claim 8, wherein the glue reservoir is provided with an air vent.

10. The glue dispensing apparatus of claim 9 wherein said vent includes an overpressure vent and an active vent disposed on said glue reservoir.