CN220619102U - Drop-out type tapping system of chemical vapor deposition furnace - Google Patents

Drop-out type tapping system of chemical vapor deposition furnace Download PDF

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Publication number
CN220619102U
CN220619102U CN202322321928.7U CN202322321928U CN220619102U CN 220619102 U CN220619102 U CN 220619102U CN 202322321928 U CN202322321928 U CN 202322321928U CN 220619102 U CN220619102 U CN 220619102U
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China
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furnace
drop
vapor deposition
chemical vapor
furnace body
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CN202322321928.7U
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Chinese (zh)
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水佑裕
李涛
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Chengdu Chengwei Precision Machinery Manufacturing Co ltd
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Chengdu Chengwei Precision Machinery Manufacturing Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The utility model discloses a drop-out type furnace discharging system of a chemical vapor deposition furnace, relates to the technical field of heat treatment equipment, and can solve the problems of low safety and low production efficiency caused by the fact that products are manually fed into the furnace to be taken out at present. The embodiment of the utility model provides a drop-out furnace discharging system of a chemical vapor deposition furnace, which comprises: the furnace body is arranged in the air, and the bottom of the furnace body is provided with a furnace bottom plate for placing products; the discharging structure comprises a vertical transmission assembly for transmitting the furnace bottom plate and products on the furnace bottom plate out of the furnace body along the vertical direction, wherein the vertical transmission assembly comprises a supporting structure which is horizontally arranged and used for supporting the furnace bottom plate, and a driving structure for driving the supporting structure to move up and down along the vertical direction.

Description

Drop-out type tapping system of chemical vapor deposition furnace
Technical Field
The utility model relates to the technical field of heat treatment equipment, in particular to a drop-out furnace discharging system of a chemical vapor deposition furnace.
Background
At present, an inlet and an outlet of a conventional chemical vapor deposition furnace are usually arranged at the top of the furnace, and the depth of the furnace body can reach 3 meters, so that when a product needs to be taken out, workers often need to directly enter the furnace to take out the product, byproducts in the CVI and CVD-SiC deposition processes of the chemical vapor deposition furnace can be attached to the furnace wall, and the byproducts can cause instant combustion when encountering static electricity and fire sources, so that safety accidents such as burning, choking and the like occur when the workers take the product in the furnace at present; in addition, because personnel are required to directly enter the furnace when taking the product, the product can be taken when the temperature in the furnace is required to be reduced to 50 ℃, the cooling period is long, and the production efficiency is low.
Therefore, based on the above-mentioned drawbacks, it is highly desirable to design a drop-out furnace discharging system of a chemical vapor deposition furnace, which solves the problems of unsafe manual product taking into the furnace and long cooling period in the prior art.
Disclosure of Invention
The purpose of this application is to provide a chemical vapor deposition furnace's drop-out type system of discharging, need not the manual work and get into in the deposition furnace, and need not to wait for the furnace temperature to reduce, can effectively solve present manual work and get the product and lead to the security low, need the cooling lead to the problem that production efficiency is low.
In order to solve the technical problems, the utility model adopts the following scheme:
a drop-out tapping system for a chemical vapor deposition furnace, comprising:
the furnace body is arranged in the air, and the bottom of the furnace body is provided with a furnace bottom plate for placing products;
the discharging structure comprises a vertical transmission assembly for transmitting the furnace bottom plate and products on the furnace bottom plate out of the furnace body along the vertical direction, wherein the vertical transmission assembly comprises a supporting structure which is horizontally arranged and used for supporting the furnace bottom plate, and a driving structure for driving the supporting structure to move up and down along the vertical direction.
The design concept of the application is as follows: through setting up unsettled furnace body to set up the stove bottom plate in its bottom, set up ejection of compact structure simultaneously, make the product after the inside deposit of furnace body is accomplished, can directly transport out the product from the furnace body through ejection of compact structure, make the product cool down in the furnace body outside and need not wait for the inside cooling of furnace body, can improve the production efficiency of product, avoid the manual work to get into the furnace body inside simultaneously, initiate the incident, can improve the security.
Preferably, the furnace body also comprises a furnace frame arranged on the base, wherein the furnace body is fixed on the furnace frame, and the bottom of the furnace body is suspended;
the bearing structure and the driving structure of the vertical transmission assembly are both positioned in the furnace frame.
Preferably, the driving structure comprises at least one lifting screw rod vertically arranged and positioned in the furnace frame, the top of the lifting screw rod is rotationally connected with the furnace frame, and the bottom of the lifting screw rod is rotationally connected with the base;
the bearing structure comprises a discharging disc which is horizontally arranged and is in threaded connection with the lifting screw rod.
Preferably, the vertical transmission further comprises at least one vertically arranged slide bar, the discharging plate is in sliding connection with the slide bar along the vertical direction, and the lifting screw rod and the slide bar are arranged along the circumferential direction of the furnace body.
Preferably, the discharging structure further comprises a transverse transmission assembly which is horizontally arranged on the base and used for transversely transmitting the product out of the furnace body along the horizontal direction; one end of the transverse transmission component is positioned under the furnace body, and the other end extends out of the furnace frame;
the transverse transmission assembly comprises a lifting structure for lifting the furnace bottom plate and products thereof;
the shape of the supporting structure is or U-shaped, and the transverse moving direction of the transverse transmission component is consistent with the opening direction of the supporting structure or U-shaped;
the distance between the two free ends of the supporting structure is larger than the width of the lifting structure.
Preferably, the transverse transmission assembly comprises a sliding rail horizontally arranged on the base and a discharging vehicle arranged on the sliding rail, and the discharging vehicle is in sliding connection with the sliding rail;
the lifting structure is arranged at the top of the discharging car;
one end of the sliding rail is positioned under the furnace body, and the other end extends out of the furnace frame;
under the condition that the discharging disc moves downwards, the discharging car is positioned right below the discharging disc.
Preferably, the lifting structure comprises an annular supporting seat horizontally arranged above the discharging vehicle, and a plurality of struts vertically arranged between the annular supporting seat and the discharging vehicle, wherein the struts are distributed along the circumference of the annular supporting seat.
Preferably, the lifting structure further comprises a plurality of supporting plate pieces which are vertically arranged at the top of the annular supporting seat and are used for being in point contact with the bottom of the discharging tray, and the plurality of supporting plate pieces are uniformly distributed along the circumferential direction of the annular supporting seat;
the struts are uniformly distributed along the circumference of the annular bearing seat.
Preferably, the furnace further comprises a furnace cover which is arranged at the top of the furnace body and hinged with the furnace body, and a cylindrical heating structure which is arranged between the furnace bottom plate and the furnace cover.
Preferably, the water cooling device further comprises a water cooling module for rapidly cooling the product and a flow cabinet for monitoring water flow, wherein the water cooling module comprises a water pump, a water supply pipe and a spray head arranged on the furnace frame, and an opening of the spray head is arranged towards the discharge disc.
The utility model has the beneficial effects that:
this application sets up the stove bottom plate and vertically transports the ejection of compact structure that comes out with the product through the bottom at unsettled furnace body for the product can cool down outside the stove, improves the cooling rate of product, improves the production efficiency of product.
In addition, this application is transported out the product from the furnace body inside through ejection of compact structure, can avoid the staff to get into the inside article of taking of furnace body, leads to the ejection of compact troublesome, and has the problem of potential safety hazard.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of the present utility model;
FIG. 2 is a schematic cross-sectional view of an embodiment of the present utility model;
FIG. 3 is a schematic diagram of a front view structure of an embodiment of the present utility model;
FIG. 4 is a schematic top view of a furnace floor in accordance with an embodiment of the present utility model when placed in a support structure.
Reference numerals illustrate:
the device comprises a control cabinet 1, a base 2, a flow cabinet 3, a furnace cover 4, a furnace body 5, a heating structure 6, a furnace bottom plate 7, a discharge tray 8, a furnace frame 9, a slide rail 10, a lifting screw 11, a water cooling module 12, a vacuum module 13, a discharge car 14, an annular supporting seat 15 and a supporting plate 16.
Detailed Description
The present utility model will be described in further detail with reference to examples and drawings, but embodiments of the present utility model are not limited thereto.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "configured," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The utility model is described in detail below by reference to the attached drawings and in connection with the embodiments:
as shown in fig. 1 to 4, the present embodiment provides a drop-out tapping system of a chemical vapor deposition furnace, comprising:
the furnace body 5 is arranged in the air, and the bottom of the furnace body 5 is provided with a furnace bottom plate 7 for placing products;
the discharging structure comprises a vertical transmission assembly for transmitting the furnace bottom plate 7 and products on the furnace bottom plate along the vertical direction out of the furnace body 5, wherein the vertical transmission assembly comprises a supporting structure which is horizontally arranged and used for supporting the furnace bottom plate 7 and a driving structure which is used for driving the supporting structure to move up and down along the vertical direction.
The design concept of the application is as follows: through setting up unsettled furnace body 5 to set up furnace bottom plate 7 in its bottom, set up ejection of compact structure simultaneously, make the product after the inside deposit of furnace body 5 is accomplished, can directly transport out the product from furnace body 5 through ejection of compact structure, make the product in the outside cooling of furnace body 5 and need not wait for the inside cooling of furnace body 5, can improve the production efficiency of product, avoid the manual work to get into furnace body 5 inside simultaneously, initiate the incident, can improve the security.
In a preferred embodiment, the furnace further comprises a furnace frame 9 arranged on the base 2, the furnace body 5 is fixed on the furnace frame 9, and the bottom of the furnace body is suspended;
the supporting structure and the driving structure of the vertical transmission assembly are both positioned in the furnace frame 9.
In a preferred embodiment, the driving structure comprises at least one lifting screw rod which is vertically arranged and positioned in the furnace frame 9, the top of the lifting screw rod is rotationally connected with the furnace frame 9, and the bottom of the lifting screw rod is rotationally connected with the base 2;
the bearing structure comprises a discharging disc 8 which is horizontally arranged and is in threaded connection with the lifting screw rod.
In a preferred embodiment, the vertical transmission further comprises at least one vertically arranged slide bar, the discharging disc 8 is in sliding connection with the slide bar along the vertical direction, and the lifting screw rod and the slide bar are arranged along the circumference of the furnace body 5.
In a preferred embodiment, the discharging structure further comprises a transverse transmission assembly horizontally arranged on the base 2 and used for conveying the product out of the furnace body 5 transversely along the horizontal direction; one end of the transverse transmission component is positioned under the furnace body 5, and the other end extends out of the furnace frame 9;
the transverse transmission assembly comprises a lifting structure for lifting the furnace bottom plate 7 and products thereof;
the shape of the supporting structure is or U-shaped, and the transverse moving direction of the transverse transmission component is consistent with the opening direction of the supporting structure or U-shaped;
the distance between the two free ends of the supporting structure is larger than the width of the lifting structure.
In this embodiment, as shown in fig. 4, the distance between the two free ends of the supporting structure is greater than the width of the lifting structure, so that the supporting structure can be lowered below the top of the lifting structure, and the lifting structure can lift the furnace bottom plate 7 and the product thereon, and then move out of the lower side of the furnace bottom plate transversely along the opening direction of the supporting structure, so that the worker can conveniently take the product. In this embodiment, as shown in fig. 4, the support structure is , and in some embodiments, the support structure may be U-shaped.
In a preferred embodiment, the transverse transmission assembly comprises a sliding rail 10 horizontally arranged on the base 2, and a discharging vehicle 14 arranged on the sliding rail 10, wherein the discharging vehicle 14 is in sliding connection with the sliding rail 10;
the lifting structure is arranged at the top of the discharging car 14;
one end of the sliding rail 10 is positioned under the furnace body 5, and the other end extends out of the furnace frame 9;
in the case of a downward movement of the discharge tray 8, the discharge carriage 14 is located directly below the discharge tray 8. In this embodiment, as shown in fig. 1, the control cabinet 1 for controlling the discharging carriage 14 and the screw rod to rotate is further included, and the control cabinet 1 in this embodiment is in the prior art and is not described herein.
In a preferred embodiment, the lifting structure comprises an annular bearing bracket 15 horizontally arranged above the discharging car 14, and a plurality of struts vertically arranged between the annular bearing bracket 15 and the discharging car 14, and the plurality of struts are distributed along the circumference of the annular bearing bracket 15. Through setting up annular supporting seat 15, can carry out the bearing to the discharging dish 8 that vertical drive assembly transported down and the product on it, transversely shift out furnace body 5 bottom again, the product rapid cooling of being convenient for to make things convenient for the staff to shift the product.
In a preferred embodiment, the lifting structure further comprises a plurality of pallet elements 16 vertically arranged on the top of the annular supporting seat 15 and used for being in point contact with the bottom of the discharging tray 8, and the plurality of pallet elements 16 are uniformly distributed along the circumference of the annular supporting seat 15;
the struts are evenly distributed along the circumference of the annular bearing socket 15. In this embodiment, the tray 16 is disposed on the top of the annular supporting seat 15, and the tray 16 is in point contact with the discharge tray 8, so that the heat dissipation effect of the product on the discharge tray 8 can be improved, and meanwhile, water accumulation on the annular supporting seat 15 can be avoided, so as to affect the subsequent process. The pallet element 16 in this embodiment is made of steel and has a cross-shaped cross-section.
In a preferred embodiment, it further comprises a furnace cover 4 arranged on top of the furnace body 5 and hinged to the furnace body 5, and a cylindrical heating structure 6 arranged between the furnace bottom 7 and the furnace cover 4. Furnace lid 4 and furnace bottom plate 7 that furnace body 5 bottom set up at furnace body 5 top for the product can be followed vertical from the top down and is fed and ejection of compact, makes the inside structural layout of whole furnace body 5 distribute rationally, and the product moves to fluently. The heating structure 6 in this embodiment is cylindrical, so that the internal heating of the furnace body 5 is more uniform.
In a preferred embodiment, the water cooling device further comprises a water cooling module 12 for rapidly cooling the product and a flow cabinet 3 for monitoring water flow, wherein the water cooling module 12 comprises a water pump, a water supply pipe and a spray head arranged on the stove frame 9, and an opening of the spray head is arranged towards the discharge tray 8. The water cooling module 12 is arranged, so that the product can be rapidly cooled when the vertical transmission assembly conveys the product, and in the embodiment, as shown in fig. 2, the liquid collecting tank positioned below the vertical transmission assembly is arranged on the base 2, so that the cooled water can be conveniently collected and treated.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present utility model, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the utility model, and are also considered to be within the scope of the utility model.

Claims (10)

1. A drop-out tapping system for a chemical vapor deposition furnace, comprising:
the furnace body (5) is arranged in the air, and a furnace bottom plate (7) for placing products is arranged at the bottom of the furnace body (5);
the discharging structure comprises a vertical transmission assembly for transmitting the furnace bottom plate (7) and products on the furnace bottom plate (7) out of the furnace body (5) along the vertical direction, wherein the vertical transmission assembly comprises a supporting structure which is horizontally arranged and used for supporting the furnace bottom plate (7) and a driving structure which is used for driving the supporting structure to move up and down along the vertical direction.
2. The drop-out tapping system of a chemical vapor deposition furnace according to claim 1, further comprising a furnace frame (9) arranged on the base (2), wherein the furnace body (5) is fixed on the furnace frame (9) and the bottom thereof is suspended;
the bearing structure and the driving structure of the vertical transmission assembly are both positioned in the furnace frame (9).
3. The drop-out tapping system of a chemical vapor deposition furnace according to claim 2, wherein the driving structure comprises at least one lifting screw rod vertically arranged and positioned in a furnace frame (9), the top of the lifting screw rod is rotationally connected with the furnace frame (9), and the bottom of the lifting screw rod is rotationally connected with the base (2);
the bearing structure comprises a discharging disc (8) which is horizontally arranged and is in threaded connection with the lifting screw rod.
4. A drop-out tapping system for a chemical vapour deposition furnace according to claim 3, wherein the vertical drive further comprises at least one vertically arranged slide bar, the tapping tray (8) being in sliding connection with the slide bar in the vertical direction, and the lifting screw and the slide bar being arranged in the circumferential direction of the furnace body (5).
5. The drop-out tapping system of a chemical vapor deposition furnace according to claim 2, wherein the tapping structure further comprises a transverse transmission assembly horizontally arranged on the base (2) and used for conveying the product out of the furnace body (5) transversely in the horizontal direction; one end of the transverse transmission component is positioned under the furnace body (5), and the other end extends out of the furnace frame (9);
the transverse transmission assembly comprises a lifting structure for lifting the furnace bottom plate (7) and products thereof;
the shape of the supporting structure is or U-shaped, and the transverse moving direction of the transverse transmission component is consistent with the opening direction of the supporting structure or U-shaped;
the distance between the two free ends of the supporting structure is larger than the width of the lifting structure.
6. The drop-out tapping system of a chemical vapor deposition furnace according to claim 5, wherein the transverse transmission assembly comprises a sliding rail (10) horizontally arranged on a base (2), and a discharging vehicle (14) arranged on the sliding rail (10), wherein the discharging vehicle (14) is in sliding connection with the sliding rail (10);
the lifting structure is arranged at the top of the discharging car (14);
one end of the sliding rail (10) is positioned under the furnace body (5), and the other end extends out of the furnace frame (9);
under the condition that the discharging disc (8) moves downwards, the discharging vehicle (14) is positioned right below the discharging disc (8).
7. The drop-out tapping system of a chemical vapor deposition furnace according to claim 6, wherein the lifting structure comprises an annular support bracket (15) horizontally arranged above the discharge car (14), and a plurality of vertical support posts arranged between the annular support bracket (15) and the discharge car (14), wherein the plurality of support posts are distributed along the circumferential direction of the annular support bracket (15).
8. The drop-out tapping system of a chemical vapor deposition furnace according to claim 7, wherein the lifting structure further comprises a plurality of pallet elements (16) vertically arranged at the top of the annular supporting seat (15) and used for being in point contact with the bottom of the discharge tray (8), and the plurality of pallet elements (16) are uniformly distributed along the circumferential direction of the annular supporting seat (15);
the struts are distributed uniformly along the circumference of the annular bearing seat (15).
9. The drop-out tapping system of a chemical vapor deposition furnace according to claim 1, further comprising a furnace cover (4) provided on top of the furnace body (5) and hinged to the furnace body (5), and a cylindrical heating structure (6) provided between the furnace floor (7) and the furnace cover (4).
10. The drop-out tapping system of a chemical vapor deposition furnace according to claim 1, further comprising a water cooling module (12) for rapidly cooling the product, and a flow tank (3) for monitoring the water flow, wherein the water cooling module (12) comprises a water pump, a water supply pipe and a nozzle arranged on a furnace frame (9), and an opening of the nozzle is arranged towards a tapping plate (8).
CN202322321928.7U 2023-08-29 2023-08-29 Drop-out type tapping system of chemical vapor deposition furnace Active CN220619102U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322321928.7U CN220619102U (en) 2023-08-29 2023-08-29 Drop-out type tapping system of chemical vapor deposition furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322321928.7U CN220619102U (en) 2023-08-29 2023-08-29 Drop-out type tapping system of chemical vapor deposition furnace

Publications (1)

Publication Number Publication Date
CN220619102U true CN220619102U (en) 2024-03-19

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ID=90227891

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322321928.7U Active CN220619102U (en) 2023-08-29 2023-08-29 Drop-out type tapping system of chemical vapor deposition furnace

Country Status (1)

Country Link
CN (1) CN220619102U (en)

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